CN210600185U - High-vacuum dynamic seal compound motion feed-in device - Google Patents
High-vacuum dynamic seal compound motion feed-in device Download PDFInfo
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- CN210600185U CN210600185U CN201921761332.6U CN201921761332U CN210600185U CN 210600185 U CN210600185 U CN 210600185U CN 201921761332 U CN201921761332 U CN 201921761332U CN 210600185 U CN210600185 U CN 210600185U
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Abstract
The utility model belongs to the technical field of the vacuum dynamic seal, specifically be a high vacuum dynamic seal compound motion feed-in device. The device mainly comprises a magnetic fluid, a bellows component, a guide rail sliding block component and a supporting part. The guide rail assembly is arranged on the outer sides of the magnetic fluid and the corrugated pipe assembly, the magnetic fluid is arranged on the top of the corrugated pipe assembly in a sealing mode, and the vacuum flange interface is arranged on one side of the bottom of the corrugated pipe assembly. The magnetofluid input shaft is connected with an external rotating motor, and the rotating motor works to drive the magnetofluid seal to realize rotary motion feed-in vacuum; the slider is driven by an external driving motor to realize linear reciprocating motion on the guide rail, and the slider is fixedly connected with the corrugated pipe assembly to realize the feed-in of the linear motion. The top connecting flange of the corrugated pipe assembly is connected with the magnetic fluid sealing flange in a sealing manner, the bottom flange is connected with the vacuum interface flange in a sealing manner, and the seals are sealed by oxygen-free copper sealing rings, so that the linear and rotary combined motion can be fed into the vacuum system under the condition of ensuring the vacuum degree of the device during working.
Description
Technical Field
The utility model relates to a vacuum dynamic seal device technical field specifically is a high vacuum dynamic seal compound motion feed-in device.
Background
Vacuum means a gas state lower than one atmosphere pressure in a given space, and is a physical phenomenon, and can be divided into different grades such as low vacuum, medium vacuum, high vacuum, ultrahigh vacuum, and ultrahigh vacuum according to the gas pressure. With the development of science and technology, vacuum technology and application are more and more extensive, and the vacuum technology covers various fields such as industry, civil use, scientific research, military industry and the like. Some of the processes utilize vacuum environment to realize the fabrication of some process links, such as coating, drying, plasma cleaning, 3D printing, etc. Some of them are manufactured by directly using vacuum, such as vacuum devices, high energy particle accelerators, etc.
The key in vacuum technology is vacuum acquisition and maintenance. Generally, the vacuum obtaining and maintaining are mainly determined by two aspects, namely, the air pumping capacity of the vacuum system is mainly completed by various vacuum pumps, and the system gas is exhausted; on the other hand, the vacuum sealing of the system ensures that the gas quantity entering the vacuum system from the outside atmosphere is small enough, namely the vacuum leakage rate meets certain requirements. Vacuum seals can be classified into static seals and dynamic seals depending on whether there is motion between the connections. The vacuum dynamic seal not only meets the requirement of a certain vacuum leakage rate, but also has the requirements of sufficient strength, service life, sealing reliability, reasonable overall dimension and the like.
At present, the vacuum dynamic seal which is commonly adopted in China mainly comprises components such as a rubber ring dynamic seal, a corrugated pipe dynamic seal structure, a magnetic transmission dynamic seal, a magnetic fluid vacuum dynamic seal and the like. The temperature is limited by the physical and mechanical properties of the rubber itself and by the gas permeability, and is generally only suitable for 10-5Vacuum dynamic sealing under Pa; the bellows seal transmission mechanism is widely used in ultra-high vacuum due to the characteristics of reliable sealing, baking resistance and the like, and generally mainly performs transmission sealing of linear motion in the high-precision axis direction; the magnetic driving dynamic sealing device which utilizes magnetic force to carry out torque transmission is not suitable for heavy-load transmission, and the transmission precision is difficult to ensure under special conditions such as high temperature and the like;the magnetic fluid sealing technology has the advantages of no solid friction, no mechanical abrasion, high rotating speed transmission, rigid shaft transmission and high precision and large torque transmission. The utility model discloses combine the advantage of various different vacuum dynamic seals, provide a device that is used for vacuum system combined motion feed-in.
SUMMERY OF THE UTILITY MODEL
This section is for the purpose of summarizing some aspects of embodiments of the invention and to briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and in the abstract of the specification and the title of the application to avoid obscuring the purpose of this section, the abstract of the specification and the title of the application, and such simplifications or omissions are not intended to limit the scope of the invention.
The present invention has been made in view of the above and/or other problems associated with the prior art compound motion feedthroughs for vacuum apparatus.
Therefore, the utility model aims at providing a high vacuum dynamic seal combined movement feed-in device can solve the existing problems such as transmission precision, load, reliability of dynamic seal when current vacuum apparatus combined movement is fed in.
