CN105549326B - Nozzle and coating machine - Google Patents
Nozzle and coating machine Download PDFInfo
- Publication number
- CN105549326B CN105549326B CN201510916197.8A CN201510916197A CN105549326B CN 105549326 B CN105549326 B CN 105549326B CN 201510916197 A CN201510916197 A CN 201510916197A CN 105549326 B CN105549326 B CN 105549326B
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- Prior art keywords
- movable part
- signal value
- gap
- control unit
- nozzle
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Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Coating Apparatus (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
Abstract
The present invention provides a kind of nozzles, including movable part, fixing piece and control unit.The movable part and the fixing piece are oppositely arranged and are formed between the fixing piece gap, and the movable part can translate on the direction sprayed perpendicular to coating fluid relative to the fixing piece.Pressure sensor is installed, described control unit is electrical connected with the pressure sensor on the movable part.Baseline signal value is preset in described control unit, the pressure sensor detects the nozzle and sprays pressure suffered by each position on the movable part when coating fluid in the gap, it is corresponding detected signal value by the pressure conversion of each position on the movable part in the gap, and the detected signal value is transmitted to described control unit, described control unit compares the detected signal value and the baseline signal value.The present invention also provides a kind of coating machines.Nozzle and coating machine of the invention can directly detect the uniformity of nozzle gap.
Description
Technical field
The present invention relates to LCD Technology field more particularly to a kind of nozzle and the coating machine with the nozzle.
Background technique
Coating machine is one of most important equipment of liquid crystal display manufacturing, when manufacturing liquid crystal display panel, need using
Coating machine coats one layer of photosensitive solution, such as PR (Photo Resist, photoresist) on the substrate of liquid crystal display panel.Wherein, it uses
In the core component that the nozzle for spraying photosensitive solution is coating machine.In actual production, the uniformity of nozzle gap determines coating
The uniformity of film thickness.Since nozzle gap is smaller and precision is higher, its uniformity coefficient can not be judged by naked-eye observation, therefore is needed
Pass through the uniformity coefficient of detection device Thickness Monitoring in coating process rear end, to detect the uniformity coefficient of nozzle gap indirectly.Cause
This program be unfavorable for checking in advance as gap it is uneven caused by technique it is bad, cause technique to waste.
Summary of the invention
In view of this, can directly detect nozzle the present invention provides a kind of nozzle and the coating machine with the nozzle
The uniformity in gap.
A kind of nozzle, including movable part and fixing piece, the movable part be oppositely arranged with the fixing piece and with it is described solid
Determine to form gap between part, the movable part can it is close relative to the fixing piece on the direction sprayed perpendicular to coating fluid or
Separate, the nozzle further includes control unit, and pressure sensor, described control unit and the pressure are equipped on the movable part
Force snesor is electrical connected, and baseline signal value is preset in described control unit, and the pressure sensor detects the nozzle spray
Pressure suffered by each position on the movable part when coating fluid in the gap is covered, by the work in the gap
The pressure conversion of each position is corresponding detected signal value on moving part, and the detected signal value is transmitted to the control
Unit processed, described control unit compare the detected signal value and the baseline signal value.
Wherein, the pressure sensor includes acquisition module and processing module, the acquisition module and the processing module
It is electrically connected, the acquisition module is used to acquire the pressure suffered by each position on the movable part in the gap；
The processing module is used to be corresponding described by the pressure conversion of each position on the movable part in the gap
Detected signal value, and the detected signal value is transmitted to described control unit.
Wherein, the nozzle further includes the adjustment screw for connecting the movable part Yu the fixing piece, the adjustment screw
For adjusting the gap between the movable part and the fixing piece.
A kind of coating machine has nozzle, and the nozzle includes movable part and fixing piece, the movable part and the fixing piece
It is oppositely arranged and is formed between the fixing piece gap, the movable part can be opposite on the direction sprayed perpendicular to coating fluid
In the fixing piece close to or far from the nozzle further includes control unit, and pressure sensor, institute are equipped on the movable part
It states control unit to be electrical connected with the pressure sensor, baseline signal value is preset in described control unit, the pressure passes
Sensor detects the nozzle and sprays pressure suffered by each position on the movable part when coating fluid in the gap, will
The pressure conversion of each position is corresponding detected signal value on the movable part in the gap, and by the detection
Signal value is transmitted to described control unit, and described control unit carries out the detected signal value and the baseline signal value pair
Than.
Wherein, the pressure sensor includes acquisition module and processing module, the acquisition module and the processing module
It is electrically connected, the acquisition module is used to acquire the pressure suffered by each position on the movable part in the gap；
The processing module is used to be corresponding described by the pressure conversion of each position on the movable part in the gap
Detected signal value, and the detected signal value is transmitted to described control unit.
