CN112345076A - Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine - Google Patents

Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine Download PDF

Info

Publication number
CN112345076A
CN112345076A CN202010972494.5A CN202010972494A CN112345076A CN 112345076 A CN112345076 A CN 112345076A CN 202010972494 A CN202010972494 A CN 202010972494A CN 112345076 A CN112345076 A CN 112345076A
Authority
CN
China
Prior art keywords
zoom lens
detection device
resolution
grating
spectrograph
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010972494.5A
Other languages
Chinese (zh)
Inventor
雷泽民
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zolix Instruments Co ltd
Original Assignee
Zolix Instruments Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zolix Instruments Co ltd filed Critical Zolix Instruments Co ltd
Priority to CN202010972494.5A priority Critical patent/CN112345076A/en
Publication of CN112345076A publication Critical patent/CN112345076A/en
Pending legal-status Critical Current

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/40Measuring the intensity of spectral lines by determining density of a photograph of the spectrum; Spectrography
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0202Mechanical elements; Supports for optical elements
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectrometry And Color Measurement (AREA)

Abstract

The invention discloses a spectrograph system and a spectrograph capable of adjusting resolution, wherein the spectrograph system comprises a zoom lens capable of adjusting a focal length, a moving device capable of adjusting the position of the zoom lens, an incident slit, a collimation unit, a grating, a detection device and a control center; the incident slit, the collimation unit, the grating, the zoom lens and the detection device are sequentially distributed according to the sequence of the light path, the zoom lens is arranged on the moving device, and the control center is respectively connected with the zoom lens, the moving device and the detection device and used for adjusting the position of the zoom lens according to the optical parameters so as to obtain the best imaging effect on the detection device. This application is through guide rail and liquid lens combination, realizes focus adjustment on a relatively large scale, makes resolution ratio variable, has expanded the measurement demand of spectrograph greatly, has simplified equipment, has realized the adjustment to spectral line resolution ratio.

