CN105785076A - Scanning probe microscope lens body prepared by piezoelectric single-chip motor - Google Patents
Scanning probe microscope lens body prepared by piezoelectric single-chip motor Download PDFInfo
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- CN105785076A CN105785076A CN201610155908.9A CN201610155908A CN105785076A CN 105785076 A CN105785076 A CN 105785076A CN 201610155908 A CN201610155908 A CN 201610155908A CN 105785076 A CN105785076 A CN 105785076A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
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Abstract
The invention discloses a scanning probe microscope lens body prepared by a piezoelectric single-chip motor. The piezoelectric single-chip inertial piezoelectric motor and a piezoelectric scanner are fixedly arranged on a base; the vibration plane of the piezoelectric scanner is vertical to the running direction of the piezoelectric single-chip inertial piezoelectric motor; a piezoelectric sheet and a non-piezoelectric material support body are arranged between the base and a guide rail; one end of the piezoelectric sheet is vertically fixed to the base through an adhesive, and the other end of the piezoelectric sheet is fixedly provided with the guide rail through an adhesive; the piezoelectric sheet is polarized in the thickness direction or radial direction; the groove direction of the guide rail is same with polarization direction of the piezoelectric sheet; a slide mass block is slideably cooperated on the guide rail; a probe and a sample are fixedly arranged on the piezoelectric scanner and the slide mass block respectively, or the probe and the sample are fixedly arranged on the slide mass block and the piezoelectric scanner respectively; and the tip of the probe points to the sample. The scanning probe microscope lens body is very low in cost, good in performance, simple and various in structure, simple in preparation process and high in safety and can be used under a low-voltage condition.
Description
Technical field
The invention belongs to scanning probe microscopy mirror body technique field, be specifically related to the scanning probe microscopy mirror body that a kind of piezoelectric monocrystal chip motor makes.
Background technology
At present, piezo tube is increasingly extensive in the application of high accuracy control field, it is possible to the high accuracy simultaneously realizing three-dimensional controls, and is therefore widely used in scanning probe microscopy mirror body, but the operation sequence of piezo tube is complicated and relatively costly；Due to the semi-enclosed structure of piezo tube, its internal electrode is not easy to connect；For, time under high vacuum environment, being unfavorable for evacuation.Therefore, add cost of manufacture and the operation easier of scanning probe microscopy, be unfavorable for the universal of scanning probe microscopy and application, constrain the development of nanosecond science and technology.It is: under the support of the state natural sciences fund " improvement of supper-fast PSTM and application " of 11304082 that this patent proposes the scanning probe microscopy mirror body that a kind of piezoelectric monocrystal chip motor makes in project approval number.
Summary of the invention
Present invention solves the technical problem that and there is provided a kind of very low cost, function admirable, simple in construction and scanning probe microscopy mirror body various, that processing technology is easy, safety is high and the piezoelectric monocrystal chip motor that can use under low voltage situations makes.
nullThe present invention solves that above-mentioned technical problem adopts the following technical scheme that，The scanning probe microscopy mirror body that a kind of piezoelectric monocrystal chip motor makes，It is characterized in that including base、Piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner，Wherein piezoelectric monocrystal chip inertia piezoelectric motor is fixed on base with piezoelectric scanner and the plane of oscillation of this piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor，Piezoelectric monocrystal chip inertia piezoelectric motor is by pedestal、Piezoelectric patches、Non-piezoelectric material supporter and guide rail are constituted，Wherein piezoelectric patches and non-piezoelectric material supporter are arranged between pedestal and guide rail，One end of piezoelectric patches is perpendicularly fixed on pedestal by colloid，The other end of piezoelectric patches is fixed with guide rail by colloid，This piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised，The groove direction of guide rail is consistent with the polarised direction of piezoelectric patches，Moving mass is sliding to be assigned on guide rail，Probe and sample are individually fixed on piezoelectric scanner and moving mass or probe and sample are individually fixed on moving mass and piezoelectric scanner，The needle point of this probe points to sample.
