CN105600446B - Substrate temporary storage device - Google Patents
Substrate temporary storage device Download PDFInfo
- Publication number
- CN105600446B CN105600446B CN201610003302.3A CN201610003302A CN105600446B CN 105600446 B CN105600446 B CN 105600446B CN 201610003302 A CN201610003302 A CN 201610003302A CN 105600446 B CN105600446 B CN 105600446B
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- CN
- China
- Prior art keywords
- substrate
- plummer
- storage device
- temporary storage
- casing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
Abstract
The present invention provides a kind of substrate temporary storage device, upper and lower plummer and dividing plate including casing and in casing, the upper and lower plummer can independently rotate in casing, so as to ensure the processing procedure direction of substrate, the upper wall of the casing is provided with blower fan filter module, first, second air vent is respectively equipped with the lower wall of the dividing plate and casing, so that the environment of upper and lower plummer is in the state of air circulation, it is ensured that substrate temporary storage device internal environment is cleaned；The substrate temporary storage device, for the production production capacity of display device in the production producing line of display device, can be improved, processing time and abnormality processing time is saved.
Description
Technical field
The present invention relates to the manufacture field of display device, more particularly to a kind of substrate temporary storage device.
Background technology
Type flat panel display apparatus on existing market mainly includes liquid crystal display device (Liquid Crystal
Display, LCD) and Organic Light Emitting Diode (Organic Light-Emitting Diode, OLED).LCD includes liquid crystal
Show panel and backlight module (backlight module).The operation principle of liquid crystal display panel is in the parallel glass base of two panels
Liquid crystal molecule is placed among plate, whether is powered to controlling liquid crystal molecule to change direction by glass substrate, by the light of backlight module
Line reflects generation picture.OLED possesses the characteristics such as self-luminous, high brightness, wide viewing angle, high-contrast, deflection, low energy consumption,
Therefore widely paid close attention to, and as the display mode of a new generation, have started to gradually replace conventional liquid crystal, it is extensive
Apply in mobile phone screen, computer monitor, full-color TV etc..OLED Display Techniques are different from traditional lcd technology, nothing
Need backlight, using very thin coating of organic material and glass substrate, when have electric current by when, these organic materials will be sent out
Light.
On the making production line of display, because the structure of display includes substantial amounts of base plate class member, such as glass base
Plate, color membrane substrates and array base palte etc., therefore the transmission of each base plate class member on a production line turns into the important of display production
Link, and the substrate temporary storage device for being used to play caching effect in transmit process also turns into essential during display is produced
Equipment.
For example, in LCD production process, in laser annealing processing procedure, two annealing dresses of every cleaning device correspondence
Put, if lacking substrate temporary storage device, when a cleaning device occurs when machine, then two annealing devices can be caused to be in idle running
State, wastes board up time (Up Time)；Or, when have substrate need rework (Rework) when, if lack substrate delay
Cryopreservation device, then need from a upper website to transport substrate to lower website that processing time can be delayed；Again or, when board has different
When often occurring, if lacking substrate temporary storage device, substrate can not be taken out in time and check abnormal conditions.
The content of the invention
It is an object of the invention to provide a kind of substrate temporary storage device, in the production producing line of display device, Ke Yiti
Production production capacity, saving processing time and the abnormality processing time of high display device.
To achieve the above object, the present invention provides a kind of substrate temporary storage device, including casing, the upper carrying in casing
Platform, the lower plummer in casing and below the upper plummer and it is fixed on the casing and upper and lower is held positioned at described
Dividing plate between microscope carrier；
The casing be before and after be respectively equipped with opening portion, the casing includes upper wall, lower wall, left side wall and right side wall；
The upper and lower plummer has been respectively arranged below first and second rotary shaft, and the upper and lower plummer can be rotating around institute
First and second rotary shaft is stated in independently being rotated in the box house in horizontal plane；
The substrate temporary storage device is positioned near the manipulator of board, so that when necessary can be by manipulator by the machine
Substrate in platform is placed on the upper and lower plummer of substrate temporary storage device via towards the opening portion of the board；Or pass through the machine
The substrate being placed on upper and lower plummer is taken out and put back in the board by the manipulator of platform；Or substrate is placed into substrate delayed
After on the upper and lower plummer of cryopreservation device, the upper and lower plummer is set to horizontally rotate 180 °, then pass through adjacent another board
Manipulator shifts substrate via towards the opening portion of another board.
