CN105834919A - Multiphase flow polishing automation equipment capable of forming efficient turbine rotation - Google Patents
Multiphase flow polishing automation equipment capable of forming efficient turbine rotation Download PDFInfo
- Publication number
- CN105834919A CN105834919A CN201610279129.XA CN201610279129A CN105834919A CN 105834919 A CN105834919 A CN 105834919A CN 201610279129 A CN201610279129 A CN 201610279129A CN 105834919 A CN105834919 A CN 105834919A
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- China
- Prior art keywords
- turbine
- module
- fixed
- polishing
- motor
- Prior art date
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C3/00—Abrasive blasting machines or devices; Plants
- B24C3/32—Abrasive blasting machines or devices; Plants designed for abrasive blasting of particular work, e.g. the internal surfaces of cylinder blocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/10—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work
- B24B31/116—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor involving other means for tumbling of work using plastically deformable grinding compound, moved relatively to the workpiece under the influence of pressure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B31/00—Machines or devices designed for polishing or abrading surfaces on work by means of tumbling apparatus or other apparatus in which the work and/or the abrasive material is loose; Accessories therefor
- B24B31/12—Accessories; Protective equipment or safety devices; Installations for exhaustion of dust or for sound absorption specially adapted for machines covered by group B24B31/00
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B51/00—Arrangements for automatic control of a series of individual steps in grinding a workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24C—ABRASIVE OR RELATED BLASTING WITH PARTICULATE MATERIAL
- B24C9/00—Appurtenances of abrasive blasting machines or devices, e.g. working chambers, arrangements for handling used abrasive material
Abstract
The invention discloses multiphase flow polishing automation equipment capable of forming efficient turbine rotation. The multiphase flow polishing automation equipment comprises a workpiece fixing module, a parameter monitoring and controlling module, a turbine rotation multiphase flow polishing module, a supporting module and a lifting module, wherein the workpiece fixing module is used for clamping a to-be machined workpiece; the supporting module is used for supporting the parameter monitoring and controlling module, the turbine rotation multiphase flow polishing module and the lifting module; the lifting module is used for driving the turbine rotation multiphase flow polishing module to reach a specific location to polish the to-be machined workpiece fixed on the workpiece fixing module; and the parameter monitoring and controlling module is used for monitoring and controlling parameters of the whole equipment. The multiphase flow polishing automation equipment has the advantages that the structure is simple and compact, the production cost is low, high-speed rotating turbulence can be formed efficiently through the turbine rotation multiphase flow polishing module to polish the to-be polished workpiece, the machining parameters are monitored in real time and controlled accurately, the degree of automation is high, and the machining quality and the machining efficiency are improved.
Description
Technical field
The present invention relates to Ultraprecision Machining field, in particular, particularly relate to a kind of high-efficiency turbine rotary muti-phase electrical stream polishing
Automation equipment.
Background technology
At present, along with semiconductor industry and the development of optical industry, need the precision workpiece table such as silicon chip surface and optical mirror plane
Face quality is good, and the amount of needs is the most increasing, it is therefore desirable to a kind of quick, efficient and automatization's multiphase flow polissoir.Now
Fluid polishing apparatus processing efficiency low, it is impossible to silicon chip surface and optical mirror plane are polished rapidly and efficiently, it is impossible to efficiently
Form eddy flow turbulent flow at a high speed workpiece is polished.Well machined parameters can not be monitored, it is impossible to realize simultaneously
Automatization, unitized industrial standard are processed, repeatable poor, it is impossible to adapt to the demand of industrialized production.
Summary of the invention
It is an object of the invention to solve workpiece cannot high efficiency formation rotating turbulence at a high speed be thrown by multiphase flow polissoir
Light, machined parameters can not accurately be detected and control, and the problem of automaticity difference, it is provided that a kind of high-efficiency turbine rotation
Turn multiphase flow polishing automation equipment.
