CN105486884B - A kind of airspeedometer based on micromechanics coupler and direct-type power sensor - Google Patents
A kind of airspeedometer based on micromechanics coupler and direct-type power sensor Download PDFInfo
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- CN105486884B CN105486884B CN201510882324.7A CN201510882324A CN105486884B CN 105486884 B CN105486884 B CN 105486884B CN 201510882324 A CN201510882324 A CN 201510882324A CN 105486884 B CN105486884 B CN 105486884B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P5/00—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft
- G01P5/02—Measuring speed of fluids, e.g. of air stream; Measuring speed of bodies relative to fluids, e.g. of ship, of aircraft by measuring forces exerted by the fluid on solid bodies, e.g. anemometer
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Abstract
The invention discloses a kind of airspeedometer based on micromechanics coupler and direct-type power sensor, which includes substrate, coplanar waveguide transmission line, micromechanics coupler, terminal resistance, semiconductor thermocouple and test block part.Coplanar waveguide transmission line is grown on the surface of a substrate, and cantilever beam coupler is suspended from the top of coplanar waveguide transmission line, and centre is insulating medium layer and air, and micromechanics coupler is formed with the signal wire of co-planar waveguide.The anchoring area of cantilever beam is located on the center signal line of other one section of co-planar waveguide, by the microwave signal transmission of cantilever beam coupling to two terminal resistances.Wind speed measurement may be implemented in the structure, is not only simple in structure, high sensitivity, and there are no need to consume DC power.
Description
Technical field
The present invention proposes a kind of airspeedometer based on micromechanics coupler and direct-type power sensor, belongs to microelectronics
The technical field of mechanical system (MEMS).
Background technology
Air velocity transducer be widely used in industrial construction, agricultural production, space flight and aviation, traffic for tourism, weather forecast and
The fields such as environmental protection, the information that wind speed measurement is provided all play a crucial role entire society.In early days, wind speed
Measure to rely on and be realized by mechanical vane and wind vane, with the development of technology, and occur based on ultrasonic principle and
The airspeedometer of doppler principle.But since bulky, power consumption is excessively high, these airspeedometers cannot be satisfied in technology of Internet of things
The application demands such as miniaturization, low-power consumption.But the appearance of micro-electronic mechanical system technique has been overturned traditional wind speed and direction and has been passed
Sensor so that minimize, the wind speed and direction of low-power consumption detection micro-system becomes a reality.
Invention content
Goal of the invention：For the above-mentioned prior art, propose that a kind of simple in structure and be easy to measure is coupled based on micromechanics
With the airspeedometer of direct-type power sensor.
Technical solution：In order to solve the above technical problems, the technical solution adopted by the present invention is：
A kind of airspeedometer based on micromechanics coupler and direct-type power sensor, including substrate, coplanar wave guide transmission
Line, micromechanics coupler and direct-type power sensor part；Wherein, the coplanar waveguide transmission line includes being grown in substrate
The first signal wire, second signal line on surface and the first ground wire, the second signal line and the first ground wire are divided into first
The both sides of signal wire, vertical first signal wire of second signal line and between the first signal wire there are gap, the first ground wire is parallel
First signal wire and there are gaps between the first signal wire；The coplanar waveguide transmission line further includes being located at described second
The second ground wire and third ground wire of signal wire both sides；
The micromechanics coupler section includes cantilever beam, and the anchoring area setting of the cantilever beam is close on second signal line
The side of first signal wire, vertical first signal wire of cantilever beam and with form warpage above the first signal wire, first
Warpage position described in face is covered with dielectric on signal wire, and the warpage can change opposite first under the action of the forces of the wind
The distance of signal wire；The anchoring area of the cantilever beam connects direct-type power sensor part by second signal line, described
Direct-type power sensor part is used to detect the coupling work(between the micromechanics coupler section and coplanar waveguide transmission line
Rate.
Advantageous effect：A kind of airspeedometer based on micromechanics coupler and direct-type power sensor of the present invention, in wind
Under the action of power, cantilever hogging of beam generates displacement upward or downward, change by cantilever beam and signal line group at micromechanics
The spacing of coupler measures the power of coupling eventually by direct-type power sensor to change the coefficient of coup, calculates outlet air
The size of speed.A kind of airspeedometer based on micromechanics coupler and direct-type power sensor of the present invention not only has structure letter
The advantages of list, is easy to measure, high sensitivity, and zero DC power of airspeedometer may be implemented.
Description of the drawings
Fig. 1 is the vertical view of the airspeedometer based on micromechanics coupler and direct-type power sensor；
Fig. 2 is the A-A sectional views of the airspeedometer based on micromechanics coupler and direct-type power sensor in Fig. 1；
Fig. 3 is the B-B sectional views of the airspeedometer based on micromechanics coupler and direct-type power sensor in Fig. 1.
Specific implementation mode
Further explanation is done to the present invention below in conjunction with the accompanying drawings.
