CN105861998B - ZrTiN+MoS2/ Ti/Zr combines coated cutting tool and its preparation process - Google Patents
ZrTiN+MoS2/ Ti/Zr combines coated cutting tool and its preparation process Download PDFInfo
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- CN105861998B CN105861998B CN201610428786.6A CN201610428786A CN105861998B CN 105861998 B CN105861998 B CN 105861998B CN 201610428786 A CN201610428786 A CN 201610428786A CN 105861998 B CN105861998 B CN 105861998B
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- 238000005520 cutting process Methods 0.000 title claims abstract description 39
- 229910052961 molybdenite Inorganic materials 0.000 title claims abstract description 25
- 229910052982 molybdenum disulfide Inorganic materials 0.000 title claims abstract description 25
- 238000002360 preparation method Methods 0.000 title claims abstract description 13
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 title claims abstract 6
- 238000000576 coating method Methods 0.000 claims abstract description 51
- 230000007704 transition Effects 0.000 claims abstract description 46
- 239000011248 coating agent Substances 0.000 claims abstract description 34
- 239000000314 lubricant Substances 0.000 claims abstract description 18
- 239000011159 matrix material Substances 0.000 claims abstract description 16
- 229910000997 High-speed steel Inorganic materials 0.000 claims abstract description 4
- 238000000151 deposition Methods 0.000 claims description 36
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 34
- 238000010891 electric arc Methods 0.000 claims description 30
- 239000002131 composite material Substances 0.000 claims description 19
- 230000008021 deposition Effects 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 12
- 238000004140 cleaning Methods 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- 238000007733 ion plating Methods 0.000 claims description 8
- 239000007888 film coating Substances 0.000 claims description 5
- 238000009501 film coating Methods 0.000 claims description 5
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 4
- 238000001035 drying Methods 0.000 claims description 4
- 239000012535 impurity Substances 0.000 claims description 4
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 4
- 230000009467 reduction Effects 0.000 claims description 4
- 238000005477 sputtering target Methods 0.000 claims description 4
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims 1
- 239000010931 gold Substances 0.000 claims 1
- 229910052737 gold Inorganic materials 0.000 claims 1
- 238000002604 ultrasonography Methods 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 5
- 230000001050 lubricating effect Effects 0.000 abstract description 5
- 229910045601 alloy Inorganic materials 0.000 abstract description 3
- 239000000956 alloy Substances 0.000 abstract description 3
- 239000002184 metal Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 11
- 239000000463 material Substances 0.000 description 7
- 238000005461 lubrication Methods 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 239000011247 coating layer Substances 0.000 description 4
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000008199 coating composition Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 229910004211 TaS2 Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000010534 mechanism of action Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to machine-building metal cutting tool fields, more particularly to a kind of ZrTiN+MoS2/ Ti/Zr combines coated cutting tool and its preparation process.Its tool matrix material is high-speed steel or hard alloy, and coating is multilayered structure, is followed successively by coating surface by matrix：Ti transition zones, Ti/Zr transition zones, ZrTiN hard coats, Ti/Zr transition zones, MoS2/ Ti/Zr lubricant coatings.This combination coated cutting tool combines the more first hard coated cutting tools of ZrTiN and MoS2The advantages of/Ti/Zr lubricant coating cutters, not only has higher hardness, but also has lubricating action and lower friction coefficient, so that the performance of coated cutting tool is had and significantly increases.
Description
Technical field
The invention belongs to machine-building metal cutting tool fields, more particularly to a kind of ZrTiN+MoS2/ Ti/Zr is combined
Coated cutting tool and its preparation process.
Background technology
According to the property of coating material, coated cutting tool can be divided into two major classes, i.e.,：" high rigidity " coated cutting tool and " lubrication " apply
Layer cutter.Its major advantage of " high rigidity " coated cutting tool is that hardness is high, wear-resisting property is good, and typical " high rigidity " coating material has
TiN, TiCN, TiAlN and diamond-like etc..The target that " lubrication " coated cutting tool is pursued is low-friction coefficient, typical " lubrication "
Coating material be the solid lubricant with low-friction coefficient (such as：MoS2、WS2、TaS2Sulfides).Current cutter coat
Development trend be：Coating composition tends to diversification and Composite.Composite coating can integrate the advantages of single coating, compound multicoat
And its appearance of the relevant technologies, the bond strength of coating and matrix not only can be improved, but also take into account the comprehensive performance of a variety of single coatings, had made
The performance of coated cutting tool significantly improves.