Description

Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine
Technical Field
The invention relates to the technical field of spectra, in particular to a spectrograph system and a spectrograph with adjustable resolution.
Background
At present, a spectrograph is a spectral instrument using a linear array detector, and the structure of the spectrograph is the same as that of a general spectral instrument, and the spectrograph consists of a collimation unit (reflector and lens), a light splitting unit (grating and prism), a focusing unit (reflector and lens), an incident slit and a detector. The spectral resolution is an important performance index of the instrument, and is mainly influenced by the following two factors according to a grating equation and related imaging theory knowledge: slit width and line dispersion capability of the system; the line dispersion capability of the system is affected by three factors: grating ruling, focal length, and diffraction angle. Generally, a resolution-adjustable system considers the 4 factors, such as the use of automatic slits, but the slit has a great influence on the amount of light passing, and in essence, the slit width affects the image width on the imaging plane, and has a small effect on the resolution improvement, and the key is the linear dispersion capability of the system. For the same grating, the reticle is fixed and unchanged, and the change of the diffraction angle is related to the change of the incident angle, and for a general spectrograph, the change of the incident position leads to the complex design of the whole system and the inconvenient use.
The last factor is to take the variation of focal length into consideration, the conventional mirror or lens made of resin or glass has fixed focal length, and the use of lens group to adjust focal length results in complicated design of lens group and automatic adjusting mechanism.
Therefore, how to change the focal length of the lens and simplify the spectrograph system is a problem to be solved at present.
Disclosure of Invention
The invention aims to provide a spectrograph system and a spectrograph capable of adjusting resolution, wherein a liquid lens is used as a zoom lens, and when the focal length is changed, the position of the zoom lens is correspondingly changed, so that an ideal imaging effect on a detection device is realized.
In a first aspect, the above object of the present invention is achieved by the following technical solutions:
a spectrograph system capable of adjusting resolution comprises a zoom lens capable of adjusting focal length, a moving device capable of adjusting the position of the zoom lens, an incident slit, a collimation unit, a grating, a detection device and a control center; the incident slit, the collimation unit, the grating, the zoom lens and the detection device are sequentially distributed according to the sequence of the light path, the zoom lens is arranged on the moving device, and the control center is respectively connected with the zoom lens, the moving device and the detection device and used for adjusting the position of the zoom lens according to the optical parameters, so that an ideal imaging effect is obtained on the detection device.
The invention is further configured to: the distance between the grating and the detection device is kept fixed, the zoom lens is positioned between the grating and the detection device, and clear images are obtained on the detection device by adjusting the position of the zoom lens.
The invention is further configured to: the focusing work of the spectrograph system comprises the following steps:
s1, pre-calibrating the spectrograph system;
s2, detecting the spectral line obtained on the device from the incident light of the incident slit;
s3, judging whether the spectral line resolution obtained on the detection device meets the requirement, if so, turning to S7, and if not, entering the next step;
s4, adjusting the focal length of the zoom lens;
s5, adjusting the position of the zoom lens to make the distance between the adjusted zoom lens and the detection device equal to the adjusted focal length of the zoom lens;
s6, turning to S3;
and S7, finishing focusing.
The invention is further configured to: the control center firstly coarsely adjusts the position of the zoom lens and then finely adjusts the position by combining an automatic focusing algorithm.
The invention is further configured to: the zoom lens comprises a liquid lens, and the control center changes the focal length of the liquid lens by changing the electrical parameters of the liquid lens.
The invention is further configured to: the control center comprises an application program which is used for comparing the resolution with a set resolution according to the spectral line resolution obtained on the detection device to obtain a comparison result so as to judge whether the resolution requirement is met, and under the condition that the resolution requirement is not met, the focal length and the position of the zoom lens are adjusted until the resolution meets the requirement, so that the spectral line with an ideal imaging effect is obtained.
In a second aspect, the above object of the present invention is achieved by the following technical solutions:
