CN105597988B - A kind of glue spreading apparatus and the nano-imprinting apparatus with the glue spreading apparatus - Google Patents
A kind of glue spreading apparatus and the nano-imprinting apparatus with the glue spreading apparatus Download PDFInfo
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- CN105597988B CN105597988B CN201610105073.6A CN201610105073A CN105597988B CN 105597988 B CN105597988 B CN 105597988B CN 201610105073 A CN201610105073 A CN 201610105073A CN 105597988 B CN105597988 B CN 105597988B
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- Prior art keywords
- roll
- pick
- support frame
- glue spreading
- spreading apparatus
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C1/00—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating
- B05C1/04—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length
- B05C1/08—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line
- B05C1/12—Apparatus in which liquid or other fluent material is applied to the surface of the work by contact with a member carrying the liquid or other fluent material, e.g. a porous member loaded with a liquid to be applied as a coating for applying liquid or other fluent material to work of indefinite length using a roller or other rotating member which contacts the work along a generating line the work being fed round the roller
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/04—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades
- B05C11/041—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface with blades characterised by means for positioning, loading, or deforming the blades
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
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- Coating Apparatus (AREA)
Abstract
The invention discloses a kind of glue spreading apparatus, including for picking the pick-up roll of photoresist and the transferring roller for being transferred to the photoresist on pick-up roll on material, pick-up roll and transferring roller being set in parallel on support frame along own axis, the trimming piece for contacting tightness degree between pick-up roll and transferring roller for adjusting is additionally provided with support frame.In device provided by the invention, pick-up roll and the transferring roller for shifting photoresist for picking photoresist are rotatably set in parallel in support frame, and the spacing between pick-up roll and transferring roller and contact tightness degree can be adjusted by trimming piece, realize the control to photoresist transmission capacity, rationally while control photoresist amount, material is saved.The invention also discloses a kind of nano-imprinting apparatus for including above-mentioned glue spreading apparatus, and the equipment is because there is provided above-mentioned glue spreading apparatus, it is possible to achieve the controllable setting of photoresist amount and reasonable disposition.
Description
Technical field
The present invention relates to technical field of nano-processing, more specifically to a kind of glue spreading apparatus.In addition, the present invention is also
It is related to a kind of nano-imprinting apparatus for including above-mentioned glue spreading apparatus.
Background technology
Nano-imprint lithography utilizes the micro- replica principle of tradition machinery mould, instead of including optics, chemistry and photochemical reaction
The conventional projection photoetching of mechanism.Its operation principle is pushed by mould, is caused photoresist to flow and is filled into die surface
In feature structure, then increase compressive load under mould, residual layer is thinned in the range of subsequent technique permission, stop under mould
Press and solidify photoresist.
In the prior art, nano-photoetching imprint lithography techniques include roll type nano-imprinting device and flat board two pairs of rollers type nanometer
Imprinting apparatus, the two is required to photoresist using nano impression gum coating apparatus coated in equipment when in use.Common
Rolled on coating unit by roller in the container for fill photoresist and pick certain photoresist, photoresist is passed into biography
After passing band, photoresist is finally delivered to working region by transfer tape, is provided with transfer tape or working region part for adjusting
The doctor of whole photoresist dosage.However, the taken amount of scraping that the shortcomings that prior art is doctor is fixed, doctor assembling is completed
Afterwards, it is difficult to the thickness of glue-line is adjusted according to actual nano-imprint process demand.
In summary, how to provide a kind of bondline thickness adjustable glue spreading apparatus, be current those skilled in the art urgently
The problem of to be solved.
The content of the invention
In view of this, it is an object of the invention to provide a kind of glue spreading apparatus, it is adjustable that the photoresist of the glue spreading apparatus scrapes taken amount
Section, suitable for a variety of impressing situations.It is a further object of the present invention to provide a kind of nano impression including above-mentioned glue spreading apparatus to set
It is standby.
To achieve these goals, the present invention provides following technical scheme：
A kind of glue spreading apparatus, including for picking the pick-up roll of photoresist and for the photoresist on the pick-up roll to be turned
The transferring roller moved on on material, the pick-up roll and the transferring roller can be set in parallel in support frame along own axis
On, the fine setting for contacting tightness degree between the pick-up roll and the transferring roller for adjusting is additionally provided with support frame as described above
Part.
