CN105785076B - A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production - Google Patents
A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production Download PDFInfo
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- CN105785076B CN105785076B CN201610155908.9A CN201610155908A CN105785076B CN 105785076 B CN105785076 B CN 105785076B CN 201610155908 A CN201610155908 A CN 201610155908A CN 105785076 B CN105785076 B CN 105785076B
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- piezoelectric
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- guide rail
- pedestal
- patches
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01Q10/00—Scanning or positioning arrangements, i.e. arrangements for actively controlling the movement or position of the probe
- G01Q10/04—Fine scanning or positioning
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- Health & Medical Sciences (AREA)
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- General Physics & Mathematics (AREA)
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- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
The invention discloses a kind of scanning probe microscopy mirror bodies of piezoelectric monocrystal chip motor production, piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner are fixed on pedestal and the plane of oscillation of the piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor, piezoelectric patches and non-piezoelectric material supporter are set between pedestal and guide rail, one end of piezoelectric patches is perpendicularly fixed on pedestal by colloid, the other end of piezoelectric patches is fixed with guide rail by colloid, the piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised, the groove direction of guide rail and the polarization direction of piezoelectric patches are consistent, moving mass slide fit is on guide rail, probe and sample are individually fixed on piezoelectric scanner and moving mass or probe and sample are individually fixed on moving mass and piezoelectric scanner, the needle point of the probe is directed toward sample.Cost of the present invention is very low, function admirable, structure are simple and multiplicity, manufacture craft are easy, highly-safe and can use under low voltage situations.
Description
Technical field
The invention belongs to scanning probe microscopy mirror body technical fields, and in particular to a kind of piezoelectric monocrystal chip motor production
Scanning probe microscopy mirror body.
Background technique
Currently, piezo tube in high-precision control field using increasingly extensive, can be realized simultaneously three-dimensional high-precision control
System, therefore be widely used in scanning probe microscopy mirror body, but the operation sequence of piezo tube complexity and higher cost；
Due to the semi-enclosed structure of piezo tube, internal electrode is not easy to connect；When under high vacuum environment, it is unfavorable for taking out true
It is empty.Therefore, the cost of manufacture and operation difficulty for increasing scanning probe microscopy, be unfavorable for the universal of scanning probe microscopy and
Using constraining the development of nanosecond science and technology.It is in project approval number：11304082 state natural sciences fund is " supper-fast to sweep
Retouch the improvement and application of tunnel microscope " support under, this patent proposes a kind of scanning of piezoelectric monocrystal chip motor production
Probe microscope mirror body.
Summary of the invention
Very low, function admirable that the technical problem to be solved by the present invention is to provide a kind of costs, structure are simple and various, make
The scanning probe microscopy mirror that simple process, piezoelectric monocrystal chip motor that is highly-safe and can using under low voltage situations make
Body.
The present invention adopts the following technical scheme that a kind of piezoelectric monocrystal chip motor production is swept to solve above-mentioned technical problem
Retouch probe microscope mirror body, it is characterised in that including pedestal, piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner, wherein
Piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner be fixed on pedestal and the plane of oscillation of the piezoelectric scanner with
The direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor is vertical, piezoelectric monocrystal chip inertia piezoelectric motor by pedestal, piezoelectric patches,
Non-piezoelectric material supporter and guide rail are constituted, and wherein piezoelectric patches and non-piezoelectric material supporter are set between pedestal and guide rail,
One end of piezoelectric patches is perpendicularly fixed on pedestal by colloid, and the other end of piezoelectric patches is fixed with guide rail by colloid, the piezoelectricity
Piece is the piezoelectric patches of thickness direction or radial polarised, and the groove direction of guide rail and the polarization direction of piezoelectric patches are consistent, slides quality
Block slide fit is on guide rail, and probe and sample are individually fixed on piezoelectric scanner and moving mass or probe and sample difference
It is fixed on moving mass and piezoelectric scanner, the needle point of the probe is directed toward sample.
