CN105865321A - Axial-deviation three-sensitive-grid interdigital metal strain gauge capable of measuring outside axial partial derivative of bias sensitive grid - Google Patents

Axial-deviation three-sensitive-grid interdigital metal strain gauge capable of measuring outside axial partial derivative of bias sensitive grid Download PDF

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CN105865321A
CN105865321A CN201510885213.1A CN201510885213A CN105865321A CN 105865321 A CN105865321 A CN 105865321A CN 201510885213 A CN201510885213 A CN 201510885213A CN 105865321 A CN105865321 A CN 105865321A
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sensitive
sensitive grid
grid
segment
axial
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CN105865321B (en
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张端
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Guangdong Gaohang Intellectual Property Operation Co ltd
Pizhou Huiteng Jingfa Construction Co ltd
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Zhejiang University of Technology ZJUT
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/16Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge
    • G01B7/18Measuring arrangements characterised by the use of electric or magnetic techniques for measuring the deformation in a solid, e.g. by resistance strain gauge using change in resistance

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  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Measurement Of Force In General (AREA)

Abstract

An axial-deviation three-sensitive-grid interdigital metal strain gauge capable of measuring an outside axial partial derivative of a bias sensitive grid comprises a substrate and three sensitive grids fixed to the substrate. Each sensitive grid includes a sensitive segment and a transition segment. Axes of all the sensitive segments are straight lines which are arranged in parallel and are in a same plane. In a plane determined by the axes of the sensitive segments, an axial direction is along an axis direction of the sensitive segments and a horizontal direction is vertical to the axial direction. Center axes of the three sensitive grids are biased along an upward direction and are not biased along the horizontal direction. The three sensitive grids are a left sensitive grid, a middle sensitive grid and a right sensitive grid along the axial direction from left to right according to a sensitive grid center position sequence. First two and last two sensitive grids are arranged in an interdigital mode. Total resistance change values of the sensitive segments of the left sensitive grid, the middle sensitive grid and the right sensitive grid under a same strain are 3 to 8 to 5. The strain gauge can detect that a distance from a right outer side of the right sensitive grid to a right sensitive grid center equals to a strain axial first order partial derivative at a center spacing of the middle and right sensitive grids.

Description

The axial deviation three interdigital gold of sensitive grid of axially local derviation outside biasing sensitive grid can be measured Belong to foil gauge
Technical field
The present invention relates to sensor field, especially a kind of metal strain plate.
Background technology
The operation principle of metal resistance strain gauge is resistance strain effect, and i.e. tinsel is when effect strained, its electricity Resistance occurs to change accordingly along with the size of occurred mechanically deform (stretch or compress).The theoretical formula of resistance strain effect As follows:
R = ρ L S - - - ( 1 )
Wherein R is its resistance value, and ρ is metal material resistivity, and L is metal material length, and S is metal material sectional area. Tinsel is bearing strain and during there is mechanically deform, ρ, L, S three will change, thus will necessarily cause gold Belong to the change of material resistance value.When metal material is stretched, length increases, and sectional area reduces, and resistance value increases;When by compression Time, length reduces, and sectional area increases, and resistance value reduces.Therefore, as long as the change of resistance value can be measured, just understand wiry Strained situation.Metal material resistance change rate formula can be derived by relevant knowledges such as formula (1) and the mechanics of materials
Δ R R = K Δ L L = K ϵ - - - ( 2 )
Wherein Δ R is resistance variation amount, and Δ L is metal material change of length on pulling force or pressure action direction Amount, ε is that the strain on same direction is usually referred to as axial strain, and K is metal material ga(u)ge factor.
In actual applications, metal resistance strain gauge is pasted onto Sensor Elastic Element or the table of tested machine components Face.When the flexible member in sensor or tested machine components are produced strain by active force, it is pasted onto foil gauge thereon also There is identical mechanically deform therewith, cause foil gauge resistance that corresponding change occurs.At this moment, resistance strain gage is just by mechanical quantity Be converted to the variable quantity output of resistance.
