JP3626014B2 - Gas leak inspection apparatus and gas leak inspection method in process gas supply unit - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention is a process gas supply unit which is used in a semiconductor manufacturing process and is configured by individually mounting various component parts such as a process gas supply valve, a vacuum valve and a regulator on a large number of blocks which have been miniaturized and integrated in advance. About. More specifically, the present invention relates to a gas leak inspection apparatus and a gas leak inspection method in a process gas supply unit that detects a gas leak in each block in the unit.
[0002]
[Prior art]
Conventionally, a process gas supply unit for supplying a process gas such as an etching gas has been developed in a semiconductor manufacturing process. Then, the semiconductor manufacturing process shifts from a method of batch processing a plurality of wafers to a single wafer processing method of processing wafers one by one, and there is a strong demand for downsizing the process gas supply unit. .
[0003]
In order to reduce the size of the process gas supply unit, the present applicant has proposed a process gas supply unit in which a supply valve, a purge valve, and a vacuum valve are connected to a module block, which is a manifold, from above with bolts according to Japanese Patent No. 2568365. doing.
[0004]
FIG. 17 shows a process gas supply unit using this manifold. In this unit, the first manual valve 81, the regulator 83, and the second manual valve 91 are fixed to the mounting panel D via brackets Y1, Y2, Y3, respectively. The input valve 85 and purge valve 86 attached to the manifold Z1, the vacuum valve 89 and output valve 90 attached to the manifold Z2, are fixed to the mounting panel D via plates X1 and X2, respectively. A mass flow controller 88 fixed to the mass flow controller block N is connected to both manifolds Z1 and Z2.
The first manual valve 81 and the regulator 83 are connected to each other via a pipe 81b, a joint M, a check valve 82, a joint M, and a pipe 83a. The upstream side of the first manual valve 81 is connected to a process gas supply source (not shown) via a pipe 81 a and a joint M. The regulator 83 and the manifold Z1 are connected to each other via the joint M, the pipe 85a, and the joint M. A pressure gauge 84 is connected to the middle of the pipe 85a through the pipe 84a. The second manual valve 91 and the manifold Z2 are connected to each other via a joint M and a pipe 91a. The downstream side of the second manual valve 91 is connected to a vacuum chamber (not shown) via a pipe 91b and a joint M.
[0005]
However, in the process gas supply unit described above, the entire unit has been downsized compared to the era when all devices were connected by piping, but there are still many pipes and joints, so that much space is required. It has become. For this reason, in view of the recent demand for downsizing and integration of the process gas supply unit, the improvement has not been sufficient.
In addition, it is conceivable to make all the components into blocks and eliminate the pipe connection to reduce the size. However, since there are various component parts such as various valves attached to the upper part, they can be flown in the block accordingly. Forming the path is complicated and problematic in terms of cost increase.
[0006]
Accordingly, in view of the above-mentioned problems, the applicant of the present application can realize miniaturization and integration in Japanese Patent Application No. 10-116631, and also combine a plurality of types of blocks with respect to combinations of various component parts. We proposed a system that can configure the necessary process gas supply unit just by changing it.
[0007]
In this new system, all the various components are blocked to eliminate pipe connections, and the entire system is miniaturized and integrated. The system includes a plurality of upper module blocks, a plurality of flow path forming blocks, and a plurality of lower flow path blocks. Each upper module block is one to which one of the component parts used for the process gas supply is attached. In the flow path forming block, the upper module block is fixed with bolts, and the component parts are connected to form a flow path. Each lower flow path block is attached to the lower surface of each of the different flow path forming blocks, and a connection flow path for connecting the respective flow paths formed in the different flow path forming blocks is formed.
[0008]
With this configuration, it is possible to use a module block having a uniform shape and standard for various circuits, and an inexpensive and compact process gas supply unit can be provided.
[0009]
[Problems to be solved by the invention]
However, the above-mentioned new system can be downsized and integrated as a whole, but tends to make it difficult to inspect gas leaks for individual seal portions (gaskets) located between adjacent blocks.
[0010]
That is, the conventional gas leak inspection method is performed by spraying helium gas, which is a tracer gas, from the outside onto a seal location and inspecting the gas with an inspection machine. In the above-mentioned new system, since the individual blocks are integrated in a compact form, their seal points are very close to each other. For this reason, in the gas leak inspection method, it is difficult to specify which seal portion has a leak even when helium gas is blown.
[0011]
For example, there is a method of injecting very small amounts of helium gas to each seal part and estimating the leak location from the difference in the location and the difference in the reaction of the inspection machine. There is a risk of making a wrong decision.
