CN105784593A - Quadruplet objective lens Chernin type multi-optical-distance gas absorption cavity - Google Patents
Quadruplet objective lens Chernin type multi-optical-distance gas absorption cavity Download PDFInfo
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Abstract
The invention discloses a quadruplet objective lens Chernin type multi-optical-path gas absorption cavity; two ends of the quadruplet objective lens Chernin type multi-optical-path gas absorption cavity are respectively oppositely provided with an objective lens and a convex field lens group; the convex field lens group includes a first concave reflecting mirror and a second concave reflecting mirror with vertically distributed spherical vertex coordinates; the objective lens includes four spherical reflecting mirror regions; the curvature radii of all the region surfaces are the same and are a basic optical path R; in the XY axis directions, the curvature center coordinates have the relative conjugated position relationship. With use of the quadruplet objective lens Chernin type multi-optical-path gas absorption cavity, the longer optical absorption length can be provided for a noncoherent broadband light source in a certain small volume range, the output light excellent image quality is guaranteed, the instrument detection requirements of high sensitivity and low detection limit are facilitated, at the same time, in an optical-mechanical system, the number of adjusting elements is reduced, the assembling and adjusting efficiency is improved, and the maintenance cost is reduced.
Description
Technical field
The present invention relates to uv-vis spectra quantitative analysis tech field, particularly to Chernin type many light paths air absorbing cavity of a kind of quadruplets object lens.
Background technology
Many light paths air absorbing cavity is based on the vitals of optical absorption principle gaseous quantitative analytical instrument.Based on lambert's Bill's absorption law, when the given intensity of light source and detection system noise equivalent luminous power and quantum efficiency, increase the absorption light path of gas, can make instrument that the detection limit of gasometric analysis reaches ppbv magnitude, improve detectivity.Atmosphere environment supervision tool is of great significance by this.
Conventional use Chernin type four object lens many light paths refrative cavity, four objective lens all adopt traditional spherical reflector (sphere summit is in circular iris center), for realizing designed absorption light path, four object lens must be carried out the angular adjustment of pitching and beat respectively to the conjugate position preset, practical adjustments is got up extremely difficult, consider vibration, meet all mirrors and reach the absolute conjugate position value in designed space simultaneously, realize difficulty big, stability cannot meet for a long time, and when imbalance time, it is impossible to which mirror imbalance judgement is.
Summary of the invention
In view of this, the goal of the invention of the present invention is: ensureing identical excellent output picture element while, reduces tunable optical component quantity, improves and debugs efficiency.
For reaching above-mentioned purpose, technical scheme is specifically achieved in that
The invention provides Chernin type many light paths air absorbing cavity of a kind of quadruplets object lens, the two ends of described Chernin type many light paths air absorbing cavity are relatively set with object lens and convex field lens group respectively, described convex field lens group includes the first concave mirror and second concave mirror of sphere apex coordinate vertical distribution, described object lens include four spherical reflector regions, and the radius of curvature of each region surface is all basic light path R mutually；There is the position relationship of relative conjugation between XY direction of principal axis, center of curvature coordinate.
As seen from the above technical solutions, the face type design of object lens in the present invention is adopted: including four spherical reflector regions, the radius of curvature of each region surface is all basic light path R mutually；There is the position relationship of relative conjugation between XY direction of principal axis, center of curvature coordinate.Thus having only to the purpose of the position regulating object lens and the multiple reflections tilting to realize light path, compared with prior art, traditional four object lens Chernin four object lens of type manifold air absorbing cavity need to carry out pitching and beat adjustment respectively.It can thus be seen that the objective lens design in Chernin type many light paths air absorbing cavity of the present invention, improve the stability debuging efficiency and system, reduce manual maintenance cost, be conducive to the environment of on-the-spot on-line monitoring to use.
Accompanying drawing explanation
Fig. 1 is the test block diagram of system based on Chernin type many light paths air absorbing cavity.
The two ends that Fig. 2 is Chernin type many light paths air absorbing cavity are relatively set with object lens and the schematic diagram of convex field lens group respectively.
