CN105444660A - Differential capacitance micrometer with intermediate plate electrode in non-wire connection - Google Patents
Differential capacitance micrometer with intermediate plate electrode in non-wire connection Download PDFInfo
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- CN105444660A CN105444660A CN201511026983.7A CN201511026983A CN105444660A CN 105444660 A CN105444660 A CN 105444660A CN 201511026983 A CN201511026983 A CN 201511026983A CN 105444660 A CN105444660 A CN 105444660A
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- battery lead
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
The invention discloses a differential capacitance micrometer with an intermediate electrode plate in non-wire connection, and the micrometer comprises an external frame, a first electrode plate, the intermediate electrode plate, a second electrode plate, a first fixing connecting rod which is used for enabling the second electrode plate to be fixedly connected with the external frame, a second fixing connecting rod which is used for enabling the first electrode plate to be fixedly connected with the external frame, a differential capacity measurement system which is connected with the first and second electrode plates, and a connecting rod, wherein the first electrode plate, the intermediate electrode plate and the second electrode plate are disposed in the external frame. One end of the connecting rod is fixedly connected with the upper surface of the intermediate electrode plate, and the other end of the connecting rod sequentially passes through a through hole of the first electrode plate and a hole at the top of the external frame, and extends out of the top of the external frame to be fixedly connected with a detected object. Through the adding of a pair of capacitor electrode plates, the micrometer eliminates the mechanical force action between a wire and the intermediate electrode plate of the micrometer. The micrometer achieves a function of measuring a known differential capacitance micrometer, is simple in structure, and is small in mechanical disturbance.
Description
Technical field
The present invention relates to technical field of measuring equipment, be specifically related to the differential capacitance mircrometer gauge that a kind of intermediate electrode plate connects without wire.
Background technology
The precision of capacitance micrometer and sensitivity are very high, are widely used in range is little, precision is high range observation.At present, known document 1 (Hu Guoqing, Cai Yaxian. a kind of high-accuracy capacitor mircrometer gauge. crustal deformation and earthquake, 03 phase in 1986) describe a kind of capacitance micrometer structure, it is made up of two blocks of the metal intermediate electrode plate of the activity of centre and both sides fixing metal stators.Known document 2, the micrometer system of " a kind of high accuracy gravimeter " disclosed in Chinese patent 99245185.X is by upper stator, and intermediate electrode plate and lower stator three pieces of sheet metals (capacitor board) form.Known document 3, the gravity sensor displacement detection system of the CHZ type sea gravimeter that " Li Wenping; sea gravimeter capacitance measurement systematic study, university of Chinese Academy of Sciences master thesis, 2013 " announce also uses two pieces of metal stator compositions on middle intermediate electrode plate and both sides.By the principle of capacitance type sensor, by measuring middle capacitor plate, (general and measurand is connected three-chip type differential capacitor displacement transducer, move with measurand, hereinafter referred to as intermediate electrode plate) (general and fixed frame is connected mutually with the capacitor plate on both sides, maintaining static, hereinafter referred to as stator) capacity difference of electric capacity that forms characterizes the relative distance of the stator on middle intermediate electrode plate and both sides.
In above-mentioned three-chip type differential capacitor mircrometer gauge structure, middle battery lead plate is an electrode of electric capacity, need during measurement to be connected to capacitance capacity measurement circuit by wire, the intermediate capacitance pole plate as the differential capacitance mircrometer gauge of above-mentioned known document 1 to 3 is all wired to capacitance capacity measurement circuit.In some high precision differential capacitance mircrometer gauge measurement task, as in high precision spring type gravimeter gravity quality inspection block displacement detector, electric capacity intermediate electrode plate is connected mutually with gravity quality inspection block, along with the movement of electric capacity intermediate electrode plate, the effect of mechanical force is certainly existed between wire and differential capacitance mircrometer gauge intermediate electrode plate, unfavorable to gravity measurement result.If the solution of above-mentioned known document 1 to 3 reduction wire to the intermediate capacitance pole plate stress of capacitance micrometer is the flexible wire adopting rigidity minimum, this wire processing difficulties, and easily break, even if having employed the wire of special processing, the effect of stress of this wire to the intermediate capacitance pole plate of capacitance micrometer still can not be eliminated completely, unfavorable to measurement result.
Summary of the invention
For above defect or the Improvement requirement of prior art, the invention provides the differential capacitance mircrometer gauge that a kind of intermediate electrode plate connects without wire, its object is to eliminate the mechanical force between wire and differential capacitor mircrometer gauge intermediate electrode plate.
