CN105887172A - Film coating device and film coating method - Google Patents
Film coating device and film coating method Download PDFInfo
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- CN105887172A CN105887172A CN201610202869.3A CN201610202869A CN105887172A CN 105887172 A CN105887172 A CN 105887172A CN 201610202869 A CN201610202869 A CN 201610202869A CN 105887172 A CN105887172 A CN 105887172A
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- coating liquid
- control unit
- pool
- plated film
- film coating
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- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D17/00—Constructional parts, or assemblies thereof, of cells for electrolytic coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
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- Engineering & Computer Science (AREA)
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- General Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- Electrochemistry (AREA)
- Chemically Coating (AREA)
Abstract
The invention relates to the technical field of solution film coating, in particular to a film coating device. The film coating device comprises a storage pond, a work pond, a filter pond, a lifting and pulling mechanism and a control unit. The storage pond is used for preparing qualified film coating liquid and making the qualified film coating liquid flow into the work pond. The work pond is used for performing film coating operation and making unqualified film coating liquid flow into the filtering pond. The filtering pond receives the unqualified film coating liquid from the work pond and performs filtration treatment on the unqualified film coating liquid so that the unqualified film coating liquid can become qualified film coating liquid to be conveyed to the work pond again. The lifting and pulling mechanism is arranged in the work pond and used for performing up and down lifting and pulling on workpieces to perform film coating operation. The control unit for monitoring temperature, viscosity, conductivity and the ratio is arranged in the work pond. Compared with the prior art, the film coating device can detect the property changes of the film coating liquid in time and can change relevant properties of the film coating liquid in time, the property of the film coating liquid is kept in a qualified state to perform film coating, and it is guaranteed that the film coating quality is good.
Description
[technical field]
The present invention relates to solution coating technique field, particularly relate to a kind of plated film and set
Standby and film plating process.
[background technology]
Solution plated film refers to utilize chemical reaction or electrochemistry etc. to change in the solution
Method is in the technology of matrix surface deposition thin film.Solution coating technique need not
Vacuum condition, equipment is simple, can be in various matrix surface film forming, and raw material is easy
, at aspects such as electronic devices and components, various surface coating technology and decoration industries
Extensively application.Solution coating technique mainly includes that sol-gel technique, chemistry are anti-
Answer deposition technique, anodizing technology, electroplating technology.Wherein collosol and gel skill
Art, because of its easily controllable film composition, can control doping, technique at molecular level
Simply, ideal thickness and component can be obtained.
Glue spreading method is one of key technology in sol-gel technique, mainly side
Formula is spin-coating method and dip-coating method.Spin-coating method mainly uses motor to drive water
The facet coatings part of placing flat, will attach to the coating liquid on horizontal film-coated part surface
Film-coated part surface it is laid in, along with in coating liquid, solvent is waved under centrifugal action
Send out, at film-coated part superficial growth layer of gel film, then carry out later stage process, just
Obtain required thin film.Czochralski method is to impregnated in coating liquid, then by film-coated part
By certain speed, film-coated part is upwards lifted out from coating liquid plated film
Liquid, coating liquid just forms gel film on film-coated part surface.
In coating process, the various character of coating liquid are susceptible to change, when
When the qualitative change of coating liquid is beyond certain limit, it will cause coating quality big
Give a discount.Therefore, in order to ensure that coating quality is good, it is badly in need of providing one plating
Film device, can detect the qualitative change of coating liquid in time, and can be in time
Change the relevant nature of coating liquid, make the character of coating liquid be maintained at eligible state
Carry out plated film, it is ensured that coating quality is good.
[summary of the invention]
Monitor for overcoming existing filming equipment to be difficult in real time and keep plated film fluidity
The shortcoming of matter, the invention provides one and can monitor in real time and keep plated film fluidity
The filming equipment of matter.
