CN105579821A - Gas leakage detection device - Google Patents
Gas leakage detection device Download PDFInfo
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- CN105579821A CN105579821A CN201480049747.4A CN201480049747A CN105579821A CN 105579821 A CN105579821 A CN 105579821A CN 201480049747 A CN201480049747 A CN 201480049747A CN 105579821 A CN105579821 A CN 105579821A
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- gas
- air pressure
- pressure valve
- trap portion
- detection apparatus
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/16—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means
- G01M3/18—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/184—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using electric detection means for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for valves
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- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
A gas leakage detection device of the present invention comprises: a collection unit having an opening part formed at a lower end thereof such that a pneumatic valve is inserted therein, having an insertion hole formed at one side thereof through which an air supply line coupled with the pneumatic valve passes, and having a through-hole for discharging, to the outside, gas leaking due to damage to the pneumatic valve; a cover unit coupled to the opening part so as not to discharge the gas leaking from the pneumatic valve through the opening part formed at the lower end of the collection unit; an exhaust line of which one end is connected to the through-hole of the collection unit so as to discharge, to the outside, the gas leaking from the pneumatic valve; and a detection unit connected to the other end of the exhaust line so as to detect the gas contained in the exhaust air to be discharged to the exhaust line, wherein the cover unit includes a pair of cover members having grooves so as to cover an outer circumference of the pneumatic valve. The gas leakage detection device of the present invention can improve the stability and can prevent the damage of equipment by preventing the mixture of the gas leaking from each pneumatic valve and gas leaking from another pneumatic valve, and can simultaneously and rapidly implement a real-time monitoring operation and an operation of the equipment by controlling a solenoid valve and automatically and rapidly finding the pneumatic valve in which gas is detected when the detection unit detects the gas.
Description
Technical field
The present invention relates to gas leak detection apparatus, more specifically, relate to a kind of valve place being arranged at the gas tank in semiconductor equipment and trap portion is set, detect the gas from valve leak respectively, thus find out the gas leak detection apparatus of damaged valve.
Background technology
Generally, semiconductor manufacturing facility carries out treatment and processing to wafer under various environment and operation, these equipment carry out the various operations such as photoetching, diffusion, etching, chemical vapor deposition, metal deposition repeatedly to wafer, thus manufacture semi-conductor chip, and each operation is carried out under various toxic gas and solution.
Therefore, manufacture under each equipment of semiconductor is exposed to various rugged environment, various toxic gas causes equipment corrosion or distortion, thus shortens the life-span of equipment.Shorten the replacement cycle of equipment thus, maintenance management expense is increased, but also cause the process interruption of equipment thus to delay production.
Wherein, valve uses air pressure valve, and air pressure valve has pump (DiaphragmValve: diaphragm valve) or pneumatic valve (PneumaticValve) etc.
About pump or pneumatic valve, gas inflow pipe and gas outlet pipe are connected to both sides, and it utilizes the flowing controlling the gas flowing to gas outlet pipe from gas inflow pipe from the air pressure of the pressure-air of air supply unit supply.
The structure of pump or pneumatic valve is, along with the barrier film (diaphragm) to the inflow part being positioned at the gas flowed into from gas inflow pipe applies air pressure or the pressure based on air pressure, by barrier film opening and closing inflow part.
Further, the pressure-air being injected into pump or pneumatic valve is discharged to outside.
Now, if the valve event continued makes barrier film break because of fatigue phenomenon, then the toxic gas flowed into from gas inflow pipe can be discharged from the exhaust opening of the valve cap nut being formed in valve by the barrier film broken, thus leaks into outside.
In order to solve this shortcoming in the past, being isolated by the part of gas tank to the multiple valves arranging supply toxic gas in semiconductor manufacturing facility, arranging for discharging likely from the exhausr port of the toxic gas of valve leak simultaneously.Further, the toxic gas detector for detecting toxic gas is set in exhaust ports.
But, make a large amount of extraneous airs flow into the inside of gas tank because of the negative pressure of exhausr port, therefore when toxic gas can mix with the extraneous air flowing into gas tank inside from during valve leak, thus reduce the concentration of the toxic gas leaked, cause toxic gas detector not work.Namely, even if arrange toxic gas detector in exhaust ports, also because reducing concentration of toxic gases along with inflow extraneous air, thus be not easy the leakage being tested with poisonous gas, therefore be difficult to the leakage finding that there is poisonous gas in early days, exception is caused to semiconductor process.
In addition, even if toxic gas detector detects toxic gas and notifies that user's toxic gas leaks, also need to decompose one by one the multiple valves on a semiconductor equipment, to confirm that the barrier film of valve is with or without impaired.Therefore, find out the length consuming time of impaired valve, but also thus interrupt operation reduces output.
Meanwhile, except toxic gas, multiple valves of the flowing controlling oxygen, nitrogen, argon gas etc. are also provided with in existing gas tank, and the toxic gas detector being arranged at gas tank exhaust ports can only detect specific toxic gas, therefore be difficult to detect the leakage of gas and the leakages of toxic gas such as such as oxygen, nitrogen, argon gas, undetected toxic gas or other gas can cause exception to semiconductor process simultaneously.
In addition, on semiconductor production line, although pump or pneumatic valve also can be arranged across predetermined distance, but be closely aligned in specific region.
Now, for compact arranged pneumatic valve, when the valve event continued makes barrier film break because of fatigue phenomenon, if for the exhaust opening of externally gas leakage towards adjacent pneumatic valve, be then difficult to arrange the structure for captured gas.Therefore, need to develop the gas trapping structure that the dissimilar pneumatic valve in position of this pneumatic valve and exhaust opening can both be suitable for.
At first technical literature
No. 2011-107034, (patent documentation 1) Japanese Laid-Open Patent Publication Laid-Open
No. 2008-0004184th, (patent documentation 2) Korean Utility Model Publication
No. 1326766th, (patent documentation 3) Korean granted patent publication
No. 0857235th, (patent documentation 4) Korean granted patent publication
Summary of the invention
Technical matters to be solved
In order to solve problem as above, the object of the present invention is to provide a kind of gas leak detection apparatus, by connecting trap portion and the test section that can detect gas at gas exhaust piping, each air pressure valve controlling gas flowing is contained and the gas trapped from air pressure valve leakage in described trap portion, prevent the gas leaked from each air pressure valve and the gas and vapor permeation leaked from other air pressure valve thus, thus can stability be improved and the damage of prevention apparatus, simultaneously by test section sense gas leakage in real time, therefore, it is possible to realize Real-Time Monitoring.
In addition, the object of the present invention is to provide a kind of gas leak detection apparatus, be arranged at the air pressure valve on semiconductor production line arranges trap portion time, wing is utilized to be embedded in the upside of air pressure valve and even side and the trapping mouth of trap portion and the exhaust opening of air pressure valve mutually to be alignd, or will be communicated with discharge opening and the end Intercalation of the extension extended to opposite side in because air pressure valve is damaged in the exhaust opening of gas leakage, thus without the need to stopping semiconductor production line, do not affect the work of semiconductor production line, and the expenses etc. that the output stopping semiconductor production line causing can be avoided to reduce and cause thus.