It is preferred that, described non-piezoelectric material supporter is fixed between pedestal with guide rail by colloid or non-piezoelectric material supporter is one-body molded with pedestal and guide rail or non-piezoelectric material supporter one end is connected by colloid with guide rail, the other end is one-body molded with pedestal or non-piezoelectric material supporter one end is connected by colloid with pedestal, and the other end is one-body molded with guide rail.
It is preferred that, the contact site of described piezoelectric patches and pedestal and guide rail is respectively equipped with and is not coated with electrode area.
nullThe scanning probe microscopy mirror body that piezoelectric monocrystal chip motor of the present invention makes，It is characterized in that including base、Piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner，Wherein piezoelectric monocrystal chip inertia piezoelectric motor is fixed on base with piezoelectric scanner and the plane of oscillation of this piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor，Piezoelectric monocrystal chip inertia piezoelectric motor is by pedestal、Piezoelectric monocrystal sheet and guide rail are constituted，Piezoelectric monocrystal sheet is by two egative films be arrangeding in parallel and is arranged at the piezoelectric patches between two egative films and non-piezoelectric material supporter is constituted，Piezoelectric patches is perpendicularly fixed between two egative films by colloid，This piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised，The egative film of piezoelectric monocrystal sheet one end is fixed on pedestal，The egative film of the piezoelectric monocrystal sheet other end is fixed with guide rail，The groove direction of this guide rail is consistent with the polarised direction of piezoelectric patches，Moving mass is sliding to be assigned on guide rail，Probe and sample are individually fixed on piezoelectric scanner and moving mass or probe and sample are individually fixed on moving mass and piezoelectric scanner，The needle point of this probe points to sample.
It is preferred that, the material of described egative film is sapphire, tungsten, titanium, rustless steel, glass or almag, non-piezoelectric material supporter is fixed between two egative films by colloid or non-piezoelectric material supporter and one-body molded or non-piezoelectric material supporter the one end of two egative films are connected by colloid with egative film, and the other end is one-body molded with another egative film.
It is preferred that, the contact site of described piezoelectric patches and two egative films is respectively equipped with and is not coated with electrode area.
It is preferred that, the material of described pedestal and guide rail is sapphire, tungsten, titanium, pottery or rustless steel, the material of described non-piezoelectric material supporter is metal, pottery, glass or sapphire, colloid is epoxide-resin glue, SGA, ethyl α-cyanoacrylate glue or neoprene, and the driving signal of described piezo-electric motor is asymmetric periodic serrations ripple signal.
It is preferred that, described piezoelectric scanner is piezoelectric monocrystal sheet scanning device, including two egative films be arrangeding in parallel and be arranged at the piezoelectric patches between two egative films and non-piezoelectric material supporter, wherein piezoelectric patches is perpendicularly fixed between two egative films by colloid, and this piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised.
It is preferred that, described piezoelectric scanner is piezoelectric bimorph scanning device, including two egative films be arrangeding in parallel and be arranged at two piezoelectric patches between two egative films, two of which piezoelectric patches is perpendicularly fixed between two egative films by colloid, and two piezoelectric patches are arranged in parallel and these two piezoelectric patches are the piezoelectric patches of thickness direction or radial polarised.
It is preferred that, described piezoelectric scanner is quartz tuning-fork scanning device.
The present invention compared with prior art has the advantage that (1) substituted for, with one or two piezoelectric patches, multiple piezoelectric patches or the expensive piezo tube that existing scanning probe microscopy mirror body have to be used, cost by the scanning probe microscopy mirror body of at least thousands of units now, fall below less than hundred yuan, even less than 50 yuan, greatly reduce the cost of manufacture of scanning probe microscopy mirror body；(2) use when low-voltage, the function that high voltage in the past must be used to realize can be realized when the low-voltage less than 10V, reduce energy consumption to a certain extent, improve the safety of operation；(3) simple in construction, it is simple to the connection of internal electrode, and for time under high vacuum environment, it is simple to evacuation；(4) various structures, the method that the piezoelectric monocrystal sheet of different structure can be adopted mixed with piezoelectric monocrystal sheet with piezoelectric bimorph produces the scanning probe microscopy mirror body of different structure, to meet specific needs.In a word, the scanning probe microscopy mirror body of the present invention is very low cost, function admirable, simple in construction and various, and processing technology is easy, and safety is high, has great market popularization value, is conducive to the universal of scanning probe microscopy mirror body, promotes the development of nanosecond science and technology.
