CN105445564A - Dielectric constant high-temperature space calibration method - Google Patents

Dielectric constant high-temperature space calibration method Download PDF

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Publication number
CN105445564A
CN105445564A CN201510976043.8A CN201510976043A CN105445564A CN 105445564 A CN105445564 A CN 105445564A CN 201510976043 A CN201510976043 A CN 201510976043A CN 105445564 A CN105445564 A CN 105445564A
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temperature
calibration
measuring system
measured material
inductive capacity
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张娜
成俊杰
程春悦
陈玲
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Beijing Institute of Radio Metrology and Measurement
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Beijing Institute of Radio Metrology and Measurement
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Priority to CN201510976043.8A priority Critical patent/CN105445564A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2617Measuring dielectric properties, e.g. constants
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R35/00Testing or calibrating of apparatus covered by the other groups of this subclass
    • G01R35/005Calibrating; Standards or reference devices, e.g. voltage or resistance standards, "golden" references

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  • General Physics & Mathematics (AREA)
  • Measurement Of Resistance Or Impedance (AREA)

Abstract

The invention discloses a dielectric constant high-temperature space calibration method. The objective of the invention is to solve the problems of long measurement time and large measurement errors in dielectric constant measurement in a high-temperature environment in the prior art. The method includes the following steps that: full two-port calibration is performed on a dielectric constant high-temperature space measurement system composed of an electromagnetic measurement system and a high-temperature box, wherein the electromagnetic measurement system includes a measurement platform, a transmitting antenna, a receiving antenna, a pluggable measurement fixture, a network analyzer and a control machine, and the high-temperature box has a low-reflection microwave window; high-temperature GRL calibration is performed on the dielectric constant high-temperature space measurement system which has been subjected to the full two-port calibration by adjusting the temperature of the high-temperature box; the measurement fixture is adopted to fix a measured material in the high-temperature box, and the S parameters of the measured material in a high-temperature environment is determined through the dielectric constant high-temperature space measurement system which has been subjected to the high-temperature GRL calibration; and the dielectric constant of the measured material under a temperature corresponding to the high-temperature environment can be determined.

Description

A kind of specific inductive capacity high-temperature space calibration steps
Technical field
The application relates to electromagnetic technology field, particularly relates to a kind of specific inductive capacity high-temperature space calibration steps.
Background technology
Electromagnetic measuring system based on open-loop antenna has the advantage such as noncontact, non-demolition, is convenient to realize in high temperature environments, measures the specific inductive capacity of measured material.Because hot environment can bring error to measurement result, therefore, measure again after generally will carrying out high temperature correction for electromagnetic measuring system.
Traditional high temperature correction and measuring process are: first calibration measurement system under normal temperature environment, progressively heat up under the prerequisite of not placing measured material, network analyzer, antenna, path, high-temperature cabinets etc. will produce error due to hot environment, record the measuring error data of each temperature spot and store, then, put into measured material again to measure, raised temperature obtains measurement data, the measuring error data of measurement data and storage are processed, thus obtain the scattering parameter of measured material under target temperature, for calculating the specific inductive capacity of measured material under target temperature.
But this method Measuring Time is longer, cannot ensure the shortcomings such as the system repeatability of twice intensification, measuring error is larger.
Summary of the invention
The embodiment of the present application provides a kind of specific inductive capacity high-temperature space calibration steps and device, longer in order to solve Measuring Time in prior art, cannot ensure the system repeatability of twice intensification, the problem that measuring error is larger.
A kind of specific inductive capacity high-temperature space calibration steps that the embodiment of the present application provides, comprising:
Full two-port calibration is carried out to specific inductive capacity high-temperature space measuring system, described specific inductive capacity high-temperature space measuring system is set up by electromagnetic measuring system and high-temperature cabinet and is formed, described electromagnetic measuring system comprise measuring table, emitting antenna, receiving antenna, can measured material, network analyzer, the controller of plug, described high-temperature cabinet has the microwave window of low reflection characteristic;
By regulating the temperature of described high-temperature cabinet, high temperature GRL calibration is carried out to the specific inductive capacity high-temperature space measuring system after full two-port calibration;
Adopt described measured material to be fixed on by measured material in described high-temperature cabinet, the specific inductive capacity high-temperature space measuring system after being calibrated by high temperature GRL, determines described measured material S parameter in high temperature environments;
According to the S parameter determined, determine the specific inductive capacity of described measured material at the temperature that described hot environment is corresponding.
