CN105576888A - Sealing apparatus applied to high power rapid phase shifter - Google Patents
Sealing apparatus applied to high power rapid phase shifter Download PDFInfo
- Publication number
- CN105576888A CN105576888A CN201511016594.6A CN201511016594A CN105576888A CN 105576888 A CN105576888 A CN 105576888A CN 201511016594 A CN201511016594 A CN 201511016594A CN 105576888 A CN105576888 A CN 105576888A
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- China
- Prior art keywords
- phase shifter
- connecting rod
- high power
- sealing device
- choke piston
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Classifications
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/162—Special parts or details relating to lubrication or cooling of the sealing itself
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/18—Phase-shifters
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Abstract
The invention relates to the technical field of a microwave instrument, and particularly to a sealing apparatus applied to a high power rapid phase shifter. The sealing apparatus comprises a driving assembly, a transmission assembly, a sealing assembly and a shell, wherein the bottom of the shell is connected with a waveguide tube of a dual-circular polarizer; the driving assembly is positioned on the top of the shell; the transmission assembly is positioned in the interior of the shell; the transmission assembly comprises a connecting rod; one end of the connecting rod is connected with the driving assembly while the other end of the connecting rod penetrates through the bottom of the shell to be connected with a choke piston to drive the choke piston to move under the drive of the driving assembly; and the sealing assembly is arranged on the outer side of the connecting rod and connected with the bottom of the shell so as to ensure air tightness of the connection between a middle choke piston and the dual-circular polarizer in the phase shifter when the choke piston moves. A high vacuum degree not lower than 10<-2>pa is formed in the high frequency rapid phase shifter formed by the choke piston and the circular waveguide on the top of the dual-circular polarizer, so that high air tightness can be ensured, high movement speed and high phase shifting precision can be realized, and the power capacity of the phase shifter is also greatly improved.
Description
Technical field
The present invention relates to microwave apparatus technical field, particularly relate to a kind of sealing device being applied to the quick phase shifter of high power.
Background technology
High-Power Microwave (High-PowerMicrowave is abbreviated as HPM) generally refers to that frequency is greater than in 300MHz to 300GHz, peak power the strong electromagnetic radiation that 100MW or average power be greater than 1MW.The main application of High-Power Microwave comprises: by electron cyclotron resonace mechanism to controlled thermonuclear plasma heating; For high power pulses radar, realize the target that fine-resolution under broad frequency band is detected and follows the tracks of; For transmitting energy between the earth and space, provide energy for spaceship is transmitted into conversion between space track or track; For high energy particle radio-frequency accelerator, carry out high-energy physics, nuclear physics scientific research and for fields such as HPM directed energy weapons.
Microwave phase shifter is a kind of common device in microwave, millimeter-wave technology field, and have a wide range of applications in multiple fields such as radar system, communication system and electronic warfare systems, the quality of microwave phase shifter performance can produce material impact to systematic function.The waveguide type phase shifter of conventional low power capacity comprises compressional wave conduction phase shifter and loaded medium rotary phase shifter etc., wherein, compressional wave conduction phase shifter is by opening longitudinal narrow slit at waveguide E face center line, thus can the E face size of contracting waveguide, and loaded medium rotary phase shifter being the medium by adding different length in waveguide, regulating the different phase shift constant of microwave by medium and realizing phase shift.In High-Power Microwave research field, because it has the feature of strong-electromagnetic field, high-power microwave phase shifter of the prior art adopts the Ferrite Materials such as yttrium iron garnet (YIG), by changing the amplitude of externally-applied magnetic field or electric field, change the propagation constant of Ferrite Material, thus realize the adjustment of phase place, but its power capacity is very limited.Load the compact phase shifter formed to type high power double-circle polarization device based on choke piston and there are the potentiality realizing high power, high phase shifting accuracy and high phase shift speed.And choke piston and double-circle polarization device top circular waveguide, demand fulfillment is in the well bubble-tight requirement realizing high movement velocity and high phase shifting accuracy of guarantee simultaneously.