Accompanying drawing explanation
Fig. 1 is the front view of the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 1；
Fig. 2 is the top view of the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 1；
Fig. 3 is the front view of the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 3；
Fig. 4 is the top view of the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 3.
In figure: 1, base, 2, piezoelectric monocrystal chip inertia piezoelectric motor, 3, probe, 4, sample, 5, sapphire sheet, 6, moving mass, 7, piezoelectric monocrystal sheet scanning device, 8, quartz tuning-fork scanning device.
Detailed description of the invention
The particular content of the present invention is described in detail in conjunction with accompanying drawing.
Embodiment 1 piezoelectric monocrystal chip motor and piezoelectric monocrystal sheet scanning type scanning probe microscopy mirror body
The scanning probe microscopy mirror body that piezoelectric monocrystal chip inertia piezoelectric motor 2 and piezoelectric monocrystal sheet scanning device 7 are fixed on base 1 to make, moving mass 6 is positioned on the guide rail of piezoelectric monocrystal chip inertia piezoelectric motor 2, sample 4 is bonded on moving mass 6 by sapphire sheet 5, and probe 3 is bonded on piezoelectric monocrystal sheet scanning device 7 by sapphire sheet 5.And then, when the inertia force wavy to piezo-electric motor applying sawtooth drives signal, it is possible to there is the function of motor, with the spacing regulating probe and sample by a relatively large margin of mm level.
After going to the active region of probe and sample, (1) applies the control voltage of constant formula on the piezoelectric patches of piezo-electric motor, makes piezoelectric monocrystal sheet that the Bending Deformation closer or far from piezoelectric scanner to occur, and namely realizes the probe of pm class precision and the purpose of sample interval fine setting；(2) fine setting good after, the piezoelectric patches of piezo-electric motor applies periodically, the control signal of the low pressure of noninertia power, it is possible to realize in the vertical direction to the cyclic drive of sample and then the surface periodically scanning for sample；(3) on piezoelectric monocrystal sheet scanning device vertically arranged with the piezoelectric patches of piezo-electric motor, applying is periodic, the control signal of the low pressure of noninertia power, then this piezoelectric patches will carry out horizontal beat, it is achieved the function of transversal scanning.
Owing to the scope of scanning is only in nm rank, so scanning the spacing adjustment less than pm level of probe and the sample room caused, do not affect the imaging test of scanning probe microscopy.This point can reasoning be out from document REVIEWOFSCIENTIFICINSTRUMENTS79,113707 (2008).
The benefit of this structure is, if arranging the guide rail of principle the same as piezoelectric monocrystal chip motor on piezoelectric monocrystal sheet scanning device, and the piezo-electric motor applying the same principle drives signal, so this piezoelectric monocrystal sheet scanning device is except except horizontal scanning, can also realizing the function in the horizontal to sample search, the scanning probe microscopy that this function is a lot of existing business does not have.
Embodiment 2 piezoelectric monocrystal chip motor and piezoelectric bimorph scanning type scanning probe microscopy mirror body
The scanning probe microscopy mirror body that piezoelectric monocrystal chip inertia piezoelectric motor 2 and piezoelectric bimorph scanning device are fixed on base 1 to make, in embodiment 1, piezoelectric monocrystal sheet scanning device 7 is changed to piezoelectric bimorph scanning device, it is possible to achieve transversal scanning by a larger margin and Horizon Search ability by a larger margin.
