CN111157580A - High-temperature material electromagnetic parameter measurement system and method based on fixture de-embedding - Google Patents
High-temperature material electromagnetic parameter measurement system and method based on fixture de-embedding Download PDFInfo
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- 239000000463 material Substances 0.000 title claims abstract description 55
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- 239000012780 transparent material Substances 0.000 claims abstract description 17
- 230000005540 biological transmission Effects 0.000 claims description 8
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 6
- 230000035699 permeability Effects 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
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- 239000003989 dielectric material Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
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- G—PHYSICS
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- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2688—Measuring quality factor or dielectric loss, e.g. loss angle, or power factor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
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Abstract
The utility model provides a high temperature material electromagnetic parameter measurement system and method based on anchor clamps are removed and are inlayed, heat through placing the sample in the incubator and heating, add the heated board of wave-transparent material preparation in sample both sides and solve the inhomogeneous, unstable problem of temperature when sample surface high temperature heating, guarantee the temperature accuracy. The separation of interference signals and effective signals is carried out through the time domain function of the vector network analyzer, the interference influence caused by a high-temperature clamp is reduced, and the test precision is improved. A GRL calibration method is adopted in free space, and the full two-port calibration can be completed only by combining direct connection and reflection measurement with a time domain gate technology, so that the electromagnetic parameter measurement of fixture de-embedding is realized.
Description
Technical Field
The disclosure relates to the technical field related to electromagnetic parameter testing, in particular to a high-temperature material electromagnetic parameter measuring system and method based on fixture de-embedding.
Background
The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.
With the development of the fields of aerospace and radio frequency communication, the applied environment is more and more harsh. The variable temperature electromagnetic property of the microwave material, especially the research on the electromagnetic parameters in the high temperature environment, is an extremely important judgment basis for the selection, development and application of the microwave material. Therefore, the method for researching the accurate measurement of the electromagnetic parameters of the high-temperature material has important significance.
For the high-temperature electromagnetic parameter test of materials, a terminal short circuit method, a resonant cavity method and the like are mainly used at present. The terminal short circuit method is characterized in that a sample to be tested is placed at a terminal of a section of transmission measuring line and is abutted against a metal short circuit plate, no-load calibration is carried out on the terminal short circuit measuring line before testing, and complex dielectric parameters of the sample to be tested are calculated by testing the complex reflection coefficient of the short circuit transmission measuring line after the sample is loaded. The resonant cavity method is characterized in that a test sample is placed at the position with the strongest electric field or magnetic field, and the electromagnetic parameters of the sample to be tested can be calculated through inversion according to the offset of resonant frequency f of a resonant cavity before and after the sample to be tested is placed and the relation between the variable quantity of the quality factor Q of the resonant cavity and the electromagnetic parameters of the material.
The microwave antenna is used for transmitting and receiving electromagnetic waves, when the electromagnetic waves are transmitted to a sample to be measured, the electromagnetic waves are reflected and transmitted on the surface of the sample, the antenna is used for measuring the reflected and transmitted electromagnetic waves, and then the electromagnetic parameters of the sample to be measured are calculated. The free space method is to radiate electromagnetic waves to a free space by using an antenna, receive and measure reflection and transmission signals of the material to the transmitted electromagnetic waves by using the antenna, and calculate electromagnetic parameters of the dielectric material.
For the material high-temperature electromagnetic parameter test, when the material high-temperature electromagnetic parameter test is carried out by a terminal short circuit method, because the sample and the waveguide clamp have certain volume expansion at high temperature, a gap between the sample and the clamp can introduce a great error to the test precision, and the test precision can not be ensured. The existing resonant cavity testing method is to heat the material and then add the material into the resonant cavity rapidly for testing, so that the accuracy of the testing temperature cannot be guaranteed, and the resonant cavity testing method cannot test related parameters such as the magnetic permeability of the material. When the temperature change test is carried out by using a free space method at the present stage, the temperature uniformity on the sample cannot be ensured by heating the sample, and a great test error can be introduced due to the thermal stability problem of the temperature. The addition of the thermal insulation device introduces new unknown test errors in the device material.
Disclosure of Invention
The invention aims to solve the problems and provides a high-temperature material electromagnetic parameter measuring system and method based on fixture de-embedding. The separation of interference signals and effective signals is carried out through the time domain function of the vector network analyzer, the interference influence caused by a high-temperature clamp is reduced, and the test precision is improved. A GRL calibration method is adopted in free space, and the full two-port calibration can be completed only by combining direct connection and reflection measurement with a time domain gate technology, so that the electromagnetic parameter measurement of fixture de-embedding is realized.
