CN105576888B - A kind of sealing device applied to the quick phase shifter of high power - Google Patents
A kind of sealing device applied to the quick phase shifter of high power Download PDFInfo
- Publication number
- CN105576888B CN105576888B CN201511016594.6A CN201511016594A CN105576888B CN 105576888 B CN105576888 B CN 105576888B CN 201511016594 A CN201511016594 A CN 201511016594A CN 105576888 B CN105576888 B CN 105576888B
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- China
- Prior art keywords
- phase shifter
- seal
- sealing device
- connecting rod
- leading screw
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
- H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/162—Special parts or details relating to lubrication or cooling of the sealing itself
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/18—Phase-shifters
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Waveguide Switches, Polarizers, And Phase Shifters (AREA)
Abstract
The present invention relates to microwave apparatus technical field, more particularly to a kind of sealing device applied to the quick phase shifter of high power, including drive component, transmission component, seal assembly and shell, outer casing bottom to be connected with the waveguide of double-circle polarization device;Drive component is located at cover top portion;Transmission component is located at enclosure, and transmission component includes connecting rod, and connecting rod one end is connected with drive component, and the other end passes outer casing bottom and is connected with choke piston, to drive choke piston movement under the driving of drive component;Seal assembly is arranged at the outside of connecting rod and is connected with outer casing bottom, to ensure air-tightness that the middle choke piston of the phase shifter when choke piston moves is connected with double-circle polarization device.Choke piston is set to be not less than 10 with being formed at the top of double-circle polarization device in the quick phase shifter of high-frequency of circular waveguide composition‑2Pa condition of high vacuum degree, meet the requirement that high movement velocity and high phase shifting accuracy can be realized while good air-tightness is ensured, also greatly improve the power capacity of phase shifter.
Description
Technical field
The present invention relates to microwave apparatus technical field, more particularly to a kind of sealing applied to the quick phase shifter of high power to fill
Put.
Background technology
High-Power Microwave (High-Power Microwave, be abbreviated as HPM) generally refers to frequency and arrived in 300MHz
300GHz, peak power are more than 100MW or mean power is more than 1MW strong electromagnetic radiation.The main application bag of High-Power Microwave
Include:By electron cyclotron resonace mechanism to controlled thermonuclear plasma heating;For high power pulses radar, wider frequency is realized
With the target that lower fine-resolution is detected and tracks;The transmission energy between the earth and space, space is transmitted into for spaceship
Conversion provides energy between track or track;For high energy particle radio-frequency accelerator, high-energy physics is carried out, nuclear physics science is ground
Study carefully and for fields such as HPM directed energy weapons.
Microwave phase shifter is a kind of common device in microwave, millimeter-wave technology field, radar system, communication system and
The multiple fields such as electronic warfare system have a wide range of applications, and the quality of microwave phase shifter performance can be important to systematic function generation
Influence.The waveguide type phase shifter of conventional low power capacity includes compressional wave conduction phase shifter and loaded medium rotary phase shifter
Deng, wherein, compressional wave conduction phase shifter is by opening longitudinal narrow slit in waveguide E face center line, so as to the E faces chi of contracting waveguide
It is very little, and loaded medium rotary phase shifter is the medium by adding different length in waveguide, and microwave is adjusted not by medium
Phase shift is realized with phase shift constant.In High-Power Microwave research field, because it has the characteristics of strong-electromagnetic field, in the prior art
High-power microwave phase shifter be using the Ferrite Material such as yttrium iron garnet (YIG), by changing externally-applied magnetic field or electric field
Amplitude, change the propagation constant of Ferrite Material, so as to realize the regulation of phase, but its power capacity is very limited.It is based on
Choke piston load it is compact to type high power double-circle polarization device formed phase shifter have realize high power, high phase shifting accuracy and height
The potentiality of phase shift speed.And circular waveguide is, it is necessary to meet ensureing the same of good air-tightness at the top of choke piston and double-circle polarization device
The requirement of the high movement velocitys of Shi Shixian and high phase shifting accuracy.
