CN111412830A - Capacitor plate adjusting and assembling device and method - Google Patents
Capacitor plate adjusting and assembling device and method Download PDFInfo
- Publication number
- CN111412830A CN111412830A CN202010351811.1A CN202010351811A CN111412830A CN 111412830 A CN111412830 A CN 111412830A CN 202010351811 A CN202010351811 A CN 202010351811A CN 111412830 A CN111412830 A CN 111412830A
- Authority
- CN
- China
- Prior art keywords
- capacitor
- capacitance
- plate
- capacitor plate
- adjusting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003990 capacitor Substances 0.000 title claims abstract description 279
- 238000000034 method Methods 0.000 title claims abstract description 16
- 238000001514 detection method Methods 0.000 claims abstract description 81
- 238000012360 testing method Methods 0.000 claims abstract description 34
- 238000006073 displacement reaction Methods 0.000 claims abstract description 8
- 230000003321 amplification Effects 0.000 claims description 9
- 238000003199 nucleic acid amplification method Methods 0.000 claims description 9
- 238000001914 filtration Methods 0.000 claims description 7
- 238000009434 installation Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 5
- 239000000969 carrier Substances 0.000 claims description 4
- 238000003491 array Methods 0.000 claims description 3
- 230000003750 conditioning effect Effects 0.000 claims 1
- 230000005611 electricity Effects 0.000 claims 1
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000000053 physical method Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
- G01B7/31—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B7/312—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes for measuring eccentricity, i.e. lateral shift between two parallel axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
The invention discloses a capacitance plate adjusting and mounting device and a method, which are applied to adjusting the parallelism and the coaxiality between capacitance plates in a capacitance displacement sensing device and comprise a capacitance plate unit, a capacitance testing unit and a mobile adjusting unit; the capacitor plate unit comprises a first capacitor plate and a second capacitor plate which are oppositely arranged; the first capacitor plate comprises four capacitor detection areas, the second capacitor plate comprises two capacitor detection areas, when the two capacitor detection areas are electrically connected, the four capacitor detection areas and the four capacitor detection areas of the first capacitor plate form four independent capacitors with equal areas and unequal intervals, and the parallelism adjustment between the capacitor plates is realized by real-time testing of the capacitor testing unit and real-time adjustment of the movable adjusting unit; when one capacitance detection area of the second capacitance plate is grounded, the other capacitance detection area and the four capacitance detection areas of the first capacitance plate form four independent capacitors with equal intervals and unequal areas, and coaxiality adjustment between the capacitance plates is achieved.
Description
Technical Field
The invention relates to the technical field of capacitor plates, in particular to a device and a method for adjusting and assembling a capacitor plate.
Background
The capacitance displacement sensor has the advantages of large signal-to-noise ratio, high sensitivity, small zero drift, wide frequency response, small nonlinearity, convenient use and operation and the like, and has wide application in the aspects of physical measurement of displacement, acceleration, pressure and the like, and the high-precision sensor technology is an inevitable choice for the high development of scientific technology.
The adjustment of the capacitor plates in the capacitance displacement sensor is an important factor influencing the overall accuracy of the capacitance displacement sensor, and for the coaxiality and the parallelism between the two capacitor plates, most of users estimate the positions of the two capacitor plates by naked eyes at present.
Disclosure of Invention
The invention provides a device and a method for adjusting and installing a capacitor plate, aiming at solving the problem of low reliability of the existing adjusting and installing mode of the capacitor plate.
In order to achieve the above purpose, the technical means adopted is as follows:
a capacitance plate adjusting and mounting device is applied to adjusting parallelism and/or coaxiality between capacitance plates in capacitance displacement sensing and comprises a capacitance plate unit, a capacitance testing unit and a mobile adjusting unit;
the capacitor plate unit comprises a first capacitor plate and a second capacitor plate which are oppositely arranged; the first capacitor plate comprises four capacitor detection areas, and the four capacitor detection areas are symmetrically distributed along an X axis and/or a Y axis respectively; the second capacitor plate comprises a first capacitor detection area and a second capacitor detection area, wherein the first capacitor detection area is an external capacitor and has at least one group of orthogonal symmetry axes, and the second capacitor detection area is an internal capacitor and is adjacent to and surrounds the first capacitor detection area; when the first capacitor plate and the second capacitor plate are opposite and coaxial, the four capacitor detection areas in the first capacitor unit cover the internal capacitor in the second capacitor unit and cover the two capacitor detection areas in the second capacitor unit;
when the parallelism adjusting device is used for adjusting parallelism, the first capacitance detecting area and the second capacitance detecting area of the second capacitance plate are electrically connected, four independent capacitors with equal area and unequal intervals are formed by the first capacitance detecting area and the four capacitance detecting areas of the first capacitance plate, and then the four independent capacitors are adjusted in real time by matching with the mobile adjusting unit according to the detection value of the capacitance testing unit, so that the four independent capacitors are equal, and the parallelism adjusting and mounting are realized; when the device is used for adjusting the coaxiality, the second capacitance detection area of the second capacitance plate is grounded, the first capacitance detection area and the four capacitance detection areas of the first capacitance plate form four independent capacitors with equal intervals and unequal areas, and then the device is matched with the mobile adjusting unit to adjust in real time according to the detection value of the capacitance testing unit, so that the four independent capacitance values are equal, and the adjustment and installation of the coaxiality are realized;
the capacitance testing unit is electrically connected with the second capacitance plate and used for inputting a testing signal to the second capacitance plate and simultaneously testing the capacitance value of the second capacitance plate in real time to obtain a detection value;
the mobile adjusting unit is fixedly connected with the first capacitor plate and used for adjusting the parallelism and the coaxiality of the first capacitor plate.