Alternatively, the suitable environment of described specific inductive capacity high-temperature space measuring system comprises 8 millimeters of frequency range hot environments.
Alternatively, described emitting antenna and described receiving antenna just right, and be connected with described network analyzer respectively and form loop, described high-temperature cabinet is between described emitting antenna and described receiving antenna, described test platform is used for fixing and regulate the distance between described emitting antenna, described high-temperature cabinet, described receiving antenna three, described network analyzer is for measuring the relevant electromagnetic parameter of described loop, and described controller is for controlling described network analyzer.
Alternatively, described high-temperature cabinet comprises the inner bag of outer case, heat-insulation layer and ceramic material, and described microwave window is positioned on the face of described high-temperature cabinet just to described emitting antenna, described receiving antenna, described high-temperature cabinet has the measured material groove for inserting measured material.
Alternatively, the structure of described microwave window comprises the two-sided wedge rib list structure with low reflection characteristic.
Alternatively, full two-port calibration is carried out to specific inductive capacity high-temperature space measuring system, specifically comprises:
The waveguide mouth place of the emitting antenna in specific inductive capacity high-temperature space measuring system and receiving antenna, adopts SOLT calibration steps or TRL calibration steps to carry out full two-port calibration.
Alternatively, described high temperature GRL calibration comprises thru calibration and reflection calibration;
By regulating the temperature of described high-temperature cabinet, high temperature GRL calibration being carried out to the specific inductive capacity high-temperature space measuring system after full two-port calibration, specifically comprises:
The described high-temperature cabinet of vacant for described measured material insertion is led directly to standard as high temperature, progressively regulate the temperature raising described high-temperature cabinet to target temperature corresponding to hot environment, complete the thru calibration of the specific inductive capacity high-temperature space measuring system after to full two-port calibration;
Extract described measured material and put into predetermined high temperature short circuit standard, reflection calibration is carried out to the specific inductive capacity high-temperature space measuring system after thru calibration.
The embodiment of the present application, by technique scheme, can complete secondary calibration in high temperature environments, for Real Time Correction System error, revise in real time and shorten Measuring Time, and the error of measuring system obtains real-time correction, improves the accuracy of measurement result.
Accompanying drawing explanation
Accompanying drawing described herein is used to provide further understanding of the present application, and form a application's part, the schematic description and description of the application, for explaining the application, does not form the improper restriction to the application.In the accompanying drawings:
The process of the specific inductive capacity high-temperature space calibration steps that Fig. 1 provides for the embodiment of the present application;
The structural representation of the specific inductive capacity high-temperature space measuring system that Fig. 2 provides for the embodiment of the present application;
The structural representation of the high-temperature cabinet that Fig. 3 provides for the embodiment of the present application;
The structural representation of the pluggable test fixture that Fig. 4 provides for the embodiment of the present application;
The microwave window schematic diagram of the two-sided wedge rib list structure that Fig. 5 a provides for the embodiment of the present application;
The two-sided wedge rib shape cellular construction three-dimensional surface schematic diagram that Fig. 5 b provides for the embodiment of the present application;
The two-sided wedge rib shape cellular construction floor map that Fig. 5 c provides for the embodiment of the present application;
The voltage standing wave ratio (VSWR) of the microwave window of the two-sided wedge rib list structure that Fig. 6 provides for the embodiment of the present application and decay simulation result.
Fig. 7 provides for the embodiment of the present application, system signal flow graph when specific inductive capacity high-temperature space measuring system GRL calibrates;
Fig. 8 provides for the embodiment of the present application, simplification signal flow diagram when specific inductive capacity high-temperature space measuring system GRL calibrates;
Fig. 9 provides for the embodiment of the present application, O 21and T 21phase place determination schematic diagram.
Embodiment
For making the object of the application, technical scheme and advantage clearly, below in conjunction with the application's specific embodiment and corresponding accompanying drawing, technical scheme is clearly and completely described.Obviously, described embodiment is only some embodiments of the present application, instead of whole embodiments.Based on the embodiment in the application, those of ordinary skill in the art are not making the every other embodiment obtained under creative work prerequisite, all belong to the scope of the application's protection.