In addition, the object of the present invention is to provide a kind of gas leak detection apparatus, when air pressure valve close-packed arrays, have nothing to do with the position of the exhaust opening of leakage air on air pressure valve or gas, easily the position of the trapping mouth be formed in trap portion and wing can be moved to exhaust opening place, or soft trap portion is stretched or bends, thus easily the position of trapping mouth can be moved to exhaust opening place, and can easily embed trap portion by the gap strutted of each coil of fixed component and it is closely fixed on the outer peripheral face of air pressure valve.
In addition, the object of the present invention is to provide a kind of gas leak detection apparatus, because thumbpiece has elastic force, do not need the supernumerary structure be closely fixed on by trap portion on air pressure valve, by means of only simple combination, can trap portion and leak be set opposite to each other, thus easily can trap the air or gas that leak from air pressure valve, trap mouth simultaneously and combine closely on air pressure valve by elastic force, only trap the air leaked from air pressure valve or gas, thus can reliability be improved.
In addition, the object of the present invention is to provide a kind of gas leak detection apparatus, whether the discharge of multiple gas exhaust pipings of port solenoid valve is connected to by port solenoid control, only the gas of discharging from the some gas exhaust pipings in the multiple gas exhaust pipings being connected to port solenoid valve is discharged to test section by connecting line, thus prevent the gas leaked from each air pressure valve and the gas and vapor permeation leaked from other air pressure valve, improve stability thus and the damage of prevention apparatus, the control port solenoid valve when test section detects gas simultaneously, thus promptly automatically find out the air pressure valve detecting Leakage Gas, therefore, it is possible to carry out real-time monitoring and make equipment carry out work rapidly.
In addition, the object of the present invention is to provide a kind of gas leak detection apparatus, when test section detects gas, controller control port solenoid valve is to determine damaged air pressure valve, and the intrinsic information of determined air pressure valve is presented on display part, thus make supvr easily determine damaged air pressure valve, and promptly determined air pressure valve is managed, therefore, it is possible to improve the work efficiency of equipment.
The scheme of technical solution problem
In order to reach object as above, the gas leak detection apparatus that the present invention relates to, comprise: trap portion, peristome is formed with to insert air pressure valve in lower end, patchhole and through hole is formed in its side, the described supply air line running through and have and be combined with air pressure valve that inserts in the hole, described through hole is used for the gas leaked when externally discharging the breakage of described air pressure valve; Cover section, is combined with the peristome being formed in described trap portion lower end, is discharged by peristome for preventing the gas leaked from described air pressure valve; Gas exhaust piping, its one end is connected with the through hole of described trap portion, for being discharged to the outside by the gas leaked from described air pressure valve; And test section, be connected to the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping, described cover section comprises a pair cover component, described a pair cover component is formed with groove, to surround the outer peripheral face of described air pressure valve.
The gas leak detection apparatus that another embodiment of the present invention relates to, comprising: trap portion, up/down perforation to insert air pressure valve, upper and lower side be formed with peristome and externally discharge described air pressure valve damaged time the through hole of gas that leaks; Cover section, is combined with the peristome being formed in described trap portion upper and lower side, is discharged by peristome to prevent the gas leaked from described air pressure valve; Gas exhaust piping, its one end is connected with the through hole of described trap portion, to be discharged to the outside by the gas leaked from described air pressure valve; And test section, be connected to the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping, described cover section comprises a pair cover component, described a pair cover component is formed with groove, to surround the outer peripheral face of described air pressure valve.
The gas leak detection apparatus that another embodiment of the present invention relates to, comprising: trap portion, for trapping the gas leaked because air pressure valve is damaged; Gas exhaust piping, its one end is combined with the discharge opening of described trap portion, is discharged to the outside for the exhaust of being discharged by the discharge opening from described trap portion; Test section, be incorporated into the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping, described trap portion has trapping mouth, described trapping tight-lipped close be fixed on described air pressure valve damaged time gas leakage exhaust opening sentence the described gas of trapping, described trap portion also comprises wing, and described wing is by protruding from both sides respectively and a pair thumbpiece surrounding described air pressure valve outer peripheral face is formed, and described a pair thumbpiece has elastic force in opposite directions.
In addition, it is characterized in that, the exhaust opening of gas leakage is formed in the upper and lower of described air pressure valve, and described trap portion extends to form towards top, and the trapping mouth of the gas leaked when being also formed on top for trapping the breakage of described air pressure valve.
In addition, it is characterized in that, the bending or bending of described thumbpiece is formed, and by carrying out the outer peripheral face of air pressure valve described in resiliency supported towards the elastic force of described air pressure valve, and is closely incorporated into described exhaust opening place by tight-lipped for described trapping.
In addition, it is characterized in that, the length direction that described trapping opening's edge described thumbpiece is elongated hole-shape.
In addition, it is characterized in that, at the outer peripheral face coating rippability bonding agent of described trapping mouth, thus described trap portion is closely fixed on removably the outer peripheral face of described air pressure valve, to prevent described Leakage Gas.
The gas leak detection apparatus that another embodiment of the present invention relates to, it is characterized in that, comprise: trap portion, for trapping the gas leaked because air pressure valve is damaged, the spue side of discharge opening of trapped gas of being formed in described trap portion is provided with cover hand-hole; Gas exhaust piping, its one end Intercalation in described cover hand-hole, the exhaust that the discharge opening from described trap portion is discharged is discharged to the outside; Test section, be incorporated into the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping, described trap portion has extension and trapping mouth, described extension is communicated with described discharge opening and opposite side towards described discharge opening extends, the end of described extension is formed with described trapping mouth, in the exhaust opening of described trapping mouth Intercalation gas leakage when described air pressure valve is damaged, for trapping described gas.
In addition, it is characterized in that, described air pressure valve is formed with the exhaust opening of multiple gas leakage, described trap portion has the multiple trapping mouths of Intercalation in each described exhaust opening, so that the gas leaked when trapping the breakage of described air pressure valve.
In addition, it is characterized in that, comprise fixed component further, it surrounds the outer peripheral face of described air pressure valve and two ends combine, and by being embedded in the gap strutted of each coil by described trap portion, thus is closely fixed on described air pressure valve by described trap portion.
In addition, it is characterized in that, comprise pin portion, it is formed in the entrance of described trapping mouth, gives prominence to, and be inserted in the inside of described exhaust opening in the mode that can be inserted in the exhaust opening of described air pressure valve.
In addition, it is characterized in that, comprise further: port solenoid valve, it is arranged on the pars intermedia of gas exhaust piping, by the control of controller the gas leakage of discharging from each gas exhaust piping discharged respectively or together discharge, described gas exhaust piping be separately positioned on each trap portion with captured gas on multiple air pressure valve and be combined; And controller, when described test section detects Leakage Gas, by the discharge of the multiple gas exhaust piping of described port solenoid control whether.
In addition, it is characterized in that, the data of the detection limit of the kind and gas leakage that comprise the gas leakage that described test section detects are sent to management server by described controller in real time, described management server receives the data from described controller, exports and be supplied to supvr with graph mode.