In the above scheme, the real-time parallelism and coaxiality of the first capacitor plate and the second capacitor plate are specifically presented in a data form through the capacitor testing unit, and then the real-time data is matched with the mobile adjusting unit to adjust in real time, so that the coaxiality and parallelism between the two capacitor plates reach the standard, and the accurate adjustment of the capacitor plates is realized.
Preferably, the four capacitance detection areas of the first capacitance plate are the same and symmetrically distributed, and are formed by combining a single capacitor or a plurality of arrays, and each capacitance detection area can be independently input; the first capacitance detection area and the second capacitance detection area of the second capacitance plate are of a 'return' shape, the first capacitance detection area and the second capacitance detection area are provided with independent outputs, and the first capacitance detection area and the second capacitance detection area are connected in series or grounded. In the preferred scheme, the first capacitor plate and the second capacitor plate only need to be simply partitioned, the specific configuration of the first capacitor plate and the second capacitor plate is not limited, and the electrode plate configuration can be reasonably adapted according to application scenes.
Preferably, the capacitance testing unit comprises a carrier circuit, and a filter circuit, an amplifying circuit and a tolerance signal measuring instrument which are connected in sequence, wherein the carrier circuit generates sine waves or square waves with positive and negative phases, the same frequency and the same amplitude, and is connected with the first capacitance plate, so that the first capacitance plate and the second capacitance plate form a differential capacitance; the filter circuit and the amplifying circuit are respectively used for filtering and amplifying the signals of the differential capacitor and displaying the signals through the tolerance signal measuring instrument; the filter circuit is connected with the second capacitor plate; the filter circuit comprises a low-pass filter circuit and a high-pass filter circuit; the amplifying circuit comprises a first amplifying circuit and a second amplifying circuit; the tolerance signal measuring instrument is provided with two channels, the second capacitor plate is respectively connected with the input ends of the low-pass filter circuit and the high-pass filter circuit, the output ends of the low-pass filter circuit and the high-pass filter circuit are respectively connected with the input ends of the first amplifying circuit and the second amplifying circuit, and the output ends of the first amplifying circuit and the second amplifying circuit are respectively connected with the input ends of the two tolerance signal measuring instruments; the tolerance signal measuring instrument is an oscilloscope or a frequency spectrograph. In the preferred scheme, after the second capacitor plate signal is connected into the circuit, the second capacitor plate signal is divided into two paths which respectively pass through the low-pass filter circuit, the high-pass filter circuit and the tolerance signal measuring instrument, so that simultaneous measurement and display of two groups of differential capacitors are realized, and meanwhile, the amplification circuit is arranged, so that the resolution and the precision of differential capacitor measurement can be improved.
Preferably, the movement adjusting unit is a four-degree-of-freedom movement adjusting structure, and is used for moving and adjusting four degrees of freedom of the mutual position between the two planes. In this preferred scheme, the four-degree-of-freedom movement adjusting structure can realize independent adjustment of four degrees of freedom of the first capacitor plate, namely two degrees of freedom during parallelism adjustment and two degrees of freedom during coaxiality adjustment, and does not need multiple iterations to realize accurate adjustment of the four degrees of freedom of the first capacitor plate.
Preferably, the movement adjusting unit comprises a control circuit, four-degree-of-freedom movement adjusting structures and four driving motors, an input end of the control circuit is connected with an output end of the tolerance signal measuring instrument, four output ends of the control circuit are respectively connected with input ends of the four driving motors, output ends of the four driving motors are respectively connected with input ends of the four-degree-of-freedom movement adjusting structures, and output ends of the four-degree-of-freedom movement adjusting structures are fixedly connected with the first capacitor plate. In this preferred scheme, utilize control circuit and driving motor to control the removal regulation structure, it is more convenient and accurate to compare in manual operation's mode operation, also can realize this capacitance plate accent dress device's full automatization operation through default control program.
