CN105821381A - Vacuum coater for magnetic material - Google Patents
Vacuum coater for magnetic material Download PDFInfo
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- CN105821381A CN105821381A CN201610245766.5A CN201610245766A CN105821381A CN 105821381 A CN105821381 A CN 105821381A CN 201610245766 A CN201610245766 A CN 201610245766A CN 105821381 A CN105821381 A CN 105821381A
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
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- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention provides a vacuum coater for a magnetic material. The vacuum coater solves the problem that a great amount of pollution is caused due to surface hot-dipping aluminum electroplating. A first net-shaped roller (5) and a second net-shaped roller (6) which are horizontally and symmetrically arranged are located in a mesopore portion of a mesopore-shaped partition plate (2). Two rod-type plasma generators (7 and 8) are horizontally arranged on an upper chamber. Multiple BN evaporation boats (9) are arranged on a lower chamber (3) and located on the position at a certain evaporation distance from the first net-shaped roller (5) and the second net-shaped roller (6). The lower portion of the first net-shaped roller (5) and the lower portion of the second net-shaped roller (6) are located within the evaporation range of the evaporation boats (9). A wire feeder (10) is connected with the BN evaporation boats (9) and evaporation electrodes (11) into a whole. A sliding vane rotary vacuum pump (12), a roots vacuum pump (13), a high vacuum oil diffusion pump (14), an ultralow-temperature device (15) and a helium filling device (16) are connected with a vacuum chamber through pipelines. Multiple independent loading regions are arranged on each net-shaped roller. The net-shaped rollers are driven by a variable-frequency gear motor to rotate, and the rotation speed adjustable function can be achieved.
Description
Technical field:
The present invention is relevant with NdFeB permanent magnet vacuum coater
Background technology:
NdFeB permanent magnet, since the eighties in 20th century comes out, has replaced rapidly traditional Sm-Co permanent magnet because it possesses higher comprehensive magnetic energy, the price of relative moderate and sufficient resources reserve, it is thus achieved that extensively apply.
NdFeB permanent magnet is easy to be corroded in usual environment, and especially when temperature raises and humidity is bigger, its oxidized speed is accelerated, permanent magnet performance severe exacerbation and structural failure.Therefore high temperature resistance high humidity oxidisability becomes the main development direction into NdFeB permanent magnet.
Present stage improves the method for NdFeB permanent magnet non-oxidizability and is mainly surface hot dipping Electroplating Aluminum, but plating can produce large amount of sewage, containing Harmful chemicals such as a large amount of strong acid, highly basic and heavy metal ion even cyanides in sewage, these poisonous and harmful substances enter environment by waste water and waste residue, cause a large amount of pollution.
Summary of the invention:
It is an object of the invention to provide a kind of simple to operation, production efficiency is high, and evaporation thickness is uniform, the magnetic material vacuum coater that appearance is excellent.
The present invention is achieved in that
Vacuum chamber 1 by poroid dividing plate 2 be divided into upper room 3 and lower room 4, at least one horizontally disposed net-shaped drum is poroid dividing plate 2 mesopore portion in being positioned at, at least one plasma generator horizontally disposed in upper room, some BN evaporation boats 9 be arranged on lower room 3 and and net-shaped drum between be separated by evaporation distance, the lower portion of net-shaped drum is in the range of the evaporation of evaporation boat 9, there is wire feeder 10 lower room, evaporation electrode 11 coordinates with BN evaporation boat 9, vacuum pump is had outside vacuum chamber 1, argon gas filling device 16 is connected with vacuum chamber by pipeline respectively, net-shaped drum is separated into some independent magnetic material loading areas.
In the loading area of net-shaped drum independence add accompany plating body coexist with NdFeB permanent magnet, described in accompany plate body be metal or non-metallic material coccoid.
Described vacuum pump includes sliding vane rotary vacuum pump 12, Roots vaccum pump 13, high vacuum oil diffuse pump 14, sliding vane rotary vacuum pump 12 connects with Roots vaccum pump 13, Roots vaccum pump 13 is connected with lower room 4, high vacuum oil diffuse pump 14 by first and second valve respectively, and high vacuum oil diffuse pump 14 is connected with upper room 3 by the 3rd valve.
Net-shaped drum is driven by variable frequency reducer motor and realizes rotating and can to realize rotating speed adjustable.
There is ultralow temperature device 15 upper room.
Net-shaped drum is separated into some independent magnetic material loading areas by radial direction dividing plate.
Described net-shaped drum is first and second net-shaped drum 5,6 that horizontal symmetry is arranged, arranges two bar type plasma generators 7,8 in upper room horizontal symmetry.
