CN105896304A - Laser with high power and high beam quality - Google Patents

Laser with high power and high beam quality Download PDF

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Publication number
CN105896304A
CN105896304A CN201610375397.1A CN201610375397A CN105896304A CN 105896304 A CN105896304 A CN 105896304A CN 201610375397 A CN201610375397 A CN 201610375397A CN 105896304 A CN105896304 A CN 105896304A
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China
Prior art keywords
laser
crystal
beam quality
laser crystal
power
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CN201610375397.1A
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Chinese (zh)
Inventor
崔建丰
王迪
高涛
张亚楠
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Anshan Ziyu Laser Technology Co Ltd
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Anshan Ziyu Laser Technology Co Ltd
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Priority to CN201610375397.1A priority Critical patent/CN105896304A/en
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/16Solid materials
    • H01S3/163Solid materials characterised by a crystal matrix

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  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Lasers (AREA)

Abstract

The invention relates to a laser with high power and high beam quality. The laser comprises a fiber coupling system, a front cavity mirror, a laser crystal, an acoustic-optic Q-switched device and a rear cavity mirror arranged in sequence along an optical path; the fiber coupling system is composed of a pumping source, a transmission fiber and a focusing coupling system; the laser crystal has two ends with unequal sizes and a uniform transition variable section in the axial direction, wherein the small end is arranged in the front of the optical path; the outer surface of the laser crystal is a polished surface, two end faces are separately plated with an anti-reflection film for pumping light and fundamental frequency light, and the side surface of the laser crystal is plated with a high-reflection film for pumping light. By adopting the laser, the pumping light can be sufficiently absorbed after being reflected several times inside the laser crystal, so that the energy storage performance of the laser crystal and the conversion efficiency of the pumping light are improved; and under the condition that the laser output power is the same, the length of the laser crystal is shortened, the doping concentration and the thermal gradient are reduced, the thermal lens effect is improved, the beam quality is improved, and laser with high power and high beam quality is obtained.