In addition, it is characterized in that, comprise display part further, gas detected when described test section and control described port solenoid valve by described controller, thus after determining damaged air pressure valve, described display part shows the intrinsic information of determined air pressure valve, wherein, for multiple air pressure valve, preset described intrinsic information respectively.
In addition, it is characterized in that, described test section comprises: toxic gas detector, for detecting the toxic gas leaked from the air pressure valve controlling toxic gas flowing; Oxygen sensor, for detecting the gas leaked from the air pressure valve of control oxygen, nitrogen, argon gas flowing.
In addition, it is characterized in that, described test section comprises: the first alarm portion, gives the alarm when toxic gas being detected by described toxic gas detection portion; Second alarm portion, gives the alarm when gas being detected by described oxygen sensor.
Invention effect
Effect of the present invention as above is, a kind of gas leak detection apparatus can be provided, prevent the gas leaked from each air pressure valve and the gas and vapor permeation leaked from other air pressure valve, thus can stability be improved and the damage of prevention apparatus, the control port solenoid valve when test section detects gas simultaneously, thus promptly automatically find out air pressure valve gas being detected, therefore, it is possible to carry out real-time monitoring and make equipment carry out work rapidly.
In addition, effect of the present invention is, can provide a kind of gas leak detection apparatus, without the need to stopping semiconductor production line, therefore the work of semiconductor production line is not affected, and the expenses etc. that the output stopping semiconductor production line causing can be avoided to reduce and cause thus.
In addition, effect of the present invention is, a kind of gas leak detection apparatus can be provided, when air pressure valve close-packed arrays, have nothing to do with the position of the exhaust opening of leakage air on air pressure valve or gas, easily the position of trapping mouth can be moved to exhaust opening place, and easily can embed trap portion by the gap strutted of each coil of fixed component and closely be fixed on the outer peripheral face of air pressure valve.
In addition, effect of the present invention is, a kind of gas leak detection apparatus can be provided, because thumbpiece has elastic force, do not need the supernumerary structure be closely fixed on by trap portion on air pressure valve, by means of only simple combination, can trap portion and leak be set opposite to each other, thus easily can trap the air or gas that leak from air pressure valve, trap mouth combines closely on air pressure valve by elastic force simultaneously, only traps the air leaked from air pressure valve or gas, thus can improve reliability.
In addition, effect of the present invention is, a kind of gas leak detection apparatus can be provided, prevent the gas leaked from each air pressure valve and the gas and vapor permeation leaked from other air pressure valve, thus can stability be improved and the damage of prevention apparatus, the control port solenoid valve when test section detects gas simultaneously, thus promptly automatically find out the air pressure valve detecting Leakage Gas, therefore, it is possible to carry out real-time monitoring and make equipment carry out work rapidly.
Accompanying drawing explanation
Fig. 1 is the stereographic map that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Fig. 2 is the exploded perspective view that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Fig. 3 is the sectional view that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Fig. 4 illustrates that gas leak detection apparatus that the preferred embodiments of the present invention relate to possesses the schematic diagram of the state of port solenoid valve.
Fig. 5 illustrates that gas leak detection apparatus that the preferred embodiments of the present invention relate to possesses the sectional view of the state of port solenoid valve.
Fig. 6 is the sectional view of the state that the gas leak detection apparatus captured gas related to by the preferred embodiments of the present invention is shown.
Fig. 7 is the structural drawing that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Fig. 8 is the exploded perspective view of another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Fig. 9 is the stereographic map of another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Figure 10 is the exploded perspective view of the trap portion that Fig. 9 is shown.
Figure 11 is another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown, is the stereographic map of the state be combined with air pressure valve.
Figure 12 is the stereographic map that the state that the trap portion of Fig. 9 and air pressure valve are combined by different way is shown.
Figure 13 is the stereographic map being combined with the state in pin portion in the trapping mouth that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Figure 14 is the stereographic map of another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Figure 15 is the exploded perspective view of the trap portion that Figure 14 is shown.
Figure 16 and Figure 17 illustrates that the trap portion of the gas leak detection apparatus that the preferred embodiments of the present invention relate to fixes the stereographic map of state on the fixing element.
Reference numeral:
1: air pressure valve 2: gas inflow pipe 3: gas outlet pipe
4: exhaust opening 5: air supply unit 6: supply air line
8: stopper 9: barrier film 10: housing
11: peristome 12: patchhole 13: through hole
14: valve cap nut 15: cylinder 20: cover section
21: cover component 22: groove 30: gas exhaust piping
40: test section 41: toxic gas detector
42: oxygen sensor 43: alarm portion of alarm portion 44: the first
45: the second alarm portions 50: vent valve 51: port solenoid valve
60: pump 70: sealing 71: connecting portion
72: fixed component 73:O shape ring 80: controller
82: display part 90: connecting line 100: management server
111: discharge opening 112: trapping mouth 113:O shape ring
114: pin portion 116: extension 117: insertion groove
120: wing 121: thumbpiece 130: fixed component
131: coil 132: gap
Embodiment
Below, by embodiments of the invention, with reference to the accompanying drawing for illustration of gas leak detection apparatus, the present invention will be described.
Fig. 1 is the stereographic map that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.Fig. 2 is the exploded perspective view that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.Fig. 3 is the sectional view that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
Referring to figs. 1 through Fig. 3, the gas leak detection apparatus that the present invention relates to comprises trap portion 10, cover section 20, gas exhaust piping 30 and test section 40.
First, trap portion 10 is hollow and in cylindric, is formed with peristome 11 to insert air pressure valve 1 in its lower end.
In addition, except cylindrical, trap portion 10 also can be the various shapes such as polygonal column.
At this, trap portion 10 preferably has specified altitude, time damaged with box lunch air pressure valve 1 described later, makes to be formed in inside air pressure valve 1 being positioned at trap portion 10 for the exhaust opening 4 be discharged to the outside by gas.
In addition, patchhole 12 and through hole 13 is formed with in the side of trap portion 10.
Preferably formed through to inner patchhole 12 and through hole 13 on the top of trap portion 10.
The supply air line 6 be combined with air pressure valve 1 runs through patchhole 12.
In addition, through hole 13 is formed through into, make the outside gas leaked because air pressure valve 1 is damaged after being supplied to air pressure valve 1 being discharged to trap portion 10.
Namely, the trap portion 10 of the gas leak detection apparatus that the present invention relates to is arranged on each air pressure valve 1, when being leaked because air pressure valve 1 is damaged by the gas of air pressure valve 1, respectively captured gas with prevent leaked Leakage Gas to outside and with the gas and vapor permeation leaked from other air pressure valve 1.
Cover section 20 is incorporated into the peristome 11 of trap portion 10, is discharged by peristome 11 to prevent the gas leaked because air pressure valve 1 is damaged.
Now, the mode that cover section 20 is incorporated into the peristome 11 of trap portion 10 is preferably, and under the state that the exhaust opening 4 be formed on air pressure valve 1 is positioned at trap portion 10 inside, surrounds the outer peripheral face of the air pressure valve 1 on the downside of exhaust opening 4.