A high vacuum dynamic seal compound motion feedthrough comprising: the magnetic fluid, the guide rail assembly, the corrugated pipe assembly, the sealing piece and the vacuum system interface are arranged, the guide rail assembly is arranged on the outer side of the magnetic fluid and the outer side of the corrugated pipe assembly, the vacuum system interface is arranged at the bottom of the corrugated pipe assembly, and the vacuum system interface is connected with the corrugated pipe assembly in a sealing mode.
As a preferred scheme of the high vacuum dynamic seal compound motion feed-in device of the present invention, wherein: the magnetic fluid comprises an input shaft and an output shaft, and a standard vacuum CF flange is arranged at the end part of the magnetic fluid.
As a preferred scheme of the high vacuum dynamic seal compound motion feed-in device of the present invention, wherein: the corrugated pipe assembly comprises a top connecting flange and a bottom connecting flange, the top of the outer side wall of the corrugated pipe assembly is provided with the top connecting flange, and the bottom connecting flange is fixedly connected to the bottom of the corrugated pipe assembly.
As a preferred scheme of the high vacuum dynamic seal compound motion feed-in device of the present invention, wherein: the guide rail assembly comprises a connecting plate and a guide rail sliding block, the connecting plate is arranged on the outer side wall of the top connecting flange, the other side of the connecting plate is fixedly connected with the guide rail sliding block, the guide rail assembly further comprises a guide rail fixing plate and a guide rail, the guide rail fixing plate is fixedly connected with the outer side wall of the bottom connecting flange, the guide rail fixing plate is arranged on the inner side of the guide rail, the guide rail is slidably connected with the guide rail sliding block, and the two end parts of the guide rail are.
As a preferred scheme of the high vacuum dynamic seal compound motion feed-in device of the present invention, wherein: the sealing element comprises a first oxygen-free copper sealing ring and a second oxygen-free copper sealing ring, the top connecting flange is connected with the end part of the magnetic fluid in a sealing mode, the top connecting flange and the end part sealing face of the magnetic fluid are sealed through the first oxygen-free copper sealing ring, the bottom connecting flange is connected with the vacuum system interface through a standard vacuum CF flange, and meanwhile the second oxygen-free copper sealing ring is used for vacuum sealing.
Compared with the prior art: the rotary motor works to drive the magnetic fluid seal to realize rotary motion feed-in vacuum; the slider is driven by an external driving motor to realize linear reciprocating motion on the guide rail, and the slider is fixedly connected with the corrugated pipe assembly to realize the feed-in of the linear motion. The top connecting flange of the corrugated pipe assembly is hermetically connected with the magnetic fluid sealing flange, the bottom flange of the corrugated pipe assembly is hermetically connected with the vacuum interface flange, and the seals are sealed by oxygen-free copper sealing rings, so that the linear and rotary combined motion can be fed into a vacuum system under the condition of ensuring the vacuum degree of the device during working. The metal welding bellows component has very high tensile compression life, the magnetic fluid seal has very good rotary sealing performance and life, the oxygen-free copper seal ring has the characteristic of high temperature resistance, and the use of an external precise guide rail ensures that the whole composite motion feed-in device has the characteristics of high rotating speed, large stroke, temperature resistance, small vacuum leakage rate and long life, and the whole device works reliably and stably and can meet the use in high vacuum and even ultrahigh vacuum environment.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail with reference to the accompanying drawings and detailed embodiments, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without inventive labor. Wherein:
fig. 1 is a schematic view of the overall structure of the present invention.
Detailed Description
In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be implemented in other ways than those specifically described herein, and one skilled in the art may similarly generalize the present invention without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Next, the present invention will be described in detail with reference to the schematic drawings, and in the detailed description of the embodiments of the present invention, for convenience of explanation, the sectional view showing the device structure will not be enlarged partially according to the general scale, and the schematic drawings are only examples, and should not limit the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
In order to make the objects, technical solutions and advantages of the present invention clearer, embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
The utility model provides a high vacuum dynamic seal combined motion feed-in device can realize the linear motion transmission through bellows subassembly, simultaneously, top flange and magnetic fluid tip sealing connection, and top flange adopts oxygen-free copper sealing washer one with the sealed face of magnetic fluid tip to seal, has ensured the device during operation vacuum, please refer to fig. 1, include, magnetic fluid 100, guide rail assembly 200, bellows subassembly 300, sealing member 400 and vacuum system interface 500.
Referring to fig. 1, the magnetic fluid 100 has an input shaft 110 and an output shaft 120, and specifically, the magnetic fluid sealing technology is developed on the basis of magnetic fluid, when the magnetic fluid is injected into a gap of a magnetic field, the magnetic fluid can fill the whole gap to form an O-shaped sealing ring of liquid, the magnetic fluid 100 is used for transmitting rotary motion to a sealed container, the magnetic fluid seal has no solid friction and no mechanical wear, can realize high-speed transmission, can adopt rigid shaft transmission, has the characteristics of high precision and large torque transmission, and is commonly used for vacuum sealing, a standard CF vacuum flange is arranged at the end of the magnetic fluid 100, the input shaft 110 is integrally formed at the top of the outer side wall of the magnetic fluid 100, the input shaft 110 is used for connecting with an external power mechanism, the output shaft 120 is integrally formed at the output end of the magnetic fluid 100, and the output;
referring to fig. 1, the guide rail assembly 200 includes a connection plate 210 and a guide rail slider 220, specifically, the connection plate 210 is fixedly connected to an outer side wall of a top flange of the bellows assembly 300, the connection plate 210 is used to connect the top connection flange 310 and the guide rail slider 220, an outer side wall of the connection plate 210 is in threaded connection with the guide rail slider 220 through a screw, the guide rail slider 220 is used to be slidably connected with the guide rail 240, the guide rail slider 220 is used to be connected with an external driving motor, the guide rail assembly 200 further includes a guide rail fixing plate 230 and a guide rail 240, a bottom of a left side wall of the guide rail fixing plate 230 is welded to an outer side wall of the bottom connection flange 320, the guide rail fixing plate 320 is used to fix the guide rail 240;
referring to fig. 1, the bellows assembly 300 has a top connection flange 310 and a bottom connection flange 320, specifically, the bellows assembly 300 is a vacuum sealing product with a stretching and compressing function, and has the advantages of pressure resistance, temperature resistance, small vacuum leakage rate, long service life, and the like, the sealing and displacement compensation in the linear motion process are realized by the bellows assembly 300, the top end of the bellows assembly 300 is welded with the connection flange 310, the connection flange 310 is used for connecting the magnetic fluid 100, the bottom connection flange 320 is welded at the bottom end of the bellows assembly 300, and the bottom connection flange 320 is used for connecting the vacuum system interface 500;
referring to fig. 1, the sealing element 400 is mainly composed of a first oxygen-free copper sealing ring 410 and a second oxygen-free copper sealing ring 420, which are specifically as follows: the top connecting flange 310 is connected with the end part of the magnetic fluid 100 in a sealing mode, an oxygen-free copper sealing ring I410 is used for vacuum sealing, the bottom connecting flange 320 is connected with the vacuum system interface 500 in a sealing mode through a standard CF vacuum flange, and an oxygen-free copper sealing ring II 420 is used for vacuum sealing, so that the overall sealing performance of the equipment is guaranteed, and the vacuum of the device during working is guaranteed;
with continued reference to fig. 1, the vacuum system interface 500 is connected to the bottom connecting flange 320 using a standard CF vacuum flange, and the vacuum system interface 500 is used to connect to a vacuum system structure.
The working principle is as follows: when the utility model is used, the input shaft 120 is connected with an external rotating motor, and the rotating motor works, so that the magnetic fluid 100 is driven to complete the rotating motion and feed vacuum; the linear reciprocating motion is driven by an external driving motor in cooperation with the guide rail slider 220 and the guide rail 240, and the linear motion transmission feeding vacuum can be realized through the extension and contraction of the corrugated pipe assembly 300; the top connecting flange 310 is connected with the end part of the magnetic fluid 100 in a sealing way, the bottom connecting flange 320 is connected with the vacuum system interface 500 by adopting a standard CF vacuum flange, and all connections are vacuum-sealed by adopting an oxygen-free copper sealing ring 400, so that the whole sealing performance of the equipment can be ensured, and the device is ensured to feed in compound motion into vacuum during working; the bellows assembly 300 is flange-sealed with the magnetic fluid 100 at the top, ensuring that the feeding in linear motion and the feeding in rotary motion are performed synchronously without mutual interference, and feeding the composite motion into the vacuum system. During operation, an operator can design an industrial control system of the device according to the requirement of the system on compound motion feed-in, respectively control the rotary motion motor and the linear motion motor, and complete a mode of feed-in compound motion by using a program, such as: the vacuum feeding device comprises a first rotating and a second linear motion, a first linear and a second rotating motion, or a linear and rotating synchronous motion, and can control the rotating speed, the angle, the speed, the stroke, the motion period and the like through a program so as to meet the requirement of feeding in the rotating and linear compound motion of the vacuum equipment.
While the invention has been described above with reference to an embodiment, various modifications may be made and equivalents may be substituted for elements thereof without departing from the scope of the invention. In particular, as long as there is no structural conflict, the various features of the disclosed embodiments of the present invention can be used in any combination with each other, and the non-exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, it is intended that the invention not be limited to the particular embodiments disclosed, but that the invention will include all embodiments falling within the scope of the appended claims.
Claims (5)
1. A high vacuum dynamic seal compound motion feedthrough comprising: the magnetic fluid sealing device comprises a magnetic fluid (100), a guide rail assembly (200), a bellows assembly (300), a sealing piece (400) and a vacuum system interface (500), wherein the guide rail assembly (200) is arranged on the outer side of the magnetic fluid (100) and the bellows assembly (300), the vacuum system interface (500) is arranged at the bottom of the bellows assembly (300), and the vacuum system interface (500) is connected with the bellows assembly (300) in a sealing mode.
2. A high vacuum dynamic seal compound motion feed-in device according to claim 1, characterized in that the magnetic fluid (100) comprises an input shaft (110) and an output shaft (120), the end of the magnetic fluid (100) is provided with a standard vacuum CF flange.
3. The high vacuum dynamic seal compound motion feed-in apparatus of claim 1, wherein the bellows assembly (300) comprises a top connecting flange (310) and a bottom connecting flange (320), the top connecting flange (310) is disposed on the top of the outer sidewall of the bellows assembly (300), and the bottom connecting flange (320) is fixed to the bottom of the bellows assembly (300).
4. The high-vacuum dynamic-seal compound motion feed-in device of claim 3, wherein the guide rail assembly (200) comprises a connecting plate (210) and a guide rail slider (220), the connecting plate (210) is disposed on the outer side wall of the top connecting flange (310), the other side of the connecting plate (210) is fixedly connected to the guide rail slider (220), the guide rail assembly (200) further comprises a guide rail fixing plate (230) and a guide rail (240), the guide rail fixing plate (230) is fixedly connected to the outer side wall of the bottom connecting flange (320), the guide rail (240) is disposed on the inner side of the guide rail fixing plate (230), the guide rail (240) is slidably connected to the guide rail slider (220), and two end portions of the guide rail (240) are provided with a limiting block.
5. The high vacuum dynamic seal compound motion feed-in device of claim 4, wherein the sealing member (400) comprises a first oxygen-free copper seal (410) and a second oxygen-free copper seal (420), the top connecting flange (310) is connected with the end of the magnetic fluid (100) in a sealing manner, the sealing surface of the top connecting flange (310) and the end of the magnetic fluid (100) is sealed by the first oxygen-free copper seal (410), the bottom connecting flange (320) and the vacuum system interface (500) are connected by a standard vacuum CF flange, and the second oxygen-free copper seal (420) is used for vacuum sealing.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921761332.6U CN210600185U (en) | 2019-10-21 | 2019-10-21 | High-vacuum dynamic seal compound motion feed-in device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201921761332.6U CN210600185U (en) | 2019-10-21 | 2019-10-21 | High-vacuum dynamic seal compound motion feed-in device |
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| CN210600185U true CN210600185U (en) | 2020-05-22 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112762098A (en) * | 2021-01-21 | 2021-05-07 | 珞石（北京）科技有限公司 | Non-contact sealing system for moving shaft and industrial robot |
| CN114076197A (en) * | 2022-01-19 | 2022-02-22 | 江苏邑文微电子科技有限公司 | Vacuum sealing rotary lifting system and semiconductor equipment |
| CN114321390A (en) * | 2021-12-14 | 2022-04-12 | 北京航星机器制造有限公司 | Vacuum chamber dynamic sealing structure for high-temperature forming equipment |
| WO2022177780A1 (en) * | 2021-02-22 | 2022-08-25 | Kla Corporation | A vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing |
-
2019
- 2019-10-21 CN CN201921761332.6U patent/CN210600185U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112762098A (en) * | 2021-01-21 | 2021-05-07 | 珞石（北京）科技有限公司 | Non-contact sealing system for moving shaft and industrial robot |
| WO2022177780A1 (en) * | 2021-02-22 | 2022-08-25 | Kla Corporation | A vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing |
| US12044701B2 (en) | 2021-02-22 | 2024-07-23 | Kla Corporation | Vertical convolute metal bellows for rotary motion, vacuum sealing, and pressure sealing |
| CN114321390A (en) * | 2021-12-14 | 2022-04-12 | 北京航星机器制造有限公司 | Vacuum chamber dynamic sealing structure for high-temperature forming equipment |
| CN114321390B (en) * | 2021-12-14 | 2024-04-05 | 北京航星机器制造有限公司 | Vacuum chamber dynamic seal structure for high-temperature forming equipment |
| CN114076197A (en) * | 2022-01-19 | 2022-02-22 | 江苏邑文微电子科技有限公司 | Vacuum sealing rotary lifting system and semiconductor equipment |
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