The application's object is to provide a kind of specific inductive capacity high-temperature space calibration steps.Set up 8 millimeters of (mm) frequency range specific inductive capacity high-temperature space measuring systems, design the high-temperature cabinet of low reflection characteristic, pluggable measured material carries out real time high temperature error correction, calibration system under normal temperature is applied to 600 DEG C of hot environments, reliable dielectric constant measurement result is obtained in 26.5GHz ~ 40GHz, room temperature (Roomtemperature, RT) ~ 600 DEG C temperature range.Below the scheme of the application is specifically described.
The process of the specific inductive capacity high-temperature space calibration steps that Fig. 1 provides for the embodiment of the present application.This process specifically can comprise the following steps:
S101: full two-port calibration is carried out to specific inductive capacity high-temperature space measuring system, described specific inductive capacity high-temperature space measuring system is set up by electromagnetic measuring system and high-temperature cabinet and is formed, described electromagnetic measuring system comprise measuring table, emitting antenna, receiving antenna, can measured material, network analyzer, the controller of plug, described high-temperature cabinet has the microwave window of low reflection characteristic.
In the embodiment of the present application, electromagnetic measuring system can be the system for carrying out measuring electromagnetic parameters based on open-loop antenna.Specific inductive capacity high-temperature space measuring system can be set up in advance with electromagnetic measuring system and high-temperature cabinet, for in the temperature range of normal temperature to high temperature, accurately and reliably measure the electromagnetic parameter (can comprise specific inductive capacity etc.) of measured material, this temperature range can be specifically RT ~ 600 DEG C.
Fig. 2 shows the specific inductive capacity high-temperature space measuring system set up in the embodiment of the present application.
In fig. 2, electromagnetic measuring system is primarily of receiving antenna, transmitting antenna, measuring table, measured material, network analyzer and waveguide calibrating device, spatial calibration part, Splices cable and the composition such as controller and testing software.
Dual-mode antenna can select corrugated horn lens antenna, is the signal transmitting and receiving parts of measuring system; Measuring table is the hardware body of measuring system, for the distance between FRPA-Fixed Radiation Pattern Antenna, receiving antenna, high-temperature cabinet and adjustment three; Measured material is used for fixing measured material, ensures and the parallel of dual-mode antenna and center contraposition; Network analyzer and calibrating device, Splices cable etc. are set up for measuring system and are measured; Controller and Survey Software, in measuring system Zhong Shi control center, control the automatic test of network analyzer and the calculating of electromagnetic parameter.In electromagnetic measuring system, measuring principle is: based on the application of transmission reflectometry at free-space field, by measuring the scattering parameter of measured material, calculate electromagnetic parameter in conjunction with the parameter such as survey frequency, thickness of sample.
In the embodiment of the present application, described full two-port calibration can carry out under normal temperature state.The systematic error of the object of carrying out full two-port calibration mainly roll-off network analyser, and revise the connection error of Splices cable.
S102: by regulating the temperature of described high-temperature cabinet, carries out high temperature GRL calibration to the specific inductive capacity high-temperature space measuring system after full two-port calibration.
In the embodiment of the present application, the path between both emitting antenna and receiving antenna and the high-temperature cabinet internal fixtion test fixture of detected materials, can think an error breakout box respectively.The object that space GRL in step S102 calibrates mainly determines the characteristic of these two error breakout boxs.
S103: adopt described measured material to be fixed on by measured material in described high-temperature cabinet, the specific inductive capacity high-temperature space measuring system after being calibrated by high temperature GRL, determines described measured material S parameter in high temperature environments.
S104: according to the S parameter determined, determines the specific inductive capacity of described measured material at the temperature that described hot environment is corresponding.
In the embodiment of the present application, after determining S parameter, can according to S parameter, and the parameter such as the thickness of measured material, survey frequency, calculate the specific inductive capacity of measured material.
By said method, secondary calibration can be completed in high temperature environments, for Real Time Correction System error, revise in real time and shorten Measuring Time, and the error of measuring system obtain real-time correction, improves the accuracy of measurement result.
For the ease of understanding, below the step in Fig. 1 is illustrated further.
In the embodiment of the present application, the suitable environment of described specific inductive capacity high-temperature space measuring system comprises 8 millimeters of frequency range hot environments.Certainly, in actual applications, the suitable environment of specific inductive capacity high-temperature space measuring system can also comprise other environment, and the application does not limit this.
