CN105858587A - Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure - Google Patents
Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure Download PDFInfo
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- CN105858587A CN105858587A CN201610411291.2A CN201610411291A CN105858587A CN 105858587 A CN105858587 A CN 105858587A CN 201610411291 A CN201610411291 A CN 201610411291A CN 105858587 A CN105858587 A CN 105858587A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
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Abstract
The invention relates to the field of vacuum packaging technologies for MEMS (micro-mechanical systems) sensors, in particular to a heater structure for heating and activating micro-miniature self-heating air suction agents and a method for manufacturing the heater structure. The heater structure comprises a ceramic body, metal slurry, metal coatings and metal leading wires. The inside of the ceramic body is divided into a plurality of layers, the metal slurry wraps each layer, metal slurry layers are communicated with one another in the up-down directions, the metal slurry on two end surfaces of the ceramic body is reserved to be exposed, the metal coatings are formed on two end surfaces of the ceramic body by means of chemical plating or electroplating, and the metal leading wires of heating electrodes are welded on the two end surfaces of the ceramic body after the metal coatings are formed. The heater structure and the method have the advantages that resistance of the metal slurry layers is controlled, so that the consistency of resistance values of different devices can be guaranteed; whether heating and activating temperatures reach ideal activating temperatures of air suction materials or not can be monitored by special circuits in an online manner and can be controlled, accordingly, the activated air suction agents can be assuredly in the optimal activated states, and the activated states of the air suction agents are consistent and stable on a large scale.
Description
Technical field
The present invention relates to MEMS sensor vacuum sealing technique field, be specifically related to a kind of heater structure for heat activation microminiature self-heating getter and manufacture method.
Background technology
The sensor of the MEMS structure such as infrared thermal imaging, Thz needs the encapsulation form that fine vacuum, constant temperature, volume are little.Conventional metals case package and ceramic cartridge packaging technology realize the encapsulation to special sensor chip, require to be typically employed in encapsulating package for reaching fine vacuum, constant temperature, long-life particular job environmental condition and encapsulation getter is installed maintains sensor chip normally to work required vacuum, thus improve the life-span of sensor.Getter in use, needs to be heated to the air drawing characteristics of certain temperature ability active material, just can play vacuum in long term maintenance device afterwards after Vacuum Package.Getter is since it is desired that activate and could use, and the method activated has with himself structure and directly associates.If the condition activated is variant simultaneously, even the getter of same size, the pumping property of getter also can be variant.The most therefore getter is divided into conducting self-heating type (hot element type) and non-self hot type (press type) from structure.Conducting self-heating type (hot element type) is at the built-in heater strip of gettering material, by realizing the gettering material heat activation to tinsel external application after producing heating to heater strip energising；Non-self hot type (press type) is to be heated by sensing or Baking out mode activates gettering material characteristic.
The heater that conducting self-heating type getter is used at present is typically the high temperature metallic materials such as metal molybdenum filament or nickel wire as resistive heater, and it is fabricated to certain shape such as spiral type, S-shaped etc., realize can there be longer wire length in limited getter material inner space, to obtain bigger tinsel resistance；Meanwhile, wire surface insulation processing to be done, to prevent tinsel and gettering material short circuit.Conducting self-heating type getter is in activation process, because being to gettering material heat activation by tinsel heater heating power, therefore the difference of the resistance of tinsel heater, can affect the difference of heating power, also results in and has obvious difference on getter activation effect.
The greatest problem of conducting self-heating type getter is at present, microminiature conducting self-heating type getter for the small volume used by above-mentioned Vacuum Package, the device size length of itself is usually no more than 10mm, length and width or diameter of section only have several millimeters, therefore can not process the biggest as the resistance wiry adding heater, the most only tens milliohms are to milliohms up to a hundred；If tinsel heater electrified regulation to be met reaches gettering material preferable activationary temperature power demand, electric current required during activation the biggest (3A-7A).The biggest electric current proposes higher design requirement to the design of the power-on circuit used by activating, and particularly to control reduction contact resistance especially well at powered electrode contact point.If loose contact, cause contact resistance excessive even bigger than the resistance of tinsel heater, it is likely that to cause electrode contact point and melt or fusing because of overheated.Simultaneously, the resistance of contact electrode also has a few milliohm or the deviation of tens person of outstanding talent's ohms, activation overall electrical resistance deviation to whole tinsel heater is exactly tens percent, when the energising of tinsel heater activates, same adds thermocurrent, because of resistance deviation, it is exactly deviation at double that the deviation of its heating power is probably.In like manner, as itself the resistance difference of tinsel adding thermal resistance, because the least only tens person of outstanding talent's ohms of overall electrical resistance are to hundreds of person of outstanding talent's ohm, the most a few person of outstanding talent's ohms are to the resistance deviation of tens person of outstanding talent's ohms it is possible to produce the bigger deviation of heating power, the existence of this kind of resistance deviation has a strong impact on stability and the concordance of getter state of activation, the final production yields affecting Vacuum Package device, stability and the concordance of its quality are also affected.