Or, in the process of assembling the process gas supply unit, every time one block is assembled, helium gas is blown to one corresponding seal part to perform a gas leak test, and by repeating these steps, all the seal parts are There is also a way to complete the inspection. However, this method increases assembly man-hours and time.
[0012]
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a process gas supply unit in which various component parts are individually mounted on a large number of blocks that are miniaturized and integrated. It is an object to provide a gas leak inspection apparatus and a gas leak inspection method for a process gas supply unit that can detect a gas leak accurately and in a short time by specifying one seal portion between them.
[0013]
[Means for Solving the Problems]
In order to achieve the above object, the gas leak inspection apparatus according to the first aspect of the present invention attaches various component parts to a large number of blocks that are miniaturized and integrated, and the flow path formed in each block is provided. In a process gas supply unit configured by connecting to each other, a gas leak inspection apparatus for inspecting a gas leak at a seal portion of each block, wherein the inspection process is installed in a space between adjacent blocks. And a gas port provided in the inspection jig so that it aligns with the seal part of one block when the inspection jig is installed in the space, and an inspection gas is provided in the inspection jig. When the inspection gas supplied to the gas port and the gas port flows into the flow path of the process gas supply unit through the seal portion, the inspection gas leaks. And purpose that a leak gas detection means for detecting a gas to indicate the presence of.
[0014]
According to the above configuration, in the process gas supply unit configured by mounting various component parts on a large number of miniaturized and integrated blocks, the inspection jig is mounted in the space between adjacent blocks, The gas port of the inspection jig is aligned with the seal portion of one block. Then, the inspection gas is supplied to the gas port through the gas passage provided in the inspection jig. As a result, when the seal part of one block is defective and gas leakage is allowed, the inspection gas flows into the flow path of the process gas supply unit through the seal part, and the inspection gas leaks out of the gas. As a gas indicating the presence of gas, it is detected by the leak gas detection means. On the other hand, when the seal portion is normal, the inspection gas does not flow from the seal portion into the flow path of the process gas supply unit, and the inspection gas is detected by the leak gas detection means as a gas indicating the presence of gas leakage. It will not be detected.
Therefore, even if a plurality of seal portions are adjacent to each other between adjacent blocks, it is possible to distinguish one target seal portion from the other seal portions and determine the presence or absence of gas leakage.
[0015]
In order to achieve the above object, a gas leak inspection apparatus in a process gas supply unit according to a second aspect of the present invention is the block according to the first aspect, wherein each seal portion is provided with a gasket, Is provided with a communication path that communicates the seal part to the outside, and the inspection jig has a seal for sealing the periphery of the gas port with the adjacent block when the inspection jig is installed in the space. The purpose is to provide materials.
[0016]
According to said structure, in addition to the effect | action of invention of Claim 1, the defect of a gasket will be detected as a defect of the seal part which accept | permits a gas leak. Here, the gas port of the inspection jig may be aligned with the communication path of the seal portion, and when both are aligned, the periphery of the gas port is sealed with a sealing material. Leakage is suppressed. When the gasket functions normally, gas does not leak from the communication path because there is no risk of gas leakage at the seal portion.
[0017]
In order to achieve the above object, a gas leak inspection apparatus in a process gas supply unit according to a third aspect of the present invention is the structure of the second aspect of the present invention, wherein the inspection jig corresponds to a sealing material. It is intended that an urging means for pressing against the block is provided.
[0018]
According to the above configuration, in addition to the operation of the invention of claim 2, the sealing member is pressed against the corresponding block by the urging means, so that leakage of the inspection gas to the outside is surely suppressed.
[0019]
In order to achieve the above object, the gas leak inspection apparatus in the process gas supply unit of the invention described in claim 4 is the configuration of the invention described in one of claims 1 to 3, wherein the inspection jig includes It is intended that a display means for indicating that the inspection gas is supplied to the gas port is provided.
[0020]
According to said structure, in addition to the effect | action of the invention of Claim 1 thru | or 3, when the test | inspection gas is supplied to the gas port, that is shown by the display means in a test | inspection jig | tool. For this reason, when the supply of the inspection gas is displayed by the display means, the presence or absence of gas leakage is not erroneously determined by performing the gas detection by the leakage gas detection means. For example, when the inspection gas is not supplied, gas detection by the leakage gas detection means is not performed, so that an erroneous determination that there is no gas leakage is not made.
