CN105571756B - A kind of high sensitivity available for shock-wave detection bends electric transducer - Google Patents
A kind of high sensitivity available for shock-wave detection bends electric transducer Download PDFInfo
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- CN105571756B CN105571756B CN201510929110.0A CN201510929110A CN105571756B CN 105571756 B CN105571756 B CN 105571756B CN 201510929110 A CN201510929110 A CN 201510929110A CN 105571756 B CN105571756 B CN 105571756B
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- flexure
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- 230000035945 sensitivity Effects 0.000 title claims abstract description 14
- 238000001514 detection method Methods 0.000 title claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims abstract description 55
- 239000002184 metal Substances 0.000 claims abstract description 55
- 239000003989 dielectric material Substances 0.000 claims abstract description 20
- 230000035939 shock Effects 0.000 claims abstract description 18
- 238000005259 measurement Methods 0.000 claims abstract description 13
- 239000003822 epoxy resin Substances 0.000 claims abstract description 7
- 229920000647 polyepoxide Polymers 0.000 claims abstract description 7
- 230000005611 electricity Effects 0.000 claims description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 239000010949 copper Substances 0.000 claims description 3
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- NEDFZELJKGZAQF-UHFFFAOYSA-J strontium;barium(2+);dicarbonate Chemical group [Sr+2].[Ba+2].[O-]C([O-])=O.[O-]C([O-])=O NEDFZELJKGZAQF-UHFFFAOYSA-J 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims 1
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- 238000005452 bending Methods 0.000 abstract description 4
- 230000006835 compression Effects 0.000 abstract description 4
- 238000007906 compression Methods 0.000 abstract description 4
- 238000007789 sealing Methods 0.000 abstract 1
- 239000000463 material Substances 0.000 description 16
- 230000010287 polarization Effects 0.000 description 13
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/0052—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes measuring forces due to impact
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
Abstract
A kind of high sensitivity available for shock-wave detection bends electric transducer, including is separately positioned on the left metal electrode on the electric dielectric material of flexure or so surface and right metal electrode；Left metal electrode is connected to the lead of two output measurement electric charges with right metal electrode, and the other end of two leads is connected with two external metal electrodes, and epoxy resin is including the electric dielectric material of flexure, metal electrode and lead-in wire sealing；There is metallic screen shock wave to apply stressed pressure channel；Shell bonds together with metallic screen, epoxy resin is fixedly arranged at interior；The present invention carrys out the size of measuring shock waves pressure by bending the strain gradient of electric dielectric material generation under being acted in SHOCK COMPRESSION and producing the linear relationship between electric charge based on flexure electro dynamic effect.
Description
Technical field
The present invention relates to sensor technical field, and in particular to a kind of high sensitivity available for shock-wave detection bends electricity
Sensor.
Background technology
Stress-electric coupling phenomenon is widely present in various artificial and natural materials.Traditional piezoelectric transducer utilizes some
The phenomenon with piezoelectric effect is made after dielectric substance stress.Piezoelectric effect refers to some dielectrics on certain orientation is received
External force acts on and bends or during dilatation, produce since polarization occurs for internal charge and in its surface accumulation
Phenomenon.Piezoelectric transducer is exactly to pass through the measurement surface quantity of electric charge, utilizes the measurement of the other non electrical quantities of stress-electric coupling relational implementation, quilt
It is widely used in mechanics, acoustics, medicine, aerospace and national defence etc..
Although piezoelectric has superior power electricity transition effects, in crystallography, piezoelectric effect exists only in
Crystal with non-centrosymmetric structure, so significantly limit the selection and utilization of material.Naturally occurring piezoelectric
Piezoelectric effect is very faint, and piezoelectricity rate is too low, is difficult to actually detected.Now widely used piezoelectric is mainly by quartz
The materials such as crystal, piezoelectric polymer and piezoelectric ceramics.In practical application in industry, used piezoelectric is mostly pick metatitanic acid
The piezoelectric ceramics of lead class, but pick lead titanates contains heavy metal lead, and easily environment and human health are damaged.