In the embodiment of the present application, for the specific inductive capacity high-temperature space measuring system in Fig. 1, described emitting antenna and described receiving antenna just right, and be connected with described network analyzer respectively and form loop, described high-temperature cabinet is between described emitting antenna and described receiving antenna, described test platform is used for fixing and regulate the distance between described emitting antenna, described high-temperature cabinet, described receiving antenna three, described network analyzer is for measuring the relevant electromagnetic parameter of described loop, and described controller is for controlling described network analyzer.
Further, measured material can be placed in high-temperature cabinet.When the measured material securing measured material is in high-temperature cabinet, emitting antenna, distance between receiving antenna and measured material should meet far field condition, emitting antenna, distance between receiving antenna and high-temperature cabinet should be not less than the minimum safe distance not damaging requirement, thus, can prevent from affecting the accuracy to subsequent measurement and reliability.
In the embodiment of the present application, described high-temperature cabinet can comprise the inner bag of outer case, heat-insulation layer and ceramic material, described microwave window is positioned on the face of described high-temperature cabinet just to described emitting antenna, described receiving antenna, described high-temperature cabinet has the measured material groove for inserting measured material.For the ease of understanding, in actual applications, the high-temperature cabinet that can be used for the scheme implementing the application is described, as shown in Figure 3, Figure 4.
Fig. 3 is the structural representation of this high-temperature cabinet.
High-temperature cabinet is divided into inner bag, heat-insulation layer and outer case three-decker, and wherein, the material of inner bag can be pottery, by abrasive tool moulding, is of a size of 30cm × 30cm × 30cm; In order to reach good heat insulation effect, heat-insulation layer can adopt the heat-preservation cotton of 10cm; Outer case can adopt high temperature brick, and is supplementing heat-insulation layer with microwave window cooperation place, makes up microwave window in heating process thinner and cause more heat to be revealed.Microwave window is offered in the high-temperature cabinet left and right sides, is of a size of 30cm × 30cm, adopts the pottery of low reflection characteristic to carry out closed high temperature case as window.High-temperature cabinet also has the measured material groove for inserting test fixture.
Fig. 4 is a kind of structural representation of pluggable test fixture.
Measured material adopts ceramic abrasive tool shaping, and measured material in time domain response without display, and will remain unchanged in the position of calibration and measuring process middle distance emitting antenna.
The structure of microwave window is described further.Described microwave window has low reflection characteristic.The size of the embodiment of the present application to microwave window does not limit, and 240mm × 240mm is an example of its size.The structure of microwave window mainly contains flat and wedging type two kinds of forms.The embodiment of the present application mainly adopts the microwave window of wedging type structure.Below the advantage of the microwave window of wedging type structure is analyzed.
Adopt the microwave window of two-sided wedge rib list structure effectively can reduce reflection characteristic, the microwave window of two-sided wedge rib list structure as shown in Figure 5 a, the microwave window of two-sided wedge rib list structure can be made up of multiple two-sided wedge rib shape cellular construction, and two-sided wedge rib shape cellular construction is as shown in Fig. 5 b (three-dimensional surface) and Fig. 5 c (plane).The voltage standing wave ratio (VSWR) of the microwave window of two-sided wedge rib list structure and decay simulation result are as shown in Figure 6, from simulation result, the microwave window standing wave of two-sided wedge rib list structure compared with plane microwave window standing-wave ratio (SWR) and attenuation characteristic much superior, and reflection characteristic is wide compared with flat rubber belting relatively widens.
The type of heating of the embodiment of the present application to high-temperature cabinet does not limit.The scheme of a kind of high-temperature cabinet heating that the embodiment of the present application provides in practical application is exemplarily described.
4 Si-Mo rods chosen by high-temperature cabinet, are connected in series, and symmetry is placed on left side and right side in high-temperature cabinet.This structure is conducive to ensureing temperature homogeneity, is also conducive to the intensification of measured material.The heating power needed due to the high temperature of such as 1500 DEG C is comparatively large, is about 10000W.Adopt accurate S type platinum thermocouple sensor thermometric, adopt the temperature value of temperature controller to feed back, employing logic control algorithm adds optimize PID algorithm realizes temperature programmable regulating by the electric current adjusting Si-Mo rod.Temperature parameter can facilitate and adjusts rapidly, and temperature-controlled precision is 1 DEG C.Temperature-controlled box can realize 16 sections of points of thermograde programming mode heating, realizes the measurement under multiple target temperature in a heating process.
