CN105628007A - Six-dimensional rapid high-precision alignment and measurement system based on zone plate - Google Patents
Six-dimensional rapid high-precision alignment and measurement system based on zone plate Download PDFInfo
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- CN105628007A CN105628007A CN201610078986.3A CN201610078986A CN105628007A CN 105628007 A CN105628007 A CN 105628007A CN 201610078986 A CN201610078986 A CN 201610078986A CN 105628007 A CN105628007 A CN 105628007A
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- zone plate
- probe
- alignment
- target surface
- optoelectronic induction
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C15/00—Surveying instruments or accessories not provided for in groups G01C1/00 - G01C13/00
- G01C15/002—Active optical surveying means
Abstract
The invention discloses a six-dimensional rapid high-precision alignment and measurement system based on a zone plate. The six-dimensional rapid high-precision alignment and measurement system based on the zone plate is capable of achieving rapid high-precision spatial reset alignment and measurement. Six-dimensional high-precision alignment is spatial attitude positioning actually, and synchronous measurement in six degrees of freedom is extremely difficult. For instance, currently, according to a latest-generation lithography machine of Advanced Semiconductor Material Lithography in Netherlands, two same-type two-dimensional gratings are used for (two-dimensional) alignment for resetting between a wafer and a projection lens, the direction perpendicular to the grating surfaces is positioned through measurement by laser interferometry, and accordingly a step-by-step detection and adjustment process is required and complicated position relation calibration and coordinated movement between two kinds of measurement are required. As another alignment system and scheme, the six-dimensional rapid high-precision alignment and measurement system based on the zone plate is capable of achieving six-dimensional high-precision alignment and measurement simultaneously and synchronously.
Description
Technical field
The invention belongs to field of precision instruments, be specially a kind of alignment measurement systems, be particularly suitable for needing the system of spatial attitude precision positioning, alignment.
Background technology
The accurate quickly location of spatial attitude, alignment have a wide range of applications, relative position relation between mask plate, projection lens, wafer in litho machine, the motor feedback control etc. of precision machine tool. But, current measurement means also rarely has can be competent at this scheme required, existing certain methods is still within situation perfect gradually. Study carefully its difficult point to be in that, lack a kind of scheme or six-freedom degree can all be had the means of enough sensitive reaction by method for sensing. Such as, what Holland's ASML its patent of latest generation litho machine adopted at present is that two blocks of homotype two-dimensional gratings carry out (two dimension) alignment for the reset between wafer and projection lens, the direction being perpendicular to grid face is then positioned by laser interferometry, thus need one to detect the process adjusted gradually step by step, and the position relationship carrying out complexity between requiring two kinds to measure is demarcated and coordination exercise. Not only control complexity, and affect progress. Existing patent, document, product introduction on sale method have this common problem more, that is: all independent gradation measurement of six-freedom degree or some freedom coupling single measurement, then being analyzed judging next step action to each degree of freedom result of detection, alignment procedures it is frequently necessary to that above procedure carries out repeatedly circulation and repeats to gradually step up alignment precision. Problem is, it is excessive that each degree of freedom independence measurement result lacks the coupling information between degree of freedom or coupled relation judgment bias in analysis, and even there will be the action executing based on this judgement becomes unfavorable operation.
Summary of the invention
The present invention is directed to the problems referred to above, novelty propose a kind of quickly sensing system, six-freedom degree position mismatch is all had enough sensitivity simultaneously, and measure susceptiveness can with zone plate size, target surface size increase and susceptiveness increases. It addition, further describe the corresponding relation data base of target surface linear transducer array arrangement and detection output thereof and attitude information, it is possible to achieve the accurate measurement of six degree of freedom.
It is an object of the invention to propose a kind of sextuple quickly, high accuracy to Barebone, be particularly suitable for the system that litho machine, precision machine tool etc. need precise space to position. Native system is compared with the measurement system that this kind equipment adopts at present, there is obvious technical advantage, avoid existing method needs multidimensional independently measure, the drawback of artificial coupling analysis decoupling, be a kind of detection system that can be simultaneously sensitive to six-freedom degree.