Another problem is insulation processing wiry, generally processing technique is raw silk rings shape tinsel heater surface simply to be done oxide isolated process, and for being fabricated to the tinsel outer surface of the abnormity such as spiral type, S-shaped to strengthen resistance, typically require and do the process of electrophoresis alumina insulation, this processing technique is complicated, yield is low, relatively costly, has been even more than the cost of getter material itself.In actual use, the most often occur owing to wire surface insulating barrier ruptures, cause the short circuit of tinsel and gettering material, cause getter calcellation of directly losing efficacy the most often to occur.
Summary of the invention
For the deficiencies in the prior art, the invention provides a kind of heater structure for heat activation microminiature self-heating getter and manufacture method, by the technique using ceramic printing metal paste, control the thickness of the metal pulp bed of material accurately, length, width, thus realize being accurately controlled the resistance of the metal pulp bed of material, ensure that different components resistance value has extraordinary concordance, simultaneously under the parcel of the ceramic body of enough amounts, the metal pulp bed of material will not be short-circuited with gettering material, additionally the surface area of ceramic body heat radiation conduction is bigger, can transfer heat on gettering material the most equably, activate for gettering material and create good heating condition, guarantee that the efficiency activated and activation effect reach optimal.
For realizing object above, the present invention is achieved by the following technical programs:
Heater structure for heat activation microminiature self-heating getter, it is characterized in that: described heater structure includes ceramic body, metal paste, the coat of metal and metal lead wire, ceramic body is divided into multilamellar, every layer of coated metal slurry, every layer of metal paste connects up and down, two end faces of ceramic body are reserved with metal paste and expose, and form the coat of metal, the metal lead wire of two end face weld heating electrodes of the coat of metal by chemical plating or plating mode at two end faces of described ceramic body.
Preferably, described metal paste selects tungsten or molybdenum.
Preferably, described ceramic body uses the Dagwood encapsulated by structures metal pulp bed of material.
The manufacture method of a kind of heater structure for heat activation microminiature self-heating getter, it is characterised in that comprise the following steps:
First metal paste is printed on ceramic body raw material, connection of being in the milk up and down after then having printed several ceramic body raw material superpositions of layer of metal slurry；
B. high temperature is carried out (more than or equal to 1400oC) ceramic post sintering；
C. after being sintered to an overall ceramic body, it is reserved with metal paste at two end faces and exposes, metallized at two ceramic body end faces by chemical plating or plating mode；
D., at metallized two end faces, by the way of high-temperature solder soldering or laser spot welding, metal lead wire is fixed on two end faces of ceramic body, it is achieved the connection to heater structure electrified regulation electrode.
Preferably, in described step c), ceramic body profile can be cube or cylinder or triangular prism cylinder or polygonal prism cylinder.