Wherein, the nozzle further includes the adjustment screw for connecting the movable part Yu the fixing piece, the adjustment screw
For adjusting the gap between the movable part and the fixing piece.
Wherein, the coating machine further includes display module, and the display module is electrical connected with described control unit,
In, described control unit is also used to generation and includes each position on the movable part in the gap, the detection signal
The comparative information of value and the baseline signal value；The display module is for showing the comparative information.
Detailed description of the invention
More clearly to illustrate construction feature and effect of the invention, come with reference to the accompanying drawing with specific embodiment to its into
Row is described in detail.
Fig. 1 is the structural schematic diagram of the nozzle of first embodiment of the invention.
Fig. 2 is the schematic cross-section of nozzle shown in FIG. 1.
Fig. 3 is the structural schematic diagram of pressure sensor shown in FIG. 1.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description.Obviously, described embodiment is a part of the embodiments of the present invention, rather than whole embodiments.Based on this hair
Embodiment in bright, those of ordinary skill in the art's every other reality obtained without making creative work
Example is applied, all should belong to the scope of protection of the invention.
As depicted in figs. 1 and 2, in the first embodiment of the present invention, nozzle 100, which is mounted in the rack of coating machine, (schemes not
Show).Nozzle 100 includes fixing piece 110, movable part 120, pressure sensor 130 and control unit (not shown).Wherein, fixed
Part 110 and movable part 120 are in long strip-board shape, and the two is oppositely arranged and has gap 140, and coating fluid is sprayed from gap 140.Gu
Determine the one end of part 110 and movable part 120 on the coating fluid emission direction and form triangular tip, the opposite other end is side
Shape.It should be understood that fixing piece 110 and movable part 120 can also be other structures shape.Fixing piece 110 is fixed on the machine of coating machine
Frame, and movable part 120 is movably installed in the rack.In the present embodiment, nozzle 100 can also include adjustment screw
(not shown), the adjustment screw connection fixing piece 110 and movable part 120.It is described when tightening or unscrewing the adjustment screw
Movable part 120 is on the direction sprayed perpendicular to coating fluid relative to fixing piece 110 close to or far from so as to adjust gap
140 size.
Pressure sensor 130 is installed on movable part 120, and is arranged along the length direction of movable part 120, the length side
To vertical with the emission direction of coating fluid.In the present embodiment, pressure sensor 130 is embedded in movable part 120, to avoid pressure
Force snesor 130 directly contacts with coating fluid and causes to pollute.When coating fluid is sprayed from gap 140, coating fluid will be to work
Moving part 120 applies pressure.At this point, pressure sensor 130 is able to detect that each position institute on the movable part 120 in gap 140
The pressure conversion of each position on movable part 120 in gap 140 is corresponding detected signal value by the pressure received, and
The detected signal value is exported to described control unit.
Described control unit is mounted on the rack, and is electrical connected with pressure sensor 130.In described control unit
It is previously provided with baseline signal value, the baseline signal value is pressure suffered by each position on the movable part 120 worked as in gap 140
When power is relatively uniform, the signal value that pressure sensor 130 is fed back shows that gap 140 is relatively uniform.The baseline signal value
Depending on practical condition, and it is set in advance in described control unit.For example, the baseline signal value is set as
0.125 volt.Described control unit receives the detected signal value that pressure sensor 130 is sent, and by the detected signal value
It is compared with the baseline signal value.
The uniformity coefficient in gap 140 will affect the uniformity for the coating fluid film thickness being coated on the substrate of liquid crystal display panel.If
It is standby to adjust in improper or nozzle there are the techniques such as impurity are bad, it will lead to gap 140 not enough uniformly, and then lead to coating fluid film thickness
Consistency it is poor.When the gap on 120 length direction of movable part at each position is inconsistent, correspondingly, coating fluid is to gap
The pressure that each position applies on movable part 120 in 140 is also inconsistent.Therefore, pressure sensor 130 is on movable part 120
After different pressures suffered by each position are detected, it can be converted by signal, obtain the activity corresponded in gap 140
The detected signal value of the different pressures of each position on part 120；In turn, described control unit to the detected signal value with
The baseline signal value compares.Specifically, showing described if the detected signal value is greater than the baseline signal value
The gap of detected signal value corresponding position is larger；If the detected signal value is less than the baseline signal value, show described
The gap of detected signal value corresponding position is smaller.The detected signal value of certain position and institute on movable part 120 in gap 140
The deviation for stating baseline signal value is bigger, then shows that the gap of position herein is bigger, i.e., the gap of position is more uneven herein.If
The detected signal value of all positions and the deviation of the baseline signal value are almost consistent on movable part 120, then show gap
140 is relatively uniform.
