CN105627951B - 一种自动检测晶片基底二维形貌的装置 - Google Patents
一种自动检测晶片基底二维形貌的装置 Download PDFInfo
- Publication number
- CN105627951B CN105627951B CN201410692768.XA CN201410692768A CN105627951B CN 105627951 B CN105627951 B CN 105627951B CN 201410692768 A CN201410692768 A CN 201410692768A CN 105627951 B CN105627951 B CN 105627951B
- Authority
- CN
- China
- Prior art keywords
- laser
- light
- wafer substrates
- beams
- beam splitter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Abstract
Description
Claims (13)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410692768.XA CN105627951B (zh) | 2014-11-26 | 2014-11-26 | 一种自动检测晶片基底二维形貌的装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201410692768.XA CN105627951B (zh) | 2014-11-26 | 2014-11-26 | 一种自动检测晶片基底二维形貌的装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN105627951A CN105627951A (zh) | 2016-06-01 |
CN105627951B true CN105627951B (zh) | 2018-07-31 |
Family
ID=56043104
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201410692768.XA Active CN105627951B (zh) | 2014-11-26 | 2014-11-26 | 一种自动检测晶片基底二维形貌的装置 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN105627951B (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112676697B (zh) * | 2020-12-31 | 2022-08-05 | 苏州科韵激光科技有限公司 | 一种显示面板的激光修复光学系统及激光修复设备 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1403783A (zh) * | 2002-09-18 | 2003-03-19 | 清华大学 | 一种非球面镜顶点曲率半径测量方法及装置 |
CN101373134A (zh) * | 2008-10-24 | 2009-02-25 | 天津大学 | 一种线状激光窄带滤光psd热辐射板厚测量方法 |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
CN102620868A (zh) * | 2012-03-10 | 2012-08-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 具有垂直光路结构的薄膜应力测量装置及其应用 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07122573B2 (ja) * | 1986-06-27 | 1995-12-25 | 株式会社ニコン | パタ−ン検出装置 |
JP2001201329A (ja) * | 2000-12-20 | 2001-07-27 | Minolta Co Ltd | 3次元形状測定装置 |
-
2014
- 2014-11-26 CN CN201410692768.XA patent/CN105627951B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1403783A (zh) * | 2002-09-18 | 2003-03-19 | 清华大学 | 一种非球面镜顶点曲率半径测量方法及装置 |
CN101373134A (zh) * | 2008-10-24 | 2009-02-25 | 天津大学 | 一种线状激光窄带滤光psd热辐射板厚测量方法 |
CN102023068A (zh) * | 2010-10-10 | 2011-04-20 | 徐建康 | 薄膜应力测量设备及其测量方法 |
CN102620868A (zh) * | 2012-03-10 | 2012-08-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | 具有垂直光路结构的薄膜应力测量装置及其应用 |
Also Published As
Publication number | Publication date |
---|---|
CN105627951A (zh) | 2016-06-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107607051B (zh) | 一种膜厚检测装置 | |
CN111458696B (zh) | 手持式激光测距仪示值误差的校准方法 | |
CN107255451A (zh) | 角度补偿式激光外差干涉位移测量装置及方法 | |
CN102022977B (zh) | 双轴mems扫描的外差干涉系统及方法 | |
CN104321616A (zh) | 用于补偿激光跟踪仪中的轴承径向跳动的装置和方法 | |
CN106949842B (zh) | 二维位移测量装置及测量方法 | |
CN100570276C (zh) | 二维横向塞曼双频激光直线度/同轴度测量装置 | |
CN109444849A (zh) | 相控阵激光雷达 | |
CN112284302A (zh) | 扫描法测量主动光电系统激光收发同轴度的装置及方法 | |
CN104748720A (zh) | 空间测角装置及测角方法 | |
CN105091777B (zh) | 实时快速检测晶片基底二维形貌的方法 | |
CN105091788B (zh) | 自动实时快速检测晶片基底二维形貌的装置 | |
CN105958316B (zh) | 基于铯原子饱和吸收谱的半导体自动稳频激光器 | |
CN105627951B (zh) | 一种自动检测晶片基底二维形貌的装置 | |
CN114252028A (zh) | 一种结合激光三角法的紧凑型四光斑二维转角检测装置 | |
CN105698845B (zh) | 一种单透镜型自动检测晶片基底二维形貌和温度的装置 | |
CN109579744A (zh) | 基于光栅的跟随式三维光电自准直方法与装置 | |
CN102721529A (zh) | 大口径反射光学元件高反射率扫描测量多波长集成方法 | |
CN209590264U (zh) | 相控阵激光雷达 | |
CN105698697B (zh) | 一种检测晶片基底二维形貌的装置 | |
CN105091787B (zh) | 实时快速检测晶片基底二维形貌的装置 | |
CN115112202B (zh) | 一种液位、容量测量方法、设备和存储介质 | |
CN107121071B (zh) | 二维位移测量装置及测量方法 | |
CN206945959U (zh) | 激光雷达及其相控阵激光发射单元 | |
CN105698705B (zh) | 检测晶片基底二维形貌的装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
CB03 | Change of inventor or designer information |
Inventor after: Liu Jianpeng Inventor after: Ma Tiezhong Inventor after: Zhang Lifang Inventor after: Huang Wenyong Inventor after: Sang Yungang Inventor before: Liu Jianpeng Inventor before: Zhang Lifang Inventor before: Huang Wenyong Inventor before: Sang Yungang Inventor before: Zhang Tang |
|
COR | Change of bibliographic data | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200408 Address after: 330096 floor 1, workshop 8, Zhongxing science and Technology Park, No. 688, aixihu North Road, Nanchang high tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee after: Nanchang angkun Semiconductor Equipment Co.,Ltd. Address before: 503, room 102206, B, Xinyuan Science Park, 97 Changping Road, Beijing, Changping District Patentee before: BEI OPTICS TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230613 Address after: B701, Building 8, No. 97, Changping Road, Shahe Town, Changping District, Beijing 102200 (Changping Demonstration Park) Patentee after: Beijing Airui Haotai Information Technology Co.,Ltd. Address before: 330096 1st floor, No.8 workshop, Zhongxing Science Park, no.688 aixihu North Road, Nanchang hi tech Industrial Development Zone, Nanchang City, Jiangxi Province Patentee before: Nanchang angkun Semiconductor Equipment Co.,Ltd. |
|
TR01 | Transfer of patent right |