CN105513991B - The control method of chip image is obtained using chip motion camera sleep mode - Google Patents
The control method of chip image is obtained using chip motion camera sleep mode Download PDFInfo
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- CN105513991B CN105513991B CN201510917835.8A CN201510917835A CN105513991B CN 105513991 B CN105513991 B CN 105513991B CN 201510917835 A CN201510917835 A CN 201510917835A CN 105513991 B CN105513991 B CN 105513991B
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- chip
- chi frame
- guide rail
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Image Processing (AREA)
- Investigating Or Analysing Biological Materials (AREA)
- Image Analysis (AREA)
Abstract
The present invention provides a kind of control method obtaining chip image using chip motion camera sleep mode, including：Chi frame is enabled to be moved on guide rail；In chi frame when the speed moved on guide rail reaches a pre-set velocity value, enable chi frame that the pre-set velocity value is kept at the uniform velocity to be moved on guide rail；When chi frame is by the sensor that is arranged below guide rail, start the camera being arranged above guide rail, and taken pictures to the chip on chi frame by the through-hole on chi frame to trigger camera by tactility apparatus, obtains chip image and simultaneously exported.The present invention is simultaneously more efficient by artificial detection mode in the prior art.
Description
Technical field
The present invention relates to chip detection fields, and core is obtained using chip motion camera sleep mode more particularly to a kind of
The control method of picture.
Background technology
It is chip to restrict China's development of computer and universal one of key technology, and the development bottleneck of chip is manufacturing equipment
And production technology.Can Godson popularize one of the key factor on China's computer, and to be exactly China's manufacture of microchips must grasp
The production technology of chip.There are many technology that production technology is related to, and the appearance detection wherein in chip manufacturing proces is important content
One of.The appearance detecting system of current chip manufacturing process is substantially the standard and technology of U.S. INTEL and ADM company.I
There is presently no a set of such chip appearance detecting systems for state.Therefore China's self-developing chip appearance detecting system is to China
Chip manufacturing is an extremely important project and engineering.
It is mainly still realized by picture Processing Technique in the approach for carrying out appearance to chip, it is being handled into picture
Before, need the image for getting chip to be detected.How chip image is quickly and accurately got, just at this field skill
Art personnel problem to be solved.
Invention content
In view of the foregoing deficiencies of prior art, it is quiet using chip motion camera that the purpose of the present invention is to provide a kind of
Only mode obtains the control method of chip image, and the appearance detection of chip is carried out for obtaining chip image, existing to solve
Have in technology that artificial detection chip efficiency is low, can not ensure the problems such as product quality.
In order to achieve the above objects and other related objects, the present invention provides following technical scheme：
A kind of control method obtaining chip image using chip motion camera sleep mode, including：
Chi frame is enabled to be moved on guide rail；
In chi frame when the speed moved on guide rail reaches a pre-set velocity value, chi frame is enabled to keep the default speed
Angle value at the uniform velocity moves on guide rail；
When chi frame is by the sensor that is arranged below guide rail, start the camera being arranged above guide rail, and by
Tactility apparatus takes pictures to the chip on chi frame to trigger camera by the through-hole on chi frame, obtains chip image simultaneously
It is exported.
As described above, the present invention at least has the advantages that：It is moved on guide rail by chi frame, and by camera
The mode of static setting takes pictures to chip, to ensure that the chip on chi frame unanimously keeps being moved without stop,
Improve the efficiency for obtaining picture.
Description of the drawings
Fig. 1 is shown as a kind of schematic diagram of chip image acquisition device provided by the invention；
Fig. 2 is shown as the vertical view of the chip image acquisition device chips frame；
Fig. 3 is shown as a kind of control obtaining chip image using chip motion camera sleep mode provided by the invention
The flow chart of method.
Specific implementation mode
Illustrate that embodiments of the present invention, those skilled in the art can be by this explanations by particular specific embodiment below
Content disclosed by book understands other advantages and effect of the present invention easily.
