CN104181334B - High-resonant-frequency scanner for scanning tunneling microscope - Google Patents
High-resonant-frequency scanner for scanning tunneling microscope Download PDFInfo
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- CN104181334B CN104181334B CN201410418938.5A CN201410418938A CN104181334B CN 104181334 B CN104181334 B CN 104181334B CN 201410418938 A CN201410418938 A CN 201410418938A CN 104181334 B CN104181334 B CN 104181334B
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- micro
- cantilever
- needle point
- scanning device
- pinpoint
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Abstract
The invention discloses a high-resonant-frequency scanner for a scanning tunneling microscope. The scanner comprises a micron-order pinpoint and a micro-cantilever, wherein the micron-order pinpoint and the micro-cantilever are integrally formed through the micro-nano machining technology, the pinpoint is located on the narrow surface of the micro-cantilever, the included angle between the direction of the pinpoint and the normal of the narrow surface of the micro-cantilever is not larger than 45 degrees, and the pinpoint and the micro-cantilever are both made of monocrystalline silicon or monocrystal silicon dioxide and are both plated with platinum-iridium alloy, gold, cobalt, chromium or nickel. According to the scanner, the pinpoint with a curvature radius of 2 nm manufactured with the photolithography and corrosion sharpening technology is suitable for an STM, and the manufactured high-Q-factor high-resonant-frequency micro-cantilever provided with the pinpoint can serve as the scanner of the STM.
Description
Technical field
The invention belongs to the micro-cantilever scanning device technical field with needle point is and in particular to one kind in PSTM
It is applied to the high resonant frequency scanning device of PSTM.
Background technology
Currently, quick PSTM (stm) fails to find a suitable dither scanning device, greatly all the time
Constrain development and the application of quick PSTM.For this reason, there being a lot of computer MSR Information system being devoted to height altogether in the world
The exploitation of vibration frequency scanning device and application.
Application is earliest, last rapid scanner the longest is polycrystalline piezoelectric ceramic tube, but scientific research personnel is through labor
After find, polycrystalline piezoelectric ceramic tube resonant frequency is low, and maximum scan frequency only enables 1khz, and sluggish and creep properties
By force, be not suitable for high frequency sweep device.Later, scientific research personnel progressively sight was transferred to from smaller size of piezoelectric element.
For example, the article of applied physicss magazine reports a kind of diameter 10mm, the pzt-4 type small size pressure of thick 1.3mm
Electroceramics piece high frequency sweep device, this piezoelectric patches surrounding is firmly bonded on pedestal, the scanning device that the method is made
Resonant frequency has reached nearly 200khz.But do not obtain the image of atom definition using this high frequency sweep device, this is described
The noise of scanning device is larger, precision is relatively low, and the presence of this preparation method is drawn by hand cut, manual bonding and hand layouts
The low shortcoming (j. appl. phys. 75,161, (1994)) of make efficiency rising.
The small size piezoelectric ceramics that the article of scientific instrument comment reports using 5mm*5mm, thickness are about 1mm makes height
The method of resonant frequency scanning device.Resonant frequency has been brought up to about 64khz by the method, from vibration response curve as can be seen that
Its mechanical quality factor is almost nil, therefore leads to vibration characteristics poor, application prospect is little；And the resonant frequency of 64khz
Still far below the requirement of scientific research, and this scanning device needs the method system using hand cut, manual bonding and hand layouts
Make, lead to the scanning device made to have the shortcomings that efficiency is low and low (the review of scientific of precision
Instruments, 76,053710, (2005)).
The article of scientific instrument comment reports to be made high resonant frequency using the 32.768khz quartz tuning-fork of about 5mm length and sweeps
The method retouching device, the method achieves the resonant frequency of about 24khz after bonding probe, and realizes under the rate of scanning of 26khz
The imaging of atom definition.But the method is limited by existing quartz tuning-fork resonant frequency, existing business tuning fork is
High resonant frequency is about 100khz, much cannot meet demand (the review of scientific of quick stm
Instruments, 82,053705, (2011)).
Content of the invention
The present invention is to solve that high frequency sweep device that above-mentioned manual method makes is sluggish and creep properties is strong, it is low, smart to make frequency
Degree is low, resonant frequency is low and noise is big shortcoming and provide a kind of make efficiency height, high precision, resonant frequency height and noise is little
The high resonant frequency scanning device being applied to PSTM.
The technical scheme is that a kind of high resonant frequency scanning device being applied to PSTM, its feature
It is that, including micro-nano technology technique integrally formed micron order needle point and micro-cantilever, wherein needle point is located at the leptoprosopy of micro-cantilever
Go up and the sensing of needle point is not more than 45 ° with the angle of this micro-cantilever leptoprosopy normal, the material of described needle point and micro-cantilever
It is monocrystal silicon or monocrystalline silicon dioxide, platinumiridio, gold, cobalt, chromium or nickel are all coated with needle point and micro-cantilever.
