WO2015072745A1

WO2015072745A1 - Gas leakage detection device

Info

Publication number: WO2015072745A1
Application number: PCT/KR2014/010857
Authority: WO
Inventors: 윤중호
Original assignee: 윤중호
Priority date: 2013-11-12
Filing date: 2014-11-12
Publication date: 2015-05-21
Also published as: JP2016536623A; CN105579821A

Abstract

A gas leakage detection device of the present invention comprises: a collection unit having an opening part formed at a lower end thereof such that a pneumatic valve is inserted therein, having an insertion hole formed at one side thereof through which an air supply line coupled with the pneumatic valve passes, and having a through-hole for discharging, to the outside, gas leaking due to damage to the pneumatic valve; a cover unit coupled to the opening part so as not to discharge the gas leaking from the pneumatic valve through the opening part formed at the lower end of the collection unit; an exhaust line of which one end is connected to the through-hole of the collection unit so as to discharge, to the outside, the gas leaking from the pneumatic valve; and a detection unit connected to the other end of the exhaust line so as to detect the gas contained in the exhaust air to be discharged to the exhaust line, wherein the cover unit includes a pair of cover members having grooves so as to cover an outer circumference of the pneumatic valve. The gas leakage detection device of the present invention can improve the stability and can prevent the damage of equipment by preventing the mixture of the gas leaking from each pneumatic valve and gas leaking from another pneumatic valve, and can simultaneously and rapidly implement a real-time monitoring operation and an operation of the equipment by controlling a solenoid valve and automatically and rapidly finding the pneumatic valve in which gas is detected when the detection unit detects the gas.

Description

Gas Leak Detection Device

The present invention relates to a gas leak detection apparatus, and more particularly, to a gas leak detection apparatus for installing a collecting part in a valve installed in a gas box of a semiconductor device, and detecting a gas leaked from the valve to find a damaged valve. will be.

In general, semiconductor manufacturing equipment processes and processes wafers under various environments and processes, and these equipments are manufactured as semiconductor chips by repeatedly performing various processes such as photographing, diffusion, etching, chemical vapor deposition, and metal deposition. Each process is performed under various toxic gases and solutions.

Therefore, each of the equipment for manufacturing a semiconductor is exposed to various and poor environments, there is a problem that the life of the equipment is shortened due to the corrosion or deformation of the equipment due to various toxic gases. As a result, the replacement cycle of the equipment is frequently increased, and the maintenance cost is increased, and the production process is delayed due to the interruption of the process of the equipment.

Here, the valve uses a pneumatic valve, and the pneumatic valve includes a pump (Diaphragm Valve) or a pneumatic valve.

The pump and the pneumatic valve are connected to both the gas inlet pipe and the gas discharge pipe, respectively, and control the flow of the gas flowing from the gas inlet pipe to the gas discharge pipe using the pneumatic pressure of the high pressure air supplied from the air supply unit.

The pump or the pneumatic valve has a structure in which the diaphragm opens and closes the inlet by applying a pneumatic or pneumatic pressure to a diaphragm positioned in the inlet of the gas flowing from the gas inlet pipe.

The high pressure air injected into the pump or the pneumatic valve is discharged to the outside.

At this time, when the diaphragm is broken by fatigue due to continuous valve operation, the toxic gas introduced from the gas inlet pipe is discharged to the discharge hole formed in the bonnet nut of the valve through the broken diaphragm and leaked to the outside.

In order to solve the above disadvantages, a plurality of valves for supplying the toxic gas in the semiconductor manufacturing equipment are installed in the gas box and an exhaust port for exhausting the toxic gas that may leak from the valve is installed. The exhaust port is provided with a toxic gas detector for detecting toxic gas.

However, since a large amount of external air flows into the gas box by the negative pressure of the exhaust port, when the toxic gas leaks from the valve, it is mixed with the external air introduced into the gas box, and the concentration of the leaked toxic gas is lowered. There was a problem that did not work. In other words, despite the installation of the toxic gas detector in the exhaust port, the toxic gas leak cannot be easily detected due to the concentration of the toxic gas lowered due to the inflow of external air, so that the early detection of the toxic gas leak cannot be detected, and the semiconductor process is abnormal. There were disadvantages that resulted.

In addition, although the toxic gas detector detects the toxic gas and the user recognizes the toxic gas leak, it was necessary to disassemble the valves in which a plurality of valves are installed in one semiconductor device and check the valve for diaphragm damage. As a result, not only it takes a long time to find a damaged valve, but also has a problem in that the production is interrupted because the operation is stopped.

In addition, the conventional gas box is provided with a plurality of valves for controlling the flow of oxygen, nitrogen, argon gas, etc. in addition to the toxic gas, the toxic gas detector installed in the exhaust port of the gas box can detect only specific toxic gas Gas leaks such as oxygen, nitrogen, argon gas, and toxic gases are difficult to detect at the same time, and there is a problem that causes abnormalities in the semiconductor process due to undetectable toxic gases or other gases.

In addition, the pumps and pneumatic valves in the semiconductor line may be spaced apart at regular intervals, but in a specific area are arranged to be closely arranged.

At this time, in the case of the pneumatic valves which are closely arranged, the diaphragm may be broken by fatigue due to continuous valve operation, and it may be difficult to install a structure for collecting gas if the discharge hole formed to leak gas to the outside faces an adjacent pneumatic valve. In addition, the development of a gas collection structure that can be applied to all the pneumatic valves are installed so that the position of the discharge hole is not constant.

Prior art literature

(Patent Document 1) Japanese Unexamined Patent Publication No. 2011-107034

(Patent Document 2) Korean Utility Model Publication No. 2008-0004184

(Patent Document 3) Republic of Korea Patent Publication No.

(Patent Document 4) Republic of Korea Registered Patent Publication No. 0857235

An object of the present invention devised to solve the problems as described above, the respective pneumatic valves for controlling the flow of gas is inserted and the collecting unit for collecting the gas leaking from the pneumatic valve and the detection unit for detecting the gas By connecting to the exhaust line, the gas leaked from each pneumatic valve is not mixed with the gas leaked from other pneumatic valves, improving stability and preventing damage to equipment, and real-time monitoring by detecting gas leaks in real time. This is to provide a possible gas leak detection device.

In addition, an object of the present invention, when installing the collecting portion in the pneumatic valve installed in the semiconductor line, by using the wing fitting from the upper side to the side of the pneumatic valve to match the collecting hole and the discharge hole of the pneumatic valve to each other, or discharge outlet By inserting and coupling the end of the extension part which is extended to the other side into the discharge hole where gas leaks due to breakage of the pneumatic valve, it does not stop the semiconductor line and does not affect the semiconductor line operation. It is to provide a gas leak detection apparatus that can prevent a reduction in production, resulting in damage costs.

