CN105675727A - Sensitivity compensation method of defects in defocusing area of ultrasonic focusing probe - Google Patents
Sensitivity compensation method of defects in defocusing area of ultrasonic focusing probe Download PDFInfo
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- CN105675727A CN105675727A CN201610039070.7A CN201610039070A CN105675727A CN 105675727 A CN105675727 A CN 105675727A CN 201610039070 A CN201610039070 A CN 201610039070A CN 105675727 A CN105675727 A CN 105675727A
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2456—Focusing probes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/32—Arrangements for suppressing undesired influences, e.g. temperature or pressure variations, compensating for signal noise
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Abstract
The invention provides a sensitivity compensation method of defects in the defocusing area of an ultrasonic focusing probe.The sensitivity compensation method is characterized in that sensitivity compensation curves are actually measured by manufacturing compensation samples, the ultrasonic echo data of the to-be-measured samples is acquired through an ultrasonic microscope, the X, Y and Z spatial coordinates of the defects are extracted, corresponding compensation curves are selected according to actual detecting conditions, and sensitivity compensation is completed according to the depths Hdefect of the defects and the positions Hfocus of focuses.The sensitivity compensation method has the advantages that the detecting sensitivity of the defects in the defocusing area of the focusing probe is achieved; compared with AVG curves of flat probes, the method is more suitable for the focusing probe, the sensitivity compensation of the defects of the defocusing area is achieved, high precision and repeatability are achieved, the method is significant to fast defect detection and defect size representation, and misjudgment of defect size is avoided; by the sensitivity compensation, the defect size and number in materials can be statistically analyzed, and the purity of metal materials can be evaluated accurately.
Description
Technical field
The invention belongs to ultrasonic test field, it is specifically related to the sensitivity compensation method that a kind of focus ultrasonic probe defocuses defect in district.
Background technology
It is thin that the sound field that focus ultrasonic probe is launched has acoustic beam, concentration of energy, resolving power and sensitivity advantages of higher. When focusing probe works, the piezoelectric chip in probe changes electric energy dress into mechanical energy through inverse piezoelectric effect, inspires ultrasonic wave, and sound wave converges to a bit through lensing, is called the focus of probe. But, the geometry point that the focus after focus ultrasonic does not take up space in theory, but approximate right cylinder, right cylinder inside is focal zone, and cylindrical outer is out-focus region.
When utilizing focusing probe to detect, when defect is in focal region, there is good Detection capability, detection sensitivity height for defect probe; When defect be in defocus district time, probe Detection capability decline, detection sensitivity reduce. Generally, according to the amplitude size of defect reflection echo, it is possible to judge the size of defect to a certain extent qualitatively. But, the focusing effect on defect of popping one's head in will affect detection sensitivity, namely affects the amplitude of flaw echo. So, the quality of focusing effect can affect the judgement of defect size. Such as, little defect can be mistaken for for the defect defocused in district.
When a test specimen is carried out Inner Defect Testing, the degree of depth residing for internal defects is uncertain, so desirable focal position can not be preset, to ensure that all defects can be in the focal region of probe. In this case, some defects can be in focal region, and some defects then can be in and defocus district, and the flaw detection sensitivity defocusing district is low, so that causes erroneous judgement.