Preferably, the trimming piece is the spiral trimming piece being arranged in the through hole of support frame as described above, the spiral fine setting
Part is arranged on the end of the transferring roller.
Preferably, wiping knife rest support frame is provided with support frame as described above, the wiping knife rest support frame passes through wedge shape
Pad is connected with wiping knife rest, and the pad is used for the angle for adjusting the wiping knife rest support frame and the wiping knife rest, institute
State and be provided with doctor on wiping knife rest.
Preferably, support frame as described above is connected by rectilinear translation platform with the wiping knife rest support frame, the rectilinear translation
Platform includes upper mounting plate and can be with the horizontal lower platform for relatively moving and fixing of the upper mounting plate, the lower platform and support frame as described above
Fixed, the upper mounting plate is fixed with the wiping knife rest support frame.
Preferably, one of the upper mounting plate and the lower platform are wedge-shaped platform, another one and the wedge-shaped platform
Lozenges fitting set.
Preferably, the doctor is aluminium flake doctor.
Preferably, the end of the pick-up roll and the transferring roller is fixed with Transmission gear, the pick-up roll and institute
Motor drive connection is stated, the Transmission gear of the transferring roller engages with the Transmission gear of the pick-up roll.
Preferably, in addition to for controlling the control device of the pick-up roll and the transferring roller rotating speed, the control respectively
Device processed is connected with the pick-up roll, the transferring roller respectively by motor.
A kind of nano-imprinting apparatus, including nano impression head and glue spreading apparatus, the glue spreading apparatus are above-mentioned any one
Described glue spreading apparatus.
In device provided by the invention, pick-up roll and the transferring roller for shifting photoresist for picking photoresist can turn
Dynamic is set in parallel on support frame, and the spacing between pick-up roll and transferring roller and contact tightness degree can pass through trimming piece
It is adjusted.During photoresist is rotationally passed to delivery roll by pick-up roll, the spacing of pick-up roll and delivery roll is direct
Influence the photoresist amount transmitted.The contact tightness degree of the two is controlled by using trimming piece, realizes the control to photoresist transmission capacity
System, while rationally controlling photoresist amount, save material.
Present invention also offers a kind of nano-imprinting apparatus for including above-mentioned glue spreading apparatus, the equipment is because there is provided above-mentioned
Glue spreading apparatus, it is possible to achieve the controllable setting of photoresist amount and reasonable disposition.
Brief description of the drawings
In order to illustrate more clearly about the embodiment of the present invention or technical scheme of the prior art, below will be to embodiment or existing
There is the required accompanying drawing used in technology description to be briefly described, it should be apparent that, drawings in the following description are only this
The embodiment of invention, for those of ordinary skill in the art, on the premise of not paying creative work, can also basis
The accompanying drawing of offer obtains other accompanying drawings.
Fig. 1 is the structural representation of the specific embodiment of glue spreading apparatus provided by the present invention；
Fig. 2 is the right view of the specific embodiment of glue spreading apparatus provided by the present invention；
Fig. 3 is the front view of the specific embodiment of glue spreading apparatus provided by the present invention；
Fig. 4 is the structural representation of another angle of the specific embodiment of glue spreading apparatus provided by the present invention.
In figure 1 above -4：
1 it is support frame, 2 be pick-up roll, 3 be transferring roller, 4 be material roller, 5 be travelling gear, 6 be motor support frame, 7 is
Servomotor, 8 be glue box, 9 be rectilinear translation platform, 10 be wiping knife rest support frame, 11 be wiping knife rest, 12 be trimming bolt.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
The core of the present invention is to provide a kind of glue spreading apparatus, and the photoresist of the glue spreading apparatus is scraped taken amount and can adjust, is applied to
A variety of impressing situations.Another core of the present invention is to provide a kind of nano-imprinting apparatus for including above-mentioned glue spreading apparatus.
Fig. 1 to Fig. 4 is refer to, Fig. 1 is the structural representation of the specific embodiment of glue spreading apparatus provided by the present invention；Fig. 2
For the right view of the specific embodiment of glue spreading apparatus provided by the present invention；Fig. 3 is the specific reality of glue spreading apparatus provided by the present invention
Apply the front view of example；Fig. 4 is the structural representation of another angle of the specific embodiment of glue spreading apparatus provided by the present invention.
