CN206111498U - Valveless piezoelectric pump with filtering capability - Google Patents

Abstract

Valveless piezoelectric pump with filtering capability is including the pump body, pump cover and piezoelectric vibrator, the pump body is the circular slot form, and the pump cover shape is matchd with the open -top shape of the circular slot form pump body, installs the department in pump body open -top, forms a pump chamber structure with the pump body, is provided with fluid entry and fluid issuing on the circular slot form pump body lateral wall, in the pump chamber, be provided with transition ring, including the transition ring body, be provided with the overlap joint platform in the pump chamber, the overlap joint bench is arranged in to the transition ring body, be provided with the filtration pore on the transition ring body, transition ring includes one section annular side wall, the up end and lower extreme towards the transition ring outside extension of lateral wall, fluid entry and fluid issuing lie in between transition ring up end and the lower terminal surface, and transition ring surrounds with inner wall of the pump body and forms the filter chamber, be provided with on the inner wall transition ring with the communicating outflow through -hole of fluid issuing. The utility model provides a can accomplish the valveless piezoelectric pump with filtering capability to fluid filtration at pump sending fluid in -process, enlarge the application of valveless piezoelectric pump.

Description

Valveless piezoelectric pump with filtering function

Technical field

This utility model belongs to fluid machinery technical field, is related to a kind of Valveless piezoelectric pump, specifically, is related to a kind of tool There is the Valveless piezoelectric pump of filtering function.

Background technology

In chemical analyses and detection, biological engineering, the radiating of IC chip and cooling, miniature parts and miniature Change the fields such as production system (micro factory), be badly in need of high-performance, the liquid transporting apparatus of the tiny flow quantity of high reliability, this makes micro- The development and research of low discharge fluid pump has important practical significance.

Piezoelectric pump, as a kind of novel fluid driver in micropump field, is piezoelectric driving technology and fluid pump technology phase With reference to product.Piezoelectric driving technology be one using inverse piezoelectric effect come drive mechanism or the technology of fluid motion.

Develop rapidly recently as micromachining technology, MEMS (MEMS), micrometeor system also obtains Tremendous development.Piezoelectric pump as micromechanics fluid system an important branch, because its simple structure, small volume, it is lightweight, Consume energy low, noiseless, without electromagnetic interference the features such as, studied by numerous as microminiature fluid delivery system is more and more The favor of person, in precision instrument, biochemistry, medical apparatus and instruments, Aero-Space, biological gene engineering, chemical fuel supply, electronics The application succeeded in the field such as device Water Cooling Technology scheme and MEMS.

At present, valve piezoelectric pump and Valveless piezoelectric pump are two kinds of piezoelectric pumps for enjoying researchers to pay close attention to.

Having in valve piezoelectric pump pump chamber has moving valve body, thus can cause poor pump valve followability, valve sheet from being worn, pollution etc. Problem.Valveless piezoelectric pump is exactly without the entity valve of motion, the suction of fluid in pump in pump chamber with the maximum difference for having valve piezoelectric pump It is then " without the moving parts valve " that make use of the unsymmetrical knot of pipeline or pump chamber etc. to be configured to enter and discharge, and is forced the fluid along same One runner is flowed into, flow resistance suffered during pump chamber is flowed out, in a vibration period of piezoelectric vibrator, by same The fluid volume that runner is flowed in and out is necessarily unequal, which forms the one-way flow of macroscopically pump, reaches pumping fluid Function.

Valveless piezoelectric pump is due to the characteristic of its valveless so that again without any motion portion in addition to piezoelectric actuator in the pump housing Part, can thus be such that the physical dimension of pump is made very small in theory；Valveless piezoelectric pump operationally do not produce electromagnetic field and from Body pollution (unlubricated, without abrasion)；Valveless piezoelectric pump is easy to control because of its, it is easier to integrated and microminaturization, thus with wide Wealthy application prospect.