Fig. 3 is quadruplets object lens size of the present invention and region division schematic diagram (facing reflecting surface direction).
Fig. 4 is convex field lens packet size schematic diagram (facing reflecting surface direction) of the present invention.
Fig. 5 is the matrix type hot spot distribution schematic diagram that the present invention forms m row × n row in convex field lens group.
Fig. 6 a is the reflection schematic diagram of the first subcycle.
Fig. 6 b is the reflection schematic diagram of the second subcycle.
Fig. 7 forms 5 row × 7 row in convex field lens group, line space 15mm, sequential schematic occurs in column pitch 15mm hot spot.
Detailed description of the invention
For making the purpose of the present invention, technical scheme and advantage clearly understand, developing simultaneously embodiment referring to accompanying drawing, the present invention is described in more detail.
Fig. 1 is the test block diagram of system based on Chernin type many light paths air absorbing cavity.Including coupling input block 101, Chernin type many light paths air absorbing cavity 102, couple output unit 103, spectrographic detection unit 104.Coupling input block 101 includes optical collector, multimode fibre, collimator etc., and coupling output unit 103 includes coupled lens, and spectrographic detection unit 104 includes spectrogrph.
The two ends of Chernin type many light paths air absorbing cavity 102 are relatively set with object lens 11 and convex field lens group 12 respectively, as shown in Figure 2.Fig. 3 is quadruplets object lens 11 size of the present invention and region division schematic diagram.Fig. 4 is convex field lens group 12 scale diagrams of the present invention.
As it is shown on figure 3, object lens 11 are formed by four spherical reflector laminatings in the present invention, or described object lens are the curved reflector taking from same substrate, and this curved surface is divided into four spherical reflector regions.Symmetric figure centered by object lens 11 in the present invention, for instance rectangle, circular, square etc., four spherical reflector regions therein are for waiting region division, four regions of division respectively the first spherical reflector M1 to the 4th spherical reflector M4.As shown in Figure 4, convex field lens group 12 includes two rectangle concave mirrors, and respectively the first concave mirror F1 and the second concave mirror F2, F1 and F2 keeps sphere apex coordinate vertical distribution, and glued together.The object lens 11 good according to optical path design be to be mounted directly on precalculated position by the present invention, it is only necessary to finely tune at XY direction of principal axis, it is possible to reach designed light path.From Fig. 3 and Fig. 4 it can also be seen that M1 and M2 is to angular distribution, CM1And CM2It is in vertical distribution；M3 and M4 is to angular distribution, CM3And CM4It is in vertical distribution.
Convex field lens group 12 side is symmetrically arranged with light source incidence window and exit window, and light source enters from incidence window and absorbs cavity, and the multiple reflections between convex field lens group and object lens, from exit window outgoing.
Being arranged on outside incidence window is input coupling unit, being arranged on outside exit window is coupling output unit, light, through overcoupling input block 101, is fully constrained in from default exit window injection in cavity by the light that wideband light source sends, and adjustment incident light source reaches designed (d0, NA).After light penetrates from exit window, the output light through Chernin type many light paths air absorbing cavity 102 is detected by entering the spectrograph slit of spectrographic detection unit 104 after coupling the optical fiber collimator in output unit 103 to be coupled to derivation optical fiber.In actual applications, wideband light source can be high pressure xenon lamp or deuterium lamp, and the light that light source sends can be directional light, diverging light, converging light, through the coupling of overcoupling input block 101, can reach designed (d0, NA).In order to ensure that incident illumination is all received by object lens, it is desirable to meet formula: 2 (d0+2RNA)<Dx, 2 (d0+2RNA)<DY,, wherein d0Representing incidence window place spot diameter, NA represents that numerical aperture, R represent basic light path, DxRepresent object lens in x-axis to greatest length, DyRepresent object lens in y-axis to greatest length.Simultaneously, it is contemplated that if DxOr DyValue is excessive, exceedes convex field lens group F1 and the F2 region covered, causing unnecessary space waste, thus causing chamber volume excessive, being unfavorable for portability requirements, cause the gas currency long, therefore limit Dx≤w1, Dy≤h1+h2, w1Represent the width of F1, h1+h2Represent the total height of F1 and F2.To sum up, DxAnd DyMeet formula respectively: 2 (d0+2RNA)<Dx≤w1；2(d0+2RNA)<Dy≤h1+h2。
It should be noted that above-mentioned DxAnd DyValue be consider for saving space, be a kind of preferably value mode, if value is more than the upper limit, also in protection scope of the present invention.