Summary of the invention
(1) technical problem that will solve
The object of this invention is to provide a kind of choke piston and the double-circle polarization device top circular waveguide that can make existing high-power microwave phase shifter, meet at the well bubble-tight sealing regulating realizing high movement velocity and high phase shifting accuracy requirement of guarantee simultaneously.
(2) technical scheme
In order to solve the problems of the technologies described above, the invention provides a kind of sealing device being applied to the quick phase shifter of high power, comprise driven unit, transmission component, black box and shell, described outer casing bottom is connected with the waveguide of double-circle polarization device; Described driven unit is positioned at described cover top portion; Described transmission component is positioned at described enclosure, described transmission component comprises connecting rod, described connecting rod one end is connected with described driven unit, and the other end passes described outer casing bottom and is connected with choke piston, moves to drive described choke piston under the driving of described driven unit; Described black box is arranged at the outside of described connecting rod and is connected with described outer casing bottom, with the air-tightness ensureing that choke piston described in phase shifter is connected with described double-circle polarization device when described choke piston moves.
Wherein, described black box comprises dynamic seal and static seal, contact with described connecting rod inside described dynamic seal, contact with described outer casing bottom outside described dynamic seal, outside described static seal position and described dynamic seal, and in the first groove on the end face that is connected with described outer casing bottom of the waveguide being arranged at described double-circle polarization device.
Wherein, described dynamic seal comprises sealing clamp and vaccum seal ring, and multiple described vaccum seal ring is arranged between two described sealing clamps, is provided with position plate between adjacent two described vaccum seal rings.
Wherein, the shape of described vaccum seal ring is Y type, the end face of described vaccum seal ring is equipped with the second groove, and described second groove is built-in with vacuum grease; Described static seal is O-ring seal.
Wherein, described transmission component also comprises leading screw, feed screw nut and connecting plate, described leading screw one end is connected with described driven unit, the other end is connected with described outer casing bottom, and it is outside that described feed screw nut is sheathed on described leading screw, to axially move along described leading screw when described screw turns, described connecting plate one end is fixedly connected with described feed screw nut, described connecting rod and described leading screw be arranged in parallel, and one end is fixed on described connecting plate, the connection of the other end and described choke piston.
Wherein, described transmission component also comprises guide post, and the described connecting plate other end is provided with through hole, and described guide post be arranged in parallel through described through hole and described connecting rod, and described guide post two ends are individually fixed in described cover top portion and bottom.
Wherein, described leading screw two ends are equipped with high-speed bearing and are connected with described shell.
Wherein, described driven unit comprises servomotor, and described servomotor is connected with described leading screw by clutch.
Wherein, described driven unit also comprises servo drive controller, and described servo drive controller is connected with described servomotor.
Wherein, described outer casing bottom is bonding in vacuum plate.
(3) beneficial effect
Technique scheme tool of the present invention has the following advantages: sealing device of the present invention connects choke piston by transmission component, thus drive choke piston motion, be connected with double-circle polarization device and jointly form phase shifter, and black box is set in the position that connecting rod passes shell, make to be formed in phase shifter to be not less than 10
-2the condition of high vacuum degree of pa, the vacuum degree in phase shifter is improved to 10 from 1 atmospheric pressure
-2pa, means that phase shifter inner metal surfaces can bring up to 1MV/cm from 30kV/cm for the disruptive field intensity under short pulse High-Power Microwave, and the power capacity of phase shifter also improves more than 10
3doubly.Driven unit drives the connecting rod of transmission component to move, choke piston movement velocity is made to be not less than 30mm/0.1s, this is equivalent to the phase shifts that phase shifter can realize being not less than 360 ° in 0.15s, thus, make the quick phase shifter of high-frequency that choke piston and double-circle polarization device top circular waveguide form, meet ensure good bubble-tight while can realize the requirement of high movement velocity and high phase shifting accuracy, also greatly improve the power capacity of phase shifter.
The technical characteristic of the technical problem solved except the present invention described above, the technical scheme of formation and have the technical characteristic of these technical schemes to bring advantage except, the advantage that other technologies feature of the present invention and these technical characteristics bring, will further illustrate by reference to the accompanying drawings.