The present invention solves the scheme of technical problem and is to provide a kind of filming equipment, bag
Include reserve pool, work pool, filtering ponds, shift mechanism and control unit, described
Reserve pool is used for being equipped with qualified coating liquid and by qualified coating liquid inflow work
Pond, work pool is used for carrying out plated film operation and defective coating liquid being flowed into filtration
Pond, filtering ponds receive from the defective coating liquid of work pool and carry out at filtration
Again being delivered to work pool after managing into qualified coating liquid, shift mechanism is arranged on work
Make in pond, carry out plated film operation, work pool for workpiece is lifted up and down
In be provided with the control list that temperature, viscosity, electrical conductivity, proportioning are monitored
Unit.
Preferably, described filming equipment farther includes feed supplement pond, and feed supplement pond carries
Circulatory pool is entered for qualified coating liquid.
Preferably, described shift mechanism includes horizontal support bar and plated film matrix,
Horizontal support bar is used for lifting plated film matrix, and control unit carries plated film matrix
Draw speed controlling at 0.01mm/s～10cm/s.
Preferably, described shift mechanism farther includes pulley and coiled strip plated film base
Body, pulley is used for transmission coiled strip plated film matrix, and control unit is by coiled strip plated film base
The transmission speed of body controls in 10cm/s.
Preferably, one or more pulley, multiple cunnings are set in described work pool
Take turns at coating liquid liquid level between the upper and lower every setting.
Preferably, described a kind of film plating process using described equipment to carry out, bag
Include step S1: in reserve pool, prepare qualified coating liquid；Step S2: carry
Drawing mechanism is translation the most repeatedly in work pool, treats film-coating workpiece and plates
Film；Step S3: the coating liquid character in work pool is carried out by plating control apparatus
Detection controls and step S4: when detecting that in work pool, coating liquid is defective,
Then control defective coating liquid in work pool and enter filtering ponds, through filtering ponds mistake
Filter reenters in work pool after being processed into qualified coating liquid.
Preferably, coating liquid temperature is controlled at-40 DEG C～40 by described control unit
℃。
Preferably, the viscosity of coating liquid is controlled by described control unit
200cp～650cp.
Preferably, the conductivity of coating liquid is controlled by described control unit
1mS/cm～7mS/cm.
Preferably, the component of described coating liquid includes macromolecular material, You Jirong
Agent and electrolyte, described control unit is by macromolecular material, organic solvent and electricity
The ratio solved between liquid controls at macromolecular material: organic solvent: electrolyte=
(2%～12%): (30%～98%): (4%～20%).
Preferably, the described equipment of described a kind of use carries out film plating process, including
Step S1: prepare qualified coating liquid in reserve pool；Step S2: lifting
Mechanism is translation the most repeatedly in work pool, treats film-coating workpiece and carries out plated film；
Step S3: the coating liquid character in work pool is detected by plating control apparatus
Control and step S4: when detecting that in work pool, coating liquid is defective, then control
In work pool processed, defective coating liquid enters filtering ponds, at filtering ponds filtration
Reenter in work pool after managing into qualified coating liquid.
Compared with prior art, the filming equipment that the present invention provides, including deposit
Pond, work pool, filtering ponds, circulatory pool and shift mechanism, for existing matrix
Plated film in coating liquid, coating liquid is flowed into work pool, work pool by described reserve pool
Defective coating liquid is flowed into filtering ponds, and filtering ponds are by underproof coating liquid mistake
Flowing into circulatory pool after filter, qualified coating liquid is pumped to work pool by circulatory pool,
Shift mechanism is arranged in work pool, and lifting carries out plated film operation up and down, work
Pond is provided with to temperature, viscosity, electrical conductivity, proportioning, agitator, lifting
The control unit that speed and velocity of rotation are monitored.Feed supplement pond is in circulatory pool
Coating liquid carry out feed supplement, reserve pool arranges the first control unit, work pool
In the second control unit is set, circulatory pool arranges the 3rd control unit, first
Control unit, the second control unit, the 3rd control unit include temperature control respectively
Unit processed, viscosity control unit, electrical conductivity control unit, burden control unit
With agitator control unit, it is single that the second control unit also includes that pull rate controls
Unit or velocity of rotation control unit, the 3rd control unit also includes rate of pumping control
Unit processed.Wherein, coating liquid temperature is controlled at-40 DEG C by temperature control unit
～40 DEG C, the viscosity of coating liquid is controlled by viscosity control unit
200cp～650cp, the conductivity of coating liquid is controlled by conductivity control unit
1mS/cm～7mS/cm, burden control unit is by macromolecular material, organic solvent
With the ratio between electrolyte controls at macromolecular material: organic solvent: electrolysis
Liquid=(2%～12%): (30%～98%): (4%～20%), to coating liquid character
In real time monitoring make coating process be in optimum environment and condition all the time
Under carry out, be effectively guaranteed the quality of plated film operation.This filming equipment structure
Succinctly, automaticity is high, decreases substantial amounts of manual labor, cost-effective.