Beneficial effects of the present invention:
1. use the technique of ceramic printing metal paste can control the thickness of the metal pulp bed of material, length, width accurately, such that it is able to realize being accurately controlled the resistance of the metal pulp bed of material, and the deviation that can effectively realize different components heater resistance value can control below ± 5%, ensure that different components resistance value has extraordinary concordance；
2. print at ceramic body enterprising row metal slurry, by controlling sectional area and the length of the metal pulp bed of material, the resistance bigger than conventional metals silk heater can be obtained, the ceramic body heater of big resistance, during realizing electrified regulation activation, can carry out activating computer heating control by adjusting voltage system, ratio tradition adjusts current system, in terms of control more simple and easy to do, the requirement to activating power supply and circuit also simplify a lot；
3. the insulation characterisitic of ceramic body itself and good mechanical performance, add it through thousands of degree (more than or equal to 1400oC) high temperature sintering forms, and therefore under the parcel of the ceramic body of q.s, the metal pulp bed of material will not be short-circuited with gettering material, thus avoids this factor to cause component failure；
4. the surface area of ceramic body heater is all more much bigger than tinsel, therefore when the electrified regulation metal pulp bed of material, the surface area of ceramic body heat radiation conduction is bigger, can transfer heat on gettering material the most equably, activate for gettering material and create good heating condition, it is ensured that the efficiency of activation and activation effect reach optimal；
5. the cost of raw material used in ceramic body heater is the lowest, and when batch production, the production cost of one piece can control in extremely low level, is 1/10th even 1/tens of conventional metals silk heater；Ceramic body heater is also very easy to import large-scale production process simultaneously, produces yield high, and good product consistency has inexpensive feature.
Accompanying drawing explanation
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, the accompanying drawing used required in embodiment or description of the prior art will be briefly described below, apparently, for those of ordinary skill in the art, on the premise of not paying creative work, it is also possible to obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the rip cutting profile of heater structure of the present invention；
Fig. 2 is the crosscutting profile of heater structure of the present invention；
Wherein, 1. ceramic body, 2. metal paste, the 3. coat of metal, 4. metal lead wire.
Detailed description of the invention
For making the purpose of the embodiment of the present invention, technical scheme and advantage clearer, below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is clearly and completely described.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art are obtained under not making creative work premise, broadly fall into the scope of protection of the invention.
In prior art, such as the microminiature conducting self-heating type getter for the small volume used by Vacuum Package, generally it has a problem in that the resistance wiry as adding heater can not be processed the biggest；If tinsel heater electrified regulation to be met reaches gettering material preferable activationary temperature power demand, electric current required during activation the biggest (3A-7A).The biggest electric current proposes higher design requirement to the design of the power-on circuit used by activating.
In like manner, as itself the resistance difference of tinsel adding thermal resistance, the existence of this kind of resistance deviation has a strong impact on stability and the concordance of getter state of activation, eventually affects the production yields of Vacuum Package device, and stability and the concordance of its quality are also affected.For insulation processing wiry, prior art processing technique is complicated, and yield is low, relatively costly, has been even more than the cost of getter material itself.In actual use, the most often occur owing to wire surface insulating barrier ruptures, cause the short circuit of tinsel and gettering material, cause getter calcellation of directly losing efficacy the most often to occur.
Based on this, the invention provides a kind of heater structure being specifically designed to heat activation microminiature self-heating getter, and the manufacture method of this heater structure.
Concrete scheme provided by the present invention is as follows:
As shown in Figure 1 and Figure 2, heater structure for heat activation microminiature self-heating getter, including ceramic body, metal paste, the coat of metal and metal lead wire, including ceramic body wrapped multiple metal paste, it is integral that the metal paste of every layer connects shape up and down, and effective prolongation metal pulp bed of material length, in order to obtain bigger heater resistance, ceramic body two ends are welded to connect heating contact conductor, form the insulation of outer surface but the good heater element of heat conduction.When activating, it is connected power supply with metal lead wire by power supply, it is achieved to heater resistance heating power function.
This heater structure fabrication processes is as follows:
Step one: first it is that metal paste is printed on ceramic body raw material, connection of being in the milk up and down after then several have been printed the ceramic body raw material superposition of layer of metal slurry, then, then carry out high-temperature ceramics sintering, high temperature sintering temperature is generally higher than equal to 1400oC。
Further, ceramic body profile can be cube, or cylinder, triangular prism cylinder or polygonal prism cylinder.
Step 2: when being sintered to an overall ceramic heater (ceramic body), it is reserved with metal paste at two end face and exposes, metallized at two ceramic body end faces by chemical plating or plating mode.
Further, metallic nickel is generally used to do coating, naturally it is also possible to select other metals to metallize according to actual needs.
Step 3: at metallized two ceramic body end faces, by welding manner, metal lead wire is fixed on two end faces of ceramic body, thus realizes the connection with heater electrified regulation electrode.
Further, welding uses high temperature brazing or laser spot welding mode fixed electrode lead-in wire, during in order to guarantee complete gettering material sintering later and activate heating, and the problem not havinging junction metal molten or fracture.
