CN208623094U - It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity - Google Patents
It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity Download PDFInfo
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- CN208623094U CN208623094U CN201821386033.4U CN201821386033U CN208623094U CN 208623094 U CN208623094 U CN 208623094U CN 201821386033 U CN201821386033 U CN 201821386033U CN 208623094 U CN208623094 U CN 208623094U
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Abstract
It can be used for the multiple of ultraviolet laser the utility model discloses a kind of and expand resonant cavity, by the equivalent thermal focal length of actual measurement laser crystal, the convex radius of suitable thermal compensation negative lens is selected to compensate the thermal lensing effect of laser crystal；Using the objective law of Propagation of Gaussian Beam, the G parameter of laser resonator is calculated, the intracavitary triple equivalent beam expanding lens of reasonable Arrangement laser resonance carry out triple expand to endovenous laser；The parallel plane lens of intracavitary insertion certain angle, with the line width eliminated color difference, narrow the intracavitary oscillation light of laser resonance；It is inserted into intracavitary three times display system in equivalent triple beam expanding lens large spots position, the large spot output of ultraviolet laser is obtained, improves the service life of ultraviolet laser, it is too fast to solve the problems, such as that high power UV laser output power is decayed.
Description
Technical field
The utility model relates to laser technology field more particularly to a kind of it can be used for the multiple of ultraviolet laser and expand resonance
Chamber.
Background technique
Pumped at end face of semiconductor solid state laser structure is simple, compact, good beam quality, it is stable, be easy to collect
At, therefore it is widely used in the laser processings such as laser marking, laser scribing, accurate resistance trimming, laser cleaning and body laser inner carving
Industry.
With the continuous improvement that industrial application requires laser processing effect and processing efficiency, market is to laser output wave
Long requirement is also higher and higher.Ultraviolet laser output wavelength is only the one third of infrared laser used at present, processing
Precision is greatly improved, and the retrofit of micron dimension may be implemented；The photon energy of ultraviolet laser is common infrared laser photon
Three times of energy make it possible that laser is cold worked, and application range has obtained great expansion；Swash in addition, 355nm is ultraviolet
The repetition rate of light device is high, to improve production efficiency, has saved social cost, has reduced energy consumption.In practical applications,
355nm ultraviolet laser provides new tool for the excision movement in micro Process, obtains in very thin material cold cut removes
Very high processing quality, will not cause thermal damage and hallrcuts, therefore, in such as glass, silicon wafer, wafer, ceramics to material
There is peculiar advantage in the processing of equal fragile materials.However, the photon energy due to ultraviolet laser is excessively powerful, ultraviolet laser transfer
Particle fraction generation in defeated path in air is buried in oblivion, and UV light optical path is caused to form local decompression.Particularly, in purple
The bigger place of outer laser power density, negative pressure are bigger.Therefore, the intracavitary air of laser resonance can transmit first to ultraviolet laser
Optical path is mobile, and then the small air of optical power density is mobile toward the big place of optical power density on UV light path.In ultraviolet laser
In resonant cavity, ultraviolet laser exit positions have maximum uv power density on frequency tripling, lead to chamber air eventually
It is slowly moved to frequency tripling crystal exit positions, the ultraviolet light exit positions on frequency tripling crystal of the dust in air are constantly attached
, so as to cause frequency tripling crystal melanism, finally result in the decline of ultraviolet laser output power, laser beam quality deteriorates.
Utility model content
It can be used for the multiple of ultraviolet laser the purpose of the utility model is to provide a kind of and expand resonant cavity, solve high power
The excessive problem for causing frequency tripling crystal service life too short of ultraviolet laser ultraviolet laser power density.
