CN105489526A - Shunt supercharging device for semiconductor equipment and control method for shunt supercharging device - Google Patents
Shunt supercharging device for semiconductor equipment and control method for shunt supercharging device Download PDFInfo
- Publication number
- CN105489526A CN105489526A CN201410479987.XA CN201410479987A CN105489526A CN 105489526 A CN105489526 A CN 105489526A CN 201410479987 A CN201410479987 A CN 201410479987A CN 105489526 A CN105489526 A CN 105489526A
- Authority
- CN
- China
- Prior art keywords
- electrical control
- control electric
- supercharging device
- air
- electric fan
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
The invention relates to a shunt supercharging device for semiconductor equipment and a control method for the shunt supercharging device. The shunt supercharging device comprises an air-splitting box, electric control fans, a fan controller and a power supply, wherein an air-collecting port is aligned to an air outlet of an air supply system for shunting the air from the air outlet; air-scattering ports are connected with the electric control fans respectively; the number of the electric control fans is two, and the two electric control fans are both connected with the air-splitting box separately; the fan controller is connected with the electric control fans and used for controlling the rotating speeds of the electric control fans to further adjust air flow and uniformity; and the power supply is connected with the fan controller and used for supplying power to the fan controller. The control method comprises the steps that a set rotating speed is input through an input apparatus of the fan controller; the actual rotating speed of the electric control fans is subtracted from the set rotating speed, and inputting the difference value between the actual rotating speed and the rate rotating speed into a processor of the fan controller; and the processor of the fan controller converts the input difference value into a PWM value through PID control, and transmits the PWM value to the electric control fans. According to the control method for the shunt supercharging device, the shunt supercharging regulation is carried out through the air flow distribution of the power supply system, the uniformity of the air flow in an operating region is ensured, re-processing time is saved to a large extent, and adjustment period of equipment is reduced.
Description
Technical field
The present invention relates to semicon industry production field, be specially a kind of semiconductor equipment shunting supercharging device and control method thereof.
Background technology
In the production process of semiconductor front road technique wafer, because process complexity is with high costs, to wafer production capacity and yield requirement very strict.In semiconductor equipment actual production, can often production capacity be caused to reduce, cannot conforming product rate be met because of the inhomogeneities of device interior humiture and wind flow.In prior art, the direct air draft of air feed system is to working region, and the distribution of air feed system and inhomogeneities cannot ensure wafer process demand, needs repeatedly to adjust, and has a strong impact on the activity duration, reduces accepted product percentage.
Summary of the invention
For above shortcomings part in prior art, the technical problem to be solved in the present invention is to provide a kind of semiconductor equipment shunting supercharging device and control method thereof, solves in prior art and makes the susceptible problem of wafer process precision because of the inhomogeneities of air feed system wind flow.
The technical scheme that the present invention is adopted for achieving the above object is: a kind of semiconductor equipment shunting supercharging device, comprising:
Divide wind box, comprise a collection air port and multiple loose air port, collection air port is communicated with loose air port, and the air outlet of air feed system is aimed in collection air port, and shunt the wind of air outlet, each loose air port connects 1 electrical control electric fan;
Electrical control electric fan, for multiple, its quantity is consistent with loose inlet number, all connects a point wind box;
Fan governor, connects electrical control electric fan, for controlling the rotating speed of electrical control electric fan, and then regulates wind flow and uniformity;
Power supply, connects described fan governor, for powering to described fan governor.
Described fan governor comprises:
Processor, connects electrical control electric fan, receives the frequency signal of electrical control electric fan, the pwm signal of generation is passed to electrical control electric fan;
Display unit, connection handling device, for showing wind speed;
Input unit, connection handling device, carries out wind speed setting for outside.
Described fan governor also comprises house dog, connection handling device, for making processor reset when processor program occurs abnormal.
Described power supply is 24V DC power supply.