According to the difference of type of drive, Valveless piezoelectric pump can be divided into pipeline valve class pump (taper flow tube, Y shape flow tube, V-shaped flow Pipe, oval compound tube etc.), bottom of chamber valve class (such as bellows chamber bottom, conical cavity bottom), bluff body valve class (bluff body Valveless piezoelectric The compound bluff body Valveless piezoelectric pump of pump) etc., can realize well pumping the function of fluid.

But it is not only to need conveyance fluid to some operating modes, and requires to complete the mistake of convection cell while conveyance fluid Filter is acted on, such as：Filtration, the Biolagical fluid filteration of macromolecular particle, the filtration of chemical reagent, medical atomizing in biological tissue conveying The aspect such as impurity, filtration of microgranule in medical filtration, pesticide spray and fertigation system.And current Valveless piezoelectric pump is mostly It is used only to solely pump fluid without the effect of filtered fluid.

Utility model content

The purpose of this utility model is for the deficiencies in the prior art, there is provided a kind of during pumping fluid, can Complete the Valveless piezoelectric pump with filtering function of convection cell filtration.

The technical solution of the utility model is：Valveless piezoelectric pump with filtering function, including the pump housing, pump cover and piezoelectricity shakes Son；The pump housing is channel-shaped, the pump cover shape and the open top form fit of the channel-shaped pump housing, is installed on pump housing open top Place, with the pump housing pump chamber structure is formed, and on channel-shaped pump body sidewall fluid intake and fluid issuing are provided with；Fluid intake and fluid In pump chamber between outlet, filtration ring is provided with, including filters ring body；Overlap joint platform is provided with pump chamber, ring body is filtered and is put On overlap joint platform, and a filter chamber is surrounded with pump housing inwall；Filter and be provided with filtering holes in ring body；Ring body is filtered with overlap joint It is dismountable structure between platform；

Filtering ring includes one section of annular sidewall, and the upper surface and lower end of side wall extend towards ring outside is filtered；Filter ring with The joint of fluid issuing includes one section of entity extension by side wall to fluid issuing；Fluid intake end face disposed thereon is with Between end face, filter ring and form filter chamber with pump housing inner wall surrounding；It is provided with the outflow communicated with fluid issuing on filtration ring to lead to Hole.

Preferably：Filtering holes are bellmouth, and its slot one end, towards pump chamber, its wide opening one end is towards filter chamber.I.e. When fluid flows into pump chamber, after the wide mouth end, slot end Jing filter opening, pump chamber is flowed into；Filtrate from filtering holes slot end to wide opening Gradually pile up at end.

Preferably：Filtering holes are arranged on the lower surface for filtering ring, filter ring-side wall and upper surface is entity.This knot Structure, only filtering ring lower surface can form the passage filtered between ring and pump chamber, fluid can only Jing filter ring lower surface and flow out, One piezoelectric vibrator working cycle, during fluid reflux, it is to avoid cross multi-fluid Jing filtration ring-side wall and be back to filter chamber.

Preferably：Flowing out through hole includes the through hole that the through hole I communicated with filtration ring bottom pump chamber and fluid issuing are communicated II, through hole I is connected with through hole II.Fluid after filtration can be introduced in the pump chamber for filtering ring and pump housing bottom surface, through hole I and through hole II is that the fluid after filtering flows out pump chamber, and fluid reflux pump chamber provides flow pass.

Preferably：Filter ring includes that one section of entity by side wall to fluid issuing extends with the joint of fluid issuing Portion, flows out through hole and is located at entity extension.The filtration that this structure is formed the position of fluid through-hole with filtration ring body Chamber keeps apart, it is to avoid filters the fluid for flowing out and mixes with the unfiltered fluid of pump chamber is flowed into.