[accompanying drawing explanation]
Fig. 1 is filming equipment function structure chart in first embodiment of the invention；
Fig. 2 is the first control unit of filming equipment in first embodiment of the invention
Module composition diagram；
Fig. 3 is the second control unit of filming equipment in first embodiment of the invention
Module composition diagram；
Fig. 4 is the 3rd control unit of filming equipment in first embodiment of the invention
Module composition diagram；
Fig. 5 is filming equipment function structure chart in second embodiment of the invention；
Fig. 6 is the pulley set-up mode of filming equipment in second embodiment of the invention
Figure.
[detailed description of the invention]
In order to make the mesh of the present invention, technical scheme and advantage clearer,
Below in conjunction with accompanying drawing and embodiment, the present invention is carried out the most specifically
Bright.Should be appreciated that specific embodiment described herein is only in order to explain this
Invention, is not intended to limit the present invention.
Refer to Fig. 1, in the first embodiment of the present invention, this filming equipment 1
Including reserve pool 11, work pool 12, filtering ponds 13, circulatory pool 14, feed supplement pond
15, vertical bar 16, horizontal support bar 17, plated film matrix 18, pump machine 19, pipe
Road (figure is not marked) and valve (figure is not marked).Work pool 12 is by plated film
Main place.Reserve pool 11 is arranged on above the side of work pool 12 (in all realities
Executing in example, upper and lower, left and right, the position determiner such as inside and outside are only limitted to refer to
Determine the relative position on view, rather than absolute position), it is used for configuring and laying in
Qualified coating liquid, bottom reserve pool 11, the side wall upper part with work pool 12 is passed through
Pipeline is connected, and pipeline is installed valve, controls the circulation of coating liquid.Deposit
The bottom in pond 11 is higher than the top of work pool 12, when valve opening, reserve pool
Coating liquid in 11 can flow under the influence of gravity into work pool 12.Vertically bar
16, horizontal support bar 17, plated film matrix 18 constitute shift mechanism (figure is not marked),
Shift mechanism is arranged in work pool 12, carries out plated film operation.
The lower section of work pool 12 arranges filtering ponds 13, the bottom of work pool 12 and mistake
The top in filter tank 13 is connected by pipeline, pipeline is installed valve, works as valve
During unlatching, the coating liquid in work pool 12 can flow under the influence of gravity into filtration
Pond 13, the impurity of coating liquid is filtered by filtering ponds 13.Under filtering ponds 13 side
Side arranges the top of circulatory pool 14, the sidewall bottom of filtering ponds 13 and circulatory pool 14
Be connected by pipeline, pipeline installed valve, filtering ponds 13 bottom high
In the top of circulatory pool 14, the coating liquid when valve opening, in filtering ponds 13
Circulatory pool 14 can be flowed under the influence of gravity into.Circulatory pool 14 and work pool 12
Sidewall above be connected by pipeline, pipeline is installed valve and pump machine 19.
