CN205384222U - Photonic crystal hydrogen sensor that angle relied on - Google Patents
Photonic crystal hydrogen sensor that angle relied on Download PDFInfo
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- CN205384222U CN205384222U CN201620017730.7U CN201620017730U CN205384222U CN 205384222 U CN205384222 U CN 205384222U CN 201620017730 U CN201620017730 U CN 201620017730U CN 205384222 U CN205384222 U CN 205384222U
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Abstract
The utility model discloses a photonic crystal hydrogen sensor that angle relied on, prepare titanium dioxide photonic crystal on quartz substrate, cycle is adjustable, at photonic crystal two sides palladium -based alloy film of growing respectively, thickness is adjustable, on inciding photonic crystal with a fixed angle (be usually photonic crystal resonate angle) behind the laser beam collimation, the transmission factor of this moment is 0%, the inflation can take place for the volume behind the palladium adsorption hydrogen, thereby tensile photonic crystal, make its cycle elongated, the resonance angle moves to big angle direction, the transmission factor of incident angle position can change to more than 70%, compare with the reflective hydrogen sensor of tradition, sensitivity can improve a 2 -3 order of magnitude.
Description
Technical field
The invention belongs to gas sensor technical field, be specifically related to a kind of angle dependency photonic crystal hydrogen gas sensor.
Background technology
Hydrogen energy source is renewable and clean energy resource, is the effective way ensureing energy sustainability.In May, 2010 holds the 18th world's Hydrogen Energy conference at Essen, Germany, and Chinese science and technology portion minister Wan Gang points out: China to formulate country's Hydrogen Energy planning, strengthens the input to Hydrogen Energy, expands demonstration and the application of Hydrogen Energy, strengthens the international cooperation of Hydrogen Energy.On July 12nd, 2010, seat of honour hydrogen energy source electric station, the world is constructed and put into operation in Italy, indicates that the utilization of Hydrogen Energy comes into the stage of realizing.Due to the good characteristic of hydrogen, also it is widely used at other field, for instance seismic monitoring, the production of high purity silicon wafer, the production of containing hydrogenated chemical product, Petroleum refining, metal solder etc..
But, hydrogen is a kind of high-risk gas, under normal temperature and pressure, if the content of Hydrogen in Air is between 4%-74.5%, it is most likely that the accident such as initiation fire, blast, threatens personal safety as well as the property safety.Additionally, oxygen, hydrogen, humidity etc. all affect the health status of nuclear material in nuclear power station surrounding, wherein hydrogen is especially pronounced on its impact.Hydrogen be the metal parts near the encapsulation metal shell of nuclear material, nuclear material and nuclear material itself by the product of vapour corrosion, and the hydrogen generated also can corrode nuclear material and many metal parts further.Accurately and effectively density of hydrogen in nuclear power station surrounding is monitored in real time, the healthy operation of nuclear power station is had great significance.
Recent studies suggest that, earthquake early stage, crack density of hydrogen in gas of gushing out can increase to some extent, accurately measures density of hydrogen information, Study of Seismic process, predict an earthquake etc. is significant.
In a word, in order to ensure the safety in hydrogen generation, storage, transport and use procedure, expand the application of hydrogen, study the hydrogen gas sensor tool that a kind of capacity of resisting disturbance is strong, highly sensitive, the response time is short, stability is high, good reliability, volume are little, cost is low and be of great significance.
Summary of the invention
The technical problem to be solved in the present invention is in that to provide a kind of angle dependency photonic crystal hydrogen gas sensor, to improve the detection sensitivity of current Optical Hydrogen gas sensor, it is achieved highly sensitive detection to hydrogen under room temperature.
Realization the technical scheme is that
A kind of angle dependency photonic crystal hydrogen gas sensor, including LASER Light Source, photonic crystal probe and detector, described LASER Light Source becomes to incide after directional light photonic crystal probe through collimating device collimation, and the photonic crystal probe back side arranges detector, described LASER Light Source and detector are linkage type
Described photonic crystal probe includes the titanium dioxide ridge type photonic crystal in quartz surfaces growth, and the growth of described titanium dioxide ridge type photonic crystal on side face has one layer of palladium-base alloy.