The invention provides the differential capacitance mircrometer gauge that a kind of intermediate electrode plate connects without wire, comprise outside framework, be arranged on the first battery lead plate in described outside framework, intermediate electrode plate and the second battery lead plate, for being fixedly connected with described outside framework by described second battery lead plate first is connected bar, for being fixedly connected with described outside framework by described first battery lead plate second is connected bar, the differential capacitor cubic content measurement system be connected all is had with described first battery lead plate and described second battery lead plate, and connecting rod; One end of described connecting rod and the upper surface of described intermediate electrode plate are connected, and the other end of described connecting rod can be connected with measured object through after the through hole of described first battery lead plate and the hole on described outside framework top and the top of stretching out outside framework successively.
Further, described second battery lead plate is identical with the structure of described first battery lead plate, and equal and opposite in direction, direction is contrary.
Further, described intermediate electrode plate is placed between described first battery lead plate and described second battery lead plate, and the distance between described intermediate electrode plate and described first battery lead plate is 0.2mm-1mm, the distance between described intermediate electrode plate and described second battery lead plate is 0.2mm-1mm.
Further, described first battery lead plate comprises insulated substrate, the first capacitance electrode ring, the second capacitance electrode ring and the through hole in arranged in co-axial alignment; Described first capacitance electrode ring and described second capacitance electrode ring are attached to the same face of described insulated substrate, and at a distance of 0.1mm-5mm between described first capacitance electrode ring and described second capacitance electrode ring.
Further, described differential capacitance mircrometer gauge also comprises the first wire, the second wire and privates; Described first wire is used for the second capacitance electrode ring of described second battery lead plate to be connected with described differential capacitor cubic content measurement system; Described second wire is used for the first capacitance electrode ring of described first battery lead plate to be connected with described differential capacitor cubic content measurement system with the first capacitance electrode ring of described second battery lead plate; Described privates is used for the second capacitance electrode ring of described first battery lead plate to be connected with described differential capacitor cubic content measurement system.
Further, described outside framework is provided with the hole passed through for described first wire, described second wire and described privates.
Further, described connecting rod does not all contact with between described outside framework and described first battery lead plate.
In general, compared with prior art, the present invention, by increasing capacitance electrode, eliminates the mechanical force between wire and differential capacitor mircrometer gauge intermediate electrode plate to the above technical scheme conceived by the present invention; Achieve the differential capacitance mircrometer gauge that a kind of intermediate electrode plate connects without wire, can be used for the measurement function realizing known differential capacitance mircrometer gauge, and mechanical is connected between metering circuit with mircrometer gauge intermediate electrode plate, and it is simple to have structure, the advantage that mechanical force disturbance is little.
Accompanying drawing explanation
Fig. 1 is the differential capacitance mircrometer gauge structural principle schematic diagram that a kind of intermediate electrode plate that the embodiment of the present invention provides connects without wire;
Fig. 2 is the differential capacitance mircrometer gauge capacitor fixed plate structural representation that a kind of intermediate electrode plate that the embodiment of the present invention provides connects without wire.
In all of the figs, identical Reference numeral is used for representing identical element or structure, wherein:
1 for outside framework, 2a be that the first battery lead plate, 3 is intermediate electrode plate, 2b to be the second battery lead plate, 4 be first be connected bar, 5 be the first wire, 6 be the second wire, 7 be privates, 8 be differential capacitor cubic content measurement system, 9 for connecting rod, 10 be second be connected that bar, 2-1 are insulated substrate, 2-2 is the first capacitance electrode ring, 2-3 is the second capacitance electrode ring, 2-4 is through hole.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
Fig. 1 shows the capacitance micrometer structure that the embodiment of the present invention provides, and Fig. 2 shows the capacitance micrometer capacitor fixed plate structure that the embodiment of the present invention provides, and for convenience of explanation, illustrate only the part relevant to the embodiment of the present invention, details are as follows:
The differential capacitance mircrometer gauge that a kind of intermediate electrode plate that the embodiment of the present invention provides connects without wire can be applied in spring type gravimeter, and wherein the object to be measured of mircrometer gauge is generally gravitational mass block, gravitational mass block can be arranged on connecting rod 9.