The present invention is achieved through the following technical solutions above-mentioned purpose: a kind of high-efficiency turbine rotary muti-phase electrical stream polishes automation equipment,
Including workpiece stuck-module, parameter monitoring and control module, turbine rotary muti-phase electrical stream polishing module, support module and lifting module,
Workpiece stuck-module processes workpiece for clamping, supports module for support parameters monitoring and control module, turbine rotary muti-phase electrical stream
Polishing module and lifting module, Lift Part drive turbine rotary muti-phase electrical stream polishing module arrives specifies position to workpiece stuck-module
Upper fixing processing workpiece is polished, and parameter monitoring and control module are used for parameter monitoring and the control of whole equipment；
Described workpiece stuck-module includes polishing Work piece fixing platform, inlet suction port and vacuum adapter, and polishing Work piece fixing platform has
Circular workpiece installation slot and the waste liquid outlet connected with workpiece installation slot, have air cavity, described throwing inside polishing Work piece fixing platform
The air inlet connecting draught animals and vacuum adapter mouth connected with described air cavity, inlet suction port and vacuum adapter is had respectively on light Work piece fixing platform
It is arranged at the air inlet connecting draught animals and vacuum adapter mouth；The absorption that bottom described workpiece installation slot, uniform multiple and described air cavity is connected
Pore；Described inlet suction port and vacuum adapter connect air intake pump and vacuum source by pipeline respectively；
Described turbine rotary muti-phase electrical stream polishing module includes that the first motor, the first shaft coupling, the first motor support frame, polishing fluid enter
Material pipe, turbine swivelling chute, sealing lid, band shaft turbine, O RunddichtringO, lip-type packing and lip-type packing gland, described
Turbine swivelling chute, in the hollow tubular being vertically arranged, seals lid and is fixed on the upper end of described turbine swivelling chute, seals lid and turbine revolves
Sealed by O RunddichtringO between turn trough；The turbine end of described band shaft turbine is positioned at inside described turbine swivelling chute, band shaft turbine
Axle head seal lid through described and connect the first motor by the first shaft coupling, described first motor is by the first motor support frame
It is fixed on described sealing to cover；Described band shaft turbine is sealed by lip-type packing with sealing lid；Polishing fluid feed pipe is fixed on close
Connect in capping and with described turbine swivelling chute inside, when the first motor is by the first shaft coupling band movable band axis turbine rotation, drive
Multiphase flow polishing fluid in turbine swivelling chute forms rotating turbulence；
Described support module includes that top fixing support rack, vertical fixing support rack, the first L-type contiguous block, the second L-type connect
Block, top fixing support rack is fixed on two vertical fixing support rack tops, and lifting module is fixed on vertical fixing support rack,
Lifting module connects the second L-type contiguous block by the first L-type contiguous block, and the second L-type contiguous block is fixed on the first motor support frame
On；Lowering or hoisting gear drives turbine rotary muti-phase electrical stream polishing module along vertically side by the first L-type contiguous block and the second L-type contiguous block
To making elevating movement；
Described parameter monitoring and control module include that rate of discharge tachymeter, outlet temperature monitor, temperature sensor, distance pass
Sensor, turbine flowmeter and motor speed sensor, described rate of discharge tachymeter and outlet temperature monitor are fixed on described useless
The surface of liquid outlet, described rate of discharge tachymeter is fixed on polishing Work piece fixing platform by rate of discharge tachymeter fixed mount,
Described outlet temperature monitor is fixed on polishing Work piece fixing platform by outlet temperature monitor fixed mount；Described range sensor
Being fixed on the second L-type contiguous block, range sensor is for detecting the dropping distance of turbine rotary muti-phase electrical stream polishing module；Described
Rate of discharge tachymeter is fixed on described polishing fluid feed pipe and for detecting the stream of multiphase flow polishing fluid in described polishing fluid feed pipe
Amount, viscosity with mutually containing ratio；Described motor speed sensor is fixed on the inwall of the first motor support frame, and motor speed senses
The sensing chip of device contacts with the axle head of described band shaft turbine, and motor speed sensor is for detecting the rotation speed of described first motor
Degree；Described temperature sensor is fixed on the sidewall of described turbine swivelling chute, and temperature sensor is many in being used for detecting turbine swivelling chute
Flow the temperature of polishing fluid mutually.
Further, described lowering or hoisting gear includes that drivewheel, driven pulley, regulating wheel, regulating wheel fix axle, the second motor support
Frame, the second motor, Timing Belt, ball-screw, feed screw nut, feed screw nut fix seat, line slide rail and ball-screw bearing
Seat, the second motor is fixed on the fixing support rack of described top by the second motor support frame, and described drivewheel is fixed on described the
On the motor head of two motors, described drivewheel connects driven pulley by Timing Belt, and carries out tensioning, described tensioning by regulating wheel
Take turns and fix axle connection top fixed support by regulating wheel；Described driven pulley is fixed on the one end of the ball-screw being vertically arranged, rolling
The other end of ballscrew is fixed on vertical fixing support rack by ball-screw bearing block, and line slide rail is vertically installed at the most solid
Determining on bracing frame, feed screw nut is sleeved on described ball-screw, and described feed screw nut fixes with feed screw nut that seat is fixing to be connected,
Feed screw nut is fixed seat and is provided with the slide block matched with described line slideway, is driven fixing during the second electric machine rotation by drivewheel
At the driven pulley synchronous axial system at ball-screw top, thus drive described feed screw nut and feed screw nut to fix seat and lead along described straight line
Rail is vertically movable, and described feed screw nut fixes seat fixing connection the first L-type contiguous block, and feed screw nut is fixed seat and led along described straight line
The first L-type contiguous block, the second L-type contiguous block and the entirety of turbine rotary muti-phase electrical stream polishing module composition is driven during rail vertical motion
Vertically movable along described line slideway.