In order to achieve the purpose, the following technical scheme is adopted in the disclosure:
one or more embodiments provide a high-temperature material electromagnetic parameter measurement system based on clamp de-embedding, including a main control unit, a vector network analyzer connected with the main control unit, and a signal receiving device and a signal transmitting device connected with the vector network analyzer, the signal receiving device and the signal transmitting device respectively face a sample to be measured, and further including a sample clamping device, the sample clamping device includes a heating box and a clamp in the heating box, the heating box has at least two opposite side surfaces which are high temperature resistant wave-transparent material plates, the sample to be measured is arranged on the clamp, and the surface to be measured of the sample to be measured is arranged opposite to the high temperature resistant wave-transparent material plates.
Further, the heating box comprises a box body and a box door, and the box door and the side face opposite to the box door are arranged to be high-temperature-resistant wave-transparent material plates.
Furthermore, the clamp comprises a hanging piece fixedly arranged in the heating box and a clamping piece detachably connected with the hanging piece, and the clamping piece is used for clamping the edge of the sample to be tested and hung on the hanging piece.
Further, the hanging piece comprises a hanging frame and a hook arranged on the hanging frame, the hanging frame is arranged at the edge of the opposite surface of the sample to-be-measured surface and the high-temperature-resistant wave-transmitting material plate and does not shield the opposite surface, the clamping piece at least comprises two clamping pieces with the same shape, and a hanging hole corresponding to the position of the hook is formed in the clamping piece.
Further, the heating member of the heating box is disposed on the other side of the heating box than the side opposite to the surface to be measured of the sample.
Further, the material of the high-temperature resistant wave-transparent material plate is quartz, silicon nitride or zirconia.
Further, the signal receiving device and the signal transmitting device are focusing lens horn antennas respectively.
A high-temperature material electromagnetic parameter measuring method based on clamp de-embedding comprises a clamp de-embedding method, and the clamp de-embedding method comprises the following steps:
carrying out constant temperature treatment on the sample clamping device to a measurement temperature range;
separating interference signals from effective signals by using a time domain function of a vector network analyzer, and sending the effective signals for direct connection and reflection calibration: when the direct measurement is carried out, a sample to be measured is not put into the fixture for measurement, and when the reflection measurement is carried out, a reflection calibration plate is added into the high-temperature fixture for measurement.
Further, the step of the method for removing the embedding of the clamp further comprises the following steps of fixing a sample to be measured and measuring:
arranging a sample to be measured in a clamping device, and carrying out constant temperature treatment to a measurement temperature range;
separating an interference signal from an effective signal by using a time domain function of a vector network analyzer, sending the effective signal to perform free space method test, and acquiring a reflection parameter and a transmission parameter of a sample to be tested and data received by the vector network analyzer;
electromagnetic parameters of the material are calculated from the acquired data.
Further, calculating the electromagnetic parameters of the material by an NRW method according to the acquired data; or the electromagnetic parameters include permittivity, permeability, and loss tangent.
Compared with the prior art, the beneficial effect of this disclosure is:
(1) this is disclosed heats through placing the sample in the incubator in, and the heated board that wave-transparent material was made is added in sample both sides and the temperature when solving sample surface high temperature heating is inhomogeneous, the unstable problem, guarantees the temperature accuracy.
(2) According to the method, the interference signal and the effective signal are separated through the time domain function of the vector network analyzer, the interference influence caused by a high-temperature clamp is reduced, and the test precision is improved. A GRL calibration method is adopted in free space, and full two-port calibration can be completed only by combining direct connection and reflection measurement with a time domain gate technology.
(3) Compared with methods such as a terminal short circuit method and a resonant cavity method, the free space method has the characteristics of non-contact measurement of the sample, is beneficial to high-temperature heating of the material, and has the advantage of convenience in operation.
Drawings
The accompanying drawings, which are included to provide a further understanding of the disclosure, illustrate embodiments of the disclosure and together with the description serve to explain the disclosure and not to limit the disclosure.