Chinese patent (patent No. ZL 2,006 1 0068975.3) reports " the compound soft coating cutter of self-lubricating and its system
Preparation Method ", it is the MoS prepared using intermediate frequency magnetic control+multi sphere method film plating process2/ Zr composite coating layer cutters, tool surface are
MoS2Layer, MoS2There is Ti transition zones between layer and tool matrix.The cutter no cutting fluid is cooling, in cutting process of lubrication,
The lubricating film with lubricating action can be formed in tool surface, to realize the lubricating function of cutter itself, but it is this
Lubricant coating hardness is relatively low and the service life of cutter coat especially flank coating is caused not grown.Document (Acta
Materials.2011,59(1):68-74) report the mechanism of action and usability when the processing of TiN hard conating Tool in Cutting
Can, but this hard conating is limited it and is widely used due to relatively high friction coefficient.Chinese patent TiN+MoS2/Zr
It combines coated cutting tool (patent No. ZL 201110081977.7) and compound film plating process preparation is plated using medium frequency magnetron sputtering and electric arc
TiN+MoS2/ Zr combines coated cutting tool, but combination coating cutter life in dry cutting superhard material can not still expire
Foot actual use needs.It is prepared by Chinese patent gradient multiple coating tool and preparation method thereof (patent No. 201110214393.2)
ZrTiN composite coating layer cutters have higher hardness and strength, an excellent wear-resistant and corrosion resistance, but it is coloured cutting
Friction coefficient when metal material between its knife bits is higher, influences cutter life.
Invention content
It is an object of the invention to overcome the shortcomings of above-mentioned existing coated cutting tool technology, in conjunction with polynary hard coat and lubrication
The advantages of coating, provides a kind of ZrTiN+MoS2/ Ti/Zr combines coated cutting tool and its preparation process.
The present invention is achieved in the following ways：
ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, and tool matrix material is high-speed steel or hard alloy, and coating is more
Layer structure, is followed successively by by matrix to coating surface：Ti transition zones, Ti/Zr transition zones, ZrTiN hard coats, Ti/Zr transition zones,
MoS2/ Ti/Zr lubricant coatings.
The ZrTiN+MoS2/ Ti/Zr combines the preparation process of coated cutting tool, and depositional mode is to be plated in using electric arc
Frequency magnetron sputtering composite film coating method, including 1 Ti target electric arc target, 1 Zr target electric arc target, 2 MoS2Mid frequency sputtering target：Electric arc
Ion-plating deposition Ti transition zones, Ti/Zr transition zones, ZrTiN hard coats and Ti/Zr transition zones, medium frequency magnetron sputtering MoS2And
Arc ion plating Zr, Ti composite deposition MoS2/ Ti/Zr lubricant coatings.