The content of the invention
(1) technical problems to be solved
It is an object of the invention to provide a kind of choke piston that can make existing high-power microwave phase shifter and double entelechies
Change circular waveguide at the top of device, meet the sealing that high movement velocity and high phase shifting accuracy requirement are realized while good air-tightness is ensured
Adjusting means.
(2) technical scheme
In order to solve the above-mentioned technical problem, the invention provides a kind of sealing dress applied to the quick phase shifter of high power
Put, including drive component, transmission component, seal assembly and shell, the outer casing bottom are connected with the waveguide of double-circle polarization device;
The drive component is located at the cover top portion;The transmission component is located at the enclosure, and the transmission component includes connecting
Extension bar, described connecting rod one end are connected with the drive component, and the other end passes the outer casing bottom and is connected with choke piston, with
The choke piston is driven to move under the driving of the drive component;The seal assembly is arranged at the outside of the connecting rod
And be connected with the outer casing bottom, with ensure when the choke piston moves choke piston described in phase shifter with it is described double
The air-tightness of circular polarizer connection.
Wherein, the seal assembly includes dynamic seal and static seal, the dynamic seal inner side and the connecting rod
Contact, the dynamic seal outside contact with the outer casing bottom, the static seal position and dynamic seal outside, and set
It is placed in the first groove on the end face that the waveguide of the double-circle polarization device is connected with the outer casing bottom.
Wherein, the dynamic seal includes sealing clamp and vaccum seal ring, and multiple vaccum seal rings are arranged at two
Between the individual sealing clamp, position plate is provided between the two neighboring vaccum seal ring.
Wherein, the vaccum seal ring is shaped as Y types, and the second groove is equipped with the end face of the vaccum seal ring,
Second groove is built-in with vacuum grease;The static seal is O-ring seal.
Wherein, the transmission component also includes leading screw, feed screw nut and connecting plate, described leading screw one end and the driving group
Part is connected, and the other end is connected with the outer casing bottom, and the feed screw nut is sheathed on outside the leading screw, to turn in the leading screw
Axially moved when dynamic along the leading screw, described connecting plate one end is fixedly connected with the feed screw nut, the connecting rod and institute
State leading screw to be arranged in parallel, and one end is fixed on the connecting plate, the connection of the other end and the choke piston.
Wherein, the transmission component also includes guide rod, and the connecting plate other end is provided with through hole, and the guide rod passes through
The through hole be arranged in parallel with the connecting rod, and the guide rod both ends are individually fixed in the cover top portion and bottom.
Wherein, the leading screw both ends are equipped with high-speed bearing and the cage connection.
Wherein, the drive component includes servomotor, and the servomotor is connected by clutch with the leading screw.
Wherein, the drive component also includes servo drive controller, the servo drive controller and servo electricity
Machine connects.
Wherein, the outer casing bottom is bonding in vacuum plate.
(3) beneficial effect
The above-mentioned technical proposal of the present invention has the following advantages that:The sealing device of the present invention connects chokes by transmission component
Piston, so as to drive choke piston to move, it is connected with double-circle polarization device and collectively constitutes phase shifter, and shell is passed in connecting rod
Position sets seal assembly, makes to be formed not less than 10 in phase shifter-2Pa condition of high vacuum degree, the vacuum in phase shifter are big from 1
Air pressure is improved to 10-2Pa, it is meant that phase shifter inner metal surfaces can be with for the disruptive field intensity under short pulse High-Power Microwave
1MV/cm is brought up to from 30kV/cm, the power capacity of phase shifter is also improved more than 103Times.Drive component driving transmission component
Connecting rod moves, and choke piston movement velocity is not less than 30mm/0.1s, this can be realized equivalent to phase shifter in 0.15s
Phase shift not less than 360 °, thus, the high-frequency of choke piston and circular waveguide composition at the top of double-circle polarization device is set quickly to move
Phase device, meet the requirement that high movement velocity and high phase shifting accuracy can be realized while good air-tightness is ensured, also greatly
Improve the power capacity of phase shifter.