The resonant frequency of the high resonant frequency scanning device being applied to PSTM of the present invention is 0.1khz-
100mhz.
It is contemplated that in using new technique produce little to micron-scale, there is scan function, resonant frequency and quality
The higher scanning device of the factor.Based on current physical principle and industrial technology present situation, photoetching technique adds corrosion tipping techniques and makes
The needle point for 2nm for the radius of curvature going out is applied to the needle point of stm；The band needle point of the high resonant frequency of high-quality-factor q produced
Micro-cantilever can be used as the scanning device of stm.
The physical principle of high-performance micro-cantilever beam probe scanning device of the present invention and foundation are respectively as follows:
(1) size of micro-cantilever beam probe scanning device is thousand points of several millimeters of record of existing home built scanning device
One of-micron dimension.Therefore, drive system for scanning is from needing to maintain whole piezoelectric patches to be changed into only needing in sweep limitss internal vibration
Allow a micron-scale micro-cantilever in sweep limitss internal vibration so that consume energy reduce multiple magnitudes, substantially reduce
A series of impacts such as the temperature drift that causes because of big energy consumption, creep, sluggishness, improve the precision and stability of scanning device.
(2) quality factor q after micro-cantilever beam probe is driven is up to tens of thousands of under a high vacuum, can reach number under air
Thousand.Illustrate that its energy loss is very slow, can maintain stable vibration for a long time, the quality of home built piezoelectric ceramic piece because
Sub- q is almost 0, being therefore difficult vibration at resonant frequency, thus needing to consume a lot of energy, causing under scanner performance
Fall.
(3) micro-cantilever beam probe scanning device typically with the natural frequency vibration of itself rather than common much smaller than resonance
The vibration mode of frequency.Because for the vibrating elementss of high-quality-factor, even if no longer input energy, this element also can be grown
Temporally vibration is maintained with resonant frequency, therefore energy consumption reduces further, and reduces temperature drift brought by high energy consumption etc. further
Serial noise problem, improves the precision and stability of scanning device.
(4) micro-cantilever scanning device due to size especially little, so cost being disregarded on selection, also easily looking for
Make to suitable monocrystal material.As monocrystal silicon, mono-crystal nitride silicon, rather than conventional inexpensive ceramic-like polycrystalline material, because
This, its creep properties, hysteresis, energy consumption, noise etc. all reduce further.
(5) present invention, from the point of view of frame for movement, is simply integrated with a pin on the leptoprosopy of micron-sized cantilever beam again
Point to and this leptoprosopy normal angle of point is not more than 45 ° of less micron order needle point, and the Mass Distribution of micro-cantilever is changed
Become less, therefore the resonant frequency of this micro-cantilever scanning device with needle point still can be in 0.1khz to 100mhz, even more
Big frequency range.
Brief description
Fig. 1 is the structural representation of the micro-cantilever scanning device that needle point points to front end in the present invention, and Fig. 2 is pin in the present invention
Point points to the structural representation of the micro-cantilever scanning device on right side, and Fig. 3 is that the micro-cantilever in needle point sensing left side in the present invention is swept
Retouch the structural representation of device, Fig. 4 is that in the present invention, needle point points to front end and needle point is 30 ° with micro-cantilever leptoprosopy normal angle
The structural representation of micro-cantilever scanning device.
Drawing illustrates: 1, needle point, 2, micro-cantilever.
Specific embodiment
By the following examples the above of the present invention is described in further details, but this should not be interpreted as this
The scope inventing above-mentioned theme is only limitted to below example, all belongs to this based on the technology that the above of the present invention is realized
Bright scope.
A kind of high resonant frequency scanning device being applied to PSTM, integrally formed including micro-nano technology technique
Micron order needle point 1 and micro-cantilever 2, wherein needle point 1 are located on the leptoprosopy of micro-cantilever 2 and the sensing of needle point 1 and this micro-cantilever
The angle of beam 2 leptoprosopy normal is not more than 45 °, and the material of described needle point 1 and micro-cantilever 2 is monocrystal silicon or monocrystalline titanium dioxide
Silicon, is all coated with platinumiridio, gold, cobalt, chromium or nickel on needle point 1 and micro-cantilever 2.
The resonant frequency of the high resonant frequency scanning device being applied to PSTM of the present invention is 0.1khz-
100mhz.
