CN105449512B - One kind uses gas-solid interface Asia Doppler reflection spectrum offset frequency frequency regulator and method - Google Patents
One kind uses gas-solid interface Asia Doppler reflection spectrum offset frequency frequency regulator and method Download PDFInfo
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- CN105449512B CN105449512B CN201510942254.XA CN201510942254A CN105449512B CN 105449512 B CN105449512 B CN 105449512B CN 201510942254 A CN201510942254 A CN 201510942254A CN 105449512 B CN105449512 B CN 105449512B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
- H01S3/13—Stabilisation of laser output parameters, e.g. frequency or amplitude
Abstract
The present invention relates to the frequency stabilization technology of laser, is specially that one kind uses gas-solid interface Asia Doppler reflection spectrum offset frequency frequency regulator and method.Solve in current laser frequency lock technology and there is locking narrower bandwidth, do not reach the technical problem of the mismatching angle of locking needs.The present invention solve thes problems, such as to be influenced to make laser stability to be restricted and be restricted using bandwidth is locked in saturation-absorption spectrum frequency locking by Doppler frequency shift in existing laser steady frequency technology, at the same solve need to be modulated laser in most laser frequency stabiliz ation methods caused by residual modulation influence.Temperature in use and magnetic field can effectively control the off resonance of latched position.The present invention is suitable for the fields such as research high-resolution atom spectrum, the experiment of Ultrahigh vacuum atom, atom and medium interface repercussion study, rrequency-offset-lock laser.The miniaturization experimental provision and faint light intensity of the present invention can meet the requirement that commercial technology is promoted.
Description
Technical field
The present invention relates to the frequency stabilization technology of laser, is specially that one kind uses gas-solid interface Asia Doppler reflection spectrum
Offset frequency frequency regulator and method.
Background technology
One of the important signs that of the narrow linewidth laser as modern science and technology, leads in accurate measurement, opctical frequency standard, laser
Letter, laser gyro, the numerous areas of laser radar are widely used.In these application fields, laser frequency stabilization
Degree is a particularly important index parameter.With the development that laser is applied, laser steady frequency technology becomes laser science research
Important content, plays vital effect in modern science and technology.Laser is being subject to surrounding environment and oneself factor
Influence when, such as laser chamber length, carrier concentration, temperature, mechanical oscillation and operating current drift can cause output frequency
It is unstable.At present, practical Frequency Stabilization Technique mainly has Absorption Line frequency stabilization, Fabry-Perot-type cavity frequency stabilization, external cavity light feedback
Frequency stabilization etc..Atom and molecular absorption line provide stable frequency standard, are widely used in scientific experiment field, and traditional is absolute
The high-resolution saturation-absorption spectrum technology of frequency stablization method generally use.Needed for the frequency distinguishing signal for producing color dispersion-type
Phase-sensitive detection is carried out using lock-in amplifier, additional frequency and intensity noise can be so introduced to laser, to some applications
It is unacceptable that this noise, which introduces,.Then people have developed the modulation free frequency stabilization technology based on Atomic absorption line, such as modulate
Frequency Stabilization Technique, polarization spectrum Frequency Stabilization Technique etc. are shifted, these technological means are using Doppler's Absorption Line of atom or without Doppler
Absorption Line is as frequency reference, and when needing specific small off resonance rrequency-offset-lock, although Doppler's Absorption Line has big frequency locker
Determine bandwidth, the voltage-frequency ratio of feedback signal is smaller, although and it is high without Doppler's Absorption Line Frequency Locking locking precision,
But narrower bandwidth is locked, does not reach the mismatching angle of locking needs.Therefore, if Doppler broadening can be partially removed, can not only improve
Lock precision, moreover it is possible to effectively extension locking bandwidth.Based on this, in order to solve in existing laser steady frequency technology by Doppler broadening shadow
The problem of loud or small locking strip tolerance is processed, inventing a kind of brand-new sub- Doppler's frequency locking technology becomes inevitable.
The content of the invention
The present invention does not reach the mistake of locking needs to solve to have locking narrower bandwidth in current laser frequency lock technology
The technical problem of harmonic quantity, there is provided one kind uses gas-solid interface Asia Doppler reflection spectrum offset frequency frequency regulator and method.