At known incident light source (d0, NA) under condition, meet absorbing cavity structural parameters group for designing (R, m, n, a, matrix type hot spot distribution b), R represents basic optical path length, also illustrates that the radius of curvature of all spherical reflectors；M represents the line number of hot spot, and n represents the columns of hot spot, and a represents hot spot line space, and b represents hot spot column pitch, and, in order to make adjacent rows and two row hot spot not aliasings, it is desirable to a > d0, b > d0.The present invention proposes a kind of Chernin type many light paths air absorbing cavity, the object lens being oppositely arranged including two ends and convex field lens group, and wherein, object lens include four spherical reflector regions, and the radius of curvature of each region surface is all basic light path R mutually；There is the position relationship of relative conjugation between XY direction of principal axis, center of curvature coordinate.
Wherein, set up overall situation cartesian coordinate system using the sphere apex coordinate O1 of the first concave mirror F1 as coordinate origin, overlap with the Geometric center coordinates O2 of object lens at the sphere apex coordinate of the first concave mirror described in XY direction of principal axis；It is O1O2=R in distance between the first concave mirror and object lens described in Z-direction；The center of curvature of described second concave mirror F2 divides the line of the geometric center of the first spherical reflector geometric center and the 3rd spherical reflector equally.
First spherical reflector is positioned at first quartile, and the second spherical reflector is positioned at third quadrant, and the 3rd spherical reflector is positioned at the second quadrant, and the 4th spherical reflector is positioned at fourth quadrant；
There is the position relationship of relative conjugation between XY direction of principal axis, each spherical reflector center of curvature coordinate, particularly as follows: the center of curvature coordinate of the first spherical reflector is CM1(w, c)；The center of curvature coordinate of the second spherical reflector is CM2(w ,-c)；The center of curvature coordinate of the 3rd spherical reflector is CM3(-w, c)；The center of curvature coordinate of the 4th spherical reflector is CM4(-w ,-c).
The surface equation of the first concave mirror F1 meets formula (1): x2+y2+(z-R)2=R2；Wherein (x, y z) represent the face type coordinate of the first concave mirror；
Center of curvature coordinate according to the first spherical reflector to the 4th spherical reflector is positioned at the surface of the first concave mirror, then will at the axial C of XYMi(xMi, yMi) substitute into formula (1), obtain the z of Z-directionMi=R-(R2-w2-c2)1/2。
Such as, will at XY direction of principal axis, the center of curvature coordinate C of the first spherical reflectorM1(w c) substitutes into formula (1), w2+c2+(z-R)2=R2, obtain zM1=R-(R2-w2-c2)1/2, z hereM1It it is exactly first spherical reflector center of curvature coordinate in Z-direction.Through checking it can be seen that each spherical reflector is all z all mutually at the center of curvature coordinate of Z-directionM1=zM2=zM3=zM4=R-(R2-w2-c2)1/2。
At known (xMi, yMi, zMi) when, it is possible to determining, the first spherical reflector meets formula (2) to the surface equation of the 4th spherical reflector:
(Xi-xMi)2+(Yi-yMi)2+(Zi-zMi)2=R2；Wherein, (xMi, yMi, zMi) represent center of curvature CMiThe coordinate of point, i takes 1,2,3,4；Point (Xi, Yi, Zi), i takes 1, and 2,3,4, represent the face type coordinate that first to fourth spherical reflector is corresponding.
