CN105424656B - A kind of measuring method of angle dependency photonic crystal hydrogen gas sensor - Google Patents
A kind of measuring method of angle dependency photonic crystal hydrogen gas sensor Download PDFInfo
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- CN105424656B CN105424656B CN201610013901.3A CN201610013901A CN105424656B CN 105424656 B CN105424656 B CN 105424656B CN 201610013901 A CN201610013901 A CN 201610013901A CN 105424656 B CN105424656 B CN 105424656B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/59—Transmissivity
- G01N2021/5903—Transmissivity using surface plasmon resonance [SPR], e.g. extraordinary optical transmission [EOT]
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Abstract
The present invention discloses a kind of angle dependency photonic crystal hydrogen gas sensor, and dioxide photon crystal is prepared in quartz substrate, and the cycle is adjustable, grows palladium-base alloy film respectively in two sides of photonic crystal, and thickness is adjustable, with a fixed angle after laser beam collimation（Usually photonic crystal resonance angle）Incide on photonic crystal, transmission coefficient at this time is 0%, volume can expand after palladium adsorbed hydrogen, so as to stretch photonic crystal, make its cycle elongated, resonance angle is moved to wide-angle direction, and the transmission coefficient of incident angle position can change to more than 70%, compared with conventional reflective hydrogen gas sensor, sensitivity can improve 23 orders of magnitude.
Description
Technical field
The invention belongs to gas sensor technical field, and in particular to a kind of angle dependency photonic crystal hydrogen gas sensor
Measuring method.
Background technology
Hydrogen energy source is renewable and clean energy resource, is the effective way for ensureing energy sustainability.In May, 2010 is in Germany angstrom
Gloomy to hold the 18th world's Hydrogen Energy conference, Chinese science and technology portion minister Wan Gang points out：China will formulate national Hydrogen Energy planning, increase
To the input of Hydrogen Energy, expand the demonstration and application of Hydrogen Energy, strengthen the international cooperation of Hydrogen Energy.On July 12nd, 2010, world's seat of honour hydrogen
Energy power station takes notice of that big profit is constructed and put into operation, and indicates that the utilization of Hydrogen Energy comes into the stage of realizing.It is excellent due to hydrogen
Characteristic, is also widely used in other field, such as seismic monitoring, the producing of high purity silicon chip, the life of hydrogeneous chemical products
Production, Petroleum refining, metal welding etc..
But hydrogen is a kind of high-risk gas, under normal temperature and pressure, if the content of Hydrogen in Air be located at 4%-74.5% it
Between, it is most likely that trigger the accidents such as fire, explosion, threaten personal safety as well as the property safety.In addition, oxygen, hydrogen in nuclear power station surrounding environment
Gas, humidity etc. all affect the health status of nuclear material, and wherein hydrogen influences it especially pronounced.Hydrogen is encapsulation nuclear material
Metal parts and nuclear material near metal shell, nuclear material are in itself by the product of vapour corrosion, and the hydrogen generated can also
Further corrode nuclear material and many metal parts.Accurately and effectively density of hydrogen in nuclear power station surrounding environment is monitored in real time,
Health operation to nuclear power station has great significance.
Recent studies suggest that earthquake early period, crack, which gushes out density of hydrogen in gas, increased, and accurately measure hydrogen
Concentration information, to Study of Seismic process, predicting an earthquake etc. is of great significance.
In short, in order to ensure the security during hydrogen generation, storage, transport and use, expand the application neck of hydrogen
Domain, studies a kind of strong antijamming capability, high sensitivity, the reaction time is short, stability is high, good reliability, small, cost is low
Hydrogen gas sensor tool is of great significance.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of angle dependency photonic crystal hydrogen gas sensor, to improve
The detection sensitivity of optics hydrogen gas sensor at present, realizes the highly sensitive detection to hydrogen at room temperature.
Realize the technical scheme is that：
A kind of measuring method of angle dependency photonic crystal hydrogen gas sensor, probe is placed in environment to be measured, parallel
Light source is incident on sensor surface with fixed angle, and fixed angle is photonic crystal resonance angle so that TM mould transmission coefficients are
0%, volume can expand after palladium-base alloy adsorbed hydrogen, so as to stretch photonic crystal, change its cycle so that its resonance angle
Spend to wide-angle direction and move, be gradually deviated from incident angle, the transmission coefficient of TM moulds gradually increases at incident angle, therefore,
Pass through the measurement to transmitted light intensity, it is possible to achieve the detection to density of hydrogen in environment to be measured.
