CN105444660B - A kind of differential capacitance mircrometer gauge that intermediate electrode plate is connected without conducting wire - Google Patents
A kind of differential capacitance mircrometer gauge that intermediate electrode plate is connected without conducting wire Download PDFInfo
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- CN105444660B CN105444660B CN201511026983.7A CN201511026983A CN105444660B CN 105444660 B CN105444660 B CN 105444660B CN 201511026983 A CN201511026983 A CN 201511026983A CN 105444660 B CN105444660 B CN 105444660B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The invention discloses the differential capacitance mircrometer gauges that a kind of intermediate electrode plate is connected without conducting wire, including outer framework, first electrode plate, intermediate electrode plate and second electrode plate in outer framework are set, the first fixation rod for the second electrode plate to be fixedly connected with the outer framework, the second fixation rod for the first electrode plate to be fixedly connected with the outer framework, there are the differential capacitor cubic content measurement system and connecting rod of connection with the first electrode plate and the second electrode plate；The upper surface of one end of the connecting rod and the intermediate electrode plate is connected, and the other end of the connecting rod, which sequentially passes through, behind the through hole of the first electrode plate and the hole on the outer framework top and to be stretched out the top of outer framework and can be connected with measured object.The present invention eliminates the mechanical force between conducting wire and differential capacitor mircrometer gauge intermediate electrode plate by increasing a pair of of capacitor plate；The measurement function of known differential capacitance mircrometer gauge is realized, and structure is simple, mechanical force-disturbance is small.
Description
Technical field
The present invention relates to technical field of measuring equipment, and in particular to a kind of differential type electricity that intermediate electrode plate is connected without conducting wire
Hold mircrometer gauge.
Background technique
The accuracy and sensitivity of capacitance micrometer is very high, be widely used for range is small, in range measurement with high accuracy.Mesh
Before, known document 1 (a kind of high-accuracy capacitor mircrometer gauge crustal deformation of Hu Guoqing, Cai Ya elder generation and earthquake, 03 phase in 1986) is situated between
Continued a kind of capacitance micrometer structure, it is determined by two blocks of fixed metals of intermediate movable metal intermediate electrode plate and both sides
Piece composition.Known document 2, the micrometer system of " a kind of high accuracy gravimeter " disclosed in Chinese patent 99245185.X is by upper fixed
Piece, three pieces of metal plate (capacitor board) compositions of intermediate electrode plate and lower stator.Known document 3, " Li Wenping, marine gravitometer capacitor
The gravity for the CHZ type marine gravitometer that micrometer system research, university of Chinese Academy of Sciences master thesis, 2013 " is announced
Sensor displacement detection system also uses two blocks of metal stators composition of intermediate intermediate electrode plate and both sides.It is passed by condenser type
The principle of sensor, three-chip type differential capacitor displacement sensor by the intermediate capacitor plate of measurement (be generally connected with measurand,
, hereinafter referred to as intermediate electrode plate mobile with measurand) it (is generally fixedly connected with fixed frame, fixation with the capacitor plate on both sides
Motionless, hereinafter referred to as stator) composed by the capacity difference of capacitor characterize the stator of intermediate intermediate electrode plate and both sides
Relative distance.
In above-mentioned three-chip type differential capacitor mircrometer gauge structure, intermediate electrode plate is an electrode of capacitor, when measurement
It needs to be connected to capacitance capacity measurement circuit by conducting wire, the intermediate electricity of the differential capacitance mircrometer gauge of such as above-mentioned known document 1 to 3
Hold pole plate and is wired to capacitance capacity measurement circuit.In certain high-precision differential capacitance mircrometer gauge measurement tasks,
Such as in high-precision spring type gravimeter gravity inspection quality block displacement detector, capacitor intermediate electrode plate and gravity examine matter
Gauge block is fixedly connected with, inevitable between conducting wire and differential capacitance mircrometer gauge intermediate electrode plate with the movement of capacitor intermediate electrode plate
There are the effects of mechanical force, unfavorable to gravity measurement result.The document 1 to 3 as known in above-mentioned reduces conducting wire to capacitance micrometer
The solution of intermediate capacitance pole plate stress is and to be easy to break using the minimum flexible wire of rigidity, the conducting wire processing difficulties,
Even if using the conducting wire of special processing, which still cannot be complete to the stress of the intermediate capacitance pole plate of capacitance micrometer
It totally disappeared and remove, it is unfavorable to measurement result.