In addition, it is an object of the present invention, when the pneumatic valve is arranged closely, irrespective of the position of the discharge hole in which air or gas leaks from the pneumatic valve, the position of the collecting port formed in the collecting portion and the wing portion to facilitate the discharge hole The position of the collecting port can be easily moved to the discharge hole by shifting the position or extending or bending the soft collecting unit, and can easily fix the collecting unit inserted into the gap of each coil of the fixing member to the outer circumferential surface of the pneumatic valve. To provide a gas leak detection device.

In addition, the object of the present invention, due to the wing formed to have an elastic force, does not require a separate configuration for attaching the collecting portion to the pneumatic valve, air or gas leaking from the pneumatic valve by installing the collecting portion to face the leak hole with a simple coupling only It is to provide a gas leak detection device that can easily collect, and the collecting port by the elastic force is tightly coupled to the pneumatic valve to collect only air or gas leaked from the pneumatic valve to improve the reliability.

In addition, an object of the present invention, the discharge of the plurality of exhaust lines connected to the port solenoid valve so that only the gas discharged from any one of the plurality of exhaust lines connected to the port solenoid valve can be discharged to the detection unit through the connection line Is controlled by the port solenoid valve, so that the gas leaking from each pneumatic valve is not mixed with the gas leaking from the other pneumatic valve, thereby improving stability and preventing damage to the equipment. It is to provide a gas leak detection device that can be controlled quickly and automatically find a pneumatic valve in which the gas is detected, real-time monitoring and rapid operation of the equipment.

In addition, an object of the present invention, if the gas is detected in the detection unit, the controller to control the port solenoid valve to identify the damaged pneumatic valve, and the unique information of the identified pneumatic valve is displayed on the display, the manager is damaged It is not only easy to identify the pneumatic valve, but also to provide a gas leak detection device that can improve the operation rate of the equipment by quickly managing the identified pneumatic valve.

According to the gas leak detection apparatus of the present invention for achieving the above object, an opening is formed in the lower end so that the pneumatic valve is inserted, a fitting hole through which the air supply line coupled with the pneumatic valve is formed is formed, the A collecting part formed with a through hole through which gas leaking due to breakage of the pneumatic valve is discharged to the outside; A cover part coupled to the opening so that the gas leaking from the pneumatic valve is not discharged through the opening formed at the lower end of the collecting part; An exhaust line, one end of which is connected to a through hole of the collecting unit, for exhausting gas leaking from the pneumatic valve to the outside; And a detection unit connected to the other end of the exhaust line and detecting a gas contained in the exhaust air discharged to the exhaust line, wherein the cover unit includes a pair of cover members having grooves formed to surround the outer circumferential surface of the pneumatic valve. It includes.

Gas leak detection device according to another embodiment of the present invention, the upper and lower through the opening so that the pneumatic valve is inserted is formed in the upper and lower ends, the collecting portion formed with a through hole through which the gas leaked due to breakage of the pneumatic valve is discharged to the outside ; A cover part coupled to the opening so that the gas leaking from the pneumatic valve is not discharged through the opening formed in the upper and lower ends of the collecting part; An exhaust line, one end of which is connected to a through hole of the collecting unit, for exhausting gas leaking from the pneumatic valve to the outside; And a detection unit connected to the other end of the exhaust line and detecting a gas contained in the exhaust air discharged to the exhaust line, wherein the cover unit includes a pair of cover members having grooves formed to surround the outer circumferential surface of the pneumatic valve. It includes.

Gas leak detection apparatus according to another embodiment of the present invention, the collecting unit for collecting the gas leaks due to breakage of the pneumatic valve; An exhaust line having one end coupled to an outlet of the collecting unit to exhaust the discharge gas discharged to the outlet of the collecting unit to the outside; It is coupled to the other end of the exhaust line, the detection unit for detecting a gas contained in the exhaust air discharged to the exhaust line; including, The collecting unit is attached to the discharge hole in which gas leaks due to breakage of the pneumatic valve A collecting port for collecting gas is formed, and each wing is formed in a pair of wings protruding on both sides of the collecting portion surrounding the outer circumferential surface of the pneumatic valve, the wing having an elastic force in the direction in which the wings face each other; do.

In addition, the pneumatic valve, the discharge hole through which the gas leaks is formed in the upper and lower, the collecting portion is formed to extend upward, the collecting port for collecting the gas leaked by the breakage of the pneumatic valve on the top is further formed do.

In addition, the blade is bent or bent, characterized in that the elastic support to the pneumatic valve with an elastic force toward the pneumatic valve is characterized in that the collecting port is in close contact with the discharge hole.

In addition, the collecting port is characterized in that it is formed to have a long hole shape in the longitudinal direction of the blade.

In addition, the collecting unit, the peeling adhesive is applied to the outer peripheral surface of the collecting port is characterized in that the detachable to the outer peripheral surface of the pneumatic valve, but is fixed in close contact so that the gas does not leak.

Gas leak detection apparatus according to another embodiment of the present invention, the trapping portion of the gas leak due to the breakage of the pneumatic valve, the trapping portion is formed in the inner groove formed in one side formed with a discharge port for discharging the gas collected; An exhaust line having one end inserted into the inlet groove to exhaust the exhaust gas discharged to the discharge port of the collecting unit to the outside; A detection unit coupled to the other end of the exhaust line and detecting a gas contained in the exhaust air discharged to the exhaust line, wherein the collecting unit is in communication with the discharge port and extends to the other side; End of the part is coupled to the discharge hole in which the gas leaks due to breakage of the pneumatic valve is characterized in that the collecting port for collecting the gas is formed.

The pneumatic valve may include a plurality of discharge holes through which gas leaks, and the collecting part may include a plurality of collection holes inserted into and coupled to each of the discharge holes to collect the gas leaked due to breakage of the pneumatic valve. It features.

In addition, both ends are coupled to surround the outer circumferential surface of the pneumatic valve, the fixing member for tightly fixing the collecting portion inserted into the gap that is opened for each coil to the pneumatic valve; further includes.

In addition, the inlet of the collecting port protrudes to be inserted into the discharge hole of the pneumatic valve; the needle portion is inserted into the discharge hole; includes.

In addition, each of the plurality of pneumatic valves are provided in the middle of the exhaust line is coupled to each of the collecting section for collecting the gas, under the control of the controller to discharge each of the exhaust gas to the respective exhaust line or integrally A port solenoid valve for discharging; And a controller configured to control whether the plurality of exhaust lines are discharged through the solenoid valve when the leaking gas is detected by the detection unit.