Accompanying drawing explanation
Fig. 1 is the structural representation that the embodiment of the present invention is applied to the sealing device of the quick phase shifter of high power;
Fig. 2 is the structural representation that the embodiment of the present invention is applied to the black box of the sealing device of the quick phase shifter of high power;
Fig. 3 is the high speed phase shift-time curve schematic diagram realized by the quick phase shifter of the high-frequency in the embodiment of the present invention.
In figure: 1: driven unit; 2: transmission component; 3: black box; 4: shell; 5: piston; 6: waveguide; 11: servomotor; 12: clutch; 21: leading screw; 22: connecting rod; 23: feed screw nut; 24: connecting plate; 25: guide post; 31: vaccum seal ring; 32: position plate; 33: sealing clamp; 34: ring seal circle; 41: bonding in vacuum plate; 61: the first grooves; 221: high-speed bearing; 311: the second grooves.
Embodiment
For making the object of the embodiment of the present invention, technical scheme and advantage clearly, below in conjunction with the accompanying drawing in the embodiment of the present invention, technical scheme in the embodiment of the present invention is clearly and completely described, obviously, described embodiment is a part of embodiment of the present invention, instead of whole embodiments.Based on the embodiment in the present invention, the every other embodiment that those of ordinary skill in the art obtain under the prerequisite not making creative work, all belongs to the scope of protection of the invention.
In describing the invention, it should be noted that, unless otherwise clearly defined and limited, term " installation ", " being connected ", " connection " should be interpreted broadly, and such as, can be fixedly connected with, also can be removably connect, or connect integratedly; Can be mechanical connection, also can be electrical connection; Can be directly be connected, also indirectly can be connected by intermediary, can be the connection of two element internals.For the ordinary skill in the art, concrete condition above-mentioned term concrete meaning in the present invention can be understood.
In addition, in describing the invention, except as otherwise noted, the implication of " multiple ", " many ", " many groups " is two or more, and the implication of " several ", " some ", " some groups " is one or more.
As shown in Figure 1, the sealing device of what the embodiment of the present invention provided the be applied to quick phase shifter of high power, comprises driven unit 1, transmission component 2, black box 3 and shell 4, is connected bottom shell 4 with the waveguide 6 of double-circle polarization device; Driven unit 1 is positioned at shell 4 top; It is inner that transmission component 2 is positioned at shell 4, and transmission component 2 comprises connecting rod 22, and connecting rod 22 one end is connected with driven unit 2, and connecting rod 22 other end passes bottom shell 4 and is connected with choke piston 5, moves to drive choke piston 5 under the driving of driven unit 1; Black box 3 is arranged at the outside of connecting rod 22 and is connected with bottom shell 4, with the air-tightness ensureing that in phase shifter, choke piston 5 is connected with double-circle polarization device 6 when choke piston 5 moves.
Sealing device of the present invention connects choke piston by transmission component, thus drives choke piston motion, is connected and jointly forms phase shifter, and arrange black box in the position that connecting rod passes shell with double-circle polarization device, makes formation in phase shifter be not less than 10
-2the condition of high vacuum degree of pa, the vacuum degree in phase shifter is improved to 10 from 1 atmospheric pressure
-2pa, means that phase shifter inner metal surfaces can bring up to 1MV/cm from 30kV/cm for the disruptive field intensity under short pulse High-Power Microwave, and the power capacity of phase shifter also improves more than 10
3doubly.As shown in Figure 3, driven unit drives the connecting rod of transmission component to move, choke piston movement velocity is made to be not less than 30mm/0.1s, this is equivalent to the phase shifts that phase shifter can realize being not less than 360 ° in 0.15s, thus, the quick phase shifter of high-frequency that choke piston and double-circle polarization device top circular waveguide are formed, meet ensure good bubble-tight while can realize the requirement of high movement velocity and high phase shifting accuracy, also greatly improve the power capacity of phase shifter.