The present invention has the following advantages:
Simple to operation, production efficiency is high, and thickness evenness and the appearance of evaporation aluminum membranous layer are excellent；It addition, the plasma washing equipment arranged on equipment, can realize, to magnetic material surface pretreatment before plated film and the plasma effect in plated film, aluminum film adhesive force in NdFeB permanent magnet surfaces can being greatly improved；Secondly, that adds metal or non-metallic material in net-shaped drum accompanies plating body, can reduce between NdFeB permanent magnet and with net-shaped drum between phase mutual friction, finally the defects such as the scuffing on aluminum membranous layer surface are reduced to minimum level.
Accompanying drawing explanation
Fig. 1 is the structural map of the present invention.
Detailed description of the invention:
nullVacuum chamber 1 by poroid dividing plate 2 be divided into upper room 3 and lower room 4，The first of horizontal symmetry layout、Two net-shaped drums 5、6 be positioned in poroid dividing plate 2 mesopore portion，Horizontally disposed two bar type plasma generators 7 in upper room、8，Some BN evaporation boats 9 are arranged on lower room 3 and with first、Two net-shaped drums 5、Certain evaporation distance it is separated by between 6，This evaporation office distance can be adjusted，First、Two net-shaped drums 5、The lower portion of 6 is in the range of the evaporation of evaporation boat 9，Wire feeder 10 and BN evaporation boat 9、Evaporation electrode 11 is connected as an entirety，Sliding vane rotary vacuum pump 12、Roots vaccum pump 13、High vacuum oil diffuse pump 14、Ultralow temperature device 15、Argon gas filling device 16 is connected with vacuum chamber by pipeline respectively，Each net-shaped drum arranges again multiple independent loading area，Net-shaped drum is driven by variable frequency reducer motor and realizes rotating and can to realize rotating speed adjustable.
Sliding vane rotary vacuum pump 12 is connected with Roots vaccum pump 13, and Roots vaccum pump 13 is connected with lower room 4, high vacuum oil diffuse pump 14 by first and second valve respectively, and high vacuum oil diffuse pump 14 is connected with upper room 3 by the 3rd valve.
The vacuum pumping system of the present invention uses sliding vane rotary vacuum pump 12, Roots vaccum pump 13, high vacuum oil diffuse pump 14, and sets up ultralow temperature device 15 and carry out auxiliary exhaust.
Vaporizing-source system uses BN evaporation boat 9, its quantity and spacing arrange rationally, aluminium wire conveying uses motor that transporting velocity carries out high accuracy control, continuous steaming aluminizer can be realized and aluminium wire transporting velocity is adjusted in real time, solving the requirement to aluminum membranous layer thickness evenness of the NdFeB permanent magnet surfaces.
NdFeB permanent magnet Load System uses double net-shaped drum structure, and each cylinder arranges again multiple independent loading area, adds and accompany plating body to coexist with NdFeB permanent magnet in the loading area of net-shaped drum independence, described in accompany that to plate body be metal or non-metallic material coccoid.
Cylinder uses variable frequency reducer motor to be driven rotating, and can realize good aluminum membranous layer thickness evenness and appearance is excellent.
Surface pretreatment before plated film and the plasma generator in plated film 7,8 can use D/C power or MF power supply or RF power supply, evaporation process before the evaporation or is filled with the argon of certain flow, power-on forms plasma, thus improves the aluminum membranous layer adhesive force in NdFeB permanent magnet surfaces.
Workflow is as follows:
1. open sliding vane rotary vacuum pump and Roots vaccum pump carries out black vacuum aerofluxus, when vacuum arrives 5Pa, use diffusion pump to carry out high vacuum exhaustion, and be aided with ultralow temperature device raising system exhaust ability, shorten the vacuum exhaust time.
2. argon is poured in black vacuum aerofluxus after terminating, and opens motor and drives net-shaped drum to rotate, and open plasma generator power supply, NdFeB permanent magnet surfaces is carried out pre-treatment.
3. after pair NdFeB permanent magnet surfaces carries out pre-treatment certain time, and after the pressure of vacuum chamber arrives below 1.0E-2Pa, open evaporation power supply BN evaporation boat is preheated, when BN evaporator temperature properly after open wire feeder carry out continuous wire feed, stopping wire feed after thickness is suitable and stop heating BN evaporation boat, production terminates.
Claims (7)
1. magnetic material vacuum coater, it is characterized in that vacuum chamber (1) by poroid dividing plate (2) be divided into upper room (3) and lower room (4), at least one horizontally disposed net-shaped drum be positioned in poroid dividing plate (2) mesopore portion, at least one plasma generator horizontally disposed in upper room, some BN evaporation boats (9) be arranged on lower room (3) and and net-shaped drum between be separated by evaporation distance, the lower portion of net-shaped drum is in the range of the evaporation of evaporation boat (9), there is wire feeder (10) lower room, evaporation electrode (11) coordinates with BN evaporation boat (9), vacuum chamber has vacuum pump outside (1), argon gas filling device (16) is connected with vacuum chamber by pipeline respectively, net-shaped drum is separated into some independent magnetic material loading areas.