Preferably：Through hole II is also directly communicated with pump chamber.Through hole I is connected with through hole II and is capable of achieving through hole II with pump chamber Indirect communication, and through hole II is directly connected with pump chamber, the outflow and backflow for fluid provides another passage.Specifically, Through hole II via through holes I is communicated with the pump chamber for filtering ring bottom, and through hole II is directly communicated with the pump chamber for filtering ring top.Stream in pump chamber Body can the passage of via through holes I and through hole II flow out pump chamber, also can the passage of via through holes II flow directly out pump chamber, increased fluid stream The passage for going out, it is ensured that the stability of pumping fluid.

Preferably：Piezoelectric vibrator is installed on the upper surface for filtering ring body, is that on-fixed installs knot with interannular is filtered Sealing ring is installed between structure, and piezoelectric vibrator and pump cover.

Preferably：The fluid intake and fluid issuing are bell, and flow into the direction of pump chamber, fluid along fluid Taper of the entrance in expansion；The direction of pump chamber is flowed out along fluid, fluid issuing is also in the taper of expansion；And the cone angle of bell is little In 23 °.Valveless piezoelectric pump is conical pipe Valveless piezoelectric pump.

Preferably：Bluff body is provided with pump housing bottom surface, bluff body includes the drain face towards fluid intake and direction The choked flow face of fluid issuing.Valveless piezoelectric pump is bluff body Valveless piezoelectric pump.

Preferably：The pump housing bottom surface is provided with pump housing through hole, and it is stifled that pump housing through hole is provided with dismountable plug.Pull down After plug is stifled, gas or liquid can be passed through into pump chamber by pump housing through hole, ring is filtered in cleaning.

The beneficial effects of the utility model are：

(1) this utility model provide it is a kind of can pumping fluid during complete convection cell filtration with filtering function Valveless piezoelectric pump, make Valveless piezoelectric pump can be used for Biolagical fluid filteration, chemical reagent filter etc. it is multi-field, expand valveless pressure The application of electric pump.

(2) application for filtering ring not only increased the filtration of piezoelectric pump, simultaneously as it is non-interconnected ring, with stream Body entrance side is non-interconnected structure, is connectivity structure with fluid issuing side, and piezoelectric vibrator makes suction flow liquid process in swelling upwards In, flowing into pump chamber from the fluid of port of export backflow rather than flow into filter chamber, auxiliary improves fluid pumping and filter effect.

(3) filtering holes form micropore for Laser Processing, and processing technique is simple, and difficulty of processing is low, low cost.

(4) it is on-fixed attachment structure to filter between ring and the pump housing, and disassembling cleaning or dismounting and change filter ring, it is ensured that mistake Filter effect；Simultaneously Jing pump housing through holes are passed through water under high pressure or gases at high pressure, and for auxiliary cleaning ring is filtered；Conical filter pore structure, Straight hole is compared, when back flush is carried out, impurity deposit is more conducive to be cleaned out from filtering holes.

(5) flow out through hole and may be designed as that single current portals or double fluid portals, going out pore structure using double fluid can make in the unit interval The output of fluid, dramatically increases, and improves the pumping effect of traditional Valveless piezoelectric pump.

Description of the drawings

Fig. 1 is this utility model structural representation.

Fig. 2 is this utility model overlooking the structure diagram.

Fig. 3 is filtration ring structure schematic diagram.

Fig. 4 is filtration ring overlooking the structure diagram.

Fig. 5 is filtration ring structure schematic diagram.

Fig. 6 is filtering holes structural representation (I portions enlarged drawing in Fig. 3).

Fig. 7 is taper flow tube Valveless piezoelectric pump pump body structure schematic diagram.

Fig. 8 is bluff body Valveless piezoelectric pump pump body structure schematic diagram.