Further, described band shaft turbine includes turbine wheel shaft；And the upper straight leaf along turbine wheel shaft the most successively continuous distribution
Sheet, helical blade, the oblique blade in top and lower straight blade.
Further, described vertical fixing support rack, the first L-type contiguous block, the second L-type contiguous block, driven pulley, regulating wheel,
Regulating wheel fixes axle, ball-screw, feed screw nut, feed screw nut are fixed seat, line slide rail and ball-screw bearing block and be equipped with
Symmetrical a pair.
Further, described waste liquid outlet is provided with four, and four waste liquid outlets are evenly distributed on the surrounding of described workpiece installation slot.
Further, described absorption pore is provided with 12, and every 6 absorption pores are set to one group, and often group absorption pore is distributed on
On same circumference.
Further, described polishing fluid feed pipe is provided with three, and three polishing fluid feed pipes are distributed on the described same circle sealing lid
Zhou Shang.
Further, described range sensor is specified on the second L-type contiguous block by range sensor fixed mount.
The beneficial effects of the present invention is:
1, present configuration is the compactest, and production cost is low, it is possible to be efficiently formed height by turbine rotary muti-phase electrical stream polishing module
Polishing workpiece is polished by speed rotating turbulence, to machined parameters monitoring monitoring in real time and accurately controls, and automaticity is high, carries
High crudy and working (machining) efficiency.
2, the present invention accurately controls the spacing of turbine rotary muti-phase electrical stream polishing module and polishing workpiece by range sensor, thus protects
Demonstrate,prove and specifically apart from interior, polishing workpiece is being polished, improve the efficiency of polishing.
3, the present invention accurately controls the velocity of rotation of the first motor that drive belt shaft turbine rotates by motor speed sensor, thus
Obtain the actual speed of the first motor in real time, thus the rotating speed of more accurate first motor is to obtain more preferable rotating turbulence.
4, the present invention carries out the real-time prison of speed and temperature by rate of discharge tachymeter and outlet temperature monitor to polishing waste liquid
Surveying, rotating turbulence is also monitored, and is fed back in time, thus corrects the rotating speed of the first motor by temperature sensor in real time simultaneously,
To guarantee by suitable eddy flow turbulent flow, workpiece to be polished.
5, the present invention uses the mode clamping of vac sorb and unclamps workpiece, workpiece effectively can carry out absorption and clamp and top,
Facilitate clamping and the discharging of workpiece, it is to avoid the injury that workpiece is brought by mechanical grip.
6, the present invention band shaft turbine use according to certain position distribution upper straight blade, the oblique blade in top, lower straight blade and
Helical blade forms efficient rotating turbulence, it is possible to quickly obtains stable high speed rotating turbulent flow, improves the efficiency of polishing.
7, the present invention is effectively sealed sealing to be formed between lid and turbine swivelling chute by O RunddichtringO, and passes through lip packing
Circle and lip-type packing gland form sealing when turbine wheel shaft rotates, it is ensured that turbine wheel shaft will not occur polishing fluid when rotated
Reveal.
Accompanying drawing explanation
Fig. 1 is the shaft side figure of the present invention a kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment.
Fig. 2 is the top view of the present invention a kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment.
Fig. 3 is the right view of the present invention a kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment.
Fig. 4 is the top view of workpiece stuck-module of the present invention.
Fig. 5 is the front view of workpiece stuck-module of the present invention.
Fig. 6 is the sectional view of workpiece stuck-module of the present invention.
Fig. 7 is the structural representation of turbine rotary muti-phase electrical stream of the present invention polishing module.
Fig. 8 is the sectional view of turbine rotary muti-phase electrical stream of the present invention polishing module.
Fig. 9 is the sectional view of the present invention a kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment.
Figure 10 is the structural representation of band shaft turbine of the present invention.
Figure 11 is the front view of band shaft turbine of the present invention.
Figure 12 is the right view that the present invention takes away turbine.