To achieve the above object, using following technical scheme:
It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity, including the first semiconductor laser pumping source component,
One laser crystal, the first thermal compensation negative lens, the second semiconductor laser pumping source component, second laser crystal, the second thermal compensation
Negative lens, third semiconductor laser pumping source component, third laser crystal, third thermal compensation negative lens, intracavitary three times display system；
The first semiconductor laser pumping source component is used to pump first laser crystal, and first by semiconductor laser pumping swashs
Luminescent crystal equivalent can optically become a convex lens due to equivalent thermal lensing effect, and the first thermal compensation negative lens is used for
The equivalent thermal lensing effect of first laser crystal is compensated, and first laser crystal and the first thermal compensation after being pumped
Negative lens constitutes the first heavy beam expanding lens；The second semiconductor laser pumping source component is used to pump second laser crystal, by
To semiconductor laser pumping second laser crystal due to equivalent thermal lensing effect, equivalent can optically become a convex lens
Mirror, the second thermal compensation negative lens is for compensating the equivalent thermal lensing effect of second laser crystal, and after being pumped
Second laser crystal and the second thermal compensation negative lens constitute the second heavy beam expanding lens；Third semiconductor laser pumping source component for pair
The pumping of third laser crystal, the third laser crystal by semiconductor laser pumping is due to equivalent thermal lensing effect, optically
It equivalent can become a convex lens, third thermal compensation negative lens is used to carry out the equivalent thermal lensing effect of third laser crystal
Compensation, and third laser crystal after being pumped and third thermal compensation negative lens constitute third weight beam expanding lens；First weight
Beam expanding lens, the second heavy beam expanding lens, third weight beam expanding lens are for successively amplifying hot spot；The first semiconductor laser pumping source component
It is adjacently positioned with third semiconductor laser pumping source component, the pumping optical path of the first semiconductor laser pumping source component and the second half
Conductor Laser pump source component pumping optical path formed the first angle, the pumping optical path of the second semiconductor laser pumping source component with
The pumping optical path of third semiconductor laser pumping source component forms the second angle；The intracavitary three times display system is arranged in three re-expands
The large spot position of Shu Jing.
Preferably, the multiple resonant cavity that expands further includes being arranged in the first intracavitary Brewster of laser resonance to be polarized
Device, the second Brewster polarizer, the third Brewster polarizer are respectively used to improve first laser crystal, second laser crystalline substance
The degree of polarization for the oscillation light that body, third laser crystal are excited.
Preferably, the multiple resonant cavity that expands further includes the first plane mirror, Q-switch, Q-switch, the first plane are anti-
Mirror is penetrated to be sequentially arranged on the reflected light path of the first thermal compensation negative lens.
Preferably, the multiple resonant cavity that expands further includes parallel plane lens；The parallel plane lens are arranged in
Three semiconductor laser pumping source components pump light road, and with third thermal compensation negative lens heterodoxy；The parallel plane lens
Normal direction and intracavitary oscillation optical path direction formed the non-straight angle of third, with play the role of narrowing vibrate optical linewidth.
Preferably, the intracavitary three times display system includes frequency tripling crystal, the method for the ultraviolet light gasing surface of frequency tripling crystal
Line direction and intracavitary oscillation optical transmission direction form the 4th non-straight angle, so that ultraviolet light is after the output of frequency tripling crystal end-face
Transmission direction and the transmission direction of oscillation light form the 5th angle.
Preferably, the multiple resonant cavity that expands further includes second plane mirror；The second plane mirror arrangement
In the pump light road of third semiconductor laser pumping source component, and it is arranged near the ultraviolet light gasing surface of frequency tripling crystal,
Ultraviolet light projects by second plane mirror after the output of frequency tripling crystal end-face.
Preferably, the first thermal compensation negative lens, the second thermal compensation negative lens, third thermal compensation negative lens are all made of
One plano-convex lens；The convex surface of the first thermal compensation negative lens close to first laser crystal arrange, the second thermal compensation negative lens
Convex surface arranges that the convex surface of third thermal compensation negative lens is arranged close to third laser crystal close to second laser crystal；Described first
Oscillation light high-reflecting film and pump light anti-reflection film are plated in plano-convex lens convex surface, and plane plates pump light anti-reflection film.
