CN105545712A - Shrinkage-pipe synthetic-jet valve-less piezoelectric pump - Google Patents
Shrinkage-pipe synthetic-jet valve-less piezoelectric pump Download PDFInfo
- Publication number
- CN105545712A CN105545712A CN201610107655.8A CN201610107655A CN105545712A CN 105545712 A CN105545712 A CN 105545712A CN 201610107655 A CN201610107655 A CN 201610107655A CN 105545712 A CN105545712 A CN 105545712A
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- China
- Prior art keywords
- pump
- pump body
- shrink nozzle
- taper
- vibrating diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000012530 fluid Substances 0.000 claims abstract description 15
- 230000002194 synthesizing effect Effects 0.000 claims description 18
- 238000005507 spraying Methods 0.000 abstract 4
- 238000000034 method Methods 0.000 description 12
- 238000005516 engineering process Methods 0.000 description 6
- 230000007547 defect Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000010951 brass Substances 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000013013 elastic material Substances 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000003980 solgel method Methods 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0027—Special features without valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
Abstract
The invention discloses a shrinkage-pipe synthetic-jet valve-less piezoelectric pump in a micro-fluidic system. Four stand columns are connected to the periphery of the outer edge between an upper pump body and a lower pump body and are evenly arranged in the circumference direction; pump inlets are formed in gaps between the four stand columns, an upper cavity is formed in the space defined by the four stand columns, the upper pump body and the lower pump body, and fluid enters the upper cavity from the pump inlets between the stand columns; a pump outlet communicated with the upper cavity is formed in the middle of the upper pump body, the middle of the lower pump body is provided with a lower cavity and a conical shrinkage spraying pipe located over the lower cavity, the conical shrinkage spraying pipe is communicated with the upper cavity and the lower cavity, and the upper end of the conical shrinkage spraying pipe is a small end, and the lower end of the conical shrinkage spraying pipe is a large end; a vibrating diaphragm is arranged under the bottom of the lower cavity, and a piezoelectric vibrator is bonded to the middle of the lower surface of the vibrating diaphragm. By means of the shrinkage-pipe synthetic-jet valve-less piezoelectric pump, continuous outflow and high-flow outflow can be achieved, and the response speed is high.
Description
Technical field
The invention belongs to microfluid machinery, Micro Fluid Transfer and control technique field, the Valveless piezoelectric micropump specifically in microfluid system.
Background technique
Piezoelectric micropump is the driving element in microfluid system, and its performance directly affects whole microfluid system, and the driving mode of piezoelectric micropump is simple to operation, and the required precision of processing and fabricating is relatively low, and accessible site degree is higher, is easy to realize microminiaturization.Wherein, Valveless piezoelectric pump utilizes special microtube structure and microfluidic characteristic to realize the operation of pump, avoids the defect of valve arrangement without movable valve chip architecture, is therefore easier to microminiaturized and integrated.
Fast development based on MEMS and the Instability Theory research to complicated nonlinear system are born and a kind of brand-new fluid active control technology, i.e. synthesizing jet-flow technology.Synthesizing jet-flow is otherwise known as " zero-net-mass-flux jet ", and it can to utilize in controlled flow field fluid " synthesis " one jet of self and not need to introduce extra quality, and this strand of jet is made up of a series of successive abducent unsteady flo w vortex pair in fact.Have just because of synthesizing jet-flow technology the distinguishing feature that conventional jet do not have, this technology just progressively demonstrates in the ACTIVE CONTROL of flow field and heat exchange and is applied at the separation field that controls to flow.
It is little that common Valveless piezoelectric pump has flow, exports discontinuous defect, in order to overcome this defect, is applied in Valveless piezoelectric pump by synthesizing jet-flow technology, utilizes synthesizing jet-flow principle to realize the control of flow direction.Some synthesizing jet-flow valveless pump, is driven by two oscillator, but complex structure, and processing difficulties and size is bigger than normal, is difficult to be applied to microfluid system.Some synthesizing jet-flow valveless pump employs shrink nozzle to improve muzzle velocity, but this pump is plane structure, and flow is less, and efficiency is on the low side.
Summary of the invention
The object of the invention is for solving existing synthesizing jet-flow valveless pump Problems existing, providing a kind of structure simple, fluid ejection hourly velocity is larger, and flow is larger and can go out the collapsible tube synthesizing jet-flow Valveless piezoelectric pump of stream continuously.