Except it is described above present invention solves the technical problem that, form technical scheme technical characteristic and have this
Outside advantage caused by the technical characteristic of a little technical schemes, what other technical characteristics of the invention and these technical characteristics were brought
Advantage, it will be further illustrated with reference to accompanying drawing.
Brief description of the drawings
Fig. 1 is the structural representation for the sealing device that the embodiment of the present invention is applied to the quick phase shifter of high power;
Fig. 2 is the structural representation of the seal assembly for the sealing device that the embodiment of the present invention is applied to the quick phase shifter of high power
Figure;
Fig. 3 is the high speed phase shift-time curve realized by the quick phase shifter of high-frequency in the embodiment of the present invention
Schematic diagram.
In figure:1:Drive component;2:Transmission component;3:Seal assembly;4:Shell;5:Piston;6:Waveguide;11:Servo
Motor;12:Clutch;21:Leading screw;22:Connecting rod;23:Feed screw nut;24:Connecting plate;25:Guide rod;31:Vacuum sealing
Circle;32:Position plate;33:Sealing clamp;34:Ring seal circle;41:Bonding in vacuum plate;61:First groove;221:High speed shaft
Hold;311:Second groove.
Embodiment
To make the purpose, technical scheme and advantage of the embodiment of the present invention clearer, below in conjunction with the embodiment of the present invention
In accompanying drawing, the technical scheme in the embodiment of the present invention is clearly and completely described, it is clear that described embodiment is
The part of the embodiment of the present invention, rather than whole embodiments.Based on the embodiment in the present invention, ordinary skill people
The every other embodiment that member is obtained on the premise of creative work is not made, belongs to the scope of protection of the invention.
In the description of the invention, it is necessary to illustrate, unless otherwise clearly defined and limited, term " installation ", " phase
Even ", " connection " should be interpreted broadly, for example, it may be being fixedly connected or being detachably connected, or be integrally connected;Can
To be mechanical connection or electrical connection;Can be joined directly together, can also be indirectly connected by intermediary, Ke Yishi
The connection of two element internals.For the ordinary skill in the art, with concrete condition above-mentioned term can be understood at this
Concrete meaning in invention.
In addition, in the description of the invention, unless otherwise indicated, " multiple ", " more ", " multigroup " be meant that two or
Two or more, " several ", " some ", " some groups " are meant that one or more.
As shown in figure 1, the sealing device provided in an embodiment of the present invention applied to the quick phase shifter of high power, including driving
Component 1, transmission component 2, seal assembly 3 and shell 4, the bottom of shell 4 are connected with the waveguide 6 of double-circle polarization device;Drive component 1
Positioned at the top of shell 4;Transmission component 2 is located inside shell 4, and transmission component 2 includes connecting rod 22, the one end of connecting rod 22 and driving
Component 2 connects, and the other end of connecting rod 22 passes the bottom of shell 4 and is connected with choke piston 5, with the driving lower band of drive component 1
Dynamic choke piston 5 moves;Seal assembly 3 is arranged at the outside of connecting rod 22 and is connected with the bottom of shell 4, to ensure to live in chokes
The air-tightness that the middle choke piston 5 of phase shifter is connected with double-circle polarization device 6 during the movement of plug 5.
The sealing device of the present invention connects choke piston by transmission component, so as to drive choke piston to move, with double circles
Polarizer connection collectively constitutes phase shifter, and passes the position setting seal assembly of shell in connecting rod, makes to be formed in phase shifter
Not less than 10-2Pa condition of high vacuum degree, the vacuum in phase shifter are improved to 10 from 1 atmospheric pressure-2Pa, it is meant that in phase shifter
Portion metal surface can bring up to 1MV/cm for the disruptive field intensity under short pulse High-Power Microwave from 30kV/cm, phase shifter
Power capacity is also improved more than 103Times.As shown in figure 3, the connecting rod movement of drive component driving transmission component, makes choke piston
Movement velocity is not less than 30mm/0.1s, and this can realize in 0.15s the phase shift not less than 360 ° equivalent to phase shifter,
Thus, make the quick phase shifter of high-frequency of choke piston and circular waveguide composition at the top of double-circle polarization device, meet ensureing good gas
The requirement of high movement velocity and high phase shifting accuracy can be realized while close property, the power for also greatly improving phase shifter holds
Amount.