A kind of glue spreading apparatus provided by the present invention is arranged in nano-imprinting apparatus, is mainly used in applying in nano-photoetching glue
It is put on impression materials.Include support frame 1, pick-up roll 2 and transferring roller 3 in structure.Pick-up roll 2 is used to pick photoresist, turns
Move roller 3 to be used to the photoresist on pick-up roll 2 being transferred to material, pick-up roll 2 and transferring roller 3 can be along the flat of own axis
Row is arranged on support frame 1, is additionally provided with support frame 1 and tightness degree is contacted between pick-up roll 2 and transferring roller 3 for adjusting
Trimming piece.In addition, the glue box 8 for filling photoresist are set in the lower section of pick-up roll 2, so that pick-up roll 2 is picked.
Need it is to be noted that above-mentioned trimming piece has a various structures and adjustment mode, in one of which situation, trimming piece is sets
The spiral trimming piece in the through hole of support frame 1 is put, spiral trimming piece is arranged on the end of transferring roller 3.The spiral trimming piece can
Think trimming bolt 12, trimming bolt 12 is arranged on the through hole of support frame 1.
Specifically, the end or inoperative portion of transferring roller 3 and pick-up roll 2 are arranged on spiral trimming piece relative to support frame 1
Be screwed on direction, spiral trimming piece be screwed into process can by direction from transferring roller 3 to pick-up roll 2 promote, with realize adjustment
The distance of transferring roller 3 and pick-up roll 2.Wherein, inoperative portion is referred on transferring roller 3 without the part of photoresist transmission.
Optionally, above-mentioned trimming piece can also be other control transferring rollers 3 and the part of the distance of pick-up roll 2.Need to mention
, control of the trimming piece to transferring roller 3 and the spacing of pick-up roll 2 is to have determined pivot center in transferring roller 3 and pick-up roll 2
Fine setting afterwards.
Optionally, the end of pick-up roll 2 and the end of transferring roller 3 can be arranged on support frame 1 by bearing, so as to
Make the rotation of pick-up roll 2 and transferring roller 3 more flexible.
The specific gluing process of above-mentioned glue spreading apparatus is as follows：Pick-up roll 2 picks photoetching by own rotation from glue box 8
Glue, photoresist is transferred on transferring roller 3, finally photoresist is coated on by transferring roller 3 and treated in rubberized material.Said process
In, it can be adjusted with manual operation trimming piece between pick-up roll 2 and transferring roller 3 and contact tightness degree, to realize pick-up roll 2 to transfer
The regulation of the photoresist dosage, thickness transmitted on roller 3.
In the device that the present embodiment provides, for picking the pick-up roll 2 of photoresist and transferring roller 3 for shifting photoresist
Rotatably it is set in parallel on support frame 1, and the spacing between pick-up roll 2 and transferring roller 3 and contact tightness degree can lead to
Trimming piece is crossed to be adjusted.When photoresist is rotationally passed to delivery roll 3 by pick-up roll 2, between pick-up roll 2 and delivery roll 3
Away from the photoresist amount for directly affecting transmission.The contact tightness degree of the two is controlled by using trimming piece, is realized to photoresist transmission
The control of amount, while rationally controlling photoresist amount, save material.
Wiping knife rest support frame 10 is usually provided with support frame 1, wiping knife rest support frame 10 is used for and wiping knife rest
11 connections.In a specific embodiment provided by the present invention, pad and wiping that wiping knife rest support frame 10 passes through wedge shape
Knife rest 11 connects, and pad is used for the angle for adjusting wiping knife rest support frame 10 and wiping knife rest 11, is provided with wiping knife rest 11
Doctor.Specifically, one of wiping knife rest support frame 10 and wiping knife rest 11 are connected with the lozenges of pad, another one with
The opposite connection of lozenges.