Further, metal lead wire can use molybdenum filament, nickel wire or other high temperature alloy silks.
In the present invention, use small ceramic body (AL2O3 etc.) surface printing metal paste method to make and heat heater for self-heating type getter.The feature of its maximum is: on ceramic surface, the metal pulp bed of material of printing can accomplish tens microns as the heater resistance of heating, metal paste thickness, and the least sectional area can obtain bigger heater resistance；Meanwhile, take parcel metal paste layer in the middle of sandwich structure, multi-layer ceramics, after the metal pulp bed of material connects one entirety of formation up and down, it is possible to the effective length extending the metal pulp bed of material, thus obtain bigger heater resistance.
Compared with prior art, beneficial effects of the present invention is as follows:
The first, the technique of ceramic printing metal paste is used can to control the thickness of the metal pulp bed of material, length, width accurately, such that it is able to realize being accurately controlled the resistance of the metal pulp bed of material, and the deviation that can effectively realize different components heater resistance value can control below ± 5%, ensure that different components resistance value has extraordinary concordance.
With traditional getters tinsel heater resistance deviation all more than ± 10% compared with, under the conditions of identical electrified regulation, ceramic body heater activate time heating power also can be consistent, the most effectively ensured the concordance of getter activation effect.
The second, it is generally used for adding the main selection material that the heating resisting metals such as the tungsten of thermal resistance, molybdenum are all metal pastes.Carrying out ceramic body enterprising row metal slurry printing, by controlling sectional area and the length of the metal pulp bed of material, it is possible to obtain the resistance bigger than conventional metals silk heater.
General length can accomplish 1 ~ 10 ohm less than the resistance of the ceramic body heating heater that 10mm, length and width or diameter of section are less than 1mm, is far longer than the resistance tens resistance to hundreds of person of outstanding talent's ohm of tinsel heater.The ceramic body heater of big resistance, during realizing electrified regulation activation, can carry out activating computer heating control by adjusting voltage system, ratio tradition adjusts current system, in terms of control more simple and easy to do, the requirement to activating power supply and circuit also simplify a lot.Meanwhile, adding the resistance of heater own relatively big, active circuit and Electrodes are the least, even if there being hundreds of person of outstanding talent's ohm, under identical power on condition, these heating powers are also much smaller than the heating power adding heater, affect the least on the activation effect of getter.The concordance of getter activation effect also ensures the concordance of getter air-breathing usefulness, it is ensured that the concordance of the quality of Vacuum Package device.
3rd, after conventional metals silk heater insulation processing, it is also possible to transporting, take, in the operating process such as assembling, cause insulating barrier to rupture, with gettering material short circuit, cause component failure.The insulation characterisitic of ceramic body itself and good mechanical performance, ceramic body through thousands of degree (more than or equal to 1400oC) high temperature sintering forms, and therefore under the parcel of the ceramic body of q.s, the metal pulp bed of material will not be short-circuited with gettering material, thus avoids this factor to cause component failure.
4th, conventional metals silk heater is after doing insulating process, due to structure and insulating treatment process reason, the thickness of insulating barrier can be inconsistent, and tinsel is generally the most thinner (general diameter is at about 0.2mm), its surface and the contact area of gettering material also compared with ceramic body heater much smaller, it is the best in the uniformity being transmitted on external application gettering material that this situation is likely to result in tinsel heat, it is possible that local temperature is higher, activate uneven, thus have impact on the effect that getter activates.The ceramic body of the materials such as ceramic body heater, particularly AL2O3, itself, except having the insulation characterisitic of excellence, also has extraordinary thermal conductivity, will be good than the most polymetallic heat-conductive characteristic.The surface area of ceramic body heater is all more much bigger than tinsel, therefore when the electrified regulation metal pulp bed of material, the surface area of ceramic body heat radiation conduction is bigger, can transfer heat on gettering material the most equably, activate for gettering material and create good heating condition, it is ensured that the efficiency of activation and activation effect reach optimal.
5th, after conventional metals silk heater wants the shapes such as elder generation fabrication and processing spirality, S-shaped, the insulating processes such as being also performed to surface insulationization processes, electrophoresis aluminium oxide are more special, unconventional technique, technological process is complicated, defect ware easily occurs, and yield is low and production cost is high.And the producing process of ceramic body heater is identical with existing common ceramic metallization processing technique, highly developed.The raw material that raw material also right and wrong used in this ceramic body heater are usually shown in, the cost of raw material is the lowest.When batch production, the production cost of one piece can control in extremely low level, is ten point even 1/tens of conventional metals silk heater；Ceramic body heater is also very easy to import large-scale production process simultaneously, produces yield high, and good product consistency has inexpensive feature.
