CN105890752B - A kind of optical fiber grating regulating system for improving detector array spectral resolution - Google Patents
A kind of optical fiber grating regulating system for improving detector array spectral resolution Download PDFInfo
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 31
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- 238000003384 imaging method Methods 0.000 claims abstract description 42
- 238000005086 pumping Methods 0.000 claims abstract description 18
- 238000002347 injection Methods 0.000 claims abstract description 9
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- 238000000985 reflectance spectrum Methods 0.000 claims abstract description 5
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- 239000000835 fiber Substances 0.000 claims description 15
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- 230000011218 segmentation Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/02—Details
- G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
- G01J3/0218—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using optical fibers
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- G—PHYSICS
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
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- G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
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- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2803—Investigating the spectrum using photoelectric array detector
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- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/2823—Imaging spectrometer
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/45—Interferometric spectrometry
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Abstract
The invention provides a kind of optical fiber grating regulating system for improving detector array spectral resolution,The demodulating system includes pumping source,Wavelength division multiplexer,Bragg grating,Diaphragm,Slit,Collimating mirror,Spectro-grating,Imaging lens and linear array detector,Piezoelectric-actuator and voltage control system,Wherein described pumping source,Wavelength division multiplexer and bragg grating are sequentially connected,The wavelength division multiplexer connects diaphragm simultaneously,Enter bragg grating after the coupling that the light that the pumping source is sent passes through wavelength division multiplexer,The reflectance spectrum of the bragg grating enters optical fiber grating regulating system as injection light,After injection light is by slit,Pass sequentially through collimating mirror,Spectro-grating,The reflection of imaging lens,Finally converge on linear array detector,Wherein described slit or linear array detector can move left and right slight distance along long axis direction,Wherein described collimating mirror,Spectro-grating,Imaging lens can be along the counterclockwise or minute angle that turns clockwise.
Description
Technical field
The present invention relates to sensory field of optic fibre, more particularly to a kind of fiber grating for improving detector array spectral resolution
Demodulating system.
Background technology
Fiber grating is a kind of novel passive sensing element, has high sensitivity, and anti-electromagnetic interference capability is strong, corrosion-resistant etc.
Plurality of advantages, since for sensing, the development of Fast Persistence is had been achieved for, led in Aero-Space, building structure, oil etc.
Had broad application prospects in terms of the safety monitoring in domain.Optical fiber grating regulating system is the key component of whole sensor-based system,
Realize that high accuracy, high-resolution, dynamic and static parameter combine, multipoint multiplexing detection and low cost are fiber grating demodulation technologies
The trend of development.The method of optical fibre interrogation have it is a variety of, tuning F-P filter methods be only used for measure static strain, tunable laser
The cost of device method is very high, and non-equilibrium M-Z interferometric methods are easily affected by environment, are unfavorable for engineer applied.As optics is visited in recent years
Survey the fast development of device so that Miniature optical fiber spectrometer is fast-developing, the optical fibre interrogation technology based on light spectrum image-forming method also with
Grow up.Fiber Bragg grating (FBG) demodulator small volume based on light spectrum image-forming method, integration degree are high, available for measurement it is static and
Dynamic strain, there are outstanding advantages in numerous demodulation methods, be an important directions of demodulating system research, wherein, demodulation
The Performance of Optical System of instrument directly affects the resolution ratio of system, be a key of (FBG) demodulator.
The optical system structure species of grating spectrograph is more, and what application was commonplace at present is Czerny-Turner light
Line structure, i.e., using two sides concave mirror as collimating mirror and imaging lens, dispersion element is used as using plane reflection grating.This
On the one hand it is that cost of reproduction is cheap because plane grating design difficulty is low, diffraction efficiency is high；On the other hand it is due to Czerny-
Turner structures are adjustable and the structural parameters of arrangement are more, can avoid secondary or multiple diffraction, be easy to use photovoltaic array
Detector receives spectrum.Common Small-sized C zerny-Turner spectrometers are broadly divided into 2 kinds of structures of chiasma type and M types.M types are
The classical architecture of Czerny-Turner spectrometers, representative products are the Avaspec series smalls that Dutch Avantes companies develop
Fiber spectrometer；Chiasma type is then high by its differentiation, its more compact structure, space availability ratio.However, due to linear array figure
As sensor pixel Limited Number, spectral space resolution ratio is restricted.