Coating liquid redistribution through coating process can be become qualified by circulatory pool 14
Coating liquid, more qualified coating liquid is pumped to work again by pump machine 19
Pond 12.Being provided above of circulatory pool 14, stores in feed supplement pond 15 feed supplement pond 15
The top of each pulp components needed for coating liquid, the bottom in feed supplement pond 15 and circulatory pool 14
Portion is connected by pipeline, and pipeline is installed valve, and the bottom in feed supplement pond 15 is high
Slurry group in the top of circulatory pool 14, when valve opening, in feed supplement pond 15
Divide and enter circulatory pool 14 under gravity, supplement the slurry lacked in coating liquid
Component.Arranging vertical bar 16 in work pool 12, vertical bar 16 is from work pool 12
Bottom extends to, beyond work pool 12 top, intersect vertically with vertical bar 16
Arranging a horizontal support bar 17, this horizontal support bar 17 is uniform along bar length direction
Hanging and set multiple plated film matrix 18, horizontal support bar 17 can be along vertical bar 16
Upward-downward translation, vertical bar 16 plays the effect of guide rail.
Reserve pool 11 arranges the first control unit 111 and agitator (is schemed not
Mark), the first control unit 111 can detect the plated film fluidity in reserve pool 11
Matter, the first control unit 111 can also control the agitator work in reserve pool 11
Make state, adjust stir speed (S.S.), in order to reach optimal mixing effect.
Work pool 12 arranges the second control unit 121 and agitator, the second control
Unit 121 processed can detect the coating liquid character in work pool 12, it is also possible to control
The duty of agitator in work pool 12 processed, adjusts stir speed (S.S.), in order to reach
To optimal mixing effect.Additionally, the second control unit 121 can also control
The speed of horizontal support bar 17 upward-downward translation, with satisfied different coating liquids to plated film
The requirement of time.
Circulatory pool 14 arranges the 3rd control unit 141 and agitator, the 3rd control
Unit 141 processed can detect the coating liquid character in circulatory pool 14, controls circulation
The duty of agitator in pond 14, adjusts stir speed (S.S.), to reach optimal
Mixing effect.3rd control unit 141 can also control the pumping speed of pump machine 19
Degree.
Wherein, reserve pool 11, work pool 12, filtering ponds 13, circulatory pool 14
It is independently arranged each other with feed supplement pond 15, does not the most exist and depend on
Relation, its relative position is the most unrestricted, only need to be on the pipeline being interconnected
Loading onto pump machine 19, its relative position can arbitrarily change, it is possible to achieve plated film operation.
It addition, reserve pool 11, work pool 12, filtering ponds 13, circulatory pool 14 and feed supplement
The geomery in pond 15 can arbitrarily change, to adapt to different field of employment, suitable
Answer different plated film cultivation scales.Reserve pool 11, work pool 12, filtering ponds 13,
Circulatory pool 14 and feed supplement pond 15 are provided with sealing structure (not shown), seal
Structure can make reserve pool 11, work pool 12, filtering ponds 13, circulatory pool 14
With feed supplement pond 15 in sealing state, reduce the damage of volatile substances to greatest extent
Lose, prevent introduced contaminants to be mixed in coating liquid, affect coating quality, the most also
The harmful substance direct injury to human body can be reduced.
Referring to Fig. 2, the first control unit 111 includes the first temperature control unit
1111, first viscosity control unit the 1112, first electrical conductivity control unit 1113,
First burden control unit 1114 and the first agitator control unit 1115.First
Temperature control unit 1111 can be to the coating liquid of preparation new in reserve pool 11
Temperature detects, and makes the temperature of coating liquid keep within the specific limits, is suitable for
The carrying out of plated film operation, this temperature range is preferably-40 DEG C～40 DEG C.First sticks
Degree control unit 1112 can be to the coating liquid viscosity of preparation new in reserve pool 11
Detect, make the retention of viscosity of coating liquid within the specific limits, it is ensured that plated film
Quality, this viscosity ranges preferably from 200cp～650cp.First electrical conductivity controls
The coating liquid electrical conductivity of preparation new in reserve pool 11 can be carried out by unit 1113
Detection, makes the electrical conductivity of coating liquid be maintained at certain limit, improves the one-tenth of plated film
Power and coating quality, this conductivity range is preferably 1mS/cm～7mS/cm.