One kind of the present invention is to use following skill using gas-solid interface Asia Doppler reflection spectrum offset frequency frequency regulator
What art scheme was realized：A kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum, including laser and its drive
Device is moved, half-wave plate and the first polarization splitting prism are sequentially equipped with the emitting light path of laser, the first polarization splitting prism
Reflected light path is equipped with the steam pond of internal-filling alkali metal atom vapor；Steam pond and the reflected light path pair of the first polarization splitting prism
The plane of incidence answered is equipped with wedge-shaped reflection part；The horizontal surface portion of wedge-shaped reflection part be located at outside and with the first polarization spectro rib
The reflected light path of mirror is vertical；The chamfered portion of wedge-shaped reflection part is located at inner side, the reflection of the chamfered portion of wedge-shaped reflection part
Light path is equipped with total reflective mirror；Quarter-wave plate and the second polarization splitting prism are sequentially equipped with the reflected light path of total reflective mirror；The
The reflected light path of two polarization splitting prisms is equipped with the first photodetector, and the transmitted light path of the second polarization splitting prism is equipped with
Second photodetector, the signal output part of first, second photodetector are connected with subtracter jointly；The letter of the subtracter
Number output terminal is connected with proportional integral circuit；The signal output part of proportional integral circuit is connected with the driving device of laser；
Field coil is surrounded with outside the steam pond, the magnetic field trend and the reflected light path of the first polarization splitting prism of field coil are walked
To parallel.
As shown in Figure 1, during work, the linear polarization laser light half-wave plate of laser output, then by polarization spectro rib
Mirror is divided into two beams, wherein reflected light directive steam pond, and the steam pond plane of incidence is wedge reflection part, prevents wedge first surface
（That is horizontal surface portion）Reflected light and wedge second surface（That is chamfered portion）Reflected light overlap, after can so effectively improving
The sensitivity of continuous detection.The chamfered portion of wedge reflection part is gas-solid interface, and steam has field coil outside pond（Coil can have
It is multiple）, alkali metal atom steam generation Faraday effect is made by magnetic field.When deviateing atomic resonance, dispersion characteristics compared to
Absorption characteristic has stronger the driver's seat.This makes it possible the off resonance region laser frequency lock of no absorption signal.Method
It is a kind of magneto-optic effect to draw effect, is a kind of interaction in light wave and magnetic field in medium.When linearly polarized light in media as well
During propagation, if on the direction of propagation parallel to light plus a high-intensity magnetic field, optical vibration direction will deflect, deflection angle ψ with
Magnetic induction density B is directly proportional, i.e. ψ is proportional to the product of V and B, and proportionality coefficient V is known as Verdet constant, with medium character and light
Wave frequency rate is related.This effect is derived from the birefringent phenomenon in the medium of Zeeman frequency displacement.When an externally-applied magnetic field acts on
When on atom vapor, under Zeemen effect,（Left-handed rotation）With（Right-handed rotation）Resonant transition frequency moves in the opposite direction,
Different changes can also occur for refraction coefficient.Since line polarisation may be considered as the superposition of two circularly polarized lights, in effective light path
In the range of, the polarization variations of both light will produce an angle, gas-solid interface reflectance spectrum is produced division, regulating winding
Magnetic field size adjusts follow-up locking bandwidth.Gas-solid interface reflectance spectrum reflects through a total reflective mirror and by the second polarization spectro rib
Mirror is divided into two beams, and a quarter-wave plate, quarter-wave plate and second are placed between total reflective mirror and the second polarization splitting prism
Left-handed rotation and dextrorotation optical signal in the reflectance spectrum of the separable division of combination of polarization splitting prism, left-handed rotation and right-handed rotation letter
Detected by first, second photodetector and subtracted each other by subtracter number respectively, you can obtain unmodulated frequency discrimination signal, frequency discrimination
Signal is sent into laser drive by proportional integral circuit, carries out laser frequency locking.