Summary of the invention
Aiming at the above defects or improvement requirements of the prior art, the present invention provides a kind of intermediate electrode plates connects without conducting wire
Differential capacitance mircrometer gauge, its object is to eliminate the mechanical masterpiece between conducting wire and differential capacitor mircrometer gauge intermediate electrode plate
With.
The present invention provides the differential capacitance mircrometer gauges that a kind of intermediate electrode plate is connected without conducting wire, including outer framework, if
First electrode plate, intermediate electrode plate and second electrode plate in the outer framework are set, is used for the second electrode plate and institute
The first fixation rod that outer framework is fixedly connected is stated, second for the first electrode plate to be fixedly connected with the outer framework consolidates
Connecting rod has the differential capacitor cubic content measurement system and connecting rod of connection with the first electrode plate and the second electrode plate；
One end of the connecting rod and the upper surface of the intermediate electrode plate are connected, and the other end of the connecting rod sequentially passes through first electricity
Behind the hole on the through hole of pole plate and the outer framework top and stretch out outer framework top can with measured object be connected.
Further, the second electrode plate is identical as the structure of the first electrode plate, equal in magnitude, direction phase
Instead.
Further, the intermediate electrode plate is placed between the first electrode plate and the second electrode plate, and institute
Stating the distance between intermediate electrode plate and the first electrode plate is 0.2mm-1mm, the intermediate electrode plate and second electricity
The distance between pole plate is 0.2mm-1mm.
Further, the first electrode plate includes insulating substrate, the first capacitor electrode retaining collar, second in arranged in co-axial alignment
Capacitance electrode ring and through hole；The first capacitor electrode retaining collar and the second capacitance electrode ring are attached to the insulating substrate
The same face, and at a distance of 0.1mm-5mm between the first capacitor electrode retaining collar and the second capacitance electrode ring.
Further, the differential capacitance mircrometer gauge further includes the first conducting wire, the second conducting wire and privates；It is described
First conducting wire is for the second capacitance electrode ring of the second electrode plate to be connected with the differential capacitor cubic content measurement system；Institute
The second conducting wire is stated to be used for the first capacitor electrode of the first capacitor electrode retaining collar of the first electrode plate and the second electrode plate
Ring is connected with the differential capacitor cubic content measurement system；The privates is used for the second capacitor electricity of the first electrode plate
Polar ring is connected with the differential capacitor cubic content measurement system.
Further, it is provided on the outer framework for first conducting wire, second conducting wire and the third
The hole that conducting wire passes through.
Further, it is not contacted between the connecting rod and the outer framework and the first electrode plate.
In general, through the invention it is contemplated above technical scheme is compared with the prior art, the present invention passes through increase
Capacitance electrode eliminates the mechanical force between conducting wire and differential capacitor mircrometer gauge intermediate electrode plate；Realize a kind of intermediate electricity
The differential capacitance mircrometer gauge that pole plate is connected without conducting wire can be used for realizing the measurement function of known differential capacitance mircrometer gauge, and
Without mechanical connection between measuring circuit and mircrometer gauge intermediate electrode plate, and have structure simple, the small advantage of mechanical force-disturbance.
Detailed description of the invention
Fig. 1 is the differential capacitance mircrometer gauge structure that a kind of intermediate electrode plate provided in an embodiment of the present invention is connected without conducting wire
Schematic illustration；
Fig. 2 is the differential capacitance mircrometer gauge capacitor that a kind of intermediate electrode plate provided in an embodiment of the present invention is connected without conducting wire
Stator structural schematic diagram.
In all the appended drawings, identical appended drawing reference is used to denote the same element or structure, in which:
1 is outer framework, 2a is first electrode plate, 3 be intermediate electrode plate, 2b is second electrode plate, 4 is the first fixation rod, 5
It is the second conducting wire for the first conducting wire, 6,7 be privates, 8 be differential capacitor cubic content measurement system, 9 be connecting rod, 10 is second solid
Connecting rod, 2-1 are insulating substrate, 2-2 is first capacitor electrode retaining collar, 2-3 is the second capacitance electrode ring, 2-4 is through hole.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that described herein, specific examples are only used to explain the present invention, not
For limiting the present invention.