Description

A kind of laser instrument of high-power and high-lighting beam quality
Technical field
The present invention relates to a kind of laser instrument, particularly relate to the laser instrument of a kind of high-power and high-lighting beam quality.
Background technology
Developing rapidly and extensively applying along with laser technology, laser instrument has become commercial production, scientific exploration, modern military Deng the important tool that field is indispensable.Beam quality is an important indicator of laser instrument, is laser beam directional transmissions ability Or the module of focusing spot energy intensity, the most in actual applications, the laser of high-power and high-lighting beam quality is always It it is the direction of industry pursuit.But along with the increase of laser output power, the factor such as heat effect can gradually be amplified, thus affected Beam quality, therefore high power and high light beam quality are that opposition exists, and are must weighed during laser instrument research and development make Problem.
In laser instrument manufacturing enterprise, conventional way is by increasing the length of operation material i.e. laser crystal minimizing heat ladder at present The beam quality degradation that degree causes, thus obtain the laser that there is high power with high light beam quality.But this method increase The chamber of laser instrument is long, constrains laser instrument to miniaturization integrated development, and improves manufacturing cost and the cycle of laser instrument, Add debugging difficulty, reduce Business Economic Benefit.
Summary of the invention
The invention provides the laser instrument of a kind of high-power and high-lighting beam quality, use the laser crystal with axial variable cross-section, and Laser crystal side is coated with the film that is all-trans pump light, makes pump light fully be inhaled after reflection for several times inside laser crystal Receive, strengthen energy storage and the conversion efficiency of pump light of laser crystal;Under conditions of laser output power is identical, shortens and swash Luminescent crystal length, reduces doping content and thermal gradient, improves thermal lensing effect, improves beam quality, it is thus achieved that high-power and high-lighting The laser of beam quality.
In order to achieve the above object, the present invention realizes by the following technical solutions:
The laser instrument of a kind of high-power and high-lighting beam quality, including the fiber coupling system set gradually along light path, front cavity mirror, swashs Luminescent crystal, acousto-optic Q modulation device and Effect of Back-Cavity Mirror;Described fiber coupling system is by pumping source, Transmission Fibers and focusing coupled system Composition;The two ends of laser crystal differ in size and have the variable cross-section of even transition vertically, and wherein small end one is placed on light path Front end;Laser crystal outer surface is burnishing surface, and both ends of the surface are coated with the anti-reflection film for pump light and fundamental frequency light, laser respectively Crystal side surface is coated with the high-reflecting film for pump light.
Described laser crystal be shaped as round platform, terrace with edge or prismatoid.
The both ends of the surface of described laser crystal are parallel or have an angle, angle≤5 °.
Centered by described pumping source, wavelength is the pumping source of 808nm, 880nm, 914nm, 938nm, 940nm or 946nm.
Described laser crystal is Nd:YAG crystal, Nd:YVO4 crystal, Nd:GGG crystal, Nd:YLF crystal, Nd:GdVO4 Crystal, Nd:YAP crystal, Nd:LuvO4 crystal or Yb:YAG crystal.
Described front cavity mirror, Effect of Back-Cavity Mirror are plano lens, concavees lens or convex lens.
The lumen type of laser instrument is straight chamber, v-shaped cavity, L-type chamber, Z-type chamber or ring-like chamber.
Compared with prior art, the invention has the beneficial effects as follows:
Operation material is round table-like, and there is certain low-angle side, prevents self-excitation from going out light.
1) laser crystal has axial variable cross-section, can prevent self-excitation from going out light;The film that is all-trans of laser crystal side can make pumping Light is multiple reflections in crystal, makes pump light fully absorb, and strengthens energy-storage property, improves pump light conversion efficiency;
2) the too low problem causing Pumping light absorption insufficient of doping content is solved, in the condition that laser output power is identical Under, reduce doping content and thermal gradient, improve thermal lensing effect, improve beam quality, for obtaining high-power and high-lighting beam quality Laser provide new approach;
3) be conducive to shortening the length of laser crystal, and shorten the required crystal generation time;Compression laserresonator chamber is long, Reduce laser dimensions;Reduce machine cost, increase the benefit, advance the integrated process of miniaturization of solid state laser;
4) add the heat transfer area of laser crystal, reduce temperature control difficulty to a certain extent;Laser stability improves, fall Low design difficulty, and installation and debugging are simple, it is simple to through engineering approaches is promoted.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention.