Specifically include following steps：
(1) pre-treatment：Tool matrix surface is polished, surface impurity is removed, is then sequentially placed into alcohol and acetone, is surpassed
Sound cleans, and is put into coating machine rapidly after drying, is evacuated to 8.0 × 10-3Pa is heated to 300 DEG C, keeps the temperature 30~40min；
(2) Ion Cleaning：Logical Ar gas, pressure 1.5Pa open grid bias power supply, voltage 700V, duty ratio 0.2, aura
Discharge Cleaning 15min；Reduction is biased into 500V, opens ion source Ion Cleaning 15min, opens the arc source of Ti targets, bias
300V, target current 50A, ion bombardment Ti targets 1min；
(3) depositing Ti transition zone：Ar 0.5~0.6Pa of air pressure, bias are down to 250V, Ti target current 70A, depositing temperature 250
DEG C, electric arc plates 5~6min of Ti transition zones；
(4) depositing Ti/Zr transition zones：Ar 0.5~0.6Pa of air pressure, bias 250V, Ti target current 80A, Zr target current 90A,
Electric arc plates 5~6min of Ti/Zr transition zones；
(5) ZrTiN hard coats are deposited：Ar air pressure 0.5Pa, target current 80A, the Zr target current of bias 220V, Ti target
100A；Open N2, N2Air pressure is 1.0Pa, 230~250 DEG C of depositing temperature, 40~50min of electric arc plating ZrTiN hard coats；
(6) depositing Ti/Zr transition zones：Close N2, Ti target currents 70A, Zr target current 80A deposits the Ti/Zr mistakes of 5min
Cross layer；
(7) MoS is deposited2/ Ti/Zr lubricant coatings：Open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias are adjusted to
200V, 250~270 DEG C of depositing temperature, composite deposition MoS240~50min of/Ti/Zr lubricant coatings；
(8) it post-processes：Each power supply, ion source and gas source are closed, coating terminates.
Compared with prior art, the present invention has following excellent technique effect：
The present invention is prepared for ZrTiN+MoS using electric arc plating with medium frequency magnetron sputtering composite film coating method2/ Ti/Zr is combined
Coated cutting tool.Ti and Ti/Zr transition zones on matrix are mainly the binding performance improved between combination coating and tool matrix,
MoS2Ti/Zr transition zones between/Ti/Zr lubricant coatings and ZrTiN coatings mainly slow down caused by coating composition is mutated
Inter-laminar stress.This combination coated cutting tool combines the more first hard coated cutting tools of ZrTiN and MoS2/ Ti/Zr lubricant coating cutters
The advantages of, not only there is higher hardness, but also there is lubricating action and lower friction coefficient, so that the performance of coated cutting tool is had aobvious
Ground is write to improve.When carrying out dry cutting with this combination coated cutting tool, due to surface MoS2There is/Ti/Zr coatings itself lubrication to make
With the friction between cutter and chip can be reduced, to reduce cutting force and cutting temperature；Meanwhile ZrTiN high hardness spray coatings
MoS can be improved2The integral strength of/Ti/Zr lubricant coatings, slows down due to MoS2/ Ti/Zr coating hardness itself it is relatively low and caused by
Cutter coat premature abrasion.Than existing TiN+MoS2/ Zr coated cutting tools (patent No. ZL 201110081977.7) wearability carries
High 20-30%, coating service life improve 30-40%；Than the existing ZrTiN composite coating layer cutters (patent No.
201110214393.2) skin-friction coefficient reduces by 50% or more, and anti-friction wear-resistant improves 30-40%, and coated cutting tool uses the longevity
Life improves 35% or more, and improves the use scope of coated cutting tool, and the dry cutting that can be widely applied to nonferrous materials adds
Work.
Description of the drawings
Fig. 1 is the coating structure schematic diagram of the soft and rigid composite coating layer of the present invention.
In figure：1 it is tool matrix, 2 be Ti transition zones, 3 be Ti/Zr transition zones, 4 be ZrTiN hard coats, 5 is Ti/Zr
Transition zone, 6 are MoS2/ Ti/Zr lubricant coatings.