Further, the saturation-absorption spectrum device on the first polarization splitting prism transmitted light path, saturation are further included
The exit end of absorption spectrum device is equipped with the 3rd photodetector, and the signal output part of the 3rd photodetector is connected with oscillography
Device；Another signal output part of the subtracter is also connected with oscillograph.
Transmitted light is satisfied by photodetectors register, this tracer signal through saturation-absorption spectrum device for steam pond without Doppler
And absorption spectrum.Rotatable halfwave plate can adjust the intensity of reflection and transmitted light.
Frequency discrimination signal is segmented into two-way, inputs all the way to proportional integral circuit, another way is by oscillograph recording and saturation
Absorption spectrum compares, and is the image shown by oscillograph as shown in Figure 2, of the invention first shows as we can see from the figure
Work advantage：Can a wide range of off resonance.What Fig. 2 was shown is exactly the reflectance spectrum Faraday effect that is obtained of the present invention, can be with from Fig. 2
See that it deviates saturation-absorption spectrum in a big way, each peak in figure can serve as a latched position.Can according to Fig. 2
To see, laser lock-on can be deviateed to the position of 3 GHz of Atomic absorption line even more large detunings using the method for the invention
Put.It can in addition contain see that this frequency locking mode need not introduce extra modulated signal, residual amplitude modulation is eliminated.
Second advantage of the present invention is low-power.Laser power for Faraday effect reflectance spectrum frequency stabilization can be as small as
Hundreds of nanowatts, this experiment to power requirement harshness is a very big advantage.
The 3rd advantage of the present invention：During above-mentioned reflectance spectrum, forming the alkali metal atom of reflected signal is
Atomic layer in the range of wedge glass surface wavelength magnitude, since this layer of atom and glass surface have strong Robert Van de Walle
This interaction, therefore as the extremely slow atom of movement velocity, dopplerbroadening is less than the dopplerbroadening of chainless atom, and
More than in saturation-absorption spectrum selected zero velocity atom without dopplerbroadening.So as to form line half-width in 50-
The sub- dopplerbroadening line style of 100MHz.Based on this, compared with existing laser steady frequency technology, gas-solid interface atom of the present invention
Reflectance spectrum had both efficiently solved the modulation /demodulation dress that complexity is needed in existing laser steady frequency technology without modulation offset frequency frequency regulator
Put, also solve the problems, such as to need frequency stabilization system to have certain locking bandwidth in some applications.
Further, the outside in steam pond is coated with heating furnace, the reflected light on heating furnace with the first polarization splitting prism
Road is provided with entrance aperture at corresponding position.
There is a heating furnace outside steam pond, atomic density in steam pond can be made to reach requirement of experiment（Saturated vapor pressure about 10-3
Torr）, heating furnace leading portion has an entrance aperture, and entrance aperture can ensure non-condensing in gas-solid dielectric surface with reference to pool gas.It is incident
The size in hole and position can ensure that incident light and reflected light are unaffected.
Summary content, the of the invention the 4th advantage is that frequency locking position is adjustable.It particularly may be divided into temperature-independent frequency locking
With magnetic field dependence frequency locking.
1st, temperature control frequency locking position is realized by heating furnace.As shown in figure 3, abscissa is steam pond temperature, ordinate
It is mismatching angle of the keyed end with temperature.With the rise of temperature, off resonance can be increasing.
2nd, realize that magnetic field controls frequency locking position by adjusting the magnetic field intensity of field coil.As shown in figure 4, abscissa is magnetic
Field intensity, ordinate are mismatching angle of the keyed end with magnetic field intensity.With the enhancing in magnetic field, off resonance can be increasing.
Fig. 5 is locking effect schematic diagram of the present invention.As seen from Figure 5, device and method of the present invention
Its locking effect is very good.