The concrete technical scheme adopted for achieving the above object is:
A kind of based on the sextuple high accuracy rapid alignment of zone plate, measurement system, draw together the LASER Light Source after two dimension zone plate, collimation, multiple optoelectronic induction probe, target surface plate, control circuit, support support; Optoelectronic induction probe is fixed on target surface plate, between two dimension zone plate LASER Light Source and target surface plate after collimation, LASER Light Source, two dimension zone plate, target surface plate are fixed on support support according to above-mentioned position relationship, by supporting support by above-mentioned parts and the relative position secure fit treating alignment device, control circuit is popped one's head in optoelectronic induction, is treated that the motion of alignment device is connected.
Described multiple optoelectronic inductions probe is fixed along the cross hairs being made up of horizontal central line and the vertical center line of target surface plate, when target surface plate relative to two dimension zone plate have between face not parallel, interplanar distance is inequal with focal length, have rotation, translation deviator situation, then above-mentioned optoelectronic induction probe occur corresponding light intensity change.
Described optoelectronic induction probe is photodiode or CCD camera or COMS photographic head.
The arrangement of the plurality of optoelectronic induction probe includes situations below:
1) center of optoelectronic induction probe overlaps with the horizontal central line on target surface plate, vertical center line;
2) distance that the center deviation horizontal central line of target surface plate that optoelectronic induction is popped one's head in, vertical center line are certain, this distance is measured through precision calibration, and the essential information as probe is used by control circuit.
Described optoelectronic induction probe is four-quadrant diode, each probe of four-quadrant diode probe is respectively provided with relative rotation angle, corner difference is had between different four-quadrant diode, demarcated measurement relative to the corner amount of the cross hairs being made up of horizontal central line on target surface plate and vertical center line by high-accuracy means, and the essential information as probe is used by control circuit.
Also including light intensity adjusting device, the control circuit that light intensity adjusting device is popped one's head in optoelectronic induction associates, and the fast-lighting scanning in darkness to realize light intensity changes.
Described two dimension zone plate is amplitude modulation type or phase modulation type.
The present invention, compared with the invention of existing similar applications, has the advantage that
Existing research and realization, adopt six-freedom degrees independently to measure (or minority degree of freedom is by a kind of means synchronizing detection), artificially formulate coupling analysis scheme more, and then divides degree of freedom motor control to detection target, progressively realizes alignment. Not only process is complicated, and between different degree of freedom, coupling dynamics difference very easily causes coupling analysis deviation excessive, and then causes that deviation of the alignment reduction is relatively slow, does not even restrain; And, mutually coordinated between different detection means, relative space position is demarcated extremely difficult. The present invention proposes the system being achieved six degree of freedom sensitive detection simultaneously by a kind of detection means based on two dimension zone plate. Six-freedom degree position mismatch is all had enough sensitivity simultaneously, and measure susceptiveness can with zone plate size, target surface size increase and susceptiveness increases. It addition, further describe the corresponding relation data base of target surface linear transducer array arrangement and detection output thereof and attitude information, it is possible to achieve the accurate measurement of six degree of freedom. Avoid existing method needs multidimensional independently measure, the drawback of artificial coupling analysis decoupling, be a kind of detection system that can be simultaneously sensitive to six-freedom degree.
Accompanying drawing explanation
Fig. 1 is the structural representation of the present invention;
Fig. 2 is that in the present invention, the one of probe arranges schematic diagram;
Fig. 3 is that in the present invention, the another kind of probe arranges schematic diagram;
Wherein, 1 is light source; 2 is collimating lens; 3 is two dimension zone plate; 4 is the cross focal line that zone plate is formed under collimated light irradiates, namely the light sent by light source 1, vertical irradiation two dimension zone plate 3 after collimating lens 2 collimates, so produces cross focal line by the focal position at zone plate, and cross focal line place plane is parallel with zone plate plane; 5 is linear transducer array, and 6 assume that the position that cross focal line is mapped on target panel.
Detailed description of the invention
Below in conjunction with the drawings and specific embodiments, the invention will be further described:
As shown in Figure 1, the present invention includes a two-dimentional zone plate 3, LASER Light Source after collimation (is realized by light source 1 and collimating lens 2, optical maser wavelength is corresponding with zone plate design, Laser output port is connected with optical filter and collimating lens, thus obtaining collimated light, collimated light vertical irradiation two dimension zone plate) and light intensity adjusting device, the linear transducer array 5 of at least 4 optoelectronic induction probe compositions (can be four-quadrant diode, photodiode, CCD camera, COMS photographic head, the power experiencing light that can be sensitive changes), special target surface plate, control circuit, support support, optoelectronic induction probe is fixed on target surface plate, between two dimension zone plate LASER Light Source and target surface plate after collimation, LASER Light Source, two dimension zone plate, target surface plate is fixed on support support according to above-mentioned position relationship, by supporting support by above-mentioned parts and the relative position secure fit treating alignment device, control circuit and optoelectronic induction probe, treat that the motion of alignment device connects.
