CN105861998A - ZrTiN+MoS2/Ti/Zr combined coating tool and preparation process thereof - Google Patents
ZrTiN+MoS2/Ti/Zr combined coating tool and preparation process thereof Download PDFInfo
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- CN105861998A CN105861998A CN201610428786.6A CN201610428786A CN105861998A CN 105861998 A CN105861998 A CN 105861998A CN 201610428786 A CN201610428786 A CN 201610428786A CN 105861998 A CN105861998 A CN 105861998A
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- 239000011248 coating agent Substances 0.000 title claims abstract description 56
- 238000000576 coating method Methods 0.000 title claims abstract description 56
- 229910052961 molybdenite Inorganic materials 0.000 title claims abstract description 22
- 229910052982 molybdenum disulfide Inorganic materials 0.000 title claims abstract description 22
- 238000002360 preparation method Methods 0.000 title claims abstract description 14
- CWQXQMHSOZUFJS-UHFFFAOYSA-N molybdenum disulfide Chemical compound S=[Mo]=S CWQXQMHSOZUFJS-UHFFFAOYSA-N 0.000 title claims abstract 9
- 230000007704 transition Effects 0.000 claims abstract description 49
- 238000005520 cutting process Methods 0.000 claims abstract description 29
- 229910000997 High-speed steel Inorganic materials 0.000 claims abstract description 4
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 3
- 239000000956 alloy Substances 0.000 claims abstract description 3
- 238000000151 deposition Methods 0.000 claims description 49
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 40
- 238000010891 electric arc Methods 0.000 claims description 30
- 230000008021 deposition Effects 0.000 claims description 25
- 239000002131 composite material Substances 0.000 claims description 19
- 238000007747 plating Methods 0.000 claims description 18
- 239000000314 lubricant Substances 0.000 claims description 17
- 239000011159 matrix material Substances 0.000 claims description 15
- 238000004140 cleaning Methods 0.000 claims description 12
- 238000005516 engineering process Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 10
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 claims description 8
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000007733 ion plating Methods 0.000 claims description 8
- 239000007888 film coating Substances 0.000 claims description 5
- 238000009501 film coating Methods 0.000 claims description 5
- 239000012535 impurity Substances 0.000 claims description 4
- 238000010849 ion bombardment Methods 0.000 claims description 4
- 238000012805 post-processing Methods 0.000 claims description 4
- 238000002203 pretreatment Methods 0.000 claims description 4
- 238000005477 sputtering target Methods 0.000 claims description 4
- 230000001050 lubricating effect Effects 0.000 abstract description 6
- 230000008901 benefit Effects 0.000 abstract description 5
- 239000002184 metal Substances 0.000 abstract description 2
- 229910052751 metal Inorganic materials 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 8
- 239000000463 material Substances 0.000 description 7
- 238000005461 lubrication Methods 0.000 description 6
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 5
- 239000011247 coating layer Substances 0.000 description 4
- 239000008199 coating composition Substances 0.000 description 2
- 239000000356 contaminant Substances 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000004506 ultrasonic cleaning Methods 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229910004211 TaS2 Inorganic materials 0.000 description 1
- 229910010037 TiAlN Inorganic materials 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000010534 mechanism of action Effects 0.000 description 1
- 230000002028 premature Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0623—Sulfides, selenides or tellurides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Cutting Tools, Boring Holders, And Turrets (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention belongs to the field of mechanically manufactured metal cutting tools, and particularly relates to a ZrTiN+MoS2/Ti/Zr combined coating tool and a preparation process thereof. A tool base body comprises high-speed steel or hard alloy, a coating is of a multilayer structure, and a Ti transition layer, a Ti/Zr transition layer, a ZrTiN hard coating, a Ti/Zr transition layer and a MoS2/Ti/Zr lubricating coating are sequentially arranged between the base body and the surface of the coating. According to the combined tool, the advantages of a ZrTiN multi-element hard coating tool and a MoS2/Ti/Zr lubricating coating tool are synthesized, high hardness is achieved, a lubricating function and a low friction coefficient are achieved, and the performance of the coating tool is remarkably improved.
