CN105486728A - Capacitive humidity sensor and manufacturing method thereof - Google Patents
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107589155A (en) * | 2017-09-12 | 2018-01-16 | 华南师范大学 | A kind of capacitance type sensor and preparation method thereof |
CN109690301A (en) * | 2016-09-09 | 2019-04-26 | 北陆电气工业株式会社 | Volumetric gas sensor |
CN111879827A (en) * | 2020-06-15 | 2020-11-03 | 上海集成电路研发中心有限公司 | Flexible sensor structure and preparation method thereof |
CN114858874A (en) * | 2022-07-07 | 2022-08-05 | 苏州敏芯微电子技术股份有限公司 | Humidity sensing structure, humidity sensor and manufacturing method of humidity sensing structure |
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2015
- 2015-11-27 CN CN201510856143.7A patent/CN105486728B/en active Active
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CN104391014A (en) * | 2014-12-03 | 2015-03-04 | 东南大学 | Capacitive humidity sensor of interdigital sandwich structure |
CN104391015A (en) * | 2014-12-03 | 2015-03-04 | 东南大学 | Capacitive humidity sensor of integrated ultrasonic structure and preparation method of capacitive humidity sensor of integrated ultrasonic structure |
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Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109690301A (en) * | 2016-09-09 | 2019-04-26 | 北陆电气工业株式会社 | Volumetric gas sensor |
CN107589155A (en) * | 2017-09-12 | 2018-01-16 | 华南师范大学 | A kind of capacitance type sensor and preparation method thereof |
WO2019052037A1 (en) * | 2017-09-12 | 2019-03-21 | 深圳市国华光电科技有限公司 | Capacitive sensor and preparation method therefor |
CN111879827A (en) * | 2020-06-15 | 2020-11-03 | 上海集成电路研发中心有限公司 | Flexible sensor structure and preparation method thereof |
CN114858874A (en) * | 2022-07-07 | 2022-08-05 | 苏州敏芯微电子技术股份有限公司 | Humidity sensing structure, humidity sensor and manufacturing method of humidity sensing structure |
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