First burden control unit 1114 can be to the plated film of preparation new in reserve pool 11
The each component ratio of liquid detects, and the convenient each component ratio of coating liquid that controls keeps
At acceptability limit.In coating liquid, important component is macromolecular material, organic solvent
And electrolyte, the percentage of three components is preferably macromolecular material: You Jirong
Agent: electrolyte=(2%～12%): (30%～98%): (4%～20%).Wherein,
Electrolyte is the lithium hexafluoro phosphate of 1mol, ethylene carbonate: dimethyl carbonate:
Diethyl carbonate=1:1:1, it is also possible to be double trifluoromethanesulfonimide of 1mol
Lithium, ethylene carbonate: GBL: diethyl carbonate=1:1:3, or
Other electrolyte prescriptions.It is additionally provided with the first agitator in reserve pool 11 and controls single
Unit 1115, can be to the mixing speed of agitator, mixing time in reserve pool 11
It is controlled, it is ensured that mixing quality.
Referring to Fig. 3, the second control unit 121 includes the second temperature control unit
1211, second viscosity control unit the 1212, second electrical conductivity control unit 1213,
Second burden control unit 1214 and the second agitator control unit 1215.Its
In, second temperature control unit the 1211, second viscosity control unit 1212,
Two electrical conductivity control unit the 1213, second burden control unit 1214 and second stir
Mix device control unit 1215 to stick with the first temperature control unit 1111, first respectively
Degree control unit the 1112, first electrical conductivity control unit the 1113, first proportioning control
Unit 1114 processed and the first agitator control unit 1115 have identical control
Function.It addition, the second control unit 121 also includes pull rate control unit
1216, this pull rate control unit 1216 putting down up and down horizontal support bar 17
Dynamic speed is controlled, thus indirectly controls plated film matrix 18 at work pool 12
In the plated film time, on the premise of not affecting plated film efficiency as far as possible make plating
Film matrix 18 has good wellability, improves the quality of plated film.
Referring to Fig. 4, the 3rd control unit 141 includes the 3rd temperature control unit
1411, the 3rd viscosity control unit the 1412, the 3rd electrical conductivity control unit 1413,
3rd burden control unit 1414 and the 3rd agitator control unit 1415.Its
In, the 3rd temperature control unit 1411, the 3rd viscosity control unit 1412,
Three electrical conductivity control unit the 1413, the 3rd burden control unit 1414 and the 3rd stir
Mix device control unit 1415 to stick with the first temperature control unit 1111, first respectively
Degree control unit the 1112, first electrical conductivity control unit the 1113, first proportioning control
Unit 1114 processed and the first agitator control unit 1115 have identical control
Function.It addition, the 3rd control unit 141 also includes rate of pumping control unit
1416, the pump machine 19 circulatory pool 14 can being connected between pipeline with work pool 12
Play control action, control rate of pumping and the pump time of pump machine 19 so that
Circulatory pool 14 matches with reserve pool 11, coating liquid in common holding work pool 12
In liberal supply, it is ensured that coating process can be carried out continuously.First viscosity controls single
Unit's the 1112, second viscosity control unit the 1212, the 3rd viscosity control unit 1412
It is and is vertically arranged, and be provided with viscosity transducer (figure along vertical direction
Do not show), viscosity transducer is being distributed at a certain distance, each viscosity transducer
The coating liquid viscosity of its position, all of viscosity transducer can be detected
The data detected reflect into a curve, if curve fluctuation shows the most greatly to erect
Nogata upwards viscosity is widely different.