a spectrograph capable of adjusting resolution comprises an incident slit, a collimating unit, a grating, a zoom lens, a mobile device and a detection device, wherein the incident slit, the collimating unit, the zoom lens and the detection device are positioned on the same side of the grating; the incident slit and the collimation unit are positioned on the first light path; the zoom lens and the detection device are positioned on a second light path, and the light ray of the second light path is the diffraction light ray of the light ray on the first light path; the zoom lens is arranged on the moving device and can move along the second optical path.
The invention is further configured to: the mobile device comprises a mobile platform, and a moving shaft of the mobile platform is arranged along the optical axis of the second optical path.
The invention is further configured to: the detection device adopts a CCD photosensitive array.
The invention is further configured to: the grating is a plane grating.
Compared with the prior art, the invention has the beneficial technical effects that:
1. the liquid lens is adopted as the zoom lens, so that zooming is realized, and equipment is simplified;
2. furthermore, the method and the device have the advantages that the detected imaging effect is analyzed, and the focal length and the position of the zoom lens are adjusted according to the analysis result, so that the spectral line resolution is adjusted;
3. further, this application realizes focus adjustment on a relatively large scale through the combination of guide rail and liquid lens, makes resolution ratio changeable, has expanded the measurement demand of spectrograph greatly.
Drawings
FIG. 1 is a schematic diagram of a spectroscopy system configuration according to an embodiment of the present invention;
FIG. 2 is a structural diagram of a focusing process according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of resolution analysis of an embodiment of the present invention;
FIG. 4 is a schematic diagram of resolution analysis of yet another embodiment of the present invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
Detailed description of the preferred embodiment
The spectrograph system with adjustable resolution of the invention, as shown in fig. 1, comprises a zoom lens 5 with adjustable focal length, a moving device 4 with adjustable zoom lens position, an entrance slit 1, a collimation unit 2, a grating 3, a detection device 6, and a control center 7; the incident slit 1, the collimating unit 2, the grating 3, the zoom lens 5 and the detecting device 6 are sequentially distributed according to the light path sequence, light enters through the incident slit 1, becomes parallel beams after passing through the collimating unit 2, and irradiates on the grating 3 to form a first light path; after diffraction by the grating 3, a spectral line diagram is formed on the detection device 6 according to different light wave lengths through the zoom lens 5, and the spectral line diagram is a second light path.
The distance between the grating 3 and the detection device 6 is kept fixed, the zoom lens 5 is positioned between the grating 3 and the detection device 6, the zoom lens 5 is arranged on the mobile device 4, the control center 7 is respectively connected with the zoom lens 5, the mobile device 4 and the detection device 6, the control center 7 obtains a spectral line diagram on the detection device, the resolution ratio of the spectral line diagram is calculated, the calculation result is compared with a set resolution ratio set value, and if the set resolution ratio can be reached, the position of the zoom lens is the optimal position; if the set resolution cannot be achieved, the focal length and the position of the zoom lens 5 need to be adjusted until the resolution meets the requirement, so that a clear image with the resolution meeting the set requirement is obtained on the detection device, namely, an ideal imaging effect is achieved.
The focusing operation of the spectrograph system, as shown in fig. 2, comprises the following steps:
s1, pre-calibrating the spectrograph system;
s2, obtaining a spectral line on a detection device after light rays are incident from the incident slit and pass through a spectral line system;
s3, calculating spectral line resolution, comparing the calculated resolution with a set resolution, judging whether the spectral line resolution obtained on the detection device meets the requirement, if so, turning to S7, and if not, entering the next step;
s4, adjusting the focal length of the zoom lens;
s5, adjusting the position of the zoom lens to make the distance between the adjusted zoom lens and the detection device equal to the adjusted focal length of the zoom lens;
s6, turning to S3;
and S7, finishing focusing.
Specifically, the control center firstly coarsely adjusts the position of the zoom lens, and then finely adjusts the position by combining with an automatic focusing algorithm, so that a spectrogram with the resolution reaching the set resolution can be obtained on the detection device.
The liquid lens is adopted as the zoom lens, and the control center changes the electric parameters of the liquid lens so as to change the focal length of the liquid lens.
