CN105425476B - The producing device and production method of alignment film - Google Patents
The producing device and production method of alignment film Download PDFInfo
- Publication number
- CN105425476B CN105425476B CN201610004916.3A CN201610004916A CN105425476B CN 105425476 B CN105425476 B CN 105425476B CN 201610004916 A CN201610004916 A CN 201610004916A CN 105425476 B CN105425476 B CN 105425476B
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- alignment film
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- 230000007246 mechanism Effects 0.000 claims abstract description 35
- 230000001427 coherent effect Effects 0.000 claims abstract description 14
- 230000003287 optical effect Effects 0.000 claims description 19
- 238000009434 installation Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 5
- 239000000919 ceramic Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 14
- 238000000034 method Methods 0.000 description 12
- 239000004973 liquid crystal related substance Substances 0.000 description 8
- 230000008569 process Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229920001721 polyimide Polymers 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000000354 decomposition reaction Methods 0.000 description 3
- 238000004925 denaturation Methods 0.000 description 3
- 230000036425 denaturation Effects 0.000 description 3
- 230000005611 electricity Effects 0.000 description 3
- 239000003504 photosensitizing agent Substances 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 230000001678 irradiating effect Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000013618 particulate matter Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000000638 stimulation Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Liquid Crystal (AREA)
- Polarising Elements (AREA)
Abstract
The present invention provides a kind of producing device and production method of alignment film, and the producing device of the alignment film includes light source, and the light source is used to emit the light of single wavelength, and the producing device of the alignment film further includes：Plummer, the plummer have to carry the load-bearing surface for treating orientation film layer；Light processing mechanism, the light processing mechanism are used to receive the light of light source, and the light received is divided into two beam coherent lights, and cause the two beams coherent light load-bearing surface treat light and dark interference fringe is formed in orientation film layer；Developing mechanism, the developing mechanism are treated in orientation film layer for removing corresponding to the part of the bright fringe in the interference fringe.The present invention can reduce the pollution for treating orientation film layer, while reduce technology difficulty.
Description
Technical Field
The invention relates to the field of manufacturing of display devices, in particular to a manufacturing device and a manufacturing method of an alignment film.
Background
The liquid crystal display mirror comprises an array substrate, a color film substrate and a liquid crystal layer between the array substrate and the color film substrate, wherein alignment films are arranged on the array substrate and the color film substrate and used for carrying out initial alignment on the liquid crystal layer. The manufacturing method of the alignment film comprises a rubbing method and a photo-alignment method.
The rubbing method is to first coat a Polyimide (PI) film and then rub the surface of the polyimide film using a rubbing roller to form channels in the roller direction, thereby aligning liquid crystal molecules in the channel direction. Since the friction is contact type, particle contamination and static electricity are generated during the friction, which affects the yield of the product. The optical alignment method comprises the steps of firstly coating a film layer with a photosensitizer, then irradiating the film layer with the photosensitizer by utilizing linearly polarized ultraviolet light, and aligning an ultraviolet light irradiation area through ultraviolet light stimulation. Compared with the rubbing method, the photo-alignment method does not need to directly contact a film layer, so that particle pollution and static electricity on the surface can be avoided.
Disclosure of Invention
The invention aims to provide a manufacturing device and a manufacturing method of an alignment film, which aim to reduce the pollution of a film layer to be aligned and reduce the process difficulty.
In order to achieve the above object, the present invention provides an alignment film manufacturing apparatus, including:
a light source for emitting light of a single wavelength;
the bearing table is provided with a bearing surface for bearing the film layer to be aligned;
the optical processing mechanism is used for receiving the light of the light source, dividing the received light into two beams of coherent light and enabling the two beams of coherent light to form interference fringes with alternate light and shade on the film layer to be aligned on the bearing surface;
and the developing mechanism is used for removing the part, corresponding to the bright fringes in the interference fringes, on the film layer to be aligned.
Optionally, the optical processing mechanism includes: the beam splitter is a half-mirror, and a mirror image of the first reflecting mirror, which is symmetrical to the half-mirror, forms a preset angle with the second reflecting mirror;
the light emitted by the light source can reach the spectroscope and is divided into two parts, wherein one part of the light can be reflected back to the spectroscope after being reflected to the second reflecting mirror by the spectroscope; the other part of the light can be reflected back to the spectroscope after being transmitted to the first reflector by the spectroscope;
the bearing table is positioned below the spectroscope.
Optionally, the light processing mechanism further includes a compensation lens disposed between the beam splitter and the first reflecting mirror, so that, of the two light beams, an optical path length of a part of the light beam reflected by the beam splitter in the beam splitter is equal to a sum of optical path lengths of the other part of the light beam transmitted through the beam splitter in the beam splitter and the compensation lens.