In figure, 1-workpiece stuck-module, 101-vacuum adapter, 102-polishing Work piece fixing platform, 103-polishing workpiece, 1031-give up
Liquid outlet, 1032-absorption pore, the 1033-air inlet connecting draught animals, 1034-air cavity, 1035-vacuum adapter mouth, 104-inlet suction port,
2-parameter monitoring and control module, 201-rate of discharge tachymeter fixed mount, 202-rate of discharge tachymeter, 203-outlet temperature prison
Survey instrument, 204-range sensor fixed mount, 205-range sensor, 206-turbine flowmeter, 207-motor speed sensor, 208-
Sensing chip, 209-temperature sensor, 210-outlet temperature monitor fixed mount, 3-turbine rotary muti-phase electrical stream polishing module, 301-
First motor, 302-the first motor support frame, 303-seal lid, 304-turbine swivelling chute, 305-the first shaft coupling, 306-polishing
Liquid feed pipe, 307-band shaft turbine, 3071-upper straight blade, the oblique blade in 3072-top, 3073-lower straight blade, 3074-spiral shell
Vane sheet, 3075-turbine wheel shaft, 308-O RunddichtringO, 309-lip-type packing, 310-lip-type packing gland, 4-support module,
The vertical fixing support rack of 401-, 402-top fixing support rack, 403-the first L-type contiguous block, 404-the second L-type contiguous block, 5-
Lifting module, 501-driven pulley, 502-Timing Belt, 503-regulating wheel fix axle, 504-the second motor, 505-the second motor support
Frame, 506-regulating wheel, 507-ball-screw, 508-feed screw nut, 509-feed screw nut fix seat, 510-line slide rail, 511-
Ball-screw bearing block, 512-drivewheel.
Detailed description of the invention
The invention will be further described below in conjunction with the accompanying drawings:
As shown in Fig. 1～12, a kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment, including workpiece stuck-module 1, parameter
Monitoring and control module 2, turbine rotary muti-phase electrical stream polishing module 3, support module 4 and lifting module 5, workpiece stuck-module 1
Process workpiece for clamping, support module 4 for support parameters monitoring and control module 2, turbine rotary muti-phase electrical stream polishing module 3
With lifting module 5, Lift Part drives turbine rotary muti-phase electrical stream polishing module 3 to arrive appointment position on workpiece stuck-module 1
Fixing processing workpiece is polished, and parameter monitoring is used for parameter monitoring and the control of whole equipment with control module 2.
Described workpiece stuck-module 1 includes polishing Work piece fixing platform 102, inlet suction port 104 and vacuum adapter 101, polishes workpiece
The workpiece installation slot having circle on fixed station 102 and the waste liquid outlet 1031 connected with workpiece installation slot, polish Work piece fixing platform
102 inside have air cavity 1034, and described polishing Work piece fixing platform 102 has the air inlet connecting draught animals connected with described air cavity 1034
1033 and vacuum adapter mouth 1035, inlet suction port 104 and vacuum adapter 101 be separately mounted to the air inlet connecting draught animals 1033 and vacuum
At connection port 1035；The absorption pore 1032 that bottom described workpiece installation slot, uniform multiple and described air cavity 1034 is connected；Institute
State inlet suction port 104 and vacuum adapter 101 connects air intake pump and vacuum source by pipeline respectively；Described waste liquid outlet 1031 sets
Having four, four waste liquid outlets 1031 are evenly distributed on the surrounding of described workpiece installation slot.Described absorption pore 1032 is provided with 12
Individual, every 6 absorption pores 1032 are set to one group, and often group absorption pore 1032 is distributed on same circumference.12 adsorbed gas
Polishing workpiece 103 can be effectively clamped and jack-up by hole 1032.
Described turbine rotary muti-phase electrical stream polishing module 3 includes first motor the 301, first shaft coupling the 305, first motor support frame
302, polishing fluid feed pipe 306, turbine swivelling chute 304, sealing lid 303, band shaft turbine 307, O RunddichtringO 308, lip
Shape sealing ring 309 and lip-type packing gland 310, described turbine swivelling chute 304, in the hollow tubular being vertically arranged, seals lid
303 upper ends being fixed on described turbine swivelling chute 304, seal between lid 303 and turbine swivelling chute 304 by O RunddichtringO
308 seal；It is internal that the turbine end of described band shaft turbine 307 is positioned at described turbine swivelling chute 304, the axle head of band shaft turbine 307
Sealing lid 303 through described and connect the first motor 301 by the first shaft coupling 305, described first motor 301 is by first
Motor support frame 302 is fixed on described sealing on lid 303；Described band shaft turbine 307 passes through lip-type packing with sealing lid 303
309 seal；Polishing fluid feed pipe 306 is fixed on sealing lid 303 and connects with described turbine swivelling chute 304 inside, described
Polishing fluid feed pipe 306 is provided with three, and three polishing fluid feed pipes 306 are distributed on the described same circumference sealing lid 303；
When first motor 301 is rotated by the first shaft coupling 305 band movable band axis turbine 307, drive in turbine swivelling chute 304 is heterogeneous
Stream polishing fluid forms rotating turbulence.
O RunddichtringO 308 seals sealing to be formed between lid 303 and turbine swivelling chute 304, thus prevents multiphase flow at a high speed
Polishing fluid leaks, and lip-type packing 309 ensures that band shaft turbine 307 forms good sealing when high speed rotating, so that
The leakage of multiphase flow polishing fluid also will not occur while rotating with shaft turbine 307.It is further fixed on lip in lip-type packing 309
Shape sealing ring gland 310.
Described support module 4 include top fixing support rack 402, vertical fixing support rack the 401, first L-type contiguous block 403,
Second L-type contiguous block 404, top fixing support rack 402 is fixed on two vertical fixing support rack 401 tops, lifts module 5
Being fixed on vertical fixing support rack 401, lifting module 5 connects the second L-type contiguous block 404 by the first L-type contiguous block 403,
Second L-type contiguous block 404 is fixed on the first motor support frame 302；Lowering or hoisting gear is by the first L-type contiguous block 403 and the
Two L-type contiguous blocks 404 drive turbine rotary muti-phase electrical stream polishing module 3 vertically to make elevating movement.
Described parameter monitoring and control module 2 include rate of discharge tachymeter 202, outlet temperature monitor 203, temperature sensor
209, range sensor 205, turbine flowmeter 206 and the first motor speed sensor 207, described rate of discharge tachymeter 202
With the surface that outlet temperature monitor 203 is fixed on described waste liquid outlet 1031, described rate of discharge tachymeter 202 passes through
Mouth flow speed measuring instrument fixed mount 201 is fixed on polishing Work piece fixing platform 102, and described outlet temperature monitor 203 is by outlet
Temperature monitor fixed mount 210 is fixed on polishing Work piece fixing platform 102；Described range sensor 205 is fixed on the second L-type
On contiguous block 404, described range sensor 205 is specified at the second L-type contiguous block 404 by range sensor fixed mount 204
On, range sensor 205 is for detecting the dropping distance of turbine rotary muti-phase electrical stream polishing module 3；Described rate of discharge tachymeter
202 be fixed on described polishing fluid feed pipe 306 and for detect the flow of multiphase flow polishing fluid in described polishing fluid feed pipe 306,
Viscosity with mutually containing ratio；Described first motor speed sensor 207 is fixed on the inwall of the first motor support frame 302, and first
The sensing chip 208 of motor speed sensor 207 contacts with the axle head of described band shaft turbine 307, the first motor speed sensor
207 for detecting the velocity of rotation of described first motor 301；Described temperature sensor 209 is fixed on described turbine swivelling chute 304
Sidewall on, temperature sensor 209 is the temperature of multiphase flow polishing fluid in detecting turbine swivelling chute 304.
Described lowering or hoisting gear includes that drivewheel 512, driven pulley 501, regulating wheel 506, regulating wheel fix axle the 503, second motor
Bracing frame the 504, second motor 505, Timing Belt 502, ball-screw 507, feed screw nut 508, feed screw nut fix seat 509,
Line slide rail 510 and ball-screw bearing block 511, the second motor 505 is fixed on described top by the second motor support frame 504
On portion's fixing support rack 402, described drivewheel 512 is fixed on the motor head of described second motor 505, described drivewheel 512
Connecting driven pulley 501 by Timing Belt 502, and carry out tensioning by regulating wheel 506, described regulating wheel 506 passes through regulating wheel
Fixing axle 503 connects top fixed support；Described driven pulley 501 is fixed on the one end of the ball-screw 507 being vertically arranged, rolling
The other end of ballscrew 507 is fixed on vertical fixing support rack 401 by ball-screw bearing block 511, line slide rail 510
Being vertically installed on vertical fixing support rack 401, feed screw nut 508 is sleeved on described ball-screw 507, described leading screw spiral shell
Female 508 fix seat 509 with feed screw nut fixes and is connected, and feed screw nut is fixed seat 509 and is provided with and matches with described line slideway
Slide block, when the second motor 505 rotates by drivewheel 512 drive the driven pulley 501 being fixed on ball-screw 507 top with
Step rotates, thus it is vertically movable along described line slideway to drive described feed screw nut 508 and feed screw nut to fix seat 509, described
Feed screw nut fixes seat 509 fixing connection the first L-type contiguous block 403, and feed screw nut is fixed seat 509 and erected along described line slideway
First L-type contiguous block the 403, second L-type contiguous block 404 and turbine rotary muti-phase electrical stream polishing module 3 is driven to form during straight motion
Entirety vertically movable along described line slideway.
Described vertical fixing support rack the 401, first L-type contiguous block the 403, second L-type contiguous block 404, driven pulley 501,
Bearing up pulley 506, regulating wheel fix axle 503, ball-screw 507, feed screw nut 508, feed screw nut fixes seat 509, straight line is slided
Rail 510 and ball-screw bearing block 511 are equipped with symmetrical a pair.
Described band shaft turbine 307 includes turbine wheel shaft 3075；And the top along turbine wheel shaft 3075 the most successively continuous distribution
Prismatic blade 3071, helical blade 3074, the oblique blade in top 3072 and lower straight blade 3073.
Specific works flow process is as follows: first, and the data feedback detected according to range sensor 205 gives the second motor 505, the
Two motors 505, by driving drivewheel 512 to drive Timing Belt 202 to rotate, drive driven under the effect of regulating wheel 506 simultaneously
The ball-screw 507 of wheel 501 and both sides moves according to same rotation direction, thus drives feed screw nut 508 and feed screw nut to fix seat
509 linearly 510 slide on guide rail, drive turbine eventually through the first L-type contiguous block 403 and the second L-type contiguous block 404
Rotary muti-phase electrical stream polishing module 3 moves integrally, and facilitates the polishing workpiece 103 on workpiece stuck-module 1 to prevent buffer
On part fixed station 102；After polishing workpiece 103 is placed, vacuum adapter 101 is by within polishing Work piece fixing platform 102
Air cavity 1034 and absorption pore 1032 carry out absorption clamping to polishing workpiece 103；After absorption clamping polishing workpiece 103, according to
Second motor 504 is controlled by the data of range sensor 205 feedback, makes turbine rotary muti-phase electrical stream polishing module 3 carry out whole
Body declines, thus accurately controls the spacing between turbine rotary muti-phase electrical stream polishing module 3 and polishing workpiece 103；Turbine rotates many
Stream polishing module 3 arrives specific bit and postpones mutually, the first motor 301 by the first shaft coupling 305 band movable band axis turbine 307 according to
Certain rate curve carries out high speed rotating, controls input in polishing fluid feed pipe 306 by turbine flowmeter 206 many simultaneously
Flowing the flow of polishing fluid mutually, multiphase flow polishing fluid enters and forms rotating turbulence in turbine swivelling chute 304, enters polishing workpiece 103
Row polishing.
During polishing, rate of discharge tachymeter 203, outlet temperature monitor 203 to the temperature at waste liquid outlet 1031 and
Flow is monitored in real time, and the velocity of rotation of the first motor 301 is monitored by motor speed sensor 207 in real time, and by upper
State detection data to carry out feeding back and revising, it is ensured that form specific rotating turbulence, in order to obtain industrialization, unitized high-quality
Volume production product.
After having polished, the second motor 504 rotates backward, and drives turbine rotary muti-phase electrical stream polishing module 3 to be raised to specified altitude assignment,
Being passed through gas in air cavity 1034 by inlet suction port 1033, the gas in air cavity 1031 will polishing by absorption pore 1032
Workpiece 103 carries out jack-up, thus conveniently polishes the blanking of workpiece.
Above-described embodiment is presently preferred embodiments of the present invention, is not the restriction to technical solution of the present invention, as long as without
The technical scheme that creative work can realize on the basis of above-described embodiment, the right being regarded as falling into patent of the present invention is protected
In the range of protecting.
Claims (8)
1. a high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment, it is characterised in that: include workpiece stuck-module (1), ginseng
Number monitoring and control module (2), turbine rotary muti-phase electrical stream polishing module (3), support module (4) and lifting module (5), work
Part stuck-module (1) processes workpiece for clamping, supports module (4) for support parameters monitoring and control module (2), whirlpool
Wheel rotary muti-phase electrical stream polishing module (3) and lifting module (5), Lift Part drives turbine rotary muti-phase electrical stream polishing module (3)
Arrive and specify position fixing processing workpiece upper to workpiece stuck-module (1) to be polished, parameter monitoring and control module (2)
Parameter monitoring and control for whole equipment；
Described workpiece stuck-module (1) includes polishing Work piece fixing platform (102), inlet suction port (104) and vacuum adapter (101),
The workpiece installation slot having circle in polishing Work piece fixing platform (102) and the waste liquid outlet (1031) connected with workpiece installation slot,
Polishing Work piece fixing platform (102) is internal has air cavity (1034), and described polishing Work piece fixing platform (102) has and described gas
The air inlet connecting draught animals (1033) that chamber (1034) connects and vacuum adapter mouth (1035), inlet suction port (104) and vacuum adapter
(101) the air inlet connecting draught animals (1033) and vacuum adapter mouth (1035) place it are separately mounted to；Bottom described workpiece installation slot uniform
The absorption pore (1032) that multiple and described air cavity (1034) is connected；Described inlet suction port (104) and vacuum adapter (101)
Air intake pump and vacuum source is connected respectively by pipeline；
Described turbine rotary muti-phase electrical stream polishing module (3) includes the first motor (301), the first shaft coupling (305), the first motor
Bracing frame (302), polishing fluid feed pipe (306), turbine swivelling chute (304), seal lid (303), band shaft turbine (307),
O RunddichtringO (308), lip-type packing (309) and lip-type packing gland (310), described turbine swivelling chute (304)
In the hollow tubular being vertically arranged, seal lid (303) and be fixed on the upper end of described turbine swivelling chute (304), seal lid (303)
And sealed by O RunddichtringO (308) between turbine swivelling chute (304)；The turbine end position of described band shaft turbine (307)
Internal in described turbine swivelling chute (304), the axle head of band shaft turbine (307) seals lid (303) and by first through described
Shaft coupling (305) connects the first motor (301), and described first motor (301) is fixed by the first motor support frame (302)
Seal on lid (303) described；Described band shaft turbine (307) and sealing lid (303) are close by lip-type packing (309)
Envelope；Polishing fluid feed pipe (306) is fixed on sealing lid (303) and above and connects with described turbine swivelling chute (304) inside, the
When one motor (301) is rotated by the first shaft coupling (305) band movable band axis turbine (307), drive turbine swivelling chute (304)
Interior multiphase flow polishing fluid forms rotating turbulence；
Described support module (4) includes that top fixing support rack (402), vertical fixing support rack (401), the first L-type connect
Block (403), the second L-type contiguous block (404), top fixing support rack (402) is fixed on two vertical fixing support racks (401)
Top, lifting module (5) is fixed on vertical fixing support rack (401), and lifting module (5) is by the first L-type contiguous block
(403) connecting the second L-type contiguous block (404), the second L-type contiguous block (404) is fixed on the first motor support frame (302)
On；Lowering or hoisting gear drives turbine rotary muti-phase electrical stream to throw by the first L-type contiguous block (403) and the second L-type contiguous block (404)
Optical module (3) vertically makees elevating movement；
Described parameter monitoring and control module (2) include rate of discharge tachymeter (202), outlet temperature monitor (203), temperature
Degree sensor (209), range sensor (205), turbine flowmeter (206) and the first motor speed sensor (207), institute
State rate of discharge tachymeter (202) and outlet temperature monitor (203) be fixed on the surface of described waste liquid outlet (1031),
Described rate of discharge tachymeter (202) is fixed on polishing Work piece fixing platform (102) by rate of discharge tachymeter fixed mount (201)
On, described outlet temperature monitor (203) is fixed on polishing Work piece fixing platform by outlet temperature monitor fixed mount (210)
(102) on；Described range sensor (205) is fixed on the second L-type contiguous block (404), range sensor (205)
For detecting the dropping distance of turbine rotary muti-phase electrical stream polishing module (3)；Described rate of discharge tachymeter (202) is fixed on institute
State polishing fluid feed pipe (306) and be used for detecting the flow of multiphase flow polishing fluid, viscosity in described polishing fluid feed pipe (306)
Mutually containing ratio；Described first motor speed sensor (207) is fixed on the inwall of the first motor support frame (302), the
The sensing chip (208) of one motor speed sensor (207) contacts with the axle head of described band shaft turbine (307), the first motor
Velocity sensor (207) is used for detecting the velocity of rotation of described first motor (301)；Described temperature sensor (209) is fixed
On the sidewall of described turbine swivelling chute (304), temperature sensor (209) is heterogeneous in being used for detecting turbine swivelling chute (304)
The temperature of stream polishing fluid.