Such as, the surface equation of the first spherical reflector is:
(X1-w)2+(Y1-c)2+[Z1-(R-(R2-w2-c2)1/2]2=R2；
The surface equation of the second spherical reflector is:
(X2-w)2+(Y2+c)2+[Z2-(R-(R2-w2-c2)1/2]2=R2；
The surface equation of the 3rd spherical reflector is:
(X3+w)2+(Y3-c)2+[Z3-(R-(R2-w2-c2)1/2]2=R2；
The surface equation of the 4th spherical reflector is:
(X4+w)2+(Y4+c)2+[Z4-(R-(R2-w2-c2)1/2]2=R2。
Wherein, for the arbitrfary point (X on spherical reflectori, Yi, Zi), i takes 1,2,3,4, it is impossible to exceed zone boundary scope, and owing in the present invention, object lens are centrosymmetric images, four spherical reflector regions are again etc. that region divides, so the point on each spherical reflector to meet following relation:
0≤X1≤Dx/ 2,0≤Y1≤Dy/2；-Dx/2≤X2≤ 0 ,-Dy/2≤Y2≤0；
-Dx/2≤X3≤ 0,0≤Y3≤Dy/2；0≤X4≤Dx/ 2 ,-Dy/2≤Y4≤0。
It should be noted that require (x in theoryMi, yMi, zMi) for the point on F1 surface, so zMiValue close to 0.But zMiSlightly offset from F1 surface without affecting hot spot distribution, only influence whether picture element, so practical application allows also to zMiSlightly offset from F1 surface.So, owing to conjugate point is near O1, therefore can be similar to and take zMiValue be 0.
Now, the surface equation of the first spherical reflector is: (X1-w)2+(Y1-c)2+Z1 2=R2；
The surface equation of the second spherical reflector is: (X2-w)2+(Y2+c)2+Z2 2=R2；
The surface equation of the 3rd spherical reflector is: (X3+w)2+(Y3-c)2+Z3 2=R2；
The surface equation of the 4th spherical reflector is: (X4+w)2+(Y4+c)2+Z4 2=R2。
Fig. 5 is the matrix type hot spot distribution schematic diagram that the present invention forms m row × n row in convex field lens group, and line space is a=4c, and column pitch is b=2w, m is natural number, and n is odd number.Set up overall situation cartesian coordinate system using the sphere apex coordinate O1 of F1 as coordinate origin, overlap with the object lens Geometric center coordinates O2 of the absorbing cavity other end.Except incidence point (input) string and eye point (output) string, the hot spot on other row all once overlaps, and namely produces the coincidence row of n-2 row, obtains the total columns=n+n-2=2n-2 of hot spot.
Light source enters from incidence window and absorbs cavity, and the multiple reflections between convex field lens group and object lens, from exit window outgoing process, including multiple periods of reflections.Each periods of reflections includes the first subcycle and the second subcycle, and each subcycle produces 2 row hot spots；Through the first subcycle, it is achieved the roundtrip on convex field lens group, the first spherical reflector, the second spherical reflector, convex field lens group forms two row hot spots；Through the second subcycle, it is achieved the roundtrip on convex field lens group, the 3rd spherical reflector, the 4th spherical reflector, convex field lens group forms two row hot spots；The secondary series of the first subcycle and the first row of the second subcycle overlap.
Therefore, produce 4 row hot spots and the total columns 2n-2 of hot spot according to each periods of reflections, obtain periods of reflectionsPrinciple according to periods of reflections round numbers, obtaining n is odd number.