But we are also required to understand the partial derivative of workpiece strain sometimes, have three kinds of occasions such as below, but are not limited to this Three, need to use surface of the work strain partial derivative:
First, near at workpiece shapes sudden change, there will be strain concentration, often become workpiece and first occur damaging it Place, monitors the strain partial derivative near at shape sudden change, can obtain strain intensity at this intuitively.
Second, building, bridge, plant equipment are existed in a large number by comer pieces, the relevant knowledge of the mechanics of materials teaches that, bending The axial strain of beam surface is directly proportional to section turn moment, and the axial partial derivative of section turn moment is directly proportional to cross section shearing strain, namely Cross section shearing strain can be known by the axial partial derivative of surface axial strain, and this shearing strain cannot be with foil gauge at workpiece table Face is directly measured;
3rd, during applied elasticity research workpiece strain, internal strain is decided by partial differential equation, and equation solution needs Boundary condition, and surface of the work strain partial derivative is exactly one of boundary condition, this is that general foil gauge cannot provide.
Additionally, the position such as at some position to workpiece, the such as shaft shoulder, part edge, due to the sudden change of geomery, its Strain is often corresponding exists bigger change.But, just due to the sudden change of geomery so that at this, more difficult arrangement is general Foil gauge, needs a kind of product that can measure the inclined edge of foil gauge even edge outer fix rather than center position strain local derviation Product.So just may be implemented in and arrange foil gauge at a certain distance from avoiding the more difficult target measured point laying foil gauge, and finally survey Amount arrives the strain local derviation at this target measured point.
Summary of the invention
In order to overcome existing metal strain plate cannot detect the deficiency of strain local derviation, the present invention provides one to measure Should change that effectively to detect the axial deviation three of axial local derviation outside the measured biasing sensitive grid of the axial local derviation of surface strain quick The sense interdigital metal strain plate of grid, particularly measure workpiece corner, edge etc. foil gauge is had size limitation position or other not Preferably arrange the axial single order local derviation of foil gauge position.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of axial deviation three interdigital metal strain plate of sensitive grid measuring axially local derviation outside biasing sensitive grid, including Substrate, described metal strain plate also includes three sensitive grids, and the two ends of each sensitive grid connect a pin, described substrate respectively Upper fixing described three sensitive grids;
Each sensitive grid includes that sensitive segment and changeover portion, the two ends of described sensitive segment are changeover portion, and described sensitive segment is in carefully Strip, described changeover portion is tubbiness shape, and the resistance of described sensitive segment is much larger than the resistance of described changeover portion, same strain state Under the increased resistance value of described sensitive segment much larger than the increased resistance value of described changeover portion, the increased resistance value of described changeover portion connects It is bordering on 0;
All cross section centres of form of each sensitive segment constitute sensitive segment axis, and this sensitive segment axis is straight line section, institute State the axis of each sensitive segment in three sensitive grids parallel and be generally aligned in the same plane, in the determined plane of sensitive segment axis, edge Described sensitive segment axis direction the most axially, is horizontal with axially vertical direction;Its both sides resistance value is there is on each sensitive segment An equal cross section, takes this cross-section centroid position and is constituted place sensitive segment with this sensitive segment resistance value for nominal mass Name particle, the center that centroid position is sensitive grid that the nominal particle of each sensitive segment is collectively forming;
Three sensitive grid centers have deviation, in the horizontal zero deflection in the axial direction;Sensitive grid centre bit pressed by three sensitive grids The order put, is called left sensitive grid, middle sensitive grid and right sensitive grid the most from left to right;Left sensitive grid center with in quick The distance at Gan Shan center is Δ x1, middle sensitive grid center is Δ x with the distance at right sensitive grid center1, each sensitive segment axis is determined In plane, left sensitive grid and middle sensitive grid are interdigital layout, and middle sensitive grid and right sensitive grid are interdigital layout;
The sensitive segment all-in resistance of left sensitive grid, middle sensitive grid and right sensitive grid is the proportionate relationship of 3:8:5, left sensitive grid, Middle sensitive grid and the sensitive segment of the right sensitive grid all-in resistance changing value of sensitive segment also ratio in 3:8:5 under identical strain is closed System.