The invention also provides a capacitor plate adjusting and mounting method based on the capacitor plate adjusting and mounting device, which comprises the following steps:
s0. initially fitting the center of the first capacitor plate and its projection on the second capacitor plate onto the internal capacitance of the second capacitor plate; the internal capacitor and the external capacitor on the second capacitor plate are connected and then connected to the capacitor test unit;
s1, generating positive and negative load wave signals and inputting the signals into the first capacitor plate to enable the first capacitor plate and the second capacitor plate to form a differential capacitor;
s2, the capacitance testing unit receives the signals of the differential capacitance, then carries out filtering and amplification processing, and calculates the tolerance of the differential capacitance;
s3, judging whether the tolerance size meets a standard value, if so, finishing, and if not, carrying out the next step;
s4, according to the comparison result of the tolerance and a standard value, carrying out corresponding position adjustment on the first capacitor plate through the mobile adjusting unit; return is made to step S3.
Preferably, the generating of the positive and negative load wave signals in step 1 and the inputting of the positive and negative load wave signals into the first capacitor plate specifically include: and generating four opposite-phase combined carrier signals of two carriers with different frequencies, and sequentially outputting the signals to four quadrants of the first capacitor plate.
Preferably, the method for adjusting and assembling the capacitor plate further comprises the following steps:
and after the parallelism adjustment is finished according to the steps S0-S4, disconnecting the internal capacitor and the external capacitor of the second capacitor plate, grounding the external capacitor, and completing the coaxiality adjustment according to the steps S1-S4.
Preferably, the step S2 specifically includes:
after amplification treatment:
wherein VoutFor amplifying the output voltage of the circuit, HfilterIs the gain of the filter circuit, VpIs the carrier amplitude, and Cf is the feedback capacitance;
from the above formula, according to the output voltage VoutPreset carrier amplitude VpAnd the feedback capacitance value Cf can be calculated to obtain the tolerance size Delta C of the formed differential capacitor.
Compared with the prior art, the technical scheme of the invention has the beneficial effects that:
the device and the method for adjusting and installing the capacitor plates specifically present the real-time parallelism and coaxiality of the first capacitor plate and the second capacitor plate in a data form through the capacitor testing unit, and then cooperate with the mobile adjusting unit to adjust in real time according to the real-time data, so that the coaxiality and the parallelism between the two capacitor plates are ensured to reach the standard; meanwhile, the four-degree-of-freedom adjustment of the capacitor plate can be realized, and the precise adjustment and installation of the capacitor plate can be realized; the movable adjusting unit can be manually operated and adjusted, and can also be combined with a driving control device to realize automatic adjustment, so that the practicability of the invention is improved.
The invention has simple structure and convenient use, realizes the precise adjustment and installation of the capacitor plate, thereby reducing the influence of factors such as nonlinearity and the like and obviously improving the precision of capacitance sensing.
Drawings
FIG. 1 is a schematic view of the structure of the apparatus of the present invention.
FIG. 2 is a schematic view showing the configuration of a first capacitor plate in example 1;
FIG. 3 is a schematic view showing the configuration of a second capacitor plate in example 1;
FIG. 4 is a schematic view showing the first capacitor plate and the second capacitor plate in embodiment 1 when they are not parallel;
FIG. 5 is a schematic view showing the first capacitor plate and the second capacitor plate of example 1 when they are not coaxial;
FIG. 6 is an overall flowchart of example 3;
FIG. 7 shows the input method of the positive and negative carrier signals in embodiment 3;
fig. 8 is a schematic diagram of an amplifier circuit in embodiment 3.
Detailed Description
The drawings are for illustrative purposes only and are not to be construed as limiting the patent;
for the purpose of better illustrating the embodiments, certain features of the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product;
it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.
The technical solution of the present invention is further described below with reference to the accompanying drawings and examples.
Example 1
This embodiment 1 provides a capacitor plate adjusting and mounting device, which is applied to adjust parallelism and/or coaxiality between capacitor plates in capacitance displacement sensing, and as shown in fig. 1, includes a capacitor plate unit, a capacitor testing unit, and a mobile adjusting unit;
the capacitor plate unit comprises a first capacitor plate 1 and a second capacitor plate 2 which are oppositely arranged; the first capacitor plate 1 comprises four capacitor detection areas, and the four capacitor detection areas are symmetrically distributed along an X axis and/or a Y axis respectively; the second capacitor plate 2 comprises a first capacitor detection area and a second capacitor detection area, wherein the first capacitor detection area is an external capacitor and has at least one group of orthogonal symmetry axes, and the second capacitor detection area is an internal capacitor and is adjacent to and surrounds the first capacitor detection area; when the first capacitor plate 1 and the second capacitor plate 2 are opposite and coaxial, four capacitor detection areas in the first capacitor unit cover the internal capacitor in the second capacitor unit, and cover two capacitor detection areas in the second capacitor unit;
when the parallelism adjusting device is used for adjusting parallelism, the first capacitance detection area and the second capacitance detection area of the second capacitance plate 2 are electrically connected, four independent capacitors with equal area and unequal intervals are formed by the first capacitance detection area and the four capacitance detection areas of the first capacitance plate 1, and then the four independent capacitors are matched with the mobile adjusting unit to be adjusted in real time according to the detection value of the capacitance testing unit, so that the four independent capacitors are equal, and adjustment and installation of the parallelism are realized; when the coaxiality adjusting device is used for adjusting the coaxiality, the second capacitance detection area of the second capacitance plate 2 is grounded, the first capacitance detection area and the four capacitance detection areas of the first capacitance plate 1 form four independent capacitors with equal spacing and unequal areas, and then the four independent capacitors are adjusted in real time by matching with the mobile adjusting unit according to the detection value of the capacitance testing unit, so that the four independent capacitors are equal to each other finally, and the adjustment and installation of the coaxiality are realized;
the four capacitance detection areas of the first capacitance plate 1 are the same and symmetrically distributed, and are formed by combining a single capacitance or a plurality of arrays, and each capacitance detection area can be independently input, as shown in fig. 2; the first capacitance detection area and the second capacitance detection area of the second capacitance plate 2 are of a "loop" shape, and both the first capacitance detection area and the second capacitance detection area have independent outputs, as shown in fig. 3, the first capacitance detection area and the second capacitance detection area are connected in series or grounded.