Above example only in order to technical scheme to be described, is not intended to limit；Although the present invention being described in detail with reference to previous embodiment, it will be understood by those within the art that: the technical scheme described in foregoing embodiments still can be modified by it, or wherein portion of techniques feature is carried out equivalent；And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (5)
1. for the heater structure of heat activation microminiature self-heating getter, it is characterized in that: described heater structure includes ceramic body, metal paste, the coat of metal and metal lead wire, described ceramic body is divided into multilamellar, every layer of coated metal slurry, every layer of metal paste connects up and down, two end faces of described ceramic body are reserved with metal paste and expose, the coat of metal, the metal lead wire of two end face weld heating electrodes of the described coat of metal is formed at two end faces of described ceramic body by chemical plating or plating mode.
A kind of heater structure for heat activation microminiature self-heating getter, it is characterised in that: described metal paste selects tungsten or molybdenum.
A kind of heater structure for heat activation microminiature self-heating getter, it is characterised in that: described ceramic body uses the Dagwood encapsulated by structures metal pulp bed of material.
4. the manufacture method for the heater structure of heat activation microminiature self-heating getter, it is characterised in that comprise the following steps:
First metal paste is printed on ceramic body raw material, connection of being in the milk up and down after then having printed several ceramic body raw material superpositions of layer of metal slurry；
B. high temperature is carried out (more than or equal to 1400oC) ceramic post sintering；
C. after being sintered to an overall ceramic body, it is reserved with metal paste at two end faces and exposes, metallized at two ceramic body end faces by chemical plating or plating mode；
D., at metallized two end faces, by the way of high-temperature solder soldering or laser spot welding, metal lead wire is fixed on two end faces of ceramic body, it is achieved the connection to heater structure electrified regulation electrode.
The manufacture method of a kind of heater structure for heat activation microminiature self-heating getter, it is characterised in that in described step c), ceramic body profile can be cube or cylinder or triangular prism cylinder or polygonal prism cylinder.
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| CN201610411291.2A CN105858587B (en) | 2016-06-14 | 2016-06-14 | Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107080893A (en) * | 2017-04-10 | 2017-08-22 | 河北盛平电子科技有限公司 | A kind of artificial retina and its manufacture method |
| CN112169528A (en) * | 2020-09-24 | 2021-01-05 | 有研工程技术研究院有限公司 | Internal heating type getter sheet and preparation method thereof |
| CN113172230A (en) * | 2021-04-13 | 2021-07-27 | 南京华东电子真空材料有限公司 | Titanium-based hydrogen storage device with heater |
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| CN201210480Y (en) * | 2008-06-13 | 2009-03-18 | 北京有色金属研究总院 | Hot element type sucking component |
| CN103489733A (en) * | 2013-08-23 | 2014-01-01 | 南京华东电子真空材料有限公司 | Method for manufacturing high reliability getter with heater |
| CN205838569U (en) * | 2016-06-14 | 2016-12-28 | 合肥芯福传感器技术有限公司 | Heater structure for heat activation microminiature self-heating getter |
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| US3584253A (en) * | 1968-04-01 | 1971-06-08 | Siemens Ag | Getter structure for electrical discharge and method of making the same |
| CN201210480Y (en) * | 2008-06-13 | 2009-03-18 | 北京有色金属研究总院 | Hot element type sucking component |
| CN103489733A (en) * | 2013-08-23 | 2014-01-01 | 南京华东电子真空材料有限公司 | Method for manufacturing high reliability getter with heater |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107080893A (en) * | 2017-04-10 | 2017-08-22 | 河北盛平电子科技有限公司 | A kind of artificial retina and its manufacture method |
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| CN112169528A (en) * | 2020-09-24 | 2021-01-05 | 有研工程技术研究院有限公司 | Internal heating type getter sheet and preparation method thereof |
| CN113172230A (en) * | 2021-04-13 | 2021-07-27 | 南京华东电子真空材料有限公司 | Titanium-based hydrogen storage device with heater |
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