A kind of offset frequency frequency-stabilizing method using gas-solid interface Asia Doppler reflection spectrum of the present invention is using as follows
What technical solution was realized：A kind of offset frequency frequency-stabilizing method using gas-solid interface Asia Doppler reflection spectrum, includes the following steps：Swash
The linearly polarized laser of light device outgoing is anti-by the first polarization splitting prism by the linearly polarized light after half-wave plate by half-wave plate
The internal steam pond filled with alkali metal atom steam is incident to after penetrating；The inclined-plane of the wedge-shaped reflection part in steam pond is used as gas-solid circle
Face, the alkali metal atom at gas-solid interface produce Faraday effect under the action of field coil, make reflectance spectrum in gas-solid circle
Face produces division, and the reflectance spectrum after division is after total reflective mirror reflects again through quarter-wave plate and the second polarization splitting prism point
Into left-handed rotation and right-handed rotation, first, second photodetector gathers left-handed rotation and right-handed rotation and is converted into corresponding respectively
Above-mentioned two path signal is subtracted each other acquisition frequency discrimination signal by electric signal, subtracter, which is divided into two-way, wherein inputting all the way
Driving device is sent into proportional integral circuit and after computing, realizes the Frequency Locking of laser；By the first polarization spectro
Laser after prism transmission is gathered and by oscillograph recording, this record after saturation-absorption spectrum device by the 3rd photodetector
Signal is as no Doppler's saturation-absorption spectrum；The another way of frequency discrimination signal is opposed by oscillograph recording and with saturation-absorption spectrum
Than.
The present invention efficiently solves in existing laser steady frequency technology to be influenced to be limited laser stability by Doppler frequency shift
System and the technical problem being restricted using bandwidth is locked in saturation-absorption spectrum frequency locking, while solve most laser frequency stabilization sides
The influence of residual modulation caused by being modulated to laser is needed in method.Temperature in use and magnetic field can effectively control locking
The off resonance of position.
The present invention is suitable for research high-resolution atom spectrum, the experiment of Ultrahigh vacuum atom, atom and medium circle
The fields such as face repercussion study, rrequency-offset-lock laser.The present invention can realize miniaturization experimental provision, and use faint light
It can realize by force；This two advantages can meet the requirement that commercial technology is promoted.
Brief description of the drawings
The structure diagram of Fig. 1 devices of the present invention.
Reflectance spectrum schematic diagram caused by saturation-absorption spectrum and Faraday effect shown by Fig. 2 oscillographs.
The schematic diagram of Fig. 3 temperature control frequency lockings position.
The schematic diagram of Fig. 4 magnetic fields control frequency locking position.
The locking effect schematic diagram of Fig. 5 the method for the invention.
Fig. 6 steam ponds of the present invention and its partial enlargement structural representation of corollary apparatus.
1- lasers, 2- half-wave plates, the first polarization splitting prisms of 3-, 4- saturation-absorption spectrum devices, the 3rd photoelectricity of 5- are visited
Survey device, 6- steam pond, 7- field coils, 8- total reflective mirrors, 9- quarter-wave plates, the second polarization splitting prisms of 10-, 11- first
Photodetector, the second photodetectors of 12-, 13- subtracters, 14- proportional integral circuits, 15- oscillographs, 16- heating furnaces；
61- wedge shape reflection parts, 62- wedge shape reflecting surface incident lights, 63- wedge shape reflective surface light.
Embodiment
A kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum, including laser 1 and its driving dress
Put, 2 and first polarization splitting prism 3 of half-wave plate is sequentially equipped with the emitting light path of laser 1, the first polarization splitting prism 3
Reflected light path is equipped with the steam pond 6 of internal-filling alkali metal atom vapor；The reflected light of 6 and first polarization splitting prism 3 of steam pond
The corresponding plane of incidence in road is equipped with wedge-shaped reflection part 61；The horizontal surface portion of wedge-shaped reflection part 61 be located at outside and with it is first inclined
Shake Amici prism 3 reflected light path it is vertical；The chamfered portion of wedge-shaped reflection part 61 is located at inner side, wedge-shaped reflection part 61 it is oblique
The reflected light path of face part is equipped with total reflective mirror 8；Quarter-wave plate 9 and second is sequentially equipped with the reflected light path of total reflective mirror 8
Polarization splitting prism 10；The reflected light path of second polarization splitting prism 10 is equipped with the first photodetector 11, the second polarization point
The transmitted light path of light prism 10 is equipped with the second photodetector 12, and the signal output part of first, second photodetector is common
It is connected with subtracter 13；The signal output part of the subtracter 13 is connected with proportional integral circuit 14；Proportional integral circuit 14
Signal output part is connected with the driving device of laser 1；Field coil 7, field coil 7 are surrounded with outside the steam pond 6
Magnetic field move towards with the reflected light path of the first polarization splitting prism 3 to move towards parallel.
