CN105483621A - 一种组合式石墨电极-陶瓷蒸发舟 - Google Patents

一种组合式石墨电极-陶瓷蒸发舟 Download PDF

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CN105483621A
CN105483621A CN201610057835.XA CN201610057835A CN105483621A CN 105483621 A CN105483621 A CN 105483621A CN 201610057835 A CN201610057835 A CN 201610057835A CN 105483621 A CN105483621 A CN 105483621A
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ceramic
boat
heating element
graphite electrodes
electrode ink
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黄向东
姜明
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FUZHOU CERAVITE NEW MATERIAL TECHNOLOGY DEVELOPMENT Co Ltd
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FUZHOU CERAVITE NEW MATERIAL TECHNOLOGY DEVELOPMENT Co Ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/26—Vacuum evaporation by resistance or inductive heating of the source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/243—Crucibles for source material

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Resistance Heating (AREA)

Abstract

本发明涉及了一种组合式石墨电极-陶瓷蒸发舟，具体的技术方案为：（1）以热压氮化硼陶瓷或热压氮化硼基复合陶瓷（如氮化硼<b>/</b>氮化铝复合陶瓷）制备成带蒸发槽和长方孔或T型槽的舟体。（2）以高纯细晶石墨制备成石墨电极发热体。（3）以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成带安装边的薄板作为陶瓷保温板。将石墨电极或将石墨电极与陶瓷保温板上下叠放装入陶瓷舟体的长方孔或T型槽内，组合成蒸发舟。该蒸发舟具有性能优良、使用寿命更长、制作工艺简单等优点，可以将被蒸发铝液与发热元件绝缘开来，大幅降低铝液飞溅，提高膜材质量，具有显著的经济和社会效益。

Description

一种组合式石墨电极-陶瓷蒸发舟
技术领域：
本发明涉及真空蒸发镀铝薄膜用蒸发元件的制造方法，具体涉及一种组合式石墨电极-陶瓷蒸发舟。
背景技术：
真空蒸发镀铝的技术是综合成本最低的大规模制造金属铝薄膜的方法。其在多种工业和日常用品中大量使用，如，大容量薄膜电容器、各种保鲜铝塑包装材料、阴极射线管显示器内的电子疏散膜等等。
真空蒸发镀铝过程中最关键的消耗性元器件就是使金属铝丝变成铝蒸汽的加热元件、蒸发舟或蒸发坩埚。由于金属铝活性很大，作为蒸发舟或蒸发坩埚的材料必须能够耐受铝液的腐蚀。目前真空蒸发镀铝工业用的加热元件根据不同的镀膜设备，要么是二硼化钛/氮化硼/氮化铝复合导电陶瓷制备的蒸发舟，要么是高纯石墨制备的坩埚。
二硼化钛/氮化硼/氮化铝复合导电陶瓷蒸发舟是目前绝大多数镀膜设备的标准配置。该导电陶瓷蒸发舟由于高温铝腐蚀其使用寿命一般只有12~16小时，最高不会超过20小时。由于该蒸发舟的不均匀腐蚀，同时也由于被蒸发的铝液也参与导电发热，到蒸发舟寿命的中后期容易造成铝液飞溅，烧穿基材，形成针孔的问题。
发明内容：
本发明的目的在于提供一种组合式石墨电极-陶瓷蒸发舟，该蒸发舟具有产品性能优良，工艺简单的特点，具有显著的经济和社会效益。
为实现上述目的，本发明采用如下技术方案：
本发明组合式石墨电极-陶瓷蒸发舟，其特征在于：包括陶瓷舟和插设在陶瓷舟体内的石墨电极发热体；所述陶瓷舟是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备而成，所述石墨电极发热体是采用高纯细晶石墨制备而成，所述陶瓷舟上表面开设有蒸发槽。
进一步的，上述热压氮化硼基复合陶瓷为氮化硼或氮化铝复合陶瓷。
进一步的，上述陶瓷舟具有用于插设石墨电极发热体的槽道。
进一步的，上述槽道为截面是长方形槽道。
进一步的，上述槽道为截面是T字型的槽道。
进一步的，上述陶瓷舟体内还插设有叠置在石墨电极发热体下方的陶瓷保温板。
进一步的，上述陶瓷保温板是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成且带安装边的薄板。
进一步的，上述石墨电极发热体是按一定精度的间隙配合装入陶瓷舟。
进一步的，上述上下叠放的石墨电极发热体和陶瓷保温板是按一定精度的间隙配合装入陶瓷舟。
本发明组合式石墨电极-陶瓷蒸发舟在使用时，只要将石墨电极发热体或上、下叠置的石墨电极发热体和陶瓷保温板插入陶瓷舟的槽道内即完成安装，操作简单方便，较采用粘结等方式简单快捷。同时：该蒸发舟具有产品性能优良、使用寿命更长、制作工艺简单等优点，可以将被蒸发铝液与发热元件绝缘开来，大幅降低铝液飞溅，提高膜材质量。该蒸发舟具有显著的经济和社会效益。
附图说明：
图1为实施方案1中石墨电极发热体装入陶瓷舟方孔的示意图；
图2为实施方案1中蒸发舟的结构示意图；
图3为实施方案2中石墨电极发热体装入陶瓷舟T型孔的示意图；
图4为实施方案2中蒸发舟的结构示意图；
图5为实施方案3中石墨电极发热体与陶瓷保温板的叠放示意图；
图6为实施方案3中上下叠放的石墨电极发热体与陶瓷保温板装入陶瓷舟T型孔的示意图；
图7为实施方案3蒸发舟的结构示意图。
具体实施方式：
为详细说明本发明的技术内容、结构特征、所实现目的及效果，以下结合实施方式并配合附图详细说明。
实施例1
如图1、2所示，一种组合式石墨电极-陶瓷蒸发舟，包括陶瓷舟1、石墨电极发热体2，所述陶瓷舟1是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成带蒸发槽5和长方孔6的舟体；所述石墨电极发热体2是采用高纯细晶石墨制备而成；所述石墨电极发热体2是按一定的间隙配合装入陶瓷舟1的长方孔内，形成组合式蒸发舟，间隙配合度为H8/f7或H7/js6。
实施例2
如图3、4所示，一种组合式石墨电极-陶瓷蒸发舟，包括陶瓷舟1、石墨电极发热体2，所述陶瓷舟1是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成带蒸发槽5和T型槽4（槽道截面呈T字型）的舟体；所述石墨电极发热体2是采用高纯细晶石墨制备而成；所述石墨电极发热体2是按一定的间隙配合装入陶瓷舟1的T型槽内，形成组合式蒸发舟，间隙配合度为H7/k6或H7/js6。T型槽4实际是位于陶瓷舟1下表面设有一条切开的槽，在石墨电极发热体2装入时可变宽些，装入后T型槽又能卡进石墨电极发热体2。
实施例3
如图5、6、7所示，一种组合式石墨电极-陶瓷蒸发舟，包括陶瓷舟1、石墨电极发热体2和陶瓷保温板3，所述陶瓷舟1是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成带蒸发槽5和T型槽4的舟体；所述石墨电极发热体2是采用高纯细晶石墨制备而成；所述陶瓷保温板3是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成带安装边的薄板；所述石墨电极发热体2与陶瓷保温板3自上而下叠放，并按一定精度的间隙配合装入陶瓷舟1的T型槽内，形成组合式蒸发舟，间隙配合度为H7/k6或H7/js6，T型槽4实际是位于陶瓷舟1下表面设有一条切开的宽槽（但宽度不超过蒸发舟槽道内宽），在石墨电极发热体2装入时可变宽些，装入后T型槽又能卡进石墨电极发热体2。陶瓷保温板3为一薄板，其总宽度与石墨电极发热体2宽度相同（该总宽度包括了安装边的宽度），其安装边较薄板更薄，两安装边之间板体的下部与T型槽配合。
以上所述仅为本发明的实施例，并非因此限制本发明的专利范围，凡是利用本发明说明书及附图内容所作的等效结构或等效流程变换，或直接或间接利用在其他相关的技术领域，均同理包括在本发明的专利范围内。