In technique scheme, the laser after described collimation incides on photonic crystal probe with fixing incident angle.
In technique scheme, described fixing incident angle is photonic crystal resonance angle.
In technique scheme, the TM mould transmission coefficient under photonic crystal resonance angle of the laser after collimation is 0%.
In technique scheme, in described photonic crystal probe, the height of thickness and the titanium dioxide roof type of the cycle of photonic crystal, titanium dioxide layer is adjustable at visible light wave range.
In technique scheme, the cycle of described photonic crystal is 400 nanometers, and the thickness of titanium dioxide layer is 150 nanometers to 180 nanometers, and the ridge height of titanium dioxide layer is 15 nanometers to 50 nanometers.
In technique scheme, described palladium-base alloy or be Polarium, or be palladium yttrium alloys.
In technique scheme, the thickness of described palladium-base alloy is 10 nanometers to 100 nanometers.
In technique scheme, probe is placed in environment to be measured, source of parallel light is incident on sensor surface with fixed angle, fixed angle is photonic crystal resonance angle, making TM mould transmission coefficient is 0%, after palladium-base alloy adsorbed hydrogen, volume can expand, thus stretching photonic crystal, change its cycle so that its resonance angle moves to wide-angle direction, is gradually deviated from incident angle, transmission coefficient at incident angle place TM mould is gradually increased, therefore, by the measurement to transmitted light intensity, it is possible to achieve to the detection of density of hydrogen in environment to be measured.
In technique scheme, described fixed angle is determined with the ridge height of titanium dioxide by photonic crystal cycle, the thickness of titanium dioxide.
The operation principle of the present invention is:
With the directional light of fixed wave length for incident illumination, being incident on photonic crystal probe with photonic crystal resonance angle, the transmission coefficient now popped one's head in is 0%；
If probe surrounding atmosphere has certain density hydrogen, the palldium alloy thin film on probe and hydrogen generation specific effect, cause its volume that a degree of expansion occurs, thus stretching photonic crystal so that it is cycle stretch-out；
The cycle stretch-out of photonic crystal, its resonance angle can move to wide-angle direction so that incident angle is gradually deviated from resonance angle, and transmission coefficient is gradually increased；
By the measurement to intensity in transmission, characterize the change in photonic crystal cycle, and then obtain probe density of hydrogen information around；
For different demands, it is possible to the regulation and control thickness of titanium dioxide, ridge height, incident wavelength and incident angle etc., to adapt to different detection sensitivities and detection range.For convenience of discussing, incident wavelength is set as 633 nanometers, Wavelength matched with helium neon laser.Embodiment 1-3 gives the relation between the thickness of titanium dioxide, ridge height, incident wavelength, resonance angle.In embodiment 4-6, initial resonant angle is fixed as 5 degree, and gives photonic crystal in time stretching in various degree, resonance angle Changing Pattern.
The present invention is also applicable to other incident wavelength and incident angle, only need to by highly regulated to relevant position with ridge for the thickness in the cycle of photonic crystal, titanium dioxide.Incident angle also can being set in the wide-angle of resonance angle on one side, along with the stretching in cycle, resonance angle moves closer to incident angle so that transmission coefficient is gradually reduced.
Compared with prior art, it is an advantage of the current invention that:
Adopt photonic crystal resonance coupling mode, it is possible to obtaining significantly high detection sensitivity, compared with traditional reflective hydrogen gas sensor of palladium film, sensitivity at least promotes 2-3 the order of magnitude；
Can adopting fiber-optic transfer optics signal, probe size can be accomplished only small, can meet the hydrogen detection demand of different places.