Accordingly, it is capable to which no realize that high-resolution gration wavelength accurately demodulates in the case where line array sensor pixel is limited, it is
This area technical problem urgently to be resolved hurrily.
The content of the invention
It is an object of the invention to provide a kind of optical fiber grating regulating system for improving detector array spectral resolution, institute
Stating demodulating system includes pumping source, wavelength division multiplexer, bragg grating, diaphragm, slit, collimating mirror, spectro-grating, imaging
Mirror and linear array detector, piezoelectric-actuator and voltage control system, wherein the pumping source, wavelength division multiplexer and Prague light
Fine grating is sequentially connected, and the wavelength division multiplexer connects diaphragm simultaneously, and the light that the pumping source is sent passes through wavelength division multiplexer
Enter bragg grating after coupling, the reflectance spectrum of the bragg grating enters fiber grating demodulation as injection light
System, after injection light is by slit, the reflection of collimating mirror, spectro-grating, imaging lens is passed sequentially through, finally converge to linear array detection
On device, wherein the slit or linear array detector can move left and right slight distance along long axis direction, or the collimating mirror, point
In light grating, imaging lens it is any can along counterclockwise or the minute angle that turns clockwise.
Preferably, at least two slits, collimating mirror, spectro-grating, imaging lens and linear array detector are in detection process
Middle mobile slight distance or rotation minute angle.
Preferably, the slight distance is 0-1 centimetres.
Preferably, the minute angle is 10 ° -30 °
Preferably, the slit, collimating mirror, spectro-grating, imaging lens and linear array detector by piezoelectric-actuator come
Adjust at a high speed.
Preferably, the method for the rotation minute angle is as follows：
A) piezoelectric-actuator is adjusted to least significant end, and this voltage is initial adjustment voltage；
B) it is initial spectrum to record least significant end spectroscopic data；
C) half step distance regulation piezoelectric-actuator, it is position to calculate current light spectrum and initial spectrum, the piezoelectric-actuator
Servo is put, controls collimating mirror, spectro-grating, imaging lens to rotate minute angle by input position instruction, to the sky of incident light
Between position be adjusted, it is final to determine light spectrum image-forming position；
D) first the degree of correlation peak value when regulation voltage be recorded as eventually adjust voltage；
E) some grades being divided between tune voltage by initial adjustment voltage and eventually, demodulation every time measures to each grade, with
Obtain higher spatial resolution.
Preferably, the concrete processing procedure of the sub-step b) is as follows：
When there are 256 pixels, then 256 subsection integral values can be obtained：{ I0, I1, I2 ... ... I255 }, when
Pixel along a direction fine motion scan when, obtain another ordered series of numbers：I0 ', I1 ', and I2 ' ... ... I255 ' }, before this ordered series of numbers
The former is gone, is obtained：{ I0 '-I0, I1 '-I1, I2 '-I2 ... ... I255 '-I255, }, i.e. { G1-G0, G2-G1, G3-
G2,……}；Wherein G0 represents the light intensity true value of the 0th position, and G1 represents the light intensity value of 1 position；This ordered series of numbers is summed, obtained
To { G1-G0, G2-G0, G3-G0 ... ... G255-G0 }, what is so obtained is the new value after finely tuning for the first time, followed by for the second time
New value after fine setting, if having finely tuned n times, just obtain the interpolation of n times.
Preferably, the method for the mobile slight distance is as follows：
A) piezoelectric-actuator is adjusted to least significant end, and this voltage is initial adjustment voltage；
B) it is initial spectrum to record least significant end spectroscopic data；
C) half step distance regulation piezoelectric-actuator, it is position to calculate current light spectrum and initial spectrum, the piezoelectric-actuator
Servo is put, controls slit or linear array detector to move slight distance by input position instruction, to the locus of incident light
It is adjusted, it is final to determine light spectrum image-forming position；
D) first the degree of correlation peak value when regulation voltage be recorded as eventually adjust voltage；
E) some grades being divided between tune voltage by initial adjustment voltage and eventually, demodulation every time measures to each grade, with
Obtain higher spatial resolution.