The differential capacitance mircrometer gauge that the intermediate electrode plate that the embodiment of the present invention provides connects without wire comprises: be connected bar 4, first wire 5, second wire 6, privates 7, differential capacitor cubic content measurement system 8, connecting rod 9 and second of outside framework 1, first battery lead plate 2a, intermediate electrode plate 3, second battery lead plate 2b, first is connected bar 10; Wherein, the second battery lead plate 2b is identical with the first battery lead plate 2a structure, and the first battery lead plate 2a comprises insulated substrate 2-1, the first capacitance electrode ring 2-2, the second capacitance electrode ring 2-3 and through hole 2-4;
Outside framework 1 for supporting operator guards, and plays electromagnetic shielding action, and the optional conducting metal copper of outside framework 1, aluminium etc. are made; It is porose that outside framework 1 pushes up centre, passes for connecting rod 9 and do not rub mutually; Outside framework 1 leaves necessary hole and passes through for the first wire 5, second wire 6, privates 7 etc.;
First battery lead plate 2a, it is placed in outside framework 1, and its insulated substrate 2-1 is fixedly connected with outside framework 1 inner top surface by second bar 10 that is connected, and the second length being connected bar 10 is greater than 1mm;
Second battery lead plate 2b, it is placed in outside framework 1, and its insulated substrate 2-1 is fixedly connected with outside framework 1 inner bottom surface by first bar 4 that is connected, and the first length being connected bar 4 is greater than 1mm;
First battery lead plate 2a is made up of insulated substrate 2-1, the first capacitance electrode ring 2-2, the second capacitance electrode ring 2-3 and through hole 2-4, and in arranged in co-axial alignment, wherein the first capacitance electrode ring 2-2 and the second capacitance electrode ring 2-3 is attached to the same face of insulated substrate 2-1, the through first battery lead plate 2a of through hole 2-4, wherein between the first capacitance electrode ring 2-2 and the second capacitance electrode ring 2-3 at a distance of 0.1mm-5mm; First battery lead plate 2a available print circuit industry makes; First capacitance electrode ring 2-2 and the second capacitance electrode ring 2-3 can be made up of good conductors such as copper aluminium.
In embodiments of the present invention, the second battery lead plate 2b and the first battery lead plate 2a structure, size are identical, and direction in opposite directions; Do not repeat them here the concrete structure of the second battery lead plate 2b.
First battery lead plate 2a and the second battery lead plate 2b is differential capacitance mircrometer gauge stator;
Intermediate electrode plate 3 is placed between the first battery lead plate 2a and the second battery lead plate 2b, the distance 0.2mm-1mm of intermediate electrode plate 3 and the first battery lead plate 2a, the distance 0.2mm-1mm of intermediate electrode plate 3 and the second battery lead plate 2b; Intermediate electrode plate 3 can be made up of good conductors such as copper aluminium; Intermediate electrode plate 3 diameter is more than or equal to the diameter of the first capacitance electrode ring 2-2;
Hole is left on the top of outside framework 1, intermediate electrode plate 3 upper surface and connecting rod 9 are connected, the top that connecting rod 9 stretches out outside framework 1 by the through hole 2-4 of the first battery lead plate 2a can be connected with measured object, intermediate electrode plate 3 and connecting rod 9 are connected from measured object and obtain support, and connecting rod 9 does not contact with between outside framework 1 and the first battery lead plate 2a;
First wire 5 is for being connected the second capacitance electrode ring 2-3 of the second battery lead plate 2b with differential capacitor cubic content measurement system 8; Second wire 6 is for being connected the first capacitance electrode ring 2-2 of the first battery lead plate 2a with differential capacitor cubic content measurement system 8 with the first capacitance electrode ring 2-2 of the second battery lead plate 2b; Privates 7 is for being connected the second capacitance electrode ring 2-3 of the first battery lead plate 2a with differential capacitor cubic content measurement system 8.
Differential capacitor cubic content measurement system 8 is that the device measuring small differential capacitor capacity belongs to known technology, known document 1 (Hu Guoqing, Cai Yaxian. a kind of high-accuracy capacitor mircrometer gauge. crustal deformation and earthquake, 03 phase in 1986) disclosed in schematic circuit can realize this function, also have special chip to use to select, as U.S. AnalogDevices, Inc. the AD7745/AD7746 of company is high resolving power, sigma-delta capacitive digital converter (CDC), directly can be connected with the electric capacity of capacitive transducer and measure.This chip also has the inherent characteristics such as high resolving power (24 without losing code, the highest 21 effective resolutions), high linearity (± 0.01%) and high precision (± 4fF factory calibrated).