[0021]
In order to achieve the above object, a gas leak inspection method for a process gas supply unit according to a fifth aspect of the present invention attaches various component parts to a large number of blocks that are miniaturized and integrated, and forms each block. In the process gas supply unit configured by connecting the flow paths to each other, a gas leak inspection method for inspecting the gas leak of the seal portion of each block, in a space between adjacent blocks The inspection jig is mounted, the inspection jig mounting process for aligning the gas port of the inspection jig with the seal part of one block, the vacuum process for evacuating the gas port aligned with the seal part, and the vacuum When the inspection gas is supplied to the gas port and the supplied inspection gas flows into the flow path of the process gas supply unit through the seal portion, The 査用 gas and spirit that a leak gas detection step for detecting a gas to indicate the presence of a gas leak.
[0022]
According to the above configuration, in the inspection jig mounting step, the inspection jig is mounted in the space between the blocks adjacent to each other, and the gas port is aligned with the seal portion of one block, thereby providing one seal portion. Only gas leak inspection is possible.
Next, in the vacuum process, the residual gas in the vicinity of the gas port is removed by evacuating the gas port aligned with the seal portion.
Next, in the leakage gas detection step, when the sealing portion is defective by supplying the inspection gas to the vacuumed gas port, the supplied inspection gas passes through the sealing portion of the process gas supply unit. It will flow to the flow path. Then, the inspection gas is detected as a gas indicating the presence of gas leakage.
Therefore, even if a plurality of seal portions are adjacent to each other between adjacent blocks, it is possible to determine the presence or absence of gas leakage by distinguishing one target seal portion from other seal portions.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, an embodiment embodying a gas leak inspection apparatus and a gas leak inspection method in a process gas supply unit of the present invention will be described in detail with reference to the drawings.
[0024]
FIG. 1 shows the appearance of a gas leak inspection apparatus 50 and a process gas supply unit 70 that is the inspection target in the present embodiment. This process gas supply unit 70 basically includes manual valves 1a, 1b, 1c, regulators 3a, 3b, 3c, pressure gauges 4a, 4b, 4c, input valves 5a, 5b, 5c, mass flow controllers 8a, 8b, 8c, component parts E such as output valves 10a, 10b, 10c, filters 7a, 7b, 7c and purge valves 6a, 6b, 6c, a plurality of upper module blocks A to which the respective component parts E are respectively attached, and upper modules A plurality of flow path forming blocks B to which the blocks A are respectively attached on the upper surface, a plurality of lower flow path blocks C to which the respective flow path forming blocks B are respectively attached to the upper surface, and a lower flow path block C to which the respective lower flow path blocks C are fixed. Two mounting panels D.
[0025]
In this embodiment, the upper module block A is divided into four types. An example is shown in FIG.
In all types, the upper module block A forms the same square whose bottom surface has dimensions of 39 mm in length and width. The block A has a plurality of ports 13 and 19 at the center, and a cylindrical connection bracket 18 that includes the ports 13 and 19 on the upper surface. The connection bracket 18 is formed with a size corresponding to the component part E to be attached. Each component part E is fixed to the connection bracket 18 by screwing or the like. The number and type of the ports 13 and 19 are different among the types of the block A. This block A has bolt holes 14 at its four corners. Each bolt hole 14 is for fixing the block A to the flow path forming block B.
[0026]
By attaching the component part E to the four types of upper module blocks A, 16 patterns are obtained with respect to the mounting direction of the component part E.
[0027]
In this embodiment, the component part E attached to the upper surface of each upper module block A is classified into five types. An example is shown in FIG. This figure shows a state in which the air valves used as the input valves 5a to 5c, the purge valves 6a to 6c, the output valves 10a to 10c, and the vacuum valves 9a to 9c are attached to the upper module block A. FIG. 3A is a perspective view of the mounting state as viewed from above, and FIGS. 3B and 3C are perspective views when the whole is turned upside down. FIGS. 3B and 3C show the difference in type.
[0028]
FIG. 4 is a perspective view of the lower flow path block C. FIG. 5A shows a plan view of the block C, and FIG. 5B shows a side sectional view of the block C.
The lower flow path block C has a pair of communication holes 22 at the center of the upper surface. As shown in FIG. 5B, the two communication holes 22 communicate with each other by a V-shaped communication path 27 having a V-shaped cross section. Each communication hole 22 has a counterbore 23 for mounting a metal gasket as a seal member around the communication hole 22. The block C has bolt holes 24 on both sides of each communication hole 22. The block C has a pair of attachment holes 25 for attaching the block C to the attachment panel D at both ends in the longitudinal direction. Each mounting hole 25 has a counterbore 25a on its upper surface. This block C has cutout reliefs 26 at the four corners of both ends in the longitudinal direction.
[0029]
In this embodiment, the flow path forming block B is divided into 14 types. FIG. 6 shows a plan view of an example thereof. FIG. 7 is a perspective view showing the top surface of the block B. FIG. FIG. 8 is a perspective view showing the lower surface of the block B.