The method using filming equipment 1 to carry out plated film, mainly comprises the steps that
Step S1: hung on by plated film matrix 18 on horizontal support bar 17, in storage
Standby pond 11 carries out the preparation of coating liquid, starts the agitator in reserve pool 11,
The coating liquid newly prepared is stirred.When the first control unit 111 detects institute
Obtain the temperature of this coating liquid, viscosity, conductivity, component proportion the most qualified after,
Close agitator, open the valve between reserve pool 11 and work pool 12, plated film
Liquid enters work pool 12 from reserve pool 11, prepares plated film.
Step S2: by the pull rate control unit 1216 in work pool 12
Controlling horizontal support bar 17 down translation, speed is arranged on
0.01mm/s～10cm/s, preferably 1mm/s, under this velocity interval, make
Obtain plated film matrix 18 and coating liquid generation harmfulness disturbance (will not be unfavorable for plated film
The disturbance of operation), plated film operation can be allowed again to keep a higher efficiency, and
And plated film matrix 18 is introduced into the part of coating liquid and rear entrance coating liquid
Partial coatings thickness does not produce deviation.When plated film matrix 18 complete wetting coating liquid
After, keep 0s～30s, allow plated film matrix 18 have good wellability so that plating
The abundant plated film of film matrix 18.Fully after plated film, pull rate control unit 1216
Control horizontal support bar 17 up translation, when the fully out plated film of plated film matrix 18
After liquid, it is the thin of 10um～30um that plated film matrix 18 surface covers last layer thickness
Film.In the present embodiment, pull rate control unit 1216 can control level and prop up
Strut about 17 translation repeatedly, thus realize more than 18 infiltration plated film of plated film matrix
Liquid, wherein, the time interval of every twice infiltration ranges preferably from 5min～5h,
Depending on the concrete time interval character according to different coating liquids.
Step S3: in coating process, the second control unit 121 in work pool 12
All the time the temperature of coating liquid, viscosity, conductivity, component proportion are carried out in real time
Detection, when temperature is defective, the second temperature control unit 1211 is to coating liquid
Carry out heating or condensing.When viscosity is when vertical direction is widely different, and second stirs
Mix device control unit 1215 control agitator start (now plated film operation is in and stops
Only state).
Step S4: when electrical conductivity, component proportion are defective, defective plated film
Liquid enters the conjunction in filtering ponds 13, reserve pool 11 and circulatory pool 14 from work pool 12
Lattice coating liquid enters work pool 12, it is ensured that coating liquid in liberal supply.Filtering ponds
13 by the particulate matter dropped from plated film matrix 18 in coating liquid or other
Graininess contaminant filter falls, and enters circulatory pool 14.
Step S5: the coating liquid in circulatory pool 14 is free from admixture coating liquid, but its
Component proportion is defective, and therefore, feed supplement pond 15 can carry out the benefit of component to it
Fill.When the 3rd control unit 141 in circulatory pool 14 detects plated film therein
When liquid temp, viscosity, conductivity, component proportion are the most qualified, by rate of pumping
Control unit 1416 controls pump machine 19 and is pumped in work pool 12 by coating liquid.