Summary of the invention
In order to solve the problem, the present invention provides a kind of practical, and analytical calculation speed is fast, and accuracy height, is in when focusing probe defocuses district for defect, the detection sensitivity equalising means of defect.A kind of focus ultrasonic probe defocuses the sensitivity compensation method of defect in district, described sensitivity compensation method compensates sample by making, actual measurement sensitivity compensation curve, ultrasonic microscope is utilized to obtain the ultrasonic echo data of sample to be tested, extract the X of defect, Y, Z-space coordinate, testing conditions according to reality chooses corresponding compensated curve again, finally according to the depth H of defectLackWith the position H of focusBurntDetermine penalty coefficient and complete sensitivity compensation;
Further, described method comprises the following steps:
Step one, designs and produces compensation sample;
Step 2, draws sensitivity compensation curve;
Step 3, sample to be tested ultrasound data gathers;
Step 4, defective locations coordinate extracts;
Step 5, flaw detection sensitivity compensates;
Further, described step one is specially: choose the material identical with sample to be tested material, make " wing " ladder sample, described " wing " ladder sample production utilizes each ladder big flat defect of simulation, big flat defect size is much larger than the burnt column diameter of focusing probe, not considering the size of defect, the degree of depth residing for a defectiveness is different;
Further, described step 2 is specially: use focus ultrasonic probe to test, ensure that gain is constant, the focus of probe being focused on certain ladder, translation probe is captured in the Bottom echo of different ladder successively, draws sensitivity compensation curve, the x-axis of curve represents the degree of depth of defect, y-axis represents the echo amplitude of defect, the slope of curve as penalty coefficient, as the weight of sensitivity compensation;
Further, described step 3 is specially: choose the focusing probe that focus can focus on sample to be tested inside, depth of focus HBurntRepresent, by 50um of stepping value, whole sample inside is carried out coarse scan, obtain the C-scan picture figure of whole sample subsurface defect, then in C-scan picture figure, find target area to be analyzed, then taking stepping value as 5um, accurately sweep and look into, and preserve all-wave data;
Further, described step 4 is specially: according to flaw echo, extract the X of defect position, Y, Z-space physical coordinates, in X direction etc. spacing parallel lines sweep and look into, look into number as m taking sweeping of parallel lines, it is n that sweeping on every bar parallel lines makes an inventory of number, set up the arranged of m × n, look into principle according to sweeping, first determine X, the Y-coordinate of defect, again according to the propagation principle of compressional wave, pass through formulaWherein, c is ultrasonic wave velocity of propagation in the material, and t is the time pressing from both sides flaw echo in A-scan waveform apart from interface wave, HLackThen represent the depth location of defect, gather sample to be tested ultrasound data;
Further, described step 5 is specially chooses suitable compensated curve, according to the actual depth H of defectLackDeviation probe focus HFocusDistance determine penalty coefficient, and then calculate sensitivity compensation value, result having been added up defocuses the compensation of district's defect sensitivity;
Further, the method choosing suitable compensated curve in described step 5 is: choose frequency probe according to the testing conditions of target compensation consistent, depth of focus HBurntAnd the parameter such as gain consistent when measured compensated curve;
The usefulness of the present invention is:
1) compensation that focusing probe defocuses flaw detection sensitivity in district is achieved, by the measurement compensating test block, surveying out sensitivity compensation curve, and be successfully applied to the detection of focusing probe;
2) with the AVG curve ratio of flat probe relatively, this paper method is more suitable for focusing probe, not only achieve the sensitivity compensation defocusing district's defect, and there is higher precision and repeatability, this is significant for the sign of the quick detection of defect, size, effectively avoids the erroneous judgement of defect size;
3) by the compensation defocusing flaw detection sensitivity in district, being conducive to material internal defect size and quantity to carry out statistical study, it is possible to evaluate the purity of metallic substance more accurately.
Accompanying drawing explanation
Fig. 1 is the overall construction drawing of sensitivity compensation method of the present invention;
Fig. 2 is the compensation test block designed and produced in sensitivity compensation method of the present invention;
Fig. 3 is the compensated curve focusing on ladder 3 in sensitivity compensation method of the present invention;
Fig. 4 is inner containing defective test samples in sensitivity compensation method of the present invention;
Fig. 5 is the use schema of compensated curve in sensitivity compensation method of the present invention;
Fig. 6 is the defect A-scan before compensating in sensitivity compensation method of the present invention and C-scan result;
Fig. 7 is defect A-scan and the C-scan result of actual measurement in sensitivity compensation method middle ideal situation of the present invention;
Fig. 8 is the defect C-scan result after compensating in sensitivity compensation method of the present invention.
Embodiment
In order to make the object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is explained in further detail. It is to be understood that specific embodiment described herein is only for explaining the present invention, it is not intended to limit the present invention. On the contrary, replacement, amendment, equivalent method and the scheme made are contained in any marrow in the present invention of defining by claim and scope in the present invention. Further, in order to make the public the present invention be had a better understanding, in hereafter the details of the present invention being described, detailed describe some specific details parts. Do not have the description of these details parts can also understand the present invention completely for a person skilled in the art.
Below in conjunction with the drawings and specific embodiments, the invention will be further described, but not as a limitation of the invention. Below for the present invention enumerate most preferred embodiment:
As shown in Figure 1, focus ultrasonic probe defocuses the sensitivity compensation method of defect in district, described method is in, for defect, the problem that when focusing probe defocuses district, detection sensitivity is low, by draw along probe shaft to same defect at the echo amplitude curve of different depth position, set up compensation mechanism, and compensate being in the flaw echo real data defocusing district. During compensation, according to the compensated distance of actual defects deviation probe focus with different coefficients, the sensitivity defocusing district's defect is made to reach its level when focusing on. Described method mainly comprises the following steps:
Step one, designs and produces compensation test block: utilize bearing steel material to make " wing " the ladder sample with 9 ladders, as shown in Figure 2. Sample thickness is 3000um, initial ladder (ladder 1) thick 500um, between each ladder, thickness difference is 300um, utilize each ladder big flat defect of simulation, big flat defect size is much larger than the burnt column diameter of focusing probe, so the size of defect can not be considered, ensure that residing for a defectiveness, the degree of depth is different.