A control method for semiconductor equipment shunting supercharging device, comprises the following steps:
By the input unit input setting speed R in fan governor;
Actual speed Y setting speed R being deducted electrical control electric fan is input in the processor in fan governor;
Described input is converted to PWM value by following formula by the processor in fan governor, and by this PWM value transmit to electrical control electric fan:
Wherein, e=R-Y is setting speed and actual difference, and u is that controller exports PWM value, and Y is electrical control electric fan actual speed, and t is the time, K
pfor proportional control parameter, K
iintegral control parameter, K
dfor differential controling parameters.
The present invention has the following advantages and beneficial effect:
1. the present invention carries out the adjustment of shunting supercharging by the wind flow distribution of air feed system, ensure that the uniformity of operating area wind flow, saves the reprocessing time to a great extent, reduce equipment adjustment cycle.
2. the present invention adopts automatically controlled adjustment electrical control electric fan rotating speed, effectively can improve the uniformity of simple operation and the distribution of operating area wind flow.
3. the present invention adopts a point wind box structure, the systematic wind flow to air feed system and uniformity can distribute, improves equipment to the craft precision requirement of wind flow, promote the efficiency of actual production.
4. the present invention has structure simply, and it is convenient to realize, lower-price characteristic.
Accompanying drawing explanation
Fig. 1 is the enforcement illustration of apparatus of the present invention application;
Wherein, 1,24V power supply, 2, fan governor, 3, air feed system, 4, air feed system air volume adjustment, 5, point wind box, 6, pressurized electrically controlled fan, 7, shunting supercharging wind flow distribution;
Fig. 2 is fan governor principle schematic;
Fig. 3 is pid algorithm schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the present invention is described in further detail.
Apparatus of the present invention are used for semiconductor equipment air feed system place, make the wind flow of operating area can meet technological requirement needed for equipment, reach the craft precision effectively improving semiconductor crystal wafer and the object of saving the equipment availability time.
The present invention is arranged on semiconductor equipment air feed system bottom.The air duct provided when air feed system works is single and wind flow is uneven, cannot meet the process requirements of operating area wafer.Shunting supercharging device provided by the present invention optionally can regulate electrical control electric fan rotating speed according to the process requirements of the uneven distribution of air feed system and equipment.
Specific works process of the present invention is as follows:
Single and in uneven situation in air feed system 3 air draft distribution channel, as shown in Figure 1, shunted by point wind box 5 pairs of air feed systems 3 air draft, and provide power supply by 24V power supply 1 pair of fan governor 2, the rotating speed of fan governor 2 pairs of electrical control electric fans 6 regulates, a point wind flow for wind box 5 is uniformly distributed, and the even wind flow 7 of final formation is delivered to operating area.
When changing uneven wind flow in air feed system, the adjustment of many gears can be carried out according to its inhomogeneities to fan governor 2, making electrical control electric fan 6 supercharging on point wind box 5 form the distinguished and admirable of stable and uniform, finally realizing air draft even, meet process requirements.
Fan governor adopts ARM to be processor, by gathering the input set target pressure of button, target electrical control electric fan feedback rotating speed, processor carries out PID arithmetic by the current rotating speed of electrical control electric fan and rotating speed of target, with PWM, PID adjustment is carried out to electrical control electric fan, as shown in Figure 2, this control method controls to have the advantages such as high speed, low error than general linear.
Fan governor has self-checking function, when electrical control electric fan and fan governor be connected with open circuit conditions time, system can automatic discrimination reporting to the police, when program run occur abnormal time house dog processor can be made to reset immediately.
If Fig. 3, R are setting speed, e is setting speed and actual difference (e=R-Y), and u is that controller exports PWM value, and fan governor is by electrical control electric fan feedback speed, and Y is electrical control electric fan actual speed.
Controller draws u by e through PID computing formula.Eventually pass and reconcile PID tri-parameter (K
pfor proportional control parameter, K
iintegral control parameter, K
dfor differential controling parameters) recall best control effects.