Illustrate for the first subcycle of periods of reflections and the second subcycle.Fig. 6 a is the reflection schematic diagram of the first subcycle.Fig. 6 b is the reflection schematic diagram of the second subcycle.In Fig. 6 a, before it is stated that CM1(w, c) and CM2(w ,-c).Based on reflection law, after light source incides M1 from incidence window, it is achieved the roundtrip on F1, M1, M2, convex field lens group is formed between adjacent two hot spots about CM1,CM2Symmetrical periodically successively, namely incidence point Input0 and hot spot 1 are about CM1Symmetry, hot spot 1 and hot spot 2 are about CM2Symmetry, hot spot 2 and hot spot 3 are about CM1Symmetry, circulation is gone down, by that analogy, formation first row hot spot (0,2,4,6,8 ...) and secondary series hot spot (1,3,5,7,9 ...), according to similar geometry relation, in the triangle that any three adjacent spots are constituted, CM1And CM2Respectively as the midpoint of triangle dual-side, then the length on the base of triangle is equal to C equal to the spot separation a of adjacent linesM1CM2The twice of length is equal to 4c equal to 2 × 2c.
In like manner, in figure 6b, before it is stated that CM3(-w, c) and CM4(-w ,-c).Based on reflection law, when hot spot is on F2, through the reflection of F2, after being mapped to M3, it is achieved the roundtrip on F1, M3, M4, convex field lens group is formed between adjacent two hot spots about CM3, CM4Symmetrical periodically successively.
It is to say, from incidence point, when hot spot is formed on F2, the first subcycle terminates, and the second subcycle starts.When hot spot is formed on F2 again, the second subcycle terminates, and the first subcycle of next periods of reflections starts, and by that analogy, so circulates, until eye point, completes all periods of reflections.
The hot spot assuming Fig. 6 a and Fig. 6 b is 5 row, then form first row hot spot (0,2,4,6,8) and secondary series hot spot (1,3,5,7,9) in first subcycle of Fig. 6 a.Second subcycle of Fig. 6 b is formed first row hot spot (9,11,13,15,17) and secondary series hot spot (10,12,14,16,18).Reference Fig. 5, hot spot 9 and hot spot 18, with incidence point in the same horizontal line, so on F2.Other hot spots are on F1.The secondary series (1,3,5,7,9) of the first subcycle and the first row (9 of the second subcycle, 11,13,15,17) overlap, namely hot spot 7 and hot spot 11 overlap, and hot spot 5 and hot spot 13 overlap, and hot spot 3 and hot spot 15 overlap, and hot spot 1 and hot spot 17 overlap.
The abscissa of the row of the first subcycle is about CM1(w, c) symmetrical；The abscissa of the row of the second subcycle is about CM3(-w, c) symmetrical；
Assume that light source is X from the incidence point abscissa that incidence window is incident, then,
During the first periods of reflections T=1, the abscissa of the first row of the first subcycle is X, and the abscissa of secondary series is 2w-x；The abscissa of the first row of the second subcycle is 2w-x, and the abscissa of secondary series is X-4w；
During the second periods of reflections T=2, the abscissa of the first row of the first subcycle is X-4w, and the abscissa of secondary series is 6w-x；The abscissa of the first row of the second subcycle is 6w-x, and the abscissa of secondary series is X-8w；
During three periods of reflections T=3, the abscissa of the first row of the first subcycle is X-8w, and the abscissa of secondary series is 10w-x；The abscissa of the first row of the second subcycle is 10w-x, and the abscissa of secondary series is X-12w；
By that analogy,
WhenTime, the abscissa of the first row of the first subcycle is X-4 (T-1) w, and the abscissa of secondary series is 2 × (2T-1) w-x；The abscissa of the first row of the second subcycle is 2 × (2T-1) w-x, and the abscissa of secondary series is X-4Tw；
Obtaining light source through multiple reflections is X-4Tw from the eye point abscissa that exit window penetrates；
, there is n-1 spacing in the matrix type hot spot distribution according to m row × n row, obtains spot separation b=[X-(X-4Tw)]/(the n-1)=2w of adjacent two row between incidence point and eye point.
Assume incidence point coordinate (X, Y) and eye point coordinate (-X, Y),
Because laterally having n hot spot, the spacing of adjacent spots is 2w, and therefore the spacing of transverse ends point is 2w (n-1) because transverse ends corresponding be input and output point, they are about central point, therefore, X=(n-1) w.