Accompanying drawing explanation
Fig. 1 is angle dependency photonic crystal hydrogen gas sensor configuration schematic diagram；
Fig. 2 is the photonic crystal hydrogen gas sensor model that COMSOL software is set up；
Fig. 3 is ridge height respectively 15 nanometers, 30 nanometers, 50 nanometers, and the cycle is 400 nanometers, and incident wavelength is 633 nanometers, and when titanium dioxide thickness is 150 nanometers, the transmission coefficient of TM mould is with the relation of incident angle；
Fig. 4 is titanium dioxide thickness respectively 150 nanometers, 165 nanometers, 180 nanometers, and the cycle is 400 nanometers, and incident wavelength is 633 nanometers, and when ridge height is 50 nanometers, the transmission coefficient of TM mould is with the relation of incident angle；
When Fig. 5 is incident wavelength respectively 620 nanometers, 627 nanometers, 633 nanometers, the cycle is 400 nanometers, and titanium dioxide thickness is 150 nanometers, and when ridge height is 50 nanometers, the transmission coefficient of TM mould is with the relation of incident angle；
Fig. 6 is ridge height is 15 nanometers, and initial resonant angle is 5 degree, and when changing the cycle, the transmission coefficient of TM mould is with the relation of incident angle；
Fig. 7 is ridge height is 30 nanometers, and initial resonant angle is 5 degree, and when changing the cycle, the transmission coefficient of TM mould is with the relation of incident angle；
Fig. 8 is ridge height is 50 nanometers, and initial resonant angle is 5 degree, and when changing the cycle, the transmission coefficient of TM mould is with the relation of incident angle；
Wherein: 1 is quartz base plate, 2 is palladium-base alloy, and 3 is titanium dioxide, and 4 is LASER Light Source, and 5 is detector, and 6 is air, and 7 is quartz, and 8 is the ridge height of titanium dioxide layer, and 9 is the thickness of titanium dioxide layer.
Detailed description of the invention
As it is shown in figure 1, sensor of the present invention is mainly made up of LASER Light Source, photonic crystal probe, three parts of detector；The collimator that needs LASER Light Source incides on photonic crystal probe after being collimated into directional light, photonic crystal probe includes the titanium dioxide ridge type photonic crystal in quartz surfaces growth, the growth of described titanium dioxide ridge type photonic crystal on side face has one layer of palladium-base alloy, thickness be 10 nanometers-100 nanometers adjustable, palladium-base alloy is Polarium or palladium yttrium alloys, and alloy ratio is adjustable.Source of parallel light is incident on sensor surface at a certain angle, is generally photonic crystal resonance angle (being determined by photonic crystal cycle, titanium dioxide thickness) with ridge height so that TM mould transmission coefficient is 0%；The cycle of photonic crystal, titanium dioxide layer thickness and ridge height are adjustable at visible light wave range；Probe is placed in environment to be measured, after palladium-base alloy adsorbed hydrogen, volume can expand, thus stretching photonic crystal, change its cycle so that its resonance angle moves to wide-angle direction, is gradually deviated from incident angle, transmission coefficient at incident angle place TM mould is gradually increased, therefore, by the measurement to transmitted light intensity, it is possible to achieve to the detection of density of hydrogen in environment to be measured.
Embodiment 1
As Fig. 2 sets up model, air layer thickness is set to 1.2 microns, and quartz layer thickness is set to 1.2 microns, and titanium dioxide layer thickness is set to 150 nanometers, and the cycle is set to 400 nanometers；
The refractive index of air is set to 1, and the refractive index of quartz is set to 1.46, and the refractive index of titanium dioxide is 2.22, and incident wavelength is set to 633 nanometers, and the light velocity is set to 3 × 108Meter per second, ridge height is respectively set to 15 nanometers, 30 nanometers, 50 nanometers, calculates the transmission coefficient of TM mould during different ridge height and the relation of incident angle；
As shown in Figure 3, figure provides the transmission coefficient of TM mould under different ridge altitudes and the relation of incident angle, visible, other conditions are constant, when only changing ridge height, resonance angle can change, along with ridge height is gradually increased, resonance angle changes to low-angle direction, and the depression that transmission coefficient changes with angle broadens gradually.
Embodiment 2
As Fig. 2 sets up model, air layer thickness is set to 1.2 microns, and quartz layer thickness is set to 1.2 microns, and ridge height is set to 50 nanometers, and the cycle is set to 400 nanometers；
The refractive index of air is set to 1, and the refractive index of quartz is set to 1.46, and the refractive index of titanium dioxide is 2.22, and incident wavelength is set to 633 nanometers, and the light velocity is set to 3 × 108Meter per second, titanium dioxide thickness is respectively set to 150 nanometers, 165 nanometers, 180 nanometers, calculates the transmission coefficient of TM mould during different titanium dioxide thickness and the relation of incident angle；
As shown in Figure 4, figure provides the transmission coefficient of TM mould under different titanium dioxide depth information and the relation of incident angle, visible, other conditions are constant, when only changing titanium dioxide thickness, resonance angle can change, along with thickness is gradually increased, resonance angle changes to wide-angle direction, and the depression that transmission coefficient changes with angle broadens gradually.