Further, all shape of cross section consistent size of each sensitive segment, take the axis point midway of each sensitive segment And constituted the nominal particle of place sensitive segment with this sensitive segment resistance value for nominal mass, described left sensitive grid, middle sensitive grid and The sensitive segment total length of right sensitive grid is the proportionate relationship of 3:8:5.The program is a kind of scheme that can select, name particle As long as position meets the cross section position of form center that its both sides resistance value is equal, it is also possible to be other positions.
Further, described left sensitive grid and right sensitive grid are interdigital layout;It is of course also possible to non-interdigital layout.Described Interdigital layout refers to: each sensitive segment axis of two sensitive grids institute in the plane, two sensitive with in sensitive segment axis vertical direction The sensitive segment distribution straggly of grid, the order and the number of times that occur the sensitive segment of two sensitive grids in the direction respectively do not limit.
Further, two pins of right sensitive grid are positioned on the right side of foil gauge or on the left of foil gauge.Come right side to make to answer Become sheet lateral dimension less, and come left side and can reduce the right sensitive grid center distance to foil gauge right side edge.
Further, relatively in sensitive grid, the sensitive segment axial length of right sensitive grid can be shorter and cross direction profiles can be closeer. Purpose is the distance reducing right sensitive grid center to foil gauge right side edge.
Utilizing the linear relationship between metal material increased resistance value and strain, this foil gauge is as common foil gauge May be used for measuring strain.On the other hand, according in numerical differentiation theory (compile such as Yi Fengkang etc., National Defense Industry Press 1978 " numerical computation method " page 21 (1.4.11)-(1.4.14) formula that year December is published makees equidistant interpolation analysis) about single order local derviation Circular, f (x, the numerical computation method of x direction first-order partial derivative y) is as follows:
∂ f ∂ x | ( x 2 , y ) ≈ 1 2 h [ 3 f ( x 0 , y ) - 8 f ( x 1 , y ) + 5 f ( x 2 , y ) ] - - - ( 3 )
Wherein x1=x0+ h, x2=x1+ h, paying special attention to above formula is (x2+ h, y) the first-order partial derivative value formula of position, this formula Truncated error less for o (h2) it is the higher order indefinite small of step-length square.By it is generally acknowledged sensitive grid electricity in formula (2) engineering Resistance variable quantity direct ratio and the strain at sensitive grid center, in conjunction with each sensitive grid resistance and at same strain purgation resistance change Proportionate relationship, the resistance of left sensitive grid and right sensitive grid and deduct the resistance value of middle sensitive grid, then divided by left sensitive grid center and The distance at right sensitive grid center is the axial single order numerical value local derviation of strain;Particularly, this is right sensitive grid center h distance to the right The axial single order numerical value local derviation at place, therefore the advantage of this foil gauge is that measuring workpiece corner, edge etc. has size to foil gauge Restriction site or other should not arrange the axial single order local derviation of foil gauge position.
It should be noted that keep left sensitive grid, middle sensitive grid and right sensitive grid changeover portion all-in resistance and changeover portion electricity in technique Hinder external strain purgation variable quantity be the numerical relation of 3:8:5 to heighten certainty of measurement, if the resistance of changeover portion and should Become lower resistance change can not ignore, also can be eliminated when detection as systematic error.
Further, described metal strain plate also includes that cover plate, described cover plate are covered in described sensitive grid and substrate.
Further, described sensitive grid is wire form, foil, diaphragm type or thick-film type sensitive grid.
Further, described substrate is glued membrane substrate, glass fabric substrates, asbestos substrate, metallic substrates or temporary substrate.