Preferably, the concrete processing procedure of the sub-step b) is as follows：
When there are 256 pixels, then 256 subsection integral values can be obtained：{ I0, I1, I2 ... ... I255 }, when
Pixel along a direction fine motion scan when, obtain another ordered series of numbers：I0 ', I1 ', and I2 ' ... ... I255 ' }, before this ordered series of numbers
The former is gone, is obtained：{ I0 '-I0, I1 '-I1, I2 '-I2 ... ... I255 '-I255, }, i.e. { G1-G0, G2-G1, G3-
G2,……}；Wherein G0 represents the light intensity true value of the 0th position, and G1 represents the light intensity value of 1 position；This ordered series of numbers is summed, obtained
To { G1-G0, G2-G0, G3-G0 ... ... G255-G0 }, what is so obtained is the new value after finely tuning for the first time, followed by for the second time
New value after fine setting, if having finely tuned n times, just obtain the interpolation of n times.
It should be appreciated that foregoing description substantially and follow-up description in detail are exemplary illustration and explanation, should not
As the limitation to the claimed content of the present invention.
Brief description of the drawings
With reference to the accompanying drawing enclosed, the present invention more purpose, function and advantages will pass through the as follows of embodiment of the present invention
Description is illustrated, wherein：
Fig. 1 is the structure according to the optical fiber grating regulating system of the raising line scan image sensor spectral resolution of the present invention
Schematic diagram；
Fig. 2 shows the optical fiber grating regulating system for being translated using slit and improving line scan image sensor spectral resolution
Structural representation；
Fig. 3 shows the knot that the optical fiber grating regulating system for improving detector array spectral resolution is finely tuned using collimating mirror
Structure schematic diagram；
Fig. 4 schematically shows the optical fiber grating regulating system that detector array spectral resolution is improved using fine motion grating
Structural representation；
Fig. 5 schematically shows the optical fiber grating regulating system finely tuned using imaging lens and improve detector array spectral resolution
Structural representation；
Fig. 6 schematically shows the fiber grating demodulation finely tuned using linear array detector and improve detector array spectral resolution
The structural representation of system；
Fig. 7 schematically shows the fiber grating demodulation system of the raising line scan image sensor spectral resolution according to the present invention
The flow chart of the feedback of system；
Fig. 8 (a) shows that a light intensity in space is in one-dimensional Gaussian curve distribution map；
Result figure after the multiple measurement results interpolation that Fig. 8 (b) is shown when not adjusting slit after scanning；
The result figure after multiple measurement results interpolation when Fig. 8 (c) shows regulation slit after scanning.
Embodiment
Fig. 1 is the structure according to the optical fiber grating regulating system of the raising line scan image sensor spectral resolution of the present invention
Schematic diagram；A kind of fiber grating that line scan image sensor spectral resolution is improved using collimated light path fine motion provided by the invention
Demodulating system 100 is as shown in figure 1, the optical fiber grating regulating system 100 includes pumping source (LD) 101, wavelength division multiplexer (WDM)
102nd, bragg grating (FBG) 103, diaphragm 104, slit 105, spectro-grating 106, collimating mirror 107, the and of imaging lens 108
Linear array detector (CCD) 109.Pumping source 101, wavelength division multiplexer 102 and bragg grating 103 are sequentially connected, and wavelength-division is multiple
Diaphragm 104 is connected with device 102 simultaneously.Enter Prague light after the coupling that the light that pumping source 101 is sent passes through wavelength division multiplexer 102
Fine grating 103, the reflectance spectrum of bragg grating 103 enter optical fiber grating regulating system as injection light.Injection light passes through
After slit 105, the reflection of collimating mirror 106, spectro-grating 107, imaging lens 108 is passed sequentially through, finally converges to linear array detector
(CCD) on 109.