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 1, it is characterised in that: described
Lowering or hoisting gear includes that drivewheel (512), driven pulley (501), regulating wheel (506), regulating wheel fix axle (503), the second electricity
Machine bracing frame (504), the second motor (505), Timing Belt (502), ball-screw (507), feed screw nut (508), silk
Thick stick nut fixes seat (509), line slide rail (510) and ball-screw bearing block (511), and the second motor (505) is by the
Two motor support frames (504) are fixed on described top fixing support rack (402), and described drivewheel (512) is fixed on described
On the motor head of the second motor (505), described drivewheel (512) connects driven pulley (501) by Timing Belt (502), and
Carrying out tensioning by regulating wheel (506), described regulating wheel (506) is fixed axle (503) by regulating wheel and is connected fixing of top
Frame；Described driven pulley (501) is fixed on the one end of the ball-screw (507) being vertically arranged, another of ball-screw (507)
End is fixed on vertical fixing support rack (401) by ball-screw bearing block (511), and line slide rail (510) is vertically-mounted
On vertical fixing support rack (401), feed screw nut (508) is sleeved on described ball-screw (507), described leading screw spiral shell
Female (508) are fixed seat (509) and are fixed and be connected with feed screw nut, and feed screw nut is fixed seat (509) and is provided with and leads with described straight line
The slide block that rail matches, is driven by drivewheel (512) when the second motor (505) rotates and is fixed on ball-screw (507) top
Driven pulley (501) synchronous axial system in portion, thus drive described feed screw nut (508) and feed screw nut to fix seat (509) along institute
Stating line slideway vertically movable, described feed screw nut fixes seat (509) fixing connection the first L-type contiguous block (403), leading screw spiral shell
The first L-type contiguous block (403), the second L-type contiguous block is driven when female fixing seat (509) is along described line slideway vertical motion
And turbine rotary muti-phase electrical stream polishing module (3) entirety that forms is vertically movable along described line slideway (404).
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 2, it is characterised in that: described
Vertically fixing support rack (401), the first L-type contiguous block (403), the second L-type contiguous block (404), driven pulley (501),
Regulating wheel (506), regulating wheel fix axle (503), ball-screw (507), feed screw nut (508), feed screw nut fix seat
(509), line slide rail (510) and ball-screw bearing block (511) are equipped with symmetrical a pair.
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 1, it is characterised in that: described
Band shaft turbine (307) includes turbine wheel shaft (3075)；And the top along turbine wheel shaft (3075) continuous distribution the most successively
Prismatic blade (3071), helical blade (3074), the oblique blade in top (3072) and lower straight blade (3073).
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 1, it is characterised in that: described
Waste liquid outlet (1031) is provided with four, and four waste liquid outlets (1031) are evenly distributed on the surrounding of described workpiece installation slot.
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 1, it is characterised in that: described
Absorption pore (1032) is provided with 12, and every 6 absorption pore (1032) are set to one group, often group absorption pore (1032)
It is distributed on same circumference.
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 1, it is characterised in that: described
Polishing fluid feed pipe (306) is provided with three, and three polishing fluid feed pipes (306) are distributed on described sealing and cover the same of (303)
On circumference.
A kind of high-efficiency turbine rotary muti-phase electrical stream polishing automation equipment the most according to claim 1, it is characterised in that: described
Range sensor (205) is specified on the second L-type contiguous block (404) by range sensor fixed mount (204).
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| CN201610279129.XA CN105834919B (en) | 2016-04-28 | 2016-04-28 | A kind of turbine rotary muti-phase electrical stream polishes automation equipment |
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|---|---|---|---|
| CN201610279129.XA CN105834919B (en) | 2016-04-28 | 2016-04-28 | A kind of turbine rotary muti-phase electrical stream polishes automation equipment |
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| CN105834919A true CN105834919A (en) | 2016-08-10 |
| CN105834919B CN105834919B (en) | 2018-01-05 |
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| CN107322458A (en) * | 2017-07-06 | 2017-11-07 | 浙江艾领创矿业科技有限公司 | A kind of large-scale sand mill |
| CN107717757A (en) * | 2017-11-17 | 2018-02-23 | 白冠军 | The circulating speed self-controlled polishing machine of suspension |
| CN108890503A (en) * | 2018-07-23 | 2018-11-27 | 石英权 | A kind of motor housing medial surface roughing pre-processing device |
| CN109968207A (en) * | 2018-12-16 | 2019-07-05 | 凯美德工程公司 | Surface processing device for grid manufacturing device |
| CN111300798A (en) * | 2019-12-06 | 2020-06-19 | 吴达浩 | Blow molding equipment for blow molding container |
| CN112605801A (en) * | 2021-01-19 | 2021-04-06 | 北京景兴恒通商贸有限公司 | Device capable of grinding and milling part surface and indirectly blasting sand |
| CN112706083A (en) * | 2020-12-31 | 2021-04-27 | 重庆西山科技股份有限公司 | Pipe fitting clamping workbench |
| CN112792722A (en) * | 2020-12-31 | 2021-05-14 | 重庆西山科技股份有限公司 | Abrasive polishing device |
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