Described three sensitive grid left, center, right are arranged in substrate.It is of course also possible to be other arrangement.
Beneficial effects of the present invention is mainly manifested in:: the strain axial at right outside, right sensitive grid center one can be detected Rank local derviation, transversely at this with right sensitive grid center zero deflection, axially upper be equal to the spacing at right sensitive grid center at this in quick Gan Shan center and the spacing at right sensitive grid center.Therefore the present invention can measure workpiece corner, edge etc. has size to limit foil gauge Position processed or other should not arrange the axial single order local derviation of foil gauge position.
Accompanying drawing explanation
Fig. 1 is the showing of the axial deviation three interdigital metal strain plate of sensitive grid that can measure axially local derviation outside biasing sensitive grid It is intended to.
Fig. 2 is that the axial deviation three interdigital metal strain plate of sensitive grid that can measure axially local derviation outside biasing sensitive grid is overlooked Figure.
Fig. 3 is the axial deviation three that right sensitive grid pin is arranged in axially local derviation outside the measured biasing sensitive grid in left side Sensitive grid interdigital metal strain plate top view.
Fig. 4 is measuring bridge schematic diagram.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings.
With reference to Fig. 1~Fig. 4, a kind of axial deviation three interdigital gold of sensitive grid measuring axially local derviation outside biasing sensitive grid Belonging to foil gauge, including substrate, described metal strain plate also includes three sensitive grids, and the two ends of each sensitive grid connect one respectively Pin, described substrate is fixed described three sensitive grids;
Each sensitive grid includes that sensitive segment and changeover portion, the two ends of described sensitive segment are changeover portion, and described sensitive segment is in carefully Strip, described changeover portion is tubbiness shape, and the resistance of described sensitive segment is much larger than the resistance of described changeover portion, same strain state Under the increased resistance value of described sensitive segment much larger than the increased resistance value of described changeover portion, the increased resistance value of described changeover portion connects It is bordering on 0;
All cross section centres of form of each sensitive segment constitute sensitive segment axis, and this sensitive segment axis is straight line section, institute State the axis of each sensitive segment in three sensitive grids parallel and be generally aligned in the same plane, in the determined plane of sensitive segment axis, edge Described sensitive segment axis direction the most axially, is horizontal with axially vertical direction;Its both sides resistance value is there is on each sensitive segment An equal cross section, takes this cross-section centroid position and is constituted place sensitive segment with this sensitive segment resistance value for nominal mass Name particle, the center that centroid position is sensitive grid that the nominal particle of each sensitive segment is collectively forming;
Three sensitive grid centers have deviation, in the horizontal zero deflection in the axial direction;Sensitive grid centre bit pressed by three sensitive grids The order put, is called left sensitive grid, middle sensitive grid and right sensitive grid the most from left to right;Left sensitive grid center with in quick The distance at Gan Shan center is Δ x1, middle sensitive grid center is Δ x with the distance at right sensitive grid center1, each sensitive segment axis is determined In plane, left sensitive grid and middle sensitive grid are interdigital layout, and middle sensitive grid and right sensitive grid are interdigital layout;Left sensitive grid, in The sensitive segment all-in resistance of sensitive grid and right sensitive grid is the proportionate relationship of 3:8:5, left sensitive grid, middle sensitive grid and right sensitive grid Sensitive segment is the all-in resistance changing value of sensitive segment also proportionate relationship in 3:8:5 under identical strain.
Further, all shape of cross section consistent size of each sensitive segment, take the axis point midway of each sensitive segment And constituted the nominal particle of place sensitive segment with this sensitive segment resistance value for nominal mass, described left sensitive grid, middle sensitive grid and The sensitive segment total length of right sensitive grid is the proportionate relationship of 3:8:5.The program is a kind of scheme that can select, name particle As long as position meets the cross section position of form center that its both sides resistance value is equal, it is also possible to be other positions.