Embodiment 3 piezoelectric monocrystal chip motor and quartz tuning-fork scanning type scanning probe microscopy mirror body
The scanning probe microscopy mirror body that piezoelectric monocrystal chip inertia piezoelectric motor 2 and quartz tuning-fork formula scanning device 8 are fixed on base 1 to make, in embodiment 1 and 2, is changed to quartz tuning-fork formula scanning device 8 by piezoelectric monocrystal sheet scanning device 7 or piezoelectric bimorph scanning device.Owing to quartz tuning-fork is single crystalline Si O2Material is made, than the scanning device of the piezo-ceramic material of polycrystalline, there is higher temperature stability, less sluggish, less creep, higher control accuracy, less energy consumption, higher resonant frequency and lower cost, therefore can obtain the imaging precision higher than piezoelectric monocrystal sheet and piezoelectric bimorph scanning device, less energy consumption, faster scanning and lower cost etc..
The ultimate principle of the present invention, principal character and advantage have more than been shown and described, and without departing from the spirit and scope of the present invention, the present invention also has various changes and modifications, and these changes and improvements both fall within claimed the scope of the present invention.
Claims (10)
- null1. the scanning probe microscopy mirror body that a piezoelectric monocrystal chip motor makes，It is characterized in that including base、Piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner，Wherein piezoelectric monocrystal chip inertia piezoelectric motor is fixed on base with piezoelectric scanner and the plane of oscillation of this piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor，Piezoelectric monocrystal chip inertia piezoelectric motor is by pedestal、Piezoelectric patches、Non-piezoelectric material supporter and guide rail are constituted，Wherein piezoelectric patches and non-piezoelectric material supporter are arranged between pedestal and guide rail，One end of piezoelectric patches is perpendicularly fixed on pedestal by colloid，The other end of piezoelectric patches is fixed with guide rail by colloid，This piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised，The groove direction of guide rail is consistent with the polarised direction of piezoelectric patches，Moving mass is sliding to be assigned on guide rail，Probe and sample are individually fixed on piezoelectric scanner and moving mass or probe and sample are individually fixed on moving mass and piezoelectric scanner，The needle point of this probe points to sample.
- 2. the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor according to claim 1 makes, it is characterized in that: described non-piezoelectric material supporter is fixed between pedestal with guide rail by colloid or non-piezoelectric material supporter is one-body molded with pedestal and guide rail or non-piezoelectric material supporter one end is connected by colloid with guide rail, the other end is one-body molded with pedestal or non-piezoelectric material supporter one end is connected by colloid with pedestal, and the other end is one-body molded with guide rail.
- 3. the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor according to claim 1 makes, it is characterised in that: the contact site of described piezoelectric patches and pedestal and guide rail is respectively equipped with and is not coated with electrode area.
- null4. the scanning probe microscopy mirror body that a piezoelectric monocrystal chip motor makes，It is characterized in that including base、Piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner，Wherein piezoelectric monocrystal chip inertia piezoelectric motor is fixed on base with piezoelectric scanner and the plane of oscillation of this piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor，Piezoelectric monocrystal chip inertia piezoelectric motor is by pedestal、Piezoelectric monocrystal sheet and guide rail are constituted，Piezoelectric monocrystal sheet is by two egative films be arrangeding in parallel and is arranged at the piezoelectric patches between two egative films and non-piezoelectric material supporter is constituted，Piezoelectric patches is perpendicularly fixed between two egative films by colloid，This piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised，The egative film of piezoelectric monocrystal sheet one end is fixed on pedestal，The egative film of the piezoelectric monocrystal sheet other end is fixed with guide rail，The groove direction of this guide rail is consistent with the polarised direction of piezoelectric patches，Moving mass is sliding to be assigned on guide rail，Probe and sample are individually fixed on piezoelectric scanner and moving mass or probe and sample are individually fixed on moving mass and piezoelectric scanner，The needle point of this probe points to sample.
- 5. the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor according to claim 4 makes, it is characterized in that: the material of described egative film is sapphire, tungsten, titanium, rustless steel, glass or almag, non-piezoelectric material supporter is fixed between two egative films by colloid or non-piezoelectric material supporter and one-body molded or non-piezoelectric material supporter the one end of two egative films are connected by colloid with egative film, and the other end is one-body molded with another egative film.
- 6. the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor according to claim 4 makes, it is characterised in that: the contact site of described piezoelectric patches and two egative films is respectively equipped with and is not coated with electrode area.
