CN105606201A - Compound MEMS bionic hydrophone - Google Patents
Compound MEMS bionic hydrophone Download PDFInfo
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- CN105606201A CN105606201A CN201610058566.9A CN201610058566A CN105606201A CN 105606201 A CN105606201 A CN 105606201A CN 201610058566 A CN201610058566 A CN 201610058566A CN 105606201 A CN105606201 A CN 105606201A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
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Abstract
The invention discloses a compound MEMS bionic hydrophone, for solving the problems of single function of measuring sound field vector information, not ideal sensitivity and frequency response bandwidth, portside and starboard fuzziness and the like existing in a conventional MEMS vector hydrophone. The hydrophone comprises bottom-layer silicon, an oxidation insulation layer and top-layer silicon, four groups of four-beam cilia type acoustoelectric energy conversion structures are uniformly distributed on the top-layer silicon, and the oxidation insulation layer right below the four groups of four-beam cilia type acoustoelectric energy conversion structures is etched away; four cavities are uniformly distributed on the oxidation insulation layer, upper electrodes and lower electrodes are sputtered at positions, right opposite to each cavity, on the top-layer silicon and the bottom-layer silicon, and four oil filler holes communicating with the cavities are uniformly distributed around each upper electrode on the top-layer silicon. The hydrophone provided by the invention is simple in structure, greatly widens the effective frequency band scope, facilitates installation and testing due to monolithic integration, improves the installation precision, finally realizes a sensor array in a small volume through a single sensor, and overcomes inconsistency of each hydrophone in a conventional array.
Description
Technical field
The present invention relates to the bionical hydrophone technical field of MEMS, specifically the bionical hydrophone of a kind of combined type MEMS.
Background technology
Vector sensor has the effect that underwater sound source target is positioned, and goes for all kinds of civilian ships and keeps awayBarrier, fishery is fished for, the visual plant of seafari. Along with the rise of micro electronmechanical MEMS industry, vector hydrophone is gradually to miniatureChange, integrated direction development, have military and civilian prospect widely. Because existing MEMS vector hydrophone can only be surveyed sound field arrowAmount information and sensitivity and frequency response bandwidth are all undesirable, have the defects such as port and starboard ambiguity. But tested sameCheng Zhong, tends to size and the different situation of frequency of the sound-source signal that runs into a lot of required measurements, and need to be to soundSignal is located accurately. In these occasions, be difficult to meet test request with a vector hydrophone.
Summary of the invention
The object of the invention is can only survey sound field Vector Message, sensitivity and frequency in order to solve existing MEMS vector hydrophoneRate responsive bandwidth is the problem such as undesirable and port and starboard ambiguity all, and the bionical hydrophone of a kind of combined type MEMS is provided.
The present invention is achieved through the following technical solutions:
The bionical hydrophone of a kind of combined type MEMS, comprises circular bottom silicon, and on bottom silicon, oxidation has oxidation insulating layer, oxidationOn insulating barrier, bonding has circular top layer silicon (top layer silicon also claims film); The middle part of top layer silicon has four group four by ranks arranged in formBeam cilium formula acoustic-electric transducing structure, four group of four beam cilium formula acoustic-electric transducing structure is arranged symmetrically with the center of circle of top layer silicon, four group fourOxidation insulating layer under beam cilium formula acoustic-electric transducing structure is etched away, wherein, and four described beam cilium formula acoustic-electric transducingsStructure comprises the square window being opened in top layer silicon, and the center of square window is provided with foursquare center connector,Four limits of center connector are connected with four limits of square window by four cantilever beams, and center connector is provided with cilium, outstandingThe two ends of arm beam are respectively equipped with a piezo-resistance, wherein four piezo-resistances composition survey directions X signals Wheatstone bridge,Remain four piezo-resistance compositions and survey Wheatstone bridge (square window, center connector, cantilever beam, the fibre of Y-direction signalHair and piezo-resistance are made by MEMS technique and diffusion technique); Four group of four beam cilium formula acoustic-electric transducing structureFour cilium varying lengths (density of cilium and water approach); On oxidation insulating layer, be evenly equipped with four oxidized quarters at its peripheral regionErosion cavity, on the end face of top layer silicon just to the position of each cavity respectively sputter have top electrode, just right on the bottom surface of bottom siliconThe position of each cavity respectively sputter has the diameter of the upper and lower electrode of bottom electrode to be all less than the diameter of cavity; In top layer silicon around oftenThe surrounding of individual top electrode is evenly equipped with four oil filler points that run through top layer silicon and communicate with cavity.
