CN105597988A - Gluing device and nanometer imprinting equipment with same - Google Patents
Gluing device and nanometer imprinting equipment with same Download PDFInfo
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- CN105597988A CN105597988A CN201610105073.6A CN201610105073A CN105597988A CN 105597988 A CN105597988 A CN 105597988A CN 201610105073 A CN201610105073 A CN 201610105073A CN 105597988 A CN105597988 A CN 105597988A
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- roller
- support frame
- photoresist
- glue spreading
- roll
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- 238000004026 adhesive bonding Methods 0.000 title abstract description 38
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 48
- 239000000463 material Substances 0.000 claims abstract description 14
- 239000003292 glue Substances 0.000 claims description 26
- 238000013519 translation Methods 0.000 claims description 18
- 230000005540 biological transmission Effects 0.000 claims description 11
- 238000009966 trimming Methods 0.000 claims description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 4
- 239000004411 aluminium Substances 0.000 claims 1
- 238000010030 laminating Methods 0.000 claims 1
- 239000007937 lozenge Substances 0.000 claims 1
- 238000012546 transfer Methods 0.000 abstract description 62
- 238000007598 dipping method Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 9
- 238000007790 scraping Methods 0.000 description 5
- 239000004033 plastic Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000004049 embossing Methods 0.000 description 2
- 239000010410 layer Substances 0.000 description 2
- 238000001459 lithography Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000012790 adhesive layer Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000001127 nanoimprint lithography Methods 0.000 description 1
- 238000005329 nanolithography Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000006552 photochemical reaction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000000750 progressive effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/12—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being fed round the roller
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/04—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
- B05C11/041—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades characterised by means for positioning, loading, or deforming the blades
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
Landscapes
- Coating Apparatus (AREA)
Abstract
本发明公开了一种涂胶装置，包括用于沾取光刻胶的取胶辊和用于将取胶辊上的光刻胶转移到材料上的转移辊，取胶辊和转移辊可沿自身轴线转动的平行设置在支撑架上，支撑架上还设置有用于调整取胶辊和转移辊之间接触紧密程度的微调件。本发明提供的装置中，用于沾取光刻胶的取胶辊和用于转移光刻胶的转移辊可转动的平行设置在支撑架上，且取胶辊和转移辊之间的间距和接触紧密程度可以通过微调件进行调整，实现对光刻胶传递量的控制，合理控制光刻胶量的同时，节省了材料。本发明还公开了一种包括上述涂胶装置的纳米压印设备，该设备由于设置了上述涂胶装置，可以实现光刻胶量的可控设置和合理配置。
The invention discloses a gluing device, which comprises a cot taking roller for dipping the photoresist and a transfer roller for transferring the photoresist on the cot taking roller to a material, the cot taking roller and the transfer roller can be moved along the The self-axis rotation is arranged parallel to the support frame, and the support frame is also provided with a fine-tuning member for adjusting the contact tightness between the rubber-taking roller and the transfer roller. In the device provided by the present invention, the rubber roller that is used to get the photoresist and the transfer roller that is used to transfer the photoresist are rotatably arranged on the support frame in parallel, and the distance between the rubber roller and the transfer roller and the The degree of contact tightness can be adjusted by the trimmer to realize the control of the amount of photoresist transferred, and while the amount of photoresist is reasonably controlled, materials are saved. The invention also discloses a nano-imprinting device comprising the above-mentioned glue-applying device. Because the above-mentioned glue-applying device is provided in the device, the controllable setting and reasonable configuration of the amount of photoresist can be realized.
Description
技术领域technical field
本发明涉及纳米加工技术领域，更具体地说，涉及一种涂胶装置。此外，本发明还涉及一种包括上述的涂胶装置的纳米压印设备。The invention relates to the technical field of nano-processing, and more specifically, relates to a gluing device. In addition, the present invention also relates to a nanoimprinting device comprising the above-mentioned gluing device.
背景技术Background technique
纳米压印光刻利用传统机械模具微复型原理，代替包括光学、化学及光化学反应机理的传统投影光刻。其工作原理是通过模具下压，导致光刻胶流动并填充到模具表面的特征结构中，随后增大模具下压载荷，使残留层减薄到后续工艺允许的范围内，停止模具下压并固化光刻胶。Nanoimprint lithography uses the principle of micro-replication of traditional mechanical molds to replace traditional projection lithography including optical, chemical and photochemical reaction mechanisms. Its working principle is to press down the mold to cause the photoresist to flow and fill into the characteristic structure of the mold surface, then increase the mold download to make the residual layer thinner to the allowable range of the subsequent process, stop the mold down and Cures the photoresist.