As shown in fig. 4, when the parallelism of the first capacitor plate 1 and the second capacitor plate 2 is adjusted, the internal capacitor and the external capacitor of the second capacitor plate 2 are connected to form a whole capacitor; as shown in fig. 5, when the coaxiality of the first capacitor plate 1 and the second capacitor plate 2 is adjusted, the internal capacitance and the external capacitance of the second capacitor plate 2 are disconnected, and the external capacitance of the second capacitor plate 2 is grounded.
The capacitance testing unit is electrically connected with the second capacitance plate 2 and is used for inputting a testing signal to the second capacitance plate 2 and simultaneously testing the capacitance value of the second capacitance plate 2 in real time to obtain a detection value; in this embodiment, the capacitance testing unit specifically includes: the carrier circuit generates sine waves or square waves with positive and reverse phases, the same frequency and the same amplitude, and is connected with the first capacitor plate 1, so that the first capacitor plate 1 and the second capacitor plate 2 form a differential capacitor; the filter circuit and the amplifying circuit are respectively used for filtering and amplifying the signals of the differential capacitor and displaying the signals through the tolerance signal measuring instrument; wherein the filter circuit is connected with the second capacitor plate 2; the filter circuit comprises a low-pass filter circuit 3 and a high-pass filter circuit 4; the amplifying circuit comprises a first amplifying circuit 5 and a second amplifying circuit 6; the tolerance signal measuring instrument is provided with two channels, the second capacitor plate 2 is respectively connected with the input ends of the low-pass filter circuit 3 and the high-pass filter circuit 4, the output ends of the low-pass filter circuit 3 and the high-pass filter circuit 4 are respectively connected with the input ends of the first amplifying circuit 5 and the second amplifying circuit 6, and the output ends of the first amplifying circuit 5 and the second amplifying circuit 6 are respectively connected with the input ends of the two tolerance signal measuring instruments; the tolerance signal measuring instrument is an oscilloscope or a frequency spectrograph.
And thirdly, the mobile adjusting unit is fixedly connected with the first capacitor plate 1 and is used for adjusting the parallelism and the coaxiality of the first capacitor plate 1.
The working principle of the embodiment 1 is as follows: the first capacitor plate 1 and the second capacitor plate 2 form differential capacitors with different modes after obtaining positive and negative load wave signals, and can reflect different parallelism (namely, inclination angles in two directions between two electrode plates) and coaxiality (namely, deviation of central position between two electrode plates) values between the first capacitor plate 1 and the second capacitor plate 2, the differential capacitor signals are divided into two paths, filtered and amplified simultaneously and then displayed on a tolerance signal measuring instrument, and four degrees of freedom of the first capacitor plate 1 are repeatedly adjusted in sequence by moving an adjusting unit while observing the tolerance signal measuring instrument until the differential capacitors reflected on the observation tolerance signal measuring instrument accord with preset standards.
Example 2
The embodiment 2 is a variation of the embodiment 1, and is different from the variation in that a control circuit, four-degree-of-freedom movement adjusting structures 7, and four driving motors are added in a movement adjusting unit, an input end of the control circuit is connected to an output end of the tolerance signal measuring instrument, four output ends of the control circuit are respectively connected to input ends of the four driving motors, output ends of the four driving motors are respectively connected to input ends of the four-degree-of-freedom movement adjusting structures 7, and output ends of the four-degree-of-freedom movement adjusting structures 7 are all fixedly connected to the first capacitor plate 1. It should be noted that the four-degree-of-freedom movement adjusting structure 7 can be directly obtained from the market, and corresponding products can be purchased according to actual needs when the four-degree-of-freedom movement adjusting structure is used.