On the other hand, because trap portion 10 can be formed as surrounding air pressure valve 1 and being incorporated into gas inflow pipe 2 and the gas outlet pipe 3 at air pressure valve 1 two ends, therefore cover section 20 is more preferably can the mode of peristome 11 of opening and closing trap portion 10 be formed.
In addition, cover section 20 comprises a pair cover component 21, described a pair cover component 21 is formed with groove 22 to surround the outer peripheral face of air pressure valve 1.
At this, cover component 21 is formed as by central authorities by the binary semi-circular shape of through disk, forms groove 22 at its diameter parts.
That is, in a side of a pair cover component 21, groove 22 part coating adhesive, thus while a side is pasted trap portion 10 lower surface, diameter parts is connected, so described cover component 21 is incorporated into the peristome 11 of trap portion 10.Thus, cover component 21 closes the peristome 11 of trap portion 10.
At this, air pressure valve 1 is that both sides are connected to gas inflow pipe 2, gas outlet pipe 3, and utilizes the air pressure of the pressure-air supplied from air supply unit 5 to control the valve of the flowing flowing to the gas of gas outlet pipe 3 from gas inflow pipe 2.Preferably, carry out the inflow part of opening and closing gas inflow pipe 2 with barrier film, and realize its opening and closing by the air pressure of pressure-air.
Such as, air pressure valve 1 can be made up of diaphragm valve (DiaphragmValve) or pneumatic valve (PneumaticValve) etc.
That is, air pressure valve 1 is arranged between gas inflow pipe 2 and gas outlet pipe 3, makes the gas process shifting to gas outlet pipe 3 from gas inflow pipe 2, utilizes barrier film to carry out the passage of opening and closing gas process by the air pressure of pressure-air.In addition, also possess and move up and down when applying pressure-air and stressed stopper 8 is executed to barrier film 9.
Semiconductor equipment arranges multiple this air pressure valve 1, and above-mentioned trap portion 10 or the trap portion 10 of another embodiment described later are set in the leakage air of each air pressure valve 1 or each exhaust opening 4 place of gas.
This be in order to, when leaking because air pressure valve 1 is damaged through the gas of air pressure valve 1, respectively captured gas with prevent leaked Leakage Gas to outside and with the gas and vapor permeation leaked from other air pressure valve 1.
Further, the valve cap nut 9 being provided with barrier film 9 is formed with exhaust opening 4, to be discharged to the outside of air pressure valve 1 when barrier film 9 is damaged.
In addition, at the exhaust opening 4 being formed with gas leakage up and down of air pressure valve 1, exhaust opening 4 comprises gas discharge hole 4 and air exhaust opening 4, described gas discharge hole 4 be formed in barrier film 9 is set valve cap nut 14 on to make Leakage Gas to the outside of air pressure valve 1 when barrier film 9 is damaged, described air exhaust opening 4 makes the pressure-air of control barrier film 9 opening and closing leak into outside when the cylinder 15 being arranged at air pressure valve 1 inside is damaged.Hereinafter, exhaust opening 4 refers to more than one in gas discharge hole 4 and air exhaust opening 4.
In addition, the air that air pressure valve 1 uses is clean dry air (CleanDryAir, CDA) or ordinary nitrogen (GeneralN
2, GN
2), when using ordinary nitrogen, if the cylinder 15 of air pressure valve 1 is damaged, then ordinary nitrogen can be made to leak, and trap the ordinary nitrogen of leaking along with housing 10, the oxygen concentration in housing can reduce, and test section 40 can detect oxygen thus.The present invention can be detected because of the barrier film 9 of air pressure valve 1 and the damaged and gas that leaks of cylinder 15 by test section 40, and can detect which position breakage of air pressure valve 1.
In addition, the pressure-air supplied from air supply unit 5 is guided to air pressure valve 1 by the supply air line 6 be incorporated on air pressure valve 1.
Now, supply air line 6 runs through patchhole 12 and is incorporated into the top of air pressure valve 1.Further, preferably supply air line 6 run through patchhole 12 and in conjunction with time carry out encapsulation process between itself and patchhole 12, to prevent the Leakage Gas leaked because air pressure valve 1 is damaged.
One end of gas exhaust piping 30 is connected with the through hole 13 of trap portion 10, and the other end is connected with test section 40 described later.
In addition, gas exhaust piping 30 guides the gas of discharging from through hole, can be discharged to test section 40.
Be discharged to the gas of test section 40 by gas exhaust piping 30 from through hole 13, also can be mixed with the air of discharging because cylinder 15 is damaged after being supplied to air pressure valve 1.
Test section 40 is incorporated into the other end of gas exhaust piping 30, to detect the gas comprised in the exhaust of being discharged by gas exhaust piping 30.
Namely, test section 40 is for the leakage of gas-monitoring, it comprises more than one in toxic gas detector 41 or oxygen sensor 42, preferably comprise toxic gas detector 41 and oxygen sensor 42 simultaneously, described toxic gas detector 41 is for detecting the toxic gas leaked from the air pressure valve 1 controlling toxic gas flowing, and described oxygen sensor 42 is for detecting the gas leaked from the air pressure valve 1 of control oxygen, nitrogen, argon gas flowing.
At this, toxic gas detector 41 uses ToxicGasDetector, and oxygen sensor 42 uses O
2sensor.
In addition, preferably, gas exhaust piping 30 and toxic gas detector 41 and controls the air pressure valve 1 that toxic gas flows and be connected, and be connected with oxygen sensor 42 and the air pressure valve 1 controlling oxygen, nitrogen, argon gas flow.
Further, preferably, the other end of the gas exhaust piping 30 of each air pressure valve 1 be integrated into a pipeline and be connected with the toxic gas detector 41 of test section 40 or oxygen sensor 42.
Oxygen sensor 42 based on the oxygen concentration in oxygen, nitrogen, argon gas higher or lower than in air oxygen concentration namely about 20.9% situation detect gas.
Such as, when leaking oxygen from air pressure valve 1, oxygen sensor 42 can detect the concentration (20.9%) of the concentration of oxygen higher than the oxygen in air.Can learn that the air pressure valve 1 controlling oxygen flowing is damaged thus.
In addition, when leaking nitrogen or argon gas from air pressure valve 1, oxygen sensor 42 can detect the concentration (20.9%) of oxygen concentration lower than the oxygen comprised in air, can learn that the air pressure valve 1 controlling nitrogen or argon gas flowing is damaged thus.
Therefore, in gas leak detection apparatus of the present invention, trap portion 10 and cover section 20 are arranged on each air pressure valve 1, the gas that trapping is leaked because air pressure valve 1 is damaged is also discharged to test section 40 by gas exhaust piping 30, thus from certain air pressure valve 1 gas leakage air pressure valve 1 whether can easily determine, but also easily determine the kind of gas leakage, and only check the air pressure valve 1 corresponding to this kind, thus promptly can find out the air pressure valve 1 of gas leakage.