Optionally, the compensation lens is parallel to the beam splitter.
Optionally, the material of the compensation lens is the same as that of the beam splitter, and the thickness of the compensation lens is the same as that of the beam splitter.
Optionally, the predetermined angle satisfies the following formula:
θ＝arctan(λ/x)
where θ is the predetermined angle, λ is the wavelength of the light emitted from the light source, and x is 2 times the width of the trench to be formed on the film layer to be aligned.
Optionally, one end of the second reflecting mirror is fixed on an installation basis, the device for manufacturing the alignment film further comprises a telescopic supporting piece and a control mechanism, one end of the supporting piece is fixedly connected with the other end of the second reflecting mirror, the other end of the supporting piece is fixedly connected with the installation basis, and the control mechanism is used for controlling the supporting piece to shorten or extend.
Optionally, the support is made of piezoceramics, control mechanism includes first electrode board, second electrode board and control circuit, the one end of support is passed through first electrode board with the other end fixed connection of second mirror, the other end of support passes through the second electrode board with installation basis fixed connection, just control circuit respectively with first electrode board with the second electrode board electricity is connected, be used for to first electrode board with the second electrode board is the different signal of telecommunication of output respectively.
Optionally, the light source is an ultraviolet light source.
Correspondingly, the invention also provides a manufacturing method of the alignment film, which comprises the following steps:
by adopting the manufacturing device of the alignment film, interference fringes with alternate light and shade are formed on the film layer to be aligned; and removing the part of the film layer to be aligned, which corresponds to the bright fringe in the interference fringe, by using a developing solution.
In the invention, two beams of coherent light generated by a light processing mechanism can form interference fringes with alternate light and shade on a bearing surface, therefore, when a film layer to be aligned is arranged on the bearing surface of a bearing table, the interference fringes are formed on the film layer to be aligned, the position of the film layer to be aligned, which receives the light fringes, is subjected to denaturation and decomposition by light irradiation, the position of the film layer to be aligned, which receives the dark fringes, is not changed, and then the film layer is developed to form a groove, wherein the width of the groove is the width of the fringes. Therefore, when the alignment film manufacturing device is used for manufacturing the alignment film, the film layer does not need to be contacted, the pollution to the film layer is avoided, polarized light does not need to be generated, and the process complexity is reduced.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural diagram of an apparatus for fabricating an alignment film according to an embodiment of the present disclosure;
FIG. 2 is a schematic diagram of interference fringes formed by two coherent light beams generated by an optical processing mechanism;
FIG. 3 is a schematic view of the second mirror mounted in a fixed manner;
FIG. 4 is a schematic structural view of a developing mechanism;
FIG. 5 is a schematic diagram of the arrangement of liquid crystal molecules before alignment of the film;
FIG. 6 is a schematic diagram showing the arrangement of liquid crystal molecules after alignment of the film layer.
Wherein the reference numerals are: 1. a light source; 2. a light processing mechanism; 200. a beam splitter; 201. a first reflector; 202. a second reflector; 203. a compensation lens; 201', a mirror image of the first mirror symmetric about the beam splitter; 3. a film layer to be aligned; 4. a bearing table; 500. a support member; 501. a first electrode plate; 502. a second electrode plate; 6. liquid crystal molecules; 7. and a developer coating structure.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
As an aspect of the present invention, there is provided an apparatus for manufacturing an alignment film, as shown in fig. 1, the apparatus comprising: a light source 1, a light processing mechanism 2, a carrier table 4, and a developing mechanism (not shown in the figure). The light source 1 is used for emitting light with a single wavelength; the bearing table 4 is provided with a bearing surface for bearing the film layer to be aligned; the optical processing mechanism 2 is used for receiving light of the light source, dividing the received light into two coherent light beams and enabling the two coherent light beams to form interference fringes (shown in fig. 2) with alternate light and shade on the film layer to be aligned on the bearing surface; and the developing mechanism is used for removing the part of the film layer to be aligned, which corresponds to the bright fringes in the interference fringes.
As shown in fig. 1, the film layer 3 to be aligned may be formed on the carrier 4, and usually, the alignment film obtained after alignment is disposed on the array substrate or the color film substrate, so that the substrate may be disposed on the carrier 4 first, then the film layer 3 to be aligned is formed on the substrate, and then the film layer 3 to be aligned is aligned. The film layer 3 to be aligned may be a polyimide film containing a photosensitizer.