现有技术中，纳米光刻压印光刻技术包括滚动型纳米压印装置和平板对辊型纳米压印装置，二者在使用时，均需要使用纳米压印胶涂布装置将光刻胶涂覆在设备上。常见的涂覆装置上通过辊子在盛有光刻胶的容器中滚动并沾取一定的光刻胶，将光刻胶传递给传递带后，最终由传递带将光刻胶传递到工作区域，在传递带或工作区域部分设置有用于调整光刻胶用量的刮墨刀。然而，现有技术的缺点是刮墨刀的刮取量固定，刮墨刀装配完成后，难以根据实际纳米压印工艺需求调节胶层的厚度。In the prior art, nano-lithography imprint lithography technology includes roll-type nano-imprint device and plate-to-roll type nano-imprint device. Apply to equipment. A common coating device rolls a roller in a container containing photoresist and picks up a certain amount of photoresist. After transferring the photoresist to the transfer belt, the transfer belt finally transfers the photoresist to the working area. The belt or part of the working area is provided with a squeegee for adjusting the amount of photoresist. However, the disadvantage of the prior art is that the scraping amount of the squeegee is fixed, and after the squeegee is assembled, it is difficult to adjust the thickness of the adhesive layer according to the actual nanoimprint process requirements.
综上所述，如何提供一种胶层厚度可调节的涂胶装置，是目前本领域技术人员亟待解决的问题。To sum up, how to provide a gluing device with an adjustable thickness of the gluing layer is an urgent problem to be solved by those skilled in the art.
发明内容Contents of the invention
有鉴于此，本发明的目的是提供一种涂胶装置，该涂胶装置的光刻胶刮取量可调节，适用于多种压印情况。本发明的另一目的是提供一种包括上述涂胶装置的纳米压印设备。In view of this, the object of the present invention is to provide a gluing device, the photoresist scraping amount of the gluing device can be adjusted, and it is suitable for various embossing situations. Another object of the present invention is to provide a nanoimprint apparatus comprising the above-mentioned gluing device.
为了实现上述目的，本发明提供如下技术方案：In order to achieve the above object, the present invention provides the following technical solutions:
一种涂胶装置，包括用于沾取光刻胶的取胶辊和用于将所述取胶辊上的光刻胶转移到材料上的转移辊，所述取胶辊和所述转移辊可沿自身轴线转动的平行设置在支撑架上，所述支撑架上还设置有用于调整所述取胶辊和所述转移辊之间接触紧密程度的微调件。A kind of gluing device, comprises the glue taking roller that is used for dipping the photoresist and the transfer roller that is used to transfer the photoresist on the said glue taking roller to the material, the said glue taking roller and the transfer roller The rollers that can rotate along their own axes are arranged in parallel on the support frame, and the support frame is also provided with a fine-tuning member for adjusting the tightness of contact between the glue-taking roller and the transfer roller.
优选的，所述微调件为设置在所述支撑架的通孔中的螺旋微调件，所述螺旋微调件设置在所述转移辊的端部。Preferably, the fine-tuning member is a fine-tuning screw arranged in the through hole of the support frame, and the fine-tuning spiral is arranged at the end of the transfer roller.
优选的，所述支撑架上设置有刮墨刀架支撑架，所述刮墨刀架支撑架通过楔形的垫片与刮墨刀架连接，所述垫片用于调整所述刮墨刀架支撑架与所述刮墨刀架的角度，所述刮墨刀架上设置有刮墨刀。Preferably, the support frame is provided with a doctor blade frame support frame, and the doctor blade frame support frame is connected with the doctor blade frame through a wedge-shaped gasket, and the gasket is used to adjust the doctor blade frame The angle between the support frame and the scraper frame, the scraper blade is arranged on the scraper frame.
优选的，所述支撑架通过直线平移台与所述刮墨刀架支撑架连接，所述直线平移台包括上平台和可与所述上平台水平相对移动并固定的下平台，所述下平台与所述支撑架固定，所述上平台与所述刮墨刀架支撑架固定。Preferably, the support frame is connected to the doctor blade frame support frame through a linear translation platform, and the linear translation platform includes an upper platform and a lower platform that can move horizontally relative to the upper platform and is fixed, and the lower platform It is fixed with the support frame, and the upper platform is fixed with the support frame of the doctor blade frame.