For achieving the above object, the technical solution used in the present invention is: the present invention includes upper pump casing and lower pump body, upper pump casing is positioned at directly over lower pump body, surrounding place, outer between upper pump casing and lower pump body connects 4 root posts, 4 root posts are along the circumferential direction evenly arranged, space between 4 root posts forms pump inlet, and 4 root posts, the space surrounded between upper pump casing and lower pump body are upper chamber, and fluid enters in upper chamber from the pump inlet between column; The middle of upper pump casing has the pump discharge communicated with upper chamber, the middle of lower pump body is provided with lower chambers and is positioned at the taper shrink nozzle directly over lower chambers, taper shrink nozzle is communicated in upper chamber and lower chambers, and taper shrink nozzle upper end is small end, lower end is large end; Vibrating diaphragm immediately below the bottom of lower chambers, vibrating diaphragm lower surface middle bonding piezoelectric vibrator.
Further, the upper-end inner diameter of taper shrink nozzle is 0.1mm-2mm, and taper theta is 0 °-30 °.
Further, the vertical height of upper chamber and the upper-end inner diameter ratio of taper shrink nozzle are 20-40, the internal diameter of lower chambers and the upper-end inner diameter ratio of taper shrink nozzle are greater than 50, and the ratio of the vertical depth of taper shrink nozzle and the upper-end inner diameter of taper shrink nozzle is 2-6.
The beneficial effect that the present invention has after adopting technique scheme is: synthesizing jet-flow technology is applied to valve free pump field by the present invention, adopts shrink nozzle, can obtain larger muzzle velocity, thus obtain larger flow compared with ordinary straight jet pipe; Structure is simple, and be easy to processing, without electromagnetic interference, energy consumption is low, can realize continuously and high flow goes out to flow; Fast response time, vibration frequency range is large, and cubic deformation amount is large, and efficiency is high, stable performance; Using piezoelectric vibrator as driving element, be 100Hz in driver frequency, when driving voltage is 100Vp-p, flow can reach 58.02ml/min.
Accompanying drawing explanation
Fig. 1 is collapsible tube synthesizing jet-flow Valveless piezoelectric pump structure sectional view of the present invention;
Fig. 2 be in Fig. 1 A-A to sectional view;
Fig. 3 is the plan view of Fig. 1;
Fig. 4 is the fundamental diagram of the present invention shown in Fig. 1 in discharge process;
Fig. 5 is the fundamental diagram of the present invention shown in Fig. 1 in suction process;
In figure: 1-upper chamber; 2-pump discharge; 3-upper pump casing; 4-pump inlet; 5-lower pump body; 6-taper shrink nozzle; 7-piezoelectric vibrator; 8-lower chambers; 9-vibrating diaphragm; 10-column.
Embodiment
See Fig. 1, Fig. 2 and Fig. 3, the present invention includes upper pump casing 3 and lower pump body 5, upper pump casing 3 is positioned at directly over lower pump body 5, both central shaft conllinear.Connect with 4 root posts 10 between upper pump casing 3 and lower pump body 5, the surrounding place, outer of upper pump casing 3 is fixed in the upper end of column 10, and the surrounding place, outer of lower pump body 5 is fixed in the upper end of column 10.4 root posts 10 are along the circumferential direction evenly arranged, and the angle between the center of every two root posts 10 is 90 degree.Space between 4 root posts 10 forms pump inlet 4, and pump inlet 4 is circumferentially import.The space that 4 root posts 10, upper pump casing 3 and lower pump body 5 surround is upper chamber 1.Surrounding fluid enters in upper chamber 1 from the space pump inlet 4 between column 10.
Have pump discharge 2 in the middle of upper pump casing 3, pump discharge 2 communicates with upper chamber 1.Be provided with taper shrink nozzle 6 and lower chambers 8 in the middle of lower pump body 5, taper shrink nozzle 6 is positioned at directly over lower chambers 8, upper chamber 1 is done to be communicated with lower chambers 8, taper shrink nozzle 6 upper end is small end, be communicated with upper chamber 1, taper shrink nozzle 6 lower end is large end, is communicated with lower chambers 8.