First, by pumping source 101, wavelength division multiplexer 102, the welding in the manner shown in figure 1 of bragg grating 103, its
Middle bragg grating 103 should have higher reflectivity and narrower line width.Ripple according to the embodiment of the present invention
The parameter selection of division multiplexer (WDM) 102, bragg grating (FBG) 103 is required to same pumping wavelength, laser emitting ripple
Long parameter matching, specific parameter are as shown in table 1.
Table 1 according to the present invention demodulating system reflectance spectrum light source parameters
If in embodiment from core diameter be 10/125 μm of Er-doped fiber as gain media, pumping source LD tail optical fibers, wavelength-division
Multiplexer WDM need to choose same model core diameter.Pumping source LD output wavelength 976nm, wavelength division multiplexer WDM operation wavelength 976/
1550nm, bragg grating FBG selection range are 1530nm-1560nm, can obtain laser output within the range.Experiment
It need to be chosen together as gain media, pumping source LD tail optical fibers, wavelength division multiplexer WDM for 10/125 μm of Yb dosed optical fiber from core diameter in if
Template core diameter.Pumping source LD is 915nm single-mode outputs, wavelength division multiplexer WDM operation wavelength 915/1064nm, bragg fiber
Grating FBG is chosen near 1064nm, can obtain laser output within the range.
The reflected light of bragg grating 103 is irradiated to collimating mirror 106 by diaphragm 104 as incident light a and maintains light
The collimation of beam, then collimated light, which is irradiated on spectro-grating 107, carries out diffraction light splitting, afterwards by imaging lens 108, converges in
Linear array detector 109.
Spectro-grating 107 can be represented by formula (1)
N λ=d (sin α ± sin β) (1)
Wherein n is the order of spectrum, n=0, ± 1, ± 2 ...；α is incidence angle；β is angle of reflection；θ is blaze angle；D is grating
Constant.
N=0 is zero order spectrum, and now, β is unrelated with λ, i.e., is acted on without light splitting；N=± 1, ± 2 correspond to first-order spectrum and
Second order spectrum, wherein first-order spectrum energy is strong, is divided available for realizing.Grating resolution is unrelated with wavelength, the spectrum after separation
Belong to and arrange spectrum, the theoretical resolution of grating is grating line number and the product of spectrum level, there can be formula (2) expression
R=nN (2)
It is 50mm for width, groove number is 1200/mm grating, and the resolution ratio of its first-order spectrum is 6 × 104.
Using the reflected light of bragg grating 103 as injection light source, the spectrum width of incident light is so reduced, is divided in grating
Resolution can obtain under conditions of determining and more be spaced finer interference fringe.Now to slit, diaphragm, spectro-grating, standard
Straight mirror, imaging lens and linear array detector are adjusted, and control slit micro-shifting dynamic by input position instruction or control light splitting light
Micro- rotation of grid, collimating mirror, imaging lens and linear array detector, is adjusted to the locus of incident light, then incides imaging
The light path of mirror changes, and the striped converged on linear array detector also occurs to change accordingly, final to determine light spectrum image-forming position
Put.
Specifically, it is described in detail by following examples.
Embodiment 1
Fig. 1 schematically shows the structural representation for the optical fiber grating regulating system for improving detector array spectral resolution.
As shown in figure 1, at least two in slit, diaphragm, spectro-grating, collimating mirror, imaging lens and linear array detector are finely adjusted,
Wherein described slit or linear array detector can move left and right slight distance along long axis direction, and moving range is 0-1 centimetres.Collimation
Mirror, spectro-grating, imaging lens can along counterclockwise or the minute angle that turns clockwise, the anglec of rotation be 10 ° -30 ° slits,
Diaphragm, spectro-grating, collimating mirror, imaging lens and linear array detector are adjusted at a high speed by piezoelectric-actuator.Piezoelectricity performs member
Part is controlled by voltage control system, makes light spectrum image-forming in the position of line scan image sensor in minimum pixel interval
Move.By adjusting slit, diaphragm, spectro-grating, collimating mirror, imaging lens and the anglec of rotation of linear array detector, so as to
Have the function that to improve measuring accuracy.