On the other hand, test section 40 comprises alarm portion 43, and described alarm portion 43 is detecting the gas comprised in the exhaust of being discharged by gas exhaust piping 30 or connecting line 90, namely, when toxic gas detector 41 or oxygen sensor 42 detect gas, give the alarm.
In addition, alarm portion 43 comprises: the first alarm portion 44, gives the alarm when toxic gas being detected by toxic gas detection portion 41; Second alarm portion 45, gives the alarm when gas being detected by oxygen sensor 42.
Thus, user can stop the work of shop equipment based on the alarm in alarm portion 43.
On the other hand, the Leakage Gas monitoring device that the present invention relates to also comprises vent valve 50, pump 60 and sealing 70.
Vent valve 50 is arranged on the pars intermedia of gas exhaust piping 30, whether discharges for controlling the gas being discharged to test section 40 from trap portion 10.
The effect of this vent valve 50 is, when test section 40 detects gas, easily finds out the air pressure valve 1 of gas leakage.
Such as, when test section 40 detects gas, after all being closed by all vent valves 50 be separately positioned in gas exhaust piping 30, individually the some vent valves 50 of opening and closing, can find out the air pressure valve 1 of gas leakage thus.Namely, if test section 40 detects gas when opening certain vent valve 50, then mean from this vent valve 50 gas leakage, therefore, it is possible to judge rapidly have not from air pressure valve 1 gas leakage at short notice, make equipment promptly carry out work, and the maintenance cost of equipment can be saved.
Pump 60 is arranged on the other end of gas exhaust piping 30, for the air of discharging from gas exhaust piping 30 is moved to test section 40.
The effect of pump 60 is, makes the gas trapped at trap portion 10 move quickly into test section 40, thus makes test section 40 detect the leakage of gas fast.
In addition, pump 60 can form as one with test section 40, also can be separated from one another.
Sealing 70 comprises connecting portion 71, fixed component 72 and O shape ring 73.
The effect of sealing 70 is, seals the part between gas exhaust piping 30 and trap portion 10, is discharged by gas exhaust piping 30 to enable the exhaust trapped at trap portion 10.
The connecting portion 71 of this sealing 70 is incorporated into one end of gas exhaust piping 30, is formed with the teat be inserted in through hole 13 in its underpart.
Further, preferably, connecting portion 71 is to be formed through the mode of the communicating exhaust gas trapped at trap portion 10 to gas exhaust piping 30.
Fixed component 72 with to be inserted in through hole 13 and the teat inner outstanding to trap portion 10 is combined, and be combine in the inside of trap portion 10.Thus, connecting portion 71 is fixed on trap portion 10 by fixed component 72.In addition, can also packing ring be provided with between fixed component 72 and the medial surface of trap portion 10, but be not limited thereto.
Now, screw thread can be formed at the outer peripheral face of teat, and fixed component 72 is formed as nut thus can be screwed with this, but be not limited to this.
O shape ring 73 is enclosed within the teat of connecting portion 71, thus the part between portion 71 and trap portion 10 that is tightly connected.
Thus, the gas leak detection apparatus that the present invention relates to prevents the gas leaked from each air pressure valve 1 and the gas and vapor permeation leaked from other air pressure valve 1, thus can stability be improved and the damage of prevention apparatus, test section 40 sense gas leakage in real time simultaneously, therefore, it is possible to realize Real-Time Monitoring.
Fig. 4 illustrates that gas leak detection apparatus that the preferred embodiments of the present invention relate to possesses the schematic diagram of the state of port solenoid valve.Fig. 5 illustrates that gas leak detection apparatus that the preferred embodiments of the present invention relate to possesses the sectional view of the state of port solenoid valve.Fig. 6 is the sectional view of the state that the gas leak detection apparatus captured gas related to by the preferred embodiments of the present invention is shown.Fig. 7 is the structural drawing that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
With reference to Fig. 4 to Fig. 7, the gas leak detection apparatus that the present invention relates to also comprises port solenoid valve 51, controller 80 and display part 82.
Port solenoid valve 51 is arranged on the pars intermedia of gas exhaust piping 30, this gas exhaust piping 30 be separately positioned on each trap portion 10 with captured gas on multiple air pressure valve 1 and be combined, the gas leakage of discharging from each gas exhaust piping 30 is discharged or together discharges by the control of controller 80 by this port solenoid valve 51 respectively.
At this, each air pressure valve 1 possesses gas exhaust piping 30, trap portion 10 and port solenoid valve 51, and forms a connecting line 90 between port solenoid valve 51 and test section 40.In other words, connecting line 90 connectivity port solenoid valve 51 and test section 40, and guide the gas of discharging from port solenoid valve 51 to move it test section 40.
That is, flow into the gas of being discharged by multiple gas exhaust piping 30 to port solenoid valve 51, then discharge this gas by a connecting line 90.At this, when test section 40 described later detects gas, to be controlled by controller 80, make only to be discharged by connecting line 90 from some gas exhaust pipings 30 inflow gas multiple gas exhaust piping 30.Discharged the gas of discharging from each gas exhaust piping 30 by connecting line 90, thus test section 40 can successively and exactly be confirmed from which gas exhaust piping 30 Exhaust Gas.
On the other hand, the action relationships of port solenoid valve 51 and control are known contents, therefore omit detailed action relationships and control explanation.
Therefore, in gas leak detection apparatus of the present invention, each air pressure valve 1 all arranges trap portion 10, the gas that trapping is leaked because air pressure valve 1 is damaged is also discharged to test section 40 by gas exhaust piping 30, port solenoid valve 51 and connecting line 90, thus can easily define not from certain air pressure valve 1 gas leakage air pressure valve 1, but also easily determine the kind of gas leakage, and only check the air pressure valve 1 corresponding to this kind, thus can promptly find out just at the air pressure valve 1 of gas leakage.
When test section 40 detects gas, whether control part 80 controls the discharge of the multiple gas exhaust pipings 30 be connected with port solenoid valve 51 respectively, thus the gas that the some gas exhaust pipings 30 by being connected in multiple gas exhaust pipings 30 of port solenoid valve 51 are discharged is discharged to test section 40 via connecting line 90.
That is, as mentioned above, controller 80 can control port solenoid valve 51 automatically, and whether the exhaust therefore controlling gas exhaust piping 30 one by one without the need to user also can promptly be found out is by which gas exhaust piping 30 gas leakage.Thereby, it is possible to make semiconductor equipment promptly restart, and maintenance cost can be saved.
In addition, the data of the detection limit of the kind and gas that comprise the gas that test section 40 detects are sent to management server 100 by controller 80 in real time.
Further, management server 100 receives the data sent from controller 80, and exports as chart.
Namely, supvr passes through kind and the detection limit that gas easily determined by exported chart, can predict whether at gas leakage thus, even if therefore when above-mentioned alarm portion 43 does not give the alarm, or also can carry out corresponding to the prior preparation of Leakage Gas and prior maintenance management before giving the alarm.
When test section 40 detects gas and by controller 80 control port solenoid valve 51, thus after determining damaged air pressure valve 1, display part 82 shows the intrinsic information of determined air pressure valve 1.
Such as, showing at the trap portion 10 be connected with gas exhaust piping 30 or air pressure valve 1 accordingly from the sequence number begun to end of gas exhaust piping 30 is controlled with port solenoid valve 1, within the time of controller 80 control port solenoid valve 51, test section 40 detects gas, then the control sequence number of respective row air pipe 30 is presented on display part 82, user just promptly can find out the air pressure valve 1 with the order number matches shown on display part 82, namely damaged air pressure valve 1.
In addition, except the intrinsic information of air pressure valve 1, display part 82 can also show the kind of detected gas and the gas flow of detection.
Fig. 8 is the stereographic map of another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
With reference to Fig. 8, the trap portion 10 of the gas leak detection apparatus that the present invention relates to can not surround whole air pressure valve 1 but only surround valve cap nut 14, thus the gas that trapping is leaked from valve cap nut 14.
At this, the inscape of gas leak detection apparatus is identical with the formation of above-mentioned gas leak detection apparatus, except the upper end of trap portion 10 is also formed with peristome 11, and comprises this peristome 11 of covering to seal the cover section 20 of trap portion 10 inside.
Further, the through hole 13 of trap portion 10 can be formed in side.
In other words, trap portion 10 is by up/down perforation to insert air pressure valve 1, and lower end is formed with peristome 11 thereon, and is formed with the through hole 13 be discharged to the outside by the gas leaked because air pressure valve 1 is damaged.
The gas trapped at trap portion 10 is discharged to test section 40 by the gas exhaust piping 30 be connected with through hole 13, then detects gas by test section 40.
Fig. 9 is the stereographic map of another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.Figure 10 is the exploded perspective view of the trap portion that Fig. 9 is shown.Figure 11 is another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown, and the stereographic map of the state be combined with air pressure valve is shown.Figure 12 is the stereographic map that the state that the trap portion of Fig. 9 and air pressure valve are combined by different way is shown.Figure 13 is the stereographic map being combined with the state in pin portion in the trapping mouth that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.
With reference to Fig. 9 and Figure 10, trap portion 10 traps the gas leaked because air pressure valve 1 is damaged.
That is, trap portion 10 has trapping mouth 112, and described trapping mouth 112 is closely fixed on exhaust opening 3 place of gas leakage because air pressure valve 1 leaks, thus captured gas.
One end of above-mentioned gas exhaust piping 30 is combined with the discharge opening 111 of trap portion 10, thus the exhaust that the discharge opening 111 by trap portion 10 is discharged is discharged to the outside.
Further, the inside of trap portion 10 is hollow form, its outer openings in case with one end of gas exhaust piping 30 described later in conjunction with time, make it be communicated with trapping mouth 112.
Further, at the trapping mouth 112 outer peripheral face coating rippability bonding agent of trap portion 10.This is the outer peripheral face in order to trap portion 10 being closely fixed on removably air pressure valve 1, and carries out closely fixing to prevent gas from leaking between air pressure valve 1 and trap portion 10.
In addition, outside the entrance of the trapping mouth 112 of trap portion 10, O shape ring 113 is provided with.This is in order to the part between the outer peripheral face of blanket gas pressure valve 1 and trap portion 10, leaks between air pressure valve 1 and trap portion 10 to prevent gas.
With reference to Figure 11, trap portion 10 extends to form towards top, and is also formed on top for trapping because air pressure valve 1 is damaged by the exhaust opening 4 i.e. trapping mouth 112 of the air of air exhaust opening 4 leakage.
On the other hand, the gas leak detection apparatus that the present invention relates to also comprises wing 120.
Wing 120 is made up of a pair thumbpiece 121, and described a pair thumbpiece 121 protrudes from the both sides of trap portion 10 respectively and surround the outer peripheral face of air pressure valve 1.
In addition, for wing 120, the various combinations that the thumbpiece 121 that can make a pair can be adopted to surround air pressure valve 1 be combined with each other.
Such as, to the knotting combination tied a knot in the two ends of thumbpiece 121, utilize the button combination of button dismounting, a certain combination in band combination, fixture combination or magic tape combination can be adopted in addition.
In addition, wing 121 can be made up of the elastic ribbon (band) with contractility, thus independently the trapping mouth 112 of trap portion 10 is closely fixed on exhaust opening 4 place with the thickness of air pressure valve 1, now can improve clinging force compared with above-mentioned combination.
In addition, thumbpiece 121 preferably has elastic force in opposite directions, and this is outer peripheral face in order to resiliency supported air pressure valve 1 and is closely fixed on air pressure valve 1 by trap portion 10.
Further, thumbpiece 121 is preferably configured in trapping mouth 112 both sides of trap portion 10, and is configured in the upper and lower of the trapping mouth 112 of above-below direction formation.
On the other hand, thumbpiece 121 bends or bending formation.This is in order to the outer peripheral face by carrying out resiliency supported air pressure valve 1 towards the elastic force of air pressure valve 1.Thus, trapping mouth 112 can be combined closely in exhaust opening 4 place by thumbpiece 121.
Now, the length of thumbpiece 121 is greater than the length of 1/4 arc of air pressure valve 1 outer peripheral face, and because thumbpiece 121 surrounds the over half of air pressure valve 1 outer peripheral face, wing 120 is not easy to come off because of external force.
In addition, thumbpiece 121 is formed with trapping mouth 112, the inside of described trapping mouth 112 is communicated with the inside of trap portion 10, and medial surface opening.
Now, the trapping mouth being formed in trap portion 10, with in the trapping mouth be formed on thumbpiece 121, optionally only can be formed some, also can be formed respectively.
With reference to Figure 12, when air pressure valve 1 close-packed arrays, have nothing to do with the position of the exhaust opening 4 of the leakage air on air pressure valve 1 or gas, easily the position of the trapping mouth 112 be formed in trap portion 10 and wing 120 can be moved to exhaust opening 4 place.In other words, when the position of exhaust opening 4 is towards other adjacent air pressure valve 1, when causing the narrow space for trap portion 10 being connected to exhaust opening 4 place, wing 120 can be utilized to connect in exhaust opening 4.
Thus, according to circumstances, the some trapping mouths 112 in multiple trapping mouth 112 are combined closely in the exhaust opening 4 of air pressure valve 1.
Further, the trapping mouth 112 be formed on thumbpiece 121 is formed in the medial surface of the thumbpiece 121 with elastic force direction, is preferably formed in the contact site of the thumbpiece 121 that thumbpiece 121 and air pressure valve 1 contact with each other.
At this, trapping mouth 112 is preferably formed in the medial surface of thumbpiece 121 resiliency supported air pressure valve 1 outer peripheral face.As mentioned above, this is that the exhaust opening 4 making to be formed in trapping mouth 112 on thumbpiece 121 and air pressure valve 1 under state in order to form trapping mouth 112 on thumbpiece 121 is close to mutually.
Meanwhile, trapping mouth 112 can be elongated hole-shape along the length direction of thumbpiece 121.Further, the opening diameter trapping mouth 112 is more than or equal to the diameter of exhaust opening 4.
Namely, trapping mouth 112 is in elongated hole-shape, thus easily regulate when moving left and right trap portion 10 and wing 120 trapping mouth 112 and exhaust opening 4 are interconnected, make the setting of the gas leak detection apparatus that the present invention relates to become easy, and easily trap the air of leaking from exhaust opening 4.
With reference to Figure 13, trap portion 10 comprises the pin portion 114 of the entrance being arranged on trapping mouth 112, and this pin portion 114 gives prominence in the mode that can be inserted in the exhaust opening 3 of air pressure valve 1, and is inserted in the inside of exhaust opening 4.
Now, the inside in preferred pin portion 114 is hollow, and its outstanding distal opening, thus be communicated with trapping mouth 112.
In addition, the outside diameter in preferred pin portion 114 is identical with the inside diameter of exhaust opening 4, to be embedded in exhaust opening 4 in pin portion 114.
Meanwhile, the lateral surface in preferred pin portion 114 is made up of flexible material or rigid material, to seal the part between the lateral surface in pin portion 114 and the medial surface of exhaust opening 4 when inserting in exhaust opening 4, but is not limited thereto.
Figure 14 is the stereographic map of another embodiment of the trap portion that the gas leak detection apparatus that the preferred embodiments of the present invention relate to is shown.Figure 15 is the exploded perspective view of the trap portion that Figure 14 is shown.Figure 16 and Figure 17 illustrates that the trap portion of the gas leak detection apparatus that the preferred embodiments of the present invention relate to fixes the stereographic map of state on the fixing element.
With reference to Figure 14 to Figure 17, trap portion 10 traps the gas leaked because air pressure valve 1 is damaged.
In addition, trap portion 10 has trapping mouth 112, and described trapping mouth 112 is closely fixed on because air pressure valve 1 is damaged that the exhaust opening 4 of gas leakage sentences just captured gas.
Further, trap portion 10 has discharge opening 111, and the gas trapped from trapping mouth 112 is spued by described discharge opening 111.
That is, form discharge opening 111 in the side of trap portion 10, and form trapping mouth 112 at opposite side.
Now, be formed with cover hand-hole 117 in the side of trap portion 10, gas exhaust piping 30 Intercalation described later is in described cover hand-hole 117.
Further, be formed with extension 116 at the opposite side of trap portion 10, described extension 4 is communicated with discharge opening 111 and extends.Now, the end Intercalation of extension 116 is in because air pressure valve 1 is damaged in the exhaust opening 4 of gas leakage.
Meanwhile, be formed with the trapping mouth 112 of captured gas at the end of extension 116, extension 116 in hollow form, thus makes trapping mouth 112 and discharge opening 111 be interconnected.
In addition, the terminal part bending of extension 116 is formed, and the terminal part of extension 116 is parallel with the length direction of exhaust opening 4.This be in order to by the terminal part of extension 116 easily Intercalation in exhaust opening 4, and to be stably fixed.
In addition, air pressure valve 1 is formed with the exhaust opening 4 of multiple gas leakage.
Now, the trapping mouth 112 of Intercalation in each exhaust opening 4 can be formed at the pars intermedia of multiple extensions 116 of trap portion 10.
In addition, trap portion 10 is made up of soft material, can stretch and bend, thus is convenient to be arranged on air pressure valve 1.
What trap mouth 112 enters pin portion 114 described in interruption-forming, gives prominence to, and be inserted in the inside of exhaust opening 4 in the mode that can be inserted in the exhaust opening 3 of air pressure valve 1.
This is to easily insert when being inserted in exhaust opening 4 by extension 116 end of the trap portion be made up of soft material 10.In addition, by changing the diameter in pin portion 114, trap portion 10 can be applicable to the exhaust opening 4 of different size.
With reference to Figure 16 and Figure 17, gas leak detection apparatus of the present invention also comprises fixed component 130.
Fixed component 130 surrounds the outer peripheral face of air pressure valve 1 and its two ends combine, and is closely fixed on air pressure valve 1 by the trap portion 10 be inserted in the gap 132 of each coil 131 strutted.
In addition, the outside diameter in preferred pin portion 114 is identical with the inside diameter of exhaust opening 4, to be embedded in exhaust opening 4 in pin portion 114.
Meanwhile, the lateral surface in preferred pin portion 114 is made up of soft material, to seal the part between the lateral surface in pin portion 114 and the medial surface of exhaust opening 4 when inserting in exhaust opening 4, but is not limited thereto.
Claims (16)
1. a gas leak detection apparatus, is characterized in that, comprising:
Trap portion, peristome is formed with to insert air pressure valve in its lower end, be formed with patchhole and through hole in its side, described in insert in the hole the supply air line running through and have and be combined with air pressure valve, described through hole be used for externally discharging described air pressure valve damaged time the gas that leaks;
Cover section, is combined with the peristome being formed in described trap portion lower end, is discharged by peristome for preventing the gas leaked from described air pressure valve;
Gas exhaust piping, its one end is connected with the through hole of described trap portion, for being discharged to the outside by the gas leaked from described air pressure valve; And
Test section, is connected to the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping,
Described cover section comprises a pair cover component, and described a pair cover component is formed with groove, to surround the outer peripheral face of described air pressure valve.
2. a gas leak detection apparatus, is characterized in that, comprising:
Trap portion, up/down perforation to insert air pressure valve, upper and lower side be formed with peristome and externally discharge described air pressure valve damaged time the through hole of gas that leaks;
Cover section, is combined with the peristome being formed in described trap portion upper and lower side, is discharged by peristome for preventing the gas leaked from described air pressure valve;
Gas exhaust piping, its one end is connected with the through hole of described trap portion, to be discharged to the outside by the gas leaked from described air pressure valve; And
Test section, is connected to the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping,
Described cover section comprises a pair cover component, and described a pair cover component is formed with groove, to surround the outer peripheral face of described air pressure valve.
3. a gas leak detection apparatus, is characterized in that, comprising:
Trap portion, the gas leaked during for trapping air pressure valve breakage;
Gas exhaust piping, its one end is combined with the discharge opening of described trap portion, is discharged to the outside for the exhaust of being discharged by the discharge opening from described trap portion;
Test section, is incorporated into the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping,
Described trap portion has trapping mouth, described trapping tight-lipped close be fixed on described air pressure valve damaged time gas leakage exhaust opening sentence the described gas of trapping,
Described gas leak detection apparatus also comprises wing, and described wing is by protruding from the both sides of described trap portion respectively and a pair thumbpiece surrounding the outer peripheral face of described air pressure valve is formed, and described a pair thumbpiece has elastic force in opposite directions.
4. gas leak detection apparatus according to claim 3, is characterized in that,
The exhaust opening of gas leakage is formed in the upper and lower of described air pressure valve,
Described trap portion extends to form towards top, and the trapping mouth of the gas leaked when being also formed on top for trapping the breakage of described air pressure valve.
5. gas leak detection apparatus according to claim 3, is characterized in that,
Bending or the bending of described thumbpiece is formed, and by carrying out the outer peripheral face of air pressure valve described in resiliency supported towards the elastic force of described air pressure valve, to be closely incorporated into described exhaust opening place by tight-lipped for described trapping.
6. gas leak detection apparatus according to claim 3, is characterized in that,
The length direction that described trapping opening's edge described thumbpiece is elongated hole-shape.
7. gas leak detection apparatus according to claim 3, is characterized in that,
Be coated with rippability bonding agent at the outer peripheral face of described trapping mouth, thus described trap portion is closely fixed on the outer peripheral face of described air pressure valve removably, to prevent described Leakage Gas.
8. a gas leak detection apparatus, is characterized in that, comprising:
Trap portion, the gas leaked during for trapping air pressure valve breakage, the side be formed in described trap portion for the discharge opening of the trapped gas that spues arranges cover hand-hole;
Gas exhaust piping, its one end Intercalation in described cover hand-hole, the exhaust that the discharge opening from described trap portion is discharged is discharged to the outside;
Test section, is incorporated into the other end of described gas exhaust piping, for detecting the gas comprised in the exhaust of being discharged by described gas exhaust piping,
Described trap portion has extension and trapping mouth, described extension is communicated with described discharge opening and opposite side towards described discharge opening extends, the end of described extension is formed with described trapping mouth, in the exhaust opening of described trapping mouth Intercalation gas leakage when described air pressure valve is damaged, for trapping described gas.
9. gas leak detection apparatus according to claim 8, is characterized in that,
Described air pressure valve is formed with the exhaust opening of multiple gas leakage,
Described trap portion has the multiple trapping mouths of Intercalation in described exhaust opening respectively, the gas leaked during for trapping the breakage of described air pressure valve.
10. gas leak detection apparatus according to claim 8, is characterized in that, comprises further:
Fixed component, it surrounds the outer peripheral face of described air pressure valve and two ends combine, and by being embedded in the gap strutted of each coil by described trap portion, thus is closely fixed on described air pressure valve by described trap portion.
11. gas leak detection apparatus according to claim 3 or 8, is characterized in that, comprising:
Pin portion, is formed in the entrance of described trapping mouth, gives prominence to, and be inserted in the inside of described exhaust opening in the mode that can be inserted in the exhaust opening of described air pressure valve.
12. gas leak detection apparatus according to any one in claim 1,2,3 and 8, is characterized in that, comprise further:
Port solenoid valve, it is arranged on the pars intermedia of gas exhaust piping, by the control of controller the gas leakage of discharging from each gas exhaust piping discharged respectively or together discharge, described gas exhaust piping be separately positioned on each trap portion with captured gas on multiple air pressure valve and be combined; And
Controller, when described test section detects Leakage Gas, by the discharge of the multiple gas exhaust piping of described port solenoid control whether.
13. gas leak detection apparatus according to claim 12, is characterized in that,
The data of the detection limit of the kind and gas leakage that comprise the gas leakage that described test section detects are sent to management server by described controller in real time,
Described management server receives the data from described controller, exports and be supplied to supvr with graph mode.
14. gas leak detection apparatus according to claim 12, is characterized in that, comprise further:
Display part, detects gas when described test section and controls described port solenoid valve by described controller, thus after determining damaged air pressure valve, described display part shows the intrinsic information of determined air pressure valve,
For multiple air pressure valve, be preset with described intrinsic information respectively.
15. gas leak detection apparatus according to any one in claim 1,2,3 and 8, is characterized in that,
Described test section comprises:
Toxic gas detector, for detecting the toxic gas leaked from the air pressure valve controlling toxic gas flowing;
Oxygen sensor, for detecting the gas leaked from the air pressure valve of control oxygen, nitrogen, argon gas flowing.
16. gas leak detection apparatus according to claim 15, is characterized in that,
Described test section comprises:
First alarm portion, it gives the alarm when toxic gas being detected by described toxic gas detection portion;
Second alarm portion, it gives the alarm when gas being detected by described oxygen sensor.
Applications Claiming Priority (9)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2013-0137155 | 2013-11-12 | ||
| KR1020130137155A KR101377718B1 (en) | 2013-11-12 | 2013-11-12 | Gas leak detector |
| KR10-2014-0030586 | 2014-03-14 | ||
| KR1020140030586A KR101420362B1 (en) | 2014-03-14 | 2014-03-14 | Gas Leak Detection System |
| KR10-2014-0078224 | 2014-06-25 | ||
| KR1020140078224A KR101464372B1 (en) | 2014-06-25 | 2014-06-25 | Gas Leak Detector |
| KR20140156333A KR101497922B1 (en) | 2014-11-11 | 2014-11-11 | Gas Leak Detector |
| KR10-2014-0156333 | 2014-11-11 | ||
| PCT/KR2014/010857 WO2015072745A1 (en) | 2013-11-12 | 2014-11-12 | Gas leakage detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN105579821A true CN105579821A (en) | 2016-05-11 |
Family
ID=53057625
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201480049747.4A Pending CN105579821A (en) | 2013-11-12 | 2014-11-12 | Gas leakage detection device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2016536623A (en) |
| CN (1) | CN105579821A (en) |
| WO (1) | WO2015072745A1 (en) |
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| CN112268654A (en) * | 2020-10-19 | 2021-01-26 | 浙江工业大学 | Method for testing and calibrating stress of pneumatic valve |
| CN114018497A (en) * | 2016-06-30 | 2022-02-08 | 株式会社开滋 | Valve pressure resistance inspection device, inspection method thereof, and hydrogen gas detection unit |
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| CN114008432A (en) * | 2019-06-07 | 2022-02-01 | 株式会社开滋 | Pressure resistance inspection device for valve |
| CN110542468B (en) * | 2019-09-03 | 2020-11-10 | 真兰仪表科技有限公司 | Gas meter connector leak detection device |
| CN112201012B (en) * | 2020-10-29 | 2024-04-12 | 中国船舶工业集团公司第七0八研究所 | Water tank internal combustion oil leakage monitoring device and monitoring method based on gas detection |
| CN113093840B (en) * | 2021-03-12 | 2021-11-30 | 浙江盘毂动力科技有限公司 | Industrial automation environmental control system |
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| CN114583382B (en) * | 2022-02-17 | 2023-03-31 | 岚图汽车科技有限公司 | Lithium battery system, lithium battery control method, readable storage medium and control device |
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| CN114018497A (en) * | 2016-06-30 | 2022-02-08 | 株式会社开滋 | Valve pressure resistance inspection device, inspection method thereof, and hydrogen gas detection unit |
| CN114018497B (en) * | 2016-06-30 | 2024-03-26 | 株式会社开滋 | Pressure-resistant inspection device for valve, inspection method thereof, and hydrogen gas detection unit |
| CN111963907A (en) * | 2020-08-17 | 2020-11-20 | 常国栋 | Intelligent monitoring system for industrial gas leakage |
| CN112268654A (en) * | 2020-10-19 | 2021-01-26 | 浙江工业大学 | Method for testing and calibrating stress of pneumatic valve |
Also Published As
| Publication number | Publication date |
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| WO2015072745A1 (en) | 2015-05-21 |
| JP2016536623A (en) | 2016-11-24 |
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