Further, described left sensitive grid and right sensitive grid are interdigital layout;It is of course also possible to non-interdigital layout.Described Interdigital layout refers to: each sensitive segment axis of two sensitive grids institute in the plane, two sensitive with in sensitive segment axis vertical direction The sensitive segment distribution straggly of grid, the order and the number of times that occur the sensitive segment of two sensitive grids in the direction respectively do not limit.
Further, two pins of right sensitive grid can be located on the right side of foil gauge or on the left of foil gauge.Come right side to make Foil gauge lateral dimension is less, and comes left side and can reduce the right sensitive grid center distance to foil gauge right side edge, such as figure 4。
The axial deviation three interdigital metal strain of sensitive grid of axial local derviation outside the measured biasing sensitive grid of the present embodiment Sheet, including substrate 1, described metal strain plate also includes three sensitive grids, and the two ends of each sensitive grid connect a pin respectively, Described three sensitive grids are fixed in described substrate 1.
Left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 can be fixed, for keeping each sensitive grid to fix on substrate 1 Shape, positions and dimensions;Substrate 1 is the thinnest, thus the strain of surface of test piece is accurately transfer to left sensitive grid 2, middle sensitive grid 3 With right sensitive grid 4.Substrate 1 can be glued membrane substrate, glass fabric substrates, asbestos substrate, metallic substrates and temporary substrate.Generally With cohering, weld, the mode such as ceramic spraying substrate is fixed on the tested position of test block.Also can be printed on some in substrate 1 to use Lines in foil gauge location.
The materials such as cover plate paper using or glue are made, and are covered in left sensitive grid 2, middle sensitive grid 3, right sensitive grid 4 and substrate 1 On, play the protective layer of the effects such as protection against the tide, corrosion protection, loss prevention.
Pin 5 is used for connecting sensitive grid and measuring circuit, and left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 are respectively arranged with two Pin 5, to foil and membrane type foil gauge, left sensitive grid 2, middle sensitive grid 3 and the right sensitive grid 4 that pin 5 is connected with it It is integrated.Two pins of left sensitive grid 2 are 5-1 and 5-2, and two pins of middle sensitive grid 3 are 5-3 and 5-4, right sensitive grid 4 Two pins be 5-5 and 5-6;Pin 5-5 and 5-6 can be arranged in the right side of foil gauge, sees Fig. 1 and Fig. 2, can obtain less Foil gauge lateral dimension;Pin 5-5 and 5-6 also can be arranged in the left side of foil gauge, sees Fig. 3, it is therefore an objective to reduces right sensitive grid 4 and arrives The distance of foil gauge right side edge.
Left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 are according to its metal sensitive material and the difference of processing technique, permissible For wire form, foil, diaphragm type, thick-film type.No matter the thickness of which kind of left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 is the least, The axial length making left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 changes with the deformation of its depended on workpiece.The present invention Basic it is critical that cooperation between left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4, there are following main points:
First, substrate is arranged three sensitive grids, is called left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4.
Second, left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 all can be divided into multiple sensitive segment 6 and multiple changeover portion 7, Each sensitive segment 6 is connected formation sensitive grid by each changeover portion 7.Comparatively, sensitive segment 6 is elongated in shape, resistance is relatively big and it hinders It is worth strain more sensitive;Described changeover portion 7 is basic in tubbiness shape so that the resistance of described changeover portion is the least and to strain not Sensitivity, under duty, resistance variations is close to 0, and therefore the summation of sensitive segment resistance is essentially the all-in resistance of single sensitive grid. Fig. 2 has marked sensitive segment 6 and changeover portion 7 in more detail from apparent angle.
3rd, the sensitive segment 6 of each sensitive grid is in elongated strip, and all cross section centres of form of each sensitive segment 6 constitute quick Sense section axis, this sensitive segment 6 axis is straight line section, and the axis of each sensitive segment 6 is parallel and is generally aligned in the same plane.Each All cross sections of sensitive segment 6 are consistent along the projection of shape of sensitive segment axis direction.Take the axis point midway of each sensitive segment And the nominal particle of place sensitive segment is constituted with this sensitive segment resistance value for nominal mass, the nominal particle of each sensitive segment is common The center that centroid position is sensitive grid formed.