Wherein, as shown in Figure 2, black box 2 comprises dynamic seal and static seal, contact with connecting rod 22 inside dynamic seal, contact outside dynamic seal with bottom shell 4, outside static seal position and dynamic seal, and static seal is arranged at the waveguide 6 of double-circle polarization device with in the first groove 61 on the end face be connected bottom shell 4.Dynamic seal ensures the air-tightness of connecting rod phase shifter when driving choke piston motion, makes phase shifter keep vacuum degree to be better than 10 at work
-2pa, choke piston moves back and forth in the waveguide of double-circle polarization device, and static seal ensures the good air-tightness of the outer casing bottom junction of double-circle polarization device and sealing device, maintains condition of high vacuum degree to make the space of choke piston.
Concrete, dynamic seal comprises sealing clamp 33 and vaccum seal ring 31, and multiple vaccum seal ring 31 is arranged between two sealing clamps 33, is provided with position plate 32 between adjacent two vaccum seal rings 31.Sealing clamp makes to fit tightly between vaccum seal ring and connecting rod to the certain precompression of the vaccum seal ring of Y type, ensures good sealing; Position plate ensures the stability of connecting rod motion.
Wherein, the shape of vaccum seal ring 31 is Y type, the end face of vaccum seal ring 31 is equipped with the second groove 311, second groove 311 and is built-in with vacuum grease; Static seal is O-ring seal 34.Form vacuum grease storage silo between the vaccum seal ring facing groove of position plate and sealing clamp and Y type, filled vacuum fat in vacuum grease storage silo, vacuum grease can reduce vaccum seal ring and the frictional force between position plate and sealing clamp improves sealing property simultaneously; Vacuum grease preferably uses lithium saponify, and it is effectively auxiliary raising movable sealing and static seal performance lubricating movements composition; Vaccum seal ring selects Y type polyurethane sealing ring.
Further, transmission component 2 also comprises leading screw 21, feed screw nut 23 and connecting plate 24, leading screw 21 one end is connected with driven unit 1, leading screw 21 other end is connected with bottom shell 4, and it is outside that feed screw nut 23 is sheathed on leading screw 21, with moving axially when leading screw 21 rotates along leading screw 21, connecting plate 24 one end is fixedly connected with feed screw nut 23, connecting rod 22 and leading screw 21 be arranged in parallel, and connecting rod 22 one end is fixed on connecting plate 24, the connection of connecting rod 22 other end and choke piston 5.Driven unit drives screw turns, feed screw nut inner surface engages with leading screw, be the rectilinear motion of feed screw nut by the convert rotational motion of leading screw, feed screw nut is by the motion of connecting plate control connection bar, make connecting rod follow feed screw nut to axially move, the precision of feed screw nut control connection bar motion is not less than 0.1mm simultaneously, this means that phase shifter phase shift resolution is about 1.5 °, higher than the phase shift resolution index of current most phase shifter, namely by improving the kinematic accuracy of choke piston, thus improve the phase shifting accuracy of phase shifter.
Wherein, transmission component 2 also comprises guide post 25, and connecting plate 24 other end is provided with through hole, and guide post 25 be arranged in parallel through through hole and connecting rod 24, and guide post 25 two ends are individually fixed in shell 4 top and bottom.Guide post is on the one hand for connecting plate does auxiliary guiding, ensure that connecting rod only does axial linear movement, ensure that connecting rod and choke piston are under the driving of driven unit, be in stability during high-speed motion state, screw turns torque can be offset according to guide post fixed position in the enclosure on the other hand, make driven unit drive leading screw to reach better rotating effect; Reduce vibration, improve whole phase shifter stationarity operationally.
In addition, leading screw 21 two ends are equipped with high-speed bearing 211 and are connected with shell 4.When high-speed bearing makes leading screw portion is arranged in the enclosure, the two ends of leading screw are suspended between retaining bearing, effectively can reduce friction, improve the stability of dynamic characteristic and rotation.
Wherein, driven unit 1 comprises servomotor 11, and servomotor 11 is connected with leading screw 21 by clutch 12.Driven unit 1 also comprises servo drive controller, and servo drive controller is connected with servomotor 11.Servomotor is fixedly installed in cover top portion by motor connected positioning plate, and servomotor is coordinated by clutch and high-speed bearing and is connected with leading screw, driving screw turns, and servomotor works operation under the control of servo drive controller and control software design.