Wherein：The 1- pump housings, 101- fluid intakes, 102- fluid issuings, 104- overlap joint platforms, 2- pump covers, 3- piezoelectric vibrators, 4- Ring is filtered, 401- sides wall, 402- upper surfaces, 403- lower surfaces, 404- entity extensions, 5- sealing rings, 6- flows out through hole, 601- Through hole I, 602- through hole II, 7- pump housing through hole, 8- plugs, 9- bluff bodys

Specific embodiment

Specific embodiment of the present utility model is conducted further description below with reference to accompanying drawing.

Valveless piezoelectric pump with filtering function, including the pump housing 1, pump cover 2 and piezoelectric vibrator 3.

As depicted in figs. 1 and 2, the pump housing 1 is channel-shaped, and the section of the present embodiment middle pump body 1 is circle, including one section of cylindrical shape Cell body, the top of the pump housing 1 has circular top opening.The shape of pump cover 2 and the open top form fit of the channel-shaped pump housing 1, install In the top open part of the pump housing 1, pump cover 2 covers the notch of the pump housing 1, and forms a pump chamber structure with the pump housing 1.The side wall of the channel-shaped pump housing 1 On be provided with fluid intake 101 and fluid issuing 102；During Valveless piezoelectric pump work, fluid Jing fluid intakes 101 are flowed into and Jing streams Body outlet 102 is flowed out, and the position to reach the effect of preferably pumping fluid, fluid intake 101 and fluid issuing 102 is further On same axis.

For the effect for realizing filtering during pumping fluid, between fluid intake 101 and fluid issuing 102 In pump chamber, filtration ring 4 is provided with, including filters ring body；Pump chamber inner circumferential is provided with overlap joint platform 104, filters ring body and puts It is on-fixed attachment structure between the pump housing 1 on overlap joint platform 104, it is detachable；Filter and be provided with filtration in ring body Hole.When filter opening, impurity is filtered fluid stream.

Used as a kind of embodiment, filtering the shape of ring 4 can adopt a kind of knot for covering overlap joint 104 1 weeks end faces of platform Structure, filters ring 4 and is located under fluid intake 101, on fluid issuing 102, then during piezoelectric vibrator 3 is actuated, and fluid Jing streams After body entrance is flowed into, again Jing fluid issuings 102 flow out Jing after filtering ring 4 and filter.

But used as another kind of more excellent embodiment, this utility model devises a kind of structure of Novel filtration ring 4.

As shown in Figures 3 to 5, filtering ring 4 includes one section of annular sidewall 401, the upper surface 402 of side wall 401 and lower surface 403 extend to the outside of ring 4 is filtered；Fluid intake 101 and fluid issuing 102 are located at and filter the upper surface 401 of ring 4 and lower surface 402 Between, to filter and be provided with the outflow through hole 6 communicated with fluid issuing 102 on ring 4.Filter ring 4 this structure make its body with The inwall of the pump housing 1 cooperatively forms a filter chamber, after fluid is flowed into, initially enter for the filter chamber.Filtering holes were arranged at The lower surface of filter ring body.

As two kinds of different embodiments, Yi Zhongwei：Can be in upper surface 402, side wall 401 and the lower end for filtering ring 4 Face 403 is respectively provided with filtering holes, and the advantage of this structure is, when the fluid for flowing into filter chamber is excessive, can to increase filter efficiency； But problem is also brought along, when fluid reflux is to pump chamber, the fluid after excessive filtration can back flow back into filter chamber through filter opening.And Another embodiment is：Only filtering holes are set in the lower surface 403 for filtering ring 4, while completing to filter,

Flowing out through hole includes being located at the through hole I601 communicated with pump chamber of filtration ring body bottom surface and positioned at filtration ring body The through hole II602 that side wall is communicated with fluid issuing, through hole I601 are connected with through hole II602.

Further, through hole II602 is also communicated with pump chamber.

Piezoelectric vibrator 3 is installed on the upper surface for filtering the body of ring 4, install for on-fixed, removably between ring 4 with being filtered Structure, is the sealing for strengthening Valveless piezoelectric pump, and sealing ring 5 is provided between piezoelectric vibrator 3 and pump cover.