Claims (5)
1. a semiconductor equipment shunting supercharging device, is characterized in that, comprising:
Divide wind box, comprise a collection air port and multiple loose air port, collection air port is communicated with loose air port, and the air outlet of air feed system is aimed in collection air port, and shunt the wind of air outlet, each loose air port connects 1 electrical control electric fan;
Electrical control electric fan, for multiple, its quantity is consistent with loose inlet number, all connects a point wind box;
Fan governor, connects electrical control electric fan, for controlling the rotating speed of electrical control electric fan, and then regulates wind flow and uniformity;
Power supply, connects described fan governor, for powering to described fan governor.
2. a kind of semiconductor equipment shunting supercharging device according to claim 1, it is characterized in that, described fan governor comprises:
Processor, connects electrical control electric fan, receives the frequency signal of electrical control electric fan, the pwm signal of generation is passed to electrical control electric fan;
Display unit, connection handling device, for showing wind speed;
Input unit, connection handling device, carries out wind speed setting for outside.
3. a kind of semiconductor equipment shunting supercharging device according to claim 2, it is characterized in that, described fan governor also comprises house dog, connection handling device, for making processor reset when processor program occurs abnormal.
4. a kind of semiconductor equipment shunting supercharging device according to claim 1, it is characterized in that, described power supply is 24V DC power supply.
5. a control method for semiconductor equipment shunting supercharging device according to claim 1, is characterized in that, comprise the following steps:
By the input unit input setting speed R in fan governor;
Actual speed Y setting speed R being deducted electrical control electric fan is input in the processor in fan governor;
Described input is converted to PWM value by following formula by the processor in fan governor, and by this PWM value transmit to electrical control electric fan:
Wherein, e=R-Y is setting speed and actual difference, and u is that controller exports PWM value, and Y is electrical control electric fan actual speed, and t is the time, K
pfor proportional control parameter, K
iintegral control parameter, K
dfor differential controling parameters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410479987.XA CN105489526B (en) | 2014-09-17 | 2014-09-17 | A kind of semiconductor equipment shunting supercharging device and its control method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410479987.XA CN105489526B (en) | 2014-09-17 | 2014-09-17 | A kind of semiconductor equipment shunting supercharging device and its control method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN105489526A true CN105489526A (en) | 2016-04-13 |
| CN105489526B CN105489526B (en) | 2018-08-14 |
Family
ID=55676430
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410479987.XA Active CN105489526B (en) | 2014-09-17 | 2014-09-17 | A kind of semiconductor equipment shunting supercharging device and its control method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN105489526B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109524328A (en) * | 2017-09-20 | 2019-03-26 | 三星电子株式会社 | The system and method for controlling semiconductor manufacturing facility, the method for manufacturing integrated circuit |
| CN111162004A (en) * | 2019-12-27 | 2020-05-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Method and device for adjusting internal environment of semiconductor equipment and electronic equipment |
| CN113327869A (en) * | 2020-12-17 | 2021-08-31 | 钟兴进 | Shunting and pressurizing device and method for semiconductor equipment |
| CN114151373A (en) * | 2021-10-28 | 2022-03-08 | 苏州浪潮智能科技有限公司 | Server fan rotating speed regulating method, system, terminal and storage medium |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2379626Y (en) * | 1999-03-05 | 2000-05-24 | 李少魁 | Double air flow air conditioning installation |
| CN202171301U (en) * | 2011-06-15 | 2012-03-21 | 上海聚舍机械制造有限公司 | Fresh air energy-saving system device in machine room |
| EP2557591A1 (en) * | 2010-04-08 | 2013-02-13 | Sharp Kabushiki Kaisha | Heating control system, deposition device provided therewith, and temperature control method |
-
2014