Different from piezoelectric effect, flexoelectric effect refers to produce polarization by heterogeneous strain field or strain gradient,
Even for centrosymmetrical crystal, flexoelectric effect can equally make material produce electric polarization.Due to crystal structure symmetry
The requirement of relative loose, flexoelectric effect are prevalent in all dielectrics, including non-piezoelectric material and isotropism material
Material.
When shock wave is by bending electric dielectric material, high strain-rate deformation occurs, produces the strain ladder dependent on the time
Degree, and strain gradient can produce the polarization displacement of ion；For shock compressive wave, the acceleration of atom is proportional to strain ladder
Degree, the acceleration of the ion of different quality produce extra polarization displacement, so as to produce flexure electro dynamic effect, produce polarization electricity
Lotus, flexure electro dynamic effect are normally defined：
Wherein μd=-χ cM/ ρ are Dynamic flexural electrostrictive coefficients.M is the coefficient calculated by lattice dynamics.ε is material
Elastic strain, x are the directions of gradient, and P is the polarization that the strain gradient as caused by flexoelectric effect produces, and ρ is density, and c is bullet
Property constant.Under the International System of Units, the unit of flexoelectric coefficient is C/m.
It is wider to bend electric-type material selection range, environment and mankind's friendly material can be used to prepare flexure electric-type sensing
The function elements such as device, driver.Another outstanding feature is that flexoelectric effect is related to size, and some researches show that strain ladder
Degree is increased with the reduction of structure size, and the highly sensitive flexure electric-type microdevice of small size is feasible in practice
, and measure more accurate.
The content of the invention
In order to overcome the above-mentioned problems of the prior art, it is an object of the invention to provide one kind can be used for shock wave to examine
The high sensitivity flexure electric transducer of survey, the strain gradient of the electric dielectric material generation of flexure is acted on being based on by SHOCK COMPRESSION
Flexoelectric effect produces the linear relationship between electric charge, carrys out the size of measuring shock waves pressure, can accurately, simply realize pressure
The measurement of power.
In order to reach object above, the present invention adopts the following technical scheme that：
A kind of high sensitivity available for shock-wave detection bends electric transducer, including is separately positioned on the electric dielectric material of flexure
Expect the left metal electrode 2 and right metal electrode 4 on 3 or so surfaces；The left metal electrode 2 is connected to right metal electrode 4
The lead 5 of two output measurement electric charges, the other end of two leads 5 are connected with external metal electrode 8；The electric dielectric material of flexure
Material 3, left metal electrode 2, right metal electrode 4 and lead 5 are sealed in epoxy resin 7；Shell 6 bonds together with metallic screen 1,
Epoxy resin 7 is fixedly arranged at interior；There is the metallic screen 1 shock wave to apply stressed pressure channel.
The left metal electrode 2 and right metal electrode 4 are evaporation metal electrode.
The lead 5 is with left metal electrode 2 and right metal electrode 4 and external metal electrode 8 by way of wire bonding
Connection.
The electric dielectric 3 of flexure is strontium carbonate barium block.
The external metal electrode 8 is two copper rods.
When high speed impact ripple is by bending electric dielectric material 3, high strain-rate deformation occurs, generation should dependent on the time
Become gradient, and strain gradient can produce the polarization displacement of ion；For shock compressive wave, the acceleration of atom is proportional to should
Become gradient, the acceleration of the ion of different quality produces extra polarization displacement, so as to produce flexure electro dynamic effect, produces pole
Change electric charge, its expression formula is：
U=kQ
Wherein μd=-χ cM/ ρ are Dynamic flexural electrostrictive coefficients, and M is the coefficient calculated by lattice dynamics, and ρ is density, c
It is elastic constant；μ is static flexoelectric coefficient, and ε is the elastic strain of material, and x is the direction of gradient, and P is by flexoelectric effect
The polarization that caused strain gradient produces, Q are the output charges of 4 metal electrode of left metal electrode 2 and right metal electrode, and k is electricity
Lotus amplification coefficient, U are the output quantity of magnitude of voltage, and H is the material test specimen lower surface length of side.As long as above formula is, it can be seen that measurement
Output charge value, the strain gradient of the electric dielectric material generation of flexure is acted on being produced based on flexoelectric effect by SHOCK COMPRESSION
Linear relationship between electric charge, can accurately, simply realize the measurement of shock wave pressure.
Compared to the prior art compared with the present invention has the following advantages：
1) present invention is using flexure electro dynamic effect measurement shock wave pressure, flexure different from traditional press type sensor
The selection range of electric-type sensor material is wider.
2) relative to piezoelectric pressure indicator, there is high sensitivity, and there is dimensional effect, with the reduction of block size
Sensitivity increase.
3) produced due to flexoelectric effect mainly due to strain gradient, in the case of small deformation, the measurement of strain compared with
For difficulty, big strain gradient still remains, and can extremely be readily detected electric signal, or even can directly export electric signal analysis,
Possibility is provided for the Site Detection of structure.
Brief description of the drawings
Attached drawing is inventive sensor structure diagram.
Embodiment
The present invention is described in further details with reference to the accompanying drawings and detailed description.
As shown in drawings, a kind of high sensitivity available for shock-wave detection of the present invention bends electric transducer, including respectively
It is arranged on the left metal electrode 2 and right metal electrode 4 on electric 3 or so the surface of dielectric material of flexure, the left metal electrode 2 and flexure
The left surface of electric dielectric material 3 is in contact；The right metal electrode 4 is in contact with the right surface of the electric dielectric material 3 of flexure；It is described
Left metal electrode 2 and right metal electrode 4 are connected to the leads 5 of two output measurement electric charges, the other end of two leads 5 with
External metal electrode 8 connects, and epoxy resin 7 is sealed in flexure electric dielectric material 3, metal electrode 2,4 and lead 5 interior；Metal
There is sieve 1 shock wave to apply stressed pressure channel；The shell 6 bonds together with metallic screen 1, and epoxy resin 7 is consolidated
Inside.
The left metal electrode 2 and right metal electrode 4 are evaporation metal electrode.
The lead 5 is with left metal electrode 2 and right metal electrode 4 and external metal electrode 8 by way of wire bonding
Connection.
The electric dielectric 3 of flexure is strontium carbonate barium block.
The external metal electrode 8 is two copper rods.
When high speed impact ripple is by bending electric dielectric material 3, high strain-rate deformation occurs, generation should dependent on the time
Become gradient, and strain gradient can produce the polarization displacement of ion；For shock compressive wave, the acceleration of atom is proportional to should
Become gradient, the acceleration of the ion of different quality produces extra polarization displacement, so as to produce flexure electro dynamic effect, produces pole
Change electric charge, its expression formula is：
U=kQ
Wherein μd=-χ cM/ ρ are Dynamic flexural electrostrictive coefficients, and M is the coefficient calculated by lattice dynamics, and ρ is density, c
It is elastic constant；μ is static flexoelectric coefficient, and ε is the elastic strain of material, and x is the direction of gradient, and P is by flexoelectric effect
The polarization that caused strain gradient produces, Q are the output charges of 4 metal electrode of left metal electrode 2 and right metal electrode, and k is electricity
Lotus amplification coefficient, U are the output quantity of magnitude of voltage, and H is the material test specimen lower surface length of side.As long as above formula is, it can be seen that measurement
Output charge value, the strain gradient of the electric dielectric material generation of flexure is acted on being produced based on flexoelectric effect by SHOCK COMPRESSION
Linear relationship between electric charge, can accurately, simply realize the measurement of shock wave pressure.