Further preferably, the non-piezoelectric material supporter is fixed between pedestal and guide rail or non-piezoelectric by colloid
Material support is integrally formed with pedestal and guide rail or non-piezoelectric material supporter one end is connect with guide rail by colloid, another
End is integrally formed with pedestal or non-piezoelectric material supporter one end is connect by colloid with pedestal, the other end and guide rail it is integrated at
Type.
Further preferably, the contact site of the piezoelectric patches and pedestal and guide rail, which is respectively equipped with, is not coated with electrode area.
The scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production of the present invention, it is characterised in that the bottom of including
Seat, piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner, wherein piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectricity are swept
Device is retouched to be fixed on pedestal and the walking side of the plane of oscillation of the piezoelectric scanner and piezoelectric monocrystal chip inertia piezoelectric motor
To vertical, piezoelectric monocrystal chip inertia piezoelectric motor is made of pedestal, piezoelectric monocrystal sheet and guide rail, and piezoelectric monocrystal sheet is flat by two
The egative film of row setting and the piezoelectric patches and non-piezoelectric material supporter being set between two egative films are constituted, and piezoelectric patches is hung down by colloid
It is directly fixed between two egative films, which is the piezoelectric patches of thickness direction or radial polarised, the egative film of piezoelectric monocrystal sheet one end
It is fixed on pedestal, is fixed with guide rail on the egative film of the piezoelectric monocrystal sheet other end, the groove direction of the guide rail and the pole of piezoelectric patches
Change direction is consistent, and for moving mass slide fit on guide rail, probe and sample are individually fixed in piezoelectric scanner and moving mass
Upper or probe and sample are individually fixed on moving mass and piezoelectric scanner, and the needle point of the probe is directed toward sample.
Further preferably, the material of the egative film is sapphire, tungsten, titanium, stainless steel, glass or almag, non-piezoelectric
Material support is fixed between two egative films by colloid or non-piezoelectric material supporter is integrally formed with two egative films or non-
One end of piezoelectric material supporter is connect with egative film by colloid, and the other end and another egative film are integrally formed.
Further preferably, the contact site of the piezoelectric patches and two egative films, which is respectively equipped with, is not coated with electrode area.
Further preferably, the material of the pedestal and guide rail is sapphire, tungsten, titanium, ceramics or stainless steel, described non-depressed
The material of electric material supporter is metal, ceramics, glass or sapphire, and colloid is epoxide-resin glue, acrylic adhesive, alpha-cyano
Ethyl acrylate glue or neoprene, the driving signal of the piezo-electric motor are asymmetric periodic serrations wave signal.
Further preferably, the piezoelectric scanner be piezoelectric monocrystal sheet scanner, including two egative films disposed in parallel and
The piezoelectric patches and non-piezoelectric material supporter being set between two egative films, wherein piezoelectric patches is perpendicularly fixed at two egative films by colloid
Between, which is the piezoelectric patches of thickness direction or radial polarised.
Further preferably, the piezoelectric scanner be piezoelectric bimorph scanner, including two egative films disposed in parallel and
Two piezoelectric patches being set between two egative films, two of them piezoelectric patches are perpendicularly fixed between two egative films by colloid, and two
Piezoelectric patches is arranged in parallel and two piezoelectric patches are the piezoelectric patches of thickness direction or radial polarised.
Further preferably, the piezoelectric scanner is quartz tuning-fork scanner.
Compared with the prior art, the present invention has the following advantages：（1）Existing scanning is substituted with one or two piezoelectric patches
Probe microscope mirror body has to the multiple piezoelectric patches or expensive piezo tube used, by the scanning of at least thousands of members now
The cost of probe microscope mirror body falls below less than hundred yuan, even less than 50 yuan, greatly reduces scanning probe microscopy mirror
The cost of manufacture of body；（2）It uses, can be realized in the case where being less than the low-voltage of 10V previous necessary in the case where low-voltage
The function being just able to achieve using high voltage, reduces energy consumption to a certain extent, improves the safety of operation；（3）Structure is simple,
Convenient for the connection of internal electrode, and when under high vacuum environment, convenient for vacuumizing；（4）Different knots can be used in various structures
The scanning probe that the piezoelectric monocrystal sheet and piezoelectric bimorph of the structure method mixed with piezoelectric monocrystal sheet produce different structure is micro-
Mirror mirror body, to meet specific needs.In short, scanning probe microscopy mirror body cost of the invention is very low, and function admirable, structure
Simple and multiplicity, manufacture craft is easy, highly-safe, has great market popularization value, is conducive to scanning probe microscopy
Popularizing for mirror body, pushes the development of nanosecond science and technology.