Description
Technical field
The invention belongs to machine-building metal cutting tool field, particularly relate to a kind of ZrTiN+MoS2/ Ti/Zr combines coating cutter
Tool and preparation technology thereof.
Background technology
According to the character of coating material, coated cutting tool can be divided into two big classes, it may be assumed that " high rigidity " coated cutting tool and " lubrication " coating cutter
Tool.Its major advantage of " high rigidity " coated cutting tool is that hardness is high, anti-wear performance is good, typical " high rigidity " coating material have TiN,
TiCN, TiAlN and diamond like carbon etc..The target " lubricating " coated cutting tool pursuit is low-friction coefficient, typical " lubrication " coating
Material is to have the solid lubricant of low-friction coefficient (such as: MoS2、WS2、TaS2Sulfides).Current cutter coat
Development trend is: coating composition tends to diversification and Composite.Composite coating can the advantage of comprehensive single coating, compound multicoat and
The appearance of its correlation technique, both can improve the bond strength of coating and matrix, take into account again the combination property of multiple single coating, make painting
The performance of layer cutter significantly improves.
Chinese patent (patent No. ZL 2,006 1 0068975.3) reports " self-lubricating is combined soft coating cutter and preparation method thereof ",
It is the MoS using intermediate frequency magnetic control+multi sphere method film plating process to prepare2/ Zr composite coating layer cutter, tool surface is MoS2Layer, MoS2
Between layer and tool matrix, there is Ti transition zone.This cutter without cutting fluid cooling, lubrication working angles in, it is possible at cutter
Surface can form the lubricating film with lubrication, thus realizes the lubricating function of cutter self, but this lubricant coating hardness
Relatively low and after causing cutter coat especially service life of knife face coating the longest.Document (Acta Materials.2011,59 (1):
68-74) report TiN hard conating Tool in Cutting and add the mechanism of action and the serviceability in man-hour, but this hard conating is due to relatively
Higher coefficient of friction, limits it and is widely used.Chinese patent TiN+MoS2/ Zr combines coated cutting tool (patent No. ZL
201110081977.7) medium frequency magnetron sputtering is used to close TiN+MoS prepared by film plating process with electric arc lining2/ Zr combines coating cutter
Tool, but this combination coating still cannot meet actually used needs the cutter life when dry cutting superhard material.Chinese patent ladder
ZrTiN composite coating layer cutter prepared by degree laminated coating cutter and preparation method thereof (patent No. 201110214393.2) has higher
Hardness and intensity, excellent wear-resistant and corrosion resistance, but the friction when cutting nonferrous materials between its cutter bits
Coefficient is higher, affects cutter life.
Summary of the invention
It is an object of the invention to overcome the deficiency of above-mentioned existing coated cutting tool technology, in conjunction with polynary hard coat and lubricant coating
Advantage, it is provided that a kind of ZrTiN+MoS2/ Ti/Zr combination coated cutting tool and preparation technology thereof.
The present invention is achieved in the following ways:
ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, and tool matrix material is high-speed steel or hard alloy, and coating is multiple structure,
It is followed successively by coating surface by matrix: Ti transition zone, Ti/Zr transition zone, ZrTiN hard coat, Ti/Zr transition zone, MoS2/Ti/Zr
Lubricant coating.
Described ZrTiN+MoS2The preparation technology of/Ti/Zr combination coated cutting tool, its depositional mode is for using electric arc plating and intermediate frequency magnetic control
Sputtering composite film coating method, including 1 Ti target electric arc target, 1 Zr target electric arc target, 2 MoS2Mid frequency sputtering target: electric arc
Ion-plating deposition Ti transition zone, Ti/Zr transition zone, ZrTiN hard coat and Ti/Zr transition zone, medium frequency magnetron sputtering MoS2
And arc ion plating Zr, Ti composite deposition MoS2/ Ti/Zr lubricant coating.