Wherein, bottom shell 4 be bonding in vacuum plate 41.Outer casing bottom is bonding in vacuum plate, for being connected with the waveguide of double-circle polarization device, being isolated by the choke piston of the enclosure element of sealing device and phase shifter main body simultaneously, improve air-tightness and the condition of high vacuum degree of coupling part further with two compasses polarizer.
In sum, sealing device of the present invention connects choke piston by transmission component, thus drives choke piston motion, is connected jointly forms phase shifter with double-circle polarization device, and black box is set in the position that connecting rod passes shell, make to be formed in phase shifter to be not less than 10
-2the condition of high vacuum degree of pa, the vacuum degree in phase shifter is improved to 10 from 1 atmospheric pressure
-2pa, means that phase shifter inner metal surfaces can bring up to 1MV/cm from 30kV/cm for the disruptive field intensity under short pulse High-Power Microwave, and the power capacity of phase shifter also improves more than 10
3doubly.Driven unit drives the connecting rod of transmission component to move, choke piston movement velocity is made to be not less than 30mm/0.1s, this is equivalent to the phase shifts that phase shifter can realize being not less than 360 ° in 0.15s, thus, make the quick phase shifter of high-frequency that choke piston and double-circle polarization device top circular waveguide form, meet ensure good bubble-tight while can realize the requirement of high movement velocity and high phase shifting accuracy, also greatly improve the power capacity of phase shifter.
Last it is noted that above embodiment is only in order to illustrate technical scheme of the present invention, be not intended to limit; Although with reference to previous embodiment to invention has been detailed description, those of ordinary skill in the art is to be understood that: it still can be modified to the technical scheme described in foregoing embodiments, or carries out equivalent replacement to wherein portion of techniques feature; And these amendments or replacement, do not make the essence of appropriate technical solution depart from the spirit and scope of various embodiments of the present invention technical scheme.
Claims (10)
1. be applied to a sealing device for the quick phase shifter of high power, it is characterized in that: comprise driven unit, transmission component, black box and shell, described outer casing bottom is connected with the waveguide of double-circle polarization device; Described driven unit is positioned at described cover top portion; Described transmission component is positioned at described enclosure, described transmission component comprises connecting rod, described connecting rod one end is connected with described driven unit, and the other end passes described outer casing bottom and is connected with choke piston, moves to drive described choke piston under the driving of described driven unit; Described black box is arranged at the outside of described connecting rod and is connected with described outer casing bottom, with the air-tightness ensureing that choke piston described in phase shifter is connected with described double-circle polarization device when described choke piston moves.
2. the sealing device being applied to the quick phase shifter of high power according to claim 1, it is characterized in that: described black box comprises dynamic seal and static seal, contact with described connecting rod inside described dynamic seal, contact with described outer casing bottom outside described dynamic seal, outside described static seal position and described dynamic seal, and in the first groove on the end face that is connected with described outer casing bottom of the waveguide being arranged at described double-circle polarization device.
3. the sealing device being applied to the quick phase shifter of high power according to claim 2, it is characterized in that: described dynamic seal comprises sealing clamp and vaccum seal ring, multiple described vaccum seal ring is arranged between two described sealing clamps, is provided with position plate between adjacent two described vaccum seal rings.
4. the sealing device being applied to the quick phase shifter of high power according to claim 3, is characterized in that: the shape of described vaccum seal ring is Y type, the end face of described vaccum seal ring is equipped with the second groove, and described second groove is built-in with vacuum grease; Described static seal is O-ring seal.
5. the sealing device being applied to the quick phase shifter of high power according to claim 1-4 any one, it is characterized in that: described transmission component also comprises leading screw, feed screw nut and connecting plate, described leading screw one end is connected with described driven unit, the other end is connected with described outer casing bottom, it is outside that described feed screw nut is sheathed on described leading screw, to axially move along described leading screw when described screw turns, described connecting plate one end is fixedly connected with described feed screw nut, described connecting rod and described leading screw be arranged in parallel, and one end is fixed on described connecting plate, the connection of the other end and described choke piston.