Therefore, the nozzle of first embodiment of the invention, by setting control unit and pressure sensor, thus, it is possible to direct
The uniformity coefficient for detecting nozzle gap is avoided in coating process rear end in such a way that detection device detects, to optimize
Technique.
Further, as shown in figure 3, in the first embodiment of the invention, pressure sensor 130 includes acquisition module 131
With processing module 132.Acquisition module 131 and processing module 132 are electrically connected.
Wherein, acquisition module 131 is used to acquire pressure suffered by each position on the movable part 120 in the gap 140.
Processing module 132 is used to the pressure conversion of each position on the movable part 120 in the gap 140 be corresponding
The detected signal value, and the detected signal value is transmitted to described control unit.Described control unit receiving processing module
132 detected signal values sent, and the detected signal value and the baseline signal value are compared.Specifically, such as
Detected signal value described in fruit is greater than the baseline signal value, then shows that the gap of the detected signal value corresponding position is larger；Such as
Detected signal value described in fruit is less than the baseline signal value, then shows that the gap of the detected signal value corresponding position is smaller.Between
The detected signal value of certain position and the deviation of the baseline signal value are bigger on movable part 120 in gap 140, then show this
The gap for locating position is bigger, i.e., the gap of position is more uneven herein.If the detection letter of all positions on movable part 120
Number value and the baseline signal value deviation it is almost consistent, then show that gap 140 is relatively uniform.
The second embodiment of the present invention provides a kind of coating machine, and the coating machine has described in above-mentioned first embodiment
Nozzle.Specifically, the nozzle includes movable part and fixing piece, the movable part and the fixing piece be oppositely arranged and with institute
It states and forms gap between fixing piece, the movable part can lean on the direction sprayed perpendicular to coating fluid relative to the fixing piece
Close or remote from.The nozzle further includes control unit.Pressure sensor, described control unit and institute are installed on the movable part
It states pressure sensor to be electrical connected, baseline signal value is preset in described control unit, the pressure sensor detects the spray
Mouth sprays pressure suffered by each position on the movable part when coating fluid in the gap, by the institute in the gap
The pressure conversion for stating each position on movable part is corresponding detected signal value, and the detected signal value is transmitted to institute
Control unit is stated, described control unit compares the detected signal value and the baseline signal value.The nozzle also wraps
Include connection the movable part and the fixing piece adjustment screw, the adjustment screw be used for adjust the movable part with it is described solid
Determine the gap between part.
Further, in the present embodiment, the pressure sensor includes acquisition module and processing module, the acquisition mould
Block and the processing module are electrically connected, and the acquisition module is used to acquire each position on the movable part in the gap
The suffered pressure；The processing module is used to turn the pressure of each position on the movable part in the gap
It is changed to the corresponding detected signal value, and the detected signal value is transmitted to described control unit.
Further, in the present embodiment, the coating machine further includes display module, the display module and the control
Unit is electrical connected, wherein each position on the movable part that described control unit is also used to generate include in the gap
It sets, the comparative information of the detected signal value and the baseline signal value；The display module is for showing the comparison letter
Breath.The form of the comparative information includes but is not limited to tables of data.The display module, such as can be display.
Specifically, being listed in the gap respectively in the tables of data for example, described control unit generates a tables of data
The movable part on each position, the corresponding detection signal in each position on the movable part in the gap
Value and the baseline signal value.The display module shows the tables of data.Therefore, the coating machine of the embodiment of the present invention leads to
Further setting display module is crossed, thus, it is possible to intuitively observe the corresponding detection in each position on the movable part
The size relation of signal value and the baseline signal value, and then judge the uniformity coefficient of the nozzle gap.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily expect various equivalent modifications or
Replacement, these modifications or substitutions should be covered by the protection scope of the present invention.Therefore, protection scope of the present invention Ying Yiquan
Subject to the protection scope that benefit requires.
Claims (7)
1. a kind of nozzle, including movable part and fixing piece, the movable part and the fixing piece be oppositely arranged and with the fixation
Gap is formed between part, the movable part can be close or remote relative to the fixing piece on the direction sprayed perpendicular to coating fluid
From, which is characterized in that
The nozzle further includes control unit, and pressure sensor, described control unit and the pressure are equipped on the movable part
Force snesor is electrical connected, and baseline signal value is preset in described control unit, and the baseline signal value is when the work in gap
When pressure suffered by each position is uniform on moving part, signal value that pressure sensor is fed back；The pressure sensor detects institute
It states nozzle and sprays pressure suffered by each position on the movable part when coating fluid in the gap, it will be in the gap
The movable part on the pressure conversion of each position be corresponding detected signal value, and the detected signal value is transmitted
To described control unit, described control unit compares the detected signal value and the baseline signal value.
