CN105619184A - High precision machining method for X-direction reflection mirror - Google Patents
High precision machining method for X-direction reflection mirror Download PDFInfo
- Publication number
- CN105619184A CN105619184A CN201511015918.4A CN201511015918A CN105619184A CN 105619184 A CN105619184 A CN 105619184A CN 201511015918 A CN201511015918 A CN 201511015918A CN 105619184 A CN105619184 A CN 105619184A
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- CN
- China
- Prior art keywords
- speculum
- reflection mirror
- direction reflection
- zeeko
- central position
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B13/00—Machines or devices designed for grinding or polishing optical surfaces on lenses or surfaces of similar shape on other work; Accessories therefor
- B24B13/01—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools
- B24B13/012—Specific tools, e.g. bowl-like; Production, dressing or fastening of these tools conformable in shape to the optical surface, e.g. by fluid pressure acting on an elastic membrane
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Abstract
The invention provides a high precision machining method for an X-direction reflection mirror. According to the method, the X-direction reflection mirror formed after rough machining adheres to a clamp and is fixed to a worktable of a ZeeKo seven-axis polishing machine tool; the central position of the X-direction reflection mirror is punched through the dial indicator rotation method; the upper surface of the X-direction reflection mirror is ground through an air bag type polishing head of the ZeeKo seven-axis polishing machine tool; after machining of the upper surface is completed, the 45-degree inclined surface of the X-direction reflection mirror is ground. The method has the advantages of being capable of shortening the production time and improving the production efficiency.
Description
Technical field
The present invention relates to precision processing technology, particularly a kind of X is to the high-accuracy working method of speculum.
Background technology
High-accuracy super-smooth surface manufacture needs to be realized by computer numerical control polishing CNCP technology, and what introduce herein is the CNC Bonnet Too l Polishing lathe of a kind of precision, Zeeko seven axle polishing lathe. it replaces minor diameter abrasive disk to carry out polishing by the special spherical envelope being filled with low pressure gas, function is removed in order to obtain gaussian-shape, air bag not only rotates, also add multipoint swing, air bag can fit tightly with workpiece surface, and it is even to contact region pressure distribution, thus achieve controlled Flexible Manufacture, in polishing process, the air bag axis of rotation and workpiece to be machined local normal have angle, and the precession campaign of similar gyro motion is done around this normal, in contact region, speed profile is average, form the influence function with good characteristic, thus greatly reduce finished surface face shape error, and contact region internal friction power is extended along all directions, surface to be machined texture presents the feature of homogeneity and randomness, thus extremely excellent surface quality is obtained.
Usual Zeeko seven axle polishing lathe is used for the glass planar of polishing heavy caliber, and face shape can reach 1/5th wavelength, and X described herein needs polishing 45 degree of inclined-planes to speculum processing, and face shape to be reached 1/10th wavelength. Therefore the special fixture of design and specific processing parameter is needed to realize with Zeeko seven axle polishing machine tooling X to speculum.
Summary of the invention
It is an object of the invention to provide the high-accuracy working method of a kind of X to speculum, can reduce the production time, it is to increase production efficiency.
For solving the problems of the technologies described above, first X shaping for roughing is adhered on fixture to speculum by the present invention, is fixed on the worktable of Zeeko seven axle polishing lathe; Use dial indicator spinning solution to get the central position of X to speculum, calculate starting point by this central position, then with the gasbag polishing tool grinding upper surface of X to speculum of Zeeko seven axle polishing lathe; After upper surface machines, then grind X to the 45 of speculum degree of inclined-planes.
The diameter of described gasbag polishing tool is 40mm.
Described grinding X is specially to the technical parameter of the upper surface of speculum: rotating speed S is 1800rpm, and entering speed F is 800mm/min, and step pitch �� Z is 0.3mm.
Described grinding X is specially to the technical parameter on the 45 of speculum degree of inclined-planes: rotating speed S is 1800rpm, and entering speed F is 600mm/min, and step pitch �� Z is 0.1mm.
Described fixture is the cuboid that front end has groove structure.
Described adhering method, for utilizing electric iron yellow wax evenly to drop to X to speculum outline edge place, is then cooled to normal temperature.
The surface precision of the inventive method processing optical surface of X to speculum reaches within 1/10th wavelength, compared with hand lapping, reduces the production time, it is to increase production efficiency.
Accompanying drawing explanation
Fig. 1 is the structure iron of the fixture of the present invention;
Fig. 2 is that the present invention X to be processed is to the structure iron of speculum.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
First X shaping for roughing is adhered on fixture to speculum by the present embodiment, is fixed on the worktable of Zeeko seven axle polishing lathe; Use dial indicator spinning solution to get the central position of X to speculum, calculate starting point by this central position; Then with the gasbag polishing tool grinding upper surface of X to speculum of Zeeko seven axle polishing lathe; After upper surface machines, then grind X to the 45 of speculum degree of inclined-planes.
The diameter of described gasbag polishing tool is 40mm.
Described grinding X is specially to the technical parameter of the upper surface of speculum: rotating speed S is 1800rpm, and entering speed F is 800mm/min, and step pitch �� Z is 0.3mm.
Described grinding X is specially to the technical parameter on the 45 of speculum degree of inclined-planes: rotating speed S is 1800rpm, and entering speed F is 600mm/min, and step pitch �� Z is 0.1mm.
As shown in Figure 1, described fixture is the cuboid that front end has groove structure, and long is 320mm, and wide is 80mm, and height is 20mm, groove structure width 15mm.