Specifically include following steps:
(1) pre-treatment: by tool matrix surface finish, removes surface impurity, is then sequentially placed in ethanol and acetone, ultrasonic
Clean, put into the most rapidly coater, be evacuated to 8.0 × 10-3Pa, is heated to 300 DEG C, is incubated 30～40min；
(2) Ion Cleaning: logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 700V, dutycycle 0.2, brightness
Light Discharge Cleaning 15min；Reduce and be biased into 500V, open ion source Ion Cleaning 15min, open the arc source of Ti target,
Bias 300V, target current 50A, ion bom bardment Ti target 1min；
(3) depositing Ti transition zone: Ar air pressure 0.5～0.6Pa, biases and is down to 250V, Ti target current 70A, depositing temperature 250 DEG C,
Electric arc plating Ti transition zone 5～6min；
(4) depositing Ti/Zr transition zone: Ar air pressure 0.5～0.6Pa, biases 250V, Ti target current 80A, Zr target current 90A,
Electric arc plating Ti/Zr transition zone 5～6min；
(5) deposition ZrTiN hard coat: Ar air pressure 0.5Pa, target current 80A, the Zr target current of bias 220V, Ti target
100A；Open N2, N2Air pressure is 1.0Pa, depositing temperature 230～250 DEG C, electric arc plating ZrTiN hard coat 40～50min；
(6) depositing Ti/Zr transition zone: close N2, Ti target current 70A, Zr target current 80A, the Ti/Zr of deposition 5min
Transition zone；
(7) deposition MoS2/ Ti/Zr lubricant coating: open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias is adjusted to
200V, depositing temperature 250～270 DEG C, composite deposition MoS2/ Ti/Zr lubricant coating 40～50min；
(8) post processing: close each power supply, ion source and gas source, coating terminates.
Compared with prior art, the present invention has a following excellent technique effect:
The present invention uses electric arc plating to be prepared for ZrTiN+MoS with medium frequency magnetron sputtering composite film coating method2/ Ti/Zr combines coating cutter
Tool.Ti and Ti/Zr transition zone on matrix mainly improves the binding ability between combination coating and tool matrix, MoS2/Ti/Zr
Ti/Zr transition zone between lubricant coating and ZrTiN coating mainly slows down the inter-laminar stress caused because of coating composition sudden change.This
Combination coated cutting tool combines ZrTiN many units hard coated cutting tool and MoS2The advantage of/Ti/Zr lubricant coating cutter, had both had relatively
High hardness, has again lubrication and relatively low coefficient of friction, makes the performance of coated cutting tool have and significantly increases.With this
When combination coated cutting tool carries out dry cutting, due to surface MoS2/ Ti/Zr coating itself has lubrication, can reduce cutter with
Friction between chip, thus reduce cutting force and cutting temperature；Meanwhile, ZrTiN high hardness spray coating can improve MoS2/Ti/Zr
The bulk strength of lubricant coating, slows down due to MoS2The cutter coat premature abrasion that the hardness of/Ti/Zr coating own is relatively low and causes.
Than existing TiN+MoS2/ Zr coated cutting tool (patent No. ZL 201110081977.7) wearability improves 20-30%, coating
Service life improves 30-40%；Than existing ZrTiN composite coating layer cutter (patent No. 201110214393.2) mantle friction
Coefficient reduces by more than 50%, and anti-friction wear-resistant improves 30-40%, and coated cutting tool improves more than 35%, and improve painting service life
The range of layer cutter, can be widely applied to the dry machining technology of nonferrous materials.
Accompanying drawing explanation
Fig. 1 is the coating structure schematic diagram of the soft and rigid composite coating layer of the present invention.
In figure: 1 be tool matrix, 2 be Ti transition zone, 3 be Ti/Zr transition zone, 4 be ZrTiN hard coat, 5 for Ti/Zr
Transition zone, 6 it is MoS2/ Ti/Zr lubricant coating.