What the present invention designed is the height of a kind of single chip integrated pressure-sensitive silicon micro capacitor and cilium and rood beam transducing micro-structuralSensitivity wide-range hydrophone, the vector hydrophone in this monolithic integration composite range vector hydrophone adopts four beam cilium formula soundElectricity transducing structure, and four beam cilium formula acoustic-electric transducing structures are arranged to array format, four four beam cilium formula acoustic-electric transducing knotsStructure is arranged symmetrically with, and the cilium of each structure is different in size, structurally between the Wheatstone bridge on each road, all adopts shape in parallelFormula; Pressure hydrophone adopts condenser type transducing structure, for improving its load performance on film (film refers to top layer silicon, lower same)Each cavity place opens four oil filler points, keeps the inside and outside hydrodynamic balance of film.
As preferred version, the half that the diameter of upper and lower electrode is cavity diameter. Through a large amount of theory analysis and continuousVerification experimental verification, find to be when the diameter of upper and lower electrode a half of cavity diameter, it is best that its sensitivity and conversion ratio reachCounterbalance effect.
As preferred version, in top layer silicon, be etched with annular isolation groove outward around each top electrode and four oil filler points thereof,The diameter of annular isolation groove is greater than the diameter of its corresponding cavity. The advantage of design is like this: top layer silicon is semiconductor, by ringShape isolation channel is scratched and can be avoided producing excessive parasitic capacitance; Top layer silicon membrane structure is relatively independent, and vibration characteristics is not subject to weekEnclose impact.
Traditional MEMS vector hydrophone only can receive Vector Message, and directive property has symmetry (Fig. 3), an existence left sideThe problem that starboard is fuzzy, in the time of itself and sound pressure signal Combined Treatment (Fig. 4), the problem of port and starboard ambiguity has not just existed.
Vector part in hydrophone of the present invention:
Utilize ANSYS finite element software labor, determined the size of micro-structural: the length of side of center connector is 600 μ m, thickDegree is 40 μ m, and the length of cantilever beam is that 1000 μ m, width are that 120 μ m, thickness are 40 μ m.
Capacitive part in hydrophone of the present invention:
When external acoustic waves signal function is in film surface, cause vibration of thin membrane generation deflection, between upper/lower electrode because of deflection drive electricityThe change of die opening, thus alternation electric capacity produced. By four arm impedance circuits, realize the output voltage that detects of capacitance variationsThe detection changing, thus realize acoustic energy to electric transformation of energy. The resonant frequency of low frequency capacitance sensor is that this capacitance sensor is establishedThe starting point of meter, therefore determines that its resonant frequency is very important to this low frequency capacitance sensor. For the circle of a periphery fixedShape thin plate, the resonant frequency equation that thin plate is minimum is:
By ANASYSworkbench14.5, the membrane structure of electric capacity is set up to finite element analysis model, come by emulationProof theory analysis and determine capacitor size parameter: the diameter of film (being circular top layer silicon) is that 2mm, thickness are 0.002mm,Cavity height on oxidation insulating layer is 2 μ m, and the diameter of oil filler point is 0.2mm. To membrane structure carry out stress analysis, mode is dividedAnalyse and path analysis. Obtain its single order mode figure (Fig. 5) and displacement diagram (Fig. 6), thereby draw the intrinsic frequency of membrane structureAnd deformation quantity. The Helmholtz resonant cavity that oil filler hole structure on this film and cavity form frequency be 2.38MHz, far awayThe low frequency capacitance sensor that is 3K much larger than operating frequency. This shows, this Helmholtz resonance sound-absorbing structure is low to thisFrequently the work of capacitance sensor does not form impact. Doing the used time without extraneous ultrasonic sound pressure signal, the absolute capacitance of this low frequency electric capacityValue is 5.09pF, additional 10V voltage, and the capacitance under 1Pa active force is 5.24pF, capacitance change is 0.15pF, canThe sensitivity that obtains this low frequency capacitance sensor is-142.7dB.