The general working principle of this embodiment 2 is the same as that of embodiment 1, except that the four-degree-of-freedom movement adjusting structure 7 adjusts the four degrees of freedom of the first capacitor plate 1 by using a control circuit and a driving motor for driving control, or by presetting a program, the control circuit receives a differential capacitance signal output by a capacitance testing circuit, automatically calculates the amount to be adjusted of each degree of freedom of the first capacitor plate 1, and controls the corresponding movement adjusting unit to perform corresponding adjustment, thereby realizing full-automatic adjustment of the capacitor plate adjusting and mounting device.
Example 3
Based on the above embodiments, embodiment 3 provides a method for adjusting and installing a capacitor plate, as shown in fig. 6, the general flow of parallelism adjustment and coaxiality adjustment is described as follows:
firstly, adjusting the parallelism between a first capacitor plate 1 and a second capacitor plate 2:
A0. initially adjusting and assembling, so that the projection of the center of the first capacitor plate 1 on the second capacitor plate 2 falls on the internal capacitor of the second capacitor plate 2; the internal capacitor and the external capacitor on the second capacitor plate 2 are connected and then connected to the capacitor test unit;
A1. generating positive and negative load wave signals and inputting the signals into the first capacitor plate 1 to enable the first capacitor plate 1 and the second capacitor plate 2 to form a differential capacitor;
A2. the capacitance testing unit receives the signals of the differential capacitance, then carries out filtering and amplification processing, and calculates the tolerance of the differential capacitance;
A3. judging whether the tolerance size meets a standard value, if so, ending, and if not, carrying out the next step;
A4. according to the comparison result of the tolerance and the standard value, the corresponding position adjustment is carried out on the first capacitor plate 1 through the mobile adjusting unit; return is made to step S3.
After the parallelism adjustment between the first capacitor plate 1 and the second capacitor plate 2 is completed, the coaxiality adjustment between the first capacitor plate 1 and the second capacitor plate 2 is carried out:
B0. disconnecting the internal capacitor and the external capacitor of the second capacitor plate 2, and grounding the external capacitor;
B1. generating positive and negative load wave signals and inputting the signals into the first capacitor plate 1 to enable the first capacitor plate 1 and the second capacitor plate 2 to form a differential capacitor;
B2. the capacitance test circuit receives the signals of the differential capacitance, then carries out filtering and amplification processing, and calculates the tolerance of the differential capacitance;
B3. judging whether the tolerance size meets a standard value, if so, completing coaxiality adjustment, and if not, performing the next step;
B4. according to the comparison result of the tolerance and the standard value, the first capacitor plate 1 is adjusted in two degrees of freedom correspondingly through the mobile adjusting unit; and returning to the step B3.
As shown in fig. 7, the positive and negative load wave signals input in steps a1 and B1 can be directly input into different differential modes by using a group of carriers, or the more convenient and practical method provided by this embodiment can be used, that is: and generating two groups of positive and negative phase combined carrier signals of carriers with different frequencies, and sequentially outputting the signals to four quadrants of the first capacitor plate 1, so that the capacitor array can form two groups of differential capacitors corresponding to two degrees of freedom.
Fig. 8 shows an amplifier circuit for performing amplification processing in steps a2 and B2, which has a transfer function of:
the effect after amplification is approximately:
wherein VoutFor amplifying the output voltage of the circuit, VpIs the carrier amplitude, CfIs a feedback capacitance value;
from the above formula, according to the output voltage VoutPreset carrier amplitude VpAnd a feedback capacitance value CfThe tolerance level ac of the constituent differential capacitors can be calculated.
The adjustment of the first capacitor plate 1 in steps a4 and B4 can be performed by:
when the tolerance size Δ C of the differential capacitance is obtained, since:
when the parallelism is adjusted, the facing areas of the first capacitor plate 1 and the second capacitor plate 2 are equal, namely S1＝S2S, wherein S1And S2Respectively showing the areas of the first capacitor plate 1 and the second capacitor plate 2;
wherein, when the coaxiality is adjusted, the plate distances between the two ends of the first capacitor plate 1 and the second capacitor plate 2 are equal, namely d1＝d2D, wherein d1And d2Respectively showing the plate spacing at two ends of a first capacitor plate 1 and a second capacitor plate 2;
when the first capacitor plate 1 and the second capacitor plate 2 are parallel and coaxial, the ideal output voltage V isoutThe actual output voltage is 0, the actual output voltage is the minimum value, and the adjustment of the corresponding degree of freedom of the first capacitor plate 1 can be carried out for a plurality of times in the following process until the position where the output voltage is the minimum value is found, namely the position meets the standard.
Or measuring the area S and the real capacitance C of the first capacitor plate 1 first1And array pitch L in the array plate, then according to:
can calculate more accurate pole plate distance value d1And obtaining the difference value delta d of the distances of different quadrants and the inclination angle theta:
and adjusting the corresponding degree of freedom of the first capacitor plate 1 according to the calculation result to reach the standard of adjustment and installation.