- 7. the scanning probe microscopy mirror body that the piezoelectric monocrystal chip motor according to claim 1 or 4 makes, it is characterized in that: the material of described pedestal and guide rail is sapphire, tungsten, titanium, pottery or rustless steel, the material of non-piezoelectric material supporter is metal, pottery, glass or sapphire, colloid is epoxide-resin glue, SGA, ethyl α-cyanoacrylate glue or neoprene, and the driving signal of piezo-electric motor is asymmetric periodic serrations ripple signal.
- 8. the scanning probe microscopy mirror body that the piezoelectric monocrystal chip motor according to claim 1 or 4 makes, it is characterized in that: described piezoelectric scanner is piezoelectric monocrystal sheet scanning device, including two egative films be arrangeding in parallel and be arranged at the piezoelectric patches between two egative films and non-piezoelectric material supporter, wherein piezoelectric patches is perpendicularly fixed between two egative films by colloid, and this piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised.
- 9. the scanning probe microscopy mirror body that the piezoelectric monocrystal chip motor according to claim 1 or 4 makes, it is characterized in that: described piezoelectric scanner is piezoelectric bimorph scanning device, including two egative films be arrangeding in parallel and be arranged at two piezoelectric patches between two egative films, two of which piezoelectric patches is perpendicularly fixed between two egative films by colloid, and two piezoelectric patches are arranged in parallel and these two piezoelectric patches are the piezoelectric patches of thickness direction or radial polarised.
- 10. the scanning probe microscopy mirror body that the piezoelectric monocrystal chip motor according to claim 1 or 4 makes, it is characterised in that: described piezoelectric scanner is quartz tuning-fork scanning device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610155908.9A CN105785076B (en) | 2016-03-18 | 2016-03-18 | A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610155908.9A CN105785076B (en) | 2016-03-18 | 2016-03-18 | A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production |
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| Publication Number | Publication Date |
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| CN105785076A true CN105785076A (en) | 2016-07-20 |
| CN105785076B CN105785076B (en) | 2018-11-20 |
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| CN201610155908.9A Expired - Fee Related CN105785076B (en) | 2016-03-18 | 2016-03-18 | A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932611A (en) * | 2017-04-19 | 2017-07-07 | 东南大学 | A kind of PSTM structure of use motor scan head isolation technics |
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| CN101795088A (en) * | 2010-03-23 | 2010-08-04 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN104079202A (en) * | 2014-06-23 | 2014-10-01 | 南京航空航天大学 | Inertia linear motor based on pull type piezoelectric actuator |
| CN205450028U (en) * | 2016-03-18 | 2016-08-10 | 河南师范大学 | Scanning probe microscope mirror body of piezoelectric monocrystal piece formula motor preparation |
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2016
- 2016-03-18 CN CN201610155908.9A patent/CN105785076B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2004101206A (en) * | 2002-09-04 | 2004-04-02 | Takano Co Ltd | Scanning mechanism for scanning probe microscope |
| CN101556236A (en) * | 2008-04-09 | 2009-10-14 | 中国科学技术大学 | Cross transpose fully low pressure low temperature drift cold scanning probe microscope body |
| CN101403679A (en) * | 2008-10-21 | 2009-04-08 | 中国科学技术大学 | Double-step jigsaw puzzle scanner of scanning probe microscope |
| CN101795088A (en) * | 2010-03-23 | 2010-08-04 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN104079202A (en) * | 2014-06-23 | 2014-10-01 | 南京航空航天大学 | Inertia linear motor based on pull type piezoelectric actuator |
| CN205450028U (en) * | 2016-03-18 | 2016-08-10 | 河南师范大学 | Scanning probe microscope mirror body of piezoelectric monocrystal piece formula motor preparation |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106932611A (en) * | 2017-04-19 | 2017-07-07 | 东南大学 | A kind of PSTM structure of use motor scan head isolation technics |
| CN106932611B (en) * | 2017-04-19 | 2019-06-14 | 东南大学 | It is a kind of using motor-probe isolation technics scanning tunneling microscope structure |
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| CN105785076B (en) | 2018-11-20 |
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Granted publication date: 20181120 Termination date: 20190318 |