Specific implementation mode：
Highly preferred embodiment of the present invention is given below：
Embodiment one
A kind of ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, which is common cutter blade, and basis material is：Firmly
Matter alloy Y T15.Depositional mode is to combine coating, including 1 with the preparation of medium frequency magnetron sputtering composite film coating method using electric arc plating
Ti target electric arc targets, a Zr target electric arc target, 2 MoS2Mid frequency sputtering target：Electric arc ion-plating deposition Ti, Ti/Zr transition zone,
ZrTiN hard coats and Ti/Zr transition zones, medium frequency magnetron sputtering (MoS2) and arc ion plating (Zr, Ti) composite deposition MoS2/
Ti/Zr lubricant coatings, preparation process are：
(1) pre-treatment：Tool matrix surface is polished, then the impurity such as removal surface and oil contaminant, rusty stain are sequentially placed into alcohol
In acetone, it is cleaned by ultrasonic each 30min, removes tool surface greasy dirt and other attachments, put rapidly after hair dryer drying fully
Enter coating machine, is evacuated to 8.0 × 10-3Pa is heated to 300 DEG C, keeps the temperature 30~40min；
(2) Ion Cleaning：Logical Ar gas, pressure 1.5Pa open grid bias power supply, voltage 700V, duty ratio 0.2, aura
Discharge Cleaning 15min；Reduction is biased into 500V, opens ion source Ion Cleaning 15min, opens the arc source of Ti targets, bias
300V, target current 50A, ion bombardment Ti targets 1min；
(3) depositing Ti transition zone：Ar 0.5~0.6Pa of air pressure, bias are down to 250V, Ti target current 70A, depositing temperature 250
DEG C, electric arc plates 5~6min of Ti transition zones；
(4) depositing Ti/Zr transition zones：Ar 0.5~0.6Pa of air pressure, bias 250V, Ti target current 80A, Zr target current 90A,
Electric arc plates 5~6min of Ti/Zr transition zones；
(5) ZrTiN layers are deposited：Ar air pressure 0.5Pa, target current 80A, the Zr target current 100A of bias 220V, Ti target；It opens
N2, N2Air pressure is 1.0Pa, 230~250 DEG C of depositing temperature, 40~50min of electric arc plating ZrTiN；
(6) depositing Ti/Zr transition zones：Close N2, Ti target currents 70A, Zr target current 80A deposits the Ti/Zr mistakes of 5min
Cross layer；
(7) MoS is deposited2/ Ti/Zr layers：Open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias are adjusted to 200V,
250~270 DEG C of depositing temperature, composite deposition MoS240~50min of/Ti/Zr；
(8) it post-processes：Each power supply, ion source and gas source are closed, coating terminates.
Embodiment two
A kind of ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, which is common fluted drill, and tool matrix material is：
High speed steel W18Cr4V.Depositional mode combines coating to be prepared with medium frequency magnetron sputtering composite film coating method using electric arc plating, including
1 Ti target electric arc target, a Zr target electric arc target, 2 MoS2Mid frequency sputtering target：Electric arc ion-plating deposition Ti, Ti/Zr transition zone,
ZrTiN hard coats and Ti/Zr transition zones, medium frequency magnetron sputtering (MoS2) and arc ion plating (Zr, Ti) composite deposition MoS2/
Ti/Zr lubricant coatings, preparation process are：
(1) pre-treatment：Tool matrix surface is polished, then the impurity such as removal surface and oil contaminant, rusty stain are sequentially placed into alcohol
In acetone, it is cleaned by ultrasonic each 30min, removes tool surface greasy dirt and other attachments, put rapidly after hair dryer drying fully
Enter coating machine, is evacuated to 8.0 × 10-3Pa is heated to 300 DEG C, keeps the temperature 30~40min；
(2) Ion Cleaning：Logical Ar gas, pressure 1.5Pa open grid bias power supply, voltage 700V, duty ratio 0.2, aura
Discharge Cleaning 15min；Reduction is biased into 500V, opens ion source Ion Cleaning 15min, opens the arc source of Ti targets, bias
300V, target current 50A, ion bombardment Ti targets 1min；
(3) depositing Ti transition zone：Ar 0.5~0.6Pa of air pressure, bias are down to 250V, Ti target current 70A, depositing temperature 250
DEG C, electric arc plates 5~6min of Ti transition zones；
(4) depositing Ti/Zr transition zones：Ar 0.5~0.6Pa of air pressure, bias 250V, Ti target current 80A, Zr target current 90A,
Electric arc plates 5~6min of Ti/Zr transition zones；
(5) ZrTiN layers are deposited：Ar air pressure 0.5Pa, target current 80A, the Zr target current 100A of bias 220V, Ti target；It opens
N2, N2Air pressure is 1.0Pa, 230~250 DEG C of depositing temperature, 40~50min of electric arc plating ZrTiN；
(6) depositing Ti/Zr transition zones：Close N2, Ti target currents 70A, Zr target current 80A deposits the Ti/Zr mistakes of 5min
Cross layer；
(7) MoS is deposited2/ Ti/Zr layers：Open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias are adjusted to 200V,
250~270 DEG C of depositing temperature, composite deposition MoS240~50min of/Ti/Zr；
Post-processing：Each power supply, ion source and gas source are closed, coating terminates.