The controller may transmit data including the type of leak gas detected by the detector and the amount of leak gas detected to the management server in real time, and the management server may receive data from the controller and output the data in a graph. Characterized in that provided to the administrator.

The display unit may further include a display unit configured to display the unique information of the identified pneumatic valve when the gas is detected by the detection unit and the controller detects the damaged pneumatic valve as the controller controls the port solenoid valve. Is characterized in that each preset a plurality of pneumatic valves.

In addition, the detection unit, a toxic gas detector for detecting the toxic gas leaking from the pneumatic valve for controlling the flow of toxic gas, and an oxygen sensor for detecting the gas leaking from the pneumatic valve for controlling the flow of oxygen, nitrogen, argon gas It includes.

The detection unit may include an alarm unit including a first alarm unit generating an alarm when toxic gas is detected through the toxic gas detector, and a second alarm unit generating an alarm when gas is detected through the oxygen sensor; Include.

As described above, the effects of the present invention can prevent the gas leaking from each pneumatic valve from mixing with the gas leaking from the other pneumatic valves, thereby improving stability and preventing damage to the equipment. The solenoid valve is controlled to provide a gas leak detection device that can quickly and automatically find a pneumatic valve that detects gas.

In addition, the effect of the present invention is not only to stop the semiconductor line does not affect the operation of the semiconductor line, but also to reduce the amount of production caused by stopping the semiconductor line, resulting in a cost of leak detection apparatus that can be prevented from occurring Can provide.

In addition, the effect of the present invention, when the pneumatic valve is arranged closely, regardless of the position of the discharge hole in which air or gas leaks from the pneumatic valve, the position of the collecting port can be easily moved to the discharge hole, and fixed It is possible to provide a gas leak detection apparatus capable of easily closely fixing a collecting portion inserted into a gap formed for each coil of a member to an outer circumferential surface of a pneumatic valve.

In addition, the effect of the present invention, due to the wing formed to have an elastic force, does not require a separate configuration for attaching the collecting portion to the pneumatic valve, air or gas leaking from the pneumatic valve by installing the collecting portion to face the leak hole with a simple coupling only At the same time it can be easily collected, the collecting port by the elastic force is provided in close contact with the pneumatic valve can provide a gas leak detection device that can improve the reliability by collecting only the air or gas leaked from the pneumatic valve.

In addition, the effect of the present invention is that the gas leaking from each pneumatic valve is not mixed with the gas leaking from the other pneumatic valve to improve the stability and to prevent damage to the equipment, and at the same time, if the detection unit detects gas port solenoid valve Can be controlled to provide a gas leak detection device that can quickly and automatically find the pneumatic valve for detecting the gas in real time monitoring and equipment operation.

1 is a perspective view showing a gas leak detection apparatus according to a preferred embodiment of the present invention.

Figure 2 is an exploded perspective view showing a gas leak detection apparatus according to a preferred embodiment of the present invention.

3 is a cross-sectional view showing a gas leak detection apparatus according to a preferred embodiment of the present invention.

4 is a view showing a state in which the port solenoid valve is provided in the gas leak detection apparatus according to an embodiment of the present invention.

5 is a cross-sectional view showing a state in which the port solenoid valve is provided in the gas leak detection apparatus according to an embodiment of the present invention.

6 is a cross-sectional view illustrating a state in which gas is collected through a gas leak detection apparatus according to a preferred embodiment of the present invention.

7 is a block diagram showing a gas leak detection apparatus according to a preferred embodiment of the present invention.

8 is an exploded perspective view showing another embodiment of the collecting unit of the gas leak detection apparatus according to a preferred embodiment of the present invention.

9 is a perspective view showing another embodiment of the collecting unit of the gas leak detection apparatus according to a preferred embodiment of the present invention.

FIG. 10 is an exploded perspective view illustrating the collecting part of FIG. 9. FIG.

FIG. 11 is a perspective view illustrating another embodiment of a collecting part of a gas leak detection apparatus according to a preferred embodiment of the present invention and coupled to a pneumatic valve.

FIG. 12 is a perspective view illustrating a state in which the collecting port of FIG. 9 is coupled to the eutectic valve.

13 is a perspective view showing a state in which the needle portion is coupled to the collecting port of the gas leak detection apparatus according to a preferred embodiment of the present invention.

14 is a perspective view showing another embodiment of the collecting unit of the gas leak detection apparatus according to a preferred embodiment of the present invention.

FIG. 15 is an exploded perspective view illustrating the collecting part of FIG. 14. FIG.

16 and 17 are perspective views illustrating a state in which a collecting part of a gas leak detection apparatus according to an exemplary embodiment of the present invention is fixed to a fixing member.

1: pneumatic valve 2: gas inlet pipe 3: gas discharge pipe

4: outlet hole 5: air supply unit 6: air supply line

8: Stopper 9: Diaphragm 10: Case

11: opening 12: fitting hole 13: through hole

14 Bonnet Nut 15 Cylinder 20 Cover Part

21: cover member 22: groove 30: exhaust line

40: detector 41: toxic gas detector 42: oxygen sensor

43: alarm unit 44: first alarm unit 45: second alarm unit

50: exhaust valve 51: port solenoid valve

60: pump 70: sealing portion 71: connecting portion

72: fixing member 73: O-ring 80: controller

82: display unit 90: connection line 100: management server

111: discharge port 112: collecting port 113: O-ring

114: needle portion 116: extension portion 117: insertion groove

120: wing 121: wing 130: fixing member

131: coil 132: crack

Hereinafter, the present invention will be described with reference to the drawings for describing a gas leak detection apparatus according to embodiments of the present invention.

1 is a perspective view showing a gas leak detection apparatus according to a preferred embodiment of the present invention. Figure 2 is an exploded perspective view showing a gas leak detection apparatus according to a preferred embodiment of the present invention. 3 is a cross-sectional view showing a gas leak detection apparatus according to a preferred embodiment of the present invention.

1 to 3, the gas leak detection apparatus according to the present invention includes a collecting part 10, a cover part 20, an exhaust line 30, and a detecting part 40.

First, the collecting part 10 is empty inside, is formed in a cylinder, and an opening 11 is formed at the lower end so that the pneumatic valve 1 is inserted.

In addition, the collecting unit 10 may be formed in various shapes such as a polygonal column in addition to the cylinder.