In the present embodiment, the wiping knife rest support frame 10 and the doctor for setting doctor that are set on support frame 1
The pad of wedge shape is set between frame 11, by setting the different wedge-shaped pad of key groove, adjustment wiping knife rest support frame 10 with
Angular relationship between wiping knife rest 11, and then obtain the different angular relationships between doctor and support frame 1, final wiping
The angular adjustment of knife can realize the regulation to the thickness of photoresist on pick-up roll 2.
Optionally, can be attached between above-mentioned wiping knife rest support frame 10, pad, wiping knife rest 11 by bolt.
Due to that may need that pad is adjusted and changed during use, the replacing being connected by screw bolts is more convenient.Certainly, also may be used
To be attached using other connected modes.
Need it is to be noted that above-mentioned doctor is used to the photoresist on pick-up roll 2 is scraped and adjusted.It is above-mentioned each
In embodiment, support frame 1 is two portal trestles, is mainly used in playing a supportive role at the both ends of pick-up roll 2, transferring roller 3, so
Above-mentioned wiping knife rest support frame 10, wiping knife rest 11 and doctor can be disposed therein on a portal trestle, or are set
Between two portal trestles, to realize the scraping to pick-up roll 2.
Specifically, wiping knife rest support frame 10 can be on the symmetrical axial symmetry of two portal trestles.
Optionally, above-mentioned support frame 1 can also be other structures, such as single side bracing or more complicated supporting structure,
It is all to can be used for supporting the support of pick-up roll 2 and delivery roll 3 in the protection domain of the present embodiment.
Above-described embodiment connects wiping knife rest support frame 10 and wiping knife rest 11 by the pad of wedge shape, realizes doctor
Angle adjustment, in order to preferably adjust the thickness of photoresist on pick-up roll 2, the distance of doctor and pick-up roll 2 can be entered
Row adjustment.On the basis of above-described embodiment, support frame 1 is connected by rectilinear translation platform 9 with wiping knife rest support frame 10, directly
Line translation stage 9 includes upper mounting plate and lower platform, and lower platform can be lower flat with the relative movement of upper mounting plate travel direction and being fixed
Platform is fixedly connected with support frame 1, and upper mounting plate is fixedly connected with wiping knife rest support frame 10.
In said apparatus, rectilinear translation platform 9 can be accurate straight line translation stage with a scale, pass through the rectilinear translation platform 9
The fine adjustment part of upper setting is adjusted, because there is provided the graduation mark or graduated scale for checking displacement, straight line
The movement of translation stage 9 is more accurate, using also more directly perceived convenient.
Optionally, the relative movement of upper mounting plate and lower platform can be that relative level moves, or have a constant inclination
The relative tilt movement at angle, it is not limited to carry out the movement of horizontal direction, the direction specifically relatively moved can be according to taking
The set location of rubber roll 2 and wiping knife rest 11 determines.
Optionally, two rectilinear translation platforms 9 can be set on support frame 1, and two rectilinear translation platforms 9 are connected respectively
One support frame 1, as shown in figure 1, two rectilinear translation platforms 9 are parallel, and are connected to a wiping knife rest support frame 10 respectively, two
Individual wiping knife rest support frame 10 is connected with a wiping knife rest 11 simultaneously.Using two rectilinear translation platforms 9 and two wiping knife rests
Support frame 10 is attached, and can improve the stationarity of wiping knife rest 11.
In a specific embodiment provided by the present invention, above-mentioned rectilinear translation platform 9 can carry out the shifting with inclination angle
It is dynamic.Specifically, one of upper mounting plate and lower platform are wedge-shaped platform, and another one is bonded setting with the lozenges of wedge-shaped platform.
In the present embodiment, it is contemplated that rectilinear translation platform 9 needs to be connected with support frame 1, so rectilinear translation platform 9 is arranged on support frame 1
On one horizontal plane, specifically, lower platform can be arranged on the horizontal plane of support frame 1, in order that upper mounting plate can be with
The movement with inclination angle is carried out relative to lower platform, lower platform can be arranged to the lower platform with lozenges, upper mounting plate and wedge
The fitting of shape face is set.Certainly, upper mounting plate can also be lozenges, and upper mounting plate can exchange with lower platform in addition.