Step 2, draws sensitivity compensation curve: when drawing compensated curve, need to ensure that gain is constant, the focus of probe be focused on certain ladder, and translation probe is captured in the echo of different ladder successively, draws sensitivity compensation curve.The x-axis of curve represents the scarce degree of depth of defect, and y-axis represents the echo amplitude of defect. It is noted that the depth of focus and compensated curve one_to_one corresponding, the different depths of focus draws out different compensated curves. For the compensated curve focusing on dark 1100um, as shown in Figure 3, in the drawings, the amplitude of focal position is the highest, and the left and right sides amplitude of deviation focal position reduces. In figure, x-axis is from left to right that the degree of depth increases direction gradually, the slope L of focal position leftmost curveiRepresent; The slope R of focal position right side graphiRepresent.
Step 3, sample to be tested ultrasound data gathers: containing defective sample as shown in Figure 4, sample thickness is 1800um in inside. When it being detected, it may also be useful to 30MHz focusing probe, wafer diameter is 6mm, and focal length is 12.7mm, and burnt post length in theory is 225um, and burnt column diameter is 106um. First, focus on sample to be tested inside, with bigger stepping value, whole sample inside is carried out coarse scan, obtain the C-scan picture figure of whole sample subsurface defect, then in C-scan figure, find target area to be analyzed, more accurately sweep with less stepping value and look into, and preserve all-wave data.
Step 4, defective locations coordinate extracts: according to flaw echo, the X of extraction defect position, Y, Z-space physical coordinates, scanning mode be in X direction etc. spacing parallel lines sweep and look into, all sweep the arranged made an inventory of in m × n, wherein, m is that sweeping of parallel lines looks into number, and n is that sweeping on every bar parallel lines makes an inventory of number. Principle is looked into, it is possible to first determining X, the Y-coordinate of defect, then according to the propagation principle of compressional wave, ultrasonic wave is vertically propagated in material, passes through formula according to sweepingWherein, c is ultrasonic wave velocity of propagation in the material, and t is the time pressing from both sides flaw echo in A-scan waveform apart from interface wave, HLackThen represent the depth location of defect. Through ultrasonic test, material internal contains the defect of two different depthss, and by calculating, the degree of depth of shallow defect is F1=1122um, the degree of depth of dark defect is F2=1449um. Using dark defect as target analysis defect, gathering focus is H in the degree of depthBurntData during=1122um are as data to be analyzed, and detected result is as shown in Figure 6; Gathering focus is H in the degree of depthBurntItself and compensation result, as measured data ideally, are compared by data during=1449um, and detected result is as shown in Figure 7.
Step 5, flaw detection sensitivity compensates: the use flow process of compensated curve as shown in Figure 5, when the detection sensitivity of certain defect being compensated, first to be determined the position H of current probe focusBurntWith the depth H of this defectLack, select compensated curve according to the position of focus, then according to the relative position that the two range difference Δ H judges defect and focus, choose corresponding penalty coefficient further. When defect is above focus, i.e. Δ H=HBurnt-HLack> 0, adopt the curve on the left of focus to compensate. When the lower section of defect in focus, i.e. Δ H=HBurnt-HLack< 0, adopt the curve on the right side of focus to compensate; Then, calculating compensation value according to the size of Δ H, the calculating of compensation value adopts the mode that segmentation calculates, and end-result has added up sensitivity compensation. For the data to be analyzed surveyed herein, the depth of focus of probe is HBurnt=1122um, so selecting compensated curve when focusing on ladder 3, i.e. curve in Fig. 3.Meanwhile, the actual degree of depth of defect is HLack=F2=1449um, obtains the range difference Δ H=H between focus and defectBurnt-HLack=-327um, due to Δ H < 0, defect defocuses district below focus position, so selecting right one side of something of compensated curve, its slope is R1=0.12333dB/um, R2=0.09000dB/um. Through calculating, the sensitivity compensation result of dark defect is as shown in Figure 8.
Above-described embodiment, the just one of the present invention's more preferably embodiment, the usual change that the technician of this area carries out within the scope of technical solution of the present invention and replacing all should be included in protection scope of the present invention.