Described two dimension zone plate can be amplitude modulation type or phase modulation type, and outward appearance can be circular or square, and symmetry is as well. It is suitable for optical maser wavelength and its focal length and designs according to the position relationship treating alignment modules. When adopting laser (directional light) the vertical irradiation zone plate after collimation, the brightest cross intersection (spatial distribution) will occur in the position of its focal length. Such as, zone plate horizontal positioned, collimation directional light irradiate down from above, then below zone plate, focal position will appear from planche cross intersection bright line (belonging to reticule, plane is parallel with zone plate). Compared with camera lens, focus only one of which its light of point of camera lens is the strongest, and " focus " of two dimension zone plate is then this cross bright line, it is possible to be called " cross focal line ".
By multiple probes along supposing that cross hairs is arranged on special target surface flat board (photosensitive head high accuracy after close adjustment is coplanar, and its face can serve as optical panel, the light intensity of this screen ad-hoc location of probe detection) in some way. When this flat board relative to zone plate have between any not parallel, interplanar distance is inequal with focal length, have rotation, translation deviator, then above-mentioned probe all can occur that corresponding light intensity changes. The described special parts as cooperation identification target of special target surface plate, material requires have enough stiffness to be unlikely to deform, target surface processing is smooth, it is desirable to diffuse-reflectance surface treatment, reduces reflection veiling glare.
Described sensitive probe preferably four-quadrant PSD pops one's head in, and the sensor devices such as photodiode, CCD, COMS can also substitute. Sensitive probe is arranged in special target surface plate, and probe detection face height passes through other means and demarcates, the arrangement of highly coplanar multiple probes includes following several situation: 1) center probe is strict overlaps (line ball centering layout) with supposition cross hairs on plate, as shown in Figure 2; 2) center probe deviation plate supposes the distance that cross hairs is certain, this distance uses other means precision calibration to measure, and use by control circuit as the essential information of this probe, 3) basis being arranged in first two situation of different four-quadrant diode increase rotate deviator, namely there is certain corner difference (corner being axle with plate face normal) between different four-quadrant diode, as shown in Figure 3; Demarcated measurement relative to the corner amount supposing cross hairs by high-accuracy means, and the essential information as this probe is used by control circuit. The benefit of four-quadrant diode is, its design is through optimizing, it is possible to the sensitive light-intensity difference (essentially corresponding to four probe Symmetric Composites) judging four quadrant position, and its difference exports as coded electrical signal. Further, carry out actual measurement by other means flat board to obtaining according to above method for arranging and demarcate and then can carry out accurate measurement as comparison data storehouse, and along with the more big then sensitivity of the size of zone plate and flat board is more high.
The control signal of light intensity adjusting device associates with probe control circuit, it is possible to achieve the fast-lighting scanning in darkness change of light intensity. The bright cross intersection that formed due to zone plate and near it position have significantly strong and weak difference (result of whole zone plate collective diffraction enhanced imaging), can find the light intensity of applicable sensor sensitivity (additionally easily by bright dark change, also abundant information is had to utilize between the result that light intensity in bright dark change procedure and probe detect at any time, such as the probe light-intensity difference that cross intersection thickness causes with the change of light intensity), and the response time of diode probe is also exceedingly fast, so overall measuring speed is exceedingly fast. In order to avoid the impact of veiling glare, natural light further, it is also possible to add light shield further, add the worry mating plate etc. for optical maser wavelength before probe.
The function of described control circuit include setting up comparison data storehouse (the linear transducer array output relation table corresponding to different attitudes namely obtained with the actual measurement of other means) and and output alignment difference vector, and related data transmission is further aligned to the motion treating alignment device.
It should be appreciated that the part that this specification does not elaborate belongs to prior art.
Claims (7)
1. the rapid alignment in high precision of the 6 DOF based on zone plate, measurement system, it is characterised in that: include the LASER Light Source after two dimension zone plate, collimation, multiple optoelectronic induction probe, target surface plate, control circuit, support support; Optoelectronic induction probe is fixed on target surface plate, between two dimension zone plate LASER Light Source and target surface plate after collimation, LASER Light Source, two dimension zone plate, target surface plate are fixed on support support according to above-mentioned position relationship, by supporting support by above-mentioned parts and the relative position secure fit treating alignment device, control circuit is popped one's head in optoelectronic induction, is treated that the motion of alignment device is connected.