The flow path forming block B has an upper surface and a lower surface that have the same size and shape as the lower surface of the upper module block A. The upper module block A is attached to the upper surface. This block B has two upper surface ports 31 and 33 at the center of the upper surface, and two lower surface ports 32 and 34 at the two lower surface edges. Each upper surface port 31 and 33 and each lower surface port 32 and 34 have counterbore 31a, 33a, 32a, 34a around them, respectively. The upper surface port 31 and the lower surface port 32 communicate with each other through an oblique communication path. Similarly, the upper surface port 33 and the lower surface port 34 communicate with each other through an oblique communication path. Each lower surface port 32, 34 is aligned with the communication hole 22 of the corresponding lower flow path block C. Mounting holes 35 formed on both sides of the lower surface ports 32 and 34 penetrate the block B up and down. Each mounting hole 35 has a counterbore 36 around it. This block B has bolt holes 37 for screwing the mounting bolts of the upper module block A at its four corners.
As shown in FIGS. 7 and 8, the block B has communication passages 32 b and 34 b opened at the lower surface edge portions corresponding to the spot facings 32 a and 34 a of the lower surface ports 32 and 34, respectively. A metal gasket 40 is attached to each of the spot facings 32a and 34a. The lower surface ports 32 and 34 and the counterbore 32a and 34a including the metal gasket 40 of the flow path forming block B, and the communication hole 22 and the counterbore 23 of the lower flow path block C are the seals of the present invention. Part S is configured.
[0030]
A process gas supply unit 70 as shown in FIG. 1 is configured by assembling a plurality of the upper module block A, the flow path forming block B, the lower flow path block C, the mounting panel D, and the component parts E.
[0031]
That is, as shown in FIG. 1, a plurality of lower channel blocks C are attached to the upper surface of the mounting panel D, and a plurality of channel forming blocks B are attached to the upper surface of each lower channel block C. On the upper surface of each flow path forming block B, a plurality of upper module blocks A formed by fixing corresponding component parts E are attached.
[0032]
FIG. 9 shows a state in which the lower flow path block C is attached to the upper surface of the attachment panel D. FIG. 10 shows a state where the flow path forming block B is attached to the upper surface of the lower flow path block C on the mounting panel D. By attaching the component part E including the upper module block A to the upper surface of the flow path forming block B, a process gas supply unit 70 as shown in FIG. 1 is obtained. That is, there is a process gas supply unit 70 in which various component parts E are mounted on a large number of blocks A to D that are miniaturized and integrated, and the flow paths formed in the blocks A to D are connected to each other. can get. In the configuration of the unit 70, the ports and flow paths of the blocks A to E and the like are combined and connected to each other to form a predetermined circuit. FIG. 11 shows a circuit configuration of the unit 70.
[0033]
Here, as shown in FIG. 1, a gap Ga having a predetermined size (for example, a width of about 2 mm) is formed between the upper module block A and the flow path forming block B adjacent to each other. Corresponding to the gap Ga, the seal portion S between the flow path forming block B and the lower flow path block C corresponding to each other is disposed. In the unit 70 of this embodiment, there are two seal portions S for the gap Ga formed between the two flow path forming blocks B adjacent to each other.
[0034]
Next, the gas leak inspection apparatus 50 in the process gas supply unit 70 configured as described above will be described. As shown in FIG. 1, the gas leak inspection apparatus includes an inspection jig 51, a control box 52, and a helium sensor 53.
[0035]
The inspection jig 51 is attached by being inserted into a gap Ga as a space between the blocks A and B adjacent to each other. FIG. 12 shows a front view of the inspection jig 51, and FIG. 13 shows a side view of the inspection jig 51. The inspection jig 51 has a thin plate shape formed by joining two plate materials, and has a pair of protrusions 51a on both sides of the lower end thereof. The inspection jig 51 has a gas port 54 for deriving an inspection gas at the center of the lower portion thereof, and has a gas flow path 55 communicating with the gas port 54 therein. The gas flow path 55 communicates with a pipe joint 56 provided at the upper end of the inspection jig 51. The gas port 54 is disposed so as to align with one seal portion S of one flow path forming block B when the inspection jig 51 is mounted in the gap Ga. The gas passage 55 is for guiding the inspection gas introduced into the pipe joint 56 to the gas port 54. The inspection jig 51 has a rubber lining 57 as a sealing material attached around the gas port 54. The rubber lining 57 is for sealing the periphery of the gas port 54 with the adjacent block B when the inspection jig 51 is mounted in the gap Ga. The inspection jig 51 has a leaf spring 58 as an urging means for pressing the rubber lining 57 against the corresponding block B on the opposite side surface corresponding to the gas port 54. Further, the inspection jig 51 has an LED lamp 59 provided at the upper end thereof. This LED lamp 59 corresponds to the display means of the present invention that operates to indicate that the inspection gas is supplied to the gas port 54.