优选的，所述上平台和所述下平台中的一者为楔形平台，另一者与所述楔形平台的楔形面贴合设置。Preferably, one of the upper platform and the lower platform is a wedge-shaped platform, and the other is arranged in close contact with the wedge-shaped surface of the wedge-shaped platform.
优选的，所述刮墨刀为铝片刮墨刀。Preferably, the squeegee is an aluminum squeegee.
优选的，所述取胶辊和所述转移辊的端部均固定设有传递齿轮，所述取胶辊与所述驱动电机传动连接，所述转移辊的传递齿轮与所述取胶辊的传递齿轮啮合。Preferably, the ends of the rubber-taking roller and the transfer roller are fixedly provided with transmission gears, the rubber-taking roller is connected with the drive motor, and the transmission gear of the transfer roller is connected with the transmission gear of the rubber-taking roller. Transmission gear meshes.
优选的，还包括用于分别控制所述取胶辊和所述转移辊转速的控制装置，所述控制装置通过驱动电机分别与所述取胶辊、所述转移辊连接。Preferably, it also includes a control device for separately controlling the rotation speeds of the glue-taking roller and the transfer roller, and the control device is respectively connected with the glue-taking roller and the transfer roller through a driving motor.
一种纳米压印设备，包括纳米压印头和涂胶装置，所述涂胶装置为上述任意一项所述的涂胶装置。A nanoimprint device, comprising a nanoimprint head and a gluing device, wherein the gluing device is the gluing device described in any one of the above.
本发明提供的装置中，用于沾取光刻胶的取胶辊和用于转移光刻胶的转移辊可转动的平行设置在支撑架上，且取胶辊和转移辊之间的间距和接触紧密程度可以通过微调件进行调整。当取胶辊转动地将光刻胶传递给传递辊的过程中，取胶辊与传递辊的间距直接影响传递的光刻胶量。通过用微调件控制二者的接触紧密程度，实现对光刻胶传递量的控制，合理控制光刻胶量的同时，节省了材料。In the device provided by the present invention, the rubber roller that is used to get the photoresist and the transfer roller that is used to transfer the photoresist are rotatably arranged on the support frame in parallel, and the distance between the rubber roller and the transfer roller and the The tightness of contact can be adjusted by trimmers. When the rubber-taking roller rotates and transfers the photoresist to the transfer roller, the distance between the rubber-taking roller and the transfer roller directly affects the amount of photoresist transferred. By using the trimmer to control the closeness of contact between the two, the control of the transfer amount of photoresist is realized, and the amount of photoresist is reasonably controlled while saving materials.
本发明还提供了一种包括上述涂胶装置的纳米压印设备，该设备由于设置了上述涂胶装置，可以实现光刻胶量的可控设置和合理配置。The present invention also provides a nano-imprinting device comprising the above-mentioned gluing device, which can realize controllable setting and reasonable configuration of the amount of photoresist due to the above-mentioned gluing device.
附图说明Description of drawings
为了更清楚地说明本发明实施例或现有技术中的技术方案，下面将对实施例或现有技术描述中所需要使用的附图作简单地介绍，显而易见地，下面描述中的附图仅仅是本发明的实施例，对于本领域普通技术人员来讲，在不付出创造性劳动的前提下，还可以根据提供的附图获得其他的附图。In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings that need to be used in the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only It is an embodiment of the present invention, and those skilled in the art can also obtain other drawings according to the provided drawings without creative work.
图1为本发明所提供涂胶装置的具体实施例的结构示意图；Fig. 1 is the structural representation of the specific embodiment of gluing device provided by the present invention;
图2为本发明所提供涂胶装置的具体实施例的右视图；Fig. 2 is the right side view of the specific embodiment of gluing device provided by the present invention;
图3为本发明所提供涂胶装置的具体实施例的正视图；Fig. 3 is the front view of the specific embodiment of gluing device provided by the present invention;
图4为本发明所提供涂胶装置的具体实施例的另一个角度的结构示意图。Fig. 4 is a structural schematic diagram of another angle of a specific embodiment of the gluing device provided by the present invention.
上图1-4中：In Figure 1-4 above:
1为支撑架、2为取胶辊、3为转移辊、4为材料辊、5为传动齿轮、6为电机支撑架、7为伺服电机、8为胶盒、9为直线平移台、10为刮墨刀架支撑架、11为刮墨刀架、12为微调螺栓。1 is the support frame, 2 is the rubber roller, 3 is the transfer roller, 4 is the material roller, 5 is the transmission gear, 6 is the motor support frame, 7 is the servo motor, 8 is the plastic box, 9 is the linear translation platform, and 10 is the Squeegee blade holder support frame, 11 are ink scraper blade holders, and 12 are fine-tuning bolts.