FIG. 1 is a system architecture diagram of an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of a sample holding device according to an embodiment of the disclosure;
FIG. 3 is a schematic structural view of a clamp 4 according to an embodiment of the present disclosure;
FIG. 4 is a free space material test system error model;
FIG. 5 is a schematic diagram of a through measurement calibration in a fixture de-nesting method according to an embodiment of the disclosure;
FIG. 6 is a schematic diagram of reflectance measurement calibration in a fixture de-embedding method according to an embodiment of the disclosure;
FIG. 7 is a time domain before time domain gate time domain test graph of the test method of the embodiment of the present disclosure;
FIG. 8 is a time domain test graph after a time domain gate is added to the test method of the disclosed embodiment;
FIG. 9 is a graph of a frequency domain test before the time domain gate for the test method of the disclosed embodiment;
FIG. 10 is a graph of a frequency domain test after adding a time domain gate to the test method of an embodiment of the present disclosure;
wherein: 1. the device comprises signal receiving equipment, 2 signal transmitting equipment, 3 heating boxes, 4 clamps, 3-1 heating parts, 3-2 box doors, 3-3 supporting legs, 3-4 clamping parts, 3-5 high-temperature-resistant wave-transmitting material plates, 4-1 hanging parts, 4-2 clamping parts, 4-3 hanging holes, 41-1 hanging frames, 41-2 hanging hooks.
The specific implementation mode is as follows:
the present disclosure is further described with reference to the following drawings and examples.
It should be noted that the following detailed description is exemplary and is intended to provide further explanation of the disclosure. Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this disclosure belongs.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present disclosure. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments in the present disclosure may be combined with each other. The embodiments will be described in detail below with reference to the accompanying drawings.
In the technical solutions disclosed in one or more embodiments, as shown in fig. 1 and 2, a high-temperature material electromagnetic parameter measurement system based on fixture de-embedding includes a main control unit, a vector network analyzer connected with the main control unit, and a signal receiving device and a signal transmitting device connected with the vector network analyzer, where the signal receiving device 1 and the signal transmitting device 2 respectively face a sample to be measured, and further includes a sample holding device, where the sample holding device includes a heating box 3 and a fixture 4 in the heating box 3, the heating box has at least two opposite side surfaces being high-temperature-resistant wave-transparent material plates 3-5, the sample to be measured is disposed on the fixture, and a surface to be measured of the sample to be measured is disposed opposite to the high-temperature-resistant wave-transparent material plates.
The signal receiving device 1 and the signal transmitting device 2 can be focusing lens horn antennas respectively, a sample to be tested is placed between the receiving and transmitting antennas, and the performance characteristic of the material is tested in an electromagnetic wave space transmission mode. The main control unit can be a main control computer, the main control computer controls the vector network analyzer to generate microwave millimeter wave signals, the signals are transmitted and received through the transmitting and receiving antenna to obtain the reflection parameters and the transmission parameters of the sample, meanwhile, the main control computer obtains the data obtained by the vector network analyzer, and the parameters of the material, such as the dielectric constant, the magnetic conductivity, the loss angle tangent value and the like, are solved through calculation.
Optionally, the material of the high temperature resistant wave-transparent material plates 3-5 may be quartz, silicon nitride, zirconia, or the like.
The side face of the box body of the heating box is provided with the high-temperature-resistant wave-transparent material plates 3-5 for heat insulation and allowing microwaves to pass through, the sample can be arranged in the heating box, and the sample is arranged in the heating box, so that the temperature control is accurate, the electromagnetic parameter of the material to be measured can be measured at an accurate high-temperature, and the measurement error caused by inaccurate temperature is corrected.
As a further improvement, the heating form of the heating device may be set according to specific needs, optionally, except for the side opposite to the detection side of the sample to be detected, the other sides of the heating box 3 may be uniformly provided with the heating component 3-1, and the heating material adopted by the heating component 3-1 may be a silicon carbide composite material, in this embodiment, preferably, the opposite sides of the box door and the box door are provided with the high temperature resistant wave-transmitting material plate 3-5, the sample to be detected and the high temperature resistant wave-transmitting material plate 3-5 are arranged oppositely, and the heating materials are respectively arranged on the inner walls of the thermal insulation box of the side where the wave-transmitting material is not arranged, that is, the upper side, the lower side, the left side and the right side of the illustrated position are provided with the heating materials, that is.
As a practical structure, in some embodiments, as shown in FIG. 2, the heating box 3 comprises a box body and a box door 3-2, and the box door 3-2 and the side of the heating box opposite to the box door 3-2 are provided with a high temperature resistant wave-transparent material plate 3-5.
Optionally, the bottom of the heating box is provided with a supporting leg 3-3, and the height of the supporting leg 3-3 can be adjusted. The lifting of the supporting legs can be adjusted by matching the buckles and the clamping holes.