6. the sealing device being applied to the quick phase shifter of high power according to claim 5, it is characterized in that: described transmission component also comprises guide post, the described connecting plate other end is provided with through hole, described guide post be arranged in parallel through described through hole and described connecting rod, and described guide post two ends are individually fixed in described cover top portion and bottom.
7. the sealing device being applied to the quick phase shifter of high power according to claim 6, is characterized in that: described leading screw two ends are equipped with high-speed bearing and are connected with described shell.
8. the sealing device being applied to the quick phase shifter of high power according to claim 7, it is characterized in that: described driven unit comprises servomotor, described servomotor is connected with described leading screw by clutch.
9. the sealing device being applied to the quick phase shifter of high power according to claim 8, it is characterized in that: described driven unit also comprises servo drive controller, described servo drive controller is connected with described servomotor.
10. the sealing device being applied to the quick phase shifter of high power according to claim 9, is characterized in that: described outer casing bottom is bonding in vacuum plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511016594.6A CN105576888B (en) | 2015-12-29 | 2015-12-29 | A kind of sealing device applied to the quick phase shifter of high power |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201511016594.6A CN105576888B (en) | 2015-12-29 | 2015-12-29 | A kind of sealing device applied to the quick phase shifter of high power |
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| Publication Number | Publication Date |
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| CN105576888A true CN105576888A (en) | 2016-05-11 |
| CN105576888B CN105576888B (en) | 2018-04-03 |
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| CN201511016594.6A Active CN105576888B (en) | 2015-12-29 | 2015-12-29 | A kind of sealing device applied to the quick phase shifter of high power |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444834A (en) * | 2018-10-23 | 2019-03-08 | 北京无线电测量研究所 | A kind of circular polarizer assembly test method for reciprocal ferrite phase shifter |
| CN110319166A (en) * | 2019-07-27 | 2019-10-11 | 绍兴市上虞荣达实业有限公司 | A kind of pusher structure |
| CN116826328A (en) * | 2023-06-21 | 2023-09-29 | 西南交通大学 | Drive and control protection component and waveguide phase shifter |
| CN118091264A (en) * | 2024-04-23 | 2024-05-28 | 西南科技大学 | Unmanned aerial vehicle antenna phase shifter verification test device |
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| US5013997A (en) * | 1990-01-02 | 1991-05-07 | General Electric Company | Liquid cooled, high power, ferrite phase shifter for phased array antennas |
| CN201174411Y (en) * | 2008-04-01 | 2008-12-31 | 京信通信系统（中国）有限公司 | Composite phase shifter |
| CN201226369Y (en) * | 2008-06-27 | 2009-04-22 | 山东新华医疗器械股份有限公司 | Microwave transmission phase shifter |
| CN201741774U (en) * | 2010-07-12 | 2011-02-09 | 山东新华医疗器械股份有限公司 | Microwave transmission phase shifter |
| JP2015079677A (en) * | 2013-10-17 | 2015-04-23 | 東京エレクトロン株式会社 | Microwave plasma processing device and microwave supply method |
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| US5013997A (en) * | 1990-01-02 | 1991-05-07 | General Electric Company | Liquid cooled, high power, ferrite phase shifter for phased array antennas |
| CN201174411Y (en) * | 2008-04-01 | 2008-12-31 | 京信通信系统（中国）有限公司 | Composite phase shifter |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109444834A (en) * | 2018-10-23 | 2019-03-08 | 北京无线电测量研究所 | A kind of circular polarizer assembly test method for reciprocal ferrite phase shifter |
| CN110319166A (en) * | 2019-07-27 | 2019-10-11 | 绍兴市上虞荣达实业有限公司 | A kind of pusher structure |
| CN116826328A (en) * | 2023-06-21 | 2023-09-29 | 西南交通大学 | Drive and control protection component and waveguide phase shifter |
| CN116826328B (en) * | 2023-06-21 | 2024-08-27 | 西南交通大学 | Drive and control protection component and waveguide phase shifter |
| CN118091264A (en) * | 2024-04-23 | 2024-05-28 | 西南科技大学 | Unmanned aerial vehicle antenna phase shifter verification test device |
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| Publication number | Publication date |
|---|---|
| CN105576888B (en) | 2018-04-03 |
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