Preferably, the first semiconductor laser pumping source component, the second semiconductor laser pumping source component, third are partly led
It includes semiconductor laser, collimating lens, focusing lens that volumetric laser, which pumps source component,；The semiconductor laser output end band
There is optical fiber, fiber coupling is used to export, launch wavelength is 875nm~885nm；The collimation lens is placed in semiconductor laser
Between device, condenser lens, the focal point of collimation lens is arranged in the fiber-optic output of semiconductor laser；The collimation lens is adopted
With the second plano-convex lens, condenser lens uses third plano-convex lens；The convex surface of the collimation lens and corresponding condenser lens
Convex surface is positioned opposite；The two-sided plating pump light anti-reflection film of second plano-convex lens, third plano-convex lens.
Preferably, the first Brewster polarizer, the second Brewster polarizer, the third Brewster polarizer are adopted
With the first planar lens；The non-plated film of two light pass surfaces of first planar lens；The parallel plane lens use second
Planar lens, two light pass surface plate oscillation light anti-reflection film；First plane mirror uses third planar lens, leans on
The one side of nearly first thermal compensation negative lens plates oscillation light high-reflecting film；The second plane mirror uses fourth plane lens,
One side close to intracavitary three times display system plates oscillation light high-reflecting film.
Preferably, the first laser crystal, second laser crystal, third laser crystal be all made of Nd:YVO4 crystal,
Nd:YAG crystal or Nd:GaYVO4 crystal.
Using the above scheme, the beneficial effects of the utility model are:
The utility model carries out thermal compensation using thermal lensing effect of the thermal compensation negative lens to laser crystal, optically rises
The effect of concavees lens into simple beam expanding lens system；The pumping function of laser is improved using three road semiconductor laser pumping modes
Rate has dispersed the heat on single laser crystal, and reduce laser crystal bursts risk, and improving laser longtime running can
By property；Laser crystal and thermal compensation lens in the innovative arrangement intracavitary three roads semiconductor laser pumping system of laser resonance
Position, formed it is unique it is multiple expand resonant cavity, the vibration of intracavitary frequency tripling system position is significantly improved under short cavity elongate member
Light spot size is swung, the service life of frequency tripling crystal is extended, the stability of ultraviolet laser is improved, realizes solid violet
The high efficiency of outer laser, high-output power steady running.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the schematic diagram of the oscillation light optical path of the utility model；
Wherein, description of drawing identification:
1-the first semiconductor laser pumping source component, 2-first laser crystal,
3-the first thermal compensation negative lens, the 4-the second semiconductor laser pumping source component,
5-second laser crystal, the 6-the second thermal compensation negative lens,
7-third semiconductor laser pumping source components, 8-third laser crystals,
9-third thermal compensation negative lenses, 10-intracavitary three times display systems,
11-the first Brewster polarizer, 12-the second Brewster polarizer,
13-third Brewster the polarizers, the 14-the first plane mirror,
15-Q-switch, 16-parallel plane lens,
17-second plane mirrors, 101/401/701-semiconductor laser,
102/402/702-collimation lens, 103/403/703-condenser lens.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the utility model is described in detail.