Thereby the present invention is integrated together capacitor hydrophone and vector hydrophone this compound hydrophone can be surveyedVector Message again can mark amount information. Hydrophone of the present invention, owing to surveying sound field acoustic pressure and acoustic pressure gradient information by synchronous coordination, is separatedThe determined problem of existing hydrophone port and starboard ambiguity. The bionical hydrophone structure of combined type MEMS of the present invention is simple, widens greatlyEffective band scope, the integrated Installation And Test of being convenient to of monolithic, has improved installation accuracy, has finally realized little with single-sensorSensor group battle array in volume, has overcome the inconsistency of each hydrophone in traditional group battle array. With its production and processingVector sensor range of application is wide, goes for all kinds of civilian ships and keeps away barrier, and fishery is fished for, and the important of seafari establishedStandby.
Brief description of the drawings
Fig. 1 is the structural representation of hydrophone of the present invention.
Fig. 2 is the A-A cutaway view in Fig. 1.
Fig. 3 is traditional MEMS vector hydrophone directivity pattern.
Fig. 4 is vibration velocity signal and sound pressure signal Combined Treatment directivity pattern.
Fig. 5 is the single order mode figure of capacitor hydrophone model.
Fig. 6 is the displacement diagram of capacitor hydrophone model.
In figure: 1-bottom silicon, 2-oxidation insulating layer, 3-top layer silicon, 4-tetra-beam cilium formula acoustic-electric transducing structures, 4-1-cantileverBeam, 4-2-cilium, 4-3-center connector, 4-4-square window, 5-cavity, 6-top electrode, 7-bottom electrode, 8-oil filler point,9-annular isolation groove.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is further illustrated:
As shown in Figure 1, 2, the bionical hydrophone of a kind of combined type MEMS, comprises circular bottom silicon 1, on bottom silicon 1, is oxidized and hasOxidation insulating layer 2, on oxidation insulating layer 2, bonding has circular top layer silicon 3; The middle part of top layer silicon 3 has four by ranks arranged in formOrganize 4, four group of four beam cilium formula acoustic-electric transducing structure 4 of four beam cilium formula acoustic-electric transducing structures and be arranged symmetrically with the center of circle of top layer silicon 3,Wherein, four described beam cilium formula acoustic-electric transducing structures 4 comprise the square window 4-4 being opened in top layer silicon 3, square windowThe center of mouthful 4-4 is provided with foursquare center connector 4-3, four limits of center connector 4-3 by four cantilever beam 4-1 withFour limits of square window 4-4 connect, and center connector 4-3 is provided with cilium 4-2, and the two ends of cantilever beam 4-1 are respectively equipped with oneIndividual piezo-resistance, wherein four piezo-resistances compositions of Wheatstone bridge, residue of four piezo-resistance composition detection directions X signalsSurvey the Wheatstone bridge of Y-direction signal; Oxidation insulating layer 2 under four group of four beam cilium formula acoustic-electric transducing structure 4 is carvedEating away; Four cilium 4-2 varying lengths of four group of four beam cilium formula acoustic-electric transducing structure 4; On oxidation insulating layer 2 at its peripheral regionBe evenly equipped with the cavity 5 of four oxidized etchings, on the end face of top layer silicon 3 just to the position of each cavity 5 respectively sputter power onThe utmost point 6, on the bottom surface of bottom silicon 1 just to the position of each cavity 5 respectively sputter have bottom electrode 7, the diameter of upper and lower electrode 6,7 is equalBe less than the diameter of cavity 5; In top layer silicon 3, be evenly equipped with four around the surrounding of each top electrode 6 and run through top layer silicon 3 and and cavity5 oil filler points that communicate 8.