Further include the saturation-absorption spectrum device 4 on 3 transmitted light path of the first polarization splitting prism, saturation-absorption spectrum
The exit end of device 4 is equipped with the 3rd photodetector 5, and the signal output part of the 3rd photodetector 5 is connected with oscillograph 15；Institute
Another signal output part for stating subtracter 13 is also connected with oscillograph 15.
The outside in steam pond 6 is coated with heating furnace 16, the reflected light path pair on heating furnace 16 with the first polarization splitting prism 3
Entrance aperture is provided with the position answered.
Rubidium atom vapor is filled in the steam pond 6.
A kind of offset frequency frequency-stabilizing method using gas-solid interface Asia Doppler reflection spectrum, includes the following steps：Laser 1 goes out
The laser penetrated is converted to linearly polarized light by half-wave plate 2, which is incident to after the reflection of the first polarization splitting prism 3
The internal steam pond 6 filled with alkali metal atom steam；The inclined-plane of the wedge-shaped reflection part 61 in steam pond 6 is as gas-solid interface, gas
Alkali metal atom at liquid/solid interface produces Faraday effect under the action of field coil 7, reflectance spectrum is produced in gas-solid interface
Estranged to split, the reflectance spectrum after division is divided through 9 and second polarization splitting prism 10 of quarter-wave plate again after the reflection of total reflective mirror 8
Into left-handed rotation and right-handed rotation, first, second photodetector gathers left-handed rotation and right-handed rotation and is converted into corresponding respectively
Above-mentioned two path signal is subtracted each other acquisition frequency discrimination signal by electric signal, subtracter 13, which is divided into two-way, wherein defeated all the way
Enter to proportional integral circuit 14 and be sent into driving device after computing, realize the Frequency Locking of laser 1；By the first polarization
Laser after Amici prism 3 transmits is gathered by the 3rd photodetector 5 after saturation-absorption spectrum device 4 and remembered by oscillograph 15
Record, this tracer signal is as no Doppler's saturation-absorption spectrum；The another way of frequency discrimination signal is recorded by oscillograph 15 and and saturation
Absorption spectrum compares.
As shown in fig. 6, wedge-shaped reflection part 61 has two reflectings surface, horizontal plane and chamfered portion；Wherein inclined plane part is allocated as
For gas-solid interface, and it can ensure the light of reflection（Wedge-shaped reflective surface light 63）Will not be with the reflected light of horizontal plane（Wedge shape
Reflecting surface incident light 62）Overlap, be conducive to improve the sensitivity of frequency locking.
The technical characterstic of the present invention：
1st, large detuning is controllable（Magnetic field, temperature control keyed end）；
2nd, high-resolution, no modulation；
3rd, can be to miniaturization using small thickness medium；
4th, dim light only needs the reflected light of hundreds of nw to complete frequency stabilization.
Claims (6)
1. a kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum, including laser（1）And its driving dress
Put, it is characterised in that laser（1）Emitting light path on be sequentially equipped with half-wave plate（2）With the first polarization splitting prism（3）, the
One polarization splitting prism（3）Reflected light path be equipped with internal-filling alkali metal atom vapor steam pond（6）；Steam pond（6）With
One polarization splitting prism（3）The corresponding plane of incidence of reflected light path be equipped with wedge-shaped reflection part（61）；Wedge-shaped reflection part（61）
Horizontal surface portion be located at outside and with the first polarization splitting prism（3）Reflected light path it is vertical；Wedge-shaped reflection part（61）'s
Chamfered portion is located at inner side, wedge-shaped reflection part（61）The reflected light path of chamfered portion be equipped with total reflective mirror（8）；Total reflective mirror
（8）Reflected light path on be sequentially equipped with quarter-wave plate（9）With the second polarization splitting prism（10）；Second polarization splitting prism
（10）Reflected light path be equipped with the first photodetector（11）, the second polarization splitting prism（10）Transmitted light path be equipped with the
Two photodetectors（12）, the signal output part of first, second photodetector is connected with subtracter jointly（13）；The subtraction
Device（13）Signal output part be connected with proportional integral circuit（14）；Proportional integral circuit（14）Signal output part and laser
（1）Driving device be connected；The steam pond（6）Outside is surrounded with field coil（7）, field coil（7）Magnetic field trend
With the first polarization splitting prism（3）Reflected light path move towards parallel.