Embodiment 2
Fig. 2 diagrammatically illustrates the fiber grating demodulation for being translated using slit and improving line scan image sensor spectral resolution
The structural representation of system.As shown in Fig. 2 slit 105 is adjusted, slit is set to be moved along shown by arrow b directions, slit moves
Dynamic step-length is 0.1 micron, and adjustable range is between 0-1 centimetres.Slit 105 is adjusted at a high speed by piezoelectric-actuator.Piezoelectricity
Executive component is controlled by voltage control system, makes light spectrum image-forming in the position of line scan image sensor at minimum pixel interval
In the range of move.So, inciding the light path of imaging lens 108 will change, and converge on linear array detector 109
Striped also occurs to change accordingly.By adjusting the width of optical fiber entrance slit, the minute movement of striped can be realized, so as to reach
To the effect for improving measuring accuracy.
Embodiment 3
Fig. 3 schematically shows the optical fiber grating regulating system finely tuned using collimating mirror and improve detector array spectral resolution
Structural representation.As shown in figure 3, collimation mirror 106 is adjusted, collimating mirror 106 is rotated along shown by arrow c directions, revolve
Gyration is counterclockwise or turned clockwise 10 ° -30 °.Collimating mirror 106 is adjusted at a high speed by piezoelectric-actuator.Piezoelectricity is held
Units are controlled by voltage control system, make light spectrum image-forming in the position of line scan image sensor in minimum pixel interval model
Moved in enclosing.So, inciding the light path of imaging lens 108 will change, the bar converged on linear array detector 109
Line also occurs to change accordingly.By adjusting the anglec of rotation of collimating mirror, the minute movement of striped can be realized, is carried so as to reach
The effect of high measuring accuracy.
Embodiment 4
Fig. 4 schematically shows the optical fiber grating regulating system that detector array spectral resolution is improved using fine motion grating
Structural representation.As shown in figure 4, spectro-grating 107 is adjusted, spectro-grating is rotated along shown by arrow d directions, rotate
Angle is counterclockwise or turned clockwise 10 ° -30 °.Spectro-grating 107 is adjusted at a high speed by piezoelectric-actuator.Piezoelectricity is held
Units are controlled by voltage control system, make light spectrum image-forming in the position of line scan image sensor in minimum pixel interval model
Moved in enclosing.So, inciding the light path of imaging lens 108 will change, the bar converged on linear array detector 109
Line also occurs to change accordingly.By adjusting the anglec of rotation of spectro-grating, the minute movement of striped can be realized, so as to reach
Improve the effect of measuring accuracy.
Embodiment 5
Fig. 5 schematically shows the optical fiber grating regulating system finely tuned using imaging lens and improve detector array spectral resolution
Structural representation.As shown in figure 5, imaging lens 108 are adjusted, spectro-grating is rotated along shown by arrow e directions, rotate
Angle is counterclockwise or turned clockwise 10 ° -30 °.Imaging lens 108 are adjusted at a high speed by piezoelectric-actuator.Piezoelectricity performs
Element is controlled by voltage control system, makes light spectrum image-forming in the position of line scan image sensor in minimum pixel interval
Inside move, the striped converged on linear array detector 109 also occurs to change accordingly.By the anglec of rotation for adjusting imaging lens
Degree, the minute movement of striped can be realized, so as to have the function that to improve measuring accuracy.
Embodiment 6
Fig. 6 schematically shows the fiber grating demodulation finely tuned using linear array detector and improve detector array spectral resolution
The structural representation of system.As shown in figure 5, linear array detector 109 is adjusted, make spectro-grating along shown by arrow f directions
Move left and right.Slit moving step length is 0.1 micron, and adjustable range is between 0-1 centimetres.Linear array detector 109 is held by piezoelectricity
Units at a high speed adjust.Piezoelectric-actuator is controlled by voltage control system, light spectrum image-forming is sensed in linear array images
The position of device moves in minimum pixel interval.By adjusting the anglec of rotation of linear array detector, bar can be realized
The minute movement of line, so as to have the function that to improve measuring accuracy.