Wherein, as shown in Fig. 2 seal assembly 3 includes dynamic seal and static seal, dynamic seal inner side and connecting rod 22
Contact, contacted with the bottom of shell 4 on the outside of dynamic seal, static seal position with the outside of dynamic seal, and static seal is arranged at pair
In the first groove 61 on the end face that the waveguide 6 of circular polarizer is connected with the bottom of shell 4.Dynamic seal ensures connecting rod in band
The air-tightness of phase shifter, makes phase shifter keep vacuum to be better than 10 at work during dynamic choke piston motion-2Pa, choke piston exist
Moved back and forth in the waveguide of double-circle polarization device, static seal ensures the outer casing bottom junction of double-circle polarization device and sealing device
Good air-tightness so that choke piston space maintain condition of high vacuum degree.
Specifically, dynamic seal includes sealing clamp 33 and vaccum seal ring 31, multiple vaccum seal rings 31 are arranged at two
Between individual sealing clamp 33, position plate 32 is provided between two neighboring vaccum seal ring 31.Vacuum sealing of the sealing clamp to Y types
Enclosing certain precompression makes to be brought into close contact between vaccum seal ring and connecting rod, ensures good sealing;Position plate ensures connection
The stability of bar motion.
Wherein, vaccum seal ring 31 is shaped as Y types, and the second groove 311 is equipped with the end face of vaccum seal ring 31, and
Two grooves 311 are built-in with vacuum grease;Static seal is O-ring seal 34.The vacuum sealing of position plate and sealing clamp and Y types
Enclose between facing groove and form vacuum grease storage silo, filled vacuum fat in vacuum grease storage silo, it is close that vacuum grease can reduce vacuum
Frictional force between seal and position plate and sealing clamp improves sealing property simultaneously;Vacuum grease preferably uses lithium saponify, and it is that have
Effect auxiliary improves dynamic sealing and static seal performance lubricating movements composition;Vaccum seal ring selects Y type polyurethane sealing rings.
Further, transmission component 2 also includes leading screw 21, feed screw nut 23 and connecting plate 24, the one end of leading screw 21 and driving
Component 1 is connected, and the other end of leading screw 21 is connected with the bottom of shell 4, and feed screw nut 23 is sheathed on outside leading screw 21, with 21 turns of leading screw
It is fixedly connected when dynamic along the axial movement of leading screw 21, the one end of connecting plate 24 with feed screw nut 23, connecting rod 22 is parallel with leading screw 21
Set, and the one end of connecting rod 22 is fixed on connecting plate 24, the connection of the other end of connecting rod 22 and choke piston 5.Drive component
Leading screw is driven to rotate, feed screw nut inner surface engages with leading screw, and the convert rotational motion of leading screw is transported for the straight line of feed screw nut
Dynamic, feed screw nut controls the motion of connecting rod by connecting plate, makes connecting rod follow feed screw nut to axially move, while leading screw
The precision of nut control connecting rod motion is not less than 0.1mm, it means that phase shifter phase shift resolution ratio is about 1.5 °, higher than current
The phase shift resolution ratio index of most phase shifters, i.e., by improving the kinematic accuracy of choke piston, so as to improve the shifting of phase shifter
Phase precision.
Wherein, transmission component 2 also includes guide rod 25, and the other end of connecting plate 24 is provided with through hole, and guide rod 25 passes through through hole
It is be arranged in parallel with connecting rod 24, and the both ends of guide rod 25 are individually fixed in the top and bottom of shell 4.On the one hand guide rod is connection
Plate does auxiliary and is oriented to, and ensures that connecting rod only does axial linear movement, ensures the driving of connecting rod and choke piston in drive component
Under, stability during in high-speed motion state, silk on the other hand can be offset according to fixed position of the guide rod in shell
Thick stick rotational torque, drive component driving leading screw is set to reach more preferable rotating effect;Reduce vibration, improve whole phase shifter and working
When stationarity.
It is connected in addition, the both ends of leading screw 21 are equipped with high-speed bearing 211 with shell 4.High-speed bearing makes leading screw inside the housing
During setting, the both ends of leading screw are suspended between retaining bearing, can effectively reduce friction, and it is steady with rotating to improve dynamic characteristic
It is qualitative.
Wherein, drive component 1 includes servomotor 11, and servomotor 11 is connected by clutch 12 with leading screw 21.Driving
Component 1 also includes servo drive controller, and servo drive controller is connected with servomotor 11.Servomotor passes through motor connection
Location-plate is fixedly installed in cover top portion, and servomotor is coordinated by clutch and high-speed bearing to be connected with leading screw, drives leading screw
Rotate, servomotor works operation under the control of servo drive controller and control software.
Wherein, the bottom of shell 4 is bonding in vacuum plate 41.Outer casing bottom is bonding in vacuum plate, for double-circle polarization device
Waveguide connects, at the same by the choke piston of the enclosure element of sealing device and phase shifter main body and double compasses polarizers every
From the further air-tightness and condition of high vacuum degree for improving coupling part.
In summary, sealing device of the invention connects choke piston by transmission component, so as to drive choke piston to transport
It is dynamic, it is connected with double-circle polarization device and collectively constitutes phase shifter, and the position setting seal assembly of shell is passed in connecting rod, make phase shift
Formed in device and be not less than 10-2Pa condition of high vacuum degree, the vacuum in phase shifter are improved to 10 from 1 atmospheric pressure-2Pa, it is meant that
Phase shifter inner metal surfaces can bring up to 1MV/cm for the disruptive field intensity under short pulse High-Power Microwave from 30kV/cm,
The power capacity of phase shifter is also improved more than 103Times.The connecting rod movement of drive component driving transmission component, transports choke piston
Dynamic speed is not less than 30mm/0.1s, and this can realize in 0.15s the phase shift not less than 360 ° equivalent to phase shifter, by
This, makes the quick phase shifter of high-frequency of choke piston and circular waveguide composition at the top of double-circle polarization device, meets good airtight in guarantee
The requirement of high movement velocity and high phase shifting accuracy can be realized while property, also greatly improves the power capacity of phase shifter.
Finally it should be noted that:The above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations;Although
The present invention is described in detail with reference to the foregoing embodiments, it will be understood by those within the art that:It still may be used
To be modified to the technical scheme described in foregoing embodiments, or equivalent substitution is carried out to which part technical characteristic;
And these modification or replace, do not make appropriate technical solution essence depart from various embodiments of the present invention technical scheme spirit and
Scope.
Claims (10)
- A kind of 1. sealing device applied to phase shifter, it is characterised in that:Including drive component, transmission component, seal assembly and Shell, the outer casing bottom are connected with the waveguide of double-circle polarization device;The drive component is located at the cover top portion;The biography Dynamic component is located at the enclosure, and the transmission component includes connecting rod, and described connecting rod one end connects with the drive component Connect, the other end passes the outer casing bottom and is connected with choke piston, to drive the chokes under the driving of the drive component Piston moves;The seal assembly is arranged at the outside of the connecting rod and is connected with the outer casing bottom, to ensure described The air-tightness that choke piston is connected with the double-circle polarization device described in phase shifter when choke piston moves.
- 2. the sealing device according to claim 1 applied to phase shifter, it is characterised in that:The seal assembly includes dynamic Seal and static seal, the dynamic seal inner side contact with the connecting rod, the dynamic seal outside and the shell Bottom contacts, and the static seal is located on the outside of the dynamic seal, and is arranged at waveguide and the institute of the double-circle polarization device State in the first groove on the end face of outer casing bottom connection.
- 3. the sealing device according to claim 2 applied to phase shifter, it is characterised in that:The dynamic seal includes close Envelope pressing plate and vaccum seal ring, multiple vaccum seal rings are arranged between two sealing clamps, two neighboring described Position plate is provided between vaccum seal ring.
- 4. the sealing device according to claim 3 applied to phase shifter, it is characterised in that:The shape of the vaccum seal ring Shape is Y types, and the second groove is equipped with the end face of the vaccum seal ring, and second groove is built-in with vacuum grease;It is described quiet Seal is O-ring seal.
- 5. according to the sealing device applied to phase shifter described in claim 1-4 any one, it is characterised in that:The transmission Component also includes leading screw, feed screw nut and connecting plate, and described leading screw one end is connected with the drive component, the other end with it is described outer Shell bottom is connected, and the feed screw nut is sheathed on outside the leading screw, to do axial direction along the leading screw when the leading screw rotates Mobile, described connecting plate one end is fixedly connected with the feed screw nut, and the connecting rod be arranged in parallel with the leading screw, and one end It is fixed on the connecting plate, the other end is connected with the choke piston.
- 6. the sealing device according to claim 5 applied to phase shifter, it is characterised in that:The transmission component also includes Guide rod, the connecting plate other end are provided with through hole, and the guide rod be arranged in parallel through the through hole with the connecting rod, and The guide rod both ends are individually fixed in the cover top portion and bottom.
- 7. the sealing device according to claim 6 applied to phase shifter, it is characterised in that:The leading screw both ends are equipped with High-speed bearing and the cage connection.
- 8. the sealing device according to claim 7 applied to phase shifter, it is characterised in that:The drive component includes watching Motor is taken, the servomotor is connected by clutch with the leading screw.
- 9. the sealing device according to claim 8 applied to phase shifter, it is characterised in that:The drive component also includes Servo drive controller, the servo drive controller are connected with the servomotor.
- 10. the sealing device according to claim 9 applied to phase shifter, it is characterised in that:The outer casing bottom is true Empty connecting plate.
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CN201511016594.6A CN105576888B (en) | 2015-12-29 | 2015-12-29 | A kind of sealing device applied to the quick phase shifter of high power |
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CN201511016594.6A CN105576888B (en) | 2015-12-29 | 2015-12-29 | A kind of sealing device applied to the quick phase shifter of high power |
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CN105576888B true CN105576888B (en) | 2018-04-03 |
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CN109444834B (en) * | 2018-10-23 | 2020-10-20 | 北京无线电测量研究所 | Circular polarizer assembly test method for reciprocal ferrite phase shifter |
CN110319166A (en) * | 2019-07-27 | 2019-10-11 | 绍兴市上虞荣达实业有限公司 | A kind of pusher structure |
Citations (4)
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---|---|---|---|---|
US5013997A (en) * | 1990-01-02 | 1991-05-07 | General Electric Company | Liquid cooled, high power, ferrite phase shifter for phased array antennas |
CN201174411Y (en) * | 2008-04-01 | 2008-12-31 | 京信通信系统(中国)有限公司 | Composite phase shifter |
CN201226369Y (en) * | 2008-06-27 | 2009-04-22 | 山东新华医疗器械股份有限公司 | Microwave transmission phase shifter |
CN201741774U (en) * | 2010-07-12 | 2011-02-09 | 山东新华医疗器械股份有限公司 | Microwave transmission phase shifter |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2015079677A (en) * | 2013-10-17 | 2015-04-23 | 東京エレクトロン株式会社 | Microwave plasma processing device and microwave supply method |
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2015
- 2015-12-29 CN CN201511016594.6A patent/CN105576888B/en active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5013997A (en) * | 1990-01-02 | 1991-05-07 | General Electric Company | Liquid cooled, high power, ferrite phase shifter for phased array antennas |
CN201174411Y (en) * | 2008-04-01 | 2008-12-31 | 京信通信系统(中国)有限公司 | Composite phase shifter |
CN201226369Y (en) * | 2008-06-27 | 2009-04-22 | 山东新华医疗器械股份有限公司 | Microwave transmission phase shifter |
CN201741774U (en) * | 2010-07-12 | 2011-02-09 | 山东新华医疗器械股份有限公司 | Microwave transmission phase shifter |
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