Here, the collecting unit 10, if the pneumatic valve 1 to be described later is broken, the discharge hole 4 formed in the pneumatic valve 1 so that the gas is discharged to the outside is fixed so that the inside of the collecting unit 10 It is desirable to have a height.

In addition, the collecting part 10 is provided with a fitting hole 12 and a through hole 13 on one side.

Preferably, the fitting hole 12 and the through hole 13 penetrate the inside and the upper portion of the collecting unit 10 is formed.

The fitting hole 12 is formed to penetrate the air supply line 6 coupled with the pneumatic valve 1.

In addition, the through hole 13 is formed to be penetrated so that the gas leaking due to breakage of the pneumatic valve 1 after being supplied to the pneumatic valve 1 is discharged to the outside of the collecting unit 10.

That is, when the collecting portion 10 of the gas leak detection apparatus according to the present invention is installed in each pneumatic valve 1 and the gas passing through the pneumatic valve 1 leaks due to breakage of the pneumatic valve 1. In addition, the gas is collected separately so that the leaking gas is not leaked to the outside and mixed with the gas leaking from the other pneumatic valve (1).

The cover part 20 is coupled to the opening 11 so that gas leaked due to breakage of the pneumatic valve 1 is not discharged through the opening 11 of the collecting part 10.

At this time, the cover portion 20, while the discharge hole (4) formed in the pneumatic valve 1 is located inside the collecting unit 10, the outer peripheral surface of the pneumatic valve (1) which is the lower side of the discharge hole (4) It is preferable to be coupled to the opening 11 of the collecting part 10 so as to wrap.

On the other hand, the cover portion 20, the collecting portion 10 may be formed to surround both the gas inlet pipe (2) and the gas discharge pipe (3) coupled to both ends of the pneumatic valve (1) and the pneumatic valve (1). Therefore, it is more preferable that it is formed so that the opening part 11 opened in the collection part 10 can be opened and closed.

In addition, the cover part 20 includes a pair of cover members 21 in which the grooves 22 are formed to surround the outer circumferential surface of the pneumatic valve 1.

Here, the cover member 21 is formed in the semicircle shape which divided the disk which penetrated the center into 2, and the groove | channel 22 is formed in a diameter part.

That is, the pair of cover members 21, one side, the groove 22, the adhesive is applied to attach the one side to the bottom surface of the collecting portion 10 and at the same time the diameter portion abut each other collecting portion ( 10) to the opening 11 of. Accordingly, the cover member 21 closes the opening 11 of the collecting unit 10.

Here, the pneumatic valve (1) is a gas inlet pipe (2), the gas discharge pipe (3) is connected to both, the gas in the gas inlet pipe (2) by using the pneumatic pressure of the high-pressure air supplied from the air supply unit (5) It is a valve that controls the flow of gas flowing into the discharge pipe (3). Preferably, the inlet of the gas inlet pipe (2) is opened and closed with a diaphragm, the opening and closing is made by the pneumatic pressure of high pressure air.

For example, the pneumatic valve 1 may be made of a diaphragm valve or a pneumatic valve.

That is, the pneumatic valve 1 is installed between the gas inlet pipe 2 and the gas discharge pipe (3) so that the gas that is moved from the gas inlet pipe (2) to the gas discharge pipe (3) is passed, the passage through which the gas passes The pneumatic pressure of the high pressure air is used to open and close the diaphragm. In addition, a stopper 8 for pressing the diaphragm 9 is provided when the high pressure air is applied.

A plurality of such pneumatic valves 1 are installed in semiconductor equipment, and the collecting part 10 described above or the collecting part of another embodiment to be described later for each discharge hole 4 through which air or gas from each pneumatic valve 1 leaks. 10 is installed.

This is because when the gas passing through the pneumatic valve 1 leaks due to breakage of the pneumatic valve 1, the leaked gas is leaked to the outside so that the gas does not mix with the gas leaking from the other pneumatic valve 1. It is to collect individually.

In addition, the bonnet nut 14 in which the diaphragm 9 is installed is formed with a discharge hole 4 so that the diaphragm 9 may be discharged to the outside of the pneumatic valve 1 when the diaphragm 9 is broken.

In addition, the pneumatic valve 1 has discharge holes 4 through which gas leaks up and down. At this time, the discharge hole (4), and the gas discharge hole (4) formed so that the diaphragm (9) is installed in the bonnet nut (14) is leaked to the outside of the pneumatic valve (1) when the diaphragm (9) is broken; It includes an air discharge hole (4) formed so that the high pressure air for controlling the opening and closing of the diaphragm (9) by the breakage of the cylinder (15) provided inside the pneumatic valve (1) to the outside, the discharge hole (4) indicates at least one of the gas discharge hole 4 and the air discharge hole 4.

In addition, the air used in the pneumatic valve (1) is cleandryair (CDA) or General N ₂ (GN ₂ ), when using the General N ₂ , if the cylinder (15) of the pneumatic valve (1) is broken, General N ₂ As the case 10 collects the leaked and leaked General N ₂ , the oxygen concentration in the case is lowered, and the detector 40 can detect oxygen. Accordingly, the present invention can detect the gas leaking through the breakage of the diaphragm 9 and the cylinder 15 of the pneumatic valve 1 with the detection unit 40, and can detect which part of the pneumatic valve 1 is damaged. have.

In addition, the air supply line 6 coupled to the pneumatic valve 1 guides the high pressure air supplied from the air supply unit 5 to the pneumatic valve 1.

At this time, the air supply line 6 is coupled to the upper portion of the pneumatic valve (1) through the fitting hole (12). And when the air supply line 6 is coupled through the fitting hole 12, it is preferable that the sealing hole and the fitting hole 12 so as not to leak the gas leaks due to breakage of the pneumatic valve (1).

The exhaust line 30 has one end connected to the through hole 13 of the collecting unit 10 and the other end connected to the detection unit 40 which will be described later.

In addition, the exhaust line 30 guides the gas exhausted through the through hole 13 to the detection unit 40.

Here, the gas exhausted from the through hole 13 to the detection unit 40 through the exhaust line 30 may be mixed with air discharged due to breakage of the cylinder 15 after being supplied to the pneumatic valve 1. have.

The detector 40 is coupled to the other end of the exhaust line 30 to detect a gas contained in the exhaust air exhausted to the exhaust line 30.

That is, the detection unit 40 is for monitoring the leakage of gas, the toxic gas detector 41 for detecting the toxic gas leaking from the pneumatic valve 1 for controlling the flow of the toxic gas or oxygen, nitrogen, argon gas At least one of the oxygen sensor 42 for detecting the gas leaking from the pneumatic valve (1) for controlling the flow of, preferably includes both the toxic gas detector 41 and the oxygen sensor 42.

Here, the toxic gas detector 41 uses a toxic gas detector, and the oxygen sensor 42 uses an O ₂ sensor.

In addition, the exhaust line 30 is connected to the toxic gas detector 41 and the pneumatic valves 1 for controlling the flow of the toxic gas, and the oxygen sensor 42 and the pneumatic pressure for controlling the flow of oxygen, nitrogen, argon gas It is preferred to be connected with the valves 1.

The other side of the exhaust lines 30 of the pneumatic valves 1 may be integrated into one line and connected to the toxic gas detector 41 or the oxygen sensor 42 of the detector 40.

The oxygen sensor 42 detects gas through oxygen, nitrogen, and argon gas when the concentration of oxygen is greater than or equal to about 20.9% or less of oxygen contained in the air in the atmosphere.

For example, when oxygen gas leaks from the pneumatic valve 1, the oxygen sensor 42 detects that the concentration of oxygen to be detected is greater than or equal to the concentration of oxygen contained in the air in the atmosphere (20.9%). As a result, it can be seen that the pneumatic valve 1 that controls the flow of oxygen gas is damaged.

In addition, when nitrogen or argon gas leaks from the pneumatic valve 1, the oxygen sensor 42 detects that the oxygen concentration detected by the oxygen sensor 42 is less than or equal to the concentration of oxygen contained in the air in the atmosphere (20.9%). Will be detected. This can be seen that the breakage of the pneumatic valve (1) for controlling the flow of nitrogen or argon gas.

Therefore, in the gas leak detection apparatus of the present invention, the collecting part 10 and the cover part 20 are installed at each pneumatic valve 1, and the gas leak detection system collects the leaked gas leaked by the damage of the pneumatic valve 1 and exhaust line ( By exhausting to the detection unit 40 through 30, it is possible to easily grasp whether any of the pneumatic valves 1 is leaked or not, and to easily identify the type of leaked gas. Since only the pneumatic valve 1 corresponding to a kind can be checked, the pneumatic valve 1 in which gas leaks can be found quickly.

On the other hand, the detection unit 40, if the gas contained in the exhaust air exhausted to the exhaust line 30 or the connection line 90, that is, the gas is detected by the toxic gas detector 41 or the oxygen sensor 42, An alarm unit 43 for generating an alarm is included.

In addition, the alarm unit 43 may generate an alarm when the gas is detected through the first alarm unit 44 and the oxygen sensor 42 that generate an alarm when the toxic gas is detected through the toxic gas detector 41. A second alarm unit 45 to be included.

Accordingly, the user can stop the operation of the factory equipment through the alarm of the alarm unit 43.

On the other hand, the gas leak detection apparatus according to the present invention further comprises an exhaust valve 50, the pump 60 and the sealing unit 70.

The exhaust valve 50 is installed in the middle of the exhaust line 30 to control whether or not the gas discharged from the collecting unit 10 to the detecting unit 40.

This exhaust valve 50 is for easily finding the pneumatic valve 1 in which gas leaks, when gas is detected by the detection part 40. FIG.

For example, when gas is detected by the detection unit 40, all the exhaust valves 50 installed in the exhaust line 30 are locked, and gas is leaked by individually opening or closing any one exhaust valve 50. The pneumatic valve 1 can be found. That is, when gas is detected by the detection unit 40 when one of the exhaust valves 50 is opened, the gas is leaked from the exhaust valve 50. Therefore, the presence or absence of the gas leaking from the pneumatic valve 1 is quickly determined. You can make quick judgments, get the equipment up and running quickly, and save money on maintenance costs.

The pump 60 is installed at the other end of the exhaust line 30 to move the discharged air exhausted to the exhaust line 30 to the detector 40.

The pump 60 moves the gas collected by the collecting unit 10 to the detecting unit 40 quickly so that the detecting unit 40 detects the leakage of the gas quickly.

In addition, the pump 60 may be formed integrally with the detector 40 or may be formed separately.

The sealing part 70 includes the connection part 71, the fixing member 72, and the O-ring 73.

The sealing unit 70 is for sealing between the exhaust line 30 and the collecting unit 10 so that the discharged air collected in the collecting unit 10 can be discharged to the exhaust line 30.

The connection portion 71 of the sealing portion 70 is coupled to one end of the exhaust line 30, the lower portion is formed with a protrusion inserted into the through hole (13).

In addition, the connection part 71 is preferably formed so that the exhaust gas collected in the collecting part 10 communicates with the exhaust line 30.

The fixing member 72 is inserted into the through hole 13 and coupled to the protrusion projecting into the collecting part 10, but is coupled to the inside of the collecting part 10. Accordingly, the fixing member 72 fixes the connecting portion 71 to the collecting portion 10. In addition, a washer may be further included between the fixing member 72 and the inner surface of the collecting unit 10, but is not limited thereto.

At this time, a screw thread is formed on the outer circumferential surface of the protrusion, and the fixing member 72 may be a nut so as to be coupled to the screw thread, but is not limited thereto.

O-ring 73 is inserted into the protrusion of the connection portion 71 to seal between the connection portion 71 and the collecting portion 10.

Therefore, the gas leak detection apparatus according to the present invention prevents the gas leaking from each pneumatic valve 1 from mixing with the gas leaking from the other pneumatic valve 1, thereby improving stability and preventing damage to equipment. , Real-time monitoring is possible by detecting the gas leak in the detection unit 40 in real time.

4 is a view showing a state in which the port solenoid valve is provided in the gas leak detection apparatus according to an embodiment of the present invention. 5 is a cross-sectional view showing a state in which the port solenoid valve is provided in the gas leak detection apparatus according to an embodiment of the present invention. 6 is a cross-sectional view illustrating a state in which gas is collected through a gas leak detection apparatus according to a preferred embodiment of the present invention. 7 is a block diagram showing a gas leak detection apparatus according to a preferred embodiment of the present invention.

4 to 7, the gas leak detection apparatus according to the present invention further includes a port solenoid valve 51, a controller 80, and a display 82.

The port solenoid valve 51 is provided in the middle part of the exhaust line 30 which is provided in each of the plurality of pneumatic valves 1 and collects gas 10, and is controlled by the controller 80. By means of each of the exhaust gas to the exhaust line 30 to discharge or integrally discharged.

Here, the exhaust line 30, the collecting unit 10 and the port solenoid valve 51 is provided for each pneumatic valve (1), between the port solenoid valve 51 and the detection unit 40, one connection line 90 is formed. In other words, the connection line 90 connects the port solenoid valve 51 and the detection unit 40, and guides the gas discharged from the port solenoid valve 51 to be moved to the detection unit 40.

That is, the port solenoid valve 51 flows in the gas exhausted into the plurality of exhaust lines 30 and discharges the gases to one connection line 90. Here, when the detection unit 40 to be described later detects the gas, the controller 80 controls the gas to be introduced and discharged to the connection line 90 only in one of the exhaust lines 30 of the plurality of exhaust lines 30. do. As such, as only the gas exhausted from each exhaust line 30 is discharged to the connection line 90, the detection unit 40 may sequentially and accurately identify which exhaust line 30 the gas is exhausted from.

On the other hand, since the operation relationship and control of the port solenoid valve 51 is already known, the detailed operation relationship and control description will be omitted.

Therefore, in the gas leak detection apparatus of the present invention, the collecting part 10 is installed in each pneumatic valve 1, and collects the leaked gas leaked from the damage of the pneumatic valve 1 to exhaust line 30, the port solenoid valve By exhausting to the detection unit 40 through the 51 and the connection line 90, it is possible to easily determine which of the pneumatic valves 1 of the plurality of pneumatic valves 1 is present, as well as the type of leaking gas. Can be easily identified, and only the pneumatic valve 1 corresponding to the type can be checked, so that the pneumatic valve 1 in which the gas leaks can be found quickly.

When the gas is detected by the detector 40, the controller 80 connects only the gas discharged from one of the exhaust lines 30 of the multiple exhaust lines 30 connected to the port solenoid valve 51 to the connection line 90. Controls whether each of the plurality of exhaust lines 30 connected to the port solenoid valve 51 to be discharged to the detection unit 40 through.

That is, as described above, the controller 80 can automatically control the port solenoid valve 51, so that the user can quickly control which exhaust line 30 does not need to control whether the exhaust line 30 is exhausted. Can be used to determine if gas has been detected. Accordingly, the operation of the semiconductor equipment can be quickly resumed, and the maintenance cost of the equipment can be saved.

In addition, the controller 80 transmits data including the type of gas detected by the detection unit 40 and the amount of detection of the gas to the management server 100 in real time.

The management server 100 receives data from the controller 80 and outputs the graph.

That is, the manager can easily predict whether or not the gas leaks at a glance through the output graph to predict the gas leakage, so that the alarm of the above alarm unit 43 does not sound or leaks even before it sounds. Preliminary preparation and maintenance in accordance with

When the display unit 82 detects the broken pneumatic valve 1 as the gas is detected by the detection unit 40 and the controller 80 controls the port solenoid valve 51, the display unit 82 detects the inherent characteristic of the pneumatic valve 1. Display the information.

For example, the port solenoid valve 51 is displayed on the collecting unit 10 or the pneumatic valve 1 to which the exhaust line 30 is connected to correspond to the order of controlling the exhaust line 30 from the first to the last. When the gas is detected by the detection unit 40 while the 80 controls the port solenoid valve 51, if the control sequence of the corresponding exhaust line 30 is displayed on the display unit 82, the user displays the display unit 82. It is possible to quickly find a pneumatic valve (1), that is, a broken pneumatic valve (1) matching the sequence number indicated in the).

In addition to the inherent information of the pneumatic valve 1, the display unit 82 can also display the type of gas detected and the amount of gas detected.

Referring to FIG. 3, the collecting part 10 of the gas leak detection apparatus according to the present invention does not surround the pneumatic valve 1 as a whole, but covers only the bonnet nut 14, so that the gas leaks from the bonnet nut 14. Can be captured.

Here, among the components of the gas leak detection apparatus, the same configuration as the above-described gas leak detection apparatus, but an opening 11 is further formed on the upper end of the collecting portion 10, and covers the opening 11 to cover the collecting portion ( The cover 20 for sealing the inside of the 10 is further provided.

In addition, the through hole 13 of the collecting unit 10 may be formed on the side surface.

In other words, the collecting unit 10 has a through hole through which the upper and lower portions are inserted to insert the pneumatic valve 1 so that the opening 11 is formed at the upper and lower ends thereof, and the gas leaked due to the breakage of the pneumatic valve 1 is discharged to the outside. 13) is formed.

The gas collected by the collecting unit 10 is exhausted to the detection unit 40 through the exhaust line 30 connected to the through hole 13, and the detection unit 40 detects the gas.

9 is a perspective view showing another embodiment of the collecting unit of the gas leak detection apparatus according to a preferred embodiment of the present invention. FIG. 10 is an exploded perspective view illustrating the collecting part of FIG. 9. FIG. FIG. 11 is a perspective view illustrating another embodiment of a collecting part of a gas leak detection apparatus according to a preferred embodiment of the present invention and coupled to a pneumatic valve. FIG. 12 is a perspective view illustrating a state in which the collecting port of FIG. 9 is coupled to the eutectic valve. 13 is a perspective view showing a state in which the needle portion is coupled to the collecting port of the gas leak detection apparatus according to a preferred embodiment of the present invention.

9 and 10, the collecting unit 10 collects gas leaked due to breakage of the pneumatic valve 1.

That is, the collecting unit 10 is attached to the discharge hole 4 in which gas leaks due to breakage of the pneumatic valve 1, and a collecting port 112 for collecting gas is formed.

Here, the exhaust line 30 described above is coupled to the discharge port 111 of the collecting unit 10 to exhaust the discharge gas discharged to the discharge port 111 of the collecting unit 10 to the outside.

The inside of the collecting part 10 has a hollow shape, and is opened to communicate with the collecting holes 112 on the outside thereof, and one end of the exhaust line 30 to be described later is coupled thereto.

In the collecting section 10, a peeling adhesive is applied to the outer peripheral surface of the collecting port 112. This is to prevent the collection unit 10 is detachably attached to the outer circumferential surface of the pneumatic valve (1) but tightly fixed so that no gas leaks between the pneumatic valve (1) and the collecting unit (10).

In addition, the collecting unit 10 is provided with an O-ring 113 outside the inlet of the collecting port 112. This is to seal between the outer circumferential surface of the pneumatic valve 1 and the collecting portion 10, so that gas does not leak between the pneumatic valve 1 and the collecting portion 10.

Referring to FIG. 11, the collecting unit 10 extends upward and collects air leaking into the discharge hole 4, ie, the air discharge hole 4, leaked due to breakage of the pneumatic valve 1. Collector 112 is further formed.

On the other hand, the gas leak detection apparatus according to the present invention further includes a wing 120.

The wing unit 120 includes a pair of wings 121 that protrude on both sides of the collecting unit 10 and surround the outer circumferential surface of the pneumatic valve 1.

In addition, the wing portion 120, a variety of coupling methods may be used so that the pair of wings 121 surround the pneumatic valve (1) and can be coupled to each other.

For example, in addition to the knot coupling method of knotting both ends of the wing 121, the button coupling method using the detachment of the button, any one of the belt coupling method, clamp coupling method or Velcro tape coupling method may be used.

In addition, the wing portion 120 is made of an elastic band having an elastic force, regardless of the thickness of the pneumatic valve (1) can be fixed in close contact with the collecting port 112 of the collecting portion 10 to the discharge hole (4) In the above-described coupling method, the adhesion can be increased.

In addition, the wing 121, it is preferable to have an elastic force in a direction facing each other, which is to elastically support the outer peripheral surface of the pneumatic valve (1) and the collecting portion 10 is fixed to the pneumatic valve (1).

The blade 121 is preferably disposed on both sides of the collecting port 112 of the collecting unit 10, and is disposed above and below the collecting hole 112 formed up and down.

On the other hand, the wings 121 are curved or bent. This is to elastically support the outer circumferential surface of the pneumatic valve 1 with an elastic force directed toward the pneumatic valve 1. For this reason, the blade 121 can closely couple the collecting port 112 to the discharge hole (4).

At this time, the wing 121 is formed longer than the length of the outer circumferential surface 1/4 of the pneumatic valve 1, the wing portion 120, because the wing 121 wraps more than half of the outer circumferential surface of the pneumatic valve (1), It is not easily dropped by external force.

Moreover, the wing | blade 121 has the collection port 112 which the inside communicates with the inside of the collection part 10, and the inner surface opened.

In this case, only one of the collecting holes formed in the collecting unit 10 and the collecting hole formed in the wing 121 may be selectively formed, and each may be formed.

Referring to FIG. 12, when the pneumatic valve 1 is closely arranged, regardless of the position of the discharge hole 4 in which air or gas leaks from the pneumatic valve 1, the collecting part 10 and the wing part ( Position of the collecting port 112 formed in the 120 can be easily moved to the discharge hole (4). In other words, when the space for connecting the collecting part 10 to the discharge hole 4 is narrow toward the other pneumatic valve 1 adjacent to the position of the discharge hole 4, the discharge hole using the wing 120 You can connect to (4).

Accordingly, any one of the plurality of collecting ports 112 is closely coupled to the discharge hole 4 of the pneumatic valve 1 in some cases.

In addition, the collecting hole 112 formed in the wing 121 is formed on the inner surface of the wing 121 having the direction of the elastic force, the wing 121 is in contact with the wing 121 and the pneumatic valve (1) It is preferably formed at the contact portion of.

Here, it is preferable that the collection port 112 is formed in the inner surface which the wing | blade 121 elastically supports the outer peripheral surface of the pneumatic valve 1 here. As described above, the collecting port 112 formed in the wing 121 and the discharge hole 4 of the pneumatic valve 1 are in close contact with each other in the state in which the collecting hole 112 is formed in the wing 121.

In addition, the collecting holes 112 may be formed to have a long hole shape in the longitudinal direction of the wing 121. The collecting holes 112 may have an opening or a diameter wider with the discharge hole 4.

That is, since the collecting hole 112 is formed in a long hole shape, the collecting hole 112 and the discharge hole 4 are easily communicated with each other when the collecting part 10 and the wing part 120 are moved left and right. Can be adjusted, the installation of the gas leak detection device according to the invention is facilitated, it is possible to easily collect the air or gas leaked into the discharge hole (4).

Referring to FIG. 13, the collecting part 10 includes a needle in which the inlet of the collecting port 112 protrudes to be inserted into the discharge hole 4 of the pneumatic valve 1 and is inserted into the gas discharge hole 4. Part 114 is included.

At this time, the needle portion 114 is hollow inside, it is preferable that the protruding end is formed to be in communication with the collecting port 112.

In addition, the outer diameter of the needle portion 114 is formed to be the same as the inner diameter of the discharge hole 4, it is preferable that the needle portion 114 is fitted to the discharge hole (4).

In addition, the needle portion 114, the outer surface is made of a soft material or a rigid material, when inserted into the discharge hole 4, between the outer surface of the needle portion 114 and the inner surface of the discharge hole (4) Is preferably sealed but not limited thereto.

14 is a perspective view showing another embodiment of the collecting unit of the gas leak detection apparatus according to a preferred embodiment of the present invention. FIG. 15 is an exploded perspective view illustrating the collecting part of FIG. 14. FIG. 16 and 17 are perspective views illustrating a state in which a collecting part of a gas leak detection apparatus according to an exemplary embodiment of the present invention is fixed to a fixing member.

14 to 17, the collecting unit 10 collects gas leaked due to breakage of the pneumatic valve 1.

In addition, the collecting part 10 is attached to the discharge hole 4 in which gas leaks due to breakage of the pneumatic valve 1, and a collecting port 112 for collecting gas is formed.

In the collecting unit 10, a discharge port 111 through which the gas collected by the collecting port 112 is discharged is formed.

That is, the discharge port 111 is formed on one side of the collecting unit 10, and the collecting hole 112 is formed on the other side.

At this time, one side of the collecting unit 10 is formed in the inner groove 117 is inserted into the exhaust line 30 to be described later.

On the other side of the collecting part 10, an extension part 116 communicating with the discharge port 111 and extending is formed. In addition, the end of the extension portion 116 is inserted into the discharge hole (4) in which gas leaks due to breakage of the pneumatic valve (1).

In addition, the collecting port 112 for collecting the gas is formed at the end of the extension portion 116, the extension portion 116 is formed in a hollow shape, the collecting port 112 and the discharge port 111 is in communication with each other.

In addition, the end portion of the extension portion 116 is bent, the end portion of the extension portion 116 is in line with the longitudinal direction of the discharge hole (4). This is for easily inserting and coupling the end portion of the extension portion 116 to the discharge hole 4, and stably fixed.

In addition, the pneumatic valve 1 is formed with a plurality of discharge holes (4) through which the gas leaks.

In this case, the collecting unit 10 may be formed in the middle portion of the plurality of extension port 116 collecting port 112 is inserted into each discharge hole (4).

In addition, the collecting portion 10 is made of a soft material can be stretched and bent in the length is easy to install in the pneumatic valve (1).

Here, the needle portion 114, the inlet of the collecting port 112 protrudes so as to be inserted into the discharge hole (4) of the pneumatic valve (1) is inserted into the discharge hole (4).