The effect that ring 4 is not only filtered is filtered, in the contraction process of piezoelectric vibrator 3, fluid Jing fluid issuings 102 flowed back Cheng Zhong, fluid is directly flowed in pump chamber, and minority of fluid flows back through filter opening, the not direct impact fluid entrance of reflux fluid 101 fluids for flowing into, strengthen piezoelectric pump filter efficiency.

As shown in fig. 6, filtering holes are bellmouth, and its slot one end is towards pump chamber.Specifically as shown in fig. 6, filtering holes tool There is the cone angle that longitudinal profile is presented to be θ.When this structure ensures that fluid Jing fluid intakes 101 flow into pump chamber, first pass around For the wide mouth end of filtering holes.

Already described above, according to the difference of type of drive, Valveless piezoelectric pump can be divided into pipeline valve class pump (taper flow tube, Y shape stream Pipe, V-shaped flow pipe, oval compound tube etc.), bottom of chamber valve class (such as bellows chamber bottom, conical cavity bottom), bluff body valve class etc. can The function of pumping fluid is realized well.Valveless piezoelectric pump with filtering function is applied to the Valveless piezoelectric of any of the above form Pump, it is only necessary to which pump chamber inner structure is changed accordingly.

Therefore, it is the function of realization more preferably Valveless piezoelectric pump, also needs further to design pump body structure.

As shown in fig. 7, as a kind of embodiment, devising a kind of conical pipe Valveless piezoelectric pump.Fluid intake 101 and stream Body outlet 102 is bell, and flows into the direction of pump chamber, taper of the fluid intake 101 in expansion along fluid；Flow out along fluid The direction of pump chamber, fluid issuing 102 is also in the taper of expansion；And the cone angle of bell is less than 23 °

According to experimental verification, the fluid intake 101 of bell Valveless piezoelectric pump and determination and the bell of fluid issuing 102 Cone angle scope it is relevant.Wherein bell can be divided into cone expansion mouth or taper contraction mouth, cone expansion mouth and taper contraction mouth Definition be to define by the difference of bell cone angle, cone angle is different, and the flow direction that fluid is flowed in and out is also different, works as cone angle During scope between 30 °～120 °, fluid along the bell influx shunk more than the bell along expansion influx, i.e., Macroscopically, fluid is flowed into along the bell for shrinking, and bell is defined as taper contraction mouth；When cone angle is less than 30 °, fluid is along expansion More than the influx along the bell for shrinking, i.e., macroscopically, fluid is flowed into the influx of the bell opened along the bell expanded, Bell is defined as cone expansion mouth.Relative to the application, using cone expansion mouth, when cone angle scope is respectively less than 23 °, it is Fluid issuing 102 is flowed to by fluid intake 101, and preferably pumping fluid effect can be obtained.

It is that piezoelectric vibrator 5 is powered during Valveless piezoelectric pump work, it will do protuberance and the reciprocal transformation to lower recess upwards Motion.When piezoelectric vibrator 5 swells upwards, pump chamber increase, intracavity pressure reduces, and produces negative pressure, makees in external atmosphere pressure It is co-flowed in pump chamber with lower fluid Jing fluid intakes 101 and fluid issuing 102, due to the flowing of the convection cell of fluid intake 101 Resistance is less than the flow resistance of the convection cell of fluid issuing 102, therefore, the fluid flowed into from fluid intake 101 is more than to go out from fluid The fluids that mouth 102 is flowed into；When piezoelectric vibrator 5 is to lower recess, pump chamber reduces, and intracavity pressure increase, fluid Jing fluids enter Mouth 101 and fluid issuing 102 flow out in pump chamber jointly, because the flow resistance of the convection cell of fluid intake 101 is more than fluid issuing The flow resistance of 102 convection cells, therefore, the fluid flowed out from fluid intake 101 is less than the fluid flowed out from fluid issuing 102.