As shown in Figure 2, the differential capacitance mircrometer gauge principle of work that this intermediate electrode plate connects without wire is as follows: the first capacitance electrode ring 2-2 on the first battery lead plate 2a and intermediate electrode plate 3 form electric capacity c11, the second capacitance electrode ring 2-3 on first battery lead plate 2a and intermediate electrode plate 3 form electric capacity c12, c11 and c12 connects, if its series equivalent capacitance is c1, the first capacitance electrode ring 2-2 on second battery lead plate 2a and intermediate electrode plate 3 form electric capacity c21, the second capacitance electrode ring 2-3 on second battery lead plate 2a and intermediate electrode plate 3 form electric capacity c22, c21 and c22 connects, if its series equivalent capacitance is c2, stray capacitance is there is between each metal electrode, stray capacitance is to the effect equivalence between each battery lead plate, be considered as common mode effect, can significantly disturb by attenuation common-mode in variate, common mode interference can be reduced further after being demarcated by mircrometer gauge, the feature of variate is knowledge.If when this differential capacitance mircrometer gauge is started working, intermediate electrode plate 3 is in the centre position of the first battery lead plate 2a and the second battery lead plate 2b, now c1 and c2 is substantially equal, the differential result of c1 and c2 that differential capacitor cubic content measurement system 8 records is about 0, when measurand drives intermediate electrode plate 3 to move to the first battery lead plate 2a direction by connecting rod 9, the first capacitance electrode ring 2-2 on first battery lead plate 2a and intermediate electrode plate 3 are apart from reduction, electric capacity c11 capacity becomes large, the second capacitance electrode ring 2-3 on first battery lead plate 2a and intermediate electrode plate 3 are apart from reduction, electric capacity c12 capacity becomes large, after c11 and c12 series connection, equivalent capacity is that c1 capacity becomes large, simultaneously, the first capacitance electrode ring 2-2 on second battery lead plate 2b and intermediate electrode plate 3 are apart from increasing, electric capacity c21 capacity reduces, the second capacitance electrode ring 2-3 on second battery lead plate 2b and intermediate electrode plate 3 are apart from increasing, electric capacity c22 capacity becomes large, after c21 and c22 series connection, equivalent capacity is that c2 capacity reduces, the differential result of the c1-c2 that differential capacitor cubic content measurement system 8 records becomes large, otherwise, when measurand drives intermediate electrode plate 3 to move to the second battery lead plate 2b direction by connecting rod 9, the value of the c1-c2 that differential capacitor cubic content measurement system 8 records will reduce.
The calibration process of differential capacitance mircrometer gauge is as follows: be connected mutually with connecting rod 9 with a high precision Jiggled platform, regulate Jiggled platform, make intermediate electrode plate 3 to-and-fro movement between the first battery lead plate 2a and the second battery lead plate 2b, record the reading of Jiggled platform and the reading of differential capacitor cubic content measurement system 8 simultaneously, pass through Mathematical Fitting, ignore the high-order term little to calibration function, adopt quadratic polynomial matching, reading and the position relationship of intermediate electrode plate 3 between the first battery lead plate 2a and the second battery lead plate 2b of differential capacitor cubic content measurement system 8 can be calibrated, mathematical relation according to this, differential capacitance mircrometer gauge of the present invention achieves micrometer function.Order polynomial matching belongs to common art-known methods.
Those skilled in the art will readily understand; the foregoing is only preferred embodiment of the present invention; not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (8)
1. the differential capacitance mircrometer gauge that connects without wire of an intermediate electrode plate, it is characterized in that, comprise outside framework (1), be arranged on the first battery lead plate (2a) in described outside framework, intermediate electrode plate (3) and the second battery lead plate (2b), for described second battery lead plate (2b) being fixedly connected with described outside framework (1) first is connected bar (4), for described first battery lead plate (2a) being fixedly connected with described outside framework (1) second is connected bar (10), the differential capacitor cubic content measurement system (8) be connected all is had with described first battery lead plate (2a) and described second battery lead plate (2b), and connecting rod (9),
One end of described connecting rod (9) and the upper surface of described intermediate electrode plate (3) are connected, and the other end of described connecting rod (9) can be connected with measured object through after the through hole (2-4) of described first battery lead plate (2a) and the hole on described outside framework (1) top and the top of stretching out outside framework (1) successively.
2. differential capacitance mircrometer gauge as claimed in claim 1, it is characterized in that, described second battery lead plate (2b) is identical with the structure of described first battery lead plate (2a), and equal and opposite in direction, direction is contrary.
3. differential capacitance mircrometer gauge as claimed in claim 1 or 2, it is characterized in that, described intermediate electrode plate (3) is placed between described first battery lead plate (2a) and described second battery lead plate (2b), and the distance between described intermediate electrode plate (3) and described first battery lead plate (2a) is 0.2mm-1mm, the distance between described intermediate electrode plate (3) and described second battery lead plate (2b) is 0.2mm-1mm.
