CN105659013A - 微阀装置和微阀装置的制造方法 - Google Patents

微阀装置和微阀装置的制造方法 Download PDF

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Publication number
CN105659013A
CN105659013A CN201380066291.8A CN201380066291A CN105659013A CN 105659013 A CN105659013 A CN 105659013A CN 201380066291 A CN201380066291 A CN 201380066291A CN 105659013 A CN105659013 A CN 105659013A
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CN
China
Prior art keywords
fluid port
layer
piezo actuator
microvalve device
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
CN201380066291.8A
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English (en)
Other versions
CN105659013B (zh
Inventor
江挺候
张胜昌
邓宁
王喆垚
陈培毅
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Zhejiang Dunan Artificial Environment Co Ltd
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Zhejiang Dunan Artificial Environment Co Ltd
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Publication of CN105659013A publication Critical patent/CN105659013A/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0011—Gate valves or sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0003—Constructional types of microvalves; Details of the cutting-off member
    • F16K99/0028—Valves having multiple inlets or outlets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K99/0001—Microvalves
    • F16K99/0034—Operating means specially adapted for microvalves
    • F16K99/0042—Electric operating means therefor
    • F16K99/0048—Electric operating means therefor using piezoelectric means
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/03—Assembling devices that include piezoelectric or electrostrictive parts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K99/00—Subject matter not provided for in other groups of this subclass
    • F16K2099/0073—Fabrication methods specifically adapted for microvalves
    • F16K2099/008—Multi-layer fabrications
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T137/00—Fluid handling
    • Y10T137/8593—Systems
    • Y10T137/86493—Multi-way valve unit
    • Y10T137/86879—Reciprocating valve unit
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/43—Electric condenser making

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Micromachines (AREA)
  • Electrically Driven Valve-Operating Means (AREA)

Abstract

一种微阀装置和微阀装置的制造方法，该微阀装置包括：本体，包括第一层(7)和与第一层(7)构成腔室(9)的至少第二层(8)，其中，第一层(7)具有与腔室(9)流体相通的至少两个流体端口(4，5，6)；以及对应于预定的流体端口(4，5，6)设置有压电执行器(1，2，3)，其中，压电执行器(1，2，3)置于腔室(9)中并且其应变伸缩方向平行于第一层(7)，其中，压电执行器(1，2，3)的在应变伸缩方向上的自由端用于遮挡流体端口(4，5，6)以控制流体端口(4，5，6)的开关状态。压电执行器(1，2，3)在应变伸缩方向上的自由端直接遮蔽流体端口(4，5，6)，通过控制压电执行器(1，2，3)的应变伸缩，实现了对流体端口(4，5，6)直接控制的目的。

Description

PCT国内申请，说明书已公开。

Claims (1)

  1. PCT国内申请，权利要求书已公开。
CN201380066291.8A 2013-01-11 2013-01-11 微阀装置和微阀装置的制造方法 Active CN105659013B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2013/070392 WO2014107892A1 (zh) 2013-01-11 2013-01-11 微阀装置和微阀装置的制造方法

Publications (2)

Publication Number Publication Date
CN105659013A true CN105659013A (zh) 2016-06-08
CN105659013B CN105659013B (zh) 2018-08-14

Family

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CN201380066291.8A Active CN105659013B (zh) 2013-01-11 2013-01-11 微阀装置和微阀装置的制造方法

Country Status (3)

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US (1) US20150345663A1 (zh)
CN (1) CN105659013B (zh)
WO (1) WO2014107892A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11067187B2 (en) 2016-01-27 2021-07-20 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US10330212B2 (en) 2016-01-27 2019-06-25 Regents Of The University Of Minnesota Fluidic control valve with small displacement actuators
US9822912B2 (en) 2016-03-17 2017-11-21 Quick Fitting, Inc. Push-to-connect fitting device, arrangement and method
US10400929B2 (en) 2017-09-27 2019-09-03 Quick Fitting, Inc. Fitting device, arrangement and method
TWI713142B (zh) * 2019-11-18 2020-12-11 研能科技股份有限公司 微流體致動器之製造方法
US10969047B1 (en) 2020-01-29 2021-04-06 Quick Fitting Holding Company, Llc Electrical conduit fitting and assembly
US11035510B1 (en) 2020-01-31 2021-06-15 Quick Fitting Holding Company, Llc Electrical conduit fitting and assembly

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1058260A (zh) * 1990-07-11 1992-01-29 古新民 毛细管热力调节阀及其安装方式
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
CN1322282A (zh) * 1998-09-03 2001-11-14 卢卡斯新星传感器公司 正比微机械装置
US20010043886A1 (en) * 2000-03-24 2001-11-22 Han-Oh Park Multi-channel quantitative control valve apparatus
US6988706B2 (en) * 2003-12-17 2006-01-24 General Electric Company Piezoelectric microvalve
US20060017030A1 (en) * 2004-07-22 2006-01-26 Harris Corporation Embedded control valve using electroactive material
CN1942222A (zh) * 2004-03-05 2007-04-04 铝微有限公司 用于形成微阀的选择性接合

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6540203B1 (en) * 1999-03-22 2003-04-01 Kelsey-Hayes Company Pilot operated microvalve device
US6845962B1 (en) * 2000-03-22 2005-01-25 Kelsey-Hayes Company Thermally actuated microvalve device
US8113482B2 (en) * 2008-08-12 2012-02-14 DunAn Microstaq Microvalve device with improved fluid routing
US8925699B2 (en) * 2010-10-15 2015-01-06 GM Global Technology Operations LLC Powertrain pressure and flow control system for automatic transmissions

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1058260A (zh) * 1990-07-11 1992-01-29 古新民 毛细管热力调节阀及其安装方式
US5927325A (en) * 1996-10-25 1999-07-27 Inpod, Inc. Microelectromechanical machined array valve
CN1322282A (zh) * 1998-09-03 2001-11-14 卢卡斯新星传感器公司 正比微机械装置
US20010043886A1 (en) * 2000-03-24 2001-11-22 Han-Oh Park Multi-channel quantitative control valve apparatus
US6988706B2 (en) * 2003-12-17 2006-01-24 General Electric Company Piezoelectric microvalve
CN1942222A (zh) * 2004-03-05 2007-04-04 铝微有限公司 用于形成微阀的选择性接合
US20060017030A1 (en) * 2004-07-22 2006-01-26 Harris Corporation Embedded control valve using electroactive material

Also Published As

Publication number Publication date
CN105659013B (zh) 2018-08-14
US20150345663A1 (en) 2015-12-03
WO2014107892A1 (zh) 2014-07-17

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