Fluid is entered after pump chamber, is filtering the filtration intracavity flowing that ring 4 is formed, and Jing after filtering ring 4 and filter, is flowed into and is filtered ring In 4 cavitys formed with pump housing bottom surface.Increase with incoming fluid, the liquid level of fluid gradually increases.When fluid level exceedes through hole During the height of I601, through hole I601 is crossed, via through holes II602, fluid issuing 102 are flowed out outside pump chamber.

Some fluid Jing fluid issuings 102 are understood during swelling upwards in view of piezoelectric vibrator 5 to flow back, and to be protected Card flows out the fluid of pump chamber and does not mix with unfiltered fluid, further includes with the joint of fluid issuing 102 in filtration ring 4 One section of entity extension 404 by side wall to fluid issuing, flows out through hole 6 and is located at entity extension 404, i.e. through hole I601 Jing Entity extension 404 downwards with filter the pump chamber between ring 4 and pump housing bottom surface and communicate, through hole II602 Jing entities extension 404 to Fluid issuing 102 extends, and communicates with fluid issuing；And through hole I601 is connected with through hole II602.

As shown in figure 8, as another embodiment, devising a kind of bluff body Valveless piezoelectric pump.The pump housing sets on ground Bluff body is equipped with, bluff body includes the drain face and the choked flow face towards fluid issuing towards fluid intake.

Bluff body Valveless piezoelectric pump is with conical pipe Valveless piezoelectric pump difference, the flow resistance of conical pipe Valveless piezoelectric pump Effect is to examine fluid intake 101 and the mating reaction of fluid issuing 102 realization, and the flow resistance effect of bluff body Valveless piezoelectric pump is to lean on Be placed in bluff body on pump housing base drain and choked flow effect and realize.Bluff body can be using such as segment, spherical shell, prism, cone Two-dimentional, the three-dimensional resistance structure with unsymmetric structure such as platform.The less one side of convection cell resistance is used as drain face, convection cell resistance Larger one side is used as choked flow face.

It is that piezoelectric vibrator 5 is powered during Valveless piezoelectric pump work, it will do protuberance and the reciprocal transformation to lower recess upwards Motion.When piezoelectric vibrator 5 swells upwards, pump chamber increase, intracavity pressure reduces, and produces negative pressure, makees in external atmosphere pressure It is co-flowed in pump chamber with lower fluid Jing fluid intakes 101 and fluid issuing 102.Because bluff body drain is in the face of the resistance of fluid It is relatively small, therefore, the fluid flowed into from fluid intake 101 is more than the fluid flowed into from fluid issuing 102；When piezoelectric vibrator 5 During to lower recess, pump chamber reduce, intracavity pressure increase, due to bluff body choked flow in the face of fluid resistance it is relatively large, because This, the fluid flowed out from fluid intake 101 is less than the fluid flowed out from fluid issuing 102.In one cycle of operation, fluid is realized From fluid intake 101 to the relative motion of fluid issuing 102.

In the same manner, fluid is entered after pump chamber, is filtering the filtration intracavity flowing that ring 4 is formed, and Jing after filtering ring 4 and filter, is flowed into Filter in the pump chamber between ring 4 and pump housing bottom surface.Increase with incoming fluid, the liquid level of fluid gradually increases.When fluid level surpasses When crossing the height that UNICOM goes out between through hole II602 and pump chamber, fluid directly via through holes II602, fluid issuing 102 can flow out pump chamber Outward.

Further, the life-time service of ring 4 is filtered, filtrate will block filtering holes, and can pull down pump cover 2, and unload lower piezoelectric and shake Son 5, and take out ring 4 is filtered, clean or change.