Embodiment 3
As Fig. 2 sets up model, air layer thickness is set to 1.2 microns, and quartz layer thickness is set to 1.2 microns, and titanium dioxide layer thickness is set to 150 nanometers, and ridge height is set to 50 nanometers, and the cycle is set to 400 nanometers；
The refractive index of air is set to 1, and the refractive index of quartz is set to 1.46, and the refractive index of titanium dioxide is 2.22, and the light velocity is set to 3 × 108Meter per second, incident wavelength is respectively set to 620 nanometers, 627 nanometers, 633 nanometers, calculates the transmission coefficient of TM mould during different incident wavelength and the relation of incident angle；
As shown in Figure 5, figure provides the transmission coefficient of TM mould in different incident wavelength situation and the relation of incident angle, visible, other conditions are constant, when only changing incident wavelength, resonance angle can change, along with incident wavelength is gradually increased, resonance angle changes to wide-angle direction, and the recess width that transmission coefficient changes with angle is without significant change.
Embodiment 4
As Fig. 2 sets up model, air layer thickness is set to 1.2 microns, and quartz layer thickness is set to 1.2 microns, and titanium dioxide layer thickness is set to 156.3 nanometers, and ridge height is set to 15 nanometers, and the cycle is set to 400 nanometers；
The refractive index of air is set to 1, and the refractive index of quartz is set to 1.46, and the refractive index of titanium dioxide is 2.22, and incident wavelength is set to 633 nanometers, and the light velocity is set to 3 × 108Meter per second, calculates the transmission coefficient relation with incident angle of TM mould；
Change the cycle to 400.1 nanometers with step-length 0.01 nanometer, calculate the relation of the transmission coefficient at different cycles position TM mould and incident angle respectively；
As shown in Figure 6, figure provides the relation of the transmission coefficient of TM mould and incident angle in different cycles situation, it is seen that, if incident angle is fixed on 5 degree, when cycle is 400 nanometers, transmission coefficient is 0%, along with mechanical periodicity, resonance angle moves to wide-angle direction gradually, transmission coefficient becomes larger, and when mechanical periodicity is 400.10 nanometers, transmission coefficient is 75%, cycle stretch-out 0.025%, variations in transmissivity 75%.
Embodiment 5
As Fig. 2 sets up model, air layer thickness is set to 1.2 microns, and quartz layer thickness is set to 1.2 microns, and titanium dioxide layer thickness is set to 158.33 nanometers, and ridge height is set to 30 nanometers, and the cycle is set to 400 nanometers；
The refractive index of air is set to 1, and the refractive index of quartz is set to 1.46, and the refractive index of titanium dioxide is 2.22, and incident wavelength is set to 633 nanometers, and the light velocity is set to 3 × 108Meter per second, calculates the transmission coefficient relation with incident angle of TM mould；
Change the cycle to 400.40 nanometers with step-length 0.05 nanometer, calculate the relation of the transmission coefficient at different cycles position TM mould and incident angle respectively；
As it is shown in fig. 7, figure provides the relation of the transmission coefficient of TM mould and incident angle in different cycles situation, it is seen that, if incident angle is fixed on 5 degree, when cycle is 400 nanometers, transmission coefficient is 0%, along with mechanical periodicity, resonance angle moves to wide-angle direction gradually, transmission coefficient becomes larger, and when mechanical periodicity is 400.40 nanometers, transmission coefficient is 75%, cycle stretch-out 0.1%, variations in transmissivity 75%.