The control center is provided with an application program used for comparing the resolution with a set resolution according to the spectral line resolution obtained on the detection device to obtain a comparison result, so as to judge whether the resolution requirement is met, and under the condition that the resolution requirement is not met, the focal length and the position of the zoom lens are adjusted until the resolution meets the requirement, so that the spectral line with an ideal imaging effect is obtained.
Detailed description of the invention
A spectrograph capable of adjusting resolution comprises an incident slit 1, a planoconvex lens 2, a plane grating 3, a liquid lens 5, a moving device 4 and a detection device 6, wherein the incident slit 1, the planoconvex lens 2, the liquid lens 5 and the detection device 6 are positioned on the same side of the plane grating 3; the incident slit 1 and the planoconvex lens 2 are positioned on a first light path, and the convex surface of the planoconvex lens 2 is over against the plane grating 3; the liquid lens 5 and the detection device 6 are positioned on a second light path, and the light rays of the second light path are diffraction light rays of the light rays on the first light path; the liquid lens 5 is provided on the moving device 4 and is movable along the second optical path.
The moving device adopts a guide rail moving platform, and a moving shaft of the guide rail moving platform is arranged along the optical axis of the second light path.
The detection device adopts a CCD photosensitive array. The plano-convex lens 2 is used to collimate the light.
The liquid lens controls the focal length through external voltage, can also be controlled through software, is easy to use and synchronously controlled by a guide rail, and is also beneficial to automatic focusing.
The light enters the planoconvex lens 2 through the entrance slit 1, the planoconvex lens 2 collimates the light beam and then emits the light beam to the plane grating 3 in parallel, after the light beam is split by the diffraction of the plane grating 3, the diffracted light with different wavelengths emits the light beam to the liquid lens 5 in parallel along different angles, and the light beam is converged to the detector 6 through the liquid lens 5. The entrance slit 1 functions as an equivalent light emitting object to be imaged on a detector.
As shown in fig. 3, when the liquid lens 5 is located at a position L1 away from the detector, and the focal length of the liquid lens 5 is L1, after the incident light is split by the plane grating 3, the light with the wavelength λ 1 and λ 2 respectively converges at different positions of the detector to form a spectrogram with a distance L1, and the distance between the two spectral lines is related to the resolution.
Similarly, as shown in fig. 4, when the liquid lens 5 is located at a position L2 away from the detector, and the focal length of the liquid lens 5 is L2, the light beams with wavelengths λ 1 and λ 2 respectively converge at different positions of the detector, forming a spectrum with a distance L2.
Comparing fig. 3 and 4, it can be seen that when the position of the liquid lens 5 on the guide rail moving platform is different, the imaging position of the light ray with the same wavelength on the detector 6 is different.
By moving the liquid lens 5 along the rail platform 4, the focal length of the liquid lens 5 is changed accordingly, thereby realizing the adjustment of the spectral resolution.
In a spectrometer, resolution refers to the ability of an instrument to separate two wavelengths very close to spectral lines, which is one of core indexes of the spectrometer, and in a general spectrometer, a spectral bandwidth is used to represent the resolution ability of the spectrometer, and the spectral bandwidth is a width corresponding to a spectral line response contour line which is reduced to half, and is also called the full width at half maximum of a spectrum, and the narrower the spectral bandwidth (i.e., the smaller the numerical value), the higher the resolution of the spectrometer is.
The spectral bandwidth is calculated as follows:
Figure DEST_PATH_IMAGE001
whereinDIn order to achieve the inverse-line dispersion,dis the slit width. With reverse dispersionThe calculation formula is as follows,
Figure 608968DEST_PATH_IMAGE002
wherein the diffraction angle is the angle of diffraction,
Figure DEST_PATH_IMAGE003
in order to be a diffraction order of the light,Nin order to scale the width of the lines,Fis the focal length.
The calculation of the diffraction angle is calculated from the grating equation,
Figure 20489DEST_PATH_IMAGE004
the diffraction wavelength is the angle of incidence.
The formula of diffraction angle and inverse dispersion is substituted into the calculation formula of resolution ratio to obtain:
Figure 959495DEST_PATH_IMAGE005
from the above equation, it can be known that the focal length is inversely proportional to the resolution, i.e., the larger the focal length, the smaller the spectral bandwidth, and the higher the resolution.
The embodiments of the present invention are preferred embodiments of the present invention, and the scope of the present invention is not limited by these embodiments, so: all equivalent changes made according to the structure, shape and principle of the invention are covered by the protection scope of the invention.