It should be noted that, when the coaxiality is adjusted, because the torsion shown in fig. 5 exists, when the internal shape is non-circular, the amount to be adjusted cannot be accurately calculated, and multiple adjustments are still needed to find the center alignment position.
The terms describing positional relationships in the drawings are for illustrative purposes only and are not to be construed as limiting the patent;
it should be understood that the above-described embodiments of the present invention are merely examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (9)
1. A capacitance plate adjusting device is applied to adjusting parallelism and/or coaxiality between capacitance plates in capacitance displacement sensing and is characterized by comprising a capacitance plate unit, a capacitance testing unit and a movable adjusting unit;
the capacitor plate unit comprises a first capacitor plate and a second capacitor plate which are oppositely arranged; the first capacitor plate comprises four capacitor detection areas, and the four capacitor detection areas are symmetrically distributed along an X axis and/or a Y axis respectively; the second capacitor plate comprises a first capacitor detection area and a second capacitor detection area, wherein the first capacitor detection area is an external capacitor and has at least one group of orthogonal symmetry axes, and the second capacitor detection area is an internal capacitor and is adjacent to and surrounds the first capacitor detection area; when the first capacitor plate and the second capacitor plate are opposite and coaxial, the four capacitor detection areas in the first capacitor unit cover the internal capacitor in the second capacitor unit and cover the two capacitor detection areas in the second capacitor unit;
when the parallelism adjusting device is used for adjusting parallelism, the first capacitance detecting area and the second capacitance detecting area of the second capacitance plate are electrically connected, four independent capacitors with equal area and unequal intervals are formed by the first capacitance detecting area and the four capacitance detecting areas of the first capacitance plate, and then the four independent capacitors are adjusted in real time by matching with the mobile adjusting unit according to the detection value of the capacitance testing unit, so that the four independent capacitors are equal, and the parallelism adjusting and mounting are realized; when the device is used for adjusting the coaxiality, the second capacitance detection area of the second capacitance plate is grounded, the first capacitance detection area and the four capacitance detection areas of the first capacitance plate form four independent capacitors with equal intervals and unequal areas, and then the device is matched with the mobile adjusting unit to adjust in real time according to the detection value of the capacitance testing unit, so that the four independent capacitance values are equal, and the adjustment and installation of the coaxiality are realized;
the capacitance testing unit is electrically connected with the second capacitance plate and used for inputting a testing signal to the second capacitance plate and simultaneously testing the capacitance value of the second capacitance plate in real time to obtain a detection value;
the mobile adjusting unit is fixedly connected with the first capacitor plate and used for adjusting the parallelism and the coaxiality of the first capacitor plate.
2. The device for conditioning capacitor plates according to claim 1, wherein the four capacitor detection areas of the first capacitor plate are the same and symmetrically distributed, and are formed by combining a single capacitor or a plurality of arrays, and each capacitor detection area can be independently input; the first capacitance detection area and the second capacitance detection area of the second capacitance plate are of a 'return' shape, the first capacitance detection area and the second capacitance detection area are provided with independent outputs, and the first capacitance detection area and the second capacitance detection area are connected in series or grounded.
3. The capacitance plate adjusting and assembling device according to claim 1, wherein the capacitance testing unit comprises a carrier circuit, and a filter circuit, an amplifying circuit and a tolerance signal measuring instrument which are connected in sequence, wherein the carrier circuit generates sine waves or square waves with positive and negative phases, same frequency and same amplitude, and is connected with the first capacitance plate, so that the first capacitance plate and the second capacitance plate form a differential capacitance; the filter circuit and the amplifying circuit are respectively used for filtering and amplifying the signals of the differential capacitor and displaying the signals through the tolerance signal measuring instrument; the filter circuit is connected with the second capacitor plate; the filter circuit comprises a low-pass filter circuit and a high-pass filter circuit; the amplifying circuit comprises a first amplifying circuit and a second amplifying circuit; the tolerance signal measuring instrument is provided with two channels, the second capacitor plate is respectively connected with the input ends of the low-pass filter circuit and the high-pass filter circuit, the output ends of the low-pass filter circuit and the high-pass filter circuit are respectively connected with the input ends of the first amplifying circuit and the second amplifying circuit, and the output ends of the first amplifying circuit and the second amplifying circuit are respectively connected with the input ends of the two tolerance signal measuring instruments; the tolerance signal measuring instrument is an oscilloscope or a frequency spectrograph.
4. The tuning device for capacitive plates of claim 3, wherein the mobile tuning unit is a four-degree-of-freedom mobile tuning structure for mobile tuning of four degrees of freedom of the mutual position between two planes.
5. The capacitor plate adjusting and assembling device according to claim 4, wherein the movement adjusting unit comprises a control circuit, four-degree-of-freedom movement adjusting structures and four driving motors, an input end of the control circuit is connected with an output end of the tolerance signal measuring instrument, four output ends of the control circuit are respectively connected with input ends of the four driving motors, output ends of the four driving motors are respectively connected with input ends of the four-degree-of-freedom movement adjusting structures, and output ends of the four-degree-of-freedom movement adjusting structures are all fixedly connected with the first capacitor plate.