As shown in Figure 1 to Figure 3, a kind of airspeedometer based on micromechanics coupler and direct-type power sensor, including lining
Bottom 1, coplanar waveguide transmission line, micromechanics coupler and direct-type power sensor part.Wherein, coplanar waveguide transmission line packet
Include the first signal wire 2, second signal line 9 and the first ground wire 3 being grown on 1 surface of substrate.Second signal line 9 and the first ground
Line 3 is divided into the both sides of the first signal wire 2,9 vertical first signal wire 2 of second signal line and between the first signal wire 2 there are
Gap, 3 parallel first signal wire 2 of the first ground wire and there are gaps between the first signal wire 2.Coplanar waveguide transmission line further includes
It is located at the second ground wire 4 and third ground wire 5 of 9 both sides of second signal line.
Micromechanics coupler section includes cantilever beam 7, and the anchoring area 8 of cantilever beam 7 is arranged on second signal line 9 close to first
The side of signal wire 2.7 vertical first signal wire 2 of cantilever beam simultaneously forms warpage with the top of the first signal wire 2, on the first signal wire 2
Face warpage position is covered with dielectric 6, and warpage can change the distance of relative first signal line 2 under the action of the forces of the wind.
Direct-type power sensor part includes two terminal resistances 10 and 11, semiconductor thermocouple 12 and 13, ground wire 14 and 15, insulation
Dielectric layer 16 and test block 17 and 18.The anchoring area 8 of cantilever beam 7 connects direct-type power sensor portion by second signal line 9
Point, direct-type power sensor part is used to detect the coupling work(between micromechanics coupler section and coplanar waveguide transmission line
Rate.
When measuring wind speed using above-mentioned airspeedometer, when wind is blown by north orientation south, the warpage upper surface of cantilever beam 7 due to by
When the effect of wind-force generates downward displacement so that the distance between cantilever beam 7 and the first signal wire 2 become smaller, so as to cause micro-
The coefficient of coup of mechanical coupler increases so that the power of coupling increases；Cantilever beam coupling is measured using direct-type power sensor
The output DC voltage of the watt level of conjunction, power sensor increases, according to the output DC voltage between test block 17 and 18
The size of wind speed can be calculated.Conversely, when wind is blown from south to north, the warpage lower surface of cantilever beam 7 is due to by wind-force
When effect generates upward displacement, the coefficient of coup of micromechanics coupler is caused to reduce, the power coupled at this time reduces, and power passes
The output DC voltage of sensor reduces.Direct-type power sensor part is the prior art, and existing many documents disclose its tool
Body constitutes and its operation principle, is repeated no more in this programme.
It, should the chip based on micromechanics coupler and direct-type power sensor relative to traditional MEMS air velocity transducers
Area reduces, and sensitivity increases, it is most important that without consuming dc power.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (1)
1. a kind of airspeedometer based on micromechanics coupler and direct-type power sensor, it is characterised in that：Including substrate（1）、
Coplanar waveguide transmission line, micromechanics coupler and direct-type power sensor part；Wherein, the coplanar waveguide transmission line packet
It includes and is grown in substrate（1）The first signal wire on surface（2）, second signal line（9）And first ground wire（3）, second letter
Number line（9）With the first ground wire（3）It is divided into the first signal wire（2）Both sides, second signal line（9）Vertical first signal wire（2）
And with the first signal wire（2）Between there are gap, the first ground wires（3）Parallel first signal wire（2）And with the first signal wire（2）It
Between there are gaps；The coplanar waveguide transmission line further includes being located at the second signal line（9）Second ground wire of both sides（4）
With third ground wire（5）；
The micromechanics coupler includes cantilever beam（7）, the cantilever beam（7）Anchoring area（8）It is arranged in second signal line（9）On
Close to first signal wire（2）Side, cantilever beam（7）Vertical first signal wire（2）And with the first signal wire（2）On
It is rectangular at warpage, the first signal wire（2）Warpage position described in upper face is covered with dielectric（6）, the warpage is in wind-force
It can change relative first signal line under effect（2）Distance；The cantilever beam（7）Anchoring area（8）Pass through second signal line（9）
Direct-type power sensor part is connected, direct-type power sensor part is for detecting the micromechanics coupler
Coupled power between coplanar waveguide transmission line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510882324.7A CN105486884B (en) | 2015-12-03 | 2015-12-03 | A kind of airspeedometer based on micromechanics coupler and direct-type power sensor |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510882324.7A CN105486884B (en) | 2015-12-03 | 2015-12-03 | A kind of airspeedometer based on micromechanics coupler and direct-type power sensor |
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| Publication Number | Publication Date |
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| CN105486884A CN105486884A (en) | 2016-04-13 |
| CN105486884B true CN105486884B (en) | 2018-09-18 |
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| CN114675050B (en) * | 2022-03-24 | 2024-05-10 | 中国电子科技集团公司第五十八研究所 | Preparation method and structure of strain gauge type three-dimensional MEMS wind speed and direction sensor |
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