Optionally, the clamp 4 includes a hanging member 4-1 fixedly disposed in the heating box, and a clamping member 4-2 detachably connected to the hanging member 4-1, where the clamping member 4-2 is used to clamp an edge of the sample to be measured and hung on the hanging member 4-1.
As shown in fig. 2, optionally, the hanging member 3-2 includes a hanging frame 41-1 and a hook 41-2 disposed on the hanging frame 41-1, the hanging frame 41-1 is disposed on an edge of an opposite surface of the sample surface to be measured and the high temperature resistant wave-transmitting material plate, and does not block the opposite surface, the clamping member 3-4 includes at least two clamping sheets 4-2 having the same shape, and the clamping sheet 4-2 is provided with a hanging hole 4-3 corresponding to the hook 41-2. By adopting the hanging type clamp, the sample can be changed only by hanging the sample clamp on the hook when the sample is changed.
The clamp 4 of the embodiment shown in fig. 3 may be a ring, an elliptical ring or a polygonal ring, as shown in fig. 3, wherein the left side is a hanging member 3-3 after opening the rear box door, and the right side is a clamping piece 3-4, which are respectively in a quadrilateral shape, and the hanging member corresponds to the clamping piece.
The embodiment also provides a high-temperature material electromagnetic parameter measuring method based on fixture de-embedding, which is realized by adopting the measuring system and comprises a fixture de-embedding method, wherein the fixture de-embedding method comprises the following steps:
carrying out constant temperature treatment on the sample clamping device to a measurement temperature range;
separating interference signals from effective signals by using a time domain function of a vector network analyzer, and sending the effective signals for direct connection and reflection calibration: when the direct measurement is carried out, a sample to be measured is not put into the fixture for measurement, and when the reflection measurement is carried out, a reflection calibration plate is added into the high-temperature fixture for measurement.
In the embodiment, a GRL calibration method is adopted in the free space, and the full two-port calibration can be completed only by combining direct connection and reflection measurement with a time domain gate technology. Because the high-temperature clamp heated at constant temperature is made of low-loss wave-transparent materials on two sides of the materials, the high-temperature clamp cannot have great influence on the free space test method, the influence of the high-temperature clamp on the test result can be contained in a free space error source, the interference signal and the effective signal are separated by utilizing the time domain function of the vector network analyzer, the influence is eliminated, and the test accuracy under the high-temperature condition is ensured, and an error model is shown in fig. 4.
Compared with a normal-temperature free space calibration method, the system is heated to the test temperature during the high-temperature test during the direct connection and reflection calibration, the high-temperature clamp is fixed in the calibration structure after the constant-temperature treatment, and then the direct connection and reflection calibration is carried out. As shown in fig. 5, the high temperature jig is not filled with material for measurement in the straight-through measurement, and the high temperature jig is filled with a reflection calibration plate for measurement in the reflection measurement as shown in fig. 6.
Fig. 7 and 8 are time domain test graphs of S11 parameters before and after embedding with a fixture, respectively, in which the highest peak is a reflection peak of a reflection plate placed in a high temperature fixture, and peaks at both sides are reflection influences caused by the high temperature fixture. Fig. 9 and 10 are test curves in corresponding frequency domains. It can be seen that after a time domain gate with a proper width is added, only the reflection characteristic of the reflecting plate is kept in the time domain, the test curve becomes smooth in the frequency domain, the influence brought by a high-temperature clamp is eliminated, and the clamp de-embedding by the free space method is realized.
Further, after the clamp de-embedding is completed, the sample can be fixed for measurement, and the method for removing the embedding of the clamp further comprises the following steps of fixing the sample to be measured and measuring:
arranging a sample to be measured in a clamping device, and carrying out constant temperature treatment to a measurement temperature range;
separating an interference signal from an effective signal by using a time domain function of a vector network analyzer, sending the effective signal to perform free space method test, and acquiring a reflection parameter and a transmission parameter of a sample to be tested and data received by the vector network analyzer;
electromagnetic parameters of the material are calculated by the NRW method from the acquired data. Optionally, the electromagnetic parameters may include parameters such as permittivity, permeability, and loss tangent.
The above description is only a preferred embodiment of the present disclosure and is not intended to limit the present disclosure, and various modifications and changes may be made to the present disclosure by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present disclosure should be included in the protection scope of the present disclosure.