- 2014-09-17 CN CN201410479987.XA patent/CN105489526B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2379626Y (en) * | 1999-03-05 | 2000-05-24 | 李少魁 | Double air flow air conditioning installation |
| EP2557591A1 (en) * | 2010-04-08 | 2013-02-13 | Sharp Kabushiki Kaisha | Heating control system, deposition device provided therewith, and temperature control method |
| CN202171301U (en) * | 2011-06-15 | 2012-03-21 | 上海聚舍机械制造有限公司 | Fresh air energy-saving system device in machine room |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109524328A (en) * | 2017-09-20 | 2019-03-26 | 三星电子株式会社 | The system and method for controlling semiconductor manufacturing facility, the method for manufacturing integrated circuit |
| CN109524328B (en) * | 2017-09-20 | 2023-04-07 | 三星电子株式会社 | System and method for controlling semiconductor manufacturing facility, method for manufacturing integrated circuit |
| CN111162004A (en) * | 2019-12-27 | 2020-05-15 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Method and device for adjusting internal environment of semiconductor equipment and electronic equipment |
| CN111162004B (en) * | 2019-12-27 | 2022-08-19 | 北京半导体专用设备研究所（中国电子科技集团公司第四十五研究所） | Method and device for adjusting internal environment of semiconductor equipment and electronic equipment |
| CN113327869A (en) * | 2020-12-17 | 2021-08-31 | 钟兴进 | Shunting and pressurizing device and method for semiconductor equipment |
| CN114151373A (en) * | 2021-10-28 | 2022-03-08 | 苏州浪潮智能科技有限公司 | Server fan rotating speed regulating method, system, terminal and storage medium |
| CN114151373B (en) * | 2021-10-28 | 2024-01-23 | 苏州浪潮智能科技有限公司 | Method, system, terminal and storage medium for regulating and controlling rotation speed of server fan |
Also Published As
| Publication number | Publication date |
|---|---|
| CN105489526B (en) | 2018-08-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105489526A (en) | Shunt supercharging device for semiconductor equipment and control method for shunt supercharging device | |
| CN105182740B (en) | Raw material grinding autocontrol method | |
| CN202688424U (en) | Magnetically-controlled co-sputtering coating machine | |
| CN113231189A (en) | Intelligent control method and device for feeding and crushing balanced production of gravel coarse crushing workshop | |
| CN207067779U (en) | A kind of roller kilns temperature control device | |
| CN204493248U (en) | Rotation speed of fan bucking-out system | |
| CN107901267A (en) | A kind of control method of gas circuit formula hot-cutting machine pelletizing thrust control system | |
| CN102912443A (en) | Silicon carbide crystal crystal growing furnace control system | |
| CN202187896U (en) | Energy-saving device of synchronous control type cooling circulating water pump | |
| CN202008614U (en) | Control system for radio frequency power of etching machine | |
| CN106870341B (en) | A kind of fired power generating unit heat pump goes out dynamic balance Automatic adjustment method | |
| CN210884086U (en) | Organic fertilizer material conveying control device | |
| CN102591376A (en) | Temperature control device of cement kiln decomposition furnace | |
| CN202176532U (en) | Blower fan negative pressure detection control apparatus | |
| CN105717878A (en) | Fully-digital distributed scintillation crystal lifting furnace control system | |
| CN204448248U (en) | Europe version grinds intelligent automatic regulated controller | |
| CN203882183U (en) | Centralized remote monitoring device for drying production line | |
| CN105321839A (en) | Wind-filtering rectification device for semiconductor device | |
| CN203574582U (en) | Motor speed adjusting device | |
| CN203026943U (en) | Mixed load power saving device and power supply system | |
| CN103176431A (en) | Automatic optimization process for graphite spheroidization production parameters | |
| CN208928162U (en) | A kind of cement grinding aid automatic adding device | |
| CN202916660U (en) | Automatic control system for industrial silicon furnaces | |
| TWI454903B (en) | Method of controlling for saving energy | |
| CN207361890U (en) | A kind of hydrotreater |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 110168 No. 16 Feiyun Road, Hunnan District, Shenyang City, Liaoning Province Patentee after: Shenyang Core Source Microelectronic Equipment Co., Ltd. Address before: 110168 No. 16 Feiyun Road, Hunnan New District, Shenyang City, Liaoning Province Patentee before: Shenyang Siayuan Electronic Equipment Co., Ltd. |