In the above-mentioned technical solutions, the fixed angle is by photonic crystal cycle, the thickness and titanium dioxide of titanium dioxide
Ridge highly determine.
A kind of angle dependency photonic crystal hydrogen gas sensor, including laser light source, photonic crystal probe and detector, institute
State laser light source and photonic crystal probe is incided after collimater is collimated into directional light, the photonic crystal probe back side sets detection
Device, the laser light source and detector are linkage type,
The photonic crystal probe is included in the titanium dioxide ridge type photonic crystal of quartz surfaces growth, the titanium dioxide
The growth of ridge type photonic crystal on side face has one layer of palladium-base alloy.
In the above-mentioned technical solutions, the laser after the collimation is incided on photonic crystal probe with fixing incident angle.
In the above-mentioned technical solutions, the fixed incident angle is photonic crystal resonance angle.
In the above-mentioned technical solutions, TM mould transmission coefficient of the laser after collimation under photonic crystal resonance angle is
0%。
In the above-mentioned technical solutions, cycle of photonic crystal in photonic crystal probe, the thickness of titanium dioxide layer with
The height of titanium dioxide roof type is adjustable in visible light wave range.
In the above-mentioned technical solutions, the cycle of the photonic crystal is 400 nanometers, and the thickness of titanium dioxide layer is received for 150
For rice to 180 nanometers, the ridge of titanium dioxide layer is highly 15 nanometers to 50 nanometers.
In the above-mentioned technical solutions, the palladium-base alloy or be Polarium, or be palladium yttrium alloys.
In the above-mentioned technical solutions, the thickness of the palladium-base alloy is 10 nanometers to 100 nanometers.
The present invention operation principle be：
Using the directional light of fixed wave length as incident light, it is incident on photonic crystal resonance angle on photonic crystal probe, this
When the transmission coefficient popped one's head in be 0%；
If having certain density hydrogen in probe surrounding atmosphere, with hydrogen specificity occurs for the palldium alloy film on probe
Effect, causes its volume that a degree of expansion occurs, so as to stretch photonic crystal, makes its cycle stretch-out；
The cycle stretch-out of photonic crystal, its resonance angle can be moved to wide-angle direction so that incident angle is gradually deviated from
Resonance angle, transmission coefficient gradually increase；
By the measurement to intensity in transmission, the change in photonic crystal cycle is characterized, and then the hydrogen obtained around probe is dense
Spend information；
For different demands, thickness, ridge height, incident wavelength and the incident angle of titanium dioxide can be regulated and controled
Deng to adapt to different detection sensitivity and detection range.For convenience of discussion, incident wavelength is set as 633 nanometers, with He-Ne
Laser wavelength matches.Given in embodiment 1-3 between the thickness of titanium dioxide, ridge height, incident wavelength, resonance angle
Relation.In embodiment 4-6, initial resonant angle is fixed as 5 degree, and gives photonic crystal by stretching in various degree
When, resonance angle changing rule.
The present invention is also suitable for other incident wavelengths and incident angle, only need to be by the cycle of photonic crystal, titanium dioxide
Thickness and ridge it is highly regulated to relevant position.Incident angle can be also set in wide-angle one side of resonance angle,
With the stretching in cycle, resonance angle moves closer to incident angle so that transmission coefficient is gradually reduced.
Compared with prior art, the advantage of the invention is that：
Using photonic crystal resonance coupling mode, very high detection sensitivity can be obtained, it is reflective with traditional palladium film
Hydrogen gas sensor is compared, and sensitivity at least lifts the 2-3 order of magnitude；
Light transmission fiber signal can be used, probe size can accomplish very little, can meet the hydrogen inspection of different places
Survey demand.