6. The capacitor plate adjusting and assembling method based on the capacitor plate adjusting and assembling device is characterized by comprising the following steps of:
s0. initially fitting the center of the first capacitor plate and its projection on the second capacitor plate onto the internal capacitance of the second capacitor plate; the internal capacitor and the external capacitor on the second capacitor plate are connected and then connected to the capacitor test unit;
s1, generating positive and negative load wave signals and inputting the signals into the first capacitor plate to enable the first capacitor plate and the second capacitor plate to form a differential capacitor;
s2, the capacitance testing unit receives the signals of the differential capacitance, then carries out filtering and amplification processing, and calculates the tolerance of the differential capacitance;
s3, judging whether the tolerance size meets a standard value, if so, finishing, and if not, carrying out the next step;
s4, according to the comparison result of the tolerance and a standard value, carrying out corresponding position adjustment on the first capacitor plate through the mobile adjusting unit; return is made to step S3.
7. The method for adjusting and installing a capacitor plate of a capacitor plate adjusting and installing device according to claim 6, wherein the step 1 of generating the positive and negative load wave signals and inputting the positive and negative load wave signals into the first capacitor plate specifically comprises: and generating four opposite-phase combined carrier signals of two carriers with different frequencies, and sequentially outputting the signals to four quadrants of the first capacitor plate.
8. The method of claim 6, further comprising the steps of:
and after the parallelism adjustment is finished according to the steps S0-S4, disconnecting the internal capacitor and the external capacitor of the second capacitor plate, grounding the external capacitor, and completing the coaxiality adjustment according to the steps S1-S4.
9. The method for adjusting and assembling a capacitive plate of a capacitive plate adjusting and assembling device according to claim 6, wherein the step S2 specifically comprises:
after amplification treatment:
wherein VoutFor amplifying the output voltage of the circuit, HfilterIs the gain of the filter circuit, VpIs the carrier amplitude, CfIs a feedback capacitance value;
from the above formula, according to the output voltage VoutPreset carrier amplitude VpAnd a feedback capacitance value CfNamely, the composition difference electricity can be calculatedTolerance size ac of the capacitor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010351811.1A CN111412830B (en) | 2020-04-28 | 2020-04-28 | Capacitor plate adjusting and assembling device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010351811.1A CN111412830B (en) | 2020-04-28 | 2020-04-28 | Capacitor plate adjusting and assembling device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN111412830A true CN111412830A (en) | 2020-07-14 |
| CN111412830B CN111412830B (en) | 2021-05-11 |
Family
ID=71493863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010351811.1A Active CN111412830B (en) | 2020-04-28 | 2020-04-28 | Capacitor plate adjusting and assembling device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111412830B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113447180A (en) * | 2021-05-10 | 2021-09-28 | 中山大学 | Torsion pendulum testing device based on differential capacitor and torsion pendulum decoupling reading method |
| CN114927433A (en) * | 2022-05-16 | 2022-08-19 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and control method thereof |
| CN115655094A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
| CN115940570A (en) * | 2023-02-13 | 2023-04-07 | 基合半导体（宁波）有限公司 | Focusing motor, closed-loop control method of focusing motor and camera equipment |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2106360U (en) * | 1991-03-26 | 1992-06-03 | 韦文斌 | Variable electrode spacing type capacitance weighing transducer for electronic scales |
| EP2410307A2 (en) * | 2010-07-19 | 2012-01-25 | Goodrich Corporation | Sensor for measuring large mechanical strains with fine adjustment device |
| CN104485226A (en) * | 2014-12-18 | 2015-04-01 | 吴江变压器有限公司 | Polar plate distance measurable capacitor |
| CN103344219B (en) * | 2013-06-17 | 2015-05-20 | 华中科技大学 | Two-dimensional static relative inclinometer |
| CN104654997A (en) * | 2015-02-14 | 2015-05-27 | 中国科学院测量与地球物理研究所 | MDOF (multi-degree of freedom) differential capacitance displacement sensor calibration device |
| CN105444660A (en) * | 2015-12-31 | 2016-03-30 | 中国科学院测量与地球物理研究所 | Differential capacitance micrometer with intermediate plate electrode in non-wire connection |
| CN108489372A (en) * | 2018-05-23 | 2018-09-04 | 中地装（重庆）地质仪器有限公司 | A kind of capacitance displacement sensor |
| CN109883310A (en) * | 2019-02-28 | 2019-06-14 | 华中科技大学 | Self-balancing type variable area array capacitor displacement detector and method |