Claims (10)

1. An adjustable resolution spectroscopy system, comprising: the device comprises a zoom lens with adjustable focal length, a mobile device with adjustable zoom lens position, an incident slit, a collimation unit, a grating, a detection device and a control center; the incident slit, the collimation unit, the grating, the zoom lens and the detection device are sequentially distributed according to the sequence of the light path, the zoom lens is arranged on the moving device, and the control center is respectively connected with the zoom lens, the moving device and the detection device and used for adjusting the position of the zoom lens according to the optical parameters, so that an ideal imaging effect is obtained on the detection device.
2. The adjustable resolution spectroscopy system of claim 1, wherein: the distance between the grating and the detection device is kept fixed, the zoom lens is positioned between the grating and the detection device, and clear images are obtained on the detection device by adjusting the position of the zoom lens.
3. The adjustable resolution spectroscopy system of claim 1, wherein: the focusing work of the spectrograph system comprises the following steps:
s1, pre-calibrating the spectrograph system;
s2, obtaining a spectral diagram on the detection device by the incident light from the incident slit;
s3, judging whether the spectral line resolution obtained on the detection device meets the requirement, if so, turning to S7, and if not, entering the next step;
s4, adjusting the focal length of the zoom lens;
s5, adjusting the position of the zoom lens to make the distance between the adjusted zoom lens and the detection device equal to the adjusted focal length of the zoom lens;
s6, turning to S3;
and S7, finishing focusing.
4. The adjustable resolution spectroscopy system of claim 3, wherein: the control center firstly coarsely adjusts the position of the zoom lens and then finely adjusts the position by combining an automatic focusing algorithm.
5. The adjustable resolution spectroscopy system of claim 1, wherein: the zoom lens comprises a liquid lens, and the control center changes the focal length of the liquid lens by changing the electrical parameters of the liquid lens.
6. The adjustable resolution spectroscopy system of claim 1, wherein: the control center comprises an application program which is used for comparing the resolution with a set resolution according to the spectral line resolution obtained on the detection device to obtain a comparison result so as to judge whether the resolution requirement is met, and under the condition that the resolution requirement is not met, the focal length and the position of the zoom lens are adjusted until the resolution meets the requirement, so that the spectral line with an ideal imaging effect is obtained.
7. An adjustable resolution spectrograph, comprising: the device comprises an incident slit, a collimation unit, a grating, a zoom lens, a mobile device and a detection device, wherein the incident slit, the collimation unit, the zoom lens and the detection device are positioned on the same side of the grating; the incident slit and the collimation unit are positioned on the first light path; the zoom lens and the detection device are positioned on a second light path, and the light ray of the second light path is the diffraction light ray of the light ray on the first light path; the zoom lens is arranged on the moving device and can move along the second optical path.
8. The adjustable resolution spectrograph of claim 7, wherein: the mobile device comprises a mobile platform, and a moving shaft of the mobile platform is arranged along the optical axis of the second optical path.
9. The adjustable resolution spectrograph of claim 7, wherein: the detection device adopts a CCD photosensitive array.
10. The adjustable resolution spectrograph of claim 7, wherein: the grating is a plane grating.
CN202010972494.5A 2020-09-16 2020-09-16 Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine Pending CN112345076A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202010972494.5A CN112345076A (en) 2020-09-16 2020-09-16 Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202010972494.5A CN112345076A (en) 2020-09-16 2020-09-16 Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine

Publications (1)

Publication Number Publication Date
CN112345076A true CN112345076A (en) 2021-02-09

Family

ID=74357284

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202010972494.5A Pending CN112345076A (en) 2020-09-16 2020-09-16 Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine

Country Status (1)

Country Link
CN (1) CN112345076A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115706854A (en) * 2021-08-06 2023-02-17 北京小米移动软件有限公司 Camera control method and device for foot type robot and foot type robot
CN116625505A (en) * 2023-04-26 2023-08-22 北京邮电大学 Spectrum imaging method and device with adjustable spectrum resolution based on RCASSI system

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5644396A (en) * 1995-06-20 1997-07-01 Hewlett-Packard Company Spectrograph with low focal ratio
US6031619A (en) * 1997-07-01 2000-02-29 Optomed Optomedical Systems Gmbh Imaging spectrometer
JP2007003842A (en) * 2005-06-24 2007-01-11 Matsushita Electric Ind Co Ltd Adjusting method of lens device, and lens device
JP2011257215A (en) * 2010-06-08 2011-12-22 Konica Minolta Opto Inc Spectroscopic optical device and spectroscopic analyzer including the same
CN103017901A (en) * 2012-11-21 2013-04-03 南京邮电大学 Spectral measurement method and micro spectrograph based on varifocus lens
GB2497095A (en) * 2011-11-29 2013-06-05 Kenneth Harrison Elliott A spectrographic device for astronomical spectroscopy including a focus aid
CN103954359A (en) * 2014-05-13 2014-07-30 哈尔滨工业大学(威海) Zoom spectrograph with spectral measuring range and resolution ratio adjustable
US20150131161A1 (en) * 2013-11-11 2015-05-14 Samsung Electronics Co., Ltd. Variable liquid lens system
CN211426938U (en) * 2019-12-27 2020-09-04 苏州车萝卜汽车电子科技有限公司 Imaging system with variable focal length and head-up display