Fig. 2 is that pump light of the present invention is at laser crystal internal reflection path schematic diagram.
Fig. 3 is the structural representation of the embodiment of the present invention 1.
Fig. 4 is the structural representation of the embodiment of the present invention 2.
In figure: 1. fiber coupling system 2. front cavity mirror 3. laser crystal 4. acousto-optic Q modulation device 5. Effect of Back-Cavity Mirror 6. 0 ° of HR1064HT532 lens 7. 9.45 ° of total reflective mirror of frequency-doubling crystal 8. Effect of Back-Cavity Mirror total reflective mirror 10. and frequency crystal 11. 0 ° of HR 1064&532HT355 lens
Detailed description of the invention
Below in conjunction with the accompanying drawings the detailed description of the invention of the present invention is described further:
See Fig. 1, be the structural representation of the present invention, the laser instrument of a kind of high-power and high-lighting beam quality of the present invention, including Fiber coupling system 1, front cavity mirror 2, laser crystal 3, acousto-optic Q modulation device 4 and the Effect of Back-Cavity Mirror 5 set gradually along light path; Described fiber coupling system 1 is made up of pumping source, Transmission Fibers and focusing coupled system;The two ends size of laser crystal 3 is not Deng and there is the variable cross-section of even transition vertically, wherein small end one is placed on light path front end;The outer surface of laser crystal 3 is equal For burnishing surface, both ends of the surface are coated with the anti-reflection film for pump light and fundamental frequency light respectively, and laser crystal 3 side surface is coated with for pump The high-reflecting film of Pu light.
Described laser crystal 3 be shaped as round platform, terrace with edge or prismatoid.
The both ends of the surface of described laser crystal 3 are parallel or have an angle, angle≤5 °.
Centered by described pumping source, wavelength is the pumping source of 808nm, 880nm, 914nm, 938nm, 940nm or 946nm.
Described laser crystal 3 is Nd:YAG crystal, Nd:YVO4 crystal, Nd:GGG crystal, Nd:YLF crystal, Nd:GdVO4 Crystal, Nd:YAP crystal, Nd:LuvO4 crystal or Yb:YAG crystal.
Described front cavity mirror 2, Effect of Back-Cavity Mirror 5 are plano lens, concavees lens or convex lens.
The lumen type of laser instrument is straight chamber, v-shaped cavity, L-type chamber, Z-type chamber or ring-like chamber.
The laser crystal 3 that the present invention uses is not conventional cylinder, but axially have the round platform in gradual change cross section, terrace with edge or Prismatoid, the side of laser crystal 3 has a little inclination angle, prevents self-excitation from going out light.The film that is all-trans of laser crystal side Pump light multiple reflections in crystal can be made, make pump light fully absorb, strengthen energy-storage property, improve pump light conversion effect Rate.(as shown in Figure 2)
The operation principle of the laser instrument of a kind of high-power and high-lighting beam quality of the present invention is: the pump light that pumping source produces is by passing Losing fine injection, focus on laser crystal 3 after over-focusing coupled system (coupled lens), spoke is excited by laser crystal 3 Injection light, after light passes through acousto-optic Q modulation device 4, is exported by Effect of Back-Cavity Mirror 5, front cavity mirror 2 (being 0 ° of lens that are all-trans in Fig. 1), Constitute resonator cavity with Effect of Back-Cavity Mirror 5 (being 0 ° of lens that are all-trans in Fig. 1), make laser stably export.This laser structure is compact, Dress school is simple, and convenient amount metaplasia is produced.
Number of patent application is that the Chinese patent in 200920153040.4 (filing date on Mays 27th, 2009) discloses one Kind of " frequency-doubling crystal and the solid state laser of optical fiber pump arrangement ", including multiple laser diodes, bull's-eye with And truncated cone-shaped gain media.The cross section with larger area of described truncated cone-shaped gain media is positioned at bull's-eye side and (swashs Light incident side), gain media is placed in a contact fashion with bull's-eye.Having of described truncated cone-shaped gain media is bigger Being coated with pump light transmission and the optical thin film to the laser-bounce produced in gain media on the cross section of area, round platform table gain is situated between It is coated with the optical thin film semi-transparent semi-reflecting to the laser produced in gain media on the cross section with less area of matter, carrys out shape with this Become resonator cavity.
" frequency-doubling crystal and the solid state laser of optical fiber pump arrangement " although patent have employed truncated cone-shaped gain media, but its Operation principle and effect and laser crystal of the present invention 3 are entirely different, and concrete difference is as follows:
1), in the present invention, laser crystal 3 side is coated with pump light and is all-trans film, makes pump light reflect in laser crystal 3, Make pump light be fully absorbed increase laser crystal 3 energy-storage property, improve pump light conversion efficiency;And " frequency-doubling crystal and light The solid state laser of fine pump arrangement " described truncated cone-shaped gain media is only at two ends plated film.