Although the present disclosure has been described with reference to specific embodiments, it should be understood that the scope of the present disclosure is not limited thereto, and those skilled in the art will appreciate that various modifications and changes can be made without departing from the spirit and scope of the present disclosure.
Claims (10)
1. The utility model provides a high temperature material electromagnetic parameter measurement system based on anchor clamps are removed and are inlayed which characterized by: the device comprises a main control unit, a vector network analyzer connected with the main control unit, and a signal receiving device and a signal transmitting device connected with the vector network analyzer, wherein the signal receiving device and the signal transmitting device respectively face towards a sample to be tested, the device further comprises a sample clamping device, the sample clamping device comprises a heating box and a clamp in the heating box, the heating box is provided with at least two opposite side faces which are high-temperature-resistant wave-transparent material plates, the sample to be tested is arranged on the clamp, and the surface to be tested of the sample to be tested is arranged opposite to the high-temperature-resistant wave-transparent material plates.
2. The system for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding of claim 1, wherein: the heating box comprises a box body and a box door, wherein the box door and the side face opposite to the box door are arranged to be high-temperature-resistant wave-transparent material plates.
3. The system for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding of claim 1, wherein: the clamp comprises a hanging piece fixedly arranged in the heating box and a clamping piece detachably connected with the hanging piece, and the clamping piece is used for clamping the edge of the sample to be tested and hung on the hanging piece.
4. The system for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding of claim 3, wherein: the hanging piece comprises a hanging frame and a hook arranged on the hanging frame, the hanging frame is arranged at the edge of the opposite surface of the sample surface to be measured and the high-temperature-resistant wave-transparent material plate and does not shield the opposite surface, the clamping piece at least comprises two clamping pieces with the same shape, and a hanging hole corresponding to the position of the hook is formed in the clamping piece.
5. The system for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding of claim 1, wherein: the heating parts of the heating box are arranged on the other side surfaces of the heating box except the side surface opposite to the surface to be measured of the sample.
6. The system for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding of claim 1, wherein: the material of the high-temperature resistant wave-transparent material plate is quartz, silicon nitride or zirconia.
7. The system for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding of claim 1, wherein: the signal receiving equipment and the signal transmitting equipment are respectively focusing lens horn antennas.
8. A high-temperature material electromagnetic parameter measuring method based on clamp de-embedding is characterized by comprising a clamp de-embedding method, wherein the clamp de-embedding method comprises the following steps:
carrying out constant temperature treatment on the sample clamping device to a measurement temperature range;
separating interference signals from effective signals by using a time domain function of a vector network analyzer, and sending the effective signals for direct connection and reflection calibration: when the direct measurement is carried out, a sample to be measured is not put into the fixture for measurement, and when the reflection measurement is carried out, a reflection calibration plate is added into the high-temperature fixture for measurement.
9. The method for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding as claimed in claim 8, wherein the fixture de-embedding method further comprises the following steps of fixing a sample to be measured and measuring:
arranging a sample to be measured in a clamping device, and carrying out constant temperature treatment to a measurement temperature range;
separating an interference signal from an effective signal by using a time domain function of a vector network analyzer, sending the effective signal to perform free space method test, and acquiring a reflection parameter and a transmission parameter of a sample to be tested and data received by the vector network analyzer;
electromagnetic parameters of the material are calculated from the acquired data.
10. The method for measuring the electromagnetic parameters of the high-temperature material based on fixture de-embedding as claimed in claim 8, wherein the electromagnetic parameters of the material are calculated by NRW method according to the obtained data; or the electromagnetic parameters include permittivity, permeability, and loss tangent.
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|---|---|---|---|---|
| CN112051453A (en) * | 2020-08-31 | 2020-12-08 | 电子科技大学 | Remote testing device and method for dielectric property of high-temperature fluid material |
| CN112147423A (en) * | 2020-08-24 | 2020-12-29 | 西安空间无线电技术研究所 | Method for testing polarization isolation of metal wire grating |
| CN113671273A (en) * | 2021-08-30 | 2021-11-19 | 中国计量科学研究院 | Probe feed de-embedding method for on-chip antenna measurement |
| CN113970561A (en) * | 2020-07-22 | 2022-01-25 | 航天特种材料及工艺技术研究所 | System and method for testing high-temperature wave transmittance of flat plate material |
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| CN112051453A (en) * | 2020-08-31 | 2020-12-08 | 电子科技大学 | Remote testing device and method for dielectric property of high-temperature fluid material |
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