[0036]
The helium sensor 53 shown in FIG. 1 is connected to the output side of the process gas supply unit 70, and outputs a signal indicating the detection of helium gas when the presence of helium molecules is detected. The sensor 53 incorporates a detection circuit (not shown) in its housing, and has an alarm lamp 53a on the upper wall surface of the housing. Therefore, when the helium sensor 53 outputs a detection signal of helium gas, the detection circuit operates and the alarm lamp 53a is turned on. The helium sensor 53 constitutes the leakage gas detection means of the present invention.
[0037]
The control box 52 is for controlling the supply of inspection gas to the inspection jig 51. FIG. 14 shows a circuit configuration of the control box 52. The control box 52 includes an ejector EJ for generating negative pressure, a first electromagnetic valve V1 connected to the input port of the ejector EJ, and a second electromagnetic valve connected in series to the output port of the ejector EJ. A valve V2, a third electromagnetic valve V3, a regulator RG, and a manual valve HV are provided. The input port of the first solenoid valve V1 is connected to a supply source of nitrogen (N2) gas. The input port of the manual valve HV is connected to a supply source of helium gas. In this embodiment, helium gas is used as the aforementioned inspection gas. The piping between the second solenoid valve V2 and the third solenoid valve V3 is connected to the pipe joint 56 of the inspection jig 51 through the tube 60. Further, the control box 52 includes a controller 61 for controlling the first to third electromagnetic valves V1 to V3 and the like. The controller 61 is electrically connected to the first to third electromagnetic valves V1 to V3. The LED lamp 59 of the inspection jig 51 is electrically connected to the controller 61 via a lead wire 59a. The controller 61 is connected to a start button 62 and a power source for instructing the start of inspection. The controller 61 is connected to an external device (not shown) and outputs an external signal indicating the control process to the external device as necessary. The controller 61 has a known configuration including a central processing unit (CPU), a read-only memory (ROM), a random access memory (RAM), a backup RAM, and the like. The ROM stores in advance a predetermined control program related to the above-described control for leakage inspection. The controller (CPU) 61 executes leakage inspection control according to this control program. In this embodiment, the controller 61 constitutes a control means for controlling the gas leak inspection. A pneumatic circuit comprising an ejector EJ, first to third electromagnetic valves V1 to V3, a regulator RG, a manual valve HV, and the like supplies helium gas as an inspection gas to the gas port 54 of the inspection jig 51. A gas supply means for inspection is configured.
[0038]
Next, an inspection method performed using the gas leak inspection apparatus 50 configured as described above will be described.
[0039]
FIG. 15 shows the mounting state of the inspection jig 51 in the gap Ga of the process gas supply unit 70. In FIG. 15, for convenience, the upper module block A and the component part E are omitted. FIG. 16 shows the contents of a control program for the gas leak inspection executed by the controller 61.
[0040]
In the gas leakage inspection, first, in the inspection jig mounting step, the operator places the inspection jig 51 in the gap Ga between the flow path forming blocks B1, B2 of the process gas supply unit 70 as shown in FIG. The gas port 54 of the inspection jig 51 is aligned with one seal portion S1 between one flow path forming block B1 and one lower flow path block C1. Thereby, only one seal part S1 becomes the object of a gas leak inspection. At this time, since both the protrusions 51a of the inserted inspection jig 51 are mounted so as to sandwich the both longitudinal end surfaces of the lower flow path block C1, the inspection jig 51 slides in the gap Ga. There is nothing. Further, the gas port 54 can be reliably positioned with respect to the seal portion S1.
[0041]
Next, in the vacuum process, the gas port 54 aligned with the seal portion S1 is evacuated to exhaust and remove helium gas remaining in the gas flow path 55 and the gas port 54 of the detection jig 51. The
[0042]
Thereafter, in the leakage gas detection process, when the helium gas as the inspection gas is supplied to the gas port 54 evacuated as described above, the supplied helium gas is changed when the seal portion S1 is defective. When flowing into the flow path of the process gas supply unit 70 through the seal portion S1, the helium gas is detected by the helium sensor 53 as a gas indicating the presence of gas leakage.
[0043]
In this embodiment, the controller 61 of the control box 52 executes the vacuum process and the leak gas detection process.