Because the two beams of coherent light generated by the optical processing mechanism 2 can form interference fringes with alternate light and shade on the bearing surface, when the film layer 3 to be aligned is arranged on the bearing surface of the bearing table 4, the interference fringes are formed on the film layer 3 to be aligned, the position of the film layer 3 to be aligned, which receives the bright fringes, is subjected to denaturation and decomposition by light irradiation, the position of the film layer which receives the dark fringes is unchanged, and then the groove can be formed only by developing the film layer, wherein the width of the groove is the width of the fringes. After the alignment is completed, the liquid crystal molecules are changed from the disordered arrangement of fig. 5 to the ordered arrangement of fig. 6. Therefore, when the alignment film manufacturing device is used for manufacturing the alignment film, the film layer to be aligned does not need to be contacted, the film layer is not polluted, polarized light does not need to be generated, and the process complexity is reduced.
Specifically, the light source 1 may be an ultraviolet light source to emit ultraviolet light having high energy.
Specifically, as shown in fig. 1, the optical processing mechanism 2 includes: a beam splitter 200, a first reflecting mirror 201, and a second reflecting mirror 202, the beam splitter 200 being a half mirror. The positional relationship among the beam splitter 200, the first reflecting mirror 201, and the second reflecting mirror 202 should satisfy: a mirror image 201' of the first mirror 201 symmetrical with respect to the half mirror 200 makes a predetermined angle θ with the second mirror 202; moreover, the light emitted from the light source 1 can reach the beam splitter 200 and be divided into two parts, wherein a part of the light can be reflected back to the beam splitter 200 after being reflected to the second reflecting mirror 202 by the beam splitter 200; and the other part of the light can be reflected back to the half mirror 200 after being transmitted to the first reflector 201 through the beam splitter 200; the carrier 4 is located below the beam splitter 200.
As shown in fig. 1, when the light source 1 emits light, a part of the light is reflected to the second reflector 202 through the half mirror, reflected by the second reflector 202 toward the half mirror, and then passes through the reflective half mirror to irradiate onto the carrying surface of the carrying platform 4, such as the part of the light labeled L1 in fig. 1; another part of the light passes through the half mirror to irradiate onto the first reflector 201, and is reflected by the first reflector 201 to the half mirror, and then passes through the half mirror to irradiate onto the carrying surface of the carrying stage 4, as shown in fig. 1 labeled as L2. Light emitted by the light source 1 is split into two beams of coherent light by the beam splitter 200, the two beams of coherent light are irradiated to the film layer 3 to be aligned through different light paths, and a certain optical path difference exists, so that light and dark stripes are formed on the bearing surface.
In the process of irradiating the light from the light source 1 to the bearing surface in fig. 1, a part of the light (light L1) passes through the primary beam splitter, and another part of the light (light L2) passes through the beam splitter three times, thereby affecting the optical path difference between the two parts of the light. Preferably, as shown in fig. 1, the optical processing mechanism 2 further includes a compensation lens 203 disposed between the beam splitter 200 and the first reflecting mirror 201, so that the optical path length of one of the two light beams emitted by the beam splitter 200 in the beam splitter 200 is equal to the sum of the optical path lengths of the other light beam transmitted through the beam splitter 200 in the beam splitter 200 and the compensation lens 203, thereby eliminating the influence on the optical path difference due to the difference in the number of times the two light beams pass through the medium.
Specifically, the compensation lens 203 is parallel to the beam splitter 200, and the material of the compensation lens 203 is the same as that of the beam splitter 200, and the thickness of the compensation lens 203 is the same as that of the beam splitter 200. It should be understood that the beam splitter 200 is a half mirror, and includes a substrate and a half mirror film, and the material of the compensation lens 203 and the beam splitter 200 is the same, which means that the substrate of the two is the same. At this time, the light L2 passes through the half mirror once and the compensation lens 203 twice, which is equivalent to passing through the half mirror three times.
Specifically, the predetermined angle satisfies the following formula:
θ＝arctan(λ/x)
where θ is the predetermined angle, λ is the wavelength of the light emitted from the light source, and x is 2 times the width of the trench to be formed on the film layer to be aligned, i.e. the period of the interference fringes (as shown in fig. 2).
Therefore, the predetermined angle may be determined according to the width of the groove to be formed, so as to adjust the position between the first mirror 201 and the second mirror 202 such that the angle between the mirror image 201' of the first mirror symmetrical with respect to the half mirror 200 and the second mirror 202 is arctan (λ/x).