Fig. 1 shows capacitance micrometer structure provided in an embodiment of the present invention, and Fig. 2 shows provided in an embodiment of the present invention
Capacitance micrometer capacitor fixed plate structure illustrate only part related to the embodiment of the present invention for ease of description, be described in detail such as
Under:
A kind of intermediate electrode plate provided in an embodiment of the present invention can be applied without the differential capacitance mircrometer gauge that conducting wire connects
In spring type gravimeter, wherein the object to be measured of mircrometer gauge is usually gravitational mass block, and gravitational mass block can be mounted on to company
On bar 9.
Intermediate electrode plate provided in an embodiment of the present invention without the differential capacitance mircrometer gauge that conducting wire connects include: outer framework 1,
First electrode plate 2a, intermediate electrode plate 3, second electrode plate 2b, the first fixation rod 4, the first conducting wire 5, the second conducting wire 6, third are led
Line 7, differential capacitor cubic content measurement system 8, connecting rod 9 and the second fixation rod 10；Wherein, second electrode plate 2b and first electrode plate 2a
Structure is identical, and first electrode plate 2a includes insulating substrate 2-1, first capacitor electrode retaining collar 2-2, the second capacitance electrode ring 2-3 and passes through
Through-hole 2-4；
Outer framework 1 is support protection structure, and plays electromagnetic shielding action, the system such as the optional conductive metal copper of outer framework 1, aluminium
At；Outer framework 1, which pushes up centre, hole, passes through and does not rub mutually for connecting rod 9；There are necessary holes to supply the first conducting wire for outer framework 1
5, the second conducting wire 6, privates 7 etc. pass through；
First electrode plate 2a, is placed in outer framework 1, and insulating substrate 2-1 passes through in the second fixation rod 10 and outer framework 1
Top surface is fixedly connected, and the length of the second fixation rod 10 is greater than 1mm；
Second electrode plate 2b, is placed in outer framework 1, and insulating substrate 2-1 passes through in the first fixation rod 4 and outer framework 1
Bottom surface is fixedly connected, and the length of the first fixation rod 4 is greater than 1mm；
First electrode plate 2a is by insulating substrate 2-1, first capacitor electrode retaining collar 2-2, the second capacitance electrode ring 2-3 and through hole
2-4 is constituted, and is in arranged in co-axial alignment, and wherein first capacitor electrode retaining collar 2-2 and the second capacitance electrode ring 2-3 are attached to insulating substrate 2-
1 the same face, through hole 2-4 penetrate through first electrode plate 2a, wherein first capacitor electrode retaining collar 2-2 and the second capacitance electrode ring 2-3
Between at a distance of 0.1mm-5mm；First electrode plate 2a can make of printed circuit industry；The electricity of first capacitor electrode retaining collar 2-2 and second
Holding electrode retaining collar 2-3 can be made of good conductors such as copper aluminium.
In embodiments of the present invention, second electrode plate 2b is identical as first electrode plate 2a structure, size, and direction is opposite；?
This repeats no more the specific structure of second electrode plate 2b.
First electrode plate 2a and second electrode plate 2b is differential capacitance mircrometer gauge stator；
Intermediate electrode plate 3 is placed between first electrode plate 2a and second electrode plate 2b, intermediate electrode plate 3 and first electrode plate
The distance 0.2mm-1mm of 2a, intermediate electrode plate 3 and second electrode plate 2b distance 0.2mm-1mm；Intermediate electrode plate 3 can be by copper
The good conductors such as aluminium are made；3 diameter of intermediate electrode plate is more than or equal to the diameter of first capacitor electrode retaining collar 2-2；
There are hole, 3 upper surface of intermediate electrode plate and connecting rods 9 to be connected on the top of outer framework 1, and connecting rod 9 passes through first electrode plate
The top that the through hole 2-4 of 2a stretches out outer framework 1 can be connected with measured object, and intermediate electrode plate 3 and connecting rod 9 are connected from measured object
Part is supported, and is not contacted between connecting rod 9 and outer framework 1 and first electrode plate 2a；
First conducting wire 5 is used for the second capacitance electrode ring 2-3 of second electrode plate 2b and differential capacitor cubic content measurement system 8
It is connected；Second conducting wire 6 is used for the first capacitor electricity of the first capacitor electrode retaining collar 2-2 of first electrode plate 2a and second electrode plate 2b
Polar ring 2-2 is connected with differential capacitor cubic content measurement system 8；Privates 7 is used for the second capacitance electrode of first electrode plate 2a
Ring 2-3 is connected with differential capacitor cubic content measurement system 8.