It should be clear that structure, ratio, size etc. depicted in this specification institute accompanying drawings, only coordinating specification to be taken off
The content shown is not limited to the enforceable qualifications of the present invention so that those skilled in the art understands and reads, therefore
Do not have technical essential meaning, the modification of any structure, the change of proportionate relationship or the adjustment of size are not influencing the present invention
Under the effect of can be generated and the purpose that can reach, it should all still fall and obtain the model that can cover in disclosed technology contents
In enclosing.Meanwhile cited such as "upper" in this specification, "lower", "left", "right", " centre " and " one " term, be also only
Convenient for being illustrated for narration, rather than to limit the scope of the invention, relativeness is altered or modified, in no essence
It changes under technology contents, when being also considered as the enforceable scope of the present invention.
Such as Fig. 1 and Fig. 2, a kind of schematic diagram of chip image acquisition device is provided in Fig. 1, Fig. 2 is that the chip image obtains
The vertical view for taking device chips frame can be quickly obtained the image of chip by the chip image acquisition device, in turn
Computer and software is recycled to handle image, to realize the detection to chip appearance.As shown, the chip image
Acquisition device includes a guide rail 2 and the chi frame 1 for being moved on guide rail 2, wherein is provided on chi frame 1 more
A chip installation position 11, and through-hole 12 is offered at 11 place arranged side by side of chip installation position, in addition, sensor 3 is set below guide rail 2,
It is further fixedly arranged on a camera 4 with 2 top of guide rail of 3 face of sensor.
By said chip image acquiring device, it can be connected to control machine 5 or PC machine etc., pass through control machine 5
Or PC machine controls the chip image acquisition device to realize, to obtain chip image.Specific control method, can be with
It is illustrated by following embodiment.
Fig. 3 is referred to, shows and provided by the invention a kind of obtaining chip figure using chip motion camera sleep mode
The flow chart of the control method of picture, as shown, below chip will be obtained using chip motion camera sleep mode to described
Each realization step of the control method of image is described in detail.
Step S11, enables chi frame be moved on guide rail.
Step S12 enables chi frame keep in chi frame when the speed moved on guide rail reaches a pre-set velocity value
The pre-set velocity value at the uniform velocity moves on guide rail.
In specific implementation, it may be implemented to install by machine or the artificial chip that chip is placed on to chi frame
On position, then chi frame is allowed to be moved on guide rail.
Specifically, chi frame moves on guide rail, can draw in row driving by motor and belt to carry out.
Step S13 starts the picture being arranged above guide rail when chi frame is by the sensor that is arranged below guide rail
Machine, and taken pictures to the chip on chi frame by the through-hole on chi frame to trigger camera by tactility apparatus, obtain core
Picture is simultaneously exported.
In specific implementation, chi frame moves after loading onto chip towards at camera, during this, the speed of movement
Degree by slowly arrive block, later arrival one preset velocity amplitude after and carry out uniform motion, to ensure that camera can take cleaning
Chip image.
Specifically, through-hole is offered with chip installation position place arranged side by side on chi frame, is mounted below guide rail for allowing
The trigger signal that sends out of tactility apparatus can.
For more specifically, which may be used photoelectric sensor, and photoemitter is arranged below guide rail, receives
Device is arranged on camera, when chi frame enters above sensor, shuts out the light and is opened to trigger the camera being located above, it
Light can take pictures to trigger camera with the movement of chi frame discontinuously to be passed through from through-hole afterwards.
For to sum up, the present invention realizes the continuous moving of chip by movement of the chi frame on guide rail, and utilizes
It is fixed on the camera above guide rail to take pictures to the chip on chi frame, opposite manual detection mode is more efficient.So
The present invention effectively overcomes various shortcoming in the prior art and has high industrial utilization.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe
The personage for knowing this technology can all carry out modifications and changes to above-described embodiment without violating the spirit and scope of the present invention.Cause
This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as
At all equivalent modifications or change, should by the present invention claim be covered.