Shown in 2, the utility model provide it is a kind of can be used for the multiple of ultraviolet laser and expand resonant cavity, packet
Include the first semiconductor laser pumping source component 1, first laser crystal 2, the first thermal compensation negative lens 3, the second semiconductor laser pump
Pu source component 4, second laser crystal 5, the second thermal compensation negative lens 6, third semiconductor laser pumping source component 7, third laser
Crystal 8, third thermal compensation negative lens 9, intracavitary three times display system 10；The first semiconductor laser pumping source component 1 for pair
First laser crystal 2 pumps, and the first thermal compensation negative lens 3 is for mending the equivalent thermal lensing effect of first laser crystal 2
It repays, and first laser crystal 2 after being pumped and the first thermal compensation negative lens 3 constitute the first heavy beam expanding lens；Described the second half
Conductor Laser pumps source component 4 and is used to pump second laser crystal 5, and the second thermal compensation negative lens 6 is used for second laser crystalline substance
The equivalent thermal lensing effect of body 5 compensates, and 6 structure of second laser crystal 5 and the second thermal compensation negative lens after being pumped
At the second heavy beam expanding lens；Third semiconductor laser pumping source component 7 is used to pump third laser crystal 8, and third thermal compensation is negative
Lens 9 are for compensating the equivalent thermal lensing effect of third laser crystal 8, and the third laser crystal 8 after being pumped
Third weight beam expanding lens is constituted with third thermal compensation negative lens 9；The first weight beam expanding lens, the second heavy beam expanding lens, third re-expand beam
Mirror is for successively amplifying hot spot；The first semiconductor laser pumping source component 1 and 7 phase of third semiconductor laser pumping source component
Neighbour's arrangement, the pump light of the pumping optical path of the first semiconductor laser pumping source component 1 and the second semiconductor laser pumping source component 4
Road forms the first angle (angle is obtuse angle), the pumping optical path and third semiconductor of the second semiconductor laser pumping source component 4
The pumping optical path of laser pump (ing) source component 7 forms the second angle (angle is obtuse angle)；The intracavitary three times display system 10 is arranged
In the large spot position of triple beam expanding lens.
Wherein, the multiple resonant cavity that expands further includes being arranged in the first intracavitary Brewster polarizer of laser resonance
11, the second Brewster polarizer 12, the third Brewster polarizer 13 are respectively used to raising first laser crystal 2, second and swash
The degree of polarization of luminescent crystal 5, the excited oscillation light of third laser crystal 8；The first Brewster polarizer 11 is placed in the first heat
On the reflected light path for compensating negative lens 3, and between the first thermal compensation negative lens 3 and Q-switch, the second Brewster polarizer
12 are placed between the first thermal compensation negative lens 3 and the second thermal compensation negative lens 6, and the third Brewster polarizer 13 is placed in the second heat
It compensates between negative lens 6 and third thermal compensation negative lens 9.The multiple resonant cavity that expands further includes the first plane mirror 14, Q
Switch 15, Q-switch 15, the first plane mirror 14 are sequentially arranged on the reflected light path of the first thermal compensation negative lens 3.It is described more
Re-expanding beam resonant cavity further includes parallel plane lens 16；The parallel plane lens 16 are arranged in third semiconductor laser pumping source
Component 7 pump light road, and with 9 heterodoxy of third thermal compensation negative lens；The normal direction and chamber of the parallel plane lens 16
Interior oscillation optical path direction forms the non-straight angle of third, to play the role of narrowing oscillation optical linewidth.
The intracavitary three times display system 10 includes frequency tripling crystal, the normal direction of the ultraviolet light gasing surface of frequency tripling crystal
The 4th non-straight angle is formed with intracavitary oscillation optical transmission direction, so that transmission side of the ultraviolet light after the output of frequency tripling crystal end-face
The 5th angle is formed to the transmission direction of oscillation light.The multiple resonant cavity that expands further includes second plane mirror 17；Institute
The pump light road that second plane mirror 17 is arranged in third semiconductor laser pumping source component 4 is stated, and is arranged in frequency tripling
Near the ultraviolet light gasing surface of crystal, ultraviolet light projects by second plane mirror 17 after the output of frequency tripling crystal end-face.
The first thermal compensation negative lens 3, the second thermal compensation negative lens 6, that third thermal compensation negative lens 9 is all made of first is flat
Convex lens；The convex surface of the first thermal compensation negative lens 3 close to first laser crystal 2 arrange, the second thermal compensation negative lens 6 it is convex
Face arranges that the convex surface of third thermal compensation negative lens 9 is arranged close to third laser crystal 8 close to second laser crystal 5.