Brief description of the drawings
Fig. 1 is angle dependency photonic crystal hydrogen gas sensor configuration schematic diagram；
Fig. 2 is the photonic crystal hydrogen gas sensor model that COMSOL softwares are established；
Fig. 3 is highly respectively 15 nanometers, 30 nanometers, 50 nanometers for ridge, and the cycle is 400 nanometers, and incident wavelength is received for 633
Rice, when titanium dioxide thickness is 150 nanometers, the transmission coefficients of TM moulds with incident angle relation；
Fig. 4 is respectively 150 nanometers, 165 nanometers, 180 nanometers for titanium dioxide thickness, and the cycle is 400 nanometers, incident wavelength
For 633 nanometers, when ridge is highly 50 nanometers, the transmission coefficients of TM moulds with incident angle relation；
When Fig. 5 for incident wavelength is respectively 620 nanometers, 627 nanometers, 633 nanometers, the cycle is 400 nanometers, and titanium dioxide is thick
Spend for 150 nanometers, when ridge is highly 50 nanometers, the transmission coefficients of TM moulds with incident angle relation；
Fig. 6 is that ridge is highly 15 nanometers, and initial resonant angle is 5 degree, and during the change cycle, the transmission coefficients of TM moulds is with entering
The relation of firing angle degree；
Fig. 7 is that ridge is highly 30 nanometers, and initial resonant angle is 5 degree, and during the change cycle, the transmission coefficients of TM moulds is with entering
The relation of firing angle degree；
Fig. 8 is that ridge is highly 50 nanometers, and initial resonant angle is 5 degree, and during the change cycle, the transmission coefficients of TM moulds is with entering
The relation of firing angle degree；
Wherein：1 is quartz base plate, and 2 be palladium-base alloy, and 3 be titanium dioxide, and 4 be laser light source, and 5 be detector, and 6 be empty
Gas, 7 be quartz, and 8 be the ridge height of titanium dioxide layer, and 9 be the thickness of titanium dioxide layer.
Embodiment
As shown in Figure 1, sensor of the present invention is mainly by three laser light source, photonic crystal probe, detector portions
It is grouped into；Laser light source needs collimator to be incided after being collimated into directional light on photonic crystal probe, and photonic crystal probe includes
In the titanium dioxide ridge type photonic crystal of quartz surfaces growth, the titanium dioxide ridge type photonic crystal on side face growth has one layer of palladium
Based alloy, thickness is adjustable for 10 nanometers -100 nanometers, and palladium-base alloy is Polarium or palladium yttrium alloys, and alloy ratio is adjustable.It is flat
Line light source is incident on sensor surface at a certain angle, is usually photonic crystal resonance angle（By photonic crystal cycle, titanium dioxide
Titanium thickness is highly determined with ridge）So that TM moulds transmission coefficient is 0%；Cycle, titanium dioxide layer thickness and the ridge of photonic crystal
Type height is adjustable in visible light wave range；Probe is placed in environment to be measured, volume can expand after palladium-base alloy adsorbed hydrogen,
So as to stretch photonic crystal, changing its cycle so that its resonance angle is moved to wide-angle direction, is gradually deviated from incident angle,
The transmission coefficient of TM moulds gradually increases at incident angle, therefore, passes through the measurement to transmitted light intensity, it is possible to achieve to ring to be measured
The detection of density of hydrogen in border.
Embodiment 1
As Fig. 2 establishes model, air layer thickness is arranged to 1.2 microns, and quartzy layer thickness is arranged to 1.2 microns, titanium dioxide
Titanium layer thickness is arranged to 150 nanometers, and the cycle is arranged to 400 nanometers；
The refractive index of air is arranged to 1, and quartzy refractive index is arranged to 1.46, and the refractive index of titanium dioxide is 2.22, is entered
Ejected wave length is arranged to 633 nanometers, and the light velocity is arranged to 3 × 108Meter per second, ridge be highly respectively set to 15 nanometers, 30 nanometers, 50
Nanometer, the relation of the transmission coefficient of TM moulds and incident angle when calculating different ridge height；
As shown in figure 3, the transmission coefficient of TM moulds and the relation of incident angle under different ridge altitudes are provided in figure, can
To see, other conditions are constant, and when only changing ridge height, resonance angle can change, as ridge highly gradually increases, resonance
Angle is to low-angle direction change, and transmission coefficient gradually broadens with the depression of angle change.
Embodiment 2
As Fig. 2 establishes model, air layer thickness is arranged to 1.2 microns, and quartzy layer thickness is arranged to 1.2 microns, and ridge is high
Degree is arranged to 50 nanometers, and the cycle is arranged to 400 nanometers；
The refractive index of air is arranged to 1, and quartzy refractive index is arranged to 1.46, and the refractive index of titanium dioxide is 2.22, is entered
Ejected wave length is arranged to 633 nanometers, and the light velocity is arranged to 3 × 108Meter per second, titanium dioxide thickness are respectively set to 150 nanometers, 165 receive
Rice, 180 nanometers, the relation of the transmission coefficient of TM moulds and incident angle when calculating different titanium dioxide thickness；
As shown in figure 4, the transmission coefficient of TM moulds and the pass of incident angle under different titanium dioxide depth informations are provided in figure
System, it is seen then that other conditions are constant, and when only changing titanium dioxide thickness, resonance angle can change, as thickness gradually increases
Greatly, resonance angle is to wide-angle direction change, and transmission coefficient gradually broadens with the depression of angle change.