4. the differential capacitance mircrometer gauge as described in any one of claim 1-3, it is characterized in that, described first battery lead plate (2a) comprises insulated substrate (2-1), the first capacitance electrode ring (2-2), the second capacitance electrode ring (2-3) and through hole (2-4) in arranged in co-axial alignment;
Described first capacitance electrode ring (2-2) and described second capacitance electrode ring (2-3) are attached to the same face of described insulated substrate (2-1), and at a distance of 0.1mm-5mm between described first capacitance electrode ring (2-2) and described second capacitance electrode ring (2-3).
5. differential capacitance mircrometer gauge as claimed in claim 4, it is characterized in that, the diameter of described intermediate electrode plate (3) is more than or equal to the diameter of described first capacitance electrode ring (2-2).
6. differential capacitance mircrometer gauge as claimed in claim 4, it is characterized in that, described differential capacitance mircrometer gauge also comprises the first wire (5), the second wire (6) and privates (7);
Described first wire (5) is for being connected the second capacitance electrode ring of described second battery lead plate (2b) with described differential capacitor cubic content measurement system (8);
Described second wire (6) is for being connected the first capacitance electrode ring of described first battery lead plate (2a) with described differential capacitor cubic content measurement system (8) with the first capacitance electrode ring of described second battery lead plate (2b);
Described privates (7) is for being connected the second capacitance electrode ring of described first battery lead plate (2a) with described differential capacitor cubic content measurement system (8).
7. differential capacitance mircrometer gauge as claimed in claim 6, it is characterized in that, described outside framework (1) is provided with the hole passed through for described first wire (5), described second wire (6) and described privates (7).
8. differential capacitance mircrometer gauge as claimed in claim 1, it is characterized in that, described connecting rod (9) does not all contact with between described outside framework (1) and described first battery lead plate (2a).
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| CN201511026983.7A CN105444660B (en) | 2015-12-31 | 2015-12-31 | A kind of differential capacitance mircrometer gauge that intermediate electrode plate is connected without conducting wire |
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| CN201511026983.7A CN105444660B (en) | 2015-12-31 | 2015-12-31 | A kind of differential capacitance mircrometer gauge that intermediate electrode plate is connected without conducting wire |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN109799272A (en) * | 2019-01-28 | 2019-05-24 | 西安工程大学 | A kind of composite insulator icing growth monitoring system based on capacity effect |
| CN111412830A (en) * | 2020-04-28 | 2020-07-14 | 中山大学 | Capacitor plate adjusting and assembling device and method |
| CN111703510A (en) * | 2020-06-22 | 2020-09-25 | 潍坊歌尔微电子有限公司 | Voice acquisition device, tail gate control device and tail gate control method |
| CN115540734A (en) * | 2022-11-02 | 2022-12-30 | 北京工业大学 | Vertical micro-displacement measuring device with orthogonally arranged 8 reeds |
| CN115597474A (en) * | 2022-11-02 | 2023-01-13 | 北京工业大学（Cn） | Rotation angle error measuring device of one-dimensional guide mechanism |
| CN115655083A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Differential measuring device of horizontal micrometric displacement that unidimensional 8 reeds were arranged orthogonally not |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799272A (en) * | 2019-01-28 | 2019-05-24 | 西安工程大学 | A kind of composite insulator icing growth monitoring system based on capacity effect |
| CN111412830A (en) * | 2020-04-28 | 2020-07-14 | 中山大学 | Capacitor plate adjusting and assembling device and method |
| CN111703510A (en) * | 2020-06-22 | 2020-09-25 | 潍坊歌尔微电子有限公司 | Voice acquisition device, tail gate control device and tail gate control method |
| CN111703510B (en) * | 2020-06-22 | 2021-10-08 | 潍坊歌尔微电子有限公司 | Voice acquisition device, tail gate control device and tail gate control method |
| CN115540734A (en) * | 2022-11-02 | 2022-12-30 | 北京工业大学 | Vertical micro-displacement measuring device with orthogonally arranged 8 reeds |
| CN115597474A (en) * | 2022-11-02 | 2023-01-13 | 北京工业大学（Cn） | Rotation angle error measuring device of one-dimensional guide mechanism |
| CN115655083A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Differential measuring device of horizontal micrometric displacement that unidimensional 8 reeds were arranged orthogonally not |
| CN115655083B (en) * | 2022-11-02 | 2024-03-08 | 北京工业大学 | Horizontal micro-displacement differential measurement device with unequal-size 8-reed orthogonal arrangement |
| CN115540734B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Vertical micro-displacement measuring device with 8 reed orthogonally arranged |
| CN115597474B (en) * | 2022-11-02 | 2024-03-15 | 北京工业大学 | Rotary angle error measuring device of one-dimensional guiding mechanism |
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