具体实施方式detailed description
下面将结合本发明实施例中的附图，对本发明实施例中的技术方案进行清楚、完整地描述，显然，所描述的实施例仅仅是本发明一部分实施例，而不是全部的实施例。基于本发明中的实施例，本领域普通技术人员在没有做出创造性劳动前提下所获得的所有其他实施例，都属于本发明保护的范围。The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
本发明的核心是提供一种涂胶装置，该涂胶装置的光刻胶刮取量可调节，适用于多种压印情况。本发明的另一核心是提供一种包括上述涂胶装置的纳米压印设备。The core of the present invention is to provide a gluing device, the photoresist scraping amount of the gluing device can be adjusted, and it is suitable for various embossing situations. Another core of the present invention is to provide a nanoimprinting device including the above-mentioned gluing device.
请参考图1至图4，图1为本发明所提供涂胶装置的具体实施例的结构示意图；图2为本发明所提供涂胶装置的具体实施例的右视图；图3为本发明所提供涂胶装置的具体实施例的正视图；图4为本发明所提供涂胶装置的具体实施例的另一个角度的结构示意图。Please refer to Fig. 1 to Fig. 4, Fig. 1 is the structural representation of the specific embodiment of gluing device provided by the present invention; Fig. 2 is the right side view of the specific embodiment of gluing device provided by the present invention; Fig. 3 is the embodiment of gluing device provided by the present invention A front view of a specific embodiment of the gluing device is provided; FIG. 4 is a structural schematic diagram of another angle of a specific embodiment of the gluing device provided by the present invention.
本发明所提供的一种涂胶装置设置在纳米压印设备中，主要用于将纳米光刻胶涂抹在压印材料上。在结构上包括支撑架1、取胶辊2和转移辊3。取胶辊2用于沾取光刻胶，转移辊3用于将取胶辊2上的光刻胶转移到材料上，取胶辊2和转移辊3可沿自身轴线转动的平行设置在支撑架1上，支撑架1上还设置有用于调整取胶辊2和转移辊3之间接触紧密程度的微调件。另外，在取胶辊2的下方设置盛有光刻胶的胶盒8，以供取胶辊2进行沾取。The gluing device provided by the present invention is set in the nano-imprinting equipment, and is mainly used for smearing the nano-photoresist on the imprinting material. Structurally, it includes a supporting frame 1 , a glue taking roller 2 and a transfer roller 3 . The rubber roller 2 is used for dipping the photoresist, and the transfer roller 3 is used to transfer the photoresist on the rubber roller 2 to the material. On the frame 1, a trimmer for adjusting the contact tightness between the rubber roller 2 and the transfer roller 3 is also arranged on the support frame 1. In addition, a plastic box 8 filled with photoresist is arranged below the rubber roller 2 for the rubber roller 2 to pick up.
需要提到的是，上述微调件有多种结构和调整方式，其中一种情况中，微调件为设置在支撑架1的通孔中的螺旋微调件，螺旋微调件设置在转移辊3的端部。该螺旋微调件可以为微调螺栓12，微调螺栓12设置在支撑架1的通孔上。It should be mentioned that there are various structures and adjustment methods for the above-mentioned fine-tuning parts. In one case, the fine-tuning parts are spiral fine-tuning parts arranged in the through holes of the support frame 1, and the spiral fine-tuning parts are arranged on the end of the transfer roller 3. department. The screw fine-tuning member can be a fine-tuning bolt 12 , and the fine-tuning bolt 12 is arranged on the through hole of the support frame 1 .
具体地，转移辊3和取胶辊2的端部或非工作部设置在螺旋微调件相对于支撑架1的拧入方向上，螺旋微调件的拧入过程可以将转移辊3向取胶辊2的方向推动，以实现调整转移辊3与取胶辊2的距离。其中，非工作部指的是转移辊3上不进行光刻胶传递的部分。Specifically, the ends or non-working parts of the transfer roller 3 and the rubber-taking roller 2 are arranged on the screw-in direction of the screw fine-tuning member relative to the support frame 1, and the screw-in process of the screw fine-tuning member can move the transfer roller 3 toward the glue-taking roller. 2 to realize the adjustment of the distance between the transfer roller 3 and the rubber roller 2. Wherein, the non-working portion refers to the portion on the transfer roller 3 where the photoresist is not transferred.