Refer to Fig. 5, in the second embodiment of the present invention, this filming equipment 2
Include reserve pool 21, work pool 22, filtering ponds 23, circulatory pool 24 equally, mend
Material pond 25, pump machine 29, pipeline (figure is not marked) and valve (figure is not marked), and
And reserve pool 21, work pool 22, circulatory pool 24 are respectively arranged with the first control
Unit the 211, second control unit 221 and the 3rd control unit 241, with first
Embodiment has identical function.Except for the difference that, the plating in the second embodiment
Film device 2 by arranging coiled strip plated film matrix 27, bar 26 fixed by coiled strip, multiple
Pulley 28 and traction apparatus 30 replace the plated film matrix in first embodiment
18, vertical bar 16 and horizontal support bar 17, turning in the second control unit 221
Dynamic speed control unit (not shown) replaces the pull rate in first embodiment
Control unit 1216, the rotation to pulley 28 is controlled, this velocity of rotation control
The velocity of rotation of pulley 28 can be controlled by unit processed
0.01r/min～100r/min, so that the transmission speed of coiled strip plated film matrix 27
Degree fully infiltrates coating liquid less than 10cm/s, beneficially coiled strip plated film matrix 27,
Fully plated film.Coiled strip plated film matrix 27 is fixed on coiled strip in web-like and fixes bar 26
On, coiled strip plated film matrix 27 wears around multiple pulleys 28 are tangent successively, and
The tangency location of coiled strip plated film matrix 27 and adjacent two pulleys not in the same side,
Coiled strip plated film matrix 27 is so conducive to have enough tension force between pulley,
Can be sufficiently spread out, beneficially the carrying out of plated film operation.Traction apparatus 30 is volume
Material plated film matrix 27 provides pull strength so that coiled strip plated film matrix 27 can be along
Pulley continuous moving.Multiple " V "-shaped settings of pulley 28, wherein must have
At least one pulley 28 is arranged on below the coating liquid liquid level of work pool 22, to protect
Card coiled strip plated film matrix 27 can be with complete wetting in coating liquid, abundant plated film.
Refer to Fig. 6, when arranging a pulley 28 in work pool 22, this volume
Material plated film matrix 27 is the most once through coating liquid, at work pool 22 shown in figure
Three pulleys 28 are inside set, two pulleys 28 below coating liquid liquid level, one
Pulley 28 is more than coating liquid liquid level, and three pulleys 28 are triangular in shape, so set
Put so that this coiled strip plated film matrix 27 twice through coating liquid, thus realize
Coating process plated film two-layer, is greatly improved efficiency.Work as equipment occupation space
During permission, in work pool 22, more than three pulley 28, multiple pulleys 28 can be set
At coating liquid liquid level between the upper and lower every setting, it is achieved one time coating process multilamellar is many
Secondary plated film.
Compared with prior art, the filming equipment 1 that the present invention provides, including storage
Standby pond 11, work pool 12, filtering ponds 13, circulatory pool 14 and shift mechanism, use
In by matrix plated film in coating liquid, coating liquid is flowed into work by described reserve pool 11
Making pond 12, defective coating liquid is flowed into filtering ponds 13, filtering ponds by work pool 12
13 flow into circulatory pool 14 after the filtration of underproof coating liquid, and circulatory pool 14 will close
The coating liquid of lattice is pumped to work pool 12, and shift mechanism is arranged on work pool 12
In, up and down lifting carry out plated film operation, work pool 12 is provided with to temperature,
Viscosity, electrical conductivity, proportioning, agitator, pull rate and velocity of rotation are carried out
The control unit of monitoring.Coating liquid in circulatory pool 14 is mended by feed supplement pond 15
Material, arranges the first control unit 111 in reserve pool 11, arrange in work pool 12
Second control unit 121, arranges the 3rd control unit 141 in circulatory pool 14, the
One control unit the 111, second control unit the 121, the 3rd control unit 141 points
Do not include temperature control unit, viscosity control unit, electrical conductivity control unit,
Burden control unit and agitator control unit, the second control unit 121 is also wrapped
Including pull rate control unit 1216 or velocity of rotation control unit, the 3rd controls
Unit 141 also includes rate of pumping control unit 1416.Wherein, temperature controls
Coating liquid temperature is controlled at-40 DEG C～40 DEG C by unit, and viscosity control unit will plating
The viscosity of film liquid controls at 200cp～650cp, and conductivity control unit is by plated film
The conductivity of liquid controls at 1mS/cm～7mS/cm, and burden control unit is by high score
Ratio between sub-material, organic solvent and electrolyte controls at macromolecule material
Material: organic solvent: electrolyte=(2%～12%): (30%～98%):
(4%～20%), the monitoring in real time to coating liquid character makes coating process all the time
It is under optimum environment and condition and carries out, be effectively guaranteed plated film operation
Quality.This filming equipment 1 is simple for structure, and automaticity is high, decreases
Substantial amounts of manual labor, cost-effective.