Ring is filtered in the cleaning to be more convenient for, it is to avoid the trouble dismantled during cleaning every time, further arranges a pump in the bottom surface of the pump housing 1 Body through hole 7, is provided with dismountable plug and blocks up at pump housing through hole 7, plug is stifled in the present embodiment adopts plug 8.Valveless piezoelectric pump is used When, plug blocks pump housing through hole 7, during clean filtering ring 4, takes out plug 8 at pump housing through hole 7, and Jing pump housings through hole 7 is to the inside of pump chamber It is passed through gas or water under high pressure.The flow direction of gas or water under high pressure and fluid stream through filter opening flow direction conversely, playing instead to filtering holes To the effect of impact, the medium back flush such as the granule being stuck in filtering holes, impurity is gone out, and along current or air-flow Jing fluids Entrance 101 or fluid issuing 102 are discharged.Compared with using Cylindrical filter hole, more conducively rinsed using conical filter.

Claims (10)

1. there is the Valveless piezoelectric pump of filtering function, including the pump housing, pump cover and piezoelectric vibrator；It is characterized in that：The pump housing is Circular groove shape, the pump cover shape and the open top form fit of the circular groove shape pump housing, are installed on pump housing top open part, with the pump housing A pump chamber structure is formed, on circular groove shape pump body sidewall fluid intake and fluid issuing are provided with；In pump chamber, filtration ring is provided with, Including filtration ring body；Overlap joint platform is provided with pump chamber, ring body is filtered and is placed on overlap joint platform；Filter and be provided with ring body Filter opening；

The filtration ring includes one section of annular sidewall, and the upper surface and lower end of side wall extend towards ring outside is filtered；Fluid intake And fluid issuing is located at and filters between ring upper surface and lower surface, filter ring and form filter chamber with pump housing inner wall surrounding；Inwall mistake The outflow through hole communicated with fluid issuing is provided with filter ring.

2. there is as claimed in claim 1 the Valveless piezoelectric pump of filtering function, it is characterised in that：The filtering holes were arranged on The lower surface of filter ring, filters ring-side wall and upper surface is entity.

3. there is as claimed in claim 1 the Valveless piezoelectric pump of filtering function, it is characterised in that：It is described outflow through hole include with The through hole II that the through hole I and fluid issuing that filtration ring bottom pump chamber is communicated is communicated, through hole I are connected with through hole II.

4. there is as claimed in claim 3 the Valveless piezoelectric pump of filtering function, it is characterised in that：The through hole II also with pump chamber Communicate.

5. the Valveless piezoelectric pump with filtering function as described in claim 3 or 4, it is characterised in that：Filter ring to go out with fluid The joint of mouth includes one section of entity extension by side wall to fluid issuing, flows out through hole and is located at entity extension.

6. the Valveless piezoelectric pump with filtering function as claimed in claim 1 or 2 or 3 or 4, it is characterised in that：The filtration Hole is bellmouth, and its slot one end is towards pump chamber.

7. there is as claimed in claim 1 the Valveless piezoelectric pump of filtering function, it is characterised in that：The piezoelectric vibrator is installed on Filter on the upper surface of ring body, be on-fixed mounting structure with interannular is filtered, and be provided between piezoelectric vibrator and pump cover close Seal.

8. there is as claimed in claim 1 the Valveless piezoelectric pump of filtering function, it is characterised in that：The fluid intake and fluid Outlet is bell, and flows into the direction of pump chamber, taper of the fluid intake in expansion along fluid；The side of pump chamber is flowed out along fluid To fluid issuing is also in the taper of expansion；And the cone angle of bell is less than 23 °.

9. there is as claimed in claim 1 the Valveless piezoelectric pump of filtering function, it is characterised in that：Arrange on the pump housing bottom surface There is bluff body, bluff body includes the drain face and the choked flow face towards fluid issuing towards fluid intake.

10. the Valveless piezoelectric pump with filtering function as described in claim 1,2,3,6,7 or 8, it is characterised in that：The pump Body bottom surface is provided with pump housing through hole, and it is stifled that pump housing through hole is provided with dismountable plug.