Claims (1)
1. a kind of control method obtaining chip image using chip motion camera sleep mode, for on chi frame
Chip is taken pictures, which is characterized in that is provided with multiple chip installation positions on chi frame, and is located side by side in chip installation position
Through-hole is offered, the control method includes：
Chi frame is enabled to be moved on guide rail；
In chi frame when the speed moved on guide rail reaches a pre-set velocity value, chi frame is enabled to keep the pre-set velocity value
It is at the uniform velocity moved on guide rail；
When chi frame is by the sensor that is arranged below guide rail, start the camera being arranged above guide rail, and by sense of touch
Device takes pictures to the chip on chi frame to trigger camera by the through-hole on chi frame, obtains chip image and gives
Output；
Wherein, the sensor is photoelectric sensor, and photoemitter is arranged below guide rail, and receiver is arranged on camera,
When chi frame enters above sensor, shuts out the light and opened to trigger the camera being located above, light can be with core later
The movement of piece frame is taken pictures discontinuously to be passed through from through-hole to trigger camera.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510917835.8A CN105513991B (en) | 2015-12-14 | 2015-12-14 | The control method of chip image is obtained using chip motion camera sleep mode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510917835.8A CN105513991B (en) | 2015-12-14 | 2015-12-14 | The control method of chip image is obtained using chip motion camera sleep mode |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105513991A CN105513991A (en) | 2016-04-20 |
| CN105513991B true CN105513991B (en) | 2018-07-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510917835.8A Active CN105513991B (en) | 2015-12-14 | 2015-12-14 | The control method of chip image is obtained using chip motion camera sleep mode |
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| Country | Link |
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Citations (7)
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| CN1811337A (en) * | 2005-01-28 | 2006-08-02 | 雅马哈发动机株式会社 | Checking result informing device |
| WO2010019980A1 (en) * | 2008-08-19 | 2010-02-25 | Silverbrook Research Pty Ltd | Measuring apparatus for performing positional analysis on an integrated circuit carrier |
| CN101957196A (en) * | 2010-07-15 | 2011-01-26 | 上海大学 | Machine vision based automatic detection device of anastomat |
| TWM406733U (en) * | 2011-01-24 | 2011-07-01 | Better Auto System Co Ltd | Chip appearance inspection machine |
| CN102470688A (en) * | 2009-07-09 | 2012-05-23 | 联邦印刷厂有限公司 | Method and APPARATUS FOR PRODUCING AN INLAY FOR A FILM COMPOSITE, AND FILM COMPOSITE WITH INLAY |
| CN102564319A (en) * | 2011-12-30 | 2012-07-11 | 清华大学 | Method for detecting slip during linear delivery of wafer by using image processing technology |
| DE102015122726A1 (en) * | 2015-12-23 | 2017-06-29 | Bundesdruckerei Gmbh | Inspection device and method for verifying a chip card semi-finished product |
-
2015
- 2015-12-14 CN CN201510917835.8A patent/CN105513991B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1811337A (en) * | 2005-01-28 | 2006-08-02 | 雅马哈发动机株式会社 | Checking result informing device |
| WO2010019980A1 (en) * | 2008-08-19 | 2010-02-25 | Silverbrook Research Pty Ltd | Measuring apparatus for performing positional analysis on an integrated circuit carrier |
| CN102470688A (en) * | 2009-07-09 | 2012-05-23 | 联邦印刷厂有限公司 | Method and APPARATUS FOR PRODUCING AN INLAY FOR A FILM COMPOSITE, AND FILM COMPOSITE WITH INLAY |
| CN101957196A (en) * | 2010-07-15 | 2011-01-26 | 上海大学 | Machine vision based automatic detection device of anastomat |
| TWM406733U (en) * | 2011-01-24 | 2011-07-01 | Better Auto System Co Ltd | Chip appearance inspection machine |
| CN102564319A (en) * | 2011-12-30 | 2012-07-11 | 清华大学 | Method for detecting slip during linear delivery of wafer by using image processing technology |
| DE102015122726A1 (en) * | 2015-12-23 | 2017-06-29 | Bundesdruckerei Gmbh | Inspection device and method for verifying a chip card semi-finished product |
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| Publication number | Publication date |
|---|---|
| CN105513991A (en) | 2016-04-20 |
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