Platinumiridio layer is coated with needle point and micro-cantilever, thus being no longer necessary to draw electrode wires from needle point, directly from micro-
Cantilever beam draws electrode wires near the end of pedestal, otherwise because the size of micro-cantilever is minimum, directly draws electricity from needle point
Glue used by polar curve can coat needle point and cantilever beam.The different resonant frequencies of described scanning device can be by adjusting the length of cantilever beam
Degree, width, thickness proportion are realized, and the longer resonant frequency of micro-cantilever is less, width and thickness is less than bigger resonant frequency.
When the scanning device with needle point for this high resonant frequency is driven by the stepper motor of stm, needle point can be away from sample table
Face is close and the sustained height that is always positioned above sample surfaces, realizes the function of scanning device.Little when the vibration period of scanning device
When the cycle that sample surfaces dynamic process occurs, combine with the high-speed data acquistion system of stm it is possible to for following the tracks of sample
The dynamic process on surface, the microcosmic mechanism that research trends phenomenon occurs, the chemical reaction process that such as usual speed stm be can't see
Deng.
The ultimate principle of the present invention has been shown and described above, principal character and advantage, without departing from present invention spirit and
On the premise of scope, the present invention also has various changes and modifications, and these changes and improvements both fall within claimed invention
Scope.
Claims (2)
1. a kind of high resonant frequency scanning device being applied to PSTM is it is characterised in that include micro-nano technology technique one
Body formed micron order needle point and micro-cantilever, wherein needle point are located on the leptoprosopy of micro-cantilever and the sensing of needle point is micro- outstanding with this
The angle of arm beam leptoprosopy normal is not more than 45 °, and the material of described needle point and micro-cantilever is monocrystal silicon or monocrystalline titanium dioxide
Silicon, is all coated with platinumiridio, gold, cobalt, chromium or nickel on needle point and micro-cantilever.
2. the high resonant frequency scanning device being applied to PSTM according to claim 1 it is characterised in that: institute
The resonant frequency stating scanning device is 0.1khz-100mhz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410418938.5A CN104181334B (en) | 2014-08-25 | 2014-08-25 | High-resonant-frequency scanner for scanning tunneling microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410418938.5A CN104181334B (en) | 2014-08-25 | 2014-08-25 | High-resonant-frequency scanner for scanning tunneling microscope |
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| Publication Number | Publication Date |
|---|---|
| CN104181334A CN104181334A (en) | 2014-12-03 |
| CN104181334B true CN104181334B (en) | 2017-01-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201410418938.5A Expired - Fee Related CN104181334B (en) | 2014-08-25 | 2014-08-25 | High-resonant-frequency scanner for scanning tunneling microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111856080B (en) * | 2020-07-27 | 2023-07-28 | 广州中源仪器技术有限公司 | Piezoelectric sensing probe and manufacturing method thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5960147A (en) * | 1996-04-09 | 1999-09-28 | Seiko Instruments Inc. | Probe, manufacturing method therefor and scanning probe microscope |
| JP3406940B2 (en) * | 1994-07-14 | 2003-05-19 | キヤノン株式会社 | Microstructure and method for forming the same |
| CN201518226U (en) * | 2009-10-30 | 2010-06-30 | 北京工业大学 | Composite cantilever beam needlepoint for micro-nano microtechnique |
| CN102181914A (en) * | 2011-03-30 | 2011-09-14 | 浙江大学 | Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio |
| CN204008700U (en) * | 2014-08-25 | 2014-12-10 | 河南师范大学 | The micro-cantilever scanner with needle point of the high resonant frequency of a kind of high-quality-factor |
-
2014
- 2014-08-25 CN CN201410418938.5A patent/CN104181334B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3406940B2 (en) * | 1994-07-14 | 2003-05-19 | キヤノン株式会社 | Microstructure and method for forming the same |
| US5960147A (en) * | 1996-04-09 | 1999-09-28 | Seiko Instruments Inc. | Probe, manufacturing method therefor and scanning probe microscope |
| CN201518226U (en) * | 2009-10-30 | 2010-06-30 | 北京工业大学 | Composite cantilever beam needlepoint for micro-nano microtechnique |
| CN102181914A (en) * | 2011-03-30 | 2011-09-14 | 浙江大学 | Preparation process for tunneling scanning microscope probe with reverse exponent shape and depth-to-length-diameter ratio |
| CN204008700U (en) * | 2014-08-25 | 2014-12-10 | 河南师范大学 | The micro-cantilever scanner with needle point of the high resonant frequency of a kind of high-quality-factor |
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| CN104181334A (en) | 2014-12-03 |
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Inventor after: Li Quanfeng Inventor after: Zhi Gangfeng Inventor after: Wang Kaitao Inventor after: Zhang Zongzhe Inventor after: Song Xiaoling Inventor before: Zhi Gangfeng Inventor before: Li Quanfeng Inventor before: Wang Kaitao Inventor before: Zhang Zongzhe Inventor before: Song Xiaoling |
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