When concrete enforcement, the diameter of upper and lower electrode 6,7 is the half of cavity 5 diameters; In top layer silicon 3, power on around eachThe outer annular isolation grooves 9 that are etched with of the utmost point 6 and four oil filler points 8 thereof, the diameter of annular isolation groove 9 is greater than the straight of cavity 5 that it is correspondingFootpath. In four beam cilium formula acoustic-electric transducing structures 4, the length of side of center connector 4-3 is that 600 μ m, thickness are 40 μ m, cantilever beam 4-1Length be that 1000 μ m, width are that 120 μ m, thickness are 40 μ m; The diameter of circular top layer silicon 3 is that 2mm, thickness are 0.002mm,Cavity 5 on oxidation insulating layer 2 is highly 2 μ m, and the diameter of oil filler point 8 is 0.2mm.
Claims (5)
1. the bionical hydrophone of combined type MEMS, is characterized in that: comprise circular bottom silicon (1), at the upper oxygen of bottom silicon (1)Change and have oxidation insulating layer (2), the upper bonding of oxidation insulating layer (2) has circular top layer silicon (3); Ranks are pressed at the middle part of top layer silicon (3)Arranged in form has four group of four beam cilium formula acoustic-electric transducing structure (4), and four group of four beam cilium formula acoustic-electric transducing structure (4) is with top layer silicon(3) the center of circle is arranged symmetrically with, and the oxidation insulating layer (2) under four group of four beam cilium formula acoustic-electric transducing structure (4) is etched away;Four ciliums (4-2) varying length of four group of four beam cilium formula acoustic-electric transducing structure (4); Oxidation insulating layer (2) is upper at its peripheryThe cavity (5) that place is evenly equipped with four oxidized etchings, just spatters respectively the position of each cavity (5) on the end face of top layer silicon (3)Penetrated top electrode (6), on the bottom surface of bottom silicon (1) just to the position of each cavity (5) respectively sputter have bottom electrode (7), upper and lowerThe diameter of electrode (6,7) is all less than the diameter of cavity (5); Top layer silicon (3) is upper to be evenly equipped with around the surrounding of each top electrode (6)Four oil filler points (8) that run through top layer silicon (3) and communicate with cavity (5).
2. the bionical hydrophone of combined type MEMS according to claim 1, is characterized in that: the diameter of upper and lower electrode (6,7)For the half of cavity (5) diameter.
3. the bionical hydrophone of combined type MEMS according to claim 1 and 2, is characterized in that: top layer silicon (3) is upper around oftenThe outer annular isolation groove (9) that is etched with of individual top electrode (6) and four oil filler points (8) thereof, the diameter of annular isolation groove (9) is greater than that it is rightThe diameter of the cavity (5) of answering.
4. the bionical hydrophone of combined type MEMS according to claim 1 and 2, is characterized in that: four beam cilium formula acoustic-electrics changeIn energy structure (4), the length of side of center connector (4-3) is that 600 μ m, thickness are 40 μ m, and the length of cantilever beam (4-1) is 1000 μM, width are that 120 μ m, thickness are 40 μ m; The diameter of circular top layer silicon (3) is that 2mm, thickness are 0.002mm, oxidation insulating layer(2) cavity (5) on is highly 2 μ m, and the diameter of oil filler point (8) is 0.2mm.