Differential capacitor cubic content measurement system 8 is to measure the device of small differential capacitor capacity to belong to well-known technique, known text
Offer principle disclosed in 1 (a kind of high-accuracy capacitor mircrometer gauge crustal deformation of Hu Guoqing, Cai Ya elder generation and earthquake, 03 phase in 1986)
Circuit is able to achieve the function, also has special chip that can use selection, such as U.S. Analog Devices, the AD7745/ of Inc. company
AD7746 is high-resolution, sigma-delta capacitive digital converter (CDC), can directly be carried out with the capacitance connection of capacitance sensor
Measurement.The chip also have high-resolution (21 24 no missing codes, highest effective resolutions), high linearity (± 0.01%) and
The inherent characteristics such as (± 4fF factory calibration) in high precision.
As shown in Fig. 2, the intermediate electrode plate is as follows without the differential capacitance mircrometer gauge working principle that conducting wire connects: the first electricity
First capacitor electrode retaining collar 2-2 and intermediate electrode plate 3 on pole plate 2a constitute capacitor c11, the second capacitor on first electrode plate 2a
Electrode retaining collar 2-3 and intermediate electrode plate 3 constitute capacitor c12, and c11 connects with c12, if its series equivalent capacitance is c1, second electrode
First capacitor electrode retaining collar 2-2 and intermediate electrode plate 3 on plate 2a constitute capacitor c21, the second capacitor electricity on second electrode plate 2a
Polar ring 2-3 and intermediate electrode plate 3 constitute capacitor c22, and c21 connects with c22, if its series equivalent capacitance is c2, each metal electrode
Between there are parasitic capacitance, parasitic capacitance is equivalent between the effect each electrode plate, be considered as common mode effect, can be substantially in variate
Attenuation common-mode interference is spent, can further decrease common mode interference after mircrometer gauge is demarcated, the characteristics of variate is knowledge.If
When the differential capacitance mircrometer gauge is started to work, intermediate electrode plate 3 is in the centre of first electrode plate 2a and second electrode plate 2b
Position, c1 and c2 is of substantially equal at this time, and the c1 that differential capacitor cubic content measurement system 8 measures and the differential result of c2 are about 0, when tested
Object drives intermediate electrode plate 3 mobile to the first electrode direction plate 2a by connecting rod 9, the first capacitor electricity on first electrode plate 2a
Polar ring 2-2 and intermediate electrode plate 3 are apart from reduction, and capacitor c11 capacity becomes larger, the second capacitance electrode ring 2- on first electrode plate 2a
3 with intermediate electrode plate 3 apart from reduction, capacitor c12 capacity becomes larger, and equivalent capacity becomes larger for c1 capacity after c11 connects with c12, together
When, apart from increasing, capacitor c21 capacity reduces the first capacitor electrode retaining collar 2-2 and intermediate electrode plate 3 on second electrode plate 2b, the
The second capacitance electrode ring 2-3 and intermediate electrode plate 3 on two electrode plate 2b is apart from increasing, and capacitor c22 capacity becomes larger, c21 and c22
For the reduction of c2 capacity, the differential result of c1-c2 that differential capacitor cubic content measurement system 8 measures becomes larger equivalent capacity after series connection, conversely,
When measurand drives intermediate electrode plate 3 to the movement of the second electrode direction plate 2b, differential capacitor cubic content measurement system by connecting rod 9
The value of 8 c1-c2 measured will reduce.
The calibration process of differential capacitance mircrometer gauge is as follows: being fixedly connected with, is adjusted with connecting rod 9 with a high-precision Jiggled platform
Jiggled platform so that intermediate electrode plate 3 moves back and forth between first electrode plate 2a and second electrode plate 2b, while recording fine motion
The reading of lifting platform and the reading of differential capacitor cubic content measurement system 8 ignore the height little to calibration function by Mathematical Fitting
Secondary item, is fitted using quadratic polynomial, and the reading and intermediate electrode plate 3 that can calibrate differential capacitor cubic content measurement system 8 exist
Positional relationship between first electrode plate 2a and second electrode plate 2b, according to this mathematical relationship, differential capacitance mircrometer gauge of the invention
Realize micrometer function.Order polynomial fitting belongs to total art-known methods.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should all include
Within protection scope of the present invention.