2. nozzle according to claim 1, which is characterized in that
The pressure sensor includes acquisition module and processing module, and the acquisition module and the processing module are electrically connected,
The acquisition module is used to acquire the pressure suffered by each position on the movable part in the gap；The processing mould
Block is used to the pressure conversion of each position on the movable part in the gap be the corresponding detected signal value,
And the detected signal value is transmitted to described control unit.
3. according to claim 1 or nozzle described in 2, which is characterized in that the nozzle further include connect the movable part with
The adjustment screw of the fixing piece, the adjustment screw are used to adjust between described between the movable part and the fixing piece
Gap.
4. a kind of coating machine, there is nozzle, the nozzle includes movable part and fixing piece, the movable part and the fixing piece phase
Form to setting and between the fixing piece gap, the movable part can on the direction sprayed perpendicular to coating fluid relative to
The fixing piece close to or far from, which is characterized in that
The nozzle further includes control unit, and pressure sensor, described control unit and the pressure are equipped on the movable part
Force snesor is electrical connected, and baseline signal value is preset in described control unit, and the baseline signal value is when the work in gap
When pressure suffered by each position is uniform on moving part, signal value that pressure sensor is fed back；The pressure sensor detects institute
It states nozzle and sprays pressure suffered by each position on the movable part when coating fluid in the gap, it will be in the gap
The movable part on the pressure conversion of each position be corresponding detected signal value, and the detected signal value is transmitted
To described control unit, described control unit compares the detected signal value and the baseline signal value.
5. coating machine according to claim 4, which is characterized in that
The pressure sensor includes acquisition module and processing module, and the acquisition module and the processing module are electrically connected,
The acquisition module is used to acquire the pressure suffered by each position on the movable part in the gap；The processing mould
Block is used to the pressure conversion of each position on the movable part in the gap be the corresponding detected signal value,
And the detected signal value is transmitted to described control unit.
6. the coating machine according to claim 4 or 5, which is characterized in that the nozzle further includes connecting the movable part
With the adjustment screw of the fixing piece, the adjustment screw is used to adjust between described between the movable part and the fixing piece
Gap.
7. coating machine according to claim 6, which is characterized in that the coating machine further includes display module, described aobvious
Show that module is electrical connected with described control unit, wherein it includes described in the gap that described control unit, which is also used to generate,
The comparative information of each position, the detected signal value and the baseline signal value on movable part；The display module is used
In the display comparative information.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510916197.8A CN105549326B (en) | 2015-12-10 | 2015-12-10 | Nozzle and coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510916197.8A CN105549326B (en) | 2015-12-10 | 2015-12-10 | Nozzle and coating machine |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105549326A CN105549326A (en) | 2016-05-04 |
| CN105549326B true CN105549326B (en) | 2019-11-05 |
Family
ID=55828595
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510916197.8A Active CN105549326B (en) | 2015-12-10 | 2015-12-10 | Nozzle and coating machine |
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| Country | Link |
|---|---|
| CN (1) | CN105549326B (en) |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101493316A (en) * | 2008-01-22 | 2009-07-29 | 塔工程有限公司 | Gap sensor enabling mounting of syringe and dispenser having the same |
| CN202683415U (en) * | 2012-07-27 | 2013-01-23 | 北京京东方光电科技有限公司 | Coating device |
| CN103190017A (en) * | 2010-11-02 | 2013-07-03 | 丰田自动车株式会社 | Coating method and coating apparatus |
| CN103771719A (en) * | 2014-01-16 | 2014-05-07 | 北京京东方光电科技有限公司 | Coating device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005152716A (en) * | 2003-11-21 | 2005-06-16 | Seiko Epson Corp | Slit-nozzle coating type coating device and slit-nozzle coating type coating method |
| KR20080020273A (en) * | 2006-08-31 | 2008-03-05 | 삼성전자주식회사 | Slit coater apparatus for manufacturing display device |
-
2015
- 2015-12-10 CN CN201510916197.8A patent/CN105549326B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101493316A (en) * | 2008-01-22 | 2009-07-29 | 塔工程有限公司 | Gap sensor enabling mounting of syringe and dispenser having the same |
| CN103190017A (en) * | 2010-11-02 | 2013-07-03 | 丰田自动车株式会社 | Coating method and coating apparatus |
| CN202683415U (en) * | 2012-07-27 | 2013-01-23 | 北京京东方光电科技有限公司 | Coating device |
| CN103771719A (en) * | 2014-01-16 | 2014-05-07 | 北京京东方光电科技有限公司 | Coating device |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105549326A (en) | 2016-05-04 |
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