4th, sensitive segment 6 total length of left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 is the proportionate relationship of 3:8:5, Sensitive segment 6 all-in resistance of left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 is the proportionate relationship of 3:8:5, left sensitive grid 2, in quick The sensitive segment 6 of sense grid 3 and the right sensitive grid 4 all-in resistance changing value of sensitive segment also ratio in 3:8:5 under identical strain is closed System.
5th, overlook left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4, they are respectively provided with axis of symmetry and axis of symmetry overlaps (x-axis in Fig. 2), left sensitive grid 2, middle sensitive grid 3 are all parallel with this axis of symmetry, respectively with the right respective sensitive segment of sensitive grid 46 The sensitive segment 6 of sensitive grid is all distributed about this axial symmetry.Therefore, it can be said that left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 are same Axle, i.e. detects the center of equidirectional strain and left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 all in x-axis, it Center have axial deviation without lateral deviation.According to the top view of foil gauge in Fig. 2, the sensitive segment 6 of left sensitive grid 2 has laterally Axis of symmetry yL, the center of left sensitive grid 2 is at x-axis and yLThe intersection point of axle, the sensitive segment 6 of middle sensitive grid 3 has lateral symmetry axle yMIn, The center of sensitive grid 3 is at x-axis and yMThe intersection point of axle, the sensitive segment 6 of right sensitive grid 4 has lateral symmetry axle yR, in right sensitive grid 4 The heart is at x-axis and yRThe intersection point of axle.
6th, left sensitive grid 2 center is Δ x with the distance at middle sensitive grid 3 center1, middle sensitive grid 3 center and right sensitive grid The distance at 4 centers is Δ x1, the center of the most left sensitive grid 2 is also x-axis and y with the line midpoint at the center of right sensitive grid 4MAxle Intersection point, as shown in Figure 2.By Fig. 2, in each sensitive segment 6 determined plane of axis, left sensitive grid 2 and middle sensitive grid 3 are in interdigital cloth Put, middle sensitive grid 3 and right sensitive grid 4 in interdigital layout, left sensitive grid 2 and right sensitive grid 4 in can interdigital layout also can be contrary; Described interdigital layout refers to: each sensitive segment axis of two sensitive grids institute in the plane, with sensitive segment axis vertical direction on two The sensitive segment distribution straggly of sensitive grid, the order and the number of times that occur the sensitive segment of two sensitive grids in the direction respectively do not limit System.
Owing to the relative position of left sensitive grid 2, middle sensitive grid 3 and right sensitive grid 4 is ensured by phase by foil gauge production technology When accurately securing, this is also that the present invention can detect one of workpiece key straining axial partial derivative.
In sum, the left sensitive grid of the present invention 2, middle sensitive grid 3 and right sensitive grid 4 under same strain increased resistance value in The proportionate relationship of 3:8:5, each sensitive grid central cross zero deflection axially has deviation, left sensitive grid 2 center to middle sensitive grid 3 center Distance equal to the distance of right sensitive grid 4 with middle sensitive grid 3 center.