Detailed description of the invention:
Highly preferred embodiment of the present invention be given below:
Embodiment one
A kind of ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, and this cutter is common cutter blade, and its matrix material is: hard closes
Gold YT15.Depositional mode is for using electric arc plating and medium frequency magnetron sputtering composite film coating method preparation combination coating, including 1 Ti
Target electric arc target, a Zr target electric arc target, 2 MoS2Mid frequency sputtering target: electric arc ion-plating deposition Ti, Ti/Zr transition zone, ZrTiN
Hard coat and Ti/Zr transition zone, medium frequency magnetron sputtering (MoS2) and arc ion plating (Zr, Ti) composite deposition MoS2/Ti/Zr
Lubricant coating, its preparation technology is:
(1) pre-treatment: by tool matrix surface finish, removes the impurity such as surface and oil contaminant, rusty stain, be then sequentially placed into ethanol and
In acetone, each 30min of ultrasonic cleaning, remove tool surface greasy dirt and other attachment, hair dryer is put into rapidly after being dried fully
Coater, is evacuated to 8.0 × 10-3Pa, is heated to 300 DEG C, is incubated 30～40min；
(2) Ion Cleaning: logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 700V, dutycycle 0.2, brightness
Light Discharge Cleaning 15min；Reduce and be biased into 500V, open ion source Ion Cleaning 15min, open the arc source of Ti target,
Bias 300V, target current 50A, ion bom bardment Ti target 1min；
(3) depositing Ti transition zone: Ar air pressure 0.5～0.6Pa, biases and is down to 250V, Ti target current 70A, depositing temperature 250 DEG C,
Electric arc plating Ti transition zone 5～6min；
(4) depositing Ti/Zr transition zone: Ar air pressure 0.5～0.6Pa, biases 250V, Ti target current 80A, Zr target current 90A,
Electric arc plating Ti/Zr transition zone 5～6min；
(5) deposition ZrTiN layer: Ar air pressure 0.5Pa, target current 80A, the Zr target current 100A of bias 220V, Ti target；
Open N2, N2Air pressure is 1.0Pa, depositing temperature 230～250 DEG C, electric arc plating ZrTiN 40～50min；
(6) depositing Ti/Zr transition zone: close N2, Ti target current 70A, Zr target current 80A, the Ti/Zr of deposition 5min
Transition zone；
(7) deposition MoS2/ Ti/Zr layer: open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias is adjusted to 200V,
Depositing temperature 250～270 DEG C, composite deposition MoS2/ Ti/Zr 40～50min；
(8) post processing: close each power supply, ion source and gas source, coating terminates.
Embodiment two
A kind of ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, and this cutter is common fluted drill, and its tool matrix material is: at a high speed
Steel W18Cr4V.Depositional mode is for using electric arc plating and medium frequency magnetron sputtering composite film coating method preparation combination coating, including 1
Ti target electric arc target, a Zr target electric arc target, 2 MoS2Mid frequency sputtering target: electric arc ion-plating deposition Ti, Ti/Zr transition zone,
ZrTiN hard coat and Ti/Zr transition zone, medium frequency magnetron sputtering (MoS2) and arc ion plating (Zr, Ti) composite deposition
MoS2/ Ti/Zr lubricant coating, its preparation technology is:
(1) pre-treatment: by tool matrix surface finish, removes the impurity such as surface and oil contaminant, rusty stain, be then sequentially placed into ethanol and
In acetone, each 30min of ultrasonic cleaning, remove tool surface greasy dirt and other attachment, hair dryer is put into rapidly after being dried fully
Coater, is evacuated to 8.0 × 10-3Pa, is heated to 300 DEG C, is incubated 30～40min；
(2) Ion Cleaning: logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 700V, dutycycle 0.2, brightness
Light Discharge Cleaning 15min；Reduce and be biased into 500V, open ion source Ion Cleaning 15min, open the arc source of Ti target,
Bias 300V, target current 50A, ion bom bardment Ti target 1min；
(3) depositing Ti transition zone: Ar air pressure 0.5～0.6Pa, biases and is down to 250V, Ti target current 70A, depositing temperature 250 DEG C,
Electric arc plating Ti transition zone 5～6min；
(4) depositing Ti/Zr transition zone: Ar air pressure 0.5～0.6Pa, biases 250V, Ti target current 80A, Zr target current 90A,
Electric arc plating Ti/Zr transition zone 5～6min；
(5) deposition ZrTiN layer: Ar air pressure 0.5Pa, target current 80A, the Zr target current 100A of bias 220V, Ti target；
Open N2, N2Air pressure is 1.0Pa, depositing temperature 230～250 DEG C, electric arc plating ZrTiN 40～50min；
(6) depositing Ti/Zr transition zone: close N2, Ti target current 70A, Zr target current 80A, the Ti/Zr of deposition 5min
Transition zone；
(7) deposition MoS2/ Ti/Zr layer: open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias is adjusted to 200V,
Depositing temperature 250～270 DEG C, composite deposition MoS2/ Ti/Zr 40～50min；
Post processing: close each power supply, ion source and gas source, coating terminates.