Because longitudinal coordinate meets classical White's light channel structure, thereforeWherein c is exactly the half of two object lens center of curvature spacing, N=4m-2 here, and wherein m is natural number, represents the one-tenth logarithm of hot spot in White's structure, and in the corresponding present invention is exactly line number m, therefore
In the present invention, the dimensional parameters of F1 and F2 does not change, as shown in Figure 4:
The width w of F11=2nw, height h1=4 (m-1) c, initial point O1 is from distance d=(2m-1) c-w of upper end.Sphere apex coordinate overlaps with center of curvature coordinate, is all (0,0).
The width w of F22=2 (n-2) w, height h2=4c, sphere apex coordinate is (0, Y), center of curvature coordinate (0, Dy/2)。
To sum up, at known incident light source (d0, NA) and under condition, meet absorbing cavity structural parameters group (R for designing, m, n, a, b) matrix type hot spot distribution, obtains total optical path length L=NR, wherein N=(4m-2) (n-1), N is total number of times by absorbing cavity, and m is the line number of hot spot in convex field lens group, and n is the columns of hot spot in convex field lens group, wherein require that m is arbitrarily positive natural number (m=1,2,3......), n is odd number (n=1,3,5......).Having been designed by the object lens of Chernin type many light paths air absorbing cavity, described object lens include four spherical reflector regions, and the radius of curvature of each region surface is all basic light path R mutually；There is the position relationship of relative conjugation between XY direction of principal axis, center of curvature coordinate.Directly the object lens designed being installed on precalculated position, thus removing the necessity needing to regulate four object lens respectively from, decreasing resetting difficulty.Thus realizing, by light folding in certain narrow and small volume range, reaching to increase the purpose absorbing light path.
Concrete scene is set forth below, and Fig. 7 forms 5 row × 7 row in convex field lens group, line space 15mm, sequential schematic occurs in column pitch 15mm hot spot.Fig. 7 shows in one hot spot two sequence numbers, represents that the two hot spot is overlapping.Assume incidence window place spot diameter d0=10mm, numerical aperture NA=0.03, during basic light path R=600mm, (m, n, a b) are (5,7,15,15) in selection.Then N=(4m-2) (n-1).M=5 and n=7 is substituted into, obtains N=108 time.W=7.5, c=3.75, therefore obtain, CM1(7.5,3.75), CM2(7.5 ,-3.75), CM3(-7.5,3.75), CM4(-7.5 ,-3.75).By the object lens designed are installed on pre-position, make at XY direction of principal axis, there is between the center of curvature coordinate in four spherical reflector regions the position relationship of relative conjugation, can be achieved with the light 108 secondary reflections at absorbing cavity, total optical path L=NR=108 × 600mm=64.8m, and ensure that the 1:1 imaging outgoing approximate with launching spot.
The invention has the beneficial effects as follows:
1. adopt the face type design of object lens in the present invention, thus having only to the purpose of the position regulating 1 object lens and the multiple reflections tilting to realize light path, improve the stability debuging efficiency and system, reducing manual maintenance cost and difficulty.
2. adopt the face type design of object lens in the present invention, four spherical reflector regions are as a whole, do not separate, so being taken up space compared to traditional Chernin type four object lens many light paths refrative cavity, much smaller, therefore, Chernin type many light paths GAS ABSORPTION cavity volume of the present invention is less, when forming identical light path, the little volume of absorbing cavity is more beneficial for the circulation of gas, (timing signal) avoids the waste of gas, and (during measurement) improves the response speed of instrument detection.
3., owing to there being hot spot overlapping on field lens, therefore this air absorbing cavity can in relative small size, and what increase gas effectively absorbs light path, compares to conventional suction chamber light path, improves the space availability ratio of light path.
4. reduce cost of equipment maintenance, be conducive to the effect playing this long light path refrative cavity in the absorption-type spectroscopy analytical tool of non-coherent broad band light source, especially to testing sample concentration high sensitivity detection demand time very low, such as multicomponent Atmospheric Trace monitoring.
5. based on the combination being multiple White chamber, can realizing astigmatic compensation each other, therefore output facula disperse degree of the present invention is less, and energy is more concentrated, and is conducive to the detection of weak signal.