2. according to claim 1 a kind of based on the sextuple high accuracy rapid alignment of zone plate, measurement system, it is characterized in that: described multiple optoelectronic inductions probe is fixed along the cross hairs being made up of horizontal central line and the vertical center line of target surface plate, when target surface plate relative to two dimension zone plate have between face not parallel, interplanar distance is inequal with focal length, have rotation, translation deviator situation, then above-mentioned optoelectronic induction probe occur corresponding light intensity change.
3. a kind of sextuple high accuracy rapid alignment based on zone plate according to claim 2, measure system, it is characterised in that: described optoelectronic induction probe is photodiode or CCD camera or COMS photographic head.
4. according to claim 3 a kind of based on the sextuple high accuracy rapid alignment of zone plate, measurement system, it is characterised in that: the arrangement of the plurality of optoelectronic induction probe includes situations below:
1) center of optoelectronic induction probe overlaps with the horizontal central line on target surface plate, vertical center line;
2) distance that the center deviation horizontal central line of target surface plate that optoelectronic induction is popped one's head in, vertical center line are certain, should
Distance is measured through precision calibration, and the essential information as probe is used by control circuit.
5. according to claim 2 a kind of based on the sextuple high accuracy rapid alignment of zone plate, measurement system, it is characterized in that: described optoelectronic induction probe is four-quadrant diode, each probe of four-quadrant diode probe is respectively provided with relative rotation angle, corner difference is had between different four-quadrant diode, demarcated measurement relative to the corner amount of the cross hairs being made up of horizontal central line on target surface plate and vertical center line by high-accuracy means, and the essential information as probe is used by control circuit.
6. according to claim 1 a kind of based on the sextuple high accuracy rapid alignment of zone plate, measurement system, it is characterized in that: also include light intensity adjusting device, the control circuit that light intensity adjusting device is popped one's head in optoelectronic induction associates, and the fast-lighting scanning in darkness to realize light intensity changes.
7. according to claim 1 a kind of based on the sextuple high accuracy rapid alignment of zone plate, measurement system, it is characterised in that: described two dimension zone plate is amplitude modulation type or phase modulation type.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505610A (en) * | 2017-07-19 | 2017-12-22 | 中国科学院空间应用工程与技术中心 | Six-freedom degree pose measuring method and device |
| CN113547498A (en) * | 2021-06-08 | 2021-10-26 | 国家管网集团北京管道有限公司 | Pipeline fire connection head measuring, positioning and marking device and measuring, positioning and marking method |
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| US7466796B2 (en) * | 2004-08-05 | 2008-12-16 | Gatan, Inc. | Condenser zone plate illumination for point X-ray sources |
| CN101713639A (en) * | 2009-10-30 | 2010-05-26 | 中国科学院国家天文台南京天文光学技术研究所 | Four-point support of quadrilateral subpanel based universal detection method of radio telescope |
| CN104019741A (en) * | 2014-05-29 | 2014-09-03 | 暨南大学 | State detection apparatus and detection method for lead of overhead contact line equipment |
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2016
- 2016-02-04 CN CN201610078986.3A patent/CN105628007B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7466796B2 (en) * | 2004-08-05 | 2008-12-16 | Gatan, Inc. | Condenser zone plate illumination for point X-ray sources |
| CN101713639A (en) * | 2009-10-30 | 2010-05-26 | 中国科学院国家天文台南京天文光学技术研究所 | Four-point support of quadrilateral subpanel based universal detection method of radio telescope |
| CN104019741A (en) * | 2014-05-29 | 2014-09-03 | 暨南大学 | State detection apparatus and detection method for lead of overhead contact line equipment |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107505610A (en) * | 2017-07-19 | 2017-12-22 | 中国科学院空间应用工程与技术中心 | Six-freedom degree pose measuring method and device |
| CN113547498A (en) * | 2021-06-08 | 2021-10-26 | 国家管网集团北京管道有限公司 | Pipeline fire connection head measuring, positioning and marking device and measuring, positioning and marking method |
| CN113547498B (en) * | 2021-06-08 | 2023-09-12 | 国家管网集团北京管道有限公司 | Pipeline fire-moving joint measurement positioning scribing device and measurement positioning scribing method |
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