Claims (1)
1. a kind of ZrTiN+MoS2/ Ti/Zr combines the preparation process of coated cutting tool, and tool matrix material is that high-speed steel or hard close
Gold, coating are multilayered structure, are followed successively by coating surface by matrix：Ti transition zones, Ti/Zr transition zones, ZrTiN hard coats,
Ti/Zr transition zones, MoS2/ Ti/Zr lubricant coatings；It is characterized in that, depositional mode is using electric arc plating and medium frequency magnetron sputtering
Composite film coating method, including 1 Ti target electric arc target, 1 Zr target electric arc target, 2 MoS2Mid frequency sputtering target：Electric arc ion-plating deposition
Ti transition zones, Ti/Zr transition zones, ZrTiN hard coats and Ti/Zr transition zones, medium frequency magnetron sputtering MoS2And arc ion plating
Zr, Ti composite deposition MoS2/ Ti/Zr lubricant coatings；Specifically include following steps：
(1) pre-treatment：Tool matrix surface is polished, surface impurity is removed, is then sequentially placed into alcohol and acetone, ultrasound is clear
It washes, is put into coating machine rapidly after drying, be evacuated to 8.0 × 10-3Pa is heated to 300 DEG C, keeps the temperature 30~40min；
(2) Ion Cleaning：Logical Ar gas, pressure 1.5Pa open grid bias power supply, voltage 700V, duty ratio 0.2, glow discharge
Clean 15min；Reduction is biased into 500V, opens ion source Ion Cleaning 15min, opens the arc source of Ti targets, bias 300V, target
Electric current 50A, ion bombardment Ti targets 1min；
(3) depositing Ti transition zone：Ar 0.5~0.6Pa of air pressure, bias are down to 250V, Ti target current 70A, 250 DEG C of depositing temperature,
Electric arc plates 5~6min of Ti transition zones；
(4) depositing Ti/Zr transition zones：Ar 0.5~0.6Pa of air pressure, bias 250V, Ti target current 80A, Zr target current 90A, electric arc
Plate 5~6min of Ti/Zr transition zones；
(5) ZrTiN hard coats are deposited：Ar air pressure 0.5Pa, target current 80A, the Zr target current 100A of bias 220V, Ti target；It opens
Open N2, N2Air pressure is 1.0Pa, 230~250 DEG C of depositing temperature, 40~50min of electric arc plating ZrTiN hard coats；
(6) depositing Ti/Zr transition zones：Close N2, Ti target currents 70A, Zr target current 80A deposits the Ti/Zr transition zones of 5min；
(7) MoS is deposited2/ Ti/Zr lubricant coatings：Open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias are adjusted to
200V, 250~270 DEG C of depositing temperature, composite deposition MoS240~50min of/Ti/Zr lubricant coatings；
(8) it post-processes：Each power supply, ion source and gas source are closed, coating terminates.
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| CN201610428786.6A CN105861998B (en) | 2016-06-15 | 2016-06-15 | ZrTiN+MoS2/ Ti/Zr combines coated cutting tool and its preparation process |
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Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102205674A (en) * | 2011-04-01 | 2011-10-05 | 山推工程机械股份有限公司 | TiN+MoS2/Zr combined coated cutting tool and preparation technology thereof |
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Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102205674A (en) * | 2011-04-01 | 2011-10-05 | 山推工程机械股份有限公司 | TiN+MoS2/Zr combined coated cutting tool and preparation technology thereof |
Non-Patent Citations (1)
| Title |
|---|
| N2流量对多弧离子镀ZrTiN涂层性能的影响;陈振 等;《制造技术与机床》;20110630(第6期);第122-124页 * |
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