Claims (8)
1. a focus ultrasonic is popped one's head in and is defocused the sensitivity compensation method of defect in district, it is characterized in that, described sensitivity compensation method compensates sample by making, actual measurement sensitivity compensation curve, ultrasonic microscope is utilized to obtain the ultrasonic echo data of sample to be tested, extract the X of defect, Y, Z-space coordinate, then the testing conditions according to reality chooses corresponding compensated curve, finally according to the depth H of defectLackWith the position H of focusBurntDetermine penalty coefficient and complete sensitivity compensation.
2. sensitivity compensation method according to claim 1, it is characterised in that, described method comprises the following steps:
Step one, designs and produces compensation test block;
Step 2, draws sensitivity compensation curve;
Step 3, sample to be tested ultrasound data gathers;
Step 4, defective locations coordinate extracts;
Step 5, flaw detection sensitivity compensates.
3. sensitivity compensation method according to claim 2, it is characterized in that, described step one is specially: choose the material identical with sample to be tested material, make " wing " ladder sample, described " wing " ladder sample production utilizes each ladder big flat defect of simulation, big flat defect size, much larger than the burnt column diameter of focusing probe, does not consider the size of defect, and the degree of depth residing for a defectiveness is different.
4. sensitivity compensation method according to claim 2, it is characterized in that, described step 2 is specially: uses focus ultrasonic probe to test, ensures that gain is constant, the focus of probe focused on certain ladder, translation probe is captured in the Bottom echo of different ladder successively, drawing sensitivity compensation curve, the x-axis of curve represents the degree of depth of defect, and y-axis represents the echo amplitude of defect, the slope of curve as penalty coefficient, as the weight of sensitivity compensation.
5. sensitivity compensation method according to claim 2, it is characterised in that, described step 3 is specially: choose the focusing probe that focus can focus on sample to be tested inside, depth of focus HBurntRepresent, by 50um of stepping value, whole sample inside is carried out coarse scan, obtain the C-scan picture figure of whole sample subsurface defect, then in C-scan picture figure, find target area to be analyzed, then taking stepping value as 5um, accurately sweep and look into, and preserve all-wave data.
6. sensitivity compensation method according to claim 2, it is characterized in that, described step 4 is specially: according to flaw echo, the X of extraction defect position, Y, Z-space physical coordinates, in X direction etc. spacing parallel lines sweep and look into, looking into number as m taking sweeping of parallel lines, it is n that sweeping on every bar parallel lines makes an inventory of number, sets up the arranged of m × n, principle is looked into according to sweeping, first determine X, the Y-coordinate of defect, then the propagation principle according to compressional wave, pass through formulaWherein, c is ultrasonic wave velocity of propagation in the material, and t is the time pressing from both sides flaw echo in A-scan waveform apart from interface wave, HLackThen represent the depth location of defect, gather sample to be tested ultrasound data.
7. sensitivity compensation method according to claim 2, it is characterised in that, described step 5 is specially chooses suitable compensated curve, according to the actual depth H of defectLackDeviation probe focus HFocusDistance determine penalty coefficient, and then calculate sensitivity compensation value, result having been added up defocuses the compensation of district's defect sensitivity.
8. sensitivity compensation method according to claim 7, it is characterised in that, the method choosing suitable compensated curve in described step 5 is: choose frequency probe according to the testing conditions of target compensation consistent, depth of focus HBurntAnd the parameter such as gain consistent when measured compensated curve.
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| CN106872585A (en) * | 2017-03-28 | 2017-06-20 | 中车戚墅堰机车车辆工艺研究所有限公司 | A kind of wheel blank axial ultrasonic wave inspection surface compensation method |
| CN107552975A (en) * | 2017-09-28 | 2018-01-09 | 惠州市洛玛科技有限公司 | The method of cutter device and cutting products |
| CN107552966A (en) * | 2017-09-28 | 2018-01-09 | 惠州市洛玛科技有限公司 | Laser mark printing device and product marking method |
| CN110261475A (en) * | 2019-05-15 | 2019-09-20 | 宝钢特钢韶关有限公司 | Manual ultrasonic precise positioning method for inclusions in round steel |
| CN113358751A (en) * | 2021-06-01 | 2021-09-07 | 中车青岛四方机车车辆股份有限公司 | Workpiece defect detection method, device and system |
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| CN116500140A (en) * | 2023-06-28 | 2023-07-28 | 新创碳谷集团有限公司 | Automatic gain compensation method, device, equipment and storage medium for ultrasonic detection |
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| CN106872585A (en) * | 2017-03-28 | 2017-06-20 | 中车戚墅堰机车车辆工艺研究所有限公司 | A kind of wheel blank axial ultrasonic wave inspection surface compensation method |
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