CN105895480A - Ion beam current acquisition device - Google Patents
Ion beam current acquisition device Download PDFInfo
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- CN105895480A CN105895480A CN201410581873.6A CN201410581873A CN105895480A CN 105895480 A CN105895480 A CN 105895480A CN 201410581873 A CN201410581873 A CN 201410581873A CN 105895480 A CN105895480 A CN 105895480A
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- China
- Prior art keywords
- ion beam
- beam current
- permanent magnet
- light barrier
- line gap
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention discloses an ion beam current acquisition device, which comprises a beam receiving cup (1), a front light barrier (2), an air cooling device (3), a lateral light barrier (4), a permanent magnet (5) and a beam current gap (6), wherein ion beam current gets into the beam receiving cup (1) to be measured through the beam current gap (6) under a focusing effect of the permanent magnet (5); the front light barrier (2) and the lateral light barrier (4) block ion beams outside the beam current gap (6) so as to prevent the ion beams from bombarding the beam receiving cup (1) directly; and the air cooling device (3) carries out cooling on the beam receiving cup (1).
Description
Technical field
The present invention relates to the measurement apparatus of a kind of semiconductor applications process equipment, particularly relate to the mode of a kind of accurate measurement, this device is injection, the indispensable device of process test in ion implantation apparatus, and this device is one of key device in mental retardation large beam ion injection equipment.
Background technology
Along with the development of semiconductor technology, the stability of line and the precision of measurement have the biggest impact for ion implant systems ever more important, the industrialization on injecting the quality of product, efficiency and ion implantation apparatus.Line harvester plays vital effect in ion implantation process, and line harvester is that system is measured in the front road before injection technology realizes, no matter as long as at any time silicon chip injects it is first necessary to first carry out the collection of line, measurement.The technique that just can carry out the later stage through accurate ion dose after calibrating is injected.Line harvester importance in ion implantation apparatus is apparent.
Summary of the invention
The invention discloses a kind of ion beam current harvester, be mainly used in ion implantation machine system, the precision of the gathered line of the ion beam current harvester stability to ion implantation technology, and the work efficiency of injected system plays vital effect.
The present invention is achieved through the following technical solutions:
Ion beam current harvester, including: connect bundle cup (1), front light barrier (2), air-cooling apparatus (3), side block tabula rasa (4), permanent magnet (5) and line gap (6).It is characterized in that: ion beam current is entered by line gap (6) to connect in bundle cup (1) under the focussing force of permanent magnet (5) and measures.Front light barrier (2) and side block tabula rasa (4) block the ion beam outside line gap (6), preventing ion beam from directly bombarding and connect bundle cup (1), air cooling dress (3) is put docking bundle cup (1) and is cooled down.
Detailed description of the invention
1, including: connect bundle cup (1), front light barrier (2), air-cooling apparatus (3), side block tabula rasa (4), permanent magnet (5) and line gap (6).
2, ion beam current gatherer process is: ion beam current first has to after permanent magnet focusing enter connect bundle cup (1) by line gap (6), make the ion beam current after over-focusing measure more precisely, stablize, ensure the stability of later stage dosage control.
3, permanent magnet (5), focussing force so that the ion beam current after over-focusing is measured more precisely, stablized, and ensures the stability of later stage dosage control.
4, front light barrier (2) and side block tabula rasa (4), block the ion beam outside line gap (6), prevents ion beam from directly bombarding and connects bundle cup (1).
5, air cooling dress (3), controls to connect the temperature of bundle cup (1).
The content of patent of the present invention is elaborated by the specific embodiment of patent of the present invention.For persons skilled in the art, any obvious change on the premise of without departing substantially from patent spirit of the present invention, it done, all constitute the infringement to patent of the present invention, corresponding legal responsibility will be undertaken.
Accompanying drawing explanation
Fig. 1 ion beam current harvester frame for movement general assembly drawing
Claims (4)
1. ion beam current harvester, including: connect bundle cup (1), front light barrier (2), gas
Device for cooling (3), side block tabula rasa (4), permanent magnet (5) and line gap (6).It is special
Levy and be: ion beam current passes through line gap (6) under the focussing force of permanent magnet (5)
Entrance connects in bundle cup (1) and measures.Front light barrier (2) and side block tabula rasa (4) block
Ion beam outside line gap (6), prevents ion beam from directly bombarding and connects bundle cup (1), gas
Cold charge (3) is put docking bundle cup (1) and is cooled down.
2. a kind of ion beam current harvester as shown in claim 1, permanent magnet (5)
It is characterized in that: ion beam current is first had to through permanent magnet focusing by line gap (6)
Rear entrance connects bundle cup (1) so that the ion beam current after over-focusing is measured more precisely, stablized,
Ensure the stability of later stage dosage control.
3. a kind of ion beam current harvester as shown in claim 1, front light barrier (2)
It is characterized in that with side block tabula rasa (4): block the ion beam outside line gap (6), anti-
Only ion beam directly bombards and connects bundle cup (1).
4. a kind of ion beam current harvester as shown in claim 1, air cooling dress (3) its
It is characterised by: control to connect the temperature of bundle cup (1).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410581873.6A CN105895480A (en) | 2014-10-27 | 2014-10-27 | Ion beam current acquisition device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410581873.6A CN105895480A (en) | 2014-10-27 | 2014-10-27 | Ion beam current acquisition device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105895480A true CN105895480A (en) | 2016-08-24 |
Family
ID=57000536
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410581873.6A Pending CN105895480A (en) | 2014-10-27 | 2014-10-27 | Ion beam current acquisition device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105895480A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108882497A (en) * | 2018-07-04 | 2018-11-23 | 中国原子能科学研究院 | A kind of line reception device for proton beam streamline end |
| CN108895874A (en) * | 2018-07-04 | 2018-11-27 | 中国原子能科学研究院 | A kind of cooling device for proton beam irradiation experiment test target |
-
2014
- 2014-10-27 CN CN201410581873.6A patent/CN105895480A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108882497A (en) * | 2018-07-04 | 2018-11-23 | 中国原子能科学研究院 | A kind of line reception device for proton beam streamline end |
| CN108895874A (en) * | 2018-07-04 | 2018-11-27 | 中国原子能科学研究院 | A kind of cooling device for proton beam irradiation experiment test target |
| CN108895874B (en) * | 2018-07-04 | 2019-09-13 | 中国原子能科学研究院 | A kind of cooling device for proton beam irradiation experiment test target |
| CN108882497B (en) * | 2018-07-04 | 2019-11-08 | 中国原子能科学研究院 | A kind of line reception device for proton beam streamline end |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20160824 |
|
| WD01 | Invention patent application deemed withdrawn after publication |