2. a kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum as claimed in claim 1, its feature
It is, further includes positioned at the first polarization splitting prism（3）Saturation-absorption spectrum device on transmitted light path（4）, saturated absorption light
Spectral apparatus（4）Exit end be equipped with the 3rd photodetector（5）, the 3rd photodetector（5）Signal output part be connected with and show
Ripple device（15）；The subtracter（13）Another signal output part also with oscillograph（15）It is connected.
3. a kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum as claimed in claim 1 or 2, it is special
Sign is, steam pond（6）Outside be coated with heating furnace（16）, heating furnace（16）Upper and the first polarization splitting prism（3）It is anti-
Penetrate at the corresponding position of light path and be provided with entrance aperture.
4. a kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum as claimed in claim 1 or 2, it is special
Sign is, the steam pond（6）Inside fill rubidium atom vapor.
5. a kind of offset frequency frequency regulator using gas-solid interface Asia Doppler reflection spectrum as claimed in claim 3, its feature
It is, the steam pond（6）Inside fill rubidium atom vapor.
A kind of 6. offset frequency frequency-stabilizing method using gas-solid interface Asia Doppler reflection spectrum, using dress as claimed in claim 2
Put, it is characterised in that include the following steps：Laser（1）The linearly polarized laser of outgoing passes through half-wave plate（2）, pass through half-wave plate
（2）The linearly polarized light afterwards passes through the first polarization splitting prism（3）Inside is incident to after reflection filled with alkali metal atom steam
Steam pond（6）；Steam pond（6）Wedge-shaped reflection part（61）Inclined-plane as gas-solid interface, the alkali metal at gas-solid interface is former
Son is in field coil（7）Under the action of produce Faraday effect, make reflectance spectrum gas-solid interface produce division, it is anti-after division
Spectrum is penetrated through total reflective mirror（8）Again through quarter-wave plate after reflection（9）And second polarization splitting prism（10）Be divided into left-handed rotation and
Right-handed rotation, first, second photodetector gather left-handed rotation and right-handed rotation and are converted into corresponding electric signal, subtraction respectively
Device（13）Above-mentioned two path signal is subtracted each other into acquisition frequency discrimination signal, which is divided into two-way, wherein inputting all the way to ratio
Integrating circuit（14）And driving device is sent into after computing, realize laser（1）Frequency Locking；By the first polarization spectro
Prism（3）Laser after transmission is through saturation-absorption spectrum device（4）Afterwards by the 3rd photodetector（5）Gather and by oscillograph
（15）Record, this tracer signal is as no Doppler's saturation-absorption spectrum；The another way of frequency discrimination signal is by oscillograph（15）Record
And compared with saturation-absorption spectrum.
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| CN108832477A (en) * | 2018-06-14 | 2018-11-16 | 山西大学 | Based on nano optical fibers ultra low power absorption spectrum frequency regulator and spectrum frequency stabilization |
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| CN111092362B (en) * | 2019-12-31 | 2021-02-19 | 哈尔滨工业大学 | Laser frequency stabilization method and device based on temperature self-sensing flexible thin film heater |
| CN112083358B (en) * | 2020-08-28 | 2023-03-14 | 之江实验室 | Laser frequency stabilization system for SERF ultrahigh sensitive magnetic field measuring device |
| CN112629752B (en) * | 2020-12-28 | 2021-09-28 | 山西大学 | Atomic ensemble mass center speed measuring device and method |
| CN114172016A (en) * | 2021-10-29 | 2022-03-11 | 华中光电技术研究所（中国船舶重工集团公司第七一七研究所） | Single-frequency semiconductor laser device with frequency locking function |
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