5. the bionical hydrophone of combined type MEMS according to claim 3, is characterized in that: four beam cilium formula acoustic-electric transducing knotsIn structure (4), the length of side of center connector (4-3) is that 600 μ m, thickness are 40 μ m, and the length of cantilever beam (4-1) is 1000 μ m, wideDegree is that 120 μ m, thickness are 40 μ m; The diameter of circular top layer silicon (3) is that 2mm, thickness are 0.002mm, on oxidation insulating layer (2)Cavity (5) be highly 2 μ m, the diameter of oil filler point (8) is 0.2mm.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109413559A (en) * | 2018-08-30 | 2019-03-01 | 南京粒子声学科技有限公司 | A kind of device for realizing vector sensor calibration using Helmholtz silencer |
| CN109855721A (en) * | 2019-02-01 | 2019-06-07 | 中北大学 | Condenser type pressure hydrophone based on MEMS technology and preparation method thereof |
| CN110850111A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN112903087A (en) * | 2021-01-18 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS monolithic integration standard vector composite acoustic wave sensor and processing method thereof |
| CN114001814A (en) * | 2021-11-18 | 2022-02-01 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5894090A (en) * | 1996-05-31 | 1999-04-13 | California Institute Of Technology | Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same |
| JP2007052013A (en) * | 2005-08-08 | 2007-03-01 | Litton Syst Inc | Ring resonator gyroscope comprising cylindrical ring suspension |
| CN102103013A (en) * | 2010-12-10 | 2011-06-22 | 中北大学 | Three-dimensional vector hydrophone |
| CN102426054A (en) * | 2011-10-29 | 2012-04-25 | 中北大学 | Monolithic integration composite range vector hydrophone |
| CN103064060A (en) * | 2012-12-20 | 2013-04-24 | 中北大学 | Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure |
| CN103471700A (en) * | 2013-09-02 | 2013-12-25 | 中国船舶重工集团公司第七一〇研究所 | Compound type scalar vector hydrophone |
| CN104062632A (en) * | 2014-05-28 | 2014-09-24 | 苏州中盛纳米科技有限公司 | Microstructure of four-cilium bionic MEMS vector acoustic sensor |
-
2016
- 2016-01-28 CN CN201610058566.9A patent/CN105606201B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5894090A (en) * | 1996-05-31 | 1999-04-13 | California Institute Of Technology | Silicon bulk micromachined, symmetric, degenerate vibratorygyroscope, accelerometer and sensor and method for using the same |
| JP2007052013A (en) * | 2005-08-08 | 2007-03-01 | Litton Syst Inc | Ring resonator gyroscope comprising cylindrical ring suspension |
| CN102103013A (en) * | 2010-12-10 | 2011-06-22 | 中北大学 | Three-dimensional vector hydrophone |
| CN102426054A (en) * | 2011-10-29 | 2012-04-25 | 中北大学 | Monolithic integration composite range vector hydrophone |
| CN103064060A (en) * | 2012-12-20 | 2013-04-24 | 中北大学 | Quaternary array micro-electromechanical system (MEMS) vector hydrophone microstructure |
| CN103471700A (en) * | 2013-09-02 | 2013-12-25 | 中国船舶重工集团公司第七一〇研究所 | Compound type scalar vector hydrophone |
| CN104062632A (en) * | 2014-05-28 | 2014-09-24 | 苏州中盛纳米科技有限公司 | Microstructure of four-cilium bionic MEMS vector acoustic sensor |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109413559A (en) * | 2018-08-30 | 2019-03-01 | 南京粒子声学科技有限公司 | A kind of device for realizing vector sensor calibration using Helmholtz silencer |
| CN109855721A (en) * | 2019-02-01 | 2019-06-07 | 中北大学 | Condenser type pressure hydrophone based on MEMS technology and preparation method thereof |
| CN110850111A (en) * | 2019-10-09 | 2020-02-28 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN110850111B (en) * | 2019-10-09 | 2021-03-23 | 东南大学 | Rotary array device based on bionic resonance hair sensor |
| CN112903087A (en) * | 2021-01-18 | 2021-06-04 | 中国兵器工业集团第二一四研究所苏州研发中心 | MEMS monolithic integration standard vector composite acoustic wave sensor and processing method thereof |
| CN114001814A (en) * | 2021-11-18 | 2022-02-01 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
| CN114001814B (en) * | 2021-11-18 | 2023-08-15 | 湖北工业大学 | F-P interference-based composite MEMS vector hydrophone |
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