Detailed description of the invention
Fig. 1 is the main view for the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 1；
Fig. 2 is the top view for the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 1；
Fig. 3 is the main view for the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 3；
Fig. 4 is the top view for the scanning probe microscopy mirror body that piezoelectric monocrystal chip motor makes in the embodiment of the present invention 3.
In figure：1, pedestal, 2, piezoelectric monocrystal chip inertia piezoelectric motor, 3, probe, 4, sample, 5, sapphire sheet, 6, cunning
Kinoplaszm gauge block, 7, piezoelectric monocrystal sheet scanner, 8, quartz tuning-fork scanner.
Specific embodiment
In conjunction with attached drawing detailed description of the present invention particular content.
1 piezoelectric monocrystal chip motor of embodiment and piezoelectric monocrystal sheet scan type scanning probe microscopy mirror body
Piezoelectric monocrystal chip inertia piezoelectric motor 2 and piezoelectric monocrystal sheet scanner 7, which are fixed on the scanning made on pedestal 1, to be visited
Needle microscope mirror body, moving mass 6 are located on the guide rail of piezoelectric monocrystal chip inertia piezoelectric motor 2, and sample 4 passes through sapphire
Piece 5 is bonded on moving mass 6, and probe 3 is bonded on piezoelectric monocrystal sheet scanner 7 by sapphire sheet 5.In turn, when giving
When piezo-electric motor applies sawtooth wavy inertia force driving signal, so that it may have the function of motor, by a relatively large margin with mm grades
Adjust the spacing of probe and sample.
After going to the active region of probe and sample,（1）Apply the control voltage of constant formula on the piezoelectric patches of piezo-electric motor,
Make piezoelectric monocrystal sheet that the Bending Deformation close to or far from piezoelectric scanner occur, that is, realizes the probe and sample interval of pm class precision
The purpose of fine tuning；（2）After fine tuning is good, apply the control of periodic, noninertia power low pressure on the piezoelectric patches of piezo-electric motor
Signal processed, so that it may realize the surface for periodically scanning for sample to the cyclic drive of sample, in turn in the vertical direction；
（3）With on the vertically arranged piezoelectric monocrystal sheet scanner of the piezoelectric patches of piezo-electric motor, application is periodic, noninertia power low
The control signal of pressure realizes the function of transversal scanning then the piezoelectric patches will carry out lateral beat.
Since the range of scanning is only in nm rank, so the spacing tune less than pm grades of probe and sample room caused by scanning
It is whole, the imaging test of scanning probe microscopy is not influenced.This point can be from document REVIEW OF SCIENTIFIC
It infers and in INSTRUMENTS 79,113707 (2008).
The benefit of the structure is, if principle is arranged as piezoelectric monocrystal chip motor on piezoelectric monocrystal sheet scanner
Guide rail, and apply the piezo-electric motor driving signal of the same principle, then the piezoelectric monocrystal sheet scanner in lateral in addition to sweeping
Outside retouching, it can also realize that the function horizontally to sample search, this function are that the scanning probe of many existing business is aobvious
What micro mirror did not had.
2 piezoelectric monocrystal chip motor of embodiment and piezoelectric bimorph scan type scanning probe microscopy mirror body
Piezoelectric monocrystal chip inertia piezoelectric motor 2 and piezoelectric bimorph scanner, which are fixed on the scanning made on pedestal 1, to be visited
Piezoelectric monocrystal sheet scanner 7 in embodiment 1, is changed to piezoelectric bimorph scanner, may be implemented more substantially by needle microscope mirror body
The transversal scanning of degree and Horizon Search ability by a larger margin.