Making free state bottom left sensitive grid 2 resistance is RL0, middle sensitive grid 3 resistance is RM0, right sensitive grid 4 resistance is RR0, should There is RL0+RR0=RM0=R0.The foil gauge of the present invention is placed in certain when having surface strain, left sensitive grid 2 resistance is R0+ΔRL, Middle sensitive grid 3 resistance is R0+ΔRM0, right sensitive grid 3 resistance is R0+ΔRR;On the other hand, left sensitive grid 2 and right sensitive grid 4 Center lay respectively at x-axis and y in Fig. 2LIntersection point and x-axis and yRIntersection point, axially upper at a distance of 2 Δ x1.IfFor right sensitivity Grid 4 central right Δ x1Place, namely x-axis and y in Fig. 2OIntersection point, utilize sensitive grid resistance and surface strain relation and The formula (3) of numerical differentiation has:
∂ ϵ ∂ x | x ‾ ≈ 3 ϵ L - 8 ϵ M + 5 ϵ R 2 Δx 1 ≈ K ( ΔR L - ΔR M + ΔR R ) 2 Δx 1 . - - - ( 4 )
Wherein εLFor the strain of left sensitive grid 2 center, εMFor the strain of middle sensitive grid 3 center, εRFor right sensitive grid 4 The strain of center.This is i.e. the principle that the present embodiment measures the axial local derviation of surface strain.Pay special attention to, the number that above formula is calculated Value differential is Δ x outside right sensitive grid 4 center deviation1The strain axial single order local derviation of position, this position is according to interdigital size not With can be at outside the right part of foil gauge, right side edge, even edge, therefore having and being easy to measure workpiece corner, edge Advantage Deng the axial single order local derviation that foil gauge is had size limitation position.Pin 5-5 and 5-6 of right sensitive grid 4 presses Fig. 3 can cloth Being placed on the left of foil gauge, its purpose is all the distance as far as possible reducing right sensitive grid 4 center to foil gauge right side edge, in order to Play above-mentioned advantage further.
The present embodiment coordinate electric bridge can be used for measuring strain, straining axial single order local derviation, it is assumed that bridge input voltage is ui, output voltage be uo, Fig. 4 is shown in by the schematic diagram of measuring bridge.When without workpiece effects of strain, each arm resistance of electric bridge is according to up time Pin direction is respectively labeled as R1、R2、R3、R4, also with these sign flag resistance place electric bridges in the case of will not obscuring.Often Sensitive grid or the resistance of foil gauge can be laid on individual electric bridge.Identical with general foil gauge layout, if at multiple brachium pontis Upper arrangement sensitive grid, order, the requirement of strain difinite quality to each installation position.During effects of strain without workpiece, the output of electric bridge Voltage equation is
u o = R 1 R 3 - R 2 R 4 ( R 1 + R 2 ) ( R 3 + R 4 ) u i ; - - - ( 5 )
Now, it is desirable to bridge balance i.e. uo=0, then it must is fulfilled for so-called bridge balance condition R1R3-R2R4=0, The electric bridge used meets further
R1=R2=R3=R4, (6)
Because, first, when meeting condition (6), the highest according to relevant theoretical foil gauge sensitivity;Second, measure strain or answer The method becoming axial local derviation is required to condition (6) establishment.When also there is strain with external world's strain in foil gauge, above-mentioned bridge balance Condition is the most no longer set up, now
u o = ( R 1 + ΔR 1 ) ( R 3 + ΔR 3 ) - ( R 2 + ΔR 2 ) ( R 4 + ΔR 4 ) ( R 1 + ΔR 1 + R 2 + ΔR 2 ) ( R 3 + ΔR 3 + R 4 + ΔR 4 ) u i ≈ R 3 ΔR 1 + R 1 ΔR 3 - R 4 ΔR 2 - R 2 ΔR 4 + ΔR 1 ΔR 3 - ΔR 2 ΔR 4 ( R 1 + R 2 ) ( R 3 + R 4 ) u i ≈ ( ΔR 1 - ΔR 2 ) + ( ΔR 3 - ΔR 4 ) 4 R 1 u i - - - ( 7 )
Due to Δ Ri< < RiFirst ≈ of (i=1,2,3,4) event sets up, and second ≈ is as Δ R1-ΔR2With Δ R3-ΔR4 Jack per line or contrary sign but | Δ R1-ΔR2| with | Δ R3-ΔR4| not in close proximity to time set up, engineering rationally selects foil gauge Installation position can realize completely.It is generally available the voltage measurement strain that formula (7) obtains;Can convolution to straining axial local derviation (4) and formula (7), reasonable design arranges each brachium pontis sensitive grid and resistance, such as brachium pontis R1Sensitive grid 3 in layout, brachium pontis R2Series connection Arrange left sensitive grid 2 and right sensitive grid 4, the configuration of remaining brachium pontis and brachium pontis R1Equivalent resistance, can obtain and right sensitive grid 4 center Outside Δ x partially1Position strains the magnitude of voltage u that axial single order local derviation is linearo, this voltage is that small-signal need to be amplified.