This is to easily insert when the end of the extension portion 116 of the collecting portion 10 made of a soft material into the discharge hole (4). In addition, by changing the diameter size of the needle portion 114, it is possible to apply the collecting portion 10 to the discharge hole (4) having a different size.

16 and 17, the gas leak detection apparatus according to the present invention further includes a fixing member 130.

The fixing member 130 surrounds the outer circumferential surface of the pneumatic valve 1, and both ends thereof are coupled to each other, and the collecting part 10 inserted into the gap 132 that occurs every coil 131 is tightly fixed to the pneumatic valve 1.

In addition, the needle portion 114, the outer surface is made of a flexible material, when inserted into the discharge hole 4, the sealing between the outer surface of the needle portion 114 and the inner surface of the discharge hole (4) But is not limited thereto.

Claims

An opening formed at a lower end to insert the pneumatic valve, a fitting hole through which an air supply line coupled with the pneumatic valve is formed, and a collecting hole formed with a through hole through which gas leaked due to breakage of the pneumatic valve is discharged to the outside;

A cover part coupled to the opening so that the gas leaking from the pneumatic valve is not discharged through the opening formed at the lower end of the collecting part;

An exhaust line, one end of which is connected to a through hole of the collecting unit, for exhausting gas leaking from the pneumatic valve to the outside; And

And a detection unit connected to the other end of the exhaust line and detecting a gas contained in exhaust air exhausted to the exhaust line.

The cover part,

Gas leak detection device comprising a pair of cover member grooves formed to surround the outer peripheral surface of the pneumatic valve.
An upper and lower portions of the upper and lower ends of the pneumatic valve are formed to have openings formed therein, and a collecting part having a through hole through which gas leaked due to breakage of the pneumatic valve is discharged to the outside;

A cover part coupled to the opening so that the gas leaking from the pneumatic valve is not discharged through the opening formed in the upper and lower ends of the collecting part;

An exhaust line, one end of which is connected to a through hole of the collecting unit, for exhausting gas leaking from the pneumatic valve to the outside; And

And a detection unit connected to the other end of the exhaust line and detecting a gas contained in exhaust air exhausted to the exhaust line.

The cover part,

Gas leak detection device comprising a pair of cover member grooves formed to surround the outer peripheral surface of the pneumatic valve.
A collecting unit for collecting the gas leaking due to breakage of the pneumatic valve;

An exhaust line having one end coupled to an outlet of the collecting unit to exhaust the discharge gas discharged to the outlet of the collecting unit to the outside;

And a detector coupled to the other end of the exhaust line to detect a gas contained in exhaust air exhausted to the exhaust line.

The collecting unit is attached to the discharge hole in which gas leaks due to breakage of the pneumatic valve is formed collecting trap for collecting the gas,

And a wing portion protruding from both sides of the collecting portion to surround the outer circumferential surface of the pneumatic valve, the wing portion having elastic force in a direction in which the wings face each other.
The method of claim 3,

The pneumatic valve, the discharge hole through which the gas leak is formed up and down,

The collecting unit,

The gas leak detection apparatus further comprises a collecting port for extending the upper portion, collecting the gas leaks due to breakage of the pneumatic valve on the upper portion.
The method of claim 3,

The wing is curved or bent, the gas leak detection apparatus characterized in that the elastic support to the pneumatic valve to the outer peripheral surface of the pneumatic valve with an elastic force and to close the collecting port in close contact with the discharge hole.
The method of claim 3,

The collection port is a gas leak detection device, characterized in that it is formed to have a long hole shape in the longitudinal direction of the wing.
The method of claim 3,

The collecting unit is a gas leakage detection device, characterized in that the peeling adhesive is applied to the outer peripheral surface of the collecting port is detachable to the outer peripheral surface of the pneumatic valve, but fixed tightly so that the gas does not leak.
A collecting part in which an indentation groove is indented on one side of the gas leaking due to breakage of the pneumatic valve and a discharge port through which the collecting gas is discharged;

An exhaust line having one end inserted into the inlet groove to exhaust the exhaust gas discharged to the discharge port of the collecting unit to the outside;

And a detector coupled to the other end of the exhaust line to detect a gas contained in exhaust air exhausted to the exhaust line.

The collecting part may include an extension part communicating with the discharge port and extending to the other side, and an end portion of the extension part inserted into a discharge hole through which gas leaks due to breakage of the pneumatic valve, and collecting the gas. Leak Detection Device.
The method of claim 8,

The pneumatic valve is formed with a plurality of discharge holes through which gas leaks,

The collecting unit,

A plurality of collecting holes to be inserted into each discharge hole is formed, to collect the gas leaks due to breakage of the pneumatic valve gas leak detection device.
The method of claim 8,

And a fixing member surrounding both outer surfaces of the pneumatic valve and having both ends coupled thereto, the fixing member tightly fixing the collecting unit inserted into the gaps formed by the coils to the pneumatic valve.
The method according to claim 3 or 8,

And a needle part protruding to be inserted into the discharge hole of the pneumatic valve so that the inlet of the collecting port is inserted into the discharge hole.
The method according to any one of claims 1, 2, 3 and 8,

It is provided in the middle of the exhaust line which is provided in each of the plurality of pneumatic valves to collect the gas collecting portion, and discharge or integrally discharge the leaked gas to the respective exhaust line by the control of the controller Port solenoid valves; And

And a controller configured to control whether the plurality of exhaust lines are discharged through the solenoid valve when the leaking gas is detected by the detecting unit.
The method of claim 12,

The controller transmits data including the type of leaking gas detected by the detection unit and the amount of detection of the leaking gas to the management server in real time,

The management server, the gas leakage detection device, characterized in that for receiving the data from the controller and outputting the graph to the manager.
The method of claim 12,

If the gas is detected in the detection unit, the controller detects the damaged pneumatic valve by controlling the port solenoid valve, the display unit for displaying the unique information of the identified pneumatic valve;

The unique information is a gas leak detection device, characterized in that each preset for a plurality of pneumatic valves.
The said detection part of any one of Claims 1, 2, 3, and 8,

Toxic gas detector for detecting the toxic gas leaking from the pneumatic valve for controlling the flow of toxic gas,

Gas leak detection system including an oxygen sensor for detecting the gas leaking from the pneumatic valve for controlling the flow of oxygen, nitrogen, argon gas.
The method of claim 15, wherein the detection unit,

An alarm unit including a first alarm unit generating an alarm when a toxic gas is detected through the toxic gas detector, and a second alarm unit generating an alarm when a gas is detected through the oxygen sensor; .