3 piezoelectric monocrystal chip motor of embodiment and quartz tuning-fork scan type scanning probe microscopy mirror body
Piezoelectric monocrystal chip inertia piezoelectric motor 2 and quartz tuning-fork formula scanner 8, which are fixed on the scanning made on pedestal 1, to be visited
Piezoelectric monocrystal sheet scanner 7 or piezoelectric bimorph scanner in Examples 1 and 2, are changed to quartz tuning-fork formula by needle microscope mirror body
Scanner 8.Since quartz tuning-fork is single crystalline Si O2What material was made, the scanner than polycrystalline piezo-ceramic material has
Higher temperature stability, smaller sluggish, smaller creep, higher control precision, lower energy consumption, higher resonance frequency
Rate and lower cost, therefore imaging precision more higher than piezoelectric monocrystal sheet and piezoelectric bimorph scanner, lower can be obtained
Energy consumption, faster scanning and lower cost etc..
Basic principle of the invention, main feature and advantage has been shown and described above, do not depart from spirit of that invention and
Under the premise of range, there are also various changes and modifications, these changes and improvements to both fall within claimed invention by the present invention
Range.
Claims (10)
1. a kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production, it is characterised in that including pedestal, piezoelectricity list
Chip-type inertia piezoelectric motor and piezoelectric scanner, wherein piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner are fixed on
On pedestal and the plane of oscillation of the piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor, piezoelectricity
Single wafer inertia piezoelectric motor is made of pedestal, piezoelectric patches, non-piezoelectric material supporter and guide rail, wherein piezoelectric patches and non-depressed
Electric material supporter is set between pedestal and guide rail, and one end of piezoelectric patches is perpendicularly fixed on pedestal by colloid, piezoelectric patches
The other end guide rail is fixed with by colloid, which is the piezoelectric patches of thickness direction or radial polarised, the groove side of guide rail
To consistent with the polarization direction of piezoelectric patches, for moving mass slide fit on guide rail, probe and sample are individually fixed in piezoelectric scanning
On device and moving mass or probe and sample are individually fixed on moving mass and piezoelectric scanner, the needle point of the probe
It is directed toward sample.
2. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 1, it is characterised in that：
The non-piezoelectric material supporter be fixed between pedestal and guide rail by colloid or non-piezoelectric material supporter and pedestal and
Guide rail is integrally formed or non-piezoelectric material supporter one end is connect with guide rail by colloid, the integrated molding of the other end and pedestal or
Person non-piezoelectric material supporter one end is connect with pedestal by colloid, and the other end and guide rail are integrally formed.
3. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 1, it is characterised in that：
The contact site of the piezoelectric patches and pedestal and guide rail, which is respectively equipped with, is not coated with electrode area.
4. a kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production, it is characterised in that including pedestal, piezoelectricity list
Chip-type inertia piezoelectric motor and piezoelectric scanner, wherein piezoelectric monocrystal chip inertia piezoelectric motor and piezoelectric scanner are fixed on
On pedestal and the plane of oscillation of the piezoelectric scanner is vertical with the direction of travel of piezoelectric monocrystal chip inertia piezoelectric motor, piezoelectricity
Single wafer inertia piezoelectric motor is made of pedestal, piezoelectric monocrystal sheet and guide rail, and piezoelectric monocrystal sheet is by two bottoms disposed in parallel
Piece and the piezoelectric patches being set between two egative films and non-piezoelectric material supporter are constituted, and piezoelectric patches is perpendicularly fixed at two by colloid
Between egative film, which is the piezoelectric patches of thickness direction or radial polarised, and the egative film of piezoelectric monocrystal sheet one end is fixed on pedestal
On, it is fixed with guide rail on the egative film of the piezoelectric monocrystal sheet other end, the groove direction of the guide rail and the polarization direction of piezoelectric patches are consistent,
Moving mass slide fit on guide rail, probe and sample be individually fixed on piezoelectric scanner and moving mass or probe and
Sample is individually fixed on moving mass and piezoelectric scanner, and the needle point of the probe is directed toward sample.
5. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 4, it is characterised in that：
The material of the egative film is sapphire, tungsten, titanium, stainless steel, glass or almag, and non-piezoelectric material supporter is solid by colloid
Due between two egative films or non-piezoelectric material supporter and two egative films are integrally formed or one end of non-piezoelectric material supporter
It is connect with egative film by colloid, the other end and another egative film are integrally formed.
6. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 4, it is characterised in that：
The contact site of the piezoelectric patches and two egative films, which is respectively equipped with, is not coated with electrode area.
7. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 1 or 4, feature exist
In：The material of the pedestal and guide rail is sapphire, tungsten, titanium, ceramics or stainless steel, and the material of non-piezoelectric material supporter is
Metal, ceramics, glass or sapphire, colloid are epoxide-resin glue, acrylic adhesive, α-cyanoacrylate glue or neoprene rubber
Glue, the driving signal of piezo-electric motor are asymmetric periodic serrations wave signal.
8. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 1 or 4, feature exist
In：The piezoelectric scanner is piezoelectric monocrystal sheet scanner, including two egative films disposed in parallel and is set between two egative films
Piezoelectric patches and non-piezoelectric material supporter, wherein piezoelectric patches is perpendicularly fixed between two egative films by colloid, which is
The piezoelectric patches of thickness direction or radial polarised.
9. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 1 or 4, feature exist
In：The piezoelectric scanner is piezoelectric bimorph scanner, including two egative films disposed in parallel and is set between two egative films
Two piezoelectric patches, two of them piezoelectric patches is perpendicularly fixed between two egative films by colloid, and two piezoelectric patches are parallel to each other and set
It sets and two piezoelectric patches is the piezoelectric patches of thickness direction or radial polarised.
10. the scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production according to claim 1 or 4, feature
It is：The piezoelectric scanner is quartz tuning-fork scanner.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610155908.9A CN105785076B (en) | 2016-03-18 | 2016-03-18 | A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610155908.9A CN105785076B (en) | 2016-03-18 | 2016-03-18 | A kind of scanning probe microscopy mirror body of piezoelectric monocrystal chip motor production |
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| CN105785076A CN105785076A (en) | 2016-07-20 |
| CN105785076B true CN105785076B (en) | 2018-11-20 |
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| CN106932611B (en) * | 2017-04-19 | 2019-06-14 | 东南大学 | It is a kind of using motor-probe isolation technics scanning tunneling microscope structure |
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| JP2004101206A (en) * | 2002-09-04 | 2004-04-02 | Takano Co Ltd | Scanning mechanism for scanning probe microscope |
| CN101403679A (en) * | 2008-10-21 | 2009-04-08 | 中国科学技术大学 | Double-step jigsaw puzzle scanner of scanning probe microscope |
| CN101556236A (en) * | 2008-04-09 | 2009-10-14 | 中国科学技术大学 | Cross transpose fully low pressure low temperature drift cold scanning probe microscope body |
| CN101795088A (en) * | 2010-03-23 | 2010-08-04 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN104079202A (en) * | 2014-06-23 | 2014-10-01 | 南京航空航天大学 | Inertia linear motor based on pull type piezoelectric actuator |
| CN205450028U (en) * | 2016-03-18 | 2016-08-10 | 河南师范大学 | Scanning probe microscope mirror body of piezoelectric monocrystal piece formula motor preparation |
-
2016
- 2016-03-18 CN CN201610155908.9A patent/CN105785076B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004101206A (en) * | 2002-09-04 | 2004-04-02 | Takano Co Ltd | Scanning mechanism for scanning probe microscope |
| CN101556236A (en) * | 2008-04-09 | 2009-10-14 | 中国科学技术大学 | Cross transpose fully low pressure low temperature drift cold scanning probe microscope body |
| CN101403679A (en) * | 2008-10-21 | 2009-04-08 | 中国科学技术大学 | Double-step jigsaw puzzle scanner of scanning probe microscope |
| CN101795088A (en) * | 2010-03-23 | 2010-08-04 | 清华大学 | Multi-leg linear piezoelectric driver and workbench |
| CN104079202A (en) * | 2014-06-23 | 2014-10-01 | 南京航空航天大学 | Inertia linear motor based on pull type piezoelectric actuator |
| CN205450028U (en) * | 2016-03-18 | 2016-08-10 | 河南师范大学 | Scanning probe microscope mirror body of piezoelectric monocrystal piece formula motor preparation |
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