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5644396A (en) * 1995-06-20 1997-07-01 Hewlett-Packard Company Spectrograph with low focal ratio
US6031619A (en) * 1997-07-01 2000-02-29 Optomed Optomedical Systems Gmbh Imaging spectrometer
JP2007003842A (en) * 2005-06-24 2007-01-11 Matsushita Electric Ind Co Ltd Adjusting method of lens device, and lens device
JP2011257215A (en) * 2010-06-08 2011-12-22 Konica Minolta Opto Inc Spectroscopic optical device and spectroscopic analyzer including the same
GB2497095A (en) * 2011-11-29 2013-06-05 Kenneth Harrison Elliott A spectrographic device for astronomical spectroscopy including a focus aid
CN103017901A (en) * 2012-11-21 2013-04-03 南京邮电大学 Spectral measurement method and micro spectrograph based on varifocus lens
US20150131161A1 (en) * 2013-11-11 2015-05-14 Samsung Electronics Co., Ltd. Variable liquid lens system
CN103954359A (en) * 2014-05-13 2014-07-30 哈尔滨工业大学(威海) Zoom spectrograph with spectral measuring range and resolution ratio adjustable
CN211426938U (en) * 2019-12-27 2020-09-04 苏州车萝卜汽车电子科技有限公司 Imaging system with variable focal length and head-up display

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115706854A (en) * 2021-08-06 2023-02-17 北京小米移动软件有限公司 Camera control method and device for foot type robot and foot type robot
CN116625505A (en) * 2023-04-26 2023-08-22 北京邮电大学 Spectrum imaging method and device with adjustable spectrum resolution based on RCASSI system
CN116625505B (en) * 2023-04-26 2024-02-02 北京邮电大学 Spectrum imaging method and device with adjustable spectrum resolution based on RCASSI system

Similar Documents

Publication Publication Date Title
US7518722B2 (en) Multi-channel, multi-spectrum imaging spectrometer
US7315371B2 (en) Multi-channel spectrum analyzer
CN102155990B (en) Debugging method of echelle grating spectrograph
US7924422B2 (en) Calibration method for optical metrology
JP2008541101A (en) Object surface measuring apparatus and surface measuring method
CN108181238B (en) Method for adjusting posture of echelle grating of spectrometer and calibration device
CN104501955A (en) Grating spectrometer capable of realizing spectral super-resolution reduction
EP3084373B1 (en) Spectrometer for generating a two dimensional spectrum
CN109974852B (en) Snapshot type grating spectrometer
CN110006528B (en) Spectrometer arrangement, method for generating a two-dimensional spectrum and optical component set
CN112345076A (en) Spectrum-taking system capable of adjusting resolution ratio and spectrum-taking machine
CN103616074B (en) Wavelength calibration method for digital micromirror grating spectrometer
CN101802572B (en) Spectrometer arrangement
Li et al. Optical system design of aberration-corrected Czerny–Turner imaging spectrometer with high resolution
CN110926612A (en) Multi-channel broadband high-resolution spectrometer
US5579106A (en) Method and apparatus for providing astigmatism-reduced images with spectroscopic instruments
US20170115163A1 (en) Field lens corrected three mirror anastigmat spectrograph
US10082426B2 (en) Spectrometer
CN116182738A (en) Method and device for synchronously measuring interface profile of film surface based on sub-band multispectral
CN110553733A (en) Spectrometer apparatus
CN113624339A (en) Homodromous dispersive spectrum analyzer and method based on DMD and echelle grating
CN116593002B (en) Automatic focusing spectrometer
Elahi et al. A grating-optic-less visible spectrometer using Fresnel zone plate patterns on a digital light processor
KR20160143969A (en) Spectroscopic instrument using plane mirror and lens
CN116625508B (en) Multi-target hyperspectral detection system based on optical fiber array

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication
RJ01 Rejection of invention patent application after publication

Application publication date: 20210209