Embodiment 3
As Fig. 2 establishes model, air layer thickness is arranged to 1.2 microns, and quartzy layer thickness is arranged to 1.2 microns, titanium dioxide
Titanium layer thickness is arranged to 150 nanometers, and ridge is highly arranged to 50 nanometers, and the cycle is arranged to 400 nanometers；
The refractive index of air is arranged to 1, and quartzy refractive index is arranged to 1.46, and the refractive index of titanium dioxide is 2.22, light
Speed is arranged to 3 × 108Meter per second, incident wavelength are respectively set to 620 nanometers, 627 nanometers, 633 nanometers, calculate different incidence waves
The relation of the transmission coefficient of TM moulds and incident angle when long；
As shown in figure 5, the transmission coefficient of TM moulds and the relation of incident angle in the case of different incident wavelengths are provided in figure, can
To see, other conditions are constant, and when only changing incident wavelength, resonance angle can change, as incident wavelength gradually increases, resonance
Angle is to wide-angle direction change, and transmission coefficient is with the recess width of angle change without significant change.
Embodiment 4
As Fig. 2 establishes model, air layer thickness is arranged to 1.2 microns, and quartzy layer thickness is arranged to 1.2 microns, titanium dioxide
Titanium layer thickness is arranged to 156.3 nanometers, and ridge is highly arranged to 15 nanometers, and the cycle is arranged to 400 nanometers；
The refractive index of air is arranged to 1, and quartzy refractive index is arranged to 1.46, and the refractive index of titanium dioxide is 2.22, is entered
Ejected wave length is arranged to 633 nanometers, and the light velocity is arranged to 3 × 108Meter per second, calculates the transmission coefficient of TM moulds with the relation of incident angle；
Cycle is changed to 400.1 nanometers for 0.01 nanometer with step-length, calculates the transmission system in different cycles position TM moulds respectively
The relation of number and incident angle；
As shown in fig. 6, the transmission coefficient of TM moulds and the relation of incident angle in the case of different cycles are provided in figure, it is seen then that
If incident angle is fixed on 5 degree, when the cycle is 400 nanometers, transmission coefficient 0%, as mechanical periodicity, resonance angle are gradual
Being moved to wide-angle direction, transmission coefficient becomes larger, when mechanical periodicity is 400.10 nanometers, transmission coefficient 75%, the cycle
Extend 0.025%, variations in transmissivity 75%.
Embodiment 5
As Fig. 2 establishes model, air layer thickness is arranged to 1.2 microns, and quartzy layer thickness is arranged to 1.2 microns, titanium dioxide
Titanium layer thickness is arranged to 158.33 nanometers, and ridge is highly arranged to 30 nanometers, and the cycle is arranged to 400 nanometers；
The refractive index of air is arranged to 1, and quartzy refractive index is arranged to 1.46, and the refractive index of titanium dioxide is 2.22, is entered
Ejected wave length is arranged to 633 nanometers, and the light velocity is arranged to 3 × 108Meter per second, calculates the transmission coefficient of TM moulds with the relation of incident angle；
Cycle is changed to 400.40 nanometers for 0.05 nanometer with step-length, calculates the transmission system in different cycles position TM moulds respectively
The relation of number and incident angle；
As shown in fig. 7, the transmission coefficient of TM moulds and the relation of incident angle in the case of different cycles are provided in figure, it is seen then that
If incident angle is fixed on 5 degree, when the cycle is 400 nanometers, transmission coefficient 0%, as mechanical periodicity, resonance angle are gradual
Being moved to wide-angle direction, transmission coefficient becomes larger, when mechanical periodicity is 400.40 nanometers, transmission coefficient 75%, the cycle
Extend 0.1%, variations in transmissivity 75%.
Embodiment 6
As Fig. 2 establishes model, air layer thickness is arranged to 1.2 microns, and quartzy layer thickness is arranged to 1.2 microns, titanium dioxide
Titanium layer thickness is arranged to 163 nanometers, and ridge is highly arranged to 50 nanometers, and the cycle is arranged to 400 nanometers；
The refractive index of air is arranged to 1, and quartzy refractive index is arranged to 1.46, and the refractive index of titanium dioxide is 2.22, is entered
Ejected wave length is arranged to 633 nanometers, and the light velocity is arranged to 3 × 108Meter per second, calculates the transmission coefficient of TM moulds with the relation of incident angle；
Cycle is changed to 400.80 nanometers for 0.1 nanometer with step-length, calculates the transmission system in different cycles position TM moulds respectively
The relation of number and incident angle；
As shown in figure 8, the transmission coefficient of TM moulds and the relation of incident angle in the case of different cycles are provided in figure, it is seen then that
If incident angle is fixed on 5 degree, when the cycle is 400 nanometers, transmission coefficient 0%, as mechanical periodicity, resonance angle are gradual
Being moved to wide-angle direction, transmission coefficient becomes larger, when mechanical periodicity is 400.80 nanometers, transmission coefficient 70%, the cycle
Extend 0.2%, variations in transmissivity 70%.
Claims (9)
- A kind of 1. test method of angle dependency photonic crystal hydrogen gas sensor, it is characterised in that：The sensor includes laser light source, photonic crystal probe and detector, the laser light source and is collimated into by collimater Photonic crystal probe is incided after directional light, the photonic crystal probe back side sets detector, and the laser light source is with detector Linkage type, the photonic crystal probe are included in the titanium dioxide ridge type photonic crystal of quartz surfaces growth, the titanium dioxide The growth of ridge type photonic crystal on side face has one layer of palladium-base alloy；Photonic crystal probe is placed in environment to be measured, source of parallel light is incident on sensor surface with fixed angle, fixed Angle is photonic crystal resonance angle so that TM moulds transmission coefficient is 0%, and volume can expand after palladium-base alloy adsorbed hydrogen, So as to stretch photonic crystal, changing its cycle so that its resonance angle is moved to wide-angle direction, is gradually deviated from incident angle, The transmission coefficient of TM moulds gradually increases at incident angle, therefore, passes through the measurement to transmitted light intensity, it is possible to achieve to ring to be measured The detection of density of hydrogen in border.
- 2. a kind of test method of angle dependency photonic crystal hydrogen gas sensor according to claim 1, its feature exist Highly determined by the ridge in photonic crystal cycle, the thickness of titanium dioxide and titanium dioxide in the fixed angle.
- A kind of 3. angle dependency photonic crystal hydrogen gas sensor according to claim 1, it is characterised in that the collimation Laser afterwards is incided on photonic crystal probe with fixing incident angle.
- A kind of 4. angle dependency photonic crystal hydrogen gas sensor according to claim 3, it is characterised in that the fixation Incident angle is photonic crystal resonance angle.
- 5. a kind of angle dependency photonic crystal hydrogen gas sensor according to claim 4, it is characterised in that after collimation TM mould transmission coefficient of the laser under photonic crystal resonance angle be 0%.
- A kind of 6. angle dependency photonic crystal hydrogen gas sensor according to claim 1, it is characterised in that the photon The height in the cycle of photonic crystal, the thickness of titanium dioxide layer and titanium dioxide roof type can in visible light wave range in crystal probe Adjust.
- A kind of 7. angle dependency photonic crystal hydrogen gas sensor according to claim 6, it is characterised in that the photon The cycle of crystal is 400 nanometers, and the thickness of titanium dioxide layer is 150 nanometers to 180 nanometers, and the ridge of titanium dioxide layer is highly 15 nanometers to 50 nanometers.
- A kind of 8. angle dependency photonic crystal hydrogen gas sensor according to claim 1, it is characterised in that the palladium base Alloy is Polarium, or is palladium yttrium alloys.
- A kind of 9. angle dependency photonic crystal hydrogen gas sensor according to claim 8, it is characterised in that the palladium base The thickness of alloy is 10 nanometers to 100 nanometers.
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| CN110455751A (en) * | 2019-08-22 | 2019-11-15 | 复旦大学 | A kind of hydrogen trace detection method based on curling film |
| CN110389122B (en) * | 2019-09-03 | 2022-05-20 | 中国工程物理研究院流体物理研究所 | Fluorescence enhancement type all-fiber hydrogen sensor based on metamaterial |
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