2) pump light in the present invention is incident by laser crystal 3 small end, brings out greatly and penetrates;And " frequency-doubling crystal and fiber pump The solid state laser of pump apparatus " in, LASER Light Source is incident from the big end of truncated cone-shaped gain media.The present invention when small end incidence, From Lang Gela invariant, pump light incides the process of laser crystal 3 outgoing again and can be expressed as by formula:
Nuy=n1u1y1=n2u2y2
In above formula:
n、n1、n2Represent the refractive index of laser place medium, i.e. air refraction n, laser medium refractive index n respectively1, empty Gas refractive index n2
u、u1、u2Represent that laser is in laser crystal incidence end, laser crystal and laser crystal exit end beam divergence angle respectively;
y、y1、y2Represent that laser is in laser crystal incidence end, laser crystal and laser crystal exit end beam edge light respectively Distance to optical axis;
Assuming that laser crystal used is Nd:YAG, each refractive index is respectively n=1, n1=1.81, n2=1;Y in the present invention, y1、y2, be equivalent to the half of laser crystal 3 face height, then y2>y1>y>1;
U in summary2<u, therefore the present invention uses the mode from the incidence of laser crystal 3 small end, is conducive to compression pump light to send out Dissipate angle, and then reach to improve beam quality, it is thus achieved that the goal of the invention of the laser of high-power and high-lighting beam quality.
3) laser crystal 3 in the present invention includes that two ends differ in size and have variable cross-section all of even transition vertically Shape, such as round platform, terrace with edge or prismatoid.And the truncated cone-shaped in " frequency-doubling crystal and the solid state laser of optical fiber pump arrangement " Gain media clearly shape is only truncated cone-shaped.
4) effect using the laser crystal 3 of special shape and the full plated film in surface in the present invention is to make pump light at laser crystal 3 Inside is fully absorbed after reflection for several times, strengthens energy storage and the conversion efficiency of pump light of laser crystal 3;At laser Under conditions of output is identical, shorten laser crystal 3 length, reduce doping content and thermal gradient, improve thermal lensing effect, Improve beam quality, it is thus achieved that the laser of high-power and high-lighting beam quality;And " frequency-doubling crystal and the Solid State Laser of optical fiber pump arrangement Device " in use the effect of truncated cone-shaped gain media be the uniformity improving pumping, reduce the temperature difference of gain media and thus carry The various impacts come.
Following example are implemented under premised on technical solution of the present invention, give detailed embodiment and concrete Operating process, but protection scope of the present invention is not limited to following embodiment.In following embodiment, method therefor is as without saying especially Bright it is conventional method.
[embodiment 1]
As it is shown on figure 3, be a kind of laser instrument form based on basic structure of the present invention, 808nm pump light is by optical fiber coupled systemes Unite 1 outgoing focusing on 3Nd:YVO4 laser crystal 3;Laser crystal 3 stimulated radiation goes out the fundamental frequency light of 1064nm, 1064nm fundamental frequency light is modulated by acousto-optic Q modulation device 4.
In the present embodiment, front cavity mirror 2 is 45 ° of total reflective mirrors 9, and straight chamber is transformed into refrative cavity;Recycle 0 ° of HR1064HT532 Lens 6 fold light path, constitute resonator cavity with Effect of Back-Cavity Mirror total reflective mirror 8, utilize frequency-doubling crystal 7, by the fundamental frequency light of 1064nm Frequency multiplication is the green glow of 532nm, 0 ° of HR1064HT532 lens 6 export.
In the present embodiment, because fundamental frequency light beam quality is high, energy density is high, so light-phototranstormation efficiency improves, loss is few, The 532nm laser finally given, its pulse width, peak power is high, good beam quality, beneficially industrial process applications.
[embodiment 2]
As shown in Figure 4, in this enforcement just, on the architecture basics of [embodiment 2], add before frequency-doubling crystal 7 and frequency 0 ° of HR1064HT532 lens 6 is replaced with 0 ° of HR1064&532HT355 lens 11, by the light of 1064nm by crystal 9 By obtaining 355nm ultraviolet light after frequency multiplication and frequency.
The ultraviolet light that the present embodiment obtains has the advantages such as wavelength focusing short, easy, energy is high, pattern is good, is micro hole drilling, swashs The ideal laser light source of light delineation;The fields such as this light source is processed in VHD CD-ROM drive, precise materials, light printing are widely used.
The above, the only present invention preferably detailed description of the invention, but protection scope of the present invention is not limited thereto, and appoints What those familiar with the art is in the technical scope that the invention discloses, according to technical scheme and structure thereof Think equivalent or change in addition, all should contain within protection scope of the present invention.