Fig. 7 schematically shows the fiber grating demodulation system of the raising line scan image sensor spectral resolution according to the present invention
The flow chart of the feedback of system.Specific control method is as follows：
First, step 701, piezoelectric-actuator is adjusted to least significant end, and this voltage is initial adjustment voltage；
Step 702, it is initial spectrum to record least significant end spectroscopic data；
Step 703, half step distance regulation piezoelectric element, piezoelectric element is position servo, is instructed by input position, adjusted respectively
Slit, spectro-grating, collimating mirror, imaging lens or linear array detector are saved, calculates current light spectrum and initial spectrum.Adjust Gaussian image
When the displacement on CCD reaches a pixel wide, that is, single pass is completed, each secondary measurement data point of single pass
Other interpolation, form a more smooth curve.Its processing procedure is such, and the output of pixel is the segmentation to light intensity curve
Integration, when there is 256 pixels, then can obtain 256 subsection integral values：{ I0, I1, I2 ... ... I255 }, works as pixel
When being scanned along a direction fine motion, another ordered series of numbers is obtained：I0 ', I1 ', I2 ' ... ... ..I255 ' }, the former will be gone before this ordered series of numbers,
Obtain：{ I0 '-I0, I1 '-I1, I2 '-I2 ... ... I255 '-I255, }, i.e., { G1-G0, G2-G1, G3-G2 ... ... }.Wherein G0
The light intensity true value (attention is 0 position, rather than the light intensity integration in pixel dimension) of the 0th position is represented, G1 represents the light of 1 position
Intensity values.This ordered series of numbers is summed, obtains { G1-G0, G2-G0, G3-G0 ... ... G255-G0 }, what is so obtained is for the first time
New value after fine setting, followed by the new value after second of fine setting, if having finely tuned n times, just obtain the interpolation of n times.
Step 704, first the degree of correlation peak value when regulation voltage be recorded as eventually adjust voltage；
Step 705, some grades are divided between tune voltage by initial adjustment voltage and eventually, slit is determined according to each grade
Displacement or spectro-grating, collimating mirror, the anglec of rotation of imaging lens or linear array detector.
Step 706, return to step 703, every time demodulation measure to each grade, to obtain higher spatial discrimination
Rate.
Fig. 8 (a) -8 (c) shows that present invention regulation slit, spectro-grating, collimating mirror, imaging lens or linear array detector carry
The principle of EO-1 hyperion spatial resolution.Fig. 8 (a) shows that light intensity in space is in one-dimensional Gaussian curve distribution map.One light intensity exists
Space is irradiated on a ccd sensor in the light beam of one-dimensional Gaussian curve distribution, CCD each pixel close-packed arrays, each picture
Plain equivalent to one perpendicular lattice, as shown in Fig. 8 (a), the output of pixel is really the product to falling light intensity total amount on a pixel
Point.Because discretization is excessive, cause it is relatively low to image resolution ratio, for improve curve sampling number, by adjust slit, light splitting
Grating, collimating mirror, imaging lens or linear array detector, to change position of the Gaussian curve on ccd sensor, equivalent to movement
Ccd sensor is acquired to the diverse location of curve.Slit, spectro-grating, collimating mirror, imaging lens or linear array detector it is micro-
Adjust, equivalent to the fine position to sensor, thus obtain finer and smoother to curve portray.Fig. 8 (b) is narrow not adjust
The result figure after multiple measurement results interpolation after being scanned when seam, spectro-grating, collimating mirror, imaging lens or linear array detector.Fig. 8
(c) after multiple measurement results interpolation when to adjust slit, spectro-grating, collimating mirror, imaging lens or linear array detector after scanning
Result figure.From Fig. 8 (b) and 8 (c), regulation slit, spectro-grating, collimating mirror, imaging lens or linear array detector, regulation
Gaussian image completes single pass when the displacement on CCD reaches a pixel wide, each survey of single pass
Data difference interpolation is measured, forms a more smooth curve.
With reference to the explanation of the invention disclosed here and practice, other embodiment of the invention is for those skilled in the art
It all will be readily apparent and understand.Illustrate and embodiment is to be considered only as exemplary, of the invention true scope and purport is equal
It is defined in the claims.