Described adhering method, for utilizing electric iron yellow wax evenly to drop to X to speculum outline edge place, is then placed shady and cool place, is cooled to normal temperature.
X connects method to speculum and metal fixture concrete de-: using small blade to be scraped off to the yellow wax at speculum outline edge place by X, slowly mobile X makes itself and fixture disengaging to speculum, then wipes with alcohol and is attached to X to the residual yellow wax on speculum.
Below the better embodiment of the invention has been carried out concrete explanation, but the invention is not limited to described embodiment, those of ordinary skill in the art can also make all equivalent modification or replacement under the prerequisite not running counter to the invention spirit, and these equivalent modifications or replacement are all included in the application's claim limited range.
Claims (6)
1. an X is to the high-accuracy working method of speculum, it is characterised in that, first X shaping for roughing is adhered on fixture to speculum, it is fixed on the worktable of Zeeko seven axle polishing lathe; Use dial indicator spinning solution to get the central position of X to speculum, calculate starting point by this central position; Then with the gasbag polishing tool grinding upper surface of X to speculum of Zeeko seven axle polishing lathe; After upper surface machines, then grind X to the 45 of speculum degree of inclined-planes.
2. method according to claim 1, it is characterised in that, the diameter of described gasbag polishing tool is 40mm.
3. method according to claim 2, it is characterised in that, described grinding X is specially to the technical parameter of the upper surface of speculum: rotating speed S is 1800rpm, and entering speed F is 800mm/min, and step pitch �� Z is 0.3mm.
4. method according to claim 2, it is characterised in that, described grinding X is specially to the technical parameter on the 45 of speculum degree of inclined-planes: rotating speed S is 1800rpm, and entering speed F is 600mm/min, and step pitch �� Z is 0.1mm.
5. method according to claim 1,2,3 or 4, it is characterised in that, described fixture is the cuboid that front end has groove structure.
6. method according to claim 5, it is characterised in that, described adhering method, for utilizing electric iron yellow wax evenly to drop to X to speculum outline edge place, is then cooled to normal temperature.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201511015918.4A CN105619184A (en) | 2015-12-29 | 2015-12-29 | High precision machining method for X-direction reflection mirror |
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CN201511015918.4A CN105619184A (en) | 2015-12-29 | 2015-12-29 | High precision machining method for X-direction reflection mirror |
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CN105619184A true CN105619184A (en) | 2016-06-01 |
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CN201511015918.4A Pending CN105619184A (en) | 2015-12-29 | 2015-12-29 | High precision machining method for X-direction reflection mirror |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107052948A (en) * | 2017-04-24 | 2017-08-18 | 上海现代先进超精密制造中心有限公司 | A kind of Cassegrain's primary mirror precision processing method and its matched clamp |
Citations (7)
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JPH03108331A (en) * | 1989-09-20 | 1991-05-08 | Mitsubishi Electric Corp | High precision polishing equipment |
CN102539123A (en) * | 2012-01-16 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Method for determining optical axis of large-caliber non-spherical reflecting mirror based on centering processing |
CN103056731A (en) * | 2012-12-21 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Five-axis precision ultrasonic milling machining method of large-aperture off-axis aspheric mirror |
CN103692295A (en) * | 2013-12-13 | 2014-04-02 | 上海现代先进超精密制造中心有限公司 | Optimizing processing method in super-precision convex cone mirror measuring-polishing correction system |
CN104290002A (en) * | 2013-11-28 | 2015-01-21 | 中国航空工业集团公司洛阳电光设备研究所 | Method for machining cylindrical mirror |
CN104476355A (en) * | 2014-12-09 | 2015-04-01 | 上海现代先进超精密制造中心有限公司 | Angle adjusting device and method for machining silicon carbide 45-degree reflecting mirrors |
CN104493663A (en) * | 2014-12-30 | 2015-04-08 | 上海现代先进超精密制造中心有限公司 | High-precision processing method of polarizing prism |
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2015
- 2015-12-29 CN CN201511015918.4A patent/CN105619184A/en active Pending
Patent Citations (7)
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JPH03108331A (en) * | 1989-09-20 | 1991-05-08 | Mitsubishi Electric Corp | High precision polishing equipment |
CN102539123A (en) * | 2012-01-16 | 2012-07-04 | 中国科学院西安光学精密机械研究所 | Method for determining optical axis of large-caliber non-spherical reflecting mirror based on centering processing |
CN103056731A (en) * | 2012-12-21 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Five-axis precision ultrasonic milling machining method of large-aperture off-axis aspheric mirror |
CN104290002A (en) * | 2013-11-28 | 2015-01-21 | 中国航空工业集团公司洛阳电光设备研究所 | Method for machining cylindrical mirror |
CN103692295A (en) * | 2013-12-13 | 2014-04-02 | 上海现代先进超精密制造中心有限公司 | Optimizing processing method in super-precision convex cone mirror measuring-polishing correction system |
CN104476355A (en) * | 2014-12-09 | 2015-04-01 | 上海现代先进超精密制造中心有限公司 | Angle adjusting device and method for machining silicon carbide 45-degree reflecting mirrors |
CN104493663A (en) * | 2014-12-30 | 2015-04-08 | 上海现代先进超精密制造中心有限公司 | High-precision processing method of polarizing prism |
Non-Patent Citations (1)
Title |
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计时鸣,张利等: "气囊抛光技术及其研究现状", 《机电工程》 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107052948A (en) * | 2017-04-24 | 2017-08-18 | 上海现代先进超精密制造中心有限公司 | A kind of Cassegrain's primary mirror precision processing method and its matched clamp |
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Application publication date: 20160601 |