In the embodiment of the present application, for step S102, full two-port calibration is carried out to specific inductive capacity high-temperature space measuring system, specifically can comprise: the waveguide mouth place of the emitting antenna in specific inductive capacity high-temperature space measuring system and receiving antenna, adopt SOLT calibration steps or TRL calibration steps to carry out full two-port calibration.Wherein, in full two-port calibration process, reference surface can be arranged on described waveguide mouth place.
By full two-port calibration, can the systematic error of roll-off network analyser, and the connection error of Splices cable.
In the embodiment of the present application, for step S103, described high temperature GRL calibration comprises thru calibration and reflection calibration; By regulating the temperature of described high-temperature cabinet, high temperature GRL calibration is carried out to the specific inductive capacity high-temperature space measuring system after full two-port calibration, specifically comprise: the described high-temperature cabinet of vacant for described measured material insertion is led directly to standard as high temperature, progressively regulate the temperature raising described high-temperature cabinet to target temperature corresponding to hot environment, complete the thru calibration of the specific inductive capacity high-temperature space measuring system after to full two-port calibration; Extract described measured material and put into predetermined high temperature short circuit standard, reflection calibration is carried out to the specific inductive capacity high-temperature space measuring system after thru calibration.For the ease of understanding, below in actual applications, a kind of embodiment that space GRL calibrates is described in detail.
In specific inductive capacity high-temperature space measuring system after full two-port calibration, waveguide mouth is connected with corresponding emitting antenna, receiving antenna, regulates the distance between emitting antenna and receiving antenna, ensures to meet far-field measurement condition.Waveguide mouth can think an error breakout box to the path of measured material, and GRL calibration target determines two error breakout box characteristics, moves to measured material place with reference to face.
GRL calibrates needs two calibration criterions: high temperature short circuit standard and high temperature lead directly to standard.High temperature short circuit standard adopts enough large desired metallic plate as short board, is placed on measured material place, carries out high temperature reflection calibration; High temperature leads directly to standard and adopts vacant measured material, carries out high temperature thru calibration.
Derivation GRL calibration algorithm below.The waveguide mouth that emitting antenna is corresponding goes out as with reference to face 1, waveguide mouth place corresponding to receiving antenna as with reference to face 2, measured material near the one side of emitting antenna as with reference to face 3, measured material near the one side of receiving antenna as with reference to face 4.
Describe error breakout box by S parameter, system signal flow graph when specific inductive capacity high-temperature space measuring system GRL calibrates as shown in Figure 7.The S parameter of the error breakout box between reference surface 1 and reference surface 3 is defined as O, is respectively O 11, O 21, O 12, O 22; The S parameter of the error breakout box between reference surface 2 and reference surface 4 is defined as T, is respectively T 11, T 21, T 12, T 22, then.Namely GRL calibration target determines O and T parameter, totally 8 unknown quantitys.Because transmission path is symmetrical, O 21=O 12, T 21=T 12, error term remains 6, is O 11, O 21, O 22, T 11, T 21, T 22.
O 11and T 11obtained by Time-Domain Technique.First O is obtained 11, waveguide mouth, after SOLT calibration, is placed short board at measured material place, is passed through S 11time domain waveform, finds amplitude maximum and short board position is t 1.Vacant measured material, measures S 11time domain, is set to [0, t by time domain door (gate) 1], the frequency domain response comprised in door is the reflection O from antenna end face to measured material 11.In like manner by S 22replace S 11, place short board at measured material place (with measurement O 11position identical), pass through S 22time domain waveform, finds amplitude maximum and short board position is t 2.Vacant measured material, measures S 22time domain, is set to [0, t by time domain door gate 2], the frequency domain response comprised in door is the reflection T from antenna end face to measured material 11.By O 11and T 11embed original two-port calibration, signal flow diagram becomes shown in Fig. 8.
Γ 1=S nA11-O 11; Formula (1)
Γ 2=S nA22-T 11; Formula (2)
In formula: S nA11after SOLT calibration, the reflection parameters that network analyzer records from 1 position;
S nA22after SOLT calibration, the reflection parameters that network analyzer records from 2 positions;
Γ 1it is the reflection parameters that 1 port is entered viewed from measured material from antenna;
Γ 2it is the reflection parameters that 2 ports are entered viewed from measured material from antenna.
At this moment, error breakout box remains 4 errors and not yet determines, is respectively O 21, O 22, T 21, T 22, obtain this four errors by measurement reflectance standard and straight-through standard.