Magnetic material vacuum coater the most according to claim 1, it is characterised in that in the loading area of net-shaped drum independence add accompany plating body coexist with NdFeB permanent magnet, described in accompany plate body be metal or non-metallic material coccoid.
Magnetic material vacuum coater the most according to claim 1, it is characterized in that described vacuum pump includes sliding vane rotary vacuum pump (12), Roots vaccum pump (13), high vacuum oil diffuse pump (14), sliding vane rotary vacuum pump (12) is connected with Roots vaccum pump (13), Roots vaccum pump (13) is connected with lower room (4), high vacuum oil diffuse pump (14) by first and second valve respectively, and high vacuum oil diffuse pump (14) is connected with upper room (3) by the 3rd valve.
Magnetic material vacuum coater the most according to claim 1, it is characterised in that net-shaped drum is driven by variable frequency reducer motor and realizes rotating and can to realize rotating speed adjustable.
Magnetic material vacuum coater the most according to claim 1, it is characterised in that there is ultralow temperature device (15) upper room.
Magnetic material vacuum coater the most according to claim 2, it is characterised in that net-shaped drum is separated into some independent magnetic material loading areas by radial direction dividing plate.
Magnetic material vacuum coater the most according to claim 1, it is characterised in that described net-shaped drum is first and second net-shaped drum (5,6) that horizontal symmetry is arranged, arranges two bar type plasma generators (7,8) in upper room horizontal symmetry.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610245766.5A CN105821381A (en) | 2016-04-20 | 2016-04-20 | Vacuum coater for magnetic material |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610245766.5A CN105821381A (en) | 2016-04-20 | 2016-04-20 | Vacuum coater for magnetic material |
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| Publication Number | Publication Date |
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| CN105821381A true CN105821381A (en) | 2016-08-03 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610245766.5A Pending CN105821381A (en) | 2016-04-20 | 2016-04-20 | Vacuum coater for magnetic material |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108627126A (en) * | 2017-03-24 | 2018-10-09 | 天津邦特磁性材料有限公司 | A kind of on-line detecting system of neodymium iron boron magnetic body surface vacuum coating equipment |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201261803Y (en) * | 2008-08-21 | 2009-06-24 | 赖盈方 | Ferrite hot evaporated film deposition equipment |
| CN102969110A (en) * | 2012-11-21 | 2013-03-13 | 烟台正海磁性材料股份有限公司 | Device and method for improving magnetic coercivity of NdFeB (neodymium iron boron) |
| CN103854819A (en) * | 2014-03-22 | 2014-06-11 | 沈阳中北通磁科技股份有限公司 | Hybrid film coating method of neodymium iron boron rare earth permanent magnet device |
| CN103866241A (en) * | 2014-02-25 | 2014-06-18 | 广东省工业技术研究院(广州有色金属研究院) | Composite magnetron sputtering coating device for ion-assisted thermal evaporation |
| CN104480440A (en) * | 2014-11-05 | 2015-04-01 | 烟台首钢磁性材料股份有限公司 | Small size neodymium-iron-boron magnet surface vacuum film plating method and special film plating equipment |
-
2016
- 2016-04-20 CN CN201610245766.5A patent/CN105821381A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201261803Y (en) * | 2008-08-21 | 2009-06-24 | 赖盈方 | Ferrite hot evaporated film deposition equipment |
| CN102969110A (en) * | 2012-11-21 | 2013-03-13 | 烟台正海磁性材料股份有限公司 | Device and method for improving magnetic coercivity of NdFeB (neodymium iron boron) |
| CN103866241A (en) * | 2014-02-25 | 2014-06-18 | 广东省工业技术研究院(广州有色金属研究院) | Composite magnetron sputtering coating device for ion-assisted thermal evaporation |
| CN103854819A (en) * | 2014-03-22 | 2014-06-11 | 沈阳中北通磁科技股份有限公司 | Hybrid film coating method of neodymium iron boron rare earth permanent magnet device |
| CN104480440A (en) * | 2014-11-05 | 2015-04-01 | 烟台首钢磁性材料股份有限公司 | Small size neodymium-iron-boron magnet surface vacuum film plating method and special film plating equipment |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108627126A (en) * | 2017-03-24 | 2018-10-09 | 天津邦特磁性材料有限公司 | A kind of on-line detecting system of neodymium iron boron magnetic body surface vacuum coating equipment |
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Application publication date: 20160803 |
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