In a specific embodiment provided by the present invention, the end of pick-up roll 2 and transferring roller 3 is fixed with driving cog
Wheel 5, pick-up roll 2 are connected with motor, and the travelling gear 5 of transferring roller 3 engages with the travelling gear 5 of pick-up roll 2.It is above-mentioned
Device can realize the control of the rotating speed to pick-up roll 2 and transferring roller 3 by changing the travelling gears 5 of different drive ratios.
In another embodiment, in addition to control device, control device are for controlling pick-up roll 2 and transferring roller respectively
The control device of 3 rotating speeds, control device are connected with motor.Control device connects the He of pick-up roll 2 by motor respectively
Transferring roller 3, to realize the independent control to the two speed.
Optionally, pick-up roll 2 and transferring roller 3 can individually be controlled by the different output shafts of motor.
In above-described embodiment, motor can control the rotating speed of pick-up roll 2, be realized by different rotating speeds to pick-up roll
2 take glue speed and pick the regulation of photoresist dosage, and then control application rate, thickness and uniformity.By to pick-up roll 2
With the regulation of the relative rotation speed of transferring roller 3, the dosage of the photoresist for the transfer that transferring roller 3 obtains can be adjusted.
Under normal circumstances, the side of transferring roller 3 is provided with material roller 4, optionally, material roller 4 can be configured to unpowered roller,
It i.e. by material with rotation, or can be dynamic roller, i.e., provide power by material delivery system.
Optionally, the doctor that above-mentioned each embodiment is provided can be aluminium flake doctor.Aluminium flake doctor quality
It is softer, easily realize the scraping to photoresist.
Optionally, the motor being previously mentioned in any one above-mentioned embodiment can be servomotor 7.In addition, watch
Taking motor 7 can be arranged on support frame 1 by motor support frame 6.
Optionally, the photoresist being previously mentioned in above-described embodiment is the colloid that glue spreading apparatus is commonly used, certainly, other liquid
The object that glue can also be implemented as the present invention.
Except the glue spreading apparatus that above-described embodiment provides, the present invention, which also provides one kind, includes gluing disclosed in above-described embodiment
The nano-imprinting apparatus of device, nano-imprinting apparatus generally include nano impression head and glue spreading apparatus, and wherein glue spreading apparatus is upper
State the glue spreading apparatus that each embodiment is provided.By there is provided the glue spreading apparatus that the various embodiments described above are provided, the nanometer pressure
Printing apparatus is applicable to a variety of situations.The structure of other each several parts of the nano-imprinting apparatus refer to prior art, herein not
Repeat again.
Each embodiment is described by the way of progressive in this specification, what each embodiment stressed be and other
The difference of embodiment, between each embodiment identical similar portion mutually referring to.
Glue spreading apparatus provided by the present invention and the nano-imprinting apparatus with the glue spreading apparatus have been carried out in detail above
Introduce.Specific case used herein is set forth to the principle and embodiment of the present invention, the explanation of above example
It is only intended to help the method and its core concept for understanding the present invention.It should be pointed out that the ordinary skill people for the art
For member, under the premise without departing from the principles of the invention, some improvement and modification can also be carried out to the present invention, these improve and
Modification is also fallen into the protection domain of the claims in the present invention.
Claims (7)
1. a kind of glue spreading apparatus, it is characterised in that including the pick-up roll (2) for picking photoresist and for by the pick-up roll
(2) photoresist on is transferred to the transferring roller (3) on material, and the pick-up roll (2) and the transferring roller (3) can be along own axes
What is rotated is set in parallel on support frame (1), is additionally provided with support frame as described above (1) for adjusting the pick-up roll (2) and institute
State the trimming piece that tightness degree is contacted between transferring roller (3)；
The trimming piece is the spiral trimming piece being arranged in the through hole of support frame as described above (1), and the spiral trimming piece is arranged on
The end of the transferring roller (3)；
Wiping knife rest support frame (10) is provided with support frame as described above (1), the wiping knife rest support frame (10) passes through wedge shape
Pad is connected with wiping knife rest (11), and the pad is used to adjust the wiping knife rest support frame (10) and the wiping knife rest
(11) angle, doctor is provided with the wiping knife rest (11).
2. glue spreading apparatus according to claim 1, it is characterised in that support frame as described above (1) by rectilinear translation platform (9) with
Wiping knife rest support frame (10) connection, the rectilinear translation platform (9) include upper mounting plate and relative with the upper mounting plate can moved
The lower platform for moving and fixing, the lower platform are fixedly connected with support frame as described above (1), the upper mounting plate and the wiping knife rest branch
Support (10) is fixedly connected.
3. glue spreading apparatus according to claim 2, it is characterised in that one of the upper mounting plate and the lower platform are
Wedge-shaped platform, another one are bonded setting with the lozenges of the wedge-shaped platform.
4. glue spreading apparatus according to claim 1, it is characterised in that the doctor is aluminium flake doctor.
5. glue spreading apparatus according to claim 1, it is characterised in that the end of the pick-up roll (2) and the transferring roller (3)
Portion is fixed with travelling gear (5), and the pick-up roll (2) is connected with motor, the driving cog of the transferring roller (3)
Wheel (5) engages with the travelling gear (5) of the pick-up roll (2).
6. glue spreading apparatus according to claim 1, it is characterised in that also include being used to control the pick-up roll (2) respectively
With the control device of the transferring roller (3) rotating speed, the control device by motor respectively with the pick-up roll (2), institute
State transferring roller (3) connection.
7. a kind of nano-imprinting apparatus, including nano impression head and glue spreading apparatus, it is characterised in that the glue spreading apparatus is right
It is required that the glue spreading apparatus described in 1 to 6 any one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610105073.6A CN105597988B (en) | 2016-02-25 | 2016-02-25 | A kind of glue spreading apparatus and the nano-imprinting apparatus with the glue spreading apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610105073.6A CN105597988B (en) | 2016-02-25 | 2016-02-25 | A kind of glue spreading apparatus and the nano-imprinting apparatus with the glue spreading apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105597988A CN105597988A (en) | 2016-05-25 |
| CN105597988B true CN105597988B (en) | 2018-04-10 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610105073.6A Active CN105597988B (en) | 2016-02-25 | 2016-02-25 | A kind of glue spreading apparatus and the nano-imprinting apparatus with the glue spreading apparatus |
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Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106827786B (en) * | 2017-02-16 | 2019-04-05 | 中国科学技术大学 | A kind of dynamic device of contactless continuous rolling |
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|---|---|---|---|---|
| DE3745173C2 (en) * | 1986-07-25 | 2000-03-02 | Valmet Corp | Short burst paper coating |
| CN101852877A (en) * | 2010-06-04 | 2010-10-06 | 清华大学 | Method and nanoimprint equipment for manufacturing moire grating |
| CN102403231A (en) * | 2011-11-22 | 2012-04-04 | 复旦大学 | Method for preparing silicon nanowire transistor by using nanoimprint and contact photo-etching |
| CN202983983U (en) * | 2012-11-01 | 2013-06-12 | 浙江天能能源科技有限公司 | Battery pole piece coating machine for experiment |
| CN203172034U (en) * | 2013-03-26 | 2013-09-04 | 南昌欧菲光科技有限公司 | Continuous stamping forming device |
| CN204564447U (en) * | 2014-08-06 | 2015-08-19 | 张晓臣 | A kind of release liners automatic double surface gluer |
-
2016
- 2016-02-25 CN CN201610105073.6A patent/CN105597988B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3745173C2 (en) * | 1986-07-25 | 2000-03-02 | Valmet Corp | Short burst paper coating |
| CN101852877A (en) * | 2010-06-04 | 2010-10-06 | 清华大学 | Method and nanoimprint equipment for manufacturing moire grating |
| CN102403231A (en) * | 2011-11-22 | 2012-04-04 | 复旦大学 | Method for preparing silicon nanowire transistor by using nanoimprint and contact photo-etching |
| CN202983983U (en) * | 2012-11-01 | 2013-06-12 | 浙江天能能源科技有限公司 | Battery pole piece coating machine for experiment |
| CN203172034U (en) * | 2013-03-26 | 2013-09-04 | 南昌欧菲光科技有限公司 | Continuous stamping forming device |
| CN204564447U (en) * | 2014-08-06 | 2015-08-19 | 张晓臣 | A kind of release liners automatic double surface gluer |
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| Publication number | Publication date |
|---|---|
| CN105597988A (en) | 2016-05-25 |
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