That is, as shown in FIG. 16, in step 100, the controller 61 determines whether or not the start button 62 is turned on. Here, since the operator is supposed to operate the start button 62 when the above-described inspection jig mounting process is completed, the controller 61 waits for the start operation of the start button 62 and then performs the next step 110. The process will be transferred to.
[0044]
Next, in step 110, in order to execute the vacuum process, the first and second electromagnetic valves V1 and V2 are opened, and the gas passage 55 of the detection jig 51 is evacuated by the ejector EJ so that the residual gas is discharged. Exhaust. Here, by supplying nitrogen gas to the first electromagnetic valve V1, the ejector EJ is operated and negative pressure is generated at its output port. This negative pressure acts on the gas flow path 55 of the inspection jig 51 through the tube 60, and the residual gas in the flow path 55 is exhausted.
[0045]
Next, the controller 61 waits for a predetermined time to elapse in step 120, closes the second electromagnetic valve V <b> 2 in step 130, and then closes the first electromagnetic valve V <b> 1 in step 140. That is, the controller 61 evacuates the gas flow path 55 of the inspection jig 51 for a predetermined time, and then closes the electromagnetic valves V2 and V1 in the order of the second electromagnetic valve V2 and the first electromagnetic valve V1. .
[0046]
Next, in step 150, the controller 61 opens the third electromagnetic valve V <b> 3 and supplies helium gas into the gas flow path 55 of the inspection jig 51 in order to execute the leak gas detection process. That is, the inside of the gas channel 55 is replaced with helium gas.
[0047]
In step 160, the controller 61 turns on the LED lamp 59 to indicate that helium gas is being supplied to the gas port.
[0048]
The controller 61 waits for the elapse of a predetermined time in step 170, turns off the LED lamp 59 in step 180, and ends the subsequent processing.
[0049]
That is, in steps 150 to 180, the controller 61 supplies helium gas to the gas port 54 of the inspection jig 51 for a predetermined time and informs the operator that gas is being supplied only while the helium gas is being supplied. The LED lamp 59 is turned on for notification.
[0050]
The operator determines the presence of gas leakage based on whether or not the alarm lamp 53a of the helium sensor 53 is lit while the LED lamp 59 is lit. That is, if the alarm lamp 53a is lit while the LED lamp 59 is lit, it can be determined that the seal portion S1 to be inspected is defective and there is a gas leak. On the other hand, if the alarm lamp 53a is not lit while the LED lamp 59 is lit, it can be determined that the seal portion S1 to be inspected is normal and there is no gas leakage.
[0051]
As described above, according to the gas leak inspection apparatus 50 of this embodiment and the gas leak inspection method using the apparatus 50, various component parts are provided on a large number of blocks A to D such as a plurality of blocks that are miniaturized and integrated. A process gas supply unit 70 configured by attaching E is an inspection target. In this unit 70, the inspection jig 51 is mounted in the gap Ga between the blocks A to C adjacent to each other, and the inspection jig 51 is attached to one seal portion S corresponding to the one block B, C. The gas port 54 is aligned. Then, helium gas, which is an inspection gas, is supplied to the gas port 54 through a gas passage 55 provided in the inspection jig 51.
As a result, when the seal part S of each of the blocks B and C is defective and allows gas leakage, the helium gas flows into the flow path of the process gas supply unit 70 through the seal part S. The helium gas is detected by the helium sensor 53 as a gas indicating the presence of gas leakage, and is displayed on the alarm lamp 53a. On the other hand, when the seal portion S is normal, the helium gas does not flow into the flow path of the process gas supply unit 70 from the seal portion S, and the helium gas is detected by the helium sensor 53 as a gas indicating the presence of gas leakage. It will not be detected.
[0052]
Therefore, even if two seal portions S are adjacent between two adjacent flow path forming blocks B as in the process gas supply unit 70 of this embodiment, one target seal portion S is not the same. It is possible to determine the presence or absence of gas leakage in distinction from the seal portion S. For this reason, in the process gas supply unit 70, the seal part S between each of the blocks A to C can be specified as one, and the gas leak can be accurately detected only for the seal part S. Time can be shortened.
[0053]
According to the gas leak inspection apparatus 50 of the present embodiment, a failure of the gasket 40 is detected as a failure of the seal portion S that allows gas leakage. Here, the gas port 54 of the inspection jig 51 may be aligned with one communication path 32a, 34a formed in the flow path forming block B corresponding to one seal portion S. And when both 32a, 34a, and 54 are aligned, since the periphery of the gas port 54 is sealed by the rubber lining 57, the leakage of helium gas to the outside is thereby suppressed. In addition, when the gasket 40 functions normally, there is no risk of gas leakage to the seal portion S, so that gas does not leak to the outside from the communication passages 32a and 34a. As described above, since the external leakage of the helium gas is suppressed, the partial pressure of the helium gas can be stabilized, and the partial pressure of the helium gas does not change every time the inspection object is changed. Gas leak inspection can be made more accurate.