In practical production, the areas of the first mirror 201 and the second mirror 202 and the distance between the film and the transflective mirror 200 can be determined according to the size of the area to be aligned in the film 3, so as to ensure that the interference fringes can cover the film to be aligned.
Further, as shown in fig. 3, one end of the second mirror 202 is fixed on the installation base, the device for manufacturing the alignment film further includes a telescopic supporting member 500 and a control mechanism, one end of the supporting member 500 is fixedly connected to the other end of the second mirror 502, the other end of the supporting member 500 is fixedly connected to the installation base, and the control mechanism is configured to control the supporting member 500 to shorten or extend. When the length of the support 500 is changed, one end of the second mirror 202 is supported to a different extent, while the other end of the second mirror 202 is fixed, so that the angle between the second mirror 202 and the mirror image 201' of the first mirror 201 symmetrical about the half mirror 200 is changed accordingly.
Specifically, the supporting member 500 is made of piezoceramic, as shown in fig. 4, the control mechanism includes a first electrode plate 501, a second electrode plate 502 and a control circuit (not shown), one end of the supporting member 500 is fixedly connected with the other end of the second mirror 202 through the first electrode plate 501, the other end of the supporting member 500 is fixedly connected with the installation base through the second electrode plate 502, and the control circuit is electrically connected with the first electrode plate 501 and the second electrode plate 502 respectively for outputting different electrical signals to the first electrode plate 501 and the second electrode plate 502 respectively, so that a corresponding electric field is formed between the first electrode plate 501 and the second electrode plate 502, and under the action of the electric field, the supporting member 500 made of piezoceramic is extended or shortened, so that the other end of the second mirror 202 is supported to a corresponding height. Therefore, the angle between the second mirror 202 and the mirror image 201' of the first mirror 201 symmetric about the half mirror can be adjusted by adjusting only the electrical signals provided to the first electrode plate 501 and the second electrode plate 502 by the control circuit, so as to realize automatic and accurate control.
As shown in fig. 4, the developing mechanism may include a developing solution applying structure 7 such as a shower head or the like. When the alignment film is formed on the substrate, the substrate coated with the film 3 is placed in a developing tank during development, and then a developing solution, which may be water, ethanol, acetone, or other solvent capable of dissolving the film 3 decomposed by light, is applied to the film 3 by using the developing solution coating structure 7.
As another aspect of the present invention, a method for manufacturing an alignment film is provided, including the steps of:
forming light and dark interference fringes on the film layer to be aligned by using the alignment film manufacturing device; and
and removing the part of the film layer to be aligned, which corresponds to the bright fringe in the interference fringe, by using a developing solution. After the interference fringes are formed on the alignment film layer, the part of the film layer corresponding to the bright fringes can be subjected to denaturation and decomposition, and after the development of the developing mechanism, the part corresponding to the bright fringes is removed to form a groove.
When light and dark interference fringes are formed on the film layer to be aligned, the light source can be utilized to emit light to the light processing mechanism to generate two beams of coherent light, so that the light and dark interference fringes are formed on the film layer to be aligned, and the specific process is not described herein again.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. An alignment film manufacturing apparatus, comprising:
a light source for emitting light of a single wavelength;
the bearing table is provided with a bearing surface for bearing the film layer to be aligned;
the optical processing mechanism is used for receiving the light of the light source, dividing the received light into two beams of coherent light and enabling the two beams of coherent light to form interference fringes with alternate light and shade on the film layer to be aligned on the bearing surface;
the developing mechanism is used for removing a part, corresponding to bright fringes in the interference fringes, on the film layer to be aligned; wherein,
the optical processing mechanism includes: the beam splitter is a half-mirror, and a mirror image of the first reflecting mirror, which is symmetrical to the half-mirror, forms a preset angle with the second reflecting mirror;
the light emitted by the light source can reach the spectroscope and is divided into two parts, wherein one part of the light can be reflected back to the spectroscope after being reflected to the second reflecting mirror by the spectroscope; the other part of the light can be reflected back to the spectroscope after being transmitted to the first reflector by the spectroscope;
the bearing table is positioned below the spectroscope.
2. The device for manufacturing an alignment film according to claim 1, wherein the light processing mechanism further comprises a compensation lens disposed between the beam splitter and the first reflecting mirror, such that an optical path length of a part of the light reflected by the beam splitter in the beam splitter is equal to a sum of optical path lengths of the other part of the light transmitted through the beam splitter in the beam splitter and the compensation lens.
3. The device for manufacturing an alignment film according to claim 2, wherein the compensation lens is parallel to the beam splitter.