The upper and lower plummer is parallel to each other provided with several and through the first of the upper and lower plummer front/rear end
Groove, the boss of the first groove both sides, which is provided with the second groove, second groove, is provided with several thimbles；
The mechanical arm of the first groove correspondence manipulator is set, and is positioned over substrate using manipulator described upper and lower
When on plummer, the front/rear end of upper and lower plummer is respectively facing opening portion first, mechanical arm is stretched into described first recessed
In groove, the substrate on manipulator is supported by the thimble in the second groove of boss or boss, then makes mechanical arm from first
Extracted out in groove, so that substrate is positioned on the upper and lower plummer.
The thimble has vacuum suction effect.
Visual windows are provided with the left side wall and right side wall of the casing.
Several blower fan filter modules are installed on the upper wall of the casing.
Region and the fringe region positioned at central area surrounding centered on the separator lined, the fringe region of the dividing plate
It is upper that there are several first air vents；The central area of the dividing plate is solid plate.
Several second air vents are evenly distributed with the bottom wall.
The upper plummer and lower plummer include four the first grooves and are located at four first groove both sides respectively
Five boss on five the second grooves.
Beneficial effects of the present invention：The substrate temporary storage device of the present invention, including casing and upper and lower in casing are held
Microscope carrier and dividing plate, the upper and lower plummer can independently rotate in casing, described so as to ensure the processing procedure direction of substrate
The upper wall of casing is provided with blower fan filter module, the lower wall of the dividing plate and casing and is respectively equipped with first, second air vent, from
And the environment of upper and lower plummer is in the state of air circulation, it is ensured that substrate temporary storage device internal environment is cleaned；The substrate delays
Cryopreservation device, for the production production capacity of display device in the production producing line of display device, can be improved, processing time and exception is saved
Processing time.
Brief description of the drawings
In order to be able to be further understood that the feature and technology contents of the present invention, refer to below in connection with the detailed of the present invention
Illustrate and accompanying drawing, however accompanying drawing only provide with reference to and explanation use, not for being any limitation as to the present invention.
In accompanying drawing,
Fig. 1-2 is the dimensional structure diagram of the different angles of the substrate temporary storage device of the present invention；
Fig. 3 for the present invention substrate temporary storage device in upper and lower plummer dimensional structure diagram；
Fig. 4 is arranged between two same process when being applied to the production of display device for the substrate temporary storage device of the present invention
Schematic diagram；
Fig. 5 is arranged at two website up and down of producing line when being applied to the production of display device for the substrate temporary storage device of the present invention
Between schematic diagram；
Fig. 6 is arranged at the signal of a main engine bed side when being applied to the production of display device for the substrate temporary storage device of the present invention
Figure.
Embodiment
Further to illustrate the technological means and its effect of the invention taken, below in conjunction with being preferable to carry out for the present invention
Example and its accompanying drawing are described in detail.
Refer to Fig. 1 to Fig. 2, the present invention provides a kind of substrate temporary storage device, including it is casing 10, upper in casing 10
Plummer 20, the lower plummer 30 in the casing 10 and positioned at the upper lower section of plummer 20 and be fixed on the casing 10 and
Dividing plate 40 between the upper and lower plummer 20,30；
The casing 10 is is respectively equipped with opening portion 100 before and after front and rear, and the casing 10 is by upper wall 11, lower wall 12, left
Side wall 13 and right side wall 14 are constituted, and the opening portion 100 is crossed by upper wall 11, lower wall 12, left side wall 13 and right side wall 14；
The upper and lower plummer 20,30 has been respectively arranged below first and second rotary shaft 50,60, the upper and lower plummer
20th, 30 can rotating around first and second rotary shaft 50,60 in horizontal plane the internal independence of casing 10 rotate；
The substrate temporary storage device is applied to be positioned near the manipulator of board during the production of display device, so that must
The substrate in board can be placed into by substrate temporary storage device via the opening portion 100 towards the board by manipulator when wanting
On upper and lower plummer 20,30；Or put the substrate being placed on upper and lower plummer 20,30 taking-up by the manipulator of board
Return in the board；Or after substrate is placed on the upper and lower plummer 20,30 of substrate temporary storage device, make the upper and lower carrying
Platform 20,30 rotates 180 °, then is turned substrate by the opening portion 100 towards another board by the manipulator of adjacent another board
Move；It can ensure that substrate is taken out by posterior manipulator by the rotation of the upper and lower plummer 20,30 of the substrate temporary storage device
When, the relative position of substrate on a robotic arm is constant, and the position that substrate is put into board by manipulator is then constant, so as to ensure glass
It is constant in the processing procedure direction of device interior.
As shown in figure 3, the upper and lower plummer 20,30 is parallel to each other provided with several and through the upper and lower plummer
20th, the first groove 210 of 30 front/rear ends, the boss of the both sides of the first groove 210 is provided with the second groove 220, and described the
Several thimbles 221 are provided with two grooves 220；
The mechanical arm that first groove 210 corresponds to manipulator is set, substrate is positioned on described using manipulator,
When on lower plummer 20,30, the front/rear end of upper and lower plummer 20,30 is respectively facing opening portion 100 first, make manipulator
Mechanical arm stretch into first groove 210, the substrate on manipulator is by the top in the second groove 220 of boss or boss
Pin 221 is supported, and mechanical arm is extracted out out of first groove 220, so that substrate is positioned over into the upper and lower plummer
20th, on 30.
Specifically, the thimble 231 is acted on vacuum suction.
Specifically, visual windows 101 are provided with the left side wall 13 and right side wall 14 of the casing 10, so as to be made for industry
Member checks substrate disorder in time.
Specifically, be provided with the upper wall 11 of the casing 10 several blower fan filter modules (Fan Filter Units,
FFU)；The dividing plate 40 is divided into central area and the fringe region positioned at central area surrounding, the fringe region of the dividing plate
It is upper that there are several first air vents 401, upper layer of air can be promoted to circulate downwards；The central area of the dividing plate 40 is solid plate, is used
Fallen in preventing the particle on upper strata on the substrate on lower plummer 30；Several second ventilations are evenly distributed with the bottom wall 12
Hole 402, accepts air and circulates downwards, the environment of whole plummer is in circulation status up and down, it is ensured that plummer internal environment
Cleaning.
Specifically, in the present embodiment by the manipulator with four mechanical arms come transfer base substrate, then it is described on hold
Microscope carrier 20 and lower plummer 30 include four the first grooves 210 and are located at five of four the first grooves 210 both sides respectively
Five the second grooves 220 on boss, four mechanical arms of four the first grooves 210 correspondence manipulator.
Specifically, when the substrate temporary storage device is applied to the production of display device, may be disposed between two identical boards,
Enable to two equipment to turn into standby mutually, when a certain board is when machine, can be made by substrate temporary storage device another
Board composition is standby, from the subsequent production of processing procedure where the board without influenceing to deserve machine, improves production capacity；For example, such as Fig. 4 institutes
Show, board A1 processing procedures together with board B1 compositions, board A2 and board B2 constitute another road processing procedure of identical, and wherein board A1 is real
Border is available for two board B1 work, board A1 and the machinery corresponding to manipulator 1, board A2 and board B2 corresponding to board B1
Hand 2 includes four mechanical arms, when board A1 occurs abnormal, and the board A2 of adjacent processing procedure can turn into board A1 guest machine
Platform proceeds processing procedure to supply two B1；In transmission process, the substrate in processing procedure where board A1 is positioned over by manipulator 1
On the upper plummer 20 of substrate temporary storage device, taken out after upper plummer rotates 180 ° by another manipulator 2 and be put into adjacent processing procedure
Board A2 in, treat board A2 processing after the completion of, manipulator 2 take out substrate be put on lower floor's plummer 30, after rotation 180 ° after
Taken out in the board B1 for putting back to former processing procedure and handled by former manipulator 1, so as to prevent that the exception due to board A1 from causing board
B1 boards dally, and waste board up time, and improve production capacity.
Specifically, the substrate temporary storage device can be additionally used between adjacent two website of producing line, when substrate needs rework,
Substrate can be sent back to from next website by a upper website by the substrate temporary storage device, turned after after heavy industry, then from a upper website
Next website is sent to, processing time is saved, so as to improve the production production capacity of display device, save processing time and abnormality processing
Time；For example, as shown in figure 5, when main engine bed 1 and main engine bed 2 is site apparatus up and down, will can need the substrate of heavy industry directly from
Next website returns to a website, and manipulator 2 takes out glass from main engine bed 2 and is put on upper plummer 20, upper plummer 20
Take out to be put into board 1 by another manipulator 1 after 180 ° of rotation and carry out heavy industry, after the completion of lower plummer 30 is put into by manipulator 1
On, after lower plummer 30 rotates 180 °, fetched by former manipulator 2, complete processing procedure, so as to save processing time, improve board
Efficiency and production capacity.
Specifically, the substrate temporary storage device has storage effect, the substrate in board can be made to take out in time, be easy to fast
The exception of speed processing board and substrate；For example, as described in Figure 6, substrate temporary storage device is set up in the side of main engine bed 1, can be in main frame
Platform 1 is abnormal when machine, takes out substrate quickly through manipulator 1 and is put on the upper and lower plummer 20,30 of substrate temporary storage device,
Glass is checked from the visual window of the left and right side wall 13,14 of substrate temporary storage device, also can the 90 ° or 180 ° upper and lower plummers of rotation
20th, 30 from different position detection substrates, quickly to clear unit exception or substrate disorder, and solve in time.
In summary, substrate temporary storage device of the invention, including casing and upper and lower plummer in casing and every
Plate, the upper and lower plummer can independently rotate in casing, so as to ensure the processing procedure direction of substrate, the casing it is upper
Wall is provided with blower fan filter module, the lower wall of the dividing plate and casing and is respectively equipped with first, second air vent, so that upper,
The environment of lower plummer is in the state of air circulation, it is ensured that substrate temporary storage device internal environment is cleaned；The substrate temporary storage device,
During for the production production capacity of display device in the production producing line of display device, can be improved, processing time and abnormality processing is saved
Between.
It is described above, for the person of ordinary skill of the art, can be with technique according to the invention scheme and technology
Other various corresponding changes and deformation are made in design, and all these changes and deformation should all belong to appended right of the invention
It is required that protection domain.
Claims (7)
1. a kind of substrate temporary storage device, it is characterised in that upper plummer (20) including casing (10), in casing (10),
Lower plummer (30) in the casing (10) and below upper plummer (20) and it is fixed on the casing (10) and position
Dividing plate (40) between the upper and lower plummer (20,30)；
Be respectively equipped with opening portion (100) before and after the casing (10), the casing (10) include upper wall (11), lower wall (12),
Left side wall (13) and right side wall (14)；
The upper and lower plummer (20,30) has been respectively arranged below first and second rotary shaft (50,60), the upper and lower plummer
(20,30) can rotating around first and second rotary shaft (50,60) in horizontal plane the casing (10) internal independence rotate；
The substrate temporary storage device is positioned near the manipulator of board, can by manipulator by the substrate in board via towards
The opening portion (100) of the board is placed on the upper and lower plummer of substrate temporary storage device (20,30)；Or the machinery for passing through board
The substrate being placed on upper and lower plummer (20,30) is taken out and put back in the board by hand；Or substrate is placed into substrate caching
After on the upper and lower plummer (20,30) of device, the upper and lower plummer (20,30) is set to horizontally rotate 180 °, then pass through phase
The manipulator of adjacent another board shifts substrate via towards the opening portion of another board (100)；
The upper and lower plummer (20,30) is parallel to each other provided with several and before and after the upper and lower plummer (20,30)
The first groove (210) of end face, the boss of the first groove (210) both sides is provided with the second groove (220), and described second is recessed
Several thimbles (221) are provided with groove (220)；
The mechanical arm of first groove (210) the correspondence manipulator is set, and is positioned over substrate using manipulator described upper and lower
When on plummer (20,30), the front/rear end of upper and lower plummer (20,30) is respectively facing opening portion (100) first, make machine
Tool arm is stretched into first groove (210), and the substrate on manipulator is by the top in the second groove (220) of boss or boss
Pin (221) is supported, and mechanical arm is extracted out out of the first groove (210), so that substrate is positioned over into described upper and lower hold
On microscope carrier (20,30).
2. substrate temporary storage device as claimed in claim 1, it is characterised in that the thimble (221) acts on vacuum suction.
3. substrate temporary storage device as claimed in claim 1, it is characterised in that the left side wall (13) of the casing (10) and right side
Visual windows (101) are provided with wall (14).
4. substrate temporary storage device as claimed in claim 1, it is characterised in that be provided with the upper wall (11) of the casing (10)
Several blower fan filter modules.
5. substrate temporary storage device as claimed in claim 1, it is characterised in that the dividing plate (40) is divided into central area and position
In on the fringe region of central area surrounding, the fringe region of the dividing plate (40) have several first air vents (401)；It is described
The central area of dividing plate (40) is solid plate.
6. substrate temporary storage device as claimed in claim 5, it is characterised in that several are evenly distributed with the lower wall (12)
Two air vents (402).
7. substrate temporary storage device as claimed in claim 1, it is characterised in that the upper plummer (20) and lower plummer (30)
Including four article of first groove (210) and respectively five articles on five articles of boss of four article of first groove (210) both sides the
Two grooves (220).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610003302.3A CN105600446B (en) | 2016-01-04 | 2016-01-04 | Substrate temporary storage device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610003302.3A CN105600446B (en) | 2016-01-04 | 2016-01-04 | Substrate temporary storage device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105600446A CN105600446A (en) | 2016-05-25 |
| CN105600446B true CN105600446B (en) | 2017-11-03 |
Family
ID=55980899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610003302.3A Active CN105600446B (en) | 2016-01-04 | 2016-01-04 | Substrate temporary storage device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105600446B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106428916B (en) * | 2016-10-27 | 2018-10-19 | 武汉华星光电技术有限公司 | A kind of substrate carriers and substrate transferring box |
| CN107554929B (en) * | 2017-08-21 | 2020-03-10 | 武汉华星光电技术有限公司 | Cache box, cache box control unit and working method |
| CN110534665B (en) * | 2019-07-16 | 2022-04-05 | 福建华佳彩有限公司 | Substrate arrangement caching device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW471008B (en) * | 1999-07-09 | 2002-01-01 | Tokyo Electron Ltd | Substrate transport device |
| CN1971843A (en) * | 2005-11-24 | 2007-05-30 | 东京毅力科创株式会社 | Substrate treatment apparatus and substrate treatment method |
| CN102064126A (en) * | 2010-11-04 | 2011-05-18 | 友达光电股份有限公司 | System for processing base plate conveyance and method |
| CN202011556U (en) * | 2011-03-18 | 2011-10-19 | 武汉耀华安全玻璃有限公司 | Loading and downloading buffering table for glass finished products |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100713811B1 (en) * | 2005-07-07 | 2007-05-02 | 주식회사 태성기연 | Apparatus for turning of direction of glass panel |
| US20070020067A1 (en) * | 2005-07-22 | 2007-01-25 | Au Optronics Corporation | Storage cassette for large panel glass substrates |
-
2016
- 2016-01-04 CN CN201610003302.3A patent/CN105600446B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TW471008B (en) * | 1999-07-09 | 2002-01-01 | Tokyo Electron Ltd | Substrate transport device |
| CN1971843A (en) * | 2005-11-24 | 2007-05-30 | 东京毅力科创株式会社 | Substrate treatment apparatus and substrate treatment method |
| CN102064126A (en) * | 2010-11-04 | 2011-05-18 | 友达光电股份有限公司 | System for processing base plate conveyance and method |
| CN202011556U (en) * | 2011-03-18 | 2011-10-19 | 武汉耀华安全玻璃有限公司 | Loading and downloading buffering table for glass finished products |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105600446A (en) | 2016-05-25 |
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