Claims (7)

1. the laser instrument of a high-power and high-lighting beam quality, it is characterised in that include the optical fiber coupling set gradually along light path System, front cavity mirror, laser crystal, acousto-optic Q modulation device and Effect of Back-Cavity Mirror;Described fiber coupling system is by pumping source, transmission light Fine and focusing coupled system forms;The two ends of laser crystal differ in size and have the variable cross-section of even transition vertically, wherein Small end one is placed on light path front end;The outer surface of laser crystal is burnishing surface, and both ends of the surface are coated with respectively for pump light and base Frequently the anti-reflection film of light, laser crystal side surface is coated with the high-reflecting film for pump light.
The laser instrument of a kind of high-power and high-lighting beam quality the most according to claim 1, it is characterised in that described laser Crystal be shaped as round platform, terrace with edge or prismatoid.
The laser instrument of a kind of high-power and high-lighting beam quality the most according to claim 1, it is characterised in that described laser The both ends of the surface of crystal are parallel or have an angle, angle≤5 °.
The laser instrument of a kind of high-power and high-lighting beam quality the most according to claim 1, it is characterised in that described pumping Centered by source, wavelength is the pumping source of 808nm, 880nm, 914nm, 938nm, 940nm or 946nm.
The laser instrument of a kind of high-power and high-lighting beam quality the most according to claim 1, it is characterised in that described laser Crystal is Nd:YAG crystal, Nd:YVO4 crystal, Nd:GGG crystal, Nd:YLF crystal, Nd:GdVO4 crystal, Nd:YAP Crystal, Nd:LuvO4 crystal or Yb:YAG crystal.
The laser instrument of a kind of high-power and high-lighting beam quality the most according to claim 1, it is characterised in that described ante-chamber Mirror, Effect of Back-Cavity Mirror are plano lens, concavees lens or convex lens.
The laser instrument of a kind of high-power and high-lighting beam quality the most according to claim 1, it is characterised in that the chamber of laser instrument Type is straight chamber, v-shaped cavity, L-type chamber, Z-type chamber or ring-like chamber.
CN201610375397.1A 2016-05-31 2016-05-31 Laser with high power and high beam quality Pending CN105896304A (en)

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1645691A (en) * 2005-02-02 2005-07-27 中国科学院物理研究所 Active and passive Q-adjusted single longitudinal mode laser
CN101572383A (en) * 2009-05-27 2009-11-04 华北电力大学(保定) Optical fiber pump arrangement
CN101673918A (en) * 2009-05-19 2010-03-17 华北电力大学(保定) End-pumped solid-state laser
JP2011129826A (en) * 2009-12-21 2011-06-30 Mitsubishi Electric Corp Solid laser device
US20130301117A1 (en) * 2012-05-11 2013-11-14 Luis E. Zapata Methods, systems, and apparatus for high energy optical-pulse amplification at high average power

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1645691A (en) * 2005-02-02 2005-07-27 中国科学院物理研究所 Active and passive Q-adjusted single longitudinal mode laser
CN101673918A (en) * 2009-05-19 2010-03-17 华北电力大学(保定) End-pumped solid-state laser
CN101572383A (en) * 2009-05-27 2009-11-04 华北电力大学(保定) Optical fiber pump arrangement
JP2011129826A (en) * 2009-12-21 2011-06-30 Mitsubishi Electric Corp Solid laser device
US20130301117A1 (en) * 2012-05-11 2013-11-14 Luis E. Zapata Methods, systems, and apparatus for high energy optical-pulse amplification at high average power

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Application publication date: 20160824