The first semiconductor laser pumping source component 1, the second semiconductor laser pumping source component 4, third semiconductor swash
Optical pumping source component 7 includes semiconductor laser 101/401/701, collimation lens 102/402/702, condenser lens 103/
403/703；101/401/701 output end of semiconductor laser has optical fiber, uses fiber coupling to export, launch wavelength
For 875nm~885nm；The collimation lens 102/402/702 is placed in semiconductor laser 101/401/701, condenser lens
Between 103/403/703, the fiber-optic output of semiconductor laser 101/401/701 is arranged in collimation lens 102/402/702
Focal point；The collimation lens 102/402/702 uses the second plano-convex lens, and condenser lens 103/403/703 uses third
Plano-convex lens；The convex surface of the collimation lens 102/402/702 is with the convex surface of corresponding condenser lens 103/403/703 with respect to cloth
It sets；Second plano-convex lens, the two-sided of third plano-convex lens plate pump light anti-reflection film.
The first thermal compensation negative lens 3, the second thermal compensation negative lens 6, third thermal compensation negative lens 9 use the first plano-convex
Oscillation light high-reflecting film and pump light anti-reflection film are plated in lens, convex surface, and plane plates pump light anti-reflection film；First Brewster is polarized
Device 11, the second Brewster polarizer 12, the third Brewster polarizer 13 use the first planar lens；First plane is saturating
The non-plated film of two light pass surfaces of mirror；The parallel plane lens 16 use the second planar lens, two light pass surface plates vibration
Swing light anti-reflection film；First plane mirror 1 uses third planar lens, close to the one side of the first thermal compensation negative lens 3
Plate oscillation light high-reflecting film；The second plane mirror 17 uses fourth plane lens, close to intracavitary three times display system 10
Oscillation light high-reflecting film is plated on one side.The first laser crystal 2, second laser crystal 5, third laser crystal 8 are all made of Nd:YVO4
Crystal, Nd:YAG crystal or Nd:GaYVO4 crystal.
Utility model works principle:
Dotted line in Fig. 2 of the utility model is oscillation light optical path, is ultraviolet light output light path shown in A；Wherein, to light
The eyeglass of the restricted effect in road is the reflecting mirror of resonant cavity；Device among optical path is inserter instrument.
First semiconductor laser pumping source component 1 pumps first laser crystal 2, and the first thermal compensation negative lens 3 is right
The equivalent thermal lensing effect of first laser crystal 2 compensates.First laser crystal 2 is by semiconductor laser 101/401/
After 701 pumpings, it equivalent can become a convex lens on laser optics；First thermal compensation negative lens 3 is a plano-convex lens,
Convex surface and first laser crystal 2 are staggered relatively, since 3 convex surface of the first thermal compensation negative lens is for the vibration in reflection laser resonant cavity
Light is swung, can be equivalent to a concavees lens on laser optics.One concave lens and a convex lens, constitute simplest expansion
Shu Jing.For beam expanding lens, convex lens direction has thicker hot spot, and concavees lens direction hot spot is smaller.In order to enable intracavitary
There is the distribution of biggish laser facula, first laser crystal 2 is disposed adjacent to the side of three times display system 10 at three times display system 10
To.Similarly, second laser crystal 5 and the second thermal compensation negative lens 6 equivalent can also optically become a convex lens and one
A concavees lens.The superposition for the beam expanding lens that two are made of convex lens and concavees lens, in order to realize it is multiple expand target, second
The concavees lens of beam expanding lens must be adjacently positioned with the convex lens of the first beam expanding lens.That is, the second thermal compensation negative lens 6 and
One laser crystal 2 is adjacently positioned.Ibid, third laser crystal 8 and third thermal compensation negative lens 9 optically can also it is equivalent at
For a convex lens and a concavees lens, third thermal compensation negative lens 9 is adjacent with second laser crystal 5.In conclusion first swashs
Luminescent crystal 2 and the first thermal compensation negative lens 3 constitute the first heavy beam expanding lens, second laser crystal 5 and the second thermal compensation negative lens 6
The second heavy beam expanding lens is constituted, third laser crystal 8 and third thermal compensation negative lens 9 constitute third weight beam expanding lens.By three
After re-expanding beam, in shorter cavity length, the intracavitary oscillation light light of intracavitary 10 position of three times display system can be significantly expanded
Spot.