6. pair broad band light beam having certain numerical value aperture also can realize repeatedly catadioptric purpose.
The foregoing is only presently preferred embodiments of the present invention, be not intended to limit protection scope of the present invention.All any amendment of making, equivalent replace and improvement etc. within the spirit and principles in the present invention, should be included within protection scope of the present invention.
Claims (11)
1. Chernin type many light paths air absorbing cavity of quadruplets object lens, the two ends of Chernin type many light paths air absorbing cavity of described quadruplets object lens are relatively set with object lens and convex field lens group respectively, described convex field lens group includes the first concave mirror and second concave mirror of sphere apex coordinate vertical distribution, it is characterized in that, described object lens include four spherical reflector regions, and the radius of curvature of each region surface is all basic light path R mutually；There is the position relationship of relative conjugation between XY direction of principal axis, center of curvature coordinate.
2. absorbing cavity as claimed in claim 1, it is characterised in that described object lens are formed by four spherical reflector laminatings, or described object lens are the curved reflector taking from same substrate, and this curved surface is divided into four spherical reflector regions.
3. absorbing cavity as claimed in claim 2, it is characterised in that symmetric figure centered by described object lens, four spherical reflector regions therein are for waiting region division.
4. absorbing cavity as claimed in claim 1, it is characterized in that, setting up overall situation cartesian coordinate system using the sphere apex coordinate of the first concave mirror as coordinate origin, the sphere apex coordinate at the first concave mirror described in XY direction of principal axis overlaps with the Geometric center coordinates of object lens；It is R in distance between the first concave mirror and object lens described in Z-direction；
Four spherical reflector regions that described object lens include, respectively the first spherical reflector M1 to the 4th spherical reflector M4, first spherical reflector is positioned at first quartile, second spherical reflector is positioned at third quadrant, 3rd spherical reflector is positioned at the second quadrant, and the 4th spherical reflector is positioned at fourth quadrant；
At XY direction of principal axis, the center of curvature coordinate of the first spherical reflector is CM1(w, c)；The center of curvature coordinate of the second spherical reflector is CM2(w ,-c)；The center of curvature coordinate of the 3rd spherical reflector is CM3(-w, c)；The center of curvature coordinate of the 4th spherical reflector is CM4(-w ,-c).
5. absorbing cavity as claimed in claim 4, it is characterized in that, convex field lens group side is symmetrically arranged with light source incidence window and exit window, and light source enters from incidence window and absorbs cavity, the multiple reflections between convex field lens group and object lens, from exit window outgoing process, forming the matrix type hot spot distribution of m row × n row in convex field lens group, line space is a=4c, and column pitch is b=2w, m is natural number, and n is odd number.
6. absorbing cavity as claimed in claim 5, it is characterised in that
Matrix type hot spot distribution according to m row × n row, it is determined that produce the coincidence row of n-2 row, obtain the total columns=n+n-2=2n-2 of hot spot；
Produce 4 row hot spots and the total columns 2n-2 of hot spot according to each periods of reflections, obtain periods of reflections
Principle according to periods of reflections round numbers, obtaining n is odd number.