Reflectance standard is the desired metallic plate that a thickness is known, and its size can think that enough greatly space is totally reflected relative to measurement wavelength.Reflectance standard can be described as S 11=S 22=-1, S 21=S 12=0, obtain formula (3) and formula (4).
Γ P l a t e _ 1 = O 21 O 12 1 + O 22 ; Formula (3)
Γ P l a t e _ 2 = T 21 T 12 1 + T 22 ; Formula (4)
Air occupied state when straight-through standard is vacant measured material.In desirable spatial approach, think that delivering path is continuously coupling, no reflection events; Transmit lossless, only have phase place to move, the amount of moving is because the length of straight-through standard determined.The S parameter of straight-through standard is represented, A with A 11=A 22=0, wherein ω be survey frequency, the length of ε and μ to be the specific inductive capacity of air and magnetic permeability, d be straight-through standard, equal the thickness of short board, obtain formula (5) and formula (6).
Γ a i r _ 1 = A 21 A 12 O 21 O 12 T 22 1 - O 22 T 22 ; Formula (5)
Γ a i r _ 2 = A 21 A 12 T 21 T 12 O 22 1 - T 22 O 22 ; Formula (6)
In formula (3) ~ (6), if y 1=O 21=O 12, y 2=O 22, y 3=T 21=T 12, y 4=O 22.For the ease of calculating, A 21a 12known, represent with e.Can try to achieve:
O 21 = O 12 = y 1 y 2 ( y 3 - ey 1 ) ( ey 1 y 2 - y 1 y 4 - y 2 y 3 ) ey 1 y 2 - y 2 y 3 ;
O 22 = - y 1 y 4 y 2 ( ey 1 - y 3 ) ;
T 21 = T 12 = y 1 y 2 ( y 4 - ey 2 ) ( ey 1 y 2 - y 1 y 4 - y 2 y 3 ) ey 1 y 2 - y 1 y 4 ;
T 22 = - y 2 y 3 y 1 ( ey 2 - y 4 ) ;
O is obtained by above-mentioned derivation 21, O 12, O 22, T 21, T 12, T 22.But the O now obtained 21, O12 and T 21, T 12can not be directly used in error correction, this is because the application of time domain door makes the phase place of transmission path create nonlinearity erron, phase place needs to be determined by time domain path.
As shown in Figure 9, t 1and t 2at acquisition O 11and T 11determine.Suppose that calibration short board thickness is lshort, O 21time delay is t_O 21=t 1/ 2-lshort/ (2c), T 21time delay is t_T 21=t 2/ 2-lshort/ (2c).Then phase place calculates by formula (7) and formula (8).
P (O 12)=P (O 21)=e jw (t1/2-lshort/ (2c)); Formula (7)
P (T 12)=P (T 21)=e jw (t2/2-lshort/ (2c)); Formula (8)
In formula: t 1for short board is relative to the position of reference surface 1, unit is second (s);
T 2for short board is relative to the position of reference surface 2, unit is second (s);
Lshort is short board thickness, and unit is rice (m).
So far, O and T of error breakout box all determines, space GRL calibration process all completes.Through GRL calibration, emitting antenna, receiving antenna, measured material equal error are corrected, and reference surface has moved calibration short board face 3 and 4 from waveguide mouth 1 and 2.
It is more than the explanation to the application's scheme.Further, the embodiment of the present application additionally provides in actual applications, and a kind of specific embodiments of the application's scheme and measurement result mainly comprise following:
Design a pair corrugated lens antenna; Network analyzer selects Agilent company N5225A; Waveguide calibrating device selects Agilent company P11664A; Spatial calibration part adopts aluminum short board, size 200mm × 200mm × 5mm; Develop high-temperature cabinet voluntarily, temperature covers RT ~ 600 DEG C; Develop measuring table etc. voluntarily and set up system.
First start controller and Survey Software, counting etc. to measurement parameter, survey frequency, measurement is arranged; SOLT method is adopted to complete full two-port calibration at waveguide mouth; Start high-temperature cabinet, Offered target temperature, after being stabilized in target temperature, completing high temperature GRL and calibrates; Tested stupalith (200mm × 200mm × 5mm) is placed on test fixture, treats that target temperature is stablized again, gather and the specific inductive capacity of measured material under calculating target temperature.During 600 DEG C of temperature, dielectric constant measurement result is 9.08 ~ 9.29.