可选的，上述微调件还可以为其他控制转移辊3和取胶辊2距离的零件。需要提到的是，微调件对转移辊3和取胶辊2间距的控制是在转移辊3和取胶辊2均已经确定转动轴线后的微调。Optionally, the above-mentioned trimming parts can also be other parts that control the distance between the transfer roller 3 and the rubber roller 2. It should be mentioned that the control of the distance between the transfer roller 3 and the glue-taking roller 2 by the fine-tuning member is the fine-tuning after the transfer roller 3 and the glue-taking roller 2 have both determined their rotation axes.
可选的，取胶辊2的端部和转移辊3的端部均可以通过轴承设置在支撑架1上，从而使取胶辊2和转移辊3的转动更加灵活。Optionally, the ends of the rubber-taking roller 2 and the transfer roller 3 can be arranged on the support frame 1 through bearings, so that the rotation of the rubber-taking roller 2 and the transfer roller 3 is more flexible.
上述涂胶装置的具体涂胶过程如下：取胶辊2通过自身转动从胶盒8中沾取光刻胶，将光刻胶转移到转移辊3上，最后由转移辊3将光刻胶涂布在待涂胶材料上。上述过程中，可以人工操作微调件调整取胶辊2和转移辊3之间接触紧密程度，以实现取胶辊2向转移辊3上传递的光刻胶用量、厚度的调节。The specific gluing process of the above-mentioned gluing device is as follows: take the rubber roller 2 and dip the photoresist from the plastic box 8 by rotating itself, transfer the photoresist to the transfer roller 3, and finally apply the photoresist to the transfer roller 3 Spread on the material to be glued. During the above process, the trimmer can be manually operated to adjust the contact tightness between the rubber roller 2 and the transfer roller 3, so as to adjust the amount and thickness of the photoresist transferred from the rubber roller 2 to the transfer roller 3.
本实施例提供的装置中，用于沾取光刻胶的取胶辊2和用于转移光刻胶的转移辊3可转动的平行设置在支撑架1上，且取胶辊2和转移辊3之间的间距和接触紧密程度可以通过微调件进行调整。当取胶辊2转动地将光刻胶传递给传递辊3时，取胶辊2与传递辊3的间距直接影响传递的光刻胶量。通过用微调件控制二者的接触紧密程度，实现对光刻胶传递量的控制，合理控制光刻胶量的同时，节省了材料。In the device provided in this embodiment, the rubber roller 2 for dipping the photoresist and the transfer roller 3 for transferring the photoresist are rotatably arranged on the support frame 1 in parallel, and the rubber roller 2 and the transfer roller The distance between 3 and the closeness of contact can be adjusted by fine-tuning parts. When the rubber-taking roller 2 rotates and transfers the photoresist to the transfer roller 3, the distance between the rubber-taking roller 2 and the transfer roller 3 directly affects the amount of photoresist transferred. By using the trimmer to control the closeness of contact between the two, the control of the transfer amount of photoresist is realized, and the amount of photoresist is reasonably controlled while saving materials.
在支撑架1上通常设置有刮墨刀架支撑架10，刮墨刀架支撑架10用于与刮墨刀架11连接。在本发明所提供的一个具体实施例中，刮墨刀架支撑架10通过楔形的垫片与刮墨刀架11连接，垫片用于调整刮墨刀架支撑架10与刮墨刀架11的角度，刮墨刀架11上设置有刮墨刀。具体地，刮墨刀架支撑架10与刮墨刀架11中的一者与垫片的楔形面连接，另一者与楔形面的对立面连接。A doctor blade frame support frame 10 is generally arranged on the support frame 1 , and the doctor blade frame support frame 10 is used for connecting with the doctor blade frame 11 . In a specific embodiment provided by the present invention, the doctor blade support frame 10 is connected with the doctor blade frame 11 through a wedge-shaped gasket, and the gasket is used to adjust the doctor blade frame support frame 10 and the doctor blade frame 11. The angle of the doctor blade is provided with a doctor blade on the doctor blade holder 11. Specifically, one of the doctor blade support frame 10 and the doctor blade frame 11 is connected to the wedge-shaped surface of the gasket, and the other is connected to the opposite surface of the wedge-shaped surface.