7. absorbing cavity as claimed in claim 6, it is characterised in that each periods of reflections includes the first subcycle and the second subcycle, and each subcycle produces 2 row hot spots；Through the first subcycle, it is achieved the roundtrip on convex field lens group, the first spherical reflector, the second spherical reflector, convex field lens group forms two row hot spots；Through the second subcycle, it is achieved the roundtrip on convex field lens group, the 3rd spherical reflector, the 4th spherical reflector, convex field lens group forms two row hot spots；The secondary series of the first subcycle and the first row of the second subcycle overlap；
The abscissa of the row of the first subcycle is about CM1(w, c) symmetrical；The abscissa of the row of the second subcycle is about CM3(-w, c) symmetrical；
Assume that light source is X from the incidence point abscissa that incidence window is incident, then,
During the first periods of reflections T=1, the abscissa of the first row of the first subcycle is X, and the abscissa of secondary series is 2w-x；The abscissa of the first row of the second subcycle is 2w-x, and the abscissa of secondary series is X-4w；
During the second periods of reflections T=2, the abscissa of the first row of the first subcycle is X-4w, and the abscissa of secondary series is 6w-x；The abscissa of the first row of the second subcycle is 6w-x, and the abscissa of secondary series is X-8w；
During three periods of reflections T=3, the abscissa of the first row of the first subcycle is X-8w, and the abscissa of secondary series is 10w-x；The abscissa of the first row of the second subcycle is 10w-x, and the abscissa of secondary series is X-12w；
By that analogy,
WhenTime, the abscissa of the first row of the first subcycle is X-4 (T-1) w, and the abscissa of secondary series is 2 × (2T-1) w-x；The abscissa of the first row of the second subcycle is 2 × (2T-1) w-x, and the abscissa of secondary series is X-4Tw；
Obtaining light source through multiple reflections is X-4Tw from the eye point abscissa that exit window penetrates；
, there is n-1 spacing in the matrix type hot spot distribution according to m row × n row, obtains spot separation b=[X-(X-4Tw)]/(the n-1)=2w of adjacent two row between incidence point and eye point.
8. absorbing cavity as claimed in claim 7, it is characterised in that in the first subcycle of the first periods of reflections, formed between adjacent two hot spots about C in convex field lens groupM1,CM2Symmetrical periodically successively, namely incidence point 0 and hot spot 1 are about CM1Symmetry, hot spot 1 and hot spot 2 are about CM2Symmetry, hot spot 2 and hot spot 3 are about CM1Symmetry, circulation is gone down, by that analogy, formation first row hot spot (0,2,4,6,8 ...) and secondary series hot spot (1,3,5,7,9 ...), according to similar geometry relation, in the triangle that any three adjacent spots are constituted, CM1And CM2Respectively as the midpoint of triangle dual-side, then the length on the base of triangle is equal to C equal to the spot separation a of adjacent linesM1CM2The twice of length is equal to 4c equal to 2 × 2c.
9. absorbing cavity as claimed in claim 4, it is characterised in that
The surface equation of described first concave mirror meets formula (1): x2+y2+(z-R)2=R2；Wherein (x, y z) represent the face type coordinate of the first concave mirror；
Center of curvature coordinate according to the first spherical reflector to the 4th spherical reflector is positioned at the surface of the first concave mirror, then will at the axial C of XYMi(xMi, yMi) substitute into formula (1), obtain the z of Z-directionMi=R-(R2-w2-c2)1/2；
Described first spherical reflector meets formula (2) to the surface equation of the 4th spherical reflector:
(Xi-xMi)2+(Yi-yMi)2+(Zi-zMi)2=R2；Wherein, (xMi, yMi, zMi) represent center of curvature CMiThe coordinate of point, i takes 1,2,3,4；Point (Xi, Yi, Zi), i takes 1, and 2,3,4, represent the face type coordinate that first to fourth spherical reflector is corresponding.
10. absorbing cavity as claimed in claim 9, it is characterised in that described point (Xi, Yi, Zi), i takes 1, and 2,3,4,
0≤X1≤Dx/ 2,0≤Y1≤Dy/2；-Dx/2≤X2≤ 0 ,-Dy/2≤Y2≤0；
-Dx/2≤X3≤ 0,0≤Y3≤Dy/2；0≤X4≤Dx/ 2 ,-Dy/2≤Y4≤0；
DxRepresent object lens in x-axis to greatest length, DyRepresent object lens in y-axis to greatest length.
11. absorbing cavity as claimed in claim 10, it is characterised in that
2(d0+2RNA)<Dx≤w1；
2(d0+2RNA)<Dy≤h1+h2；
Wherein, d0Represent incidence window place spot diameter；NA represents numerical aperture；R represents basic light path；w1Represent the width of the first concave mirror；h1+h2Represent the first concave mirror and the total height of the second concave mirror.
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