Have vibrating diaphragm 9 immediately below the bottom of lower chambers 8, vibrating diaphragm 9 is bonded in the lower surface middle of lower pump body 5, and the lower surface middle bonding piezoelectric vibrator 7 of vibrating diaphragm 9, piezoelectric vibrator 7 is bonded on vibrating diaphragm 9 by conductive epoxy resin Bond.
Upper chamber 1, lower chambers 8 and pump inlet 2 are formed by deep reaction ion etching processes, upper pump casing 3, lower pump body 5 and 4 root post 10 are combined by gluing technique, vibrating diaphragm 9 is made by brass or other elastic materials, can with lower pump body 5 bonding or gummed, piezoelectric vibrator 7 is driving elements, is deposited on vibrating diaphragm 9 with sol gel process.
The shape of cross section of upper chamber 1, pump discharge 2, upper pump casing 3, lower pump body 5, taper shrink nozzle 6, piezoelectric vibrator 7, lower chambers 8 and vibrating diaphragm 9 is circle, and their central shaft in the vertical direction conllinear.
The upper-end inner diameter of taper shrink nozzle 6 is minimum, upper-end inner diameter D
afor 0.1mm-2mm, taper theta is 0 °-30 °, the vertical height H of the upper chamber 1 and upper-end inner diameter D of taper shrink nozzle 6
aratio range is 20-40, the internal diameter D of lower chambers 8
cwith the upper-end inner diameter D of taper shrink nozzle 6
aratio is greater than 50, the vertical depth of taper shrink nozzle 6 and upper-end inner diameter D
aratio range be 2-6.
Shown in Fig. 4 and Fig. 5, when the present invention works, piezoelectric vibrator 7 can produce inverse piezoelectric effect under periodically variable voltage signal, and vibrating diaphragm 9 produces periodic up-down vibration thereupon.See Fig. 4, in discharge process, when vibrating diaphragm 9 moves upward, at the upper end-face edge place of taper shrink nozzle 6, fluid is subject to strong shear action, thus producing flow separation formation whirlpool pair, whirlpool upwards flows to pump discharge 2 to the fluid entrainmenting surrounding, and a large amount of fluid enters into upper chamber 1 by pump inlet 4 simultaneously.See Fig. 5, in suction process, vibrating diaphragm 9 moves downward, and now, whirlpool before on the impact not being subject to suction process away from taper shrink nozzle 6, and is flowed out by pump discharge 2 together with the fluid entrainmented, and pump inlet 4 has fluid to flow in suction process always; According to the principle of synthesizing jet-flow, fluid in this suction and discharging alternately process, formed continuously whirlpool to and entrainment fluid and move to pump discharge 2, thus formed and go out stream continuously.
Claims (5)
1. a collapsible tube synthesizing jet-flow Valveless piezoelectric pump, comprise upper pump casing (3) and lower pump body (5), upper pump casing (3) is positioned at directly over lower pump body (5), it is characterized in that: the surrounding place, outer between upper pump casing (3) and lower pump body (5) connects 4 root posts (10), 4 root posts (10) are along the circumferential direction evenly arranged, space between 4 root posts (10) forms pump inlet (4), 4 root posts (10), the space surrounded between upper pump casing (3) and lower pump body (5) is upper chamber (1), fluid enters in upper chamber (1) from the pump inlet (4) between column (10), the middle of upper pump casing (3) has the pump discharge (2) communicated with upper chamber (1), the middle of lower pump body (5) is provided with lower chambers (8) and is positioned at the taper shrink nozzle (6) directly over lower chambers (8), taper shrink nozzle (6) is communicated in upper chamber (1) and lower chambers (8), and taper shrink nozzle (6) upper end is small end, lower end is large end, vibrating diaphragm (9) immediately below the bottom of lower chambers (8), vibrating diaphragm (9) lower surface middle bonding piezoelectric vibrator (7).
2. collapsible tube synthesizing jet-flow Valveless piezoelectric pump according to claim 1, is characterized in that: the upper-end inner diameter of taper shrink nozzle (6) is 0.1mm-2mm, and taper theta is 0 °-30 °.
3. collapsible tube synthesizing jet-flow Valveless piezoelectric pump according to claim 2, it is characterized in that: the vertical height of upper chamber (1) and the upper-end inner diameter ratio of taper shrink nozzle (6) are 20-40, the internal diameter of lower chambers (8) and the upper-end inner diameter ratio of taper shrink nozzle (6) are greater than 50, and the ratio of the vertical depth of taper shrink nozzle (6) and the upper-end inner diameter of taper shrink nozzle (6) is 2-6.