Claims (5)
1. it is a kind of improve detector array spectral resolution optical fiber grating regulating system, the demodulating system include pumping source,
Wavelength division multiplexer, bragg grating, diaphragm, slit, collimating mirror, spectro-grating, imaging lens and linear array detector, piezoelectricity are held
Units and voltage control system,
Wherein described pumping source, wavelength division multiplexer and bragg grating are sequentially connected, and the wavelength division multiplexer connects simultaneously
Diaphragm,
Enter bragg grating, the bragg fiber after the coupling that the light that the pumping source is sent passes through wavelength division multiplexer
The reflectance spectrum of grating enters optical fiber grating regulating system as injection light,
After injection light is by slit, the reflection of collimating mirror, spectro-grating, imaging lens is passed sequentially through, finally converges to linear array detection
On device,
Wherein described slit or linear array detector can move left and right slight distance along long axis direction, or the collimating mirror, point
In light grating, imaging lens it is any can along counterclockwise or the minute angle that turns clockwise,
The movement in detection process of slit, collimating mirror, spectro-grating, imaging lens and linear array detector described in wherein at least two is micro-
Small distance or rotation minute angle；The method of wherein described rotation minute angle or mobile slight distance is as follows：
A) piezoelectric-actuator is adjusted to least significant end, and this voltage is initial adjustment voltage；
B) it is initial spectrum to record least significant end spectroscopic data；
C) half step distance regulation piezoelectric-actuator, calculates current light spectrum and initial spectrum, the piezoelectric-actuator are watched for position
Clothes, collimating mirror, spectro-grating, imaging lens are controlled to rotate minute angle or refer to by input position by input position instruction
Make to control slit or linear array detector to move slight distance, the locus of incident light is adjusted, finally determines spectrum
Image space；
D) first the degree of correlation peak value when regulation voltage be recorded as eventually adjust voltage；
E) some grades are divided between tune voltage by initial adjustment voltage and eventually, demodulation every time measures to each grade, to obtain
Higher spatial resolution.
2. optical fiber grating regulating system as claimed in claim 1, wherein the slight distance is 0-1 centimetres.
3. optical fiber grating regulating system as claimed in claim 1, wherein the minute angle is 10 ° -30 °.
4. optical fiber grating regulating system as claimed in claim 1, wherein the slit, collimating mirror, spectro-grating, imaging lens and
Linear array detector is adjusted at a high speed by piezoelectric-actuator.
5. optical fiber grating regulating system as claimed in claim 1, wherein the concrete processing procedure of the sub-step c) is as follows：
The output of pixel is the subsection integral to light intensity curve, when there is 256 pixels, then can obtain 256 subsection integrals
Value：{ I0, I1, I2 ... ... ..I255 }, when pixel scans along a direction fine motion, obtain another ordered series of numbers：I0 ', I1 ',
I2 ' ... ... ..I255 ' }, this ordered series of numbers is subtracted the former, obtained：I0 '-I0, I1 '-I1, I2 '-I2 ... ... I255 '-
I255, }, i.e., { G1-G0, G2-G1, G3-G2 ... ... }；Wherein G0 represents the light intensity true value of the 0th position, and G1 represents the light of 1 position
Intensity values；This ordered series of numbers is summed, obtains { G255-G0 }, what is so obtained is the new value after finely tuning for the first time, followed by second
New value after secondary fine setting, if having finely tuned n times, just obtain the interpolation of n times.
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| CN201610200704.2A Active CN105890752B (en) | 2015-10-14 | 2016-03-31 | A kind of optical fiber grating regulating system for improving detector array spectral resolution |
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| CN109724696B (en) * | 2018-12-15 | 2020-08-21 | 中国科学院长春光学精密机械与物理研究所 | Detection system for spectral resolution of Rowland grating spectrometer |
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| CN101788339A (en) * | 2010-01-27 | 2010-07-28 | 中国科学院上海技术物理研究所 | Spectral automatic calibration device and method of imaging spectrometer |
| CN201680848U (en) * | 2010-04-20 | 2010-12-22 | 北京交通大学 | CCD fiber grating sensor demodulating system based on FPGA |
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| CN105890752A (en) | 2016-08-24 |
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