Those skilled in the art should understand, embodiments of the invention can be provided as method, system or computer program.Therefore, the present invention can adopt the form of complete hardware embodiment, completely software implementation or the embodiment in conjunction with software and hardware aspect.And the present invention can adopt in one or more form wherein including the upper computer program implemented of computer-usable storage medium (including but not limited to magnetic disk memory, CD-ROM, optical memory etc.) of computer usable program code.
Also it should be noted that, term " comprises ", " comprising " or its any other variant are intended to contain comprising of nonexcludability, thus make to comprise the process of a series of key element, method, commodity or equipment and not only comprise those key elements, but also comprise other key elements clearly do not listed, or also comprise by the intrinsic key element of this process, method, commodity or equipment.When not more restrictions, the key element limited by statement " comprising ... ", and be not precluded within process, method, commodity or the equipment comprising described key element and also there is other identical element.
The foregoing is only the embodiment of the application, be not limited to the application.To those skilled in the art, the application can have various modifications and variations.Any amendment done within all spirit in the application and principle, equivalent replacement, improvement etc., within the right that all should be included in the application.

Claims (7)

1. a specific inductive capacity high-temperature space calibration steps, is characterized in that, comprising:
Full two-port calibration is carried out to specific inductive capacity high-temperature space measuring system, described specific inductive capacity high-temperature space measuring system is set up by electromagnetic measuring system and high-temperature cabinet and is formed, described electromagnetic measuring system comprise measuring table, emitting antenna, receiving antenna, can measured material, network analyzer, the controller of plug, described high-temperature cabinet has the microwave window of low reflection characteristic;
By regulating the temperature of described high-temperature cabinet, high temperature GRL calibration is carried out to the specific inductive capacity high-temperature space measuring system after full two-port calibration;
Adopt described measured material to be fixed on by measured material in described high-temperature cabinet, the specific inductive capacity high-temperature space measuring system after being calibrated by high temperature GRL, determines described measured material S parameter in high temperature environments;
According to the S parameter determined, determine the specific inductive capacity of described measured material at the temperature that described hot environment is corresponding.
2. the method for claim 1, the suitable environment of described specific inductive capacity high-temperature space measuring system comprises 8 millimeters of frequency range hot environments.
3. the method for claim 1, it is characterized in that, described emitting antenna and described receiving antenna just right, and be connected with described network analyzer respectively and form loop, described high-temperature cabinet is between described emitting antenna and described receiving antenna, described test platform is used for fixing and regulate the distance between described emitting antenna, described high-temperature cabinet, described receiving antenna three, described network analyzer is for measuring the relevant electromagnetic parameter of described loop, and described controller is for controlling described network analyzer.
4. the method for claim 1, it is characterized in that, described high-temperature cabinet comprises the inner bag of outer case, heat-insulation layer and ceramic material, described microwave window is positioned on the face of described high-temperature cabinet just to described emitting antenna, described receiving antenna, described high-temperature cabinet has the measured material groove for inserting measured material.
5. the method as described in claim 1 or 4, is characterized in that, the structure of described microwave window comprises the two-sided wedge rib list structure with low reflection characteristic.
6. the method for claim 1, is characterized in that, carries out full two-port calibration, specifically comprise specific inductive capacity high-temperature space measuring system:
The waveguide mouth place of the emitting antenna in specific inductive capacity high-temperature space measuring system and receiving antenna, adopts SOLT calibration steps or TRL calibration steps to carry out full two-port calibration.
7. the method for claim 1, is characterized in that, described high temperature GRL calibration comprises thru calibration and reflection calibration;
By regulating the temperature of described high-temperature cabinet, high temperature GRL calibration being carried out to the specific inductive capacity high-temperature space measuring system after full two-port calibration, specifically comprises:
The described high-temperature cabinet of vacant for described measured material insertion is led directly to standard as high temperature, progressively regulate the temperature raising described high-temperature cabinet to target temperature corresponding to hot environment, complete the thru calibration of the specific inductive capacity high-temperature space measuring system after to full two-port calibration;
Extract described measured material and put into predetermined high temperature short circuit standard, reflection calibration is carried out to the specific inductive capacity high-temperature space measuring system after thru calibration.
CN201510976043.8A 2015-12-22 2015-12-22 Dielectric constant high-temperature space calibration method Pending CN105445564A (en)

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CN111273110A (en) * 2020-03-19 2020-06-12 中国振华集团云科电子有限公司 Full-temperature automatic testing system and method for S parameter of microwave component

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