4. collapsible tube synthesizing jet-flow Valveless piezoelectric pump according to claim 1, it is characterized in that: the shape of cross section of upper chamber (1), pump discharge (2), upper pump casing (3), lower pump body (5), taper shrink nozzle (6), piezoelectric vibrator (7), lower chambers (8) and vibrating diaphragm (9) is circle, and their central shaft in the vertical direction conllinear.
5. collapsible tube synthesizing jet-flow Valveless piezoelectric pump according to claim 1, is characterized in that: vibrating diaphragm (9) is bonded in the lower surface middle of lower pump body (5).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610107655.8A CN105545712B (en) | 2016-02-29 | 2016-02-29 | Collapsible tube synthesizing jet-flow Valveless piezoelectric pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610107655.8A CN105545712B (en) | 2016-02-29 | 2016-02-29 | Collapsible tube synthesizing jet-flow Valveless piezoelectric pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105545712A true CN105545712A (en) | 2016-05-04 |
| CN105545712B CN105545712B (en) | 2017-07-18 |
Family
ID=55825163
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201610107655.8A Expired - Fee Related CN105545712B (en) | 2016-02-29 | 2016-02-29 | Collapsible tube synthesizing jet-flow Valveless piezoelectric pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105545712B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109281899A (en) * | 2017-07-19 | 2019-01-29 | 波音公司 | The synthesizing jet-flow of operatic tunes customization |
| CN110107487A (en) * | 2019-06-13 | 2019-08-09 | 吉林大学 | A kind of Valveless piezoelectric air pump based on synthesizing jet-flow principle |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6759159B1 (en) * | 2000-06-14 | 2004-07-06 | The Gillette Company | Synthetic jet for admitting and expelling reactant air |
| CN2818843Y (en) * | 2005-09-28 | 2006-09-20 | 吴丽萍 | Single-vibrator and double-cavity piezo-electric pump without valve |
| CN101397988A (en) * | 2008-09-26 | 2009-04-01 | 中国人民解放军国防科学技术大学 | Continuous flow micro-pump |
| CN101542122A (en) * | 2006-12-09 | 2009-09-23 | 株式会社村田制作所 | Piezoelectric micro-blower |
| CN103016296A (en) * | 2012-12-13 | 2013-04-03 | 江苏大学 | Piezoelectric micropump based on synthetic jet |
| CN103644098A (en) * | 2013-11-11 | 2014-03-19 | 江苏大学 | Synthetic jet type valveless piezoelectric pump capable of switching conveying directions and working method thereof |
-
2016
- 2016-02-29 CN CN201610107655.8A patent/CN105545712B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6759159B1 (en) * | 2000-06-14 | 2004-07-06 | The Gillette Company | Synthetic jet for admitting and expelling reactant air |
| CN2818843Y (en) * | 2005-09-28 | 2006-09-20 | 吴丽萍 | Single-vibrator and double-cavity piezo-electric pump without valve |
| CN101542122A (en) * | 2006-12-09 | 2009-09-23 | 株式会社村田制作所 | Piezoelectric micro-blower |
| CN101397988A (en) * | 2008-09-26 | 2009-04-01 | 中国人民解放军国防科学技术大学 | Continuous flow micro-pump |
| CN103016296A (en) * | 2012-12-13 | 2013-04-03 | 江苏大学 | Piezoelectric micropump based on synthetic jet |
| CN103644098A (en) * | 2013-11-11 | 2014-03-19 | 江苏大学 | Synthetic jet type valveless piezoelectric pump capable of switching conveying directions and working method thereof |
Non-Patent Citations (1)
| Title |
|---|
| 何秀华，等: "基于合成射流的无阀压电泵性能", 《北京工业大学学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109281899A (en) * | 2017-07-19 | 2019-01-29 | 波音公司 | The synthesizing jet-flow of operatic tunes customization |
| CN110107487A (en) * | 2019-06-13 | 2019-08-09 | 吉林大学 | A kind of Valveless piezoelectric air pump based on synthesizing jet-flow principle |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105545712B (en) | 2017-07-18 |
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Granted publication date: 20170718 Termination date: 20180229 |