The foregoing is only presently preferred embodiments of the present invention, not in order to limit
The present invention processed, all made within the spirit and principles in the present invention any repair
Change, equivalent and improvement etc., should be included in protection scope of the present invention it
In.
Claims (10)
1. a filming equipment, it is characterised in that: include reserve pool,
Work pool, filtering ponds, shift mechanism and control unit, described storage
Standby pond is used for being equipped with qualified coating liquid and qualified coating liquid being flowed into work
Making pond, work pool is used for carrying out plated film operation and by defective plated film
Liquid stream enters filtering ponds, and it is defective that filtering ponds receive from work pool
Coating liquid also carries out again carrying after filtration treatment becomes qualified coating liquid
To work pool, shift mechanism is arranged in work pool, for work
Part lifts up and down and carries out plated film operation, is provided with in work pool
The control list that temperature, viscosity, electrical conductivity, proportioning are monitored
Unit.
2. filming equipment as described in claim 1, its feature exists
In: described filming equipment farther includes feed supplement pond and circulatory pool,
Feed supplement pond is connected with circulatory pool, and feed supplement pond provides qualified plated film
Liquid enters circulatory pool.
3. filming equipment as described in claim 2, its feature exists
In: described shift mechanism includes horizontal support bar and plated film matrix,
Horizontal support bar is used for lifting plated film matrix, and control unit is by plated film
The pull rate of matrix controls at 0.01mm/s～10cm/s.
4. filming equipment as described in claim 2, its feature exists
In: described shift mechanism farther includes pulley and coiled strip plated film base
Body, pulley is used for transmission coiled strip plated film matrix, and control unit will volume
The transmission speed of material plated film matrix controls in 10cm/s.
5. filming equipment as described in claim 4, its feature exists
In: one or more pulley, multiple cunnings are set in described work pool
Take turns at coating liquid liquid level between the upper and lower every setting.
6. one kind uses the plated film that equipment described in claim 1 is carried out
Method, it is characterised in that: include step S1: join in reserve pool
Make qualified coating liquid；Step S2: shift mechanism is in work pool
Translation the most repeatedly, treats film-coating workpiece and carries out plated film；Step S3:
Coating liquid character in work pool is detected by plating control apparatus
Control and step S4: when detecting that in work pool, coating liquid is defective
Time, then control defective coating liquid in work pool and enter filtering ponds,
Work is reentered after filtering ponds filtration treatment becomes qualified coating liquid
Make in pond.
7. film plating process as described in claim 6, its feature exists
In: coating liquid temperature is controlled at-40 DEG C by described control unit
～40 DEG C.
8. film plating process as described in claim 6, its feature exists
In: the viscosity of coating liquid is controlled by described control unit
200cp～650cp.
9. film plating process as described in claim 6, its feature exists
In: the conductivity of coating liquid is controlled by described control unit
1mS/cm～7mS/cm.
10. film plating process as described in claim 6, its feature
It is: the component of described coating liquid includes macromolecular material, organic
Solvent and electrolyte, described control unit by macromolecular material, have
Ratio between machine solvent and electrolyte controls at macromolecular material:
Organic solvent: electrolyte=(2%～12%): (30%～98%):
(4%～20%).
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| CN201610202869.3A CN105887172B (en) | 2016-03-31 | 2016-03-31 | A kind of filming equipment and film plating process |
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| CN201610202869.3A CN105887172B (en) | 2016-03-31 | 2016-03-31 | A kind of filming equipment and film plating process |
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| CN105887172B CN105887172B (en) | 2019-04-26 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108878559A (en) * | 2018-08-22 | 2018-11-23 | 北京铂阳顶荣光伏科技有限公司 | A kind of device and method of depositing solar battery thin film |
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| CN105887172B (en) | 2019-04-26 |
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