Claims (7)
1. the differential capacitance mircrometer gauge that a kind of intermediate electrode plate is connected without conducting wire, which is characterized in that including outer framework (1), if
First electrode plate (2a), intermediate electrode plate (3) and second electrode plate (2b) in the outer framework are set, is used for described second
The first fixation rod (4) that electrode plate (2b) is fixedly connected with the outer framework (1) is used for the first electrode plate (2a) and institute
The second fixation rod (10) that outer framework (1) is fixedly connected is stated, with the first electrode plate (2a) and the second electrode plate (2b)
There are the differential capacitor cubic content measurement system (8) and connecting rod (9) of connection；
One end of the connecting rod (9) and the upper surface of the intermediate electrode plate (3) are connected, and the other end of the connecting rod (9) is successively
After the through hole (2-4) of the first electrode plate (2a) and the hole on the outer framework (1) top and stretch out outer framework (1)
Top can be connected with measured object；
It is fixedly connected with a Jiggled platform and the connecting rod (9), adjusts the Jiggled platform, so that the intermediate electrode plate
(3) it is moved back and forth between the first electrode plate (2a) and the second electrode plate (2b), while recording the Jiggled platform
Reading and the reading of the differential capacitor cubic content measurement system (8) calibrate the differential capacitor by Mathematical Fitting and hold
The reading of system for measuring quantity (8) and the intermediate electrode plate (3) are in the first electrode plate (2a) and the second electrode plate
The corresponding relationship of position between (2b), corresponding relationship realizes micrometer function according to this；
The first electrode plate (2a) includes insulating substrate (2-1), the first capacitor electrode retaining collar (2-2), second in arranged in co-axial alignment
Capacitance electrode ring (2-3) and through hole (2-4)；
The first capacitor electrode retaining collar (2-2) and the second capacitance electrode ring (2-3) are attached to the insulating substrate (2-1)
The same face, and at a distance of 0.1mm-5mm between the first capacitor electrode retaining collar (2-2) and the second capacitance electrode ring (2-3).
2. differential capacitance mircrometer gauge as described in claim 1, which is characterized in that the second electrode plate (2b) and described the
The structure of one electrode plate (2a) is identical, equal in magnitude, contrary.
3. differential capacitance mircrometer gauge as claimed in claim 1 or 2, which is characterized in that the intermediate electrode plate (3) is placed in institute
It states between first electrode plate (2a) and the second electrode plate (2b), and the intermediate electrode plate (3) and the first electrode plate
The distance between (2a) is 0.2mm-1mm, and the distance between the intermediate electrode plate (3) and the second electrode plate (2b) are
0.2mm-1mm。
4. differential capacitance mircrometer gauge as described in claim 1, which is characterized in that the diameter of the intermediate electrode plate (3) is big
In the diameter for being equal to the first capacitor electrode retaining collar (2-2).
5. differential capacitance mircrometer gauge as described in claim 1, which is characterized in that the differential capacitance mircrometer gauge further includes
First conducting wire (5), the second conducting wire (6) and privates (7)；
First conducting wire (5) is used for the second capacitance electrode ring of the second electrode plate (2b) and the differential capacitor capacity
Measuring system (8) is connected；
Second conducting wire (6) is used for the first capacitor electrode retaining collar and the second electrode plate of the first electrode plate (2a)
The first capacitor electrode retaining collar of (2b) is connected with the differential capacitor cubic content measurement system (8)；
The privates (7) is used for the second capacitance electrode ring of the first electrode plate (2a) and the differential capacitor capacity
Measuring system (8) is connected.
6. differential capacitance mircrometer gauge as claimed in claim 5, which is characterized in that be provided with confession on the outer framework (1)
The hole that first conducting wire (5), second conducting wire (6) and the privates (7) pass through.
7. differential capacitance mircrometer gauge as described in claim 1, which is characterized in that the connecting rod (9) and the outer framework (1)
It is not contacted between the first electrode plate (2a).
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