Embodiment 6
As Fig. 2 sets up model, air layer thickness is set to 1.2 microns, and quartz layer thickness is set to 1.2 microns, and titanium dioxide layer thickness is set to 163 nanometers, and ridge height is set to 50 nanometers, and the cycle is set to 400 nanometers；
The refractive index of air is set to 1, and the refractive index of quartz is set to 1.46, and the refractive index of titanium dioxide is 2.22, and incident wavelength is set to 633 nanometers, and the light velocity is set to 3 × 108Meter per second, calculates the transmission coefficient relation with incident angle of TM mould；
Change the cycle to 400.80 nanometers with step-length 0.1 nanometer, calculate the relation of the transmission coefficient at different cycles position TM mould and incident angle respectively；
As shown in Figure 8, figure provides the relation of the transmission coefficient of TM mould and incident angle in different cycles situation, it is seen that, if incident angle is fixed on 5 degree, when cycle is 400 nanometers, transmission coefficient is 0%, along with mechanical periodicity, resonance angle moves to wide-angle direction gradually, transmission coefficient becomes larger, and when mechanical periodicity is 400.80 nanometers, transmission coefficient is 70%, cycle stretch-out 0.2%, variations in transmissivity 70%.
Claims (8)
1. an angle dependency photonic crystal hydrogen gas sensor, it is characterized in that including LASER Light Source, photonic crystal probe and detector, described LASER Light Source becomes to incide after directional light photonic crystal probe through collimating device collimation, the photonic crystal probe back side arranges detector, described LASER Light Source and detector are linkage type
Described photonic crystal probe includes the titanium dioxide ridge type photonic crystal in quartz surfaces growth, and the growth of described titanium dioxide ridge type photonic crystal on side face has one layer of palladium-base alloy.
2. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 1, it is characterised in that the laser after described collimation incides on photonic crystal probe with fixing incident angle.
3. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 2, it is characterised in that described fixing incident angle is photonic crystal resonance angle.
4. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 3, it is characterised in that the TM mould transmission coefficient under photonic crystal resonance angle of the laser after collimation is 0%.
5. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 1, it is characterised in that in described photonic crystal probe, the height of thickness and the titanium dioxide roof type of the cycle of photonic crystal, titanium dioxide layer is adjustable at visible light wave range.
6. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 5, it is characterized in that the cycle of described photonic crystal is 400 nanometers, the thickness of titanium dioxide layer is 150 nanometers to 180 nanometers, and the ridge height of titanium dioxide layer is 15 nanometers to 50 nanometers.
7. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 1, it is characterised in that described palladium-base alloy or be Polarium, or be palladium yttrium alloys.
8. the angle dependency photonic crystal hydrogen gas sensor of one according to claim 7, it is characterised in that the thickness of described palladium-base alloy is 10 nanometers to 100 nanometers.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201620017730.7U CN205384222U (en) | 2016-01-11 | 2016-01-11 | Photonic crystal hydrogen sensor that angle relied on |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424656A (en) * | 2016-01-11 | 2016-03-23 | 中国工程物理研究院流体物理研究所 | Measurement method for photonic crystal hydrogen sensor adopting angle independence |
| CN110389122A (en) * | 2019-09-03 | 2019-10-29 | 中国工程物理研究院流体物理研究所 | A kind of fluorescence enhancement type all-fiber hydrogen sensor based on Meta Materials |
-
2016
- 2016-01-11 CN CN201620017730.7U patent/CN205384222U/en not_active Withdrawn - After Issue
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105424656A (en) * | 2016-01-11 | 2016-03-23 | 中国工程物理研究院流体物理研究所 | Measurement method for photonic crystal hydrogen sensor adopting angle independence |
| CN105424656B (en) * | 2016-01-11 | 2018-04-13 | 中国工程物理研究院流体物理研究所 | A kind of measuring method of angle dependency photonic crystal hydrogen gas sensor |
| CN110389122A (en) * | 2019-09-03 | 2019-10-29 | 中国工程物理研究院流体物理研究所 | A kind of fluorescence enhancement type all-fiber hydrogen sensor based on Meta Materials |
| CN110389122B (en) * | 2019-09-03 | 2022-05-20 | 中国工程物理研究院流体物理研究所 | Fluorescence enhancement type all-fiber hydrogen sensor based on metamaterial |
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Granted publication date: 20160713 Effective date of abandoning: 20180413 |