-
2020
- 2020-04-28 CN CN202010351811.1A patent/CN111412830B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2106360U (en) * | 1991-03-26 | 1992-06-03 | 韦文斌 | Variable electrode spacing type capacitance weighing transducer for electronic scales |
| EP2410307A2 (en) * | 2010-07-19 | 2012-01-25 | Goodrich Corporation | Sensor for measuring large mechanical strains with fine adjustment device |
| CN103344219B (en) * | 2013-06-17 | 2015-05-20 | 华中科技大学 | Two-dimensional static relative inclinometer |
| CN104485226A (en) * | 2014-12-18 | 2015-04-01 | 吴江变压器有限公司 | Polar plate distance measurable capacitor |
| CN104654997A (en) * | 2015-02-14 | 2015-05-27 | 中国科学院测量与地球物理研究所 | MDOF (multi-degree of freedom) differential capacitance displacement sensor calibration device |
| CN105444660A (en) * | 2015-12-31 | 2016-03-30 | 中国科学院测量与地球物理研究所 | Differential capacitance micrometer with intermediate plate electrode in non-wire connection |
| CN108489372A (en) * | 2018-05-23 | 2018-09-04 | 中地装（重庆）地质仪器有限公司 | A kind of capacitance displacement sensor |
| CN109883310A (en) * | 2019-02-28 | 2019-06-14 | 华中科技大学 | Self-balancing type variable area array capacitor displacement detector and method |
Non-Patent Citations (1)
| Title |
|---|
| QIU WANG ET.AL: ""A Universal High-Sensitivity Area-Variation Capacitive Displacement Transducer (CDT) Based on Fringe Effect"", 《 IEEE ACCESS》 * |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113447180A (en) * | 2021-05-10 | 2021-09-28 | 中山大学 | Torsion pendulum testing device based on differential capacitor and torsion pendulum decoupling reading method |
| CN113447180B (en) * | 2021-05-10 | 2022-03-22 | 中山大学 | Torsion pendulum testing device based on differential capacitor and torsion pendulum decoupling reading method |
| CN114927433A (en) * | 2022-05-16 | 2022-08-19 | 北京北方华创微电子装备有限公司 | Semiconductor processing equipment and control method thereof |
| CN115655094A (en) * | 2022-11-02 | 2023-01-31 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
| CN115655094B (en) * | 2022-11-02 | 2024-03-29 | 北京工业大学 | Angular displacement measurement capacitance sensor with unequal polar plate areas |
| CN115940570A (en) * | 2023-02-13 | 2023-04-07 | 基合半导体（宁波）有限公司 | Focusing motor, closed-loop control method of focusing motor and camera equipment |
| CN115940570B (en) * | 2023-02-13 | 2024-06-04 | 基合半导体（宁波）有限公司 | Focusing motor, closed-loop control method of focusing motor and image pickup apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN111412830B (en) | 2021-05-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN111412830B (en) | Capacitor plate adjusting and assembling device and method | |
| CN109655674B (en) | Weak electrostatic field measuring device and method based on weak coupling micromechanical resonator | |
| JP3139305B2 (en) | Capacitive acceleration sensor | |
| JP2004085446A (en) | Impedance matching device, and method and system for analyzing output terminal characteristic of the same | |
| US9310454B2 (en) | Detection of a dielectric object | |
| CN109828141B (en) | High-sensitivity voltage measuring device and method based on weak coupling micromechanical resonator | |
| JP2003302431A (en) | Output terminal characteristic analytical method of impedance matching device, impedance matching device and output terminal characteristic analytical system for impedance matching device | |
| EP3431917B1 (en) | Clearance sensor and clearance measuring method | |
| KR20110002444A (en) | Monolithic vacuum manometer utilizing electrostatic interference as a means of detection | |
| CN110987016A (en) | Dynamic characteristic calibration system for dynamically tuned gyroscope flexible assembly | |
| CN110319971A (en) | A kind of bipolar condenser type vacuum meter and its corresponding measuring circuit | |
| CN112729334B (en) | Electrode switching gap detection circuit of hemispherical resonance gyroscope | |
| CN106841812B (en) | Anti- power jitter two dimension electric resistance array reading circuit | |
| CN111289806A (en) | Dynamic measurement circuit of array type capacitive sensor | |
| JP3509424B2 (en) | Quadrupole mass spectrometer | |
| CN116256305A (en) | Corrosion monitoring system and method | |
| US4816675A (en) | Quadrupole mass filter with unbalanced R.F. voltage | |
| CN212364429U (en) | Dynamic measurement circuit of array type capacitive sensor | |
| US7239971B2 (en) | Method and apparatus for calibrating communications channels | |
| CN114295311A (en) | High acceleration vibration test system based on phase resonance principle | |
| Field et al. | Capacitive position sensor with simultaneous, linear X–Y readout | |
| US6714023B2 (en) | Method for high-accuracy non-contact capacitive displacement measurement of poorly connected targets | |
| EP0217644B1 (en) | Quadrupole mass filter | |
| CN110186551A (en) | Square wave transforming amplitudes measuring device and method based on self-mixed interference | |
| SU862063A1 (en) | Method and device for measuring resistance of thin conductive coatings |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |