CN105858587B - Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure - Google Patents
Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure Download PDFInfo
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- CN105858587B CN105858587B CN201610411291.2A CN201610411291A CN105858587B CN 105858587 B CN105858587 B CN 105858587B CN 201610411291 A CN201610411291 A CN 201610411291A CN 105858587 B CN105858587 B CN 105858587B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0032—Packages or encapsulation
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Abstract
The invention relates to the field of vacuum packaging technologies for MEMS (micro-mechanical systems) sensors, in particular to a heater structure for heating and activating micro-miniature self-heating air suction agents and a method for manufacturing the heater structure. The heater structure comprises a ceramic body, metal slurry, metal coatings and metal leading wires. The inside of the ceramic body is divided into a plurality of layers, the metal slurry wraps each layer, metal slurry layers are communicated with one another in the up-down directions, the metal slurry on two end surfaces of the ceramic body is reserved to be exposed, the metal coatings are formed on two end surfaces of the ceramic body by means of chemical plating or electroplating, and the metal leading wires of heating electrodes are welded on the two end surfaces of the ceramic body after the metal coatings are formed. The heater structure and the method have the advantages that resistance of the metal slurry layers is controlled, so that the consistency of resistance values of different devices can be guaranteed; whether heating and activating temperatures reach ideal activating temperatures of air suction materials or not can be monitored by special circuits in an online manner and can be controlled, accordingly, the activated air suction agents can be assuredly in the optimal activated states, and the activated states of the air suction agents are consistent and stable on a large scale.
Description
Technical field
The present invention relates to MEMS sensor vacuum sealing technique field, and in particular to one kind is used for heat activation microminiature certainly
The heater structure of heated getter agent and manufacture method.
Background technology
The sensor of the MEMS structures such as infrared thermal imaging, Thz needs the encapsulation form of fine vacuum, constant temperature, small volume.Tradition
Can encapsulates the encapsulation with the realization of ceramic cartridge packaging technology to special sensor chip, to reach fine vacuum, constant temperature, length
Particular job environmental condition in life-span and encapsulation requirement are typically employed in encapsulating package installs getter maintenance sensor chip
Vacuum needed for normal work, so as to improve the life-span of sensor.Getter when in use, needs to be heated to certain temperature
The air drawing characteristics of ability active material, can just play afterwards vacuum in long-term maintenance device after Vacuum Package.Getter because
Activation is needed to use, and the method for activating has with its own structure and directly associates.Simultaneously the condition of activation is if difference
Different, even the getter of same size, the pumping property of getter also can be variant.Therefore getter is also divided into from structure
Conducting self-heating type（Hot element type）With non-self hot type（Press type）.Conducting self-heating type（Hot element type）Be gettering material it is built-in plus
Heated filament, is produced by being powered to heater strip and realize the gettering material heat activation to tinsel external application after heating；Non-self heating
Type（Press type）It is that gettering material characteristic is activated by sensing heating or Baking out mode.
The heater that at present conducting self-heating type getter is used is typically the high temperature metallic materials such as metal molybdenum filament or nickel wire
As resistive heater, and certain shape such as spiral type, S-shaped etc. are fabricated to, are realized empty inside limited getter material
Between can have longer wire length, to obtain larger tinsel resistance；Meanwhile, wire surface will do insulation processing,
To prevent tinsel with gettering material short circuit.Conducting self-heating type getter in activation process because being by tinsel heater
Heating power is to gettering material heat activation, therefore the difference of the resistance of tinsel heater, can affect the difference of heating power,
Can cause have obvious difference on getter activation effect.
The greatest problem of current conducting self-heating type getter is, for the small of the small volume used by above-mentioned Vacuum Package
Type conducting self-heating type getter, the device size length of itself is usually no more than 10mm, and length and width or diameter of section only have several millis
Rice, therefore can not possibly process very big as the resistance wiry for adding heater, generally only tens milliohms are to milliohms up to a hundred
Nurse；If meeting tinsel heater electrified regulation reaches the preferable activationary temperature power demand of gettering material, required during activation
Electric current all than larger (3A-7A).So big electric current proposes higher design to activation power-on circuit design used will
Ask, particularly especially to control reduction contact resistance in powered electrode contact point.If loose contact, contact resistance mistake is caused
It is big even also big than the resistance of tinsel heater, it is likely that to cause electrode contact point and melt or fuse because of overheated.Meanwhile,
The resistance of contact electrode also has the deviation of several milliohms or more than ten bold and unconstrained ohms, the overall electricity of activation to whole tinsel heater
Resistance deviation is exactly tens percent, when tinsel heater is powered and activates, same heated current, and because of resistance deviation, its heating
The deviation of power is possibly exactly deviation at double.In the same manner, as the tinsel of the adding thermal resistance resistance difference of itself, because
The very little only tens bold and unconstrained ohms of overall electrical resistance to hundreds of bold and unconstrained ohm, therefore several bold and unconstrained ohms to more than ten person of outstanding talent's ohms resistance deviation just
May produce the larger deviation of heating power, the presence of this kind of resistance deviation have a strong impact on the stability of getter state of activation and
Concordance, the production yields of final impact Vacuum Package device, the stability and concordance of its quality are also affected.
Another problem is insulation processing wiry, and usual handling process is simple to raw silk rings shape tinsel heater surface
Oxide isolated process is done, and for the tinsel outer surface of the abnormity such as spirality, S-shaped is made to increase resistance, generally
Need to do the process of electrophoresis alumina insulation, this processing technique is complicated, and yield is low, relatively costly, has been even more than getter material
The cost of material itself.In actual use, also often occur, because wire surface insulating barrier ruptures, causing tinsel
With gettering material short circuit, also Jing often occurs for calcellation to cause getter directly to fail.
The content of the invention
For the deficiencies in the prior art, the invention provides a kind of heat for heat activation microminiature self-heating getter
Minor structure and manufacture method, by the technique using ceramic printing metal paste, accurately control thickness, the length of the metal pulp bed of material
Degree, width, so as to realize being accurately controlled the resistance of the metal pulp bed of material, have ensured that different components resistance value has extraordinary consistent
Property, while under the parcel of the ceramic body of enough amounts, the metal pulp bed of material will not be short-circuited with gettering material, ceramic body radiating in addition
The surface area of conduction is bigger, rapidly can equably transfer heat on gettering material, is that gettering material activation creates good
Good heating condition, it is ensured that the efficiency and activation effect of activation reaches most preferably.
To realize object above, the present invention is achieved by the following technical programs：
For the heater structure of heat activation microminiature self-heating getter, it is characterised in that：The heater structure includes
Ceramic body, metal paste, the coat of metal and metal lead wire, ceramic body is divided into multilamellar, every layer of coated metal slurry, per layer of gold
Category slurry is connected up and down, and two end faces of ceramic body are reserved with metal paste and expose, by chemical plating or plating mode described
Two end faces of ceramic body form the coat of metal, the metal lead wire of two end face weld heating electrodes of the coat of metal.
Preferably, the metal paste is from tungsten or molybdenum.
Preferably, the ceramic body adopts the Dagwood encapsulated by structures metal pulp bed of material.
A kind of manufacture method of the heater structure for heat activation microminiature self-heating getter, it is characterised in that bag
Include following steps:
A. metal paste is printed on ceramic body raw material first, then by printed layer of metal slurry several
Grouting connection up and down after the superposition of ceramic body raw material；
B. high temperature is carried out (more than or equal to 1400oC) ceramic post sintering；
C. after being sintered to the ceramic body of an entirety, be reserved with metal paste in two end faces and expose, by chemical plating or
Person's plating mode is metallized in two ceramic body end faces；
D. in metallized two end faces, by way of high-temperature solder soldering or laser spot welding, metal lead wire is consolidated
Two end faces of ceramic body are scheduled on, the connection to heater structure electrified regulation electrode is realized.
Preferably, step c）In, ceramic body profile can be cube or cylinder or triangular prism cylinder or multiaspect
Prism.
Beneficial effects of the present invention:
1. thickness, length, the width of the metal pulp bed of material can be controlled accurately using the technique of ceramic printing metal paste, from
And can realize being accurately controlled the resistance of the metal pulp bed of material, and can effectively realize the deviation of different components heater resistance value
Can control below ± 5%, to have ensured that different components resistance value has extraordinary concordance；
2., in the enterprising row metal slurry printing of ceramic body, by the sectional area and length that control the metal pulp bed of material, can obtain
Resistance that must be bigger than conventional metals silk heater, the ceramic body heater of big resistance, during realizing that electrified regulation is activated, can
It is more simple and easy to do in control aspect than tradition adjustment current system to enter line activating computer heating control by adjusting voltage system,
Requirement to activating power supply and circuit also simplify a lot；
3. the insulation characterisitic of ceramic body itself and good mechanical performance, along with it (is more than or equal to through thousands of degree
1400oC high temperature sintering) is formed, therefore under the parcel of the ceramic body of q.s, the metal pulp bed of material will not be sent out with gettering material
Raw short circuit, so as to avoid this factor from causing component failure；
4. the surface area of ceramic body heater is generally all much bigger than tinsel, therefore in the electrified regulation metal pulp bed of material
When, the surface area of ceramic body radiating conduction is bigger, rapidly can equably transfer heat on gettering material, is air-breathing material
Good heating condition is created in material activation, it is ensured that the efficiency and activation effect of activation reaches most preferably；
5. the cost of raw material used in ceramic body heater is very low, and in batch production, the production cost of one piece can
It is 1/10th or even 1/tens of conventional metals silk heater to control in extremely low level；While ceramic body heater
Also be very easy to import large-scale production process, production yield is high, good product consistency, with it is inexpensive the characteristics of.
Description of the drawings
In order to be illustrated more clearly that the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
The accompanying drawing to be used needed for having technology description is briefly described, it should be apparent that, for those of ordinary skill in the art come
Say, on the premise of not paying creative work, can be with according to these other accompanying drawings of accompanying drawings acquisition.
Fig. 1 is the rip cutting profile of heater structure of the present invention；
Fig. 2 is the crosscutting profile of heater structure of the present invention；
Wherein, 1. ceramic body, 2. metal paste, the 3. coat of metal, 4. metal lead wire.
Specific embodiment
To make purpose, technical scheme and the advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described.Based on the embodiment in the present invention,
The every other embodiment that those of ordinary skill in the art are obtained under the premise of creative work is not made, belongs to this
The scope of bright protection.
In prior art, the microminiature conducting self-heating type getter of the small volume as used by being used for Vacuum Package, generally
Problem is can not possibly to process very big as the resistance wiry for adding heater；If meeting tinsel heater electrified regulation
The preferable activationary temperature power demand of gettering material is reached, required electric current is all than larger (3A-7A) during activation.So big electricity
Flow and propose higher design requirement to activation power-on circuit design used.
In the same manner, as the tinsel of the adding thermal resistance resistance difference of itself, the presence of this kind of resistance deviation has a strong impact on
The stability and concordance of getter state of activation, eventually affect Vacuum Package device production yields, its quality it is steady
Qualitative and concordance is also affected.Complicated for insulation processing wiry, prior art processing technique, yield is low, cost
It is higher, it has been even more than the cost of getter material itself.In actual use, also often occur due to metal silk table
Face insulating barrier rupture, causes tinsel and gettering material short circuit, and also Jing often occurs for calcellation to cause getter directly to fail.
Based on this, the invention provides a kind of heater structure dedicated for heat activation microminiature self-heating getter,
And the manufacture method of the heater structure.
Concrete scheme provided by the present invention is as follows：
As shown in Figure 1 and Figure 2, for the heater structure of heat activation microminiature self-heating getter, including ceramic body, gold
Category slurry, the coat of metal and metal lead wire, including ceramic body wrapped multiple metal paste, per layer of metal paste connects up and down shape
It is integral, effectively extend metal pulp bed of material length, to obtain bigger heater resistance, ceramic body two ends are welded to connect and add
Thermode lead, forms an outer surface insulation but the good heater element of heat conduction.In activation, by power supply and metal lead wire
Connection power supply, realizes to heater resistance heating power function.
The heater structure fabrication processes are as follows：
Step one：First it is that metal paste is printed on ceramic body raw material, then several has been printed into layer of metal
Grouting connection up and down after the ceramic body raw material superposition of slurry, then, then carries out high-temperature ceramicss sintering, and high temperature sintering temperature is typically big
In equal to 1400oC。
Further, ceramic body profile can be cube, or cylinder, triangular prism cylinder or multiaspect prism.
Step 2：When the ceramic heater for being sintered to an entirety（Ceramic body）, in two end face metal paste is reserved with
Expose, metallized in two ceramic body end faces by chemical plating or plating mode.
Further, metallic nickel is usually used to do coating, naturally it is also possible to select other metals to enter according to actual needs
Row metal.
Step 3：In metallized two ceramic body end faces, by welding manner, metal lead wire is fixed on into ceramic body
On two end faces, so as to realize the connection with heater electrified regulation electrode.
Further, welding is complete later to guarantee using high temperature brazing or laser spot welding mode fixed electrode lead
Be not in the problem of junction metal molten or fracture when sintering into gettering material and activating heating.
Further, metal lead wire can use molybdenum filament, nickel wire or other high temperature alloy silks.
In the present invention, using small ceramic body（AL2O3 etc.）Surface printing metal paste method is made for self-heating type
Getter heats heater.The characteristics of its is maximum be：The metal pulp bed of material printed on ceramic surface can be used as the heater of heating
Resistance, metal paste thickness can accomplish tens microns, and so little sectional area can obtain larger heater resistance；Meanwhile,
Parcel metal paste layer in the middle of sandwich structure, multi-layer ceramics, the metal pulp bed of material is taken to connect to be formed after an entirety, just up and down
The length of the metal pulp bed of material can effectively be extended, so as to obtain bigger heater resistance.
Compared with prior art, beneficial effects of the present invention are as follows：
Firstth, thickness, length, the width of the metal pulp bed of material can accurately be controlled using the technique of ceramic printing metal paste
Degree, such that it is able to realize being accurately controlled the resistance of the metal pulp bed of material, and can effectively realize different components heater resistance value
Deviation can control below ± 5%, to have ensured that different components resistance value has extraordinary concordance.
Compared with traditional getters tinsel heater resistance deviation is all more than ± 10%, under the conditions of identical electrified regulation,
Heating power of the ceramic body heater in activation also can be consistent, has also just effectively ensured the concordance of getter activation effect.
Secondth, it is generally used for the main selection material that the heating resisting metals such as tungsten, the molybdenum of adding thermal resistance are all metal pastes.Entering
The enterprising row metal slurry printing of row ceramic body, by the sectional area and length that control the metal pulp bed of material, it is possible to obtain than tradition gold
The bigger resistance of category silk heater.
The resistance of the ceramic body heating heater of general of length no more than 10mm, length and width or diameter of section less than 1mm can be with
Accomplish 1 ~ 10 ohm, be far longer than the resistance of the resistance tens of tinsel heater to hundreds of bold and unconstrained ohm.The ceramic body heat of big resistance
Son, during realizing that electrified regulation is activated, can enter line activating computer heating control, than tradition adjustment by adjusting voltage system
Current system, more simple and easy to do in control aspect, the requirement to activating power supply and circuit also simplify a lot.Meanwhile,
Plus heater resistance itself is larger, active circuit and Electrodes are Comparatively speaking with regard to very little, even if having hundreds of bold and unconstrained ohm, phase
With under power on condition, these heating powers affect also than adding the heating power of heater much smaller on the activation effect of getter
It is just very little.The concordance of getter activation effect also ensures the concordance of getter air-breathing efficiency, it is ensured that vacuum sealing device
The concordance of the quality of part.
3rd, after conventional metals silk heater insulation processing, it is also possible to transporting, in the operating process such as take, assemble, lead
Insulating barrier rupture is caused, with gettering material short circuit, component failure is caused.The insulation characterisitic of ceramic body itself and good mechanicalness
Can, ceramic body is through thousands of degree（More than or equal to 1400oC）High temperature sintering form, therefore the parcel of the ceramic body in q.s
Under, the metal pulp bed of material will not be short-circuited with gettering material, so as to avoid this factor from causing component failure.
4th, conventional metals silk heater do insulating process after, due to structure and insulating treatment process reason, insulating barrier
Thickness can be inconsistent, and tinsel is generally all thinner（General diameter is in 0.2mm or so）, its surface and gettering material
Contact area also compares that ceramic body heater is much smaller, and such case is likely to result in tinsel heat and is being transmitted to external application air-breathing
Uniformity on material is not good, it is possible that local temperature is higher, activation is uneven, so as to have impact on the effect of getter activation
Really.The ceramic body of the materials such as ceramic body heater, particularly AL2O3, in itself except with excellent insulation characterisitic, also with very
Good thermal conductivity, will be good than very polymetallic heat-conductive characteristic.The surface area of ceramic body heater generally all will than tinsel
It is much larger, therefore in the electrified regulation metal pulp bed of material, the surface area of ceramic body radiating conduction is bigger, can rapidly equably
Transfer heat on gettering material, be that good heating condition is created in gettering material activation, it is ensured that the efficiency of activation and activation
Effect reaches most preferably.
5th, conventional metals silk heater is wanted after the shapes such as first fabrication and processing spirality, S-shaped, is also performed to surface insulation
Change is processed, and the insulating process such as electrophoresis aluminium oxide is more special, unconventional technique, and technological process is complicated, defect ware easily occurs, good
Rate is low and production cost is high.And the producing process of ceramic body heater and existing common ceramic metallization processing technique phase
Together, it is highly developed.Raw material used in this ceramic body heater is also very common raw material, and the cost of raw material is very low.
During batch production, the production cost of one piece can be controlled in extremely low level, be ten point of conventional metals silk heater
Even 1/tens；Simultaneously ceramic body heater is also very easy to import large-scale production process, and production yield is high, and product is consistent
Property is good, with it is inexpensive the characteristics of.
Above example only to illustrate technical scheme, rather than a limitation；Although with reference to the foregoing embodiments
The present invention has been described in detail, it will be understood by those within the art that：It still can be to aforementioned each enforcement
Technical scheme described in example is modified, or carries out equivalent to which part technical characteristic；And these modification or
Replace, do not make the spirit and scope of the essence disengaging various embodiments of the present invention technical scheme of appropriate technical solution.
Claims (5)
1. a kind of heater structure for heat activation microminiature self-heating getter, it is characterised in that：The heater structure bag
Include ceramic body, metal paste, the coat of metal and metal lead wire, the ceramic body is divided into multilamellar, every layer of coated metal slurry,
Every layer of metal paste is connected up and down, and two end faces of the ceramic body are reserved with metal paste and expose, by chemical plating or plating
Mode forms the coat of metal, the metal of two end face weld heating electrodes of the coat of metal in two end faces of the ceramic body
Lead.
2. a kind of heater structure for heat activation microminiature self-heating getter as claimed in claim 1, its feature exists
In：The metal paste is from tungsten or molybdenum.
3. a kind of heater structure for heat activation microminiature self-heating getter as claimed in claim 1, its feature exists
In：The ceramic body adopts the Dagwood encapsulated by structures metal pulp bed of material.
4. a kind of manufacture method of the heater structure for heat activation microminiature self-heating getter, it is characterised in that include
Following steps:
A. metal paste is printed on ceramic body raw material first, then will have printed several ceramics of layer of metal slurry
Grouting connection up and down after the superposition of body raw material；
B. high-temperature ceramicss sintering is carried out；
C. after being sintered to the ceramic body of an entirety, it is reserved with metal paste in two end faces and exposes, by chemical plating or electricity
Plating mode is metallized in two ceramic body end faces；
D. in metallized two end faces, by way of high-temperature solder soldering or laser spot welding, metal lead wire is fixed on
Two end faces of ceramic body, realize the connection to heater structure electrified regulation electrode.
5. a kind of making side of the heater structure for heat activation microminiature self-heating getter as claimed in claim 4
Method, it is characterised in that in step c, ceramic body profile is cube or cylinder or multiaspect prism.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610411291.2A CN105858587B (en) | 2016-06-14 | 2016-06-14 | Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610411291.2A CN105858587B (en) | 2016-06-14 | 2016-06-14 | Heater structure for heating and activating micro-miniature self-heating air suction agents and method for manufacturing heater structure |
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| CN107080893B (en) * | 2017-04-10 | 2023-06-09 | 河北盛平电子科技有限公司 | Artificial retina and manufacturing method thereof |
| CN112169528B (en) * | 2020-09-24 | 2022-07-12 | 有研工程技术研究院有限公司 | Internal heating type getter sheet and preparation method thereof |
| CN113172230A (en) * | 2021-04-13 | 2021-07-27 | 南京华东电子真空材料有限公司 | Titanium-based hydrogen storage device with heater |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| DE1764092C3 (en) * | 1968-04-01 | 1974-01-03 | Siemens Ag, 1000 Berlin U. 8000 Muenchen | Getter device for installation in electrical discharge vessels |
| CN201210480Y (en) * | 2008-06-13 | 2009-03-18 | 北京有色金属研究总院 | Hot element type sucking component |
| CN103489733B (en) * | 2013-08-23 | 2015-11-18 | 南京华东电子真空材料有限公司 | A kind of preparation method of high reliability getter with heater |
| CN205838569U (en) * | 2016-06-14 | 2016-12-28 | 合肥芯福传感器技术有限公司 | Heater structure for heat activation microminiature self-heating getter |
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