4. The device for manufacturing an alignment film according to claim 2, wherein the material of the compensation lens is the same as the material of the beam splitter, and the thickness of the compensation lens is the same as the thickness of the beam splitter.
5. The device for manufacturing an alignment film according to claim 1, wherein the predetermined angle satisfies the following formula:
θ＝arctan(λ/x)
where θ is the predetermined angle, λ is the wavelength of the light emitted from the light source, and x is 2 times the width of the trench to be formed on the film layer to be aligned.
6. The device for manufacturing an alignment film according to claim 1, wherein one end of the second reflector is fixed on an installation base, the device further comprises a retractable supporting member and a control mechanism, one end of the supporting member is fixedly connected to the other end of the second reflector, the other end of the supporting member is fixedly connected to the installation base, and the control mechanism is configured to control the supporting member to shorten or lengthen.
7. The device for manufacturing an alignment film according to claim 6, wherein the supporting member is made of piezoelectric ceramic, the control mechanism includes a first electrode plate, a second electrode plate, and a control circuit, one end of the supporting member is fixedly connected to the other end of the second reflector through the first electrode plate, the other end of the supporting member is fixedly connected to the mounting base through the second electrode plate, and the control circuit is electrically connected to the first electrode plate and the second electrode plate, respectively, and configured to output different electrical signals to the first electrode plate and the second electrode plate, respectively.
8. The device for manufacturing an alignment film according to any one of claims 1 to 7, wherein the light source is an ultraviolet light source.
9. A manufacturing method of an alignment film is characterized by comprising the following steps:
forming light and dark interference fringes on a film layer to be aligned by using the alignment film manufacturing device of any one of claims 1 to 8; and
and removing the part of the film layer to be aligned, which corresponds to the bright fringe in the interference fringe, by using a developing solution.
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| CN201610004916.3A CN105425476B (en) | 2016-01-04 | 2016-01-04 | The producing device and production method of alignment film |
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| CN201610004916.3A CN105425476B (en) | 2016-01-04 | 2016-01-04 | The producing device and production method of alignment film |
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| CN105425476B true CN105425476B (en) | 2018-06-15 |
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| CN112017604B (en) * | 2019-05-31 | 2022-07-08 | 京东方科技集团股份有限公司 | Driving method, driving device, display device and computer readable storage medium |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1041242C (en) * | 1994-02-09 | 1998-12-16 | 英国国防部 | Liquid cyrstal device alignment |
| KR100304914B1 (en) * | 1994-04-19 | 2002-10-31 | 엘지.필립스 엘시디 주식회사 | Alignment device and method for liquid crystal display device |
| CN1967353A (en) * | 2005-11-17 | 2007-05-23 | 群康科技(深圳)有限公司 | Liquid crystal alignment apparatus and alignment method used the same |
| KR20090029506A (en) * | 2007-09-18 | 2009-03-23 | 주식회사 에이디피엔지니어링 | Apparatus for forming an alignment layer of liquid crystal display device and method for forming an alignment layer using the same |
| CN102576107A (en) * | 2009-09-22 | 2012-07-11 | Lg化学株式会社 | High ultraviolet transmitting double-layer wire grid polarizer for fabricating photo-alignment layer and fabrication method thereof |
| CN104808395A (en) * | 2015-05-21 | 2015-07-29 | 合肥鑫晟光电科技有限公司 | Optical alignment film, manufacturing method thereof, display substrate and display device |
-
2016
- 2016-01-04 CN CN201610004916.3A patent/CN105425476B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1041242C (en) * | 1994-02-09 | 1998-12-16 | 英国国防部 | Liquid cyrstal device alignment |
| KR100304914B1 (en) * | 1994-04-19 | 2002-10-31 | 엘지.필립스 엘시디 주식회사 | Alignment device and method for liquid crystal display device |
| CN1967353A (en) * | 2005-11-17 | 2007-05-23 | 群康科技(深圳)有限公司 | Liquid crystal alignment apparatus and alignment method used the same |
| KR20090029506A (en) * | 2007-09-18 | 2009-03-23 | 주식회사 에이디피엔지니어링 | Apparatus for forming an alignment layer of liquid crystal display device and method for forming an alignment layer using the same |
| CN102576107A (en) * | 2009-09-22 | 2012-07-11 | Lg化学株式会社 | High ultraviolet transmitting double-layer wire grid polarizer for fabricating photo-alignment layer and fabrication method thereof |
| CN104808395A (en) * | 2015-05-21 | 2015-07-29 | 合肥鑫晟光电科技有限公司 | Optical alignment film, manufacturing method thereof, display substrate and display device |
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| CN105425476A (en) | 2016-03-23 |
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