Claims (5)
1. a kind of high sensitivity available for shock-wave detection bends electric transducer, it is characterised in that：Scratched including being separately positioned on
The left metal electrode (2) and right metal electrode (4) on bent electricity dielectric material (3) left and right surface；The left metal electrode (2) and right gold
Belong to the lead (5) that electrode (4) is connected to two output measurement electric charges, the other end and the external metal electricity of two leads (5)
Pole (8) connects；Flexure electric dielectric material (3), left metal electrode (2), right metal electrode (4) and the lead (5) are sealed in ring
In oxygen tree fat (7)；Shell (6) bonds together with metallic screen (1), epoxy resin (7) is fixedly arranged at interior；The metallic screen (1)
Stressed pressure channel is applied with shock wave.
2. a kind of high sensitivity available for shock-wave detection according to claim 1 bends electric transducer, its feature exists
In：The left metal electrode (2) and right metal electrode (4) are evaporation metal electrode.
3. a kind of high sensitivity available for shock-wave detection according to claim 1 bends electric transducer, its feature exists
In：The side that the lead (5) passes through wire bonding with left metal electrode (2) and right metal electrode (4) and external metal electrode (8)
Formula connects.
4. a kind of high sensitivity available for shock-wave detection according to claim 1 bends electric transducer, its feature exists
In：The electric dielectric material (3) of flexure is strontium carbonate barium block.
5. a kind of high sensitivity available for shock-wave detection according to claim 1 bends electric transducer, its feature exists
In：The external metal electrode (8) is two copper rods.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510929110.0A CN105571756B (en) | 2015-12-12 | 2015-12-12 | A kind of high sensitivity available for shock-wave detection bends electric transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510929110.0A CN105571756B (en) | 2015-12-12 | 2015-12-12 | A kind of high sensitivity available for shock-wave detection bends electric transducer |
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| Publication Number | Publication Date |
|---|---|
| CN105571756A CN105571756A (en) | 2016-05-11 |
| CN105571756B true CN105571756B (en) | 2018-04-17 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106768628A (en) * | 2016-12-07 | 2017-05-31 | 西安近代化学研究所 | A kind of shock wave pipe mounting structure and method for base measuring pressure response diaphragm |
| US10962992B2 (en) | 2017-12-25 | 2021-03-30 | Industrial Technology Research Institute | Apparatus with two anchors |
| CN109507450A (en) * | 2018-10-30 | 2019-03-22 | 西安交通大学 | A kind of beam type bends electric acceleration transducer and acceleration measurement method |
| CN109724732A (en) * | 2018-12-12 | 2019-05-07 | 西安近代化学研究所 | A kind of explosion wave pressure effect target of depth automatic measurement |
| CN110686817B (en) * | 2019-10-31 | 2020-06-23 | 电子科技大学 | Device for measuring emission angle of particle beam |
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| SU1150500A1 (en) * | 1983-04-28 | 1985-04-15 | Предприятие П/Я А-1944 | Capacitive pressure pickup |
| CN103616098B (en) * | 2013-12-06 | 2015-08-26 | 西安交通大学 | A kind of high precision is based on the flexure electric-type pressure transducer of metallic elastic component |
| CN103630274B (en) * | 2013-12-06 | 2015-08-26 | 西安交通大学 | A kind of flexure electric-type micropressure sensor based on MEMS (micro electro mechanical system) |
| CN104457964B (en) * | 2014-11-28 | 2017-07-25 | 西安交通大学 | A kind of dual-axis vibration sensor based on the electric principle of flexure |
| CN105024009B (en) * | 2015-06-08 | 2018-03-06 | 中国科学技术大学 | Bend voltage composite |
| CN105137118B (en) * | 2015-07-21 | 2018-04-17 | 西安交通大学 | A kind of sensing arrangement and measuring method of the flow rate-of-change based on flexoelectric effect |
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