[0054]
According to the gas leak inspection apparatus 50 of the present embodiment, the rubber lining 57 is pressed against the corresponding one flow path forming block B by the leaf spring 58 in the inspection jig 51, so that the helium gas from the gas port 54 is External leakage can be suppressed more reliably. In this sense, the partial pressure of the helium gas can be further stabilized, and the accuracy of the gas leak inspection relating to the plurality of seal portions S can be further increased.
[0055]
According to the gas leak inspection apparatus 50 of the present embodiment, when helium gas is supplied to the gas port 54 in the inspection jig 51, this is indicated by the LED lamp 59 in the inspection jig 51. For this reason, when the supply of helium gas is displayed by the lamp 59, the presence or absence of gas leakage is not erroneously determined by detecting the gas with the helium sensor 53. For example, when the helium gas is not supplied to the gas port 54, the alarm lamp 53a of the helium sensor 53 is not lit, so that an erroneous determination that there is no gas leakage is not made. In this sense, it is possible to prevent an operator from erroneously determining whether there is a gas leak.
[0056]
According to the gas leak inspection apparatus 50 of this embodiment, since one seal portion S to be inspected can be specified and the gas leak can be inspected as described above, each process gas supply unit 70 is assembled, The seal portion S can be intensively inspected. This is different from the case where the gas leak inspection is performed every time one block is assembled in the process of assembling the process gas supply unit as in the conventional inspection method, and the assembly man-hour of the unit 70 can be reduced. Time can be shortened.
[0057]
In addition, this invention is not limited to the said embodiment, In the range which does not deviate from the meaning of invention, it can implement as follows.
[0058]
For example, in the above-described embodiment, the inspection jig 51 has a thin plate shape. However, the shape is not limited to this, and may be an appropriate shape according to the space shape between adjacent blocks.
[0059]
【The invention's effect】
According to the structure of the first aspect of the present invention, in the process gas supply unit configured by individually mounting various component parts on a large number of blocks that are miniaturized and integrated, a space between adjacent blocks is provided. An inspection jig is mounted, the gas port is aligned with the seal portion of one block, and the inspection gas is supplied to the gas port through the gas passage. When there is a defect that allows gas leakage in the seal portion of one block, the leakage gas detection means uses the inspection gas that has flowed into the flow path of the process gas supply unit through the seal portion as a gas indicating the presence of gas leakage. I try to make it detect.
Therefore, even if a plurality of seal portions are adjacent to each other between adjacent blocks, it is possible to distinguish one target seal portion from the other seal portions and determine the presence or absence of gas leakage. For this reason, the seal part between each block is specified as one, and the effect that gas leak can be detected accurately and in a short time is exhibited.
[0060]
According to the configuration of the invention described in claim 2, in addition to the operation and effect of the invention of claim 1, a gasket failure is detected as a failure of the seal portion that allows gas leakage. When the gas port of the inspection jig is aligned with the passage, the periphery of the gas port is sealed with a sealing material, and external leakage of the inspection gas is suppressed. For this reason, the partial pressure of the gas for inspection can be stabilized, and the effect that the gas leak inspection concerning a plurality of seal parts can be made more accurate is exhibited.
[0061]
According to the configuration of the invention described in claim 3, in addition to the operation and effect of the invention of claim 2, since the sealing member is pressed against the corresponding block by the urging means, the inspection gas leaks to the outside. Is reliably suppressed. For this reason, the partial pressure of the gas for inspection can be further stabilized, and the effect of further improving the accuracy of the gas leak inspection related to the plurality of seal portions can be exhibited.
[0062]
According to the configuration of the invention described in claim 4, in addition to the operation and effect of one of the inventions of claims 1 to 3, the display means indicates that the inspection gas is supplied to the gas port. By performing gas detection with the leakage gas detection means while the display means is displaying, the presence or absence of gas leakage is not erroneously determined. For this reason, it is possible to prevent the operator from erroneously determining the presence or absence of gas leakage.
[0063]
According to the configuration of the invention described in claim 5, in the inspection jig mounting step, the inspection jig is mounted in the space between adjacent blocks, and the gas port is aligned with the seal portion of one block. Only one seal part is subject to gas leak inspection. Next, in the vacuum process, the residual gas in the vicinity of the gas port is removed by evacuating the gas port aligned with the seal portion. Next, in the leakage gas detection step, by supplying the inspection gas to the vacuum gas port, when the seal portion is defective, the inspection gas is caused to flow through the seal portion to the flow path of the process gas supply unit, The inspection gas is detected by the leakage gas detection means as a gas indicating the presence of gas leakage.