本实施例中，在支撑架1上设置的刮墨刀架支撑架10与用于设置刮墨刀的刮墨刀架11之间设置楔形的垫片，通过设置楔形角不同的楔形的垫片，调整刮墨刀架支撑架10与刮墨刀架11之间的角度关系，进而得到刮墨刀与支撑架1之间的不同的角度关系，最终刮墨刀的角度调节可以实现对取胶辊2上光刻胶的厚度的调节。In this embodiment, a wedge-shaped gasket is set between the doctor blade holder support frame 10 provided on the support frame 1 and the doctor blade holder 11 for setting the doctor blade, by setting the wedge-shaped gasket with different wedge angles , adjust the angle relationship between the squeegee frame support frame 10 and the squeegee frame 11, and then obtain different angular relationships between the squeegee blade and the support frame 1, and finally adjust the angle of the squeegee blade to achieve glue removal Adjustment of the thickness of photoresist on roll 2.
可选的，上述刮墨刀架支撑架10、垫片、刮墨刀架11之间可以通过螺栓进行连接。由于使用期间可能需要对垫片进行调整和更换，采用螺栓连接的更换较为方便。当然，也可以使用其他连接方式进行连接。Optionally, the above-mentioned scraper blade frame support frame 10, gasket, and scraper blade frame 11 may be connected by bolts. As gaskets may need to be adjusted and replaced during use, replacement with bolted connections is more convenient. Of course, other connection methods can also be used for connection.
需要提到的是，上述刮墨刀用于对取胶辊2上的光刻胶进行刮取和调整。上述各个实施例中，支撑架1为两个门形支架，主要用于在取胶辊2、转移辊3的两端起支撑作用，所以上述刮墨刀架支撑架10、刮墨刀架11和刮墨刀可以设置在其中一个门形支架上，或者设置在两个门形支架之间，以实现对取胶辊2的刮取。It should be mentioned that the above-mentioned doctor blade is used for scraping and adjusting the photoresist on the glue roller 2 . In each of the above-mentioned embodiments, the support frame 1 is two door-shaped supports, which are mainly used to support the two ends of the rubber roller 2 and the transfer roller 3, so the above-mentioned doctor blade holder support frame 10, doctor blade holder 11 And scraper can be arranged on one of them door-shaped support, perhaps is arranged between two door-shaped supports, to realize to get the scraping of rubber roller 2.
具体地，刮墨刀架支撑架10可以关于两个门形支架的对称轴对称。Specifically, the doctor blade support frame 10 may be symmetrical about the symmetrical axis of the two door-shaped brackets.
可选的，上述支撑架1也可以为其他结构，例如单侧支架或者更复杂的支架结构，所有可以用于支撑取胶辊2和传递辊3的支架均在本实施例的保护范围中。Optionally, the support frame 1 can also be of other structures, such as a single-side support or a more complicated support structure, and all supports that can be used to support the glue taking roller 2 and the transfer roller 3 are within the scope of protection of this embodiment.
上述实施例通过楔形的垫片连接刮墨刀架支撑架10和刮墨刀架11，实现了刮墨刀的角度调整，为了更好的调整取胶辊2上光刻胶的厚度，可以对刮墨刀与取胶辊2的距离进行调整。在上述实施例的基础之上，支撑架1通过直线平移台9与刮墨刀架支撑架10连接，直线平移台9包括上平台和下平台，下平台可与上平台进行方向的相对移动并进行固定，下平台与支撑架1固定连接，上平台与刮墨刀架支撑架10固定连接。The above-described embodiment connects the doctor blade holder support frame 10 and the doctor blade holder 11 through a wedge-shaped gasket to realize the angle adjustment of the doctor blade. In order to better adjust the thickness of the photoresist on the rubber roller 2, it can be adjusted Adjust the distance between the doctor blade and the rubber roller 2. On the basis of the above-described embodiments, the support frame 1 is connected with the doctor blade frame support frame 10 through a linear translation platform 9. The linear translation platform 9 includes an upper platform and a lower platform, and the lower platform can move relative to the upper platform and For fixing, the lower platform is fixedly connected to the support frame 1, and the upper platform is fixedly connected to the scraper blade frame support frame 10.
上述装置中，直线平移台9可以为带刻度的精密直线平移台，通过该直线平移台9上设置的精密调节部件进行调节，由于设置了用于查看移动距离的刻度线或刻度尺，直线平移台9的移动更加精准，使用也更加直观便捷。In the above-mentioned device, the linear translation platform 9 can be a precision linear translation platform with a scale, which is adjusted by the precision adjustment parts provided on the linear translation platform 9. Since the scale line or scale for checking the moving distance is provided, the linear translation The movement of Taiwan 9 is more precise, and the use is more intuitive and convenient.