In order to ensure the polarization characteristic of intracavitary oscillation light, the degree of polarization of semiconductor laser 101/401/701, laser are improved
Three Brewster polarizers 11/12/13 are arranged in resonant cavity.At the same time, one piece is arranged by third laser crystal 8
Parallel plane lens 16,16 normal direction of parallel plane lens and intracavitary oscillation optical path form the non-straight angle of third, and (angle is not
It is right angle, as shown in figure 1 shown in α), to play the role of narrowing oscillation optical linewidth.In intracavitary three times display system 10, frequency tripling is brilliant
(angle is not straight to the normal direction of the ultraviolet light gasing surface of body with the 4th non-straight angle of intracavitary oscillation optical transmission direction formation
Angle, as shown in figure 1 shown in β), with different refractive index when being transmitted in frequency tripling crystal due to ultraviolet light from intracavitary oscillation light,
For ultraviolet light after the output of frequency tripling crystal end-face, ultra-violet light transmission direction and oscillation optical transmission direction form the 5th angle (such as Fig. 1
Shown in middle θ), in order to extract ultraviolet laser out of resonant cavity, second plane mirror is arranged laser resonance is intracavitary
17, ultraviolet light can be penetrated from 17 branch of second plane mirror.
The multiple design principle for expanding resonant cavity is elaborated from optical principle above, in order to enable oscillation light is humorous in laser
It shakes intracavitary formation stable oscillation stationary vibration, finally obtains the ultraviolet light output of high power and high beam quality, it is described multiple to expand resonant cavity also
It must satisfy the general transportation law and laser resonator G parameter designing standard of Gaussian beam.Therefore, it is necessary to humorous to laser
The chamber that shakes carries out the abcd matrix transimiison analysis of Gaussian beam, to determine position and the curvature half of the intracavitary optical element of laser resonance
The parameters such as diameter.
The convex surface of the first thermal compensation negative lens 3 arranges that plane swashs close to the first semiconductor close to first laser crystal 2
Optical pumping source component 1；The convex surface of second thermal compensation negative lens 6 arranges that plane is close to the second semiconductor close to second laser crystal 5
The convex surface of laser pump (ing) source component 4, third thermal compensation negative lens 9 arranges that plane is partly led close to third close to third laser crystal 8
Volumetric laser pumps source component 7.
In the above scheme, the first plane mirror 14 uses third planar lens, close to the first thermal compensation negative lens 3
Plane plate oscillation light high-reflecting film, reflectivity be greater than 99.9%；Second plane mirror 17 uses fourth plane lens, close
The plane of intracavitary three times display system 10 plates oscillation light high-reflecting film, and reflectivity is greater than 99.9%.In the above scheme, the Q-switch
15 be acousto-optic Q-switching or electro-optical Q-switch.
In the present embodiment, obtained using three single-ended pumpings of semiconductor laser when pump power is respectively 50W
The ultraviolet light output of 1.5mm diameter, exports relative to conventional 1mm ultraviolet hot spot, and spot diameter increases 50%.This shows
Effective to the expansion effect of ultraviolet laser hot spot using the multiple resonant cavity that expands, the hot spot for significantly improving ultraviolet laser is straight
Diameter.
In addition, having dispersed the heat on single laser crystal due to using three-rods system technology, having reduced laser crystal
Risk is burst, laser longtime running reliability is improved；Meanwhile the total pump power of laser has and is significantly greatly increased, and helps
In the high power steady running for realizing ultraviolet laser.
The utility model can also continue growing semiconductor laser pumping source under the mode that three tunnels pump, realize four tunnels,
Five tunnels, the pumping of even six tunnels, the arrangement of tracavity optical component is similar with the utility model, so that laser be greatly improved
Output power, it is ensured that laser high power and high beam quality output.
The above is only the preferred embodiments of the present utility model only, is not intended to limit the utility model, all practical at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the guarantor of the utility model within novel spirit and principle
Within the scope of shield.
Claims (10)
- It can be used for the multiple of ultraviolet laser 1. a kind of and expand resonant cavity, which is characterized in that including the first semiconductor laser pumping Source component, first laser crystal, the first thermal compensation negative lens, the second semiconductor laser pumping source component, second laser crystal, Two thermal compensation negative lenses, third semiconductor laser pumping source component, third laser crystal, third thermal compensation negative lens, intracavitary three Frequency doubling system；The first semiconductor laser pumping source component is used to pump first laser crystal, the first thermal compensation negative lens It is compensated for the equivalent thermal lensing effect to first laser crystal, and first laser crystal and the first heat after being pumped It compensates negative lens and constitutes the first heavy beam expanding lens；The second semiconductor laser pumping source component is used to pump second laser crystal Pu, the second thermal compensation negative lens is for compensating the equivalent thermal lensing effect of second laser crystal, and after being pumped Second laser crystal and the second thermal compensation negative lens constitute the second heavy beam expanding lens；Third semiconductor laser pumping source component for pair The pumping of third laser crystal, third thermal compensation negative lens are used to compensate the equivalent thermal lensing effect of third laser crystal, And the third laser crystal after being pumped and third thermal compensation negative lens constitute third weight beam expanding lens；Described first re-expands beam Mirror, the second heavy beam expanding lens, third weight beam expanding lens are for successively amplifying hot spot；The first semiconductor laser pumping source component and Three semiconductor laser pumping source components are adjacently positioned, the pumping optical path and the second semiconductor of the first semiconductor laser pumping source component The pumping optical path of laser pump (ing) source component forms the first angle, the pumping optical path and third of the second semiconductor laser pumping source component The pumping optical path of semiconductor laser pumping source component forms the second angle；The intracavitary three times display system is arranged in triple beam expanding lens Large spot position.
- It can be used for the multiple of ultraviolet laser 2. according to claim 1 and expand resonant cavity, which is characterized in that is described multiple Expanding resonant cavity further includes being arranged in the first intracavitary Brewster polarizer of laser resonance, the second Brewster polarizer, The three Brewster polarizers are respectively used to improve the vibration that first laser crystal, second laser crystal, third laser crystal are excited Swing the degree of polarization of light.
- It can be used for the multiple of ultraviolet laser 3. according to claim 2 and expand resonant cavity, which is characterized in that is described multiple Expanding resonant cavity further includes the first plane mirror, Q-switch, and Q-switch, the first plane mirror are sequentially arranged in the first thermal compensation On the reflected light path of negative lens.
- It can be used for the multiple of ultraviolet laser 4. according to claim 3 and expand resonant cavity, which is characterized in that is described multiple Expanding resonant cavity further includes parallel plane lens；The parallel plane lens are arranged in third semiconductor laser pumping source component Pump light road, and with third thermal compensation negative lens heterodoxy；The normal direction of the parallel plane lens and intracavitary oscillation optical path Direction forms the non-straight angle of third, to play the role of narrowing oscillation optical linewidth.
- It can be used for the multiple of ultraviolet laser 5. according to claim 4 and expand resonant cavity, which is characterized in that is described intracavitary Three times display system includes frequency tripling crystal, the normal direction of the ultraviolet light gasing surface of frequency tripling crystal and intracavitary oscillation optical transport side To the 4th non-straight angle is formed, so that the transmission side of transmission direction and oscillation light of the ultraviolet light after the output of frequency tripling crystal end-face To the 5th angle of formation.
- It can be used for the multiple of ultraviolet laser 6. according to claim 5 and expand resonant cavity, which is characterized in that is described multiple Expanding resonant cavity further includes second plane mirror；The second plane mirror is arranged in third semiconductor laser pumping source group The pump light road of part, and be arranged near the ultraviolet light gasing surface of frequency tripling crystal, ultraviolet light is defeated in frequency tripling crystal end-face It is projected by second plane mirror after out.
- It can be used for the multiple of ultraviolet laser 7. according to claim 1 and expand resonant cavity, which is characterized in that described first Thermal compensation negative lens, the second thermal compensation negative lens, third thermal compensation negative lens are all made of the first plano-convex lens；Described first vulcanizes The convex surface for repaying negative lens arranges that the convex surface of the second thermal compensation negative lens is close to second laser crystal cloth close to first laser crystal It sets, the convex surface of third thermal compensation negative lens is arranged close to third laser crystal；Plate oscillation light in the convex surface of first plano-convex lens High-reflecting film and pump light anti-reflection film, plane plate pump light anti-reflection film.
- It can be used for the multiple of ultraviolet laser 8. according to claim 1 and expand resonant cavity, which is characterized in that described first Semiconductor laser pumping source component, the second semiconductor laser pumping source component, third semiconductor laser pumping source component include Semiconductor laser, collimating lens, focusing lens；The semiconductor laser output end has optical fiber, uses fiber coupling Output, launch wavelength are 875nm~885nm；The collimation lens is placed between semiconductor laser, condenser lens, semiconductor The focal point of collimation lens is arranged in the fiber-optic output of laser；The collimation lens uses the second plano-convex lens, focuses saturating Mirror uses third plano-convex lens；The convex surface of the collimation lens and the convex surface of corresponding condenser lens are positioned opposite；Described second Plano-convex lens, the two-sided of third plano-convex lens plate pump light anti-reflection film.
- It can be used for the multiple of ultraviolet laser 9. according to claim 6 and expand resonant cavity, which is characterized in that described first The Brewster polarizer, the second Brewster polarizer, the third Brewster polarizer use the first planar lens；Described first The non-plated film of two light pass surfaces of planar lens；The parallel plane lens use the second planar lens, two light pass surface is equal Plate oscillation light anti-reflection film；First plane mirror uses third planar lens, close to the one of the first thermal compensation negative lens Plate oscillation light high-reflecting film in face；The second plane mirror uses fourth plane lens, close to the one of intracavitary three times display system Plate oscillation light high-reflecting film in face.
- It can be used for the multiple of ultraviolet laser 10. according to claim 1 and expand resonant cavity, which is characterized in that described It is brilliant that one laser crystal, second laser crystal, third laser crystal are all made of Nd:YVO4 crystal, Nd:YAG crystal or Nd:GaYVO4 Body.
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| CN201821386033.4U CN208623094U (en) | 2018-08-27 | 2018-08-27 | It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity |
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| CN201821386033.4U CN208623094U (en) | 2018-08-27 | 2018-08-27 | It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108767633A (en) * | 2018-08-27 | 2018-11-06 | 深圳市格镭激光科技有限公司 | It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity |
| CN111916985A (en) * | 2020-08-24 | 2020-11-10 | 苏州索拉科技有限公司 | Laser for generating column vector beam |
| CN116722429A (en) * | 2023-08-10 | 2023-09-08 | 北京卓镭激光技术有限公司 | High-beam-quality long-pulse-width green laser |
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2018
- 2018-08-27 CN CN201821386033.4U patent/CN208623094U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108767633A (en) * | 2018-08-27 | 2018-11-06 | 深圳市格镭激光科技有限公司 | It is a kind of to can be used for the multiple of ultraviolet laser and expand resonant cavity |
| CN108767633B (en) * | 2018-08-27 | 2024-02-02 | 深圳市格镭激光科技有限公司 | Multiple beam-expanding resonant cavity for ultraviolet laser |
| CN111916985A (en) * | 2020-08-24 | 2020-11-10 | 苏州索拉科技有限公司 | Laser for generating column vector beam |
| CN116722429A (en) * | 2023-08-10 | 2023-09-08 | 北京卓镭激光技术有限公司 | High-beam-quality long-pulse-width green laser |
| CN116722429B (en) * | 2023-08-10 | 2023-10-13 | 北京卓镭激光技术有限公司 | High-beam-quality long-pulse-width green laser |
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