Therefore, even if a plurality of seal portions are adjacent to each other between adjacent blocks, it is possible to distinguish one target seal portion from the other seal portions and determine the presence or absence of gas leakage. For this reason, the seal part between each block is specified as one, and the effect that gas leak can be detected accurately and in a short time is exhibited.
[Brief description of the drawings]
FIG. 1 is a perspective view showing an appearance of a gas leak inspection apparatus according to an embodiment and a process gas supply unit that is an inspection target thereof.
FIG. 2 is a partially broken perspective view showing an example of an upper module block.
3A to 3C are perspective views showing examples of component parts attached to an upper module block. FIG.
FIG. 4 is a perspective view similarly showing a lower flow path block;
Similarly, (a) is a plan view showing a lower flow path block, and (b) is a side sectional view showing the inside of the block.
FIG. 6 is a plan view showing an example of a flow path forming block.
FIG. 7 is a perspective view similarly showing the upper surface of the flow path forming block.
FIG. 8 is a perspective view similarly showing the lower surface of the flow path forming block.
FIG. 9 is a perspective view showing the assembled state of the mounting panel and the lower flow path block.
FIG. 10 is a perspective view showing the assembled state of the mounting panel, the lower flow path block, and the flow path forming block.
FIG. 11 is a circuit diagram showing a process gas supply unit in the same manner.
FIG. 12 is a front view showing the inspection jig in the same manner.
FIG. 13 is a side view showing the inspection jig in the same manner.
FIG. 14 is a circuit diagram similarly showing a control box and the like.
FIG. 15 is a perspective view similarly showing a mounting state of the inspection jig.
FIG. 16 is a flowchart showing a control program for a gas leak test in the same manner.
FIG. 17 is a front view showing a conventional process gas supply unit.
[Explanation of symbols]
A Upper module block
B Channel formation block
C Lower channel block
D Mounting panel
E Component parts
Ga gap
S Seal part
32b communication path
34b Communication passage
40 Gasket
50 Gas leak inspection device
51 Inspection jig
53 Helium sensor (leakage gas detection means)
54 Gas Port
55 Gas flow path
57 Rubber lining (sealant)
58 Leaf spring (biasing means)
59 LED lamp (display means)
70 Process gas supply unit

Claims (5)

In a process gas supply unit configured by attaching various component parts on a large number of miniaturized and integrated blocks and connecting the flow paths formed in each block to each other, the gas in the seal portion of each block A gas leak inspection device for inspecting leaks,
An inspection jig mounted in a space between adjacent blocks;
A gas port provided in the inspection jig so as to align with a seal portion of one block when the inspection jig is mounted in the space;
A gas passage provided in the inspection jig for supplying an inspection gas to the gas port;
Leakage gas detection for detecting the inspection gas as a gas indicating the presence of gas leakage when the inspection gas supplied to the gas port flows into the flow path of the process gas supply unit through the seal portion. A gas leak inspection apparatus in a process gas supply unit. In the gas leak inspection apparatus according to claim 1,
Each seal part is provided with a gasket, and the block is provided with a communication path for communicating the seal part to the outside.
The said inspection jig is provided with the sealing material for sealing the circumference | surroundings of the said gas port between the said adjacent blocks, when the said inspection jig is mounted | worn in the said space. Gas leak inspection device in the gas supply unit. In the gas leak inspection apparatus according to claim 2,
The inspection jig is provided with an urging means for pressing the seal material against a corresponding block. In the gas leak inspection device according to one of claims 1 to 3,
A gas leak inspection apparatus in a process gas supply unit, wherein the inspection jig is provided with a display means for indicating that the inspection gas is supplied to the gas port. In a process gas supply unit configured by attaching various component parts on a large number of miniaturized and integrated blocks and connecting the flow paths formed in each block to each other, the gas in the seal portion of each block A gas leak inspection method for inspecting leaks,
An inspection jig mounting step for mounting an inspection jig in a space between adjacent blocks and aligning a gas port of the inspection jig with a seal portion of one block;
A vacuum step of evacuating the gas port aligned with the seal;
When the inspection gas is supplied to the vacuumed gas port and the supplied inspection gas flows into the flow path of the process gas supply unit through the seal portion, the inspection gas is leaked. A gas leak inspection method in a process gas supply unit, comprising: a leak gas detection step for detecting as a gas indicating

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