可选的，上平台与下平台的相对移动可以为相对水平移动，也可以为具有一定倾角的相对倾斜移动，并不局限于进行水平方向的移动，具体的相对移动的方向可以根据取胶辊2和刮墨刀架11的设置位置决定。Optionally, the relative movement of the upper platform and the lower platform can be a relative horizontal movement, or a relative tilt movement with a certain inclination angle, and is not limited to horizontal movement. The specific relative movement direction can be determined according to the direction of the rubber roller 2 and the setting position of the doctor blade holder 11 are determined.
可选的，可以在支撑架1上设置两个直线平移台9，两个直线平移台9分别对应连接一个支撑架1，如图1所示，两个直线平移台9平行，且分别连接了一个刮墨刀架支撑架10，两个刮墨刀架支撑架10同时与一个刮墨刀架11连接。采用两个直线平移台9和两个刮墨刀架支撑架10进行连接，可以提高刮墨刀架11的平稳性。Optionally, two linear translation stages 9 can be set on the support frame 1, and the two linear translation stages 9 are respectively connected to a support frame 1. As shown in Figure 1, the two linear translation stages 9 are parallel and connected to A doctor blade support frame 10, two doctor blade frame support frames 10 are connected with a doctor blade frame 11 at the same time. The stability of the doctor blade frame 11 can be improved by using two linear translation platforms 9 and two doctor blade frame support frames 10 for connection.
在本发明所提供的一个具体实施例中，上述直线平移台9可以进行具有倾角的移动。具体地，上平台和下平台中的一者为楔形平台，另一者与楔形平台的楔形面贴合设置。本实施例中，考虑到直线平移台9需要与支撑架1连接，所以直线平移台9设置在支撑架1的一个水平平面上，具体地，可以将下平台设置在支撑架1的水平平面上，为了使上平台可以相对下平台进行具有倾角的移动，可以将下平台设置为具有楔形面的下平台，上平台与楔形面贴合设置。当然，上平台也可以为楔形面，另外上平台与下平台可以互换。In a specific embodiment provided by the present invention, the above-mentioned linear translation stage 9 can move with an inclination angle. Specifically, one of the upper platform and the lower platform is a wedge-shaped platform, and the other is set in contact with the wedge-shaped surface of the wedge-shaped platform. In this embodiment, considering that the linear translation stage 9 needs to be connected with the support frame 1, the linear translation stage 9 is arranged on a horizontal plane of the support frame 1, specifically, the lower platform can be arranged on the horizontal plane of the support frame 1 , in order to enable the upper platform to move with an inclination relative to the lower platform, the lower platform can be set as a lower platform with a wedge-shaped surface, and the upper platform and the wedge-shaped surface are arranged in close contact. Of course, the upper platform can also be a wedge-shaped surface, and the upper platform and the lower platform can be interchanged.
本发明所提供的一个具体实施例中，取胶辊2和转移辊3的端部均固定设有传动齿轮5，取胶辊2与驱动电机传动连接，转移辊3的传动齿轮5与取胶辊2的传动齿轮5啮合。上述装置可以通过更换不同传动比的传动齿轮5，实现对取胶辊2和转移辊3的转速的控制。In a specific embodiment provided by the present invention, the ends of the rubber roller 2 and the transfer roller 3 are fixedly provided with a transmission gear 5, the rubber roller 2 is connected with the drive motor, and the transmission gear 5 of the transfer roller 3 is connected to the rubber roller 3. The transmission gear 5 of the roller 2 meshes. The above-mentioned device can realize the control of the rotational speeds of the rubber roller 2 and the transfer roller 3 by replacing the transmission gears 5 with different transmission ratios.
另一种实施方式中，还包括控制装置，控制装置为用于分别控制取胶辊2和转移辊3转速的控制装置，控制装置与驱动电机连接。控制装置通过驱动电机分别连接取胶辊2和转移辊3，以实现对二者速度的单独控制。In another embodiment, it also includes a control device, which is a control device for respectively controlling the rotation speeds of the glue-taking roller 2 and the transfer roller 3, and the control device is connected with the driving motor. The control device connects the rubber roller 2 and the transfer roller 3 respectively through a driving motor, so as to realize independent control of the speeds of the two.
可选的，取胶辊2和转移辊3可以由驱动电机的不同的输出轴进行单独控制。Optionally, the glue taking roller 2 and the transfer roller 3 can be independently controlled by different output shafts of the driving motor.
上述实施例中，驱动电机可以控制取胶辊2的转速，通过不同的转速实现对取胶辊2的取胶速度和沾取光刻胶用量的调节，进而控制涂胶速度、厚度和均匀性。通过对取胶辊2和转移辊3的相对转动速度的调节，可以调节转移辊3得到的转移的光刻胶的用量。In the above-mentioned embodiment, the driving motor can control the speed of the glue roller 2, and realize the adjustment of the speed of glue taking and the amount of photoresist dipped in the glue roller 2 through different speeds, and then control the speed, thickness and uniformity of glue application . By adjusting the relative rotational speeds of the glue taking roller 2 and the transfer roller 3, the amount of photoresist transferred by the transfer roller 3 can be adjusted.
通常情况下，在转移辊3一侧设置有材料辊4，可选的，材料辊4可配置为无动力辊，即由材料带着转动，或者可以为有动力辊，即由材料输送系统提供动力。Normally, a material roll 4 is arranged on one side of the transfer roll 3. Optionally, the material roll 4 can be configured as a non-powered roll, which is driven by the material to rotate, or can be a powered roll, which is provided by the material conveying system. power.
可选的，上述各个实施例所提供的刮墨刀均可以为铝片刮墨刀。铝片刮墨刀质地较软，容易实现对光刻胶的刮取。Optionally, the squeegee provided in each of the above embodiments may be an aluminum squeegee. The texture of the aluminum squeegee is relatively soft, and it is easy to scrape off the photoresist.
可选的，上述任意一个实施例中所提到的驱动电机均可以为伺服电机7。另外，伺服电机7可以通过电机支撑架6设置在支撑架1上。Optionally, the drive motor mentioned in any one of the above embodiments can be a servo motor 7 . In addition, the servo motor 7 can be arranged on the support frame 1 through the motor support frame 6 .
可选的，上述实施例中所提到的光刻胶为涂胶装置常用的胶体，当然，其他的液体胶也可以作为本发明所实施的对象。Optionally, the photoresist mentioned in the above embodiments is the colloid commonly used in glue application devices, of course, other liquid glues can also be used as the object of the present invention.
除了上述实施例提供的涂胶装置，本发明还提供一种包括上述实施例公开的涂胶装置的纳米压印设备，纳米压印设备通常包括纳米压印头和涂胶装置，其中涂胶装置为上述各个实施例所提供的涂胶装置。由于设置了上述各实施例所提供的涂胶装置，该纳米压印设备可适用于多种情况。该纳米压印设备的其他各部分的结构请参考现有技术，本文不再赘述。In addition to the gluing device provided in the above embodiment, the present invention also provides a nanoimprinting device including the gluing device disclosed in the above embodiment. The nanoimprinting device generally includes a nanoimprint head and a gluing device, wherein the gluing device The gluing device provided for each of the above-mentioned embodiments. Since the gluing device provided by the above-mentioned embodiments is provided, the nanoimprinting device can be applied to various situations. For the structure of other parts of the nanoimprinting device, please refer to the prior art, which will not be repeated here.
本说明书中各个实施例采用递进的方式描述，每个实施例重点说明的都是与其他实施例的不同之处，各个实施例之间相同相似部分互相参见即可。Each embodiment in this specification is described in a progressive manner, each embodiment focuses on the difference from other embodiments, and the same and similar parts of each embodiment can be referred to each other.
以上对本发明所提供的涂胶装置及具有该涂胶装置的纳米压印设备进行了详细介绍。本文中应用了具体个例对本发明的原理及实施方式进行了阐述，以上实施例的说明只是用于帮助理解本发明的方法及其核心思想。应当指出，对于本技术领域的普通技术人员来说，在不脱离本发明原理的前提下，还可以对本发明进行若干改进和修饰，这些改进和修饰也落入本发明权利要求的保护范围内。The gluing device provided by the present invention and the nanoimprinting equipment provided with the gluing device have been introduced in detail above. In this paper, specific examples are used to illustrate the principle and implementation of the present invention, and the descriptions of the above embodiments are only used to help understand the method and core idea of the present invention. It should be pointed out that for those skilled in the art, without departing from the principle of the present invention, some improvements and modifications can be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention.
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| CN117881100B (en) * | 2024-03-13 | 2024-05-17 | 江苏上达半导体有限公司 | COF packaging hardware |
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| CN105597988B (en) | 2018-04-10 |
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