Claims (9)

1.一种组合式石墨电极-陶瓷蒸发舟，其特征在于：包括陶瓷舟和插设在陶瓷舟体内的石墨电极发热体；所述陶瓷舟是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备而成，所述石墨电极发热体是采用高纯细晶石墨制备而成，所述陶瓷舟上表面开设有蒸发槽。
2.根据权利要求1所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述热压氮化硼基复合陶瓷为氮化硼或氮化铝复合陶瓷。
3.根据权利要求1所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述陶瓷舟具有用于插设石墨电极发热体的槽道。
4.根据权利要求3所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述槽道为截面是长方形槽道。
5.根据权利要求3所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述槽道为截面是T字型的槽道。
6.根据权利要求1所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述陶瓷舟体内还插设有叠置在石墨电极发热体下方的陶瓷保温板。
7.根据权利要求6所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述陶瓷保温板是以热压氮化硼陶瓷或热压氮化硼基复合陶瓷制备成且带安装边的薄板。
8.根据权利要求1所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述石墨电极发热体是按一定精度的间隙配合装入陶瓷舟。
9.根据权利要求6或7所述的组合式石墨电极-陶瓷蒸发舟，其特征在于：所述上下叠放的石墨电极发热体和陶瓷保温板是按一定精度的间隙配合装入陶瓷舟。
CN201610057835.XA 2016-01-28 2016-01-28 一种组合式石墨电极-陶瓷蒸发舟 Pending CN105483621A (zh)

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US3636303A (en) * 1971-03-10 1972-01-18 Gte Sylvania Inc Apparatus for metal vaporization comprising a reduced cross sectio heater and a refractory vessel
US3636304A (en) * 1971-03-10 1972-01-18 Gte Sylvania Inc Apparatus for metal vaporization comprising a heater inserted into a refractory vessel
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109503187A (zh) * 2018-12-13 2019-03-22 上海康碳复合材料科技有限公司 一种先驱体浸渍/裂解法制备碳/碳复合材料pecvd舟的制备工艺

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