Claims (9)

1. can measure the axial deviation three interdigital metal strain plate of sensitive grid of axially local derviation outside biasing sensitive grid, including base The end, it is characterised in that: described metal strain plate also includes three sensitive grids, and the two ends of each sensitive grid connect one respectively and draw Foot, described substrate is fixed described three sensitive grids;
Each sensitive grid includes that sensitive segment and changeover portion, the two ends of described sensitive segment are changeover portion, and described sensitive segment is elongate strip Shape, described changeover portion is tubbiness shape, and the resistance of described sensitive segment is much larger than the resistance of described changeover portion, institute under same strain state State the increased resistance value of the sensitive segment increased resistance value much larger than described changeover portion, the increased resistance value of described changeover portion close to 0;
All cross section centres of form of each sensitive segment constitute sensitive segment axis, and this sensitive segment axis is straight line section, and described three In individual sensitive grid, the axis of each sensitive segment is parallel and is generally aligned in the same plane, in the determined plane of sensitive segment axis, along described Sensitive segment axis direction the most axially, is horizontal with axially vertical direction;Its both sides resistance value is there is equal on each sensitive segment A cross section, take this cross-section centroid position and constituted the name of place sensitive segment with this sensitive segment resistance value for nominal mass Particle, the center that centroid position is sensitive grid that the nominal particle of each sensitive segment is collectively forming;
Three sensitive grid centers have deviation, in the horizontal zero deflection in the axial direction;Sensitive grid center pressed by three sensitive grids Sequentially, left sensitive grid, middle sensitive grid and right sensitive grid it are called the most from left to right;Left sensitive grid center and middle sensitive grid The distance at center is Δ x1, middle sensitive grid center is Δ x with the distance at right sensitive grid center1, each determined plane of sensitive segment axis On, left sensitive grid and middle sensitive grid are interdigital layout, and middle sensitive grid and right sensitive grid are interdigital layout;
The sensitive segment all-in resistance of left sensitive grid, middle sensitive grid and right sensitive grid is the proportionate relationship of 3:8:5, left sensitive grid, in quick Sense grid and the sensitive segment of right sensitive grid be the all-in resistance changing value of sensitive segment also proportionate relationship in 3:8:5 under identical strain.
The axial deviation three interdigital metal of sensitive grid of axially local derviation outside biasing sensitive grid can be measured the most as claimed in claim 1 Foil gauge, it is characterised in that: all shape of cross section consistent size of each sensitive segment, take the position, axis midpoint of each sensitive segment Put and constituted with this sensitive segment resistance value for nominal mass the nominal particle of place sensitive segment, described left sensitive grid, middle sensitive grid It is the proportionate relationship of 3:8:5 with the sensitive segment total length of right sensitive grid.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: described left sensitive grid and right sensitive grid are interdigital layout.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: two pins of right sensitive grid are positioned on the right side of foil gauge or on the left of foil gauge.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: sensitive grid in relatively, the sensitive segment axial length of right sensitive grid can be shorter and cross direction profiles can Closeer.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: described metal strain plate also includes that cover plate, described cover plate are covered in described sensitive grid and substrate On.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: described sensitive grid is wire form, foil, diaphragm type or thick-film type sensitive grid.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: described substrate is glued membrane substrate, glass fabric substrates, asbestos substrate, metallic substrates or interim Substrate.
Axial deviation three sensitive grid that can measure axially local derviation outside biasing sensitive grid the most as claimed in claim 1 or 2 is interdigital Metal strain plate, it is characterised in that: described three sensitive grid left, center, right are arranged in substrate.
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