Claims (3)
1.ZrTiN+MoS2/ Ti/Zr combines coated cutting tool, and tool matrix material is high-speed steel or hard alloy, it is characterised in that
Coating is multiple structure, matrix be followed successively by coating surface: Ti transition zone, Ti/Zr transition zone, ZrTiN hard coat, Ti/Zr
Transition zone, MoS2/ Ti/Zr lubricant coating.
2. ZrTiN+MoS as claimed in claim 12The preparation technology of/Ti/Zr combination coated cutting tool, it is characterised in that deposition
Mode is for using electric arc to plate and medium frequency magnetron sputtering composite film coating method, including 1 Ti target electric arc target, and 1 Zr target electric arc target,
2 MoS2Mid frequency sputtering target: electric arc ion-plating deposition Ti transition zone, Ti/Zr transition zone, ZrTiN hard coat and Ti/Zr
Transition zone, medium frequency magnetron sputtering MoS2And arc ion plating Zr, Ti composite deposition MoS2/ Ti/Zr lubricant coating.
ZrTiN+MoS the most according to claim 22The preparation technology of/Ti/Zr combination coated cutting tool, it is characterised in that tool
Body comprises the following steps:
(1) pre-treatment: by tool matrix surface finish, removes surface impurity, is then sequentially placed in ethanol and acetone, ultrasonic
Clean, put into the most rapidly coater, be evacuated to 8.0 × 10-3Pa, is heated to 300 DEG C, is incubated 30～40min；
(2) Ion Cleaning: logical Ar gas, its pressure is 1.5Pa, opens grid bias power supply, voltage 700V, dutycycle 0.2, brightness
Light Discharge Cleaning 15min；Reduce and be biased into 500V, open ion source Ion Cleaning 15min, open the arc source of Ti target,
Bias 300V, target current 50A, ion bom bardment Ti target 1min；
(3) depositing Ti transition zone: Ar air pressure 0.5～0.6Pa, biases and is down to 250V, Ti target current 70A, depositing temperature 250 DEG C,
Electric arc plating Ti transition zone 5～6min；
(4) depositing Ti/Zr transition zone: Ar air pressure 0.5～0.6Pa, biases 250V, Ti target current 80A, Zr target current 90A,
Electric arc plating Ti/Zr transition zone 5～6min；
(5) deposition ZrTiN hard coat: Ar air pressure 0.5Pa, target current 80A, the Zr target current of bias 220V, Ti target
100A；Open N2, N2Air pressure is 1.0Pa, depositing temperature 230～250 DEG C, electric arc plating ZrTiN hard coat 40～50min；
(6) depositing Ti/Zr transition zone: close N2, Ti target current 70A, Zr target current 80A, the Ti/Zr of deposition 5min
Transition zone；
(7) deposition MoS2/ Ti/Zr lubricant coating: open MoS2Target medium frequency magnetron sputtering power supply, electric current 1.5A, bias is adjusted to
200V, depositing temperature 250～270 DEG C, composite deposition MoS2/ Ti